i、新型說明： 【新型所屬之技術領域】 本創作隸屬一種振動之技術領域，異艨而言係指一 種具移動端點衝擊緩衝作用的振動結構，藉以提升振動 的平穩度，且能延長其使用壽命。 【先前技術】 按，振動結構被廣泛的應用於不同領碱之機械6又備 上，如清洗機械或填充機械等，以清洗機械而言，對工 作物提供適當的震動，供將異物抖落或增加清洗液的沖 擊效果，如此不僅可提升清洗的速度，且能提高清洗的 潔淨度，而如用於填充機械，則適當的震動，可*讓填充 物更為充實。因此，前述清洗機械、填充機械等通常會 在適當的部位設置有振動結構。 兀力的银切范構主要係具有一承置工作物之震動 框架所構成’該震動框架的直線往復振動通常利用凸輪 輪的旋轉運動轉換成往復直線運動、又或利用氣 :=的Γ運動等達成，然這類的結構設計係屬硬性 程移動的兩個料上，Π 行程不大，因此行 樣的衝擊停頓，不僅可能造^拉而產生衝擊停頓感，這 裂等】，更會使零組件發生忿損壞【如晶圓破 的損壞，而縮短了機械的使用壽命。，甚至造成組件 換言之，前述的振動結構 能因端點的衝擊停頓現象，i °又'*未臻完善，使其可 壞’而無法滿足實際使用的或機械組件的損 〆，故有進一步改良之必 M432132 要。 緣疋本創作人乃針對前述現有振動結構在使用時 所面臨的^題深人探討，並藉由本創作人多年從事相關 產業的開發經驗，積極尋求解決之道，經不斷努力之研 究與發展2於成功的創作出-種振動結構，藉以能克 服現有因衝4停頓等造成的不便與困擾。 【新型内容】i. Description of the new type: [Technical field to which the new type belongs] This creation belongs to the technical field of vibration. In terms of foreigners, it refers to a vibration structure with the impact buffering effect of the moving end point, so as to improve the stability of the vibration and extend it. Service life. [Previous technology] According to this, the vibration structure is widely used in machinery with different alkalis, such as cleaning machinery or filling machinery. For cleaning machinery, it provides appropriate vibration to the work object for shaking off foreign objects. Or increase the impact effect of the cleaning liquid. This will not only increase the cleaning speed, but also improve the cleanliness of the cleaning. If used for filling machinery, proper vibration can make the filling more substantial. Therefore, the aforementioned cleaning machines, filling machines, etc. are usually provided with vibration structures at appropriate locations. The force of the silver-cut frame is mainly composed of a vibration frame on which the work is placed. 'The linear reciprocating vibration of the vibration frame is usually converted into a reciprocating linear motion using the rotary motion of a cam wheel, or a Γ motion using the air: = When it is reached, however, this type of structural design is on the two materials that are moved hard. The stroke is not large. Therefore, the impact of the pattern may not only cause a sense of impact, but also a crack. Damage to components [such as wafer breakage damage and shorten the life of the machine. In other words, even the components are caused, the aforementioned vibration structure can be stopped due to the impact of the end point, and i ° is 'not perfected so that it can be broken' and cannot meet the actual use or damage of mechanical components, so there is further improvement. Necessary M432132 Yes. The author of this book is a deep discussion of the above-mentioned existing vibration structures when they are in use. Based on the author ’s many years of experience in developing related industries, he actively seeks solutions. Through continuous research and development 2 Yu successfully created a kind of vibration structure, which can overcome the inconvenience and trouble caused by the current 4 pauses. [New content]
因此’本創作之主要目的係在提供—種可降低衝擊 停頓感的振動結構’藉以能提升震動的平穩度，以避免 造成工作物的損傷，且能延長其使用壽命。 又，本創作之另一主要目的係在提供一種結構簡單 的振動結構，藉以能有效簡化結構，而能降低整體的製 作成本。Therefore, ‘the main purpose of this creation is to provide a vibration structure that can reduce the impact of a standstill’ so as to improve the smoothness of the vibration, to avoid damage to the work, and to extend its service life. In addition, another main purpose of this creation is to provide a simple structure vibration structure, which can effectively simplify the structure and reduce the overall production cost.
為此，本創作主要係透過下列的技術手段，來具體 實現上述的各項目的與效能：其可設於一機械設備上， 以提供至少一工作物震動作用，其至少包含有： 一固定座，該固定座具有一供固定用之固定板，再 者固定座於固定板上設有至少一導筒； 一架體’該架體具有相對之一鎖接板及一連動板， 且鎖接板與連動板間設有至少一對應前述導筒之導桿， 令架體可利用該等導桿相對固定座之該等導筒往復直線 滑移； 一膨脹伸縮管，該膨脹伸縮管係利用兩端之連接件 分別鎖設於架體鎖接板及固定座固定板間，該膨脹伸縮 4 連接高壓氣源或液壓源，且該膨脹 =管的長度具有膨脹時縮短、復原時伸長的往復伸縮 透= 述技術手段的具體實現 2縮管的膨脹與否’而改變膨脹伸縮管的長度，:由 於架體鎖接板上，因此可同步作 一可帶動工作㈣：^固定座往復移動，而令震動 4 二如此不僅可大幅簡化 用壽命，進而接動或損壞’而能延長其使 進而k间產品的附加價值，且增進其經濟效益 徵及;本創作的構成、特 配合圖式詳細朗如后干較佳實施例，並 夠具體實施。 時讓热悉該項技術領域者能 【實施方式】 本創作係一種振動結構， 實施例及其構件中，所有關於例=作之具體 底部、上部與下部、以及水垂考右僅 便進行描述’並非限制本創作 ’僅用於方 何位置或空間方向。圖式與說明於任 可在不離開本創作之申枝直 曰中所彳日疋的尺寸，當 體實施例的設計與需求二行=内’根據本創作之具 而關於本創作振動結構之詳細構成，則請參考所附 之圖式，如第一、二及三圖所示，該振動結構可用於一 般清洗機、填充機等機械設備上，如晶圓清洗機等，而 振動結構至少包含有一固定座（10)、一架體（20)及 一膨脹伸縮管（30)所組構而成； 其中固定座（10)具有一固定板（U)，該固定座 (10)之固定板（11)可供固設於一機械設備的機台上 【圖中未示，該固定板（11；)亦可為機台的一部份】， 且固定座（10)之固定板（11)上形成有一向前凸出之 連結片（12)，再者固定座（10)於固定板（H)上設 有至少一供前述架體（20)滑移之導筒（15)，本創作 以分設於連結片（12)兩側之兩導筒（15)為主要實施 例； 而架體（20)具有相對之一鎖接板（21)及一連動 板（22)，且鎖接板（21)與連動板（22)間設有至少 一對應前述固定座（1〇)導筒（15)之導桿（25)，而 本創作以對應滑設於前述兩導筒（15)之兩導桿（25) 為主要實施例，使架體（20)可相對固定座（10)往復 直線滑移； 又膨脹伸縮管（30)係利用兩端之連接件（31、32 )分別鎖設於架體（20)鎖接板（21)及固定座（1〇) 連結片（12)間，該膨脹伸縮管（3〇)的其中一連接件 (32)可連接高壓氣源或液壓源，當高壓氣源或液壓源 ，入時該膨脹伸縮管（30)可產生膨脹現象、且當高壓 氣源或液壓源被導出時則可回復原狀，又該膨脹伸縮管 (30)的長度具有膨脹時縮短、復原時伸長的往復伸縮 作用，從而帶動架體（20)相對固定座（1〇)往復直線 M432132 滑移； 且架體（20)上進一步可供設置一可帶動工作物【 圖中未不】之震動框架（4Q)，該震動框架（州<依 機械設備與工作物之位置及條糾，且震動框架（4〇 )係接設於架體（20)連動板（22)上，相較於鎖設在 連接膨脹伸縮管（3〇)的鎖接板（21)而言，低回 轉端·__力’提升其震動時的平穩度； 藉此，可利用高壓氣源或液壓源選擇性注入戋導出 該膨脹伸縮管（3G)，使膨服伸縮管（30)的長度因膨 脹與否而伸縮，以帶動架體（20)相對固定座（1〇)往 Ϊ滑？觉：令工作物產生震動效果，而組構成-結構簡 早、且震動平穩之振動結構者。 透過則述本創作振動結構之設計，本創作於實際操 作上’係如第二、四及五圖所示，振動結構係利用固定 座（10)之HI定板（11)鎖掣於機械設備【如體用 清洗，】的機台上，並令震動框架⑽承置或連接工 作物Λ【如清洗槽内之晶圓盒】，因此當振動結構的膨脹 伸縮管被依機械設備所設定之頻率及速率選擇性 注入或導ib高壓氣源紐壓料，連接蚊板（⑴連 、、”片（12)與架體（2Q)鎖接板（21)間的膨脹伸縮管 產生膨脹與復原的循環，進而使膨脹伸縮 官的長度產生對應頻率與速率的往復伸縮，由於 該膨脹伸縮管（3Q)的—端固定於固定板（u)連結片 (12)上，而另—端係固定於架體（20)鎖接板（21) i 動架體（2〇)之導桿（25)相對固定 3 (15)往復移動，進而可透過震動框架（ 7 M432132 40)同步帶動工作物產生震動。 统使說明可知，本創作之振動結構相較於傳 統使用凸輪或氣、油缸的振動結構而言 且能使安裝與維修更為容易，而達到降= 同時由於其係利用膨脹伸縮管（30)的膨脹與否來 產生往復直線的震動，_脹伸縮管（30)係屬軟性材 料’所以其在兩端之回轉端點時，可降低其衝擊停頓力 2其震動較傳統者更為平穩，而避免相關組件因長期 震動而鬆動或損壞，以延長其使用壽命； ^ 再者’承如前述由於本創作之振動結構所產生的震 =較傳統者更為平穩，因此可提高本創作振To this end, this creation is mainly to achieve the above-mentioned objects and effectiveness through the following technical means: it can be set on a mechanical device to provide at least one working object vibration, which at least includes: a fixed seat The fixing seat has a fixing plate for fixing, and the fixing seat is provided with at least one guide tube on the fixing plate; a frame body; the frame body has an opposite locking plate and a linking plate, and is locked; At least one guide rod corresponding to the aforementioned guide tube is arranged between the plate and the linkage plate, so that the frame body can use the guide rod to slide back and forth linearly relative to the guide tubes of the fixed seat; an expansion telescopic tube, which uses The connecting pieces at both ends are locked between the frame locking plate and the fixed seat fixing plate. The expansion and contraction 4 is connected to a high-pressure air source or a hydraulic source, and the expansion = the length of the tube has a reciprocation that shortens when expanded and stretches when restored. Telescopic penetration = the specific implementation of the technical means described above. 2 Expansion of the shrinkable tube or not 'to change the length of the expansion telescopic tube .: Due to the locking plate of the frame, it can be synchronized to drive work. ^: The fixed seat moves back and forth. and Vibration 4 Secondly, this can not only greatly simplify the service life, but also connect or damage it, and it can prolong the added value of the product, and improve its economic benefits. The composition of this creation, and the specific drawings are detailed. The post-drying preferred embodiment is sufficient for implementation. Anyone who knows the technical field will be able to implement the present invention. [Implementation] This creation is a vibrating structure. In the embodiment and its components, all the examples = the specific bottom, upper and lower parts, and water drop test will be described. 'Not limiting this creation' is only used for any location or spatial orientation. Schematic and description The size of the sundial that Yu Renke did not leave without leaving the Zhizhi Zhizhong of this creation, the design and requirements of the embodiment of the present two lines = inside 'according to the creation of this creation about the vibration structure of this creation For detailed structure, please refer to the attached drawings. As shown in the first, second and third figures, the vibration structure can be used on general cleaning machines, filling machines and other mechanical equipment, such as wafer cleaning machines, etc., and the vibration structure is at least It comprises a fixed base (10), a frame body (20) and an expansion telescopic tube (30); wherein the fixed base (10) has a fixed plate (U), and the fixed base (10) is used for fixing. The plate (11) can be fixed on a machine equipment [not shown in the figure, the fixing plate (11;) can also be a part of the machine], and the fixing plate of the fixing base (10) ( 11) A forwardly protruding connecting piece (12) is formed on the fixing base (10), and at least one guide cylinder (15) is provided on the fixing plate (H) for the aforementioned sliding body (20) to slide, In this creation, two guide tubes (15) located on both sides of the connecting piece (12) are taken as the main embodiment; and the frame body (20) has an opposite locking plate (21). A linking plate (22), and at least one guide rod (25) corresponding to the guide tube (15) of the fixed seat (10) is provided between the locking plate (21) and the linking plate (22). The two guide rods (25) slidably arranged on the two guide cylinders (15) are the main embodiments, so that the frame body (20) can slide back and forth linearly relative to the fixed seat (10); and the expansion and expansion tube (30) uses two The connecting pieces (31, 32) at the end are respectively locked between the locking plate (21) of the frame body (20) and the connecting piece (12) of the fixing seat (10), and one of the expansion telescopic tubes (30) is connected. The piece (32) can be connected to a high-pressure gas source or a hydraulic source. When the high-pressure gas source or the hydraulic source enters, the expansion and contraction pipe (30) can produce an expansion phenomenon, and when the high-pressure gas or hydraulic source is led out, it can return to its original state. In addition, the length of the expansion and contraction tube (30) has a reciprocating and contracting effect of shortening when expanding and elongating when recovering, thereby driving the frame body (20) to slide to and fro straight M432132 relative to the fixed seat (10); It is further possible to provide a vibration frame (4Q) which can drive the work [not shown in the picture]. The vibration frame (state < The position and correction of the crops, and the vibration frame (40) is connected to the interlocking plate (22) of the frame (20), compared with the locking plate (21) connected to the expansion and expansion tube (30). ), Low-rotation end __force 'improves the smoothness of its vibration; by this, high-pressure air or hydraulic source can be used to selectively inject and export the expansion telescopic tube (3G), so that the expansion telescopic tube ( 30) The length is expanded or contracted due to expansion or not, so as to drive the frame body (20) to slide relative to the fixed seat (10). Feeling: Make the work object have a vibration effect, and the composition-simple structure early, and the vibration is stable. Vibration structure. Through the description of the design of the vibration structure of this creation, the actual operation of this creation is shown in Figures 2, 4, and 5. The vibration structure uses the HI fixed plate (11) lock of the fixed base (10). Stop on the machine of mechanical equipment [such as body cleaning,] and let the vibration frame ⑽ accept or connect the work object [such as the wafer box in the cleaning tank], so when the expansion and expansion tube of the vibration structure is The frequency and rate set by the equipment is used to selectively inject or conduct ib high-pressure gas source button materials to connect mosquitoes The expansion and expansion tube between the (Qianlian ,,) piece (12) and the frame body (2Q) locking plate (21) generates a cycle of expansion and recovery, which in turn causes the length of the expansion and contraction officer to generate reciprocating expansion and contraction corresponding to frequency and rate. Since the one end of the expansion telescopic tube (3Q) is fixed on the fixing plate (u) connecting piece (12), the other end is fixed on the frame body (20) and the locking plate (21) i the moving frame body (20). The guide rod (25) of) is relatively fixed 3 (15) to reciprocate, and then the work piece can be caused to vibrate synchronously through the vibration frame (7 M432132 40). It can be seen from the instructions that the vibration structure of this creation is easier to install and maintain than the traditional vibration structure using cams or gas and oil cylinders, and it achieves a reduction = at the same time, because it uses an expansion telescopic tube (30) To expand or not to generate a reciprocating straight line of vibration, the expansion and contraction tube (30) is a soft material ', so its impact stopping force can be reduced when the end points at both ends of the rotation 2 its vibration is more stable than the traditional one, To prevent the related components from being loosened or damaged due to long-term vibration, so as to prolong its service life; ^ Furthermore, 'the vibration caused by the vibration structure of this creation as described above is more stable than the traditional one, so the vibration of this creation can be improved.
==與速率’如此可讓清洗更為快速、乾淨或填J 馬扎貫。 藉此，可㈣解到本創作為一創意極佳之新型創作 ’除了有效解決習式者所面臨關題，更大幅增進功效 ’且在相同的技術領域中未見相同或近似的產品創作或 ^開使用，同時具有功效的增進，故本創作已符合新型 ^有關「卿性」與「進步性」的要件，乃依法提出 申請新型專利。 【圖式簡單說明】 第一圖：係本創作振動結構之分麻意圖，其顯示本創 作之主要70件態樣及其構成。 第=圖：係本創作振動結構之外觀示意圖。 第三圖：係本創作振動結構之側視剖面示意圖，供說明 8 M432132 其組合後之狀態。 第四圖’係本創作振動結構動作前之前視剖面示意圖 第五圖：係本創作振動結構動作後之前視剖 面示意圖== and rate ’so that cleaning can be faster, cleaner, or filled. In this way, it can be explained that this creation is a new creative creation with excellent creativity. In addition to effectively solving the problems faced by the practitioners, it can greatly improve the efficacy. And there is no identical or similar product creation or similar product creation in the same technical field. ^ It is open to use and has the enhancement of efficacy at the same time, so this creation has already met the requirements of the new type ^ "Qingxing" and "progressiveness", and a new type patent has been filed in accordance with the law. [Schematic explanation] The first picture is the subtle intention of the vibration structure of this creation, which shows the main 70 appearances of this creation and its composition. Figure = This is a schematic diagram of the appearance of the vibration structure of this creation. The third picture: a schematic cross-sectional view of the side of the vibrating structure of this creation, for illustration. 8 M432132 The combined state. The fourth picture ’is a schematic diagram of the front view of the vibration structure before the action. The fifth picture: the schematic diagram of the front view of the vibration structure after the action.
【主要元件符號說明】 (10) 固定座 (12) 連結片 (20) 架體 (22) 連動板 (30) 膨服伸縮管 (32) 連接件 (11)固定板 (15)導筒 (21)鎖接板 (25)導桿 (31)連接件 (40)震動框架[Description of main component symbols] (10) Fixing base (12) Connecting piece (20) Frame body (22) Linking plate (30) Expansion tube (32) Connecting piece (11) Fixing plate (15) Guide tube (21 ) Locking plate (25) guide rod (31) connecting piece (40) vibration frame