401334 經濟部中夬標準局貝工消費合作社印製 A7 _____B7五、發明説明（1 ) 本發明係有關一種衝製積體微細物之衝頭模具之製造方 去’尤指一種首先利用微影技術（photolithography )，將光 源透過一具有該積體微細物透光輪廓構形之光罩而照射於 基板上之一層光阻，並經顯影（developinent)後，獲致一具 有該微細物輪廓構形凹口之光阻模板。再將複數（N)個該 光阻模板結合疊置，俾獲致疊置在各光阻模板上所形成較 深之該微細物輪廓構形凹口’然後以金屬陶磁複合電鑄方 式製造一具有該積體微細物輪廓構形且具相當厚度之金屬 陶磁複合衝頭模具。本發明方法之第二實施例則係就上述 第一實施例製作之單一光阻模板予以電鑄，以獲得一具有 該積體微細物輪廓構形但具較小厚度之金屬衝頭模具，然 後以此衝頭模具塑膠射出或塑膠熱壓成型製作具有微細物 輪廓構形凹口之相同N個塑膠模板（母模），再將N個塑膠 模板疊置結合，並施予金屬陶磁複合電鱗加工，即可製作 —具有該積體微細物輪廓構形且具相當厚度之金屬陶磁複 合衝頭模具（公模）。又，本發明之第三實施例方法爲先以 上述第一及第二種實施例方法製成具有該積體微細物輪廓 構形且具有相當厚度之金屬陶磁複合衝頭模具（公模），然 後就該金屬衝頭予以塑膠射出成型製作多個塑膠模板（母 模），並對各塑膠模板爲陶磁複合電铸成型加工，即可大 量生產具有該積體微細物輪廓構形且具相當厚度之金屬陶 磁複合衝頭模具。再者，本發明之第四實施例方法，乃製 作數金具有微量遞增或遞減積體微細物輪廓構形凹口之光 阻模板’將各光阻模板疊置結合，並施予金屬陶磁複合電 -4 - 本紙張尺度通用中國國家標準（CNS ) A4規格（公着)-------- (請先閲讀背面之注意事項再填寫本X ) 裝- 訂._ 4 A7 B7 經 中 央 標 準 局 貝 費 合 作 社 印 製 五、發明説明（2 轉加工，以形成具有階層狀積體微細物輪廓構形之金屬陶 磁複合模具。 發明之背景 習知以微影技術製造積體微細物衝頭模具之方法，例如 由同一申請人提出申請而公告於86年7月〗日之第84108〇67 號「以能量束製造高精度微細零件之製造方法」發明專利 申請案（公告號3 09462 )，其係依照衝壓成品形狀製成所須 之光罩樣式’然後在基板上钸上一厚屠光阻，.以X光或紫 外光經由光罩對光阻照射，將照射過的光阻經顯影後可得 一所須的塑膠模板，然後將金屬電鍍在塑膠模板内，再將 塑膠模板去除’則可得到衝壓成品形狀之模具。 然而依上述習知方式生產之模具，由於χ光或紫外光或 現存之光源能量束透過光軍照射並顯影光阻之結果，僅能 成型一相當薄之金屬模具，尚無法發揮實際衝壓微細零件 量產之目的。因此，藉由本發明之利用疊置結合各單一光 阻模板，並衍伸配合塑膠射出或熱壓成型技術及金屬陶磁 複备電鑄方式，即可製作具有相當厚度之衝頭模具，而達 到實際上量產高精度微細零件之目的。 發明之概沭 本發明I主要目的在提供一種衝製積體微細物之衝頭模 具之製造方法，在於利用數只有積體微細物輪廓構形凹口 (光阻模板（母模）彼此疊置，以形成較深之微細物輪廓構 形凹口，俾經施予金屬陶磁複合電鑄後，獲致一具有該積 體微細物輪廓構形且具相當厚度之金屬陶磁複合衝頭模具 m· UK m· ml n·— m m m· s I-* .- (請先閲讀背面之注意事項再填寫本頁)401334 Printed by A7 _____B7 printed by Shelley Consumer Cooperative of China Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (1) The present invention relates to the manufacture of a punch die for punching fine objects, especially a lithography technique. (Photolithography), the light source is irradiated with a layer of photoresist on a substrate through a mask having a light-transmitting contour configuration of the integrated fine object, and after developing, a concave having the contour configuration of the fine object is obtained Mouth photoresist template. Then, a plurality of (N) photoresist templates are combined and stacked to obtain a deeper profile contour notch formed by superposing on each photoresist template, and then a metal-ceramic composite electroforming method is used to manufacture A metal ceramic magnetic composite punch die having a contour profile of the integrated fine object and a considerable thickness. The second embodiment of the method of the present invention is electroformed on the single photoresist template made in the first embodiment to obtain a metal punch mold with the contour of the integrated fine object but a smaller thickness, and then The same N plastic templates (female molds) with micro-profile contour notches are made by plastic injection or hot-press molding of this punch mold, and then the N plastic templates are stacked and combined, and a metal ceramic magnetic scale is applied. Processing, you can make-metal ceramic magnetic composite punch die (male mold) with the contour of the integrated fine object and a considerable thickness. In addition, the method of the third embodiment of the present invention is to first prepare the metal ceramic magnetic composite punch die (male mold) with the contour structure of the integrated body and a considerable thickness by the methods of the first and second embodiments described above, Then, the metal punch is subjected to plastic injection molding to produce a plurality of plastic templates (master molds), and each plastic template is processed by ceramic magnetic composite electroforming to produce a large amount of the contour of the integrated fine object with a considerable thickness. Metal ceramic magnetic composite punch die. Furthermore, the method of the fourth embodiment of the present invention is to fabricate a photoresist template with a few incrementally increasing or decreasing accumulations of fine object contour configuration recesses. 'The photoresist templates are superimposed and combined, and a metal-ceramic composite is applied. Electricity-4-This paper is in accordance with the Chinese National Standard (CNS) A4 specification (public) -------- (Please read the precautions on the back before filling in this X) Binding-Binding._ 4 A7 B7 Warp Printed by the Central Bureau of Standards, Co., Ltd., Fifth, the description of the invention (2 transfer processing, to form a metal ceramic magnetic composite mold with the outline configuration of the layered fine object. Background to the invention It is known to use the lithography technology to manufacture the integrated fine object punch. The method of the head mold, for example, an application for an invention patent (Announcement No. 3 09462) issued by the same applicant and published in July 86, No. 84108〇67 "manufacturing method of manufacturing high-precision micro-parts with energy beams" , Which is made according to the shape of the stamped finished product. Then a thick photoresist is placed on the substrate. The photoresist is irradiated with X-ray or ultraviolet light through the photomask, and the irradiated photoresist is developed. Get what you need Plastic template, and then metal plating in the plastic template, and then remove the plastic template, you can get a stamped finished shape of the mold. However, the mold produced according to the above-mentioned conventional methods, because the x-ray or ultraviolet light or the existing light source energy beam through As a result of the photoresist irradiating and developing the photoresist, only a relatively thin metal mold can be formed, and the purpose of mass production of practically stamped micro-parts has not yet been achieved. Therefore, by using the present invention, a single photoresist template is combined and stacked, and With the combination of plastic injection or hot-press molding technology and metal ceramic magnetic backup electroforming method, a punch mold with a considerable thickness can be produced, and the purpose of mass-producing high-precision micro-parts is actually achieved. Summary of the invention I The main features of the present invention I The purpose is to provide a manufacturing method of a punch die for punching a fine body of objects, which consists of using a plurality of outlines of the fine body of objects to form a notch (photoresist template (master)) superimposed on each other to form deeper fine objects. Contour configuration notch. After applying metal ceramic magnetic composite electroforming, a metal with the contour configuration of the integrated fine object and a considerable thickness is obtained. Ceramic magnetic punch die m · UK m · ml n · — m m m · s I- * .- (Please read the precautions on the back before filling this page)
I A7 B7 經濟部中央標隼局員工消费合作社印製 五、發明説明（3 ) ，足以符合實際上量產高精度微細零件之需求。 本發月之’人—目的在提供—種衝製積體微細物之衝頭模 具之製造方法，在於針對上述單一光阻模板施予金屬陶磁 複口 ％鑄，以獲得一具有該積體微細物輪廓構形之金屬衝 _員模/、（么模）’然後將該金屬衝頭模具以塑膠射出或塑膠 熱壓成型方式製作N個具有相同微細物輪廓構形之塑膠模 板（母模），並將N個上述塑膠模板疊置結合，以形成一較 深之微物輪廓構形凹口，俾經金屬陶磁複合電鑄後產生一 相當厚度之金屬衝頭具，如此即可配合塑膠射出成型及金 屬陶磁複合電鑄，以較快速方式製作衝製積體微細物之衝 頭模具。 本發明之另一目的在提供一種衝製積體微細物之衝頭模 具之製造方法’在於就上述兩種方法所完成之一具有該積 體微細物輪廓構形且具有相當厚度之金屬.陶磁複合衝頭模 具（公模）’施予塑膠射出或熱壓成型方式，製成N個相同 構形之塑膠模板（母模），然後以金屬陶磁複合電鑄方式對 該¥塑膠模板加工，使產生N個具有該積體微細物輪廓構 形且具相當厚度之金屬陶磁複合衝頭模具，此亦爲配合塑 膠射出或熱壓成型及金屬陶磁複合電鑄以快速製作衝製積 體微細物衝頭模具之方法。 本發明之再一目的在提供一種衝製積體微細物之衝頭模 具之製造方法，在於先製作數只具有微量遞增或遞減積體 微細物輪廓構形凹口之光阻模板，然後將各光阻模板疊置 結合於一底座上，並施予金屬陶磁複合電轉加工’即可形 -6- ---------ί声------訂， (请先閲讀背面之注意事項再填寫本X) 本紙張尺度適用中國國家標隼（CNS ) Α4規格（210 X 297公釐） 五、 發明説明（ 4 具有階層狀積體微細物輪廓構形之金屬陶磁複合衝 頭 經濟部中央標準局員工消費合作杜印製 且本發明之又一目的在提供—種衝製積體微細物之衝頭模 具，其中該模具係由組合該積體微細物構形之多數單—衝 2所構成’ |單-衝刃具有均勻微量遞增或遞減之階層構 3^ 〇 tjjA.較佳實施例激.明 里^之簡單説明 茲配合圖式以舉例説明本發明各實施例之製作衝製積體 微知物之衝頭模具方法，其中： ^ "圖1A係一立體示意圖，顯示本發明第—種實施例中， 光線透過光罩以照射於基板上之光阻層，光罩上顯示—透 光之積體微細物輪靡構形； 圖1B係一立體示意圖，顯示本發明第一種實施例中，經 光源照射過之光阻層在顯影後形成於基板上之光阻模板， 其上具有基體微細物輪廓構形凹口； 圖1C係一互體示意圖，顯示本發明第一種實施例中，五 個光阻模板早元疊置結合於—底座上，並經插銷校準後各 光阻模板單元上之微細物輪廓構形凹口準確地重合，並形 成五倍於光阻模板單元凹口深度之基體微細物輪廓構形凹 I n I (請先閲讀背面之注意事項再填窝本頁) 訂 i i 口 圖1D係一互體示意圖，顯示本發明第一種實施例中， 五個疊置結合之光阻模板經施予金屬陶磁複合電鑄，並經 去除光阻模板後所形成之具有積體微細物輪廓構形，且具 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公簇） 401334 A7 B7 五、 經濟部中央樣準局貝工消費合作社印装 發明説明（5 才目當厚度之金屬衝頭模具； (請先閲讀背面之注意事項再填寫本頁) 圖2A係一立體示意圖，顯示本發明第二種實施例中， 依第—種實施例方法製作之具有微細物輪廓構形凹口之一 光阻模板單元，被置於一底座上； 圖2B係一立體圖，顯示本發明第二種實施例中，將—光 阻模板單元施予陶磁複合電鑄，並除去光阻模板後，即可 形成一較小厚度.之金屬陶磁複合衝頭模具； 圖2C係一互體tf意圖，顯示本發明第二種實施例中，將 圖2B形成之金屬陶磁複合衝頭模具予以塑膠射出或熱壓成 型後，製成之一具有積體微細物輪廓構形凹口之塑膠模板 單元； 圖2D係一工體示意圖，顯示本發明第二種實施例中， 五個塑膠模板單元被疊置結合於—底座上； 圖2E係一互體示意圖，顯示本發明第二種實施例中，疊 置之塑膠模板被施予金鑄陶磁複合電鑄加工，在去除塑膠 模板後，形成一具有積體微細物輪廓構形且具有相當厚度 之备屬陶磁複合衝頭模具； 圖3A係一互體示意圖，顯示本發明第三種實施例中， 依第一種及第二種實施例方法製成之具有積體微細物輪廓 構形且具相當厚度之金屬陶磁複合衝頭模具，經塑膠射出 或熱壓成型加工，而製成一具有相當深度之積體微細物輪 廓構形凹口之塑膠模板； 圖3 B係一王體示意圖，顯示本發明第三種實施例中，將 圖3A製成之塑膠模板置於一底座上，並施予金屬陶磁複合 -8 -本紙張又度適用中國國家揉準（CNS ) A4規格（210X297公釐） 經濟部中央標準局員工消費合作社印裝 A7 B7 五、發明説明（6 ) 電鑄加工，在去除塑膠模板後，即可形成相當厚度之金屬 陶磁複合衝頭模具； 圖4A係一立體示意圖，顯示本發明第四種實施例中， 以圖^㈣之方法製造五錄量遞增或遞減積體微細物輪 廓構形凹口尺寸之光阻模板呈疊置結合狀態於—底座上； 圖4B係一互體tf意圖，顯示本發明第四種實施例中，以 金屬陶磁複合電鑄方式產生具有階層狀積體微細物輪廓構 形之金屬陶磁複合衝頭模具； 圖4C係沿圖4B之4C_4C線之剖視示意圖，顯示單一只 衝刀之階層狀構形；以及 圖4D係沿圖4C之4D - 4D線之剖視示意圖，顯示單一只 衝刃之微量遞增或遞減構形示意圖。 請參照圖1所示，本發明第一種實施衝製積體微細物之 衝頭模具之製造方法包含下列步驟：首先以微影技術 (photolithograply)做初步工作，即準備一光罩（咖^)"， 其中具有擬衝製成型之積體微細物之透光輪廓構形12，在 一墓板13上佈以一層光阻（ph〇toresist) 14 ,光阻材料例如 聚甲基丙晞酸甲酯（PMMA，polymethylmethacrylate)，然後 使一光源15透過該光罩丨丨對著該光阻層14照射，因此光 線15穿過光罩11之透光輪廓構形12而照射在光阻層14上（ 如圖1A)，將照射過的光阻層14予以顯影，使去除經透光 照射過之光阻層14,而獲得一具有該微細物輪廓構形凹口 16之光阻模板（母模）單元17(如圖1B)。經重複上述之過程 ，製作複數（N )個相同之光阻模板單元17，然後將該N個（ -9- ϋ張尺度適用中國國家標準（CNS)八4胁（21Gx297公董） -— -- ----------裏-------丁 、ν*-β (請先閲讀背面之注意事項再填窝本頁) 經濟部中央標準局員工消費合作社印製 401334 A7 ----~--!Z_ 五、發明説明（7 ) 例如五個）光阻模板單元17上下叠置結合立於-底座18上 ’並將插梢19貫穿插人各光阻模板單元17之對準孔191， 使各光阻模板17上之微細物輪廓構形凹口 16重疊成整體上 較深之輪廓構形凹口 161(本例中即五倍光阻模板單元17之 輪廊構形凹口之深度）（如圖1C)，並以金屬陶磁複合電缚 方式施工太上述疊置成之較深（即五倍於單元凹口之深度） 輪靡構形161，即能在去除疊置之光阻模板171後，形成一 具有該積體微細物摩構形且具相當厚度之金屬陶磁複合衝 頭模具（公模）1.0 (如圖1D)。 另請參圖2所7F，本發明第二種實施例衝製積體微細物 之衝頭模具之製造方法，可依上述第—種實施例方法製作 —具有該微細物輪廓構形凹口之光阻模板單元U，其上具 有微細物輪廓構形凹口22，及對準孔231，將該光阻模板 單元置於一底座24上（如圖2A)，然後施以金屬複合電鑄加 工，並除去光阻模板後，即可形成一具有該積體微細物輪 廓構形，但僅有一光阻模板單元厚度之金屬陶磁複合衝頭 模具（公模）25及對準孔23 (如圖2B )，利用此一金屬陶磁複 合衝頭模具25以塑膠射出或熱壓成型方式，製作N個或更 多具有相同積體微細物輪廓構形凹口之塑膠模板單元( 如圖2C )，再以類似上述第一種實施例之方法，將N個相 同塑膠模板單元26上下疊置結合立於一底座27上，並以插 銷230只穿插入疊置塑膠模板261之對準孔2310以爲對準， 因此可獲致整體上一較深之輪廓構形凹口 222 (如圖D )，然 後施以金屬陶磁複合電鑄加工，即可在去除疊置之塑膠模 -10- 本^^^^適&中國國家標準((^)八4^格（210\297公着)' ' ' ---------〆、—裝------訂--.----V . - - . (請先聞讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 五、發明説明（8 ) 板261後，形成一具有該積於 硬微細物輪廓構形且具有相當 4度之金屬陶磁複合衝頭槿且（八4»、 禊具（公模）20。此第二種實施例 製造方法，在以塑膠射出成刑 成4 土万法配合金屬陶磁複合電鑄 加工，即可以更高速度製作衝頭模具。 再者如圖3所7F，本發明第三種實施衝製積體微細物 衝頭模具製造方法，其㈣㈣前述第—種及第二種方法 所製成之具有該積體微細物輪廓構形且具相當厚度之金屬 陶磁複合衝頭模具(公模），經塑膠射出或熱壓成型加工， 以製成N個或更多相同構形之塑膠模板（母模）31 (如圖3A) ，塑膠模板31上即形成具有相當深度之積體微細物輪廓構 形凹口 33，然後將塑膠模板31置於一底座32上，爲金屬陶 磁複合電鑄加工，即可更大量且快速地生有該積體微細物 輪廓構形且具有相當厚度之金屬陶磁複合衝頭模具3〇。 其次’如圖4所示，本發明第四種實施衝製積體微細物 衝頭模具之製造方法，係依照圖1A至1B之方法製作微量 遞增或遞減積體微細物輪廓構形凹口 42之尺寸之光阻模板 (母模）41.a至41d ’並叠置結合於一底座45，再以插销43貫 牙對準孔43 1對準定位（如圖4A )，以獲致一呈階層狀積體 微細物輪廓構形凹口。然後施予金屬陶磁複合電鑄加工， 即可在去除各光阻模板後形成一具有階層狀積體微細物輪 廓構形之金屬陶磁複合衝頭模具40(如圖4B)。另，由圖 4C及4D中可觀察階層狀金屬陶磁複合衝頭模具中各單— 衝刀401呈階梯狀微量遞增或遞減之示意構形。其目的在 於使得衝製工作更爲順暢。 -11 - 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨0X297公釐） ---------篆------n T 1., . *言 ~ (請先聞讀背面之注意事項再填寫本頁) ^01334I A7 B7 Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 5. The description of the invention (3) is sufficient to meet the actual demand for mass production of high-precision micro parts. The "person" in this issue of the month aims to provide a method for manufacturing a punch die for punching the fines of a compact, which is to apply the metal ceramic magnetic compound% casting to the single photoresist template described above to obtain a fine with the compact Metal punch with the contour profile of the object_member die /, (mould) 'Then use the metal punch mold to make N plastic templates (master molds) with the same fine object contour profile by plastic injection or plastic hot pressing. The N plastic templates are stacked and combined to form a deep micro-profile contour notch. After metal-ceramic magnetic composite electroforming, a metal punch with a considerable thickness can be produced. Forming and metal ceramic magnetic composite electroforming, the punch die for punching the fine objects in a faster way. Another object of the present invention is to provide a method for manufacturing a punch die for punching a compact of a compact, which is a metal having a contour configuration of the compact of the compact and having a considerable thickness, which is completed in one of the two methods described above. The composite punch mold (male mold) is given by plastic injection or hot-press molding to make N plastic templates (master molds) of the same configuration, and then the ¥ plastic template is processed by metal ceramic magnetic composite electroforming to make Generate N metal-ceramic magnetic composite punch molds with the contour of the integrated fine object and a considerable thickness. This is also to match the plastic injection or hot-press molding and metal-ceramic magnetic composite electroforming to quickly produce the pressed compact. Head mold method. Yet another object of the present invention is to provide a manufacturing method of a punch die for punching a fine body of objects, firstly making a plurality of photoresist templates with a slight increase or decrease of the outline structure of the fine body of objects, and then The photoresist template is superimposed and combined on a base, and is subjected to metal ceramic magnetic composite electro-rotation processing. It can be shaped. -6- --------- ί 声 ------ Order, (Please read the back first Note: Please fill in this X) This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) V. Description of the invention (4 Metal-ceramic magnetic composite punch with hierarchical contour of fine objects Printed by the consumer cooperation agreement of the Central Bureau of Standards of the Ministry of Economic Affairs, and another object of the present invention is to provide a punch die for punching the integrated fines, wherein the mold is composed of a plurality of sheets combining the shapes of the integrated fines— Punctured by 2 '| Single-punched blade has a uniform micro-increasing or decreasing hierarchical structure 3 ^ 〇tjjA. The preferred embodiment is excited. Mingli ^ A brief description is provided with illustrations to illustrate the production of various embodiments of the invention. Method for making punch mold of integrated micro-knowledge, wherein ^ " FIG. 1A is a schematic three-dimensional view showing that in the first embodiment of the present invention, light passes through a photomask to irradiate a photoresist layer on a substrate, and on the photomask, a light-transmitting integrated fine object turns into a configuration. Figure 1B is a schematic perspective view showing a photoresist template formed on a substrate after development by a photoresist layer irradiated by a light source in a first embodiment of the present invention, which has a substrate fine contour profile recess; FIG. 1C is a schematic diagram of an interbody, showing the five photoresistive templates in the first embodiment of the present invention are superimposed and combined on a base, and the fine object contour configuration on each photoresistive template unit is calibrated by a pin. The notches overlap exactly and form a matrix fine contour contour recess I n I that is five times as deep as the notch depth of the photoresist template unit (please read the precautions on the back before filling this page) Order II Figure 1D Schematic diagram of the interbody, showing that in the first embodiment of the present invention, five superimposed and combined photoresist templates are applied to metal ceramic magnetic composite electroforming, and the integrated microstructure outline configuration is formed after removing the photoresist template. , And applicable to this paper size China National Standard (CNS) A4 specification (210X297 cluster) 401334 A7 B7 V. Printed invention description of the Central Samples Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperatives (5) Metal punch molds with a thickness of 1 cm; (Please read the back Note that please fill in this page again) Figure 2A is a three-dimensional schematic diagram showing a photoresist template unit with a micro-profile contour notch produced according to the method of the first embodiment in the second embodiment of the present invention, which is placed On a base; FIG. 2B is a perspective view showing a second embodiment of the present invention, the photoresist template unit is applied to the ceramic magnetic composite electroforming, and the photoresist template is removed to form a smaller thickness. Metal ceramic pottery composite punch die; Figure 2C is an intact tf, showing the second embodiment of the present invention, the metal ceramic pottery composite punch die formed in Figure 2B is plastic injection or hot-pressed to form one Figure 2D is a schematic diagram of a plastic body, showing five plastic template units are stacked and combined on a base in the second embodiment of the present invention; Figure 2E A schematic diagram of an interbody, showing that in the second embodiment of the present invention, the superimposed plastic template is applied to a gold-cast ceramic magnetic composite electroforming process. After removing the plastic template, a contour structure with integrated fine objects is formed and has a considerable shape. The thickness preparation is a ceramic-magnetic composite punch die; FIG. 3A is a schematic diagram of an interbody, showing the outline configuration of the integrated fine object made according to the methods of the first and second embodiments in the third embodiment of the present invention. A metal ceramic composite punch die with a considerable thickness is processed by plastic injection or hot pressing to form a plastic template with a deep depth of the contour of the integrated fine object. Figure 3 B is a schematic diagram of a king body It shows that in the third embodiment of the present invention, the plastic template made in FIG. 3A is placed on a base, and metal ceramic magnetic composite-8 is applied. This paper is again applicable to China National Standard (CNS) A4 (210X297) (Mm) A7 B7 printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (6) Electroforming processing, after removing the plastic template, can form a metal ceramic composite punch die with a considerable thickness; 4A is a three-dimensional schematic diagram showing that in the fourth embodiment of the present invention, a photoresist template with five or more recording volumes with increasing or decreasing volume contour shape notch dimensions is produced in a superimposed combination state at— Fig. 4B is an intact tf view, showing that in the fourth embodiment of the present invention, a metal-ceramic magnetic composite punch die having a hierarchical integrated microstructure outline configuration is produced by a metal-ceramic magnetic composite electroforming method; Fig. 4C It is a schematic cross-sectional view taken along line 4C_4C of FIG. 4B, showing the hierarchical configuration of a single punch; and FIG. 4D is a schematic cross-sectional view taken along line 4D-4D of FIG. 4C, showing a slight increase or decrease of a single punch Configuration diagram. Please refer to FIG. 1, the first method for manufacturing a punch die for punching a compact of the present invention includes the following steps: firstly, preliminary work is performed by photolithograply, that is, preparing a photomask (coffee) ) " Among them, there is a light-transmitting contour configuration 12 of the integrated fine objects that are to be punched into a shape. A grave board 13 is covered with a layer of photoresist 14, a photoresist material such as polymethyl propylene PMMA (polymethylmethacrylate), and then a light source 15 is transmitted through the mask to the photoresist layer 14 so that the light 15 passes through the light-transmitting contour configuration 12 of the mask 11 and is irradiated on the photoresist On the layer 14 (as shown in FIG. 1A), the irradiated photoresist layer 14 is developed to remove the photoresist layer 14 which has been irradiated with light, and a photoresist template having the fine profile contour recess 16 is obtained. (Master) unit 17 (see Figure 1B). After repeating the above-mentioned process, a plurality of (N) identical photoresist template units 17 are produced, and then the N (-9-three-dimensional scales are applicable to the Chinese National Standard (CNS) Hazaki (21Gx297))--- ----------- Li ------- D, ν * -β (Please read the notes on the back before filling in this page) Printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 401334 A7 ---- ~-! Z_ V. Description of the invention (7) For example, five) Photoresist template units 17 are stacked one above the other and stand on the-base 18 ', and the pin 19 is inserted through each photoresist template unit. The alignment holes 191 of 17 overlap the fine object profile configuration notches 16 on each photoresist template 17 to form a deeper overall profile configuration notch 161 (in this example, five times the photoresist template unit 17 wheel) The depth of the notch of the corridor structure (see Figure 1C), and the metal ceramic ceramic composite electric binding method is used to construct the above-mentioned stacking deeper (that is, five times the depth of the unit notch). After removing the stacked photoresist template 171, a metal ceramic composite punch die (male mold) with a thickness of the integrated microstructure and a considerable thickness is formed (see Fig. 1D). Please also refer to FIG. 7F. The second embodiment of the present invention is a method for manufacturing a punch die for punching a fine object, which can be produced according to the method of the first embodiment described above. Photoresist template unit U, which has a fine object profile configuration recess 22 and an alignment hole 231, places the photoresist template unit on a base 24 (as shown in FIG. 2A), and then performs metal composite electroforming processing After removing the photoresist template, a metal ceramic magnetic composite punch die (male mold) 25 and an alignment hole 23 with the thickness profile of the integrated fine object, but only one photoresist template unit thickness (see figure) 2B), using this metal ceramic magnetic composite punch die 25 by plastic injection or hot-press molding to make N or more plastic template units with the same integrated fine object profile configuration recess (see Figure 2C), and then In a similar way to the first embodiment above, N identical plastic template units 26 are stacked one on top of the other on a base 27, and the pins 230 are only inserted into the alignment holes 2310 of the stacked plastic template 261 for alignment , So you get a deeper outline overall Shape notch 222 (as shown in Figure D), and then apply metal ceramic magnetic composite electroforming processing, you can remove the stacked plastic mold -10- 本 ^^^^^ & Chinese National Standard ((^) 八 4 ^ Grid (210 \ 297 public works) '' '--------- 〆, — equipment ------ order --.---- V.--. (Please read the first Note: Please fill in this page again.) After printing by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, the invention description (8) plate 261, a metal-ceramic composite punch with a contour configuration of hard and fine objects and a considerable 4 degrees is formed. The head of the hibiscus (eight 4 », the harness (male mold) 20. This second embodiment of the manufacturing method, in the plastic injection into a four-ten thousand method combined with metal ceramic magnetic composite electroforming processing, that can be produced at a higher speed Furthermore, as shown in FIG. 7F, the third method for manufacturing a punching die for punching compacts according to the present invention is a method for manufacturing punching punches with fine punches made by the first and second methods described above. Metal ceramic magnetic composite punch mold (male mold) with a contour profile and a considerable thickness, which is processed by plastic injection or hot pressing to make N or more plastics of the same configuration A template (master) 31 (as shown in FIG. 3A), the plastic template 31 is formed with a depth of the integrated fine object contour configuration recess 33, and then the plastic template 31 is placed on a base 32, which is a metal ceramic magnetic composite electric Casting process can produce a larger number of metal ceramic ceramic composite punch dies with a relatively thick and contoured shape of the integrated body, and has a considerable thickness. Secondly, as shown in FIG. 4, the fourth implementation of the present invention is punching. The manufacturing method of the integrated micro-punch die is to create a photoresist template (master mold) 41.a to 41d that increases or decreases the size of the integrated micro-profile contour configuration recess 42 in accordance with the method of FIGS. 1A to 1B. It is superimposed and combined with a base 45, and then aligned with the pin 43 through the tooth alignment hole 43 1 (as shown in FIG. 4A), so as to obtain a notch with a contoured shape of a layered product. Metal ceramic magnetic composite electroforming processing is then applied to form a metal ceramic magnetic composite punch die 40 having a layered integrated fine object profile after removing each photoresist template (see FIG. 4B). In addition, from FIG. 4C and FIG. 4D, the schematic configuration of the single-punching blade 401 in the step-like metal ceramic magnetic composite punch die can be observed to increase or decrease stepwise. The purpose is to make the stamping work smoother. -11-This paper size is in accordance with China National Standard (CNS) A4 (2 丨 0X297mm) --------- 篆 ------ n T 1.,. * 言 ~ (please first (Please read the notes on the back and fill in this page) ^ 01334
‘然亦可參照前述方法’*此一階層g金屬衝頭模具以 塑膠射出或熱壓成型方式，製作虬個具有階層狀積體微細 物輪廟構相Π之鳄模板，再以金屬㈣複合料加工 万式大量製作具有階層狀積體微細物輪廓構形之金屬陶磁 複合衝頭模具。 又，上述所舉之各種實施例僅爲説明本發明衝製積體微 細物之衝頭模具及其製造方法，並非用以限制本發明。換 T之，本發明主要乃利用微影技術製作具有該微細物輪廓 構形凹口之多數光阻模板，並將各光阻模板疊置以獲致較 深之該微細物輪廓構形凹口，然後或配合電鑄方式或塑 膠成型方式製作具有該積體微細物輪廓構形且具相當厚度 之衝頭模具者。凡不脱離上述製造方法精神所做之任何修 改或變更，皆應視爲在本發明之範疇内。本發明之專利請 求茲限定爲下列之專利申請範圍所述者。 . .1-裝·------訂 (請先閲讀背面之注意事項再填寫本頁)'Ran can also refer to the aforementioned method' * This one-stage g metal punch mold is made of a plastic crocodile template with a layered structure of fine objects and a wheel structure by plastic injection or hot pressing, and then compounded with metal cymbals. Material processing 10,000 types of metal ceramic magnetic composite punch dies with the outline of the structure of the layered fine objects. In addition, the above-mentioned various embodiments are merely illustrative of the punch die and the manufacturing method of the punched fine body of the present invention, and are not intended to limit the present invention. In other words, the present invention mainly uses photolithography technology to make most photoresist templates with the micro-profile contour notch, and stacks each photo-resist template to obtain a deeper micro-profile contour notch. Then, or in combination with electroforming or plastic molding, a punch mold having the contour of the integrated fine object and having a considerable thickness is produced. Any modification or alteration made without departing from the spirit of the above-mentioned manufacturing method shall be deemed to be within the scope of the present invention. The patent claims of the present invention are limited to those described in the following patent applications. . .1-install · -------- Order (Please read the precautions on the back before filling this page)
A 經濟部中央標準局員工消費合作社印製 -12- 本紙張尺度適用中國國家樣準（CNS ) A4規格（210><297公釐〉A Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs -12- This paper size applies to the Chinese National Standard (CNS) A4 specification (210 > < 297mm>