TW430947B - Method for forming metal interconnects - Google Patents

Method for forming metal interconnects

Info

Publication number
TW430947B
TW430947B TW87114534A TW87114534A TW430947B TW 430947 B TW430947 B TW 430947B TW 87114534 A TW87114534 A TW 87114534A TW 87114534 A TW87114534 A TW 87114534A TW 430947 B TW430947 B TW 430947B
Authority
TW
Taiwan
Prior art keywords
metal
dielectric
forming
metal interconnects
forming metal
Prior art date
Application number
TW87114534A
Other languages
English (en)
Inventor
Yi-Min Huang
Jr-Jian Liou
Tsuei-Rung You
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW87114534A priority Critical patent/TW430947B/zh
Application granted granted Critical
Publication of TW430947B publication Critical patent/TW430947B/zh

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW87114534A 1998-09-02 1998-09-02 Method for forming metal interconnects TW430947B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW87114534A TW430947B (en) 1998-09-02 1998-09-02 Method for forming metal interconnects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW87114534A TW430947B (en) 1998-09-02 1998-09-02 Method for forming metal interconnects

Publications (1)

Publication Number Publication Date
TW430947B true TW430947B (en) 2001-04-21

Family

ID=21631229

Family Applications (1)

Application Number Title Priority Date Filing Date
TW87114534A TW430947B (en) 1998-09-02 1998-09-02 Method for forming metal interconnects

Country Status (1)

Country Link
TW (1) TW430947B (zh)

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