TW417414B - Device and method for developing and etching dry printed circuit board - Google Patents

Device and method for developing and etching dry printed circuit board Download PDF

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Publication number
TW417414B
TW417414B TW88104527A TW88104527A TW417414B TW 417414 B TW417414 B TW 417414B TW 88104527 A TW88104527 A TW 88104527A TW 88104527 A TW88104527 A TW 88104527A TW 417414 B TW417414 B TW 417414B
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TW
Taiwan
Prior art keywords
printed circuit
circuit board
particles
etching
liquid
Prior art date
Application number
TW88104527A
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Chinese (zh)
Inventor
Chin-Hsiang Chen
Yu-Kuang Wang
Hung-Nan Chen
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Wus Printed Circuit Co Ltd
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Application filed by Wus Printed Circuit Co Ltd filed Critical Wus Printed Circuit Co Ltd
Priority to TW88104527A priority Critical patent/TW417414B/en
Application granted granted Critical
Publication of TW417414B publication Critical patent/TW417414B/en

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Abstract

The present invention relates to a device for developing and etching dry printed circuit board, which comprises a first pipe, a second pipe and a nozzle. The first pipe has an end connected to a high pressure gas and another end connected to the nozzle. The second pipe has an end connected to a storage tank of the developing solution or the etching solution, and another end connected to the wall of the first tube. When the high pressure gas is sprayed out of the nozzle, the developing solution or etching solution enters the first pipe via the second pipe to mix with gas, thereby forming high speed developing solution particles or etching solution particles. The high speed developing solution particles or etching solution particles are sprayed to the surface of a printed circuit board via the nozzle. The method of the present invention comprises: (a) forming high speed developing solution particles or etching solution particles from developing solution or etching solution and high pressure gas; (b) spraying the high speed developing solution particles or etching solution particles to the surface of a printed circuit board; and (c) using the high pressure gas to bump off the high speed developing solution particles or etching solution particles aggregated on the surface of the printed circuit board, and using new high speed developing solution particles or etching solution particles to bump on the printed circuit board.

Description

【發明領域】 本發明係有 及方法,特別 電路板表面上 【先前技術】 關於一種印刷 是將顯影液或 之顯影與蝕刻 電路板之乾片 蝕刻液以氣體 裝置及方法。 顯影與蝕刻裝 混合後喷至印 置 刷 蝕:::::路板10,v第一圖所示’其乾片顯影及銅面 1 0矣2 嘴11將大量顯影液或蝕刻液噴灑至印刷電路板 武砧 使該印刷電路板10表面產生化學作用而進行顯影 ^ 4 1 η主該噴嘴11以泵浦將顯影液或蝕刻液喷灑至印刷電 反/面,該顯影液或蝕刻液在印刷電路板1 〇表面分別 =行顯影或蝕刻後,該顯影或蝕刻過之顯影液或蝕刻液12 ^集在印刷電路板1〇表面,因而產生「水池效應」。如第 一圖所示’該顯影或蝕刻過之顯影液或蝕刻液丨2阻礙由噴 嘴U噴麗之新的顯影液或蝕刻液丨3對印刷電路板丨〇表面進 行進一步的顯影或蝕刻作用’而產生水池效應。該水池效γ 應深度深淺不同對新的顯影液或蝕刻液丨3阻礙程度也不同 ’若該水池效應深度越深則新的顯影液或蝕刻液丨3對印刷 電路板10表面進行顯影或姑刻越不易’由於水池效應的顯 景夕液或餘刻液12冰度不一 ’因而造成印刷電路板1〇具有顯 影或蝕刻不均或不全之缺點。由於習用製程主要利用聚集 在印刷電路板1 0上之蝕刻液1 2浸泡該印刷電路板1 〇及水池 效應作用於該印刷電路板1 0,因此,#刻部位越深其水池 效應而降低蝕刻速率越明顯,使該印刷電路板1 0之槽1 4深 度越深則該槽1 4寬度越窄。如第三圖所示,由於蝕刻部位[Field of the Invention] The present invention relates to a method and method, in particular on the surface of a circuit board. [Prior art] A device and method for developing and etching a dry sheet of a circuit board using a developing solution or an etching solution. After the development and etching equipment is mixed, it is sprayed to the printing brush ::::: Road board 10, v The first picture shows the dry film development and copper surface 1 0 矣 2 The nozzle 11 sprays a large amount of developing solution or etching solution to The printed circuit board anvil causes chemical development on the surface of the printed circuit board 10 for development ^ 4 1 η The main nozzle 11 sprays a developing solution or an etching solution onto a printed circuit board by a pump. The developing solution or the etching solution After the surface of the printed circuit board 10 is developed or etched, the developed or etched developing solution or etching solution 12 is collected on the surface of the printed circuit board 10, thus generating a "pool effect". As shown in the first figure, 'The developed or etched developing solution or etching solution 丨 2 prevents the new developing solution or etching solution sprayed from the nozzle U 丨 3 further developing or etching the surface of the printed circuit board 〇 'And produce a pool effect. The pool effect γ should be different in depth and depth to the new developer or etchant. 3 The degree of resistance is also different. 'If the pool effect is deeper, the new developer or etchant is developed. 3 The more difficult the engraving is, 'the unevenness of the ice cream or the icing liquid 12 due to the pool effect' causes the printed circuit board 10 to have the disadvantage of uneven or incomplete development or etching. Since the conventional process mainly uses the etching solution 12 collected on the printed circuit board 10 to soak the printed circuit board 10 and the pool effect acts on the printed circuit board 10, the deeper the # etched part is, the more the pool effect reduces the etching. The more obvious the speed is, the deeper the groove 14 of the printed circuit board 10 is, the narrower the width of the groove 14 is. As shown in the third figure, due to the etched area

第5頁 五、發明說明(2) ----- 越深其水池效應而降低蝕刻速率越明顯,使整個蝕刻部位 在進行蝕刻時,表面的蝕刻速率較高而較深處的蝕刻速率 較低,進而使該印刷電路板10之線路15在蝕刻後,該線路 15之剖面形成一梯形狀,該線路15之剖面具有較大的蝕刻 係數〔Etching Factor〕,其中該蝕刻係數定義為八又/匕 ,該蝕刻係數亦為該線路15斜面斜率之倒數,該蝕刻係數 越大表示水池效應越大,而該蝕刻係數越小則表示水池效 應越小。 有鑑於此,本發明之乾片顯影與蝕刻裝置及方法改良上 述之缺點,其將顯影液或蝕刻液以高壓氣體混合後,形成 高速顯影液顆粒或蝕刻液顆粒噴至印刷電路板表面上,該 印刷電路板表面上進行較均勻的顯影或蝕刻,而顯影液顆 粒或银刻液顆粒與氣體混合’使該顯影液或姓刻液增加氧/ 化強度,以提高蝕刻效率。當該高速顯影液顆粒或蝕刻液 顆粒喷至印刷電路板表面上時,該高壓氣體將先前附著於 該印刷電路板表面上已作用過的顯影液顆粒或蝕刻液顆粒 撞離該印刷電路板表面’而新的高速顯影液顆粒或蝕刻液 顆粒撞擊該印刷電路板表面可促進顯影或蝕刻之化學作用 及減少顯影或蝕刻之製程所需時間。 【發明概要】 本發明主要目的係提供一種印刷電路板之乾片顯影與蝕 刻裝置及方法’其具有顯影或姓刻均勻之功效。 本發明次要目的係提供一種印刷電路板之乾片顯影與蝕 刻裝置及方法,其具有提高顯影或蝕刻效率之功效。5. Description of the invention (2) ----- The deeper the pool effect, the lower the etch rate becomes. When the entire etched part is etched, the surface etch rate is higher and the etch rate is deeper. Low, so that after the wiring 15 of the printed circuit board 10 is etched, the cross-section of the wiring 15 forms a ladder shape, and the cross-section of the wiring 15 has a large etching factor [Etching Factor], wherein the etching coefficient is defined as eight and / K, the etching coefficient is also the inverse of the slope of the 15 slope of the line. The larger the etching coefficient, the larger the pool effect, and the smaller the etching coefficient, the smaller the pool effect. In view of this, the dry sheet developing and etching device and method of the present invention improve the above disadvantages. After mixing the developing solution or etching solution with a high-pressure gas, high-speed developing solution particles or etching solution particles are sprayed onto the surface of the printed circuit board. The printed circuit board surface is subjected to more uniform development or etching, and the developing solution particles or the silver etching solution particles are mixed with a gas to increase the oxidation / oxidation strength of the developing solution or the etching solution to improve the etching efficiency. When the high-speed developing solution particles or etching solution particles are sprayed onto the surface of the printed circuit board, the high-pressure gas collides with the developing solution particles or etching solution particles that have previously acted on the surface of the printed circuit board and hit the surface of the printed circuit board. 'And the impact of new high-speed developer particles or etchant particles on the surface of the printed circuit board can promote the chemical action of development or etching and reduce the time required for the development or etching process. [Summary of the Invention] The main object of the present invention is to provide a dry sheet developing and etching device and method for a printed circuit board, which has the effect of uniform development or engraving. A secondary object of the present invention is to provide a dry sheet developing and etching device and method for a printed circuit board, which have the effect of improving the development or etching efficiency.

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五、發明說明(3) 本發明另一目的係提供一種印刷電路板之乾片顯影與餘 刻裝置及方法,其具有減少顯影或银刻製程所需時間之功 效0 根據本發明之裝置,其主要包含一第一管路、—第二管 路及一喷嘴。該第一管路一端連接一高壓氣體,而另—端 則連接至該噴嘴。該第一管路一端連接一顯影液或姓刻液 之儲槽,而另一端則連接至該第一管路之管壁形成該第一 管路與第二管路通路。當該高壓氣體由該喷嘴喷射時,該 第一管路與第二管路之間產生一壓力差,由於該第二管^ 内壓力大於該第一管路内,使該顯影液或钱刻液由該第二 管路進入該第一管路與該高壓氣體混合後形成高速顯影液 顆粒或姓刻液顆粒,該高速顯影液顆粒或姓刻液顆粒再由 該喷嘴喷射至一印刷電路板之表面上D < 根據本發明之方法,其主要步驟包含:a、將顯影液或 姓刻液與南壓氣體形成高速顯影液顆粒或蝕刻液顆粒;b 、將該高速顯影液顆粒或蝕刻液顆粒噴射至一印刷電路板 之表面上;c、將聚集於該印刷電路板之表面上之顯影液 顆粒或银刻液顆粒以該高壓氣體撞離該印刷電路板之表面 ’再將新的顯影液顆粒或蝕刻液顆粒撞擊該印刷電路板之 表面上。 # 5於本發明將顯影液或蝕刻液以高壓氣體混合後,形成 问、顯景彡液顆粒或蝕刻液顆粒喷至印刷電路板表面上,該 印刷電1 i t 板表面上進行較均勻的顯影或蝕刻,而顯影液顆 ;, 刻液顆粒與氣體充分混合,使該顯影液或蝕刻液增V. Description of the invention (3) Another object of the present invention is to provide a dry film developing and after-etching device and method for a printed circuit board, which has the effect of reducing the time required for developing or silver engraving process. It mainly includes a first pipeline, a second pipeline and a nozzle. One end of the first line is connected to a high-pressure gas, and the other end is connected to the nozzle. One end of the first pipeline is connected to a storage tank for a developing solution or a nickname, and the other end is connected to a wall of the first pipeline to form the first pipeline and the second pipeline passage. When the high-pressure gas is sprayed from the nozzle, a pressure difference is generated between the first pipe and the second pipe. Since the internal pressure of the second pipe is greater than the pressure in the first pipe, the developer or money is engraved. The liquid enters the first pipeline from the second pipeline and is mixed with the high-pressure gas to form high-speed developing solution particles or surnamed liquid particles, and the high-speed development solution particles or surnamed liquid particles are ejected from a nozzle to a printed circuit board. D < The method according to the present invention, the main steps of which include: a. Forming a developing solution or a nicking solution with a south pressure gas to form high-speed developing solution particles or etching solution particles; b, the high-speed developing solution particles or etching The liquid particles are sprayed onto the surface of a printed circuit board; c. The developer particles or silver engraved liquid particles collected on the surface of the printed circuit board are impinged from the surface of the printed circuit board with the high-pressure gas, and then the new The developing solution particles or the etching solution particles hit the surface of the printed circuit board. # 5 In the present invention, after the developing solution or the etching solution is mixed with a high-pressure gas, the particles of the liquid crystal or the etching solution are sprayed onto the surface of the printed circuit board, and the printed circuit board is subjected to more uniform development. Or etching, and developing solution particles ;, the etching solution particles and the gas are sufficiently mixed to increase the developing solution or the etching solution

第7頁 以提南钱刻 電路板表面 印刷電路板 該印刷電路 蝕刻液顆粒 應0 明之—L述和 特舉本發明 下。 用顯影與蝕 用顯影液或 意圖; 刷電路板線 發明較佳實 發明較佳實 刷電路板表 路板 或蝕刻液 其他目 較佳實 刻裝置 钱刻液 路之剖 施例顯 施例顯 面之示 五、發明說明(4) 加氧化強度, 附著於該印刷 液顆粒撞離該 刻液顆粒撞擊 顯影液顆粒或 免產生水池效 【圖式說明】 為了讓本發 顯特徵,下文 作_細說明如 第1圖:習 第2圖:習 示 苐3圖:印 第4圖:本 及 第5圖:本 印 [圖號說明】 10 印刷電 顯影液 Π 槽 2 0 印刷電路板 22 第二管路 H沾該高壓氣體將先前 再將新的顧吾厂六 触到 幻顯影液顆粒或蝕 ,其消除作用過之該 該印刷電路板表面上而避 的、特徵、和優點能更明 施例,並配合所附圖式, 之示意圖; 聚集於印刷電路板表面之 面圖; ^ 影與蝕刻裝置之示意圖; 影分子或蝕刻分子喷射於 意圖。 11 喷嘴 13 顯影液或蝕刻液 15 線路 21 第一管路 23 喷嘴 u 玉、發明說明(5) 24 顯影 2 6 上表 【實施例說 本發明方 體上之製程 佳實施例主 裝置。 本發明較 或姓刻液與 b、將該南 板之表面上 液顆粒或姓 面,再將新 之表面上, 可減少顯影 請再參照 液顆粒或蝕刻液顆粒 面 明】 法及裝置 ’為了使 要分別列 可應用於各 本發明技術 舉顯影及蝕 2 5 乾片或銅層 27 槽 種需要以藥水作用於一物 内容易於了解,本發明較 刻製程說明本發明方法及 佳實施例 高壓氣體 速顯影液 ;c、將 刻液顆粒 的顯影液 由於其可 或姓刻製 第四圖所 、一第二 第一管路21 端連接一高壓氣體, 管路22 —端連接一顯 接至該第一管路21之 高壓氣體 板2 0表面 射時,該 努力定律 通路,使該 一印刷電路 該喷嘴23喷 壓力差〔白 之方法主要 形成高速顯 顆粒或银刻 聚集於該印 以該高壓氣 顆粒或银刻 消除習用製 程所需時間 示,本發明 管路22及一 而另一端則 影液或餘刻 營壁形成該 及顯影液或 上。當該高 步驟包 影液顆 液顆粒 刷電路 體撞離 液顆粒 程所產 含:a、將 粒或姓刻液 喷射至一印 板之表面上 該印刷電路 撞擊該印刷 生之水池效 顯影液 顆粒; 刷電路 之顯影 板之表 電路板 應,且 較佳實施例主要包含一 喷嘴23 連接至該喷嘴2 3 敍刻液 壓氣體 第一管路21與第二 〕,由於該第二管 該第一管路2 1 — 該第二 液之儲槽,而另一端則連 管路22 喷射至 經該第一管路2 1由 第一管路21與第二 由該噴嘴23 管路22之間 路22内壓力 產生一 大於該Page 7 Carved on the surface of a circuit board with printed circuit board The printed circuit board The printed circuit etchant particles should be clear from the description of the invention. Use developing solution or developing solution or intent; Brush circuit board line invention is better. Invention is better. Brush circuit board surface board or etching solution is better. Other examples are better. Aspect 5: Description of the invention (4) Adding oxidation strength, the particles attached to the printing liquid collided with the particles of the liquid liquid and collided with the particles of the developing liquid, or the pool effect was avoided. [Schematic description] In order to make this feature obvious, the following is _ The detailed description is as shown in the first picture: the second picture: the second picture: the third picture: the fourth picture: the book and the fifth picture: the first picture [illustration of the drawing number] 10 printed electric developer Π tank 2 0 printed circuit board 22 The second pipeline H contacting the high-pressure gas will previously touch the new Guwu factory to the magic developing solution particles or erosion, and its elimination, characteristics, and advantages that are avoided on the surface of the printed circuit board will be clearer. A schematic view of the embodiment and the accompanying drawings; a plan view gathered on the surface of a printed circuit board; a schematic view of a shadow and etching device; a shadow molecule or an etching molecule is sprayed on the intention. 11 Nozzle 13 Developer or etching solution 15 Circuit 21 First line 23 Nozzle u Jade, description of the invention (5) 24 Development 2 6 The above table [Examples] The process of the invention is the main device of the preferred embodiment. The present invention compares the engraving liquid with b, and the liquid particles or surname surface on the surface of the south plate, and then the new surface can reduce the development. Please refer to the liquid particle or etching liquid particle surface again. In order to be applicable to each of the techniques of the present invention, the development and etching of 2 5 dry film or copper layer 27 grooves need to use a potion to act on an object. The content is easy to understand. The process of the present invention illustrates the method and the preferred embodiment of the invention. Gas-speed developing solution; c. Because the developing solution of the engraved liquid particles can be engraved as shown in the fourth figure, a second first pipe 21 is connected to a high-pressure gas at the end, and a display is connected to the end of the pipe 22 to When the high-pressure gas plate 20 of the first pipeline 21 is shot, the law of effort makes the pressure difference of the nozzle 23 of the printed circuit [the white method mainly forms high-speed visible particles or silver engraving gathered on the printed The time required for the conventional process of eliminating high-pressure gas particles or silver engraving is shown. In the pipeline 22 and the other end of the present invention, the shadow liquid or the remaining camp wall forms the and developing liquid. When the high-step enveloping liquid particle liquid particle brush circuit body collides with the liquid particle, the product contains: a. Spraying particles or surname engraving liquid on the surface of a printing plate, the printed circuit impacts the printing water tank developing solution Particles; the circuit board of the developing board of the brush circuit should be, and the preferred embodiment mainly includes a nozzle 23 connected to the nozzle 23. The first line 21 and the second line of hydraulic gas are described. A pipeline 2 1 — the second liquid storage tank, and the other end is sprayed with the pipeline 22 between the first pipeline 21 and the second pipeline 23 through the first pipeline 21 The pressure in the circuit 22 produces a pressure greater than

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第一管路21内,使該顯影液或蝕刻液由該第二管路22進入 該第一管路2 1與該高壓氣體混合後形成高速顯影液顆粒或 蝕刻液顆粒24,該咼速顯影液顆粒或蝕刻液顆粒24再由該 喷嘴23噴射至-印刷電路板2{}之表面±,該高速顯影液顆 粒或蝕刻液顆粒24以由上往下方式喷射至該印刷電路板2〇 之表面上。由於該顯影液顆粒或蝕刻液顆粒不斷均勻的被 喷射在該印刷電路板表面上,而已作用附著於該印刷電路 板表面上之該顯影液顆粒或蝕刻液顆粒則不斷被高壓氣翘 撞離該印刷電路板表面,使該印刷電路板表面與該顯影液 顆粒或蝕刻液顆粒作用均勻,使本發明具有顯影或蝕刻均 句之功效。當該顯影液或蝕刻液與高壓氣體混合時,氣體 促進顯影液顆粒或蝕刻液顆粒氧化,因而形成增加氧化強 度之顯影液顆粒或蝕刻液顆粒而具有提高蝕刻效率。_ 請再參照第五圖所示’該顯影液顆粒或蝕刻液顆粒24 嘖·嘴23噴射至一印刷電路板2〇之乾片或銅層25後,該顯影 液顆粒或蝕刻液顆粒24進行顯影或蝕刻該乾片或銅層25之 一上表面26及數個槽27,該顯影液顆粒或姑刻液顆粒24作 用後附著在該乾片或銅層25之一上表面26及數個槽27,而 再由該喷嘴2 3喷射之高壓氣體則將附著之該顯影液顆粒或 蝕刻液顆粒2 4撞擊,使該顯影液顆粒或蝕刻液顆粒2 4被撞 離該乾片或銅層25之一上表面26及數個槽27,因此,當該 喷嘴23不斷噴射時’該高壓空氣不斷帶來新的顯影液顆粒 或蝕刻液顆粒24,而已作用完附著在該印刷電路板2〇則不 斷被撞離該印刷電路板20 ’以致不會發生習用製程所產生In the first pipeline 21, the developing solution or etching solution is allowed to enter the first pipeline 21 from the second pipeline 22 and mixed with the high-pressure gas to form high-speed developing solution particles or etching solution particles 24. The rapid development The liquid particles or etching solution particles 24 are sprayed to the surface of the printed circuit board 2 by the nozzle 23, and the high-speed developing solution particles or the etching solution particles 24 are sprayed to the printed circuit board 2 from top to bottom. On the surface. Since the developing solution particles or etching solution particles are continuously and uniformly sprayed on the surface of the printed circuit board, the developing solution particles or etching solution particles that have been attached to the surface of the printed circuit board are constantly being blown away by the high pressure gas. The surface of the printed circuit board makes the surface of the printed circuit board interact with the particles of the developing solution or the particles of the etching solution uniformly, so that the invention has the effect of uniform development or etching. When the developing solution or the etching solution is mixed with a high-pressure gas, the gas promotes the oxidation of the developing solution particles or the etching solution particles, thereby forming the developing solution particles or the etching solution particles with an increased oxidation strength, thereby improving the etching efficiency. _ Please refer to the fifth figure again. 'The developer particles or etchant particles 24 啧 · After the nozzle 23 is sprayed onto a dry piece or copper layer 25 of a printed circuit board 20, the developer particles or etchant particles 24 are processed. Develop or etch the upper surface 26 and several grooves 27 of one of the dry sheet or copper layer 25. The developing solution particles or etch solution particles 24 are attached to the upper surface 26 and several of one of the dry sheet or copper layer 25 after the action. Groove 27, and the high-pressure gas sprayed from the nozzle 23 will strike the developing solution particles or etching solution particles 24, causing the developing solution particles or etching solution particles 24 to be knocked off the dry sheet or copper layer 25 is one of the upper surface 26 and several grooves 27. Therefore, when the nozzle 23 is continuously ejected, 'the high-pressure air constantly brings new developer particles or etchant particles 24, and it has finished attaching to the printed circuit board 2. Is constantly being smashed away from the printed circuit board 20 'so that the conventional process does not occur

第10頁 五、發明說明(7) 之水池效應,往乾片或銅層25之一上表面26及數個槽”撞 擊之該顯影液顆粒或蝕刻液顆粒24則較習用喷灑之顯影液 或钱刻液具有促進顯影或蝕刻作用。 凊再參照第二及五圖所示,習用製程由於受到水池效應 影響,餘刻部位越深其水池效應而降低蝕刻速率越明顯, 使該印刷電路板1 〇之槽丨4深度越深則該槽丨4寬度越窄而具 有較大之敍刻係數。本發明姓刻液顆粒2 4直徑小於該印刷 電路板20之槽27 ’因而該蝕刻液顆粒24可直接不斷進入該 槽2 7進行蝕刻,已作用之該蝕刻液顆粒2 4則可被高壓氣體 撞離該槽27,使該槽27不發生水池效應,因而具有較佳钱 刻效果而使該槽27之壁面具有垂直斜率,也就是具有較小 之蝕刻係數。 ^ 雖然本發明_已以前述較佳實施例揭示,然其並非用以限 定本發明’任何熟習此技藝者,在不脫離本發明之精神和 範圍内,當可作各種之更動與修改,因此本發明之保護範\ 圍當視後附之申請專利範圍所界定者為準。Page 10 V. Description of the invention (7) The pool effect. The developing solution particles or etching solution particles 24 which hit the upper surface 26 and several grooves of one of the dry sheet or the copper layer 25 are compared with the conventionally sprayed developing solution. Or the engraving liquid has the effect of promoting development or etching. 凊 Referring to the second and fifth figures, the conventional process is affected by the pool effect. The deeper the remaining part, the more the pool effect reduces the etching rate, which makes the printed circuit board. The groove of 10 has a deeper depth, and the width of the groove is narrower and has a larger engraving coefficient. The diameter of the etching liquid particles 24 in the present invention is smaller than that of the groove 27 of the printed circuit board 20, and thus the etching liquid particles 24 can directly enter the slot 27 for etching, and the etching solution particles 24 that have been applied can be hit by the high-pressure gas away from the slot 27, so that the slot 27 does not have a pool effect, so it has a better money carving effect and makes The wall surface of the groove 27 has a vertical slope, that is, has a smaller etching coefficient. ^ Although the present invention has been disclosed in the foregoing preferred embodiment, it is not intended to limit the present invention to anyone skilled in the art, without departing from The essence of the invention And the range, as defined by the modifications and can be variously modified so that the protective scope of the present invention \ attached around when the range of the patent, whichever view.

第11頁Page 11

Claims (1)

顯影與蝕刻裝置,其包含: 接該高壓氣體而另一端連接該 〜種印刷電路板之乾片 〜高壓氣體; 〜噴嘴; 第一管路,其一端連 噴嘴; 液體’其具有化學作用;及 第二管路,其一端連接該液體而另一端連接該第一 S路形成往該喷嘴之—通路; 因而當該高壓氣體經該第一管路由該喷嘴喷射時,詨 ,體經該第二管路進入該第一管路,而該液體與高 氣體在該第一管路内行成液體顆粒,該液體顆粒 該噴嘴喷射。 φ 依申請專利範圍第1項所述之印刷電路板之乾 與飯刻裝置’其中該液體為顯影液D 顯影 、依申請專利範圍第1項所述之印刷電路板之乾 與银刻裝置’其中該液體為蝕刻液。 顯影 、依申請專利範圍第1項所述之印刷電路板之乾片 與飯刻裝置*其中該液體分子以該喷嘴由上往顯影 喷射β 、一種印刷電路板之乾片顯影與蝕刻方法,其包 步驟: 下列 a. 將液體與高壓氣體形成高速液體顆粒; b. 將該高速液體顆粒喷射至一印刷電路板之表面上. c. 將聚集於該印刷電路板之表面上之液體顆粒以# ’及A developing and etching device comprising: connected to the high-pressure gas and the other end connected to the dry piece of the ~ printed circuit board ~ high-pressure gas; ~ a nozzle; a first pipeline having one end connected to the nozzle; a liquid 'which has a chemical action; and The second pipeline has one end connected to the liquid and the other end connected to the first S channel to form a passage to the nozzle; therefore, when the high-pressure gas is sprayed through the first tube to the nozzle, the body passes through the second The pipeline enters the first pipeline, and the liquid and high gas form liquid particles in the first pipeline, and the liquid particles are sprayed by the nozzle. φ Dry and engraving device of printed circuit board according to item 1 of the scope of the patent application 'wherein the liquid is a developing solution D for development, dry and silver engraving device of printed circuit board according to item 1 of the scope of the patent application' The liquid is an etching liquid. Development, dry film and food engraving device for printed circuit boards according to item 1 of the scope of application patents * wherein the liquid molecules are ejected from the nozzle with a nozzle from the top to the development, a dry film development and etching method for printed circuit boards, which The package steps are as follows: a. The liquid and the high-pressure gas are formed into high-speed liquid particles; b. The high-speed liquid particles are sprayed onto the surface of a printed circuit board. C. The liquid particles gathered on the surface of the printed circuit board are # 'and 第12頁Page 12 第13頁Page 13
TW88104527A 1999-03-20 1999-03-20 Device and method for developing and etching dry printed circuit board TW417414B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110113882A (en) * 2019-05-07 2019-08-09 四川海英电子科技有限公司 The etching production line and engraving method of new-energy automobile printed circuit board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110113882A (en) * 2019-05-07 2019-08-09 四川海英电子科技有限公司 The etching production line and engraving method of new-energy automobile printed circuit board

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