TW403002U - Chip protecting ring of grinding head of chemical/mechanical grinder - Google Patents

Chip protecting ring of grinding head of chemical/mechanical grinder

Info

Publication number
TW403002U
TW403002U TW86214921U TW86214921U TW403002U TW 403002 U TW403002 U TW 403002U TW 86214921 U TW86214921 U TW 86214921U TW 86214921 U TW86214921 U TW 86214921U TW 403002 U TW403002 U TW 403002U
Authority
TW
Taiwan
Prior art keywords
chemical
grinding head
protecting ring
mechanical grinder
chip protecting
Prior art date
Application number
TW86214921U
Other languages
Chinese (zh)
Inventor
Yun-Bang Chiou
Jr-Chiang Yang
Peng-Yi Peng
Jiun-Yuan Wu
Jian-Shing Lai
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW86214921U priority Critical patent/TW403002U/en
Priority to US08/959,518 priority patent/US5944593A/en
Priority to JP9313136A priority patent/JPH1190819A/en
Priority to DE19839086A priority patent/DE19839086B4/en
Priority to FR9810824A priority patent/FR2767735B1/en
Priority to JP10246219A priority patent/JP3067741B2/en
Priority to GB9820209A priority patent/GB2342605B/en
Priority to GB9920572A priority patent/GB2344302B/en
Priority to GB9920574A priority patent/GB2345257B/en
Priority to GB9920573A priority patent/GB2344303B/en
Priority to US09/157,041 priority patent/US6241582B1/en
Priority to NL1010252A priority patent/NL1010252C2/en
Priority to US09/426,937 priority patent/US6293850B1/en
Priority to US09/425,454 priority patent/US6234876B1/en
Priority to US09/425,130 priority patent/US6183350B1/en
Publication of TW403002U publication Critical patent/TW403002U/en
Priority to FR0011872A priority patent/FR2797603B1/en

Links

TW86214921U 1997-09-01 1997-09-01 Chip protecting ring of grinding head of chemical/mechanical grinder TW403002U (en)

Priority Applications (16)

Application Number Priority Date Filing Date Title
TW86214921U TW403002U (en) 1997-09-01 1997-09-01 Chip protecting ring of grinding head of chemical/mechanical grinder
US08/959,518 US5944593A (en) 1997-09-01 1997-10-28 Retainer ring for polishing head of chemical-mechanical polish machines
JP9313136A JPH1190819A (en) 1997-09-01 1997-11-14 Polishing head retaining ring of chemical-mechanical polishing machine
DE19839086A DE19839086B4 (en) 1997-09-01 1998-08-27 Retaining ring for a chemical mechanical polishing apparatus and chemical mechanical polishing apparatus therewith
FR9810824A FR2767735B1 (en) 1997-09-01 1998-08-28 CHEMICAL MECHANICAL POLISHING MACHINE AND METHOD AND RETAINING SLEEVE USED IN THIS MACHINE
JP10246219A JP3067741B2 (en) 1997-09-01 1998-08-31 Chemical mechanical polishing machine and manufacturing method using the polishing machine
GB9920572A GB2344302B (en) 1997-09-01 1998-09-16 Chemical-mechanical polishing machine and retainer ring thereof
GB9820209A GB2342605B (en) 1997-09-01 1998-09-16 Chemical-mechanical polishing machine and retainer ring thereof
GB9920574A GB2345257B (en) 1997-09-01 1998-09-16 Chemical-mechanical polishing method and fabricating method
GB9920573A GB2344303B (en) 1997-09-01 1998-09-16 Chemical-mechanical polishing machine and retainer ring thereof
US09/157,041 US6241582B1 (en) 1997-09-01 1998-09-18 Chemical mechanical polish machines and fabrication process using the same
NL1010252A NL1010252C2 (en) 1997-09-01 1998-10-05 Retaining ring for use in a chemical mechanical polishing machine and manufacturing process using it.
US09/426,937 US6293850B1 (en) 1997-09-01 1999-10-22 Chemical-mechanical polish machines and fabrication process using the same
US09/425,454 US6234876B1 (en) 1997-09-01 1999-10-22 Chemical-mechanical polish machines and fabrication process using the same
US09/425,130 US6183350B1 (en) 1997-09-01 1999-10-22 Chemical-mechanical polish machines and fabrication process using the same
FR0011872A FR2797603B1 (en) 1997-09-01 2000-09-18 CHEMICAL-MECHANICAL POLISHING MACHINE AND METHOD AND RETAINING SLEEVE USED IN THIS MACHINE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW86214921U TW403002U (en) 1997-09-01 1997-09-01 Chip protecting ring of grinding head of chemical/mechanical grinder

Publications (1)

Publication Number Publication Date
TW403002U true TW403002U (en) 2000-08-21

Family

ID=21628532

Family Applications (1)

Application Number Title Priority Date Filing Date
TW86214921U TW403002U (en) 1997-09-01 1997-09-01 Chip protecting ring of grinding head of chemical/mechanical grinder

Country Status (1)

Country Link
TW (1) TW403002U (en)

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model