A7 B7 五、發明說明（/) 本發明係關於一種依申請專利範圍第丨項之引文的薄 膜構造的裝置。 〔發明的背景〕 施覆薄膜的印刷方法，舉例而言，係用在具有很大之 影像點構造的「從動式」液晶顯示器，以產生濾色器。 一種液晶顯不器主要由二個平面式平行的基質(玻璃基 質)構成並有設在玻璃基質間的液晶材料，當作光閥，與從 動式液晶顯示器不同者，在主動性液晶顯示器，一般上該 沿觀看方向在後方的基質帶有主動式構件，例如薄膜電晶 體，在前方的基質上，在彩色顯示器的場合，係設有濾色 器’它們在矩陣顯示器的場合係規則地裝入一黑矩陣的窗 孔中。黑矩陣的主要目的在於淸楚地定出一個光學活性(主 動)的面。 依今日的製造狀況，在主動矩陣定位址的液晶螢幕的 場合，將馬賽克式濾色器在數個光刻蝕程序的序列中施加 上去。在此，首先產生黑矩陣，在其窗孔中再在三個先後 相隨的程序步驟中，把濾光器以其原色放入。濾色材料往 往由加了色輪的顏料漆構成，迄今只有在大部分由較粗構 造構成的從動矩陣顯示器才能以廉價的印刷方法產生所需 之濾色器構造，在此一般使用一種平版(Offset)印刷技術’ 這種印刷技術方式，因主動矩陣的一般影像點很小’故不 再能使用。因爲這種印刷技術的準確性就邊緣粗糙性可能 做之最小構造而觀之，是很有限的。基本上’使用凹版印 刷法可得到較佳解析度。一般在所要印刷的剛性表面要用 4__ 1 表紙張尺度顧中國國家標ί (CNS)A4規格（210 X 297公髮) (請先閱讀背面之沒意事項再填寫本頁) "裝---— — — — — 訂·！1線 經濟部智慧財產局員工消費合作社印製 i ^ A7 經濟部智慧財產局員工消費合作社印製 五、發明說明（>) —種止液栓(Tampon)式凹版印刷，但在此方法中，彈性的 止液栓會導致影像扭曲。 〔本發明的目的與優點〕 本發明的目的在提供一種薄膜構造的印刷方法與實施 此方法的裝置，藉之可較廉價地將薄膜構造以充分的準確 度施覆上去。 這種目的係利用申請專利範圍第1項的特徵以及第五 項而達成。申請專利範圍副項中係本發明之有利適宜的進 一步特點。 本發明係由一種薄膜構造如濾色器、液晶顯示器的蓋 矩陣等)的印刷方法著手，用於將該構造印刷到一大致剛性 的基質上(例如一玻璃基質、塑膠基質等）。本發明的方法 的中心思想只在於，此方法包括以下程序： a) 將產生該構造的材料刮到一刻蝕及/或鐫刻的金屬版 上，所要施的構造在該版上呈相反及凹陷方式存在， b) 將所要印刷的基質在印刷前設一軟而可撓性的覆層 ，所用之覆層宜爲一軟的聚醯胺層。 c) 在印刷過程時，在凸版對基質作相關的定位作業後 ，使凸版（Π)與基質接觸，如此，該放入較深處的構造中 的材料就流到所要印刷的基質表面，以形成所要的構造。 利用這印刷技術，可產生高準度的構造。但與止流栓 式印刷方法的情形不同，在轉印時不會有因爲墊緩衝作用 造成的扭曲失真，因爲係直接轉印到基質而不用止流栓。 相反地，依本發明的方式，原本使用之止流栓被留在基質 ___5 故張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -----—---I--- I I ---—訂- - - - - ---- (請先閱讀背面之注$項再填寫本頁} A7 B7 五、發明說明（j) (請先閱讀背面之注意事項再填寫本頁) 上的可撓性軟覆層取代°但這種覆層在印刷過程時比起原 來一般習用的止流栓的變形小得多，如此’就不會發生不 想要的影像失真情事。 爲了製造馬賽克濾色器(例如主動式矩陣定位址之液晶 顯示器所用者），只要用一個附加的濾色器工作，則可將這 種印刷過程以簡單方式對於原色光：紅、綠、藍作重複。 在每次印刷階段之間只須將剛施覆的彩色漆作短暫的乾燥 步驟。 在印刷過程結束後，宜使施覆的彩色漆以及印刷前覆 的覆層（它在印刷過程時要軟且可撓者)硬化，以使產生之 層系統的耐久性改善。 此硬化步驟可利用例如熱或UV照射達成。 利用本發明的方法可製造之典型的層厚度在2〜10微 米之間。 爲了使印刷過程簡單，如果將所要印刷的基質面向下. 亦即所要印刷的那一面朝下，定位在凸版上方，則特別有 利。 經濟部智慧財產局員工消費合作社印製 爲了使基質對凸版儘量地準確定位，故另外提議，故 在基質之後側施真空以防止基質彎曲。 此外，爲了使印刷圖樣均勻，故在印刷過程時，在凸 版與基質接觸時，將基質後側上的壓力增加。 一種實施此方法的裝置包含固定手段，以將要施覆的 基質固定，以及定位手段，以將設有印刷材料的印刷凸版 對於所要施覆的基質定位，並使基質與凸版接觸。 6 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 418163 ^ A7 ____— _ _ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（b) 本發明裝置的設計簡單’故將該固定基質用的固定手 段設成朝下以爲使以覆層的那一邊朝下。 爲了將基質有效地保持住，故該固定手段包含一條環 繞的真空通道，該通道將基質保持在邊緣區域。 依基質是「面朝下」或「面朝上」在此裝置中固定及 定位而定。如果該用於定位之手段以及將基質與凸版接觸 的手段設成使真空或高壓施在基質之後側上，則特別有利 〇 最後一點，該用於定位及將基質與凸版接觸的手段在 印刷過程時作用在基質背側，以提高壓力。 C圖式的說明〕 依本發明方法所製的一實施例示於圖式中，並在以下 說明中配合本發明其他優點及細節詳細說明。 圖式中： 第一圖a〜第一圖d係在實施本發明製造方法時的不 同階段，利用一個示意圖示的凸版，以橫截面顯示，有一 基質，保持成面朝下的方式， 第二圖a〜第二圖i係一基質的橫剖面圖，係在施覆濾 色片以及在傳統光刻蝕程序中的不同程序階段。 〔實施例的說明〕 第二圖a〜i顯示一種供一個用矩陣定位址之液晶顯示 器用的基質(1)，它利用傳統光刻蝕程序設以一馬賽克濾色 器。此程序如以下步驟進行： a)將第一種光敏色層(例如紅色)離心施到基層上。（第 7 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 18 16 3 ^ A7 ________B7___ 五、發明說明（f) 二圖a) (b) 接著將光敏層⑵帶著相關之光罩⑶作照射， (c) 在一顯影程序中，被照射到的構造⑷留下來，（第 二圖c)，反之，未被照射的部分就除去。然後將留下的構 造(4)乾燥。 d)接著，將第二光敏色層(5)(例如綠色)離心上去(第二 圖d)，帶著一相關的光罩(6)作照射(第二圖e)，且顯影步 驟(第二圖f)〔其中照射到的構造(7)留下來〕之後作乾燥， (e)依第二圖g〜i將第三色層(例如藍色)對應地施覆上 去，作構造化，並乾燥，俾在最後完成該馬賽克濾色器(第 二圖i中以橫截面圖表示）。 爲了避免這種甚繁複的程序，該濾色器可利用本發明 的方法依第一圖a〜d產生。 首先，把紅色顏料材料（12)用一刮刀（13)刮到該凸版 (11)中，該凸版以示意表示，對應於濾色構造(例如供紅色 之用)設有開口（10)，刮刀之刮動方向用第一圖a中的箭頭 表不。 將一個基質(13)在如此所充塡的凸版(11)上方調整，在 該基質上所要施覆的下側上施覆上一個軟而可撓性的膜 (14)，例如一聚亞醯胺層。基質（13)利用適當真空手段（15) 保持在「面朝下」的位置。其真空手段舉例而言，包含一 真空槽(16)，以將基質保持在邊緣。此外，該真空手段(15) 設計成使基質(13)被吸住時，形成一室(Π)，其壓力可分別 調整(見第圖b)。 8 --------1 ---- .裝--------—訂----I--|_線 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印« :81 e: : A7 ______B7__ 五、發明說明（t ) 將基質(Π)相對於凸版(11)作調整後，使凸版與基質接 觸(第一圖c)。爲了使基質確實而均勻地倚靠在凸版(11)上 ，此時在室（Π)中並不用真空(低壓）〔此真空在二者接觸之 前係要防止基質向下鼓出所需者〕’而係施一過壓力。當 彩色材料(12)從該充塡之開口或儲孔(Nester)(10)轉到該軟而 可撓的基質(M)上後’可將基質(15)從凸版(11)升起(第一圖 d) 0 要印刷其他顏色(例如綠與藍），則在已印刷之層作乾 燥或硬化步驟後，將上述之印刷過程以簡單方式重複’ 然而，最好，一個製成之層構造〔包含該軟而可撓之 層（14)〕在印刷程序結束後再次作硬化’以改善此層之耐 久性。 〔圖號說明〕 (請先閱讀背面之注意事項再填寫本頁) (1) 基質 (2) 光敏漆層 (3) 光罩 ⑷ 被照射的構造 (5) 光敏漆層 (6) 光罩 (7) 被照射的構造 (10) 開口 01) 凸版 (12) 彩色材料 (13) 基質 9 ^紙張尺度柳+ Μ家標準（CNS)A4規格（210 X 297公釐） I ---— I--I --------1^ A7 4 18 163 _B7 五、發明說明（j ) (14) 軟而可撓的膜 (15) 真空手段 (16) 真空槽 07) 室 ------------- ---I--I I 訂--------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 10 尺度 用家標準（CNS)A4規格^210Ί97公爱^A7 B7 V. Description of the Invention (/) The present invention relates to a device with a thin film structure according to the quotation of the first patent application. [Background of the Invention] The printing method of a coated film is, for example, a "slave type" liquid crystal display having a large image dot structure to generate a color filter. A liquid crystal display is mainly composed of two plane-type parallel substrates (glass substrates) and a liquid crystal material disposed between the glass substrates, which is used as a light valve. Unlike a driven liquid crystal display, in an active liquid crystal display, Generally, the substrate in the rear along the viewing direction is provided with active components, such as thin film transistors. On the front substrate, in the case of color displays, color filters are provided. They are regularly installed in the case of matrix displays. Into the windows of a black matrix. The main purpose of the black matrix is to carefully define an optically active (active) surface. According to today's manufacturing conditions, in the case of LCDs with active matrix positioning, mosaic color filters are applied in a sequence of several photolithography processes. Here, the black matrix is first generated, and the filter is placed in its original color in three successive program steps in its aperture. The color filter material is often composed of a pigment paint with a color wheel. So far, only the driven matrix display composed of a relatively coarse structure can produce the required color filter structure with an inexpensive printing method. Generally, a lithographic plate is used here. (Offset) printing technology 'This printing technology method can no longer be used because the general image points of the active matrix are small'. This is because the accuracy of this printing technique is limited in terms of the smallest possible construction of edge roughness. Basically, a better resolution is obtained by using the gravure printing method. Generally, 4__ 1 sheet size should be used on the rigid surface to be printed. It should be in accordance with China National Standard (CNS) A4 specification (210 X 297). (Please read the unintentional matter on the back before filling in this page) " Packing-- -— — — — — Ordered! Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs i ^ A7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the Invention (>)-a Tampon type gravure printing, but in this method The elastic stopcock will distort the image. [Objective and Advantages of the Present Invention] An object of the present invention is to provide a printing method of a thin film structure and an apparatus for implementing the method, whereby the thin film structure can be applied with sufficient accuracy at a relatively low cost. This objective is achieved by using the features of item 1 and item 5 of the scope of patent application. The sub-item of the scope of patent application is a further advantageous feature of the invention. The present invention starts with a printing method of a thin film structure such as a color filter, a cover matrix of a liquid crystal display, etc., for printing the structure onto a substantially rigid substrate (for example, a glass substrate, a plastic substrate, etc.). The central idea of the method of the present invention is that the method includes the following procedures: a) The material that generates the structure is scraped onto an etched and / or engraved metal plate, and the structure to be applied is in the opposite and recessed manner on the plate. Existing, b) The substrate to be printed is provided with a soft and flexible coating before printing. The coating used is preferably a soft polyamide layer. c) During the printing process, after the relief plate performs related positioning operations on the substrate, the relief plate (Π) is brought into contact with the substrate. In this way, the material placed in the deeper structure flows to the surface of the substrate to be printed. Form the desired structure. With this printing technique, a highly accurate structure can be produced. However, unlike the case of the stopcock printing method, there is no distortion caused by cushioning during transfer, because the stopper is not used because it is directly transferred to the substrate. On the contrary, according to the method of the present invention, the stopcock originally used is left on the substrate ___5. Therefore, the Chinese standard (CNS) A4 specification (210 X 297 mm) is used for the scale. ------------- I --- II ----- Order--------- (Please read the note on the back before filling in this page} A7 B7 V. Description of the invention (j) (Please read the notes on the back before (Fill in this page) instead of the flexible soft coating on °, but this coating has a much smaller deformation during the printing process than the conventional stopcock, so that 'unwanted image distortion will not occur In order to make mosaic color filters (such as those used in active matrix positioning LCD displays), as long as an additional color filter is used, this printing process can be applied to the primary color light in a simple manner: red, green, blue It is only necessary to apply the freshly applied colored paint as a short drying step between each printing stage. After the printing process is finished, the applied colored paint and the coating before printing (it is in the printing process) When it is soft and flexible, it is hardened to improve the durability of the resulting layer system. The hardening step can be achieved by, for example, heat or UV irradiation. Typical layer thicknesses that can be manufactured by the method of the present invention are between 2 and 10 microns. In order to make the printing process simple, if the substrate to be printed is facing downwards, that is, to be printed The side facing down is positioned above the letterpress, which is particularly advantageous. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs in order to position the substrate as accurately as possible on the letterpress, it is also proposed that a vacuum be applied to the substrate to prevent the substrate In addition, in order to make the printed pattern uniform, the pressure on the back side of the substrate is increased when the relief is in contact with the substrate during the printing process. An apparatus for performing this method includes fixing means to fix the substrate to be applied, And positioning means for positioning the printing relief provided with the printing material on the substrate to be applied and bringing the substrate into contact with the relief. 6 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 418163 ^ A7 ____— _ _ B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the invention (b) Device of the invention The design is simple, so the fixing means for fixing the substrate is set to face down so that the side facing the coating faces down. In order to effectively maintain the substrate, the fixing means includes a surrounding vacuum channel, which will The substrate remains in the marginal area. Depending on whether the substrate is "face down" or "face up" fixed and positioned in this device. If the means for positioning and the means for contacting the substrate with the relief are set to a vacuum or High pressure is particularly advantageous on the back side of the substrate. Finally, the means for positioning and contacting the substrate with the relief is applied to the back side of the substrate during the printing process to increase the pressure. C Description of the diagram] According to the invention An embodiment made by the method is shown in the drawings, and is described in detail in the following description with other advantages and details of the present invention. In the drawings: the first diagram a to the first diagram d are different stages in the implementation of the manufacturing method of the present invention, using a schematic relief plate, shown in cross section, a substrate, kept in a face-down manner, The second figure a to the second figure i are cross-sectional views of a substrate, which are at different stages of applying a color filter and in a conventional photolithography process. [Explanation of the embodiment] The second figures a to i show a substrate (1) for a liquid crystal display using a matrix positioning address, which is provided with a mosaic color filter using a conventional photolithography process. This procedure is performed as follows: a) The first photosensitive color layer (for example, red) is centrifuged onto the base layer. (No. 7 (Please read the precautions on the back before filling this page) This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Printed by the Employees ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 18 16 3 ^ A7 ________B7___ V. Description of the invention (f) Second figure a) (b) Next, the photosensitive layer ⑵ is irradiated with the relevant photomask ⑶, (c) In a developing process, the structure irradiated by the light is left, (section The second figure c), otherwise, the unirradiated part is removed. The remaining structure (4) is then dried. d) Next, the second photosensitive color layer (5) (e.g., green) is centrifuged up (second image d), and an associated photomask (6) is used for irradiation (second image e), and the development step (second (F) (fig. 2 where the irradiated structure (7) is left), and then dried, (e) according to the second image g ~ i, the third color layer (for example, blue) is correspondingly applied for structuralization, Then, it is dried, and finally the mosaic color filter is completed (represented by a cross-sectional view in the second figure i). In order to avoid such a complicated procedure, the color filter can be generated according to the first drawings a to d by using the method of the present invention. First, the red pigment material (12) is scraped into the relief (11) with a scraper (13). The relief is schematically shown, and an opening (10) is provided corresponding to the color filter structure (for example, for red). The scraper The scraping direction is indicated by the arrow in the first figure a. A substrate (13) is adjusted over the filled relief (11) thus filled, and a soft and flexible film (14) is applied on the underside of the substrate to be applied, such as a polyarylene Amine layer. The substrate (13) is held in a "face down" position using appropriate vacuum means (15). The vacuum means includes, for example, a vacuum tank (16) to hold the substrate at the edge. In addition, the vacuum means (15) is designed so that when the substrate (13) is sucked, a chamber (Π) is formed, and the pressure can be adjusted separately (see Fig. B). 8 -------- 1 ---- .Install ---------- Order ---- I-- | _line (Please read the precautions on the back before filling this page) This Paper size applies to China National Standard (CNS) A4 (210 X 297 mm) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs «: 81 e:: A7 ______B7__ V. Description of the invention (t) The substrate (Π) relative to the letterpress (11) After adjustment, the relief is brought into contact with the substrate (first figure c). In order to make the substrate lean on the relief (11) surely and evenly, a vacuum (low pressure) is not used in the chamber (Π) at this time [this vacuum is to prevent the substrate from bulging downwards before the two contact] ' And the pressure was applied. When the colored material (12) is transferred from the filling opening or storage hole (Nester) (10) to the soft and flexible substrate (M), the substrate (15) can be raised from the relief (11) ( First image d) 0 To print other colors (such as green and blue), repeat the above-mentioned printing process in a simple manner after the printed layer has been dried or hardened. However, it is better to use one layer The structure [including the soft and flexible layer (14)] is hardened again after the printing process is finished to improve the durability of this layer. [Illustration of drawing number] (Please read the precautions on the back before filling out this page) (1) Substrate (2) Photosensitive paint layer (3) Photomask ⑷ Structure to be irradiated (5) Photosensitive paint layer (6) Photomask ( 7) Structure to be irradiated (10) Opening 01) Letterpress (12) Color material (13) Substrate 9 ^ Paper size willow + M home standard (CNS) A4 specification (210 X 297 mm) I ----- I- -I -------- 1 ^ A7 4 18 163 _B7 V. Description of the invention (j) (14) Soft and flexible membrane (15) Vacuum means (16) Vacuum tank 07) Room ---- --------- --- I--II Order --------- (Please read the precautions on the back before filling out this page) Printed by the Staff Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs10 Standard User Standard (CNS) A4 Specification ^ 210Ί97 Public Love ^