TW436317B - Dry dehumidifying system, and manufacturing method and supply system of clean air - Google Patents

Abstract

The present invention relates to a three-staged dry dehumidifying system equipped free-rotating rotors with silica gel or metal silicate. The moisture in the air is reduced stage by stage through the three-staged dry dehumidifying system. Clean air with ultra-low dew point below -80 DEG C and gas impurity concentration below 1 ppb is supplied by the system under energy saving conditions.

Description

4 3 63 1 7 V. Description of the invention (1) [Technical field to which the invention belongs 2 The present invention relates to a manufacturing method and cleanliness for supplying clean air to the 5th system :: Dehumidification of air with low dew point: about order processing Air is supplied to the system through free rotation, especially: wet and dry dehumidification system, paper, clean air system :: inside to make the processing air system. Gas manufacturing methods and clean air supply methods have dew points. Therefore, a rotor with self-drying dehumidification structure is used to immerse the silicone in the preparation, and the end surface of the rotor is in a dehumidification area. For example, if the area has been treated with air, the area will be two to regenerate. [Knowledge technology] Generally, the air conditioner dehumidification device can not adapt to the low dew air during cooling. The bee house of the absorbent fluid is composed of the material passing area, that is, the air is turned on while the rotor is rotating, and the water is evaporated by the water during regeneration. In this case, the method of dehumidifying the air in a space where the humidity is not reduced can only reach the point (less than 50 ° c). It is known to make the device or use it in the rotor compartment. In the air, the method of cooling and dehumidifying. For air above 5 ° C, use the compartments such as the chambers where the air on the end faces of suckers, such as dry radon gas bells or zeolites such as gaseous moms, that supply such low-dew-point rotary rotors The shaped area and regeneration area generate dry air by order. When the rotor is moved to a dehumidified area at a high temperature by dehumidifying the adsorption material, the dew point is passed through the rotor under wet conditions. Ascending, allowing low-temperature air, such as air from control, to pass to cool the rotor

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The removal area is provided between the regeneration area and the dehumidification area. With the dry dehumidification using this rotary rotor to the "low dew point situation", because the temperature of the dew point is limited in one stage or single stage, when the lower dew point is obtained, the "known 2 stage type" is about 2 dry dehumidifiers Cascaded into the way the system works. Also, Japanese Patent Publication (Japanese Patent Application Laid-Open No. 1 99621) also discloses an example of using a one-stage rotor to obtain a low dew point by using a single-stage dehumidification device due to inadvertent connection to the duct ^ However, here, The lowest dew point temperature available with conventional devices is about -80. That is, using conventional technology and using a dry-type dehumidifier with a rotating rotor, it is not possible to achieve a dew point temperature below 80 ° C. Therefore, in a method for obtaining so-called ultra-low dew point air below 80 ° C, a method using an adsorption tower called a pressure swing dehumidification method is known. This is a method of compressing the raw air by using a shrinking machine, and once removing the drain in the air, the method of passing the air through the tower containing the adsorbent is stored. According to the method using the pre-treatment device of the cryogenic separation equipment (piant), which is an example of the equipment using this method, the water concentration can be reduced by 10 to 20 ppb (the dew point temperature is -101 to 98.00. For example, in the manufacturing process of semiconductor parts, as the density becomes higher, the pollution caused by gaseous impurities in the clean room becomes a problem. Therefore, for example, high-purity nitrogen is often supplied to the indoors of the manufacturing equipment or the storage room of the wafer. However, Because nitrogen is expensive, it is practically problematic in places where a large amount is required, and it is also not good in terms of operator safety. Therefore, 'recently proposed is the use of so-called chemical free dry air with almost no gaseous impurities. To replace high-purity nitrogen

1_, 43 63 W V. Description of the invention (3) *-("ultra clean technology" Vol. 10 No. 1 (1998)). The technology proposed by the monthly poverty is to fill the above adsorption tower with, for example, silica gel or alumina, and then 'pass the processing air through the adsorption tower to remove 1120 or CO 2 at about room temperature' and Pt (platinum ) Or Pd (palladium) as a catalyst to remove gaseous chemical impurities 'or a method of adsorbing the chemical constituents in the air with an adsorbent (zeolite or alumina, activated carbon) cooled to about _50' or to treat The air is compressed and the catalyst tower is used to remove chemical impurities, and then the water or co2 is removed in the adsorption tower. [Problems to be solved by the invention] However, in this pressure swing dehumidification method, since a large power for compressing air is initially required, and the regeneration of the adsorbent in the adsorption tower must use separately prepared refined air, which consumes a lot of energy, In addition, the equipment is large, and the running cost is high. In the conventional method of producing clean air, the use of Pt or Pd on the catalyst is expensive 'and the catalyst tower is also required, which is not good on the equipment. Moreover, in the low-temperature adsorption method, the adsorbent must be kept at such a low temperature, which consumes a large amount of energy, and the equipment is also large-sized and unsatisfactory. In addition, as for the method of compressing the air, a dedicated machine or the like is required in the production of the compressed air itself. Therefore, of course, the compressed air itself also requires manufacturing costs. As a result, the conventional technique described above requires 1-5 yen / m3 or more in operation cost, which is not satisfactory. The present invention has been conceived in view of the above-mentioned problems, and its object is to

Page 6 436317 V. Description of the invention (4) To provide a dry dehumidification system with an ultra-low dew point of less than 800, which can be realized with less energy than the conventional one, to solve the problem. The purpose of "if according to another aspect of the present invention" is to provide a certain type of adsorbent in the rotor of such a dry dehumidification system to provide clean air with low dew point and less energy consumption than conventional ones. New clean air method and new clean air supply system. [This issue is made for the purpose. The first stage and the second stage dehumidify, and the dehumidified gas passes through the regenerating zone, and its summary is clear. To achieve the low dew point of the air in the room, first dry the air at the place. The end area of the second stage of the free rotor of the first air drop and the upper part of the self-regenerating structure have passed through the third stage of the upper air wet device of the structure. And the third-moving area on the side of the turning surface is moved to the first area to be cleared. The present invention is a system using a dry dehumidification device. It is characterized by having the following structure to allow the processed air to pass freely in three stages. The rotating and dehumidifying dry dehumidifiers are connected in series to form a system. 'The dehumidification device that will dehumidify the dry dehumidifier in the first stage will be the dry dehydration source in the second stage; each of the dry dehumidifiers in the second stage has Order processing office :: The structure that dehumidifies the processed air: The Errutongtong light area is divided into% wet areas and areas, and these areas are arranged to be located in the clear area before reaching the dehumidification area. The second stage dehumidification device dehumidifies 2 ° The air in the c region of the second stage dehumidification device passes through the third and second domain, Λ dry dehumidification

^ 36317 V. Description of the invention (5)-After the air in the regeneration area of the device is mixed, it is led to the regeneration area of the second dry dehumidifier, and the remaining part of the diverted air is led to the second After the air in the dehumidification area of the second stage dry dehumidification device β is passed through the dehumidification area of the second stage dry dehumidification device, a part of the air is diverted to the clearing area of the third stage dehumidification device. And the air passing through the clearing area is led to the regeneration area of the third dry-type dehumidification device, and the remaining part of the divided air is led to the dehumidification area of the third-stage dry-type dehumidification device β a And the air passing through the dehumidification area of the third dry-type dehumidifier is directed to the destination room. In this case, it is also possible that a part of the return air from the destination chamber is structurally mixed with the air before the diversion and passes through the dehumidification area of the second-stage dry dehumidifier. Also, a part of the return air from the destination chamber is structurally mixed with air before the diversion and through the dehumidification area of the first-stage dry dehumidifier. If according to the dry dehumidification system with this structure, “the first stage is to make a 3-stage dry dehumidification device in series to form a system”. In the second stage, the dry dehumidification device will dehumidify the dehumidified air in the first stage. 'Later in the third stage of the dry dehumidification device' can produce ultra-low dew point air below 80. And 'it's not just a series of three-stage dry dehumidifiers' because of the structure ① After the air dehumidified by the first-stage dry dehumidifiers is diverted, a part of it is led to the second-stage dry dehumidifiers Cleared area, and; ② passed the empty area of the cleared area and passed the third stage of dry dehumidification

Page 8 4363 1 7 V. Description of the invention The regeneration area after mixing the air introduced to the regeneration area of the second stage dry dehumidifier device; Except the area ③ The air that will pass the dehumidification area of the second stage dry dehumidifier device A part of the shunt is led to the third stage of the dry dehumidifier and the air passing through the clearing area is led to the regeneration area of the third stage; ⑤ The remaining part of the shunted air is led Go to the third section · The dehumidification area of the dehumidifier. The capacity of the heater that can be used to heat the regeneration air is reduced. In addition, because the humidity of the air used to regenerate the rotor of the second-stage dry dehumidifier is lower than conventional, the rotor itself of the second-stage dry dehumidifier can be increased. Therefore, it is also possible to produce ultra-low dew-point air with energy saving.

Because of the regeneration of the dry dehumidifiers in the second and third stages, the air will be diverted before passing through the rotors of each stage and directly mixed through the clearing area (the second stage dry dehumidifier). The regeneration zone (three-stage dry dehumidifier) can minimize the pressure loss when passing through the rotor. Therefore, a positive pressure separation can be achieved at the entrance of the regeneration area, which will be described in an embodiment described later. Therefore, in the second and third stages < inside the rotor of the dry-type dehumidification device ', the moisture from the outside is prevented from invading and good regeneration is performed, and the dehumidification performance is also prevented from being lowered. In addition, the position of the shunt is not limited to the position before the dry dehumidification area located downstream of the dry dehumidification, which is the dehumidification by the dry dehumidification device.

Page 9 4363 1 7 V. Description of the invention (7) ---- After the domain, as shown in the embodiment of the present invention described later, as long as the milk is directed to the dehumidification area of the dry fishing device, the Enjoy the effect of the present invention that achieves a positive pressure state at the entrance of the regeneration zone 7 ^. According to the other viewpoints of the present invention, a clean air can be proposed. The manufacturing method is a method for manufacturing a clean gas with a concentration of gaseous impurities below 讣, which is characterized by: '\ will pass three stages of processing air through In the freely rotating rotor of silicone or metal silicate, the dry dehumidification device for dehumidifying the air is connected in series to the system. In the second stage, the dry dehumidification device will be lowered in the first stage. 2. The second gas dehumidification treatment, and then in the third stage dry dehumidification device, the air dehumidification treatment in the first stage dry dehumidification device is dehumidified and cleaned. The concentration of gaseous impurities in the supply target room is 1 ppb. The following system is clean and has the following characteristics: ① Dry dehumidification in which the processing air is passed through a rotor with silicone or metal silicon === freely rotating in the structure for 3 stages Set up a series system, in the second stage dry dehumidification device will be in the first stage dry = wet device dehumidification air dehumidification treatment, and in the third stage dry dehumidification device will be in the second stage dry dehumidification device Dehumidification Air dehumidification treatment. * ② The dry dehumidification devices in the second and third stages each have a structure for dehumidifying the treatment air by allowing the treatment second gas to pass through the freely rotating rotor. The passage area of air is divided into dehumidification areas: a production area and a removal area, and these areas are arranged so as to be located in the removal area before the rotor is used to move from the regeneration area to the dehumidification area. The first stage of the dry dehumidifier is dehumidified.

Page 10 4363 1 7 Five 'Explanation (8)-After the flow, a part of it is led to the cleaning area of the second dry dehumidifier' and the air passing through the cleaning area and the third drying After the air in the regeneration area of the dehumidification device is mixed, it is led to the regeneration area of the second ^^ type dehumidification device. The remaining part of the divided air is from the eight-L type to the second stage of the dry dehumidification device. Dehumidification area. ° 々 破 弓 丨 ④ In the structure, the remaining part of the diverted air is transferred to the dehumidification area of a two-stage dry dehumidifier. The image ⑤ After the air passing through the second stage of the dry dehumidification device is diverted, a part of it is led to the cleaning area of the third stage of the dry dehumidification / humidity area, and passes through the removal area. Air is induced ', the regeneration zone of the dry dehumidifier in the installation section' The remaining two points of the diverted air are led to the dehumidification zone of the third dry dehumidifier, ^ A piece of wet, air in the area is introduced for the purpose room. The dehumidification zone that has passed a part of the degassing air is in this system, and the air is mixed from the destination chamber before the diversion and passes through the second stage dry dehumidifier. Part of the return air is mixed in the dehumidification area of the diverted air, and it is constructed before the destination chamber and passed through the first stage of the dry-type depletion device. In addition, the system for supplying gaseous impurity concentrations to the target room and other systems to air has the following characteristics. Xia Zhijie / ① 3 paragraphs of order processing in the structure $ ~ * Wang Gongzha has encountered a spine with free spins of Shi Xijian or acid salt-* „β belongs to broken limbs: :: Γ: The dry dehumidification device for air dehumidification is connected in series to form a system. In the second stage, the teaching dehumidification and even only the eight dehumidification equipment will dry in the first stage. 5 43 63 1 7 The air area in the rotor is moved to the air from the second stage to the first elimination area. The air dehumidification area of the sub-device is placed in a wet treatment and dehumidified dry down, so that the fishing area can be dried down by the second stage. The remaining area of air in the air dehumidification zone after the air is mixed. The three-stage dry gas dehumidification is divided from the dehumidification into the vacant air in the cleaning zone. < Make the processing structure, wet, area use the rod domain. Gas separation section dry section dry section quotation 5. Description of the invention (9) Dehumidification device The dehumidification device will be dry type in the second stage ② The second The segment and the first air pass through the freely located end face side of the rotor and The regeneration area and the self-regeneration area of the scavenger rotation. ③ After the stream is constructed, a part of it is introduced into the area, and the regeneration area of the dehumidification device has passed the regeneration area of the dehumidification device to the third stage of dry dehumidification. ④ In terms of structure, the three-stage dry dehumidification device is located in the wet device dehumidification device before passing through the processing air area of the first-stage air-humidity device. After passing the area, it is led to the remaining air. The lower part is led to the fifth section of the structure which has passed through the third stage of the dehumidification device. The air in the dehumidification area is divided into three parts, and one part is bowed to the third section of dehumidification. The other part of the cleaning area of the device is heated by the regenerative heater and is led to the regeneration area of the second dry-type dehumidification device, and the air passing through the cleaning area and the regeneration area is led to the second waste-type dry dehumidification device. The regeneration area 'the remaining part of the diverted air is led to the destination room. Part-the condition of the wet area' is also structurally derived from the destination room Before the gas flow distribution and the second section by a dry reduction of lower humidity means

Page 12 4363 1 7, V. Description of Invention (ίο) Air mixing, or mixing before passing and passing. If the system is connected in series according to the invention, the dehumidification treatment is performed on the dehumidification device. Moreover, the inspection air passes through the gas-containing impurities contained in the device and is lower than the final lppb. The structure comes from the first stage of the project. The knowledge of the descendants, if the second stage of dry dehumidified air is dehumidified, it can create a dry chamber of the third stage of silicon rubber or metal acid that is contained in the 80-air treatment air. Part of the return air is the air in the dehumidification area of the wet device. First, the 3-stage dry dehumidifier will be fully dry in the first stage, and the ultra-low dew point air below the third stage. It is also known that the gas-like impurities are treated in the rotor of the salt, and the processing air is adsorbed and removed by the metal oxalate, and the outlet of the dehumidification device can be turned into an adsorbent-based silicone or metal silicate provided in the rotor. In this type of dry dehumidification device, zeolite is also added to the metal silicate. However, due to the high regeneration temperature of zeolite and the uniform pore size in the structure, it is not suitable for removing all organic gas components. Therefore, among the metal salts suitable for the present invention, metal stone salts based on stone ball are mentioned. However, the chlorinated meridian cannot be used for the purpose of purifying air because it cannot remove organic gas components. Moreover, it is not just to connect the three-stage dry dehumidifier in series, because in the structure ① after the air dehumidified by the first-stage dry dehumidifier is diverted, a part of it is led to the second-stage dry dehumidifier Clear the area, and; ② the air that has passed through the cleared area and the air that has passed through the regeneration area of the third stage dry dehumidifier 'device are mixed and led to the second stage dry dehumidifier,

< 4363 1 7 The regeneration area of the 5th invention description (11), ③ will pass the downflow of the second stage dry dehumidification device, a part of which will be directed to the third stage dry dehumidification equipment; and ④ passed the The air in the removal area is led to the regeneration area of the device; ⑤ The remaining part of the diverted air is led to the dehumidification area of the dehumidification device. In addition to the heater that can be used to heat the regeneration air, the rotor of the second-stage dry dehumidifier is lower than the conventional one, and the second-stage dry dehumidifier turns higher. Therefore, it is also possible to produce air with energy saving. In addition, because the inlets of the dry dewatering areas in the second and third stages will directly mix the air that is split before passing through the rotors of each stage (the second stage dry dehumidification device) or (the third stage dry dehumidification) Position), can pass through the rotor to a minimum. Therefore, as described above, a positive pressure state is reproduced. Therefore, in the rotors of the second and third stages, it is possible to prevent moisture from entering from the outside. It can also prevent miscellaneous adsorption performance and degradation. By the third stage of the dry-type dehumidification device in the third stage of the dry-type dehumidification device, the Han 7 & H dehumidification device Two air in the dehumidification area of the rotor can be used to provide cleaner air. In the clear area of air separation in the wet area, the third stage of dry dehumidification will reduce the dry capacity of the third stage. The performance of the wet air of the regenerated air lowers the dew point and is a clean wet device, and the dry out of the regenerative outflow of the regenerative outflow through the dry-type implementation of the dry pressure leading to the re-pressurized area, and the excess loss of the H-generating zone and < α Qiao dehumidification | good g 〇 area spear I the most clean bomb

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[Embodiment of the invention] The present invention will be described below with reference to the drawings. The clean air supply system of this embodiment has an impurity degree of 1 ppb or less and a structure of, for example, a semiconductor wafer library S for supply to the object room of the present invention. The outside air 0A, which is the raw air, is a combination of the air after the cooler is first treated with the outside air and the rotor of the dry dehumidifier 10 that passes through the outside air treatment section later. The preferred embodiment. Figure 1 shows the outline of this system, which is a system for storage of clean air at gaseous ° C with ultra-low dew point. After the storage-lead to the duct 1 of the processing system, the ler) 2 is cooled and dehumidified. The cooling and dehumidifying cooler 2 passes through the first clearing area 1 1 c and the cleaned air is mixed with the dry dehumidification device 10 as shown in FIG. 2. The chambers 12 ′ 13 are arranged on both ends of the rotating rotor 11. Of the structure. Each of the chambers 12 and 13 has three partition plates 14, 14, and 14 arranged radially inside, and two of the chambers 0 and 13 are separated into three " correspondingly, " The turning of the rotor 11 shown by the thin arrows in FIG. 2 is divided into three air passing regions, namely, a dehumidification region 1a, a regeneration / regeneration region lib, and a removal region lie. In addition, the outer end surfaces of ^ to 12 are connected to the dehumidification outlet cores of the shaped tubes and the like corresponding to each of these areas, n12b is regenerated, and the clearing :: Hehe etc. In addition, the outer end surfaces of the chamber 1 3 are also connected to the three The areas corresponding to each form a dehumidification inlet 13a, a regeneration inlet 13b, and a purge inlet; [3c. In the rotor 11, some aluminum-zinc is added so that the parent material is impregnated in silicone. That is, it can be used, for example, in a honeycomb structured fiber paper or & porcelain-

436317 V. Description of the invention (13) " '^^ The fine fibers of the fired material impregnate the silica-based compound and mix some Zn and zinc metal silicates, and the fiber should be tightly adhered to the periphery of the fiber. Metal silicon is completely salted. The thickness of the rotor 11 is 400 mm. The rotation speed of the rotor 11 is set to 4 revolutions.

/hour. 'I as shown above' and the air mixed with the clear air of the rotor U of the first stage dry dehumidification device 10 'uses the external air treatment fan 3 to pass through the rotor of the first stage of the dry dehumidification device 1 〇 11 After dehumidifying the region 11a, for example, dehumidify until the dew point temperature is -35 ° C. · The air that has passed through the dehumidification area 11a of the rotor U of the first-stage dry dehumidifier 10 is led to the processing fan 4 and is cooled by the front cooler 5 and then diverted. Part of the air after the shunting is led to the cleaning area 21 c of the rotor 21 of the second stage dry dehumidifier 2 0, and then, as shown later, and the air passing through the regeneration zone 3ib of the second stage dry dehumidifier 30 The mixing is led to the regeneration area 2ib of the rotor 21 of the first-stage dry dehumidifier 20. The remaining part of the divided air is led to the dehumidification area 2la of the rotor 21 of the second-stage dry dehumidification device 20. The second-stage dry dehumidifier 20 has substantially the same structure as the first-stage dry dehumidifier. That is, at the end surface of the rotor 21, the turning direction of the rotor 21 is divided into three air passing areas, namely a dehumidification area 21a, a regeneration area 21b, and a cleaning area 21c, which are the processing areas. The air that has passed the second stage of the dry type = Feng device 20 rotor 21 dehumidification area 21a, for example, dehumidifies until its dew point temperature is a low dew point air of 75 ° C. -The air passing through the dehumidification area of rotor 21 of the second stage dry dehumidifier 20 is passed through to the processing fan 6 and cooled by the front cooler 7

436317 V. Description of the invention (14)-But after the shunt on the upstream side of the rotor 21. A part of the shunted air is bowed to the clearance area 31c of the rotor 31 of the third stage dry dehumidifier 30. The remaining part of the shunted air is led to the dehumidification area 31a of the rotor 31 of the third-stage dry dehumidifier 30. The third-stage dry dehumidifier 30 has substantially the same structure as the first-stage dry dehumidifier 10 and the second-stage dry dehumidifier 20. That is, at the end face of the rotor 31, the turning toward the rotor 31 is divided into three air passage areas *, namely a dehumidification area 31a, a regeneration area 31b, and a cleaning area 31c, which are processing areas. The air that has passed through the dehumidification area 31 a of the rotor 31 of the third-stage dry dehumidification device 降, for example, is dehumidified to a dew point temperature of -9 〇 ～ 丨 丨 丨. 〇 until the ultra-low dew point. The air that has passed through the dehumidification area 31 a of the rotor 31 of the third dry-type dehumidification device 30 is heated by a heating coil (not shown) or cooled by a cooling coil (not shown) as needed. After the desired temperature is reached, it is transferred to the storage room S as the air supply SA through the air supply duct 8 '. After cooling by the pre-cooler 7, it is divided on the upstream side of the rotor 31, and is introduced into the air 31 of the cleaning area 3ic of the rotor 31 of the third-stage dry dehumidifier 30 to cool the rotor 31. After the cooled air is heated by the regeneration heater 41, it is led to the regeneration area 31b of the rotor 31 by the regeneration fan 42, thereby performing the regeneration of the rotor 31. The air passing through the regeneration area 31b of the rotor 31 of the third-stage dry dehumidification device 30 can be used for the regeneration of the rotor 21 of the second-stage dry dehumidification device 20 because of the low humidity and high temperature. In this embodiment, the second stage regenerative heater 44 is used to reheat and the temperature rises. 'However, as described above, the regenerative zone passes through the regeneration zone.

436317 V. Description of invention (15) Because of the low humidity and high temperature, the regenerative heater 44 capacity zone 21: the second one is led to the cleaning area of the rotor 21 of the second dry-type dehumidifier 20 After the preparation, cooling, and cooling of the rotor 21, the regenerative heater 44 is used to heat up and dry it. After mixing, the air is drawn to the regeneration area 2 lb of the rotor 21 of the second stage by the regeneration fan 45. The capacity of the rotor 21 can be reduced. 'Also, the humidity of the gas with jealousy Ϊ gas can be lower than that of the conventional two-stage type. The performance of the rotor 21 of the second stage t * dehumidifier 20 is higher than the conventional one. The air from the outlet machine after the 20 lb regeneration area is reheated by the regeneration heater 46, and then led to the first dry dehumidifier by the regeneration fan 47. The regeneration area nb of the rotor u of 10 is used for the rotor The regeneration of 11 is then exhausted as exhaust gas a. In addition, the above-mentioned purge air that has passed through the purge area 11c of the rotor 11 is relatively low-temperature and low-humidity air. The purge pipe 48 is used to cool the air. One part of 2 is re-cooled and mixed with outside air 0A, and used as processing air. In addition, D1 to D4 in Figure 1 are installed in the duct damper for adjusting the air volume. In addition, 'from the storage room S The return air RA1, Rj \ 2, and RA3 use their respective pairs The return air ducts 51, 52, 53 are respectively mixed with the outside air OA on the upstream side of the outside air treatment cooler, or mixed with the air dehumidified in the dehumidification area 11a of the second stage dry dehumidification device 20. It is free to enter the dehumidification area of each rotor 11, 21, 31. These are selected by the opening and closing of windshields D5, D6, and D7.

Page 18, 43631, V. Description of the invention (16) The clean air supply system of this embodiment is structured as described above, and as shown above, the air after cooling and dehumidification is cooled in the first stage by the outer processing cooler 2 The dehumidification area 1 1 a of the full device 10 dehumidifies, for example, the dew point temperature drops to -35 ° C. Next, the pre-cooler 5 is used to cool and dehumidify, and this time, the dehumidification area 2 1 a of the second-stage dry dehumidifier 20 is used to dehumidify, for example, the dew point temperature is reduced to 75 ° C. Then, the pre-cooler γ is re-cooled and dehumidified, and then the dehumidification area 31a of the third stage dry dehumidifier 30 is dehumidified and the dew point temperature is reduced to −90. 〇-ll0 ° C 。。 0-110 ° c. The air whose dew point temperature is reduced to an ultra-low dew point at YES is heated and cooled as necessary to adjust the temperature, and then supplied to the storage room S as the supply air SA. Further, the experimental results of the purification performance when the clean air supply system of the above embodiment is actually operated, that is, the removal performance of gaseous impurities and the dehumidification performance are shown in the table in FIG. 3. In this table, "specification value" means the value required by the vault s, the dew point temperature is set to less than 100, and the organic gas component and the inorganic gas component are each set to less than lppb. The organic gas component represents the total organic gas component (THC). "Toluene" converted value means that the value used as the reference of the measuring device is converted to toluene (tol uene) °. Also, "BLK Leve 1" means For example, in the case of passing pure nitrogen, etc., and the value measured by the measuring device is equal, it is the actual lower measurement limit of the measuring device actually used. For inorganic gas components, only representative ones are measured. However, in fact, other inorganic gas components also exist, but the concentration in the outside air is low, which is a negligible level. According to this table, first of all, in terms of dehumidification performance, the dry dehydration from the third stage. The dew point temperature of the rotor 31 of the wet device 30 is _ 11 4 ° C, which is much lower than

Page 19 436317

V. Description of the invention (17) So far, one of the dry-type dehumidification systems using rotors cannot do 80X :. In addition, the temperatures at the inlets and outlets of each of the dry dehumidifiers 10, 20, and 30 are shown below. The inlet of the first stage of the dry dehumidifier 10—23 ℃ temperature—5 ° C 'The outlet temperature The inlet of the second stage of the dry dehumidifier 20—the inlet temperature of the third stage of the dry dehumidifier 30—5 ° C, temperature —5 ° C, outlet temperature—7 ° C outlet temperature—6 ° C. Regarding regeneration inlet temperature, both are 20%. Alas. The concentration of the 'organic gas component' is 0.2 ppb, which is the lower measurement limit of the measurement device used. In addition, the concentrations of the inorganic gas components were all 0 lppb or less', and it was confirmed that the removal performance was extremely high. Therefore, it is known that the value commonly referred to as clean and dry air ', that is, the dew point temperature is-丨 〇〇. 〇 ~ —110 ° C 'The gaseous impurity concentration is all up to 1 ppb. In addition, because no catalyst or chemical filter is used, clean air can be continuously produced for a long period of time. In addition, the compressor is not used, or expensive catalysts are used, which also reduces the price. According to the inventors' trial calculations, when the production has the same degree of cleanliness and low dew point, if the present invention is used, it can be manufactured at a price of about 0.5 to less than 1/3 / m3 of conventional technology. Moreover, in this embodiment, 'because the flow is divided before passing through the rotor 2j of the second stage and the rotor 31 of the second stage', each clearing area 2ic is introduced, and then it is mixed with the air passing through the rotor 31 of the third stage and introduced. When the regeneration zone 21b of the rotor 21 in the second stage or the regeneration zone 31b 'of the rotor 31 in the second stage passes through the rotor, the number of times the air passage passes through the rotor is small, and this example suppresses the pressure loss. Therefore, it ’s possible to enter 2 丨 b and 3 丨 b

4 3 63 1 7,.: V. Description of the invention (18) The port achieves a positive pressure state. Compared with, for example, as shown in FIG. 4, after passing through the dehumidification area 31 a of the third stage rotor 3, the shunt is introduced into the clear area 31 c and then heated by the regenerative heater 4 丨, the following results are obtained, Now suppose that the dust loss of the rotor is as follows: 450Pa in the dehumidification area 31a, 500Pa in the regeneration area 31b, and 350Pa in the removal area 31c, and the 'supply air by the processing fan 6' is set when the precooler 7 is passed. When the pressure of the treated air is 55 OPa, in the system shown in FIG. 4, the pressure becomes 100 Pa when it passes the dehumidification and dehumidification area 31a, and then becomes -250? &Amp; 'in the regeneration area 311 when it passes the clearance area 31c. The inlet of) becomes negative pressure. When changing to the m state, moisture may be mixed in from outside, and an ultra-low dew point may not be obtained. — Regarding this point, as shown in FIG. 4, in order to use a system that introduces the air that has passed through the dehumidification area 31 a into the purge area 31 c, it maintains a positive pressure at the inlet of the regeneration area 3 ib, and part of the air that passed the dehumidification area 3 la After re-shunting, it is sufficient to directly introduce the regeneration area 3 1 b, but when doing so, the air that has passed the ultra-low dew point of the dehumidification area 31a is used for regeneration, and the amount of air must be increased, resulting in increased energy consumption. In spite of such a disadvantage, a part of the air passing through the dehumidification area 31a is shunted again to maintain a positive pressure state at the inlet of the regeneration area 31b. At this point, "if according to this embodiment" is also shown in Fig. 5, because the air that has passed through the pre-cooler 7 is diverted before being introduced into the dehumidification area 31 &

Page 21 436317a 5. After the description of the invention (19), the introduction of the clearing area 31c ′ When passing the clearing area 31c, it is 20OPa and still maintains a positive pressure state. Therefore, moisture does not enter the rotor 31 from the outside, and an ultra-low dew point can be suitably achieved. In addition, it is possible to obtain an energy-saving effect by appropriately mixing the return air from the storage tank S and the process air. In addition, for the adsorbed gaseous impurities, the low-boiling point is directly discharged as exhaust gas after separation on the regeneration side, and has no effect on purification performance. As for the high-boiling point, even if there is no separation, the concentration of the high-boiling organic gas is very low, so that it will not be damaged earlier than the lifetime of the rotor. There is no practical problem. In addition, due to the proper mixing and use of the return air from the storage tank S and the process air, this also has a high energy saving effect. Next, a clean air supply system according to another embodiment will be described with reference to FIG. 6. Also, in the figure, the devices indicated by the same symbols as the above embodiments represent the same devices and the like. The β supply system is to regenerate a part of the air in the dehumidification area 3la of the rotor 31 that has passed through the third stage of the dry dehumidifier 30 After being heated by the heater 41, it is led to the regeneration area 31b of the rotor 31, and the remaining part of the air that has passed through the dehumidification area 31a of the rotor 31 is led to the cleaning area 31c. The air that has passed through the two areas is mixed Then, after being heated by the heater 0, it is led to the regeneration zone 21t) of the rotor 2 of the second stage dry dehumidifier 20. Also, a part of the air that has passed through the dehumidification area 21a is led to the clearance area 21c of the rotor 21 in the second stage. In this structured system, it needs to consume more energy than the previously explained embodiment. 'Because the regeneration of the third stage rotor 31 passed the cleanest air in the dehumidification area 31 a of the first stage rotor 31, Get clean

Page 22 4363 17 V. Description of the invention (20) Degrees :: Gas, according to the inventors 'trial calculations, using the system of FIG. 6' can also supply 0.5 yen " gaseous impurity concentration is lPPb The following cleanliness of dry air, In addition, in the above embodiment, the dry-type lowering devices in each section are used in the same structure, but for special use and the second and third sections Duan Zhigan: 20, 30-the same. Even if the air flowing out of the rotor contains particle components, for example, by installing a ULpA converter on the σ side of the rotor 31 in the * three stages, these particles can be removed. In the above-mentioned embodiment, some aluminum and zinc are added to the silicone used on the rotor " hygroscopic material, to constitute a clean air supply system, but lithium vaporized lithium is used on the hygroscopic material used in the rotor 11. In the case of silica gel, zeolite, etc., although the air purification performance is poor, it still functions as a system that supplies ultra-low dew-point air below ~ 80 t. That is, to provide the dryness of the present invention, the dehumidification system = therefore, ultra-low dew point air is needed, but in the case where clean air is not needed, 'K. Use of gasified lithium, silicone, zeolite, etc. on hygroscopic materials That is the effect of the invention] If the dry dehumidification system according to the present invention is used, the dry dehumidification system can be manufactured with less energy than the conventional, and small-sized equipment-a system with ultra-low dew point air fluorine below 80 . In addition, because the rotor of the dry dehumidification system can be maintained at a positive pressure, moisture will not invade from the outside, and it can appropriately supply ultra-low dew point air. 436317 V. Description of the invention (21) According to the present invention, ultra-low dew-point air with a gaseous impurity concentration of less than 1 p'pb can be produced under energy saving. As a result, the operating cost can be greatly reduced. Moreover, expensive catalysts are not required. In addition, because the rotor of the dry dehumidification system can be maintained at a positive pressure, moisture will not invade from the outside, and it is suitable for producing clean and ultra-low dew point air.

Page 24 43 63 1. Brief description of drawings Fig. 1 is an explanatory diagram showing the outline of the structure of a clean air supply system according to an embodiment of the present invention. FIG. 2 is a perspective view showing a rotor portion of a first-stage dry-type dehumidifier used in the clean air supply system of FIG. 1. FIG. Fig. 3 is a graph showing the dew-point temperature and gas component concentration values of the outlet air of the dry-type dehumidifier in each stage when the clean air supply system of Fig. 1 is operated. * Fig. 4 is an explanatory diagram showing the pressure loss at various points of the system that divides the flow through the dehumidification area of the rotor. FIG. 5 is an explanatory diagram showing pressure loss at various points around the third stage of the dry-type dehumidifier of the system of FIG. 1. FIG. Fig. 6 is an explanatory diagram showing the outline of the structure of a clean air supply system according to another embodiment of the present invention. [Description of symbols] 1 0 dry dehumidification device (first stage) 11 rotor 11 a dehumidification area lib regeneration area 11 c clearing area 20 dry dehumidification device (second stage) 21 rotor 2 1 a dehumidification area 21b regeneration area

Page 25 436317 Brief description of the drawings 2 1 c clearing area 30 dry dehumidifier (second stage) 31 rotor 31 a dehumidifying area 31b regeneration area 3 1 c clearing area Dbu D7 windshield S storage

Page 26

Claims (1)

63 / j VI. Application scope of patents * *-A dry dehumidification system that uses a dry dehumidification device to supply a low dew-point air to the objective a. It is characterized by: 3 structurally passing the processing air through a freely rotating rotor The dry-type dehumidification device for dehumidifying the processing air is connected in series to form a system. In the first-stage dry-type dehumidification device, the air dehumidified by the first-stage dry-type dehumidification device is reduced to humidity, and then in the third-stage dry-type dehumidification device. The dehumidification device fills the dry dehumidified air in the second stage; and the dry dehumidification devices in the second and third stages each have a process that allows the processing air to pass through the freely rotating rotor to reduce the processing air. Wet structure < The passage area of the air on the end face side of the rotor is divided into an uptake area, a regeneration area, and a purge area, and these areas are arranged to move from the regeneration area to the dehumidification by the rotation of the rotor The area was located before the production area: ^ ^ Structurally, the air dehumidified in the first stage of the dry dehumidifier was divided, and ^ '-its-part was led to the removal of the second stage of the dry dehumidifier. 7 After the air passing through the clearing area is mixed with the air passing through the regeneration area of the third dry-fall device, it is led to the second z, and the remaining part of the divided air is set; = ### The dehumidification area of the dry dehumidification device; and * The passage of the dehumidification area of the second stage of the dry dehumidification device: after the gas is diverted, a part of it is led to the third stage of the dehumidification device and passes The air that has cleared the area is led to the regeneration zone of the third dry dehumidifier, and the remaining part of the diverted air is led to the dehumidification area of the third dry dehumidifier. Dehumidification Page 27 1 4363 ~ iiiim — /, patent application scope-the air in the area is led to the destination room. 'Dry-type thirst reduction system in the scope of patent application in item 1, where: = on? Part of the return air from the destination chamber-part of the air is mixed with the air passing through the dehumidification area of the first stage dry dehumidifier before the split. In hibiscus 3 /: The dry dehumidification system of the patent application scope item 1 of the 'part' of the return air of the destination chamber is mixed with the air in the dehumidification area of the first stage of the dry dehumidification device before the shunt. \ -A kind of clean air manufacturing method 'is used to produce gas-like impurities clean air below IPPP, which is characterized in that: 3 stages of processing air are passed through a free rotor with silicone or metal silicate to make the processing The air dehumidification dry dehumidification device is connected in series. The system and the virtual dehumidification dry dehumidification device will dehumidify the two-stage dehumidification in the first dry dehumidification device, and then in the third dehumidification device. The second stage of dry dehumidification equipment is dehumidified and cleaned. 5. A clean air supply system for supplying clean air with a concentration of gaseous impurities below PP to the destination room, which is characterized in that: the structure is made to pass the processing air through three stages with silicone or metal silicic acid :: inside The dry type dehumidification equipment that dehumidifies the treated air: install the dehumidification treatment for the air dehumidification treatment, and then dry dehumidification in the third stage: set the air dehumidification place in the second stage dry dehumidification equipment dehumidification treatment : The structure of the dry dehumidification device installed in the first and third stages passes the freely rotating rotor to dehumidify the treated air. The dehumidification area of the second stage dry dehumidification device of the 28th stomach; and the air passing through the dehumidification area of the second stage dry dehumidification device in the structure is shunted, and a part of it is led to the third stage dry dehumidification Wet device 4363} y 6. The patent application scope of the air passing area on the end face side of the rotor is divided into a dehumidification area, a regeneration area, and a clearance area, and these areas are configured to be moved from the regeneration area by the rotation of the rotor. It is located in the removal area before the dehumidification area; after the air dehumidified by the first stage dry dehumidification device is diverted, a part of it is led to the removal area of the second stage dry dehumidification device, and passes through the dehumidification area. After the air in the cleaning area is mixed with the air passing through the regeneration area of the third dry dehumidification device, it is led to the regeneration area of the second dry dehumidification device, and the remaining part of the divided air is led to The clearing area 'and the air passing through the clearing area is led to the regeneration area of the third dry-type dehumidifier, and the remaining part of the diverted air is led to Lower humidity lower humidity means a dry region of the third section, through the lower humidity air is introduced to the region of the object chamber. 6 · The clean air supply system according to item 5 of the scope of patent application, in which a part of the return air from the destination chamber is constructed before the diversion and passes through the dehumidification area of the second stage dry dehumidifier mixing. 7 The clean air supply system according to item 5 of the scope of patent application, in which a part of the return air from the destination chamber is structurally mixed with the air in the dehumidification area that has passed the first dry-type dehumidifier before the diversion. . t, a clean air supply system 'is used to supply clean air with a concentration of gaseous impurities below lppb to its characteristics: Page 29 VI. Scope of patent application: A dry-type dehumidification device that connects the three stages of the processing air through the freely rotating rotor with silicone or metal silicate to make the processing air full is connected in series into a system. The second stage dry dehumidifier will dehumidify the air in the first stage dry dehumidifier, and the third stage dry dehumidifier will dehumidify the air in the second stage dry dehumidifier. ; The dry dehumidifiers in the second and third stages of δHai each have a structure that allows the processing air-gas to dehumidify the processing air through the freely rotating rotor, and the air passing area on the end face side of the rotor is Divided into a dehumidification area, a regeneration area, and a removal area, and these areas are arranged to be located in the removal area before being moved from the regeneration area to the dehumidification area by the rotation of the rotor; After the wet air is diverted, a part of it is led to the cleaning area of the second stage dry dehumidification device, and the air passing through the cleaning area and the second stage dry dehumidification After the air in the regeneration area of the device is mixed, it is led to the regeneration area of the first dry dehumidification device, and the remaining part of the divided air is led to the dehumidification area of the third dry dehumidification device; and The air passing through the dehumidification area of the third stage dry dehumidifier in structure is divided into three parts, of which one part is led to the removal area of the third stage dry dehumidifier, and the other part is heated by a regenerative heater It is then led to the regeneration area of the third dry-type dehumidifier, and the air passing through the clearing area and the regeneration area is led to the regeneration area of the second dry-type dehumidification device. The rest of the diverted air A portion was directed to the destination room. 9 · If the clean air supply system of item 8 of the scope of patent application, In the scope of the patent application of 4363 1 7 ', a part of the return air from the destination chamber is mixed with the air in the dehumidification area of the second stage dry dehumidifier before the divergence. 10. The clean air supply system according to item 8 of the scope of patent application, wherein a part of the return air from the destination chamber is constructed before the diversion and passes the air in the dehumidification area of the first dry dehumidifier. mixing. Page 31