TW429405B - Method for fabricating capacitor - Google Patents
Method for fabricating capacitorInfo
- Publication number
- TW429405B TW429405B TW88121108A TW88121108A TW429405B TW 429405 B TW429405 B TW 429405B TW 88121108 A TW88121108 A TW 88121108A TW 88121108 A TW88121108 A TW 88121108A TW 429405 B TW429405 B TW 429405B
- Authority
- TW
- Taiwan
- Prior art keywords
- conduction layer
- layer
- conduction
- insulation layer
- patterned
- Prior art date
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
Abstract
This invention is about a kind of method for fabricating capacitor and includes the following procedures. At first, a first conduction layer is formed on substrate, in which the first conduction layer is formed by metal. An insulation layer is formed on top of the first conduction layer. The thickness of insulation layer is smaller than one tenth of the thickness of the first conduction layer and the insulation layer is composed of dielectric material. A second conduction layer is then formed on the insulation layer, in which the second conduction layer is formed by metal. Pattern is then defined on the second conduction layer. The subsequent procedure is to form photoresist pattern to cover the patterned second conduction layer, and part of substrate surface that is adjacent to the patterned second conduction layer. The area of the photoresist pattern is larger than the patterned area of the second conduction layer. Finally, the insulation layer and the first conduction layer are etched.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW88121108A TW429405B (en) | 1999-11-30 | 1999-11-30 | Method for fabricating capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW88121108A TW429405B (en) | 1999-11-30 | 1999-11-30 | Method for fabricating capacitor |
Publications (1)
Publication Number | Publication Date |
---|---|
TW429405B true TW429405B (en) | 2001-04-11 |
Family
ID=21643234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW88121108A TW429405B (en) | 1999-11-30 | 1999-11-30 | Method for fabricating capacitor |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW429405B (en) |
-
1999
- 1999-11-30 TW TW88121108A patent/TW429405B/en not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent | ||
MK4A | Expiration of patent term of an invention patent |