經濟部中央樣準局負工消费合作社印装 309462 A7 __B7_ 五、發明説明（p (―)技術領域 本發明播露了一種利用能置束，例如X_ray或紫外光光刻 術來大ft快速製造离精度沖壓横具中之_鍵細黴零件，例如沖 暖模具中所使用沖頭、壓料板與下模板等檄細零件之製造方法 及模具裝置，以解決傅統模具在毎一工程站先製造單件或較簡 易之模具，再合併組合成工程站所須之沖頭、壓料板與下模板 等模具之問題。 (二)發明背景 傳統方法製造微細零件之沖頭、懕料板、與下模板等模 具，是利用光學投影輪磨、線切割放電加工等方法來製造的， 在製造沖頭、壓料板與下模板之關鍵細微零件時，必須利用以 上機械加工方式，先製造單支或較籣易的細徽零件後，再組合 成一內含多數微細零件之沖頭、壓料板與下模板等模具，以此 傳統方式製造之模具會增加模具零件機械加工應力與殘留應 力，以致會影響模具零件尺寸精度，另外用傳統方法製造多腳 零件模具的缺點還包含(1)有較大的模具尺寸(2)較多的工程製 造步驟即高工程站黻(3)在單位面積內所分佈的脚數較少，且其 兩接腳之節距(pitch)較大及高腳數的微細零件不易加工等問 題，由於以上之缺點不利於生產成本與交貨期，而減低了產品 商業競爭力。 本發明揭露了一種新的利用能量束，例如X-ray或紫外光 光刻術來製造离精度細微零件之沖頭、壓料板與下模板等模具 零件之製造方式，用此方式製造而成的樓具可克服傳統製造方 式的缺點，以提昇模具細微零件精度，提高微細零件密度，減 少工程製造站數，使得其製造模具之m工程製造站內，一次製 ---------f裝------·订丨^-----Ϊ乂 (請先聞讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家橾奉（CNS ) A4规格（210X297公釐） A7 B7 經濟部中央梂準局負工消費合作社印装 五、發明説明（>) 成多腳數之沖頭、颶料板與下模板等模具零件，以降低生產成 本且有效縮短製進模具之時間，以增加商品之競爭優勢。 (三)發明的籣單說明： 本發明的目的是爲尋求改進傳統模具製造簞件的微細零件 後，再由此分割模具組合成多數微細零件之沖頭、®料板與下 模板等模具之缺點，如圆一所示，爲傳統沖壓模具組合圖，包 括有沖頭1、壓料板2與爲下模板3等所組成之沖腿模具，傳 統在製造下樓板與壓料板等零件時，其中之一種方式是採用線 切割放電加工方式如圓2a所示，或另一方式係將模具分割後用 光學投影磨床成型加工如圔2b所示，完成後再組合成如圖2c之 壓料板與下模板等，甶於傳統機械加工成型之壓料板中鬭鍵微 細零件之導引孔4與下模板中關鐽微細零件之沖孔4非常細 小，其精度控制不易，加工形狀複雜，非常不易加工，無法提 高密度以致增加工程製造站敝，且由於機械加工之殘留應力較 大會減少横具零件尺寸精度，以致成型之模具其腳數密度較 低，傳統僅能製造單一形狀沖頭的微細零件如圖2d所示，其頂 端最薄厚度僅約0.1mm爲一曲折形狀5，加工非常困難，在底 部上端6爲鍵播、當數支模具沖頭加工好後再使用金屬鍵9固 定於鍵播6內，如圖2e所示，其中沖頭固定板8之厚度爲沖頭 底部到鍵權底部之高度，當金屬鍵9穿過鍵播6後再使用螺絲 固定於固定板8之螺孔7內。 爲著改進傳統製造技術所具之缺點，本發明係利用能置 束，例如一種X-my或紫外光光刻術製造方法，以下籣稱 (LIGA)，其相關之製進技術如圖3所示作一說明如下：UGA製 程的第一步驟光蝕刻(Lithography)是將一厚層光阻2a(resist)， (請先聞讀背面之注##項再填寫本頁) i 丁 本紙張尺度適用中«國家橾率（CNS > A4规格（2丨〇Χ 297公釐） 經濟部中央樣準局貞工消費合作社印裝 309462 A7 _____B7_ 五、發明説明（力） 例如：聚甲基丙嫌酸甲醒(PMMA;po〖ymethylmethacrylate)經由 一特殊的光罩(Mask)3a，應用能量束例如X-ray或紫外光等4a 照射曝光，將照射過的光阻2a顯影後可得一所需的塑膠模板； 第二步驟電鍍(Electroforming)是使用電鍍技術，將金屬5a電鍍 在此塑膠模板內；第三步驟微成型(Micromolding)是將塑膠模 板除去，則可得所須之金屬微結構或金屬模，由此金屬模製成 的塑膠横板，再經第二次電鍍，或經陶瓷射出成型，亦可經脫 孅鍤造，可置產出金屬模或陶瓷模具零件，其利用能最束例如 以紫外光或X-ray光刻術技術的優點爲(1)可作微加工(2)由一件 光罩製成，其位置精度、尺寸精度的重現性良好(3)量產性佳(4) 可加工複雜形狀，因此應用此製造方法可以製作出高精度之多 數接腳規格模具，而使得此零件横具可有效改進以往傳統零件 模具製進方式因其接腳一隻隻先製造完成後再組合成型之缺 點。 在本發明中先利用LIGA製造方法一次成型具有無數隻接 腳之沖頭、壓料板與下模板等模具零件，一般而言，用此方法 製造出之高密度微細零件數如_4a所示之模板比由傳統方法製 造出之微細零件數如圖4b所示之模板，其密度可高出數倍（由 圖4a與4b可明顳看出），經過反覆幾次製造出成型的數個模 具，最後一併合成一組高精度之沖壓模具，於此製造過程中由 於使用本製進方法所完成之沖壓模具，將傳統20多個工作製造 站之程序，如圓5所示，能夠快速簡化及改進爲僅僅幾個工程 製造站即可完成，如圖8所示，在加工製造過程中可節省時間 及降低成本，此種在成型模具製造方法上之重大改進突破，功 不可沒。 本紙張尺度適用中國國家櫟隼（CNS ) A4規格（210X297公缝) --------装------订--------1上 (請先M讀背面之注意事項再填寫本頁) A7 B7 五、發明説明（4) (四)圖示的籣要說明： 1爲傳統沖趣模具組合圆之示意圖。 圖2爲傳統沖頭下模板與壓料板沖壓模具上視示意圖。 圖3爲光触刻製造流程圓之示意圔。 圖4中4A與4B分別爲由本發明與傳統製造在沖壓横具中用在下 模板與祖料板零件比較之上視示意圈。 圜5爲說明傳統製造方法第一個實施例的複雜製造過程之上視 a····· Ι^^ΒΊ 7F重圖。 圖6爲說明本發明第一個實施例，以LIGA技術製作壓料板下模 板或沖頭過程之一系列製程立體示意圈。 圖7爲說明本發明第一個實施例，製造不同之乂-1：办光罩圓案之 上視示意圖。 圖8爲說明本發明第一個實施例，使用本技術製造棋具之一系 列沖壓過程步驟示意圈。 圖9爲說明本發明第一個實施例，以新製程模具製成之徵細零 件圖之示意圆。 圖10爲說明本發明第一個實施例，新製程模具組合檐截面示意 圖0 ml 1 m> ϋ-f itmtw I n^l ·ϋ>— (請先聞讀背面之注意Ϋ項再填寫本IT) 經濟部中央標準局貝工消费合作社印装 圖號籣單說明： 1沖頭 2壓料板 3下模板 4導引孔 5曲折形狀 6上端 7螺孔 8固定板 9金屬鐽 la基板 2a光阻 本紙張尺度適用中國國家樣率（CNS ) A4規格 (210X297公釐 > Α7 Β7 五、發明说明（γ) 3a光覃 4aX-ray (紫外光） 5a金屬 10沖頭墊板 11沖頭固定板 12副導柱 13沖頭 14壓料承板 15壓料板 16下模板 17下模承板 18固定間距阻合件 19主導柱 20下模座板 21 X-ray (紫外光) 22光罩 23光阻 24基板 25模板 26電鍍金屬 27內腳節距 28外腳節距 29上模座板 30鍵槽 31模板 (五)發明的詳細說明 (請先聞讀背面之注項再填寫本頁) 裝. 訂 經濟部中央橾準局員工消费合作社印製 請參臞圓6所示爲本發明以LIGA技術製作醞料板一系列過 程之示意，其中所使用方法爲製作模具中關鍵微細零件，其 製造程序包括使用X-ray 21 (或紫外光光源）、光罩22、光阻 23、基板24、與電鍍金屬26等元件（諝參閱圓6A至6D所 示），首先依照壓料板或下模板形狀製造所須之光罩樣式， 其光罩22則如匾6A所示，然後在基板24上佈上一厚雇光阻 23，以X-ray 21 (或紫外光）經由光罩22對其照射，然後將照 射過的光阻23經顬影後可得一所須的塑膠模板25，如·6Β所 示，然後使用電鍍技術將電鍍金雇26電鍍在此塑膠模板25內， 如圖6C所示，然後將塑膠模板25去除，則可得到壓料板之模 具，然後由此播具製成的塑膠模板25再經由第二次電鍍即可置 本紙悵尺度適用中國國家揉率（CNS > Α4规格（2丨0X297公釐） 309462 經濟部中央標準局貝工消费合作社印製 A7 B7 _ 五、發明説明（6 ) 產出相同多數接腳之金屬微細結構之壓料板或下横板，如圓 6D所示，依照使用同樣方法，另外設計出不同之X-ray光罩臞 形，如圖7A、7B或7C所示之不同形狀之多數接脚騙案，然後 再以圜7A或圖7B或圖7C中躧案爲光罩圖，使用X-ray (或紫外 光）光刻術LIGA製造步驟·如前所述之步驟相同，祇是將光 罩圖形換掉改爲7A或7B或7C圖之光罩圖形，重覆LIGA製造步 驟最後也將得到如前之多數接腳金屬微細結構之下模板或壓料 板，其模板結構如圔7A或圖7B或圈7C所示，其餘導繅架多數 接腳金屬微細結構（如圖8所示）之模板亦以LIGA方式製造 完成，沖頭之製進方法亦與上述相同，僅光罩形狀與壓料板或 下模板相反，亦即壓料板或下模板之光罩爲凸狀（公模）而沖 頭之光罩爲凹狀（母模），其中鐽檐30以固定板固定，沖頭31 爲內含多數微細成型之沖頭，如圖6E所示，爲其中單一工程站 內所霈使用之沖頭，其餘導線架多數接腳金屬微細結構（如圖 8所示）所須之沖頭亦以同樣方式，僅更換光罩形狀，皆可完 成全部沖壓模具所需之內含多數微細成型之沖頭。 再諝參閱附圖9所示，其爲本發明利用X-my 21 (或紫外光 光源）*使用LIGA方法製造完成其中導線架沖壓成品，其結 構包含內腳節距27，外腳節距28等，其中內腳節距27爲0.10〜 0.2亳米(mm)左右，外腳節距28爲0.5毫米(mm)以下，其接腳部 份之外形加工之形狀精度大於等於0.002毫米，其在沖頭部位 之接腳外形使用長度大於等於2毫米，其在下模板部位之接腳 之外形使用長度大於等於0.5毫米，形狀精度小於等於0.001毫 米以下。 參閱附圖10所示，爲利用X-ray 21 (或紫外光）光刻術 I. —I- I ...... ^^1 I ! I.. —- -I I 1- _--a, X (請先Μ讀背面之注項再填寫本頁) 本紙伕尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） A7 B7 五、發明説明（7 ) (LIGA)製程方法製進之沖頭13、壓料板15與下模板16經由組合 而成之模具組合圆，其零件包括上播座板29、沖頭墊板10、沖 頭固定板11、副導柱Π、沖頭13、壓料承板14、壓料板15、下 模板16、下模承板17、固定間距組合件18、主導柱19、下模座 板20等黎件，其中壓料板15及下模板16使用上述LIGA製造方 法製造出，再緊密配合壓入壓料承板14及下模承板17，以及配 合利用以上述方法製之出之沖頭，其中沖頭最薄厚度可達0.1 毫米，而成之新模具組合圖，由於沖頭13、壓料板15及下_板 16均具有高精度之細微特性，使得沖頭與下模板之間沖壓間隙 可達0.2毫米以下。 依上所述的資施例，凡詳熟此項技裝者皆可作一些更改與 修飾，故不宜由本發明所述之實施例而限制了本發明之申請專 利範圍。 i^i- tf^i HI nn in In 1^1 ^tn ^^^1 In nn In (請先閲讀背面之注意事項再填寫本頁) 經濟部中央橾準局負工消费合作社印製 本紙佚尺度通用中國國家搞準（〇奶以4规格（21〇><297公藿）309462 A7 __B7_ Printed by the Consumer Labor Cooperative of the Central Prototype Bureau of the Ministry of Economic Affairs V. Description of the invention (p (―) Technical Field The present invention discloses a method for rapid manufacturing of large ft using energy beam, such as X_ray or ultraviolet photolithography The manufacturing method and mold device of fine-grained parts in the precision-precision stamping tool, such as punches, pressure plates and lower templates used in the heating mold, to solve the problem of Futong mold in each engineering station The problem of manufacturing a single piece or a simpler mold first, and then combining and forming the punch, pressure plate and lower template required by the engineering station. (2) Background of the invention The traditional method of manufacturing fine parts of the punch and plate 、 The lower mold and other molds are manufactured by optical projection wheel grinding, wire cutting electrical discharge machining and other methods. When manufacturing key fine parts of punches, pressure plates and lower molds, the above mechanical processing methods must be used to manufacture first Single or relatively easy-to-use fine emblem parts can be combined into a die containing most of the fine parts, such as a punch, a pressure plate and a lower template. Molds manufactured in this traditional way will increase the mold parts machine Processing stress and residual stress will affect the dimensional accuracy of the mold parts. In addition, the disadvantages of using traditional methods to manufacture multi-leg parts molds include (1) a larger mold size (2) more engineering manufacturing steps, that is, high engineering station (3) The number of pins distributed in a unit area is small, and the pitch of its two pins is large and the fine parts with high number of pins are not easy to process. The above disadvantages are not conducive to production costs and transaction. The delivery time reduces the product's commercial competitiveness. The present invention discloses a new type of mold that uses energy beams, such as X-ray or ultraviolet photolithography, to manufacture punches, pressure plates, and lower templates from minute precision parts The manufacturing method of the parts, the building furniture manufactured by this method can overcome the shortcomings of the traditional manufacturing method, to improve the precision of the fine parts of the mold, increase the density of the fine parts, reduce the number of engineering manufacturing stations, and make the m engineering manufacturing stations that make the molds, One-time production --------- f pack ------ order ^^ ----- Ϊ 乂 (please read the precautions on the back first and then fill in this page) Lu Feng (CNS) A4 specification (210X29 7mm) A7 B7 Printed by the Central Bureau of Economic Affairs of the Ministry of Economic Affairs Consumer Cooperative V. Description of the invention (>) Die parts such as multi-punch punches, hurricane plates and lower templates to reduce production costs and be effective Shorten the time to make the mold to increase the competitive advantage of the product. (3) Description of the invention: The purpose of the present invention is to seek to improve the fine parts of the traditional mold to make the mold, and then divide the mold to combine into most fine The shortcomings of the die such as the punch of the part, the material plate and the lower die plate, as shown in circle 1, are the traditional stamping die combination diagram, including the punch 1, the die plate 2 and the punch leg composed of the lower die plate 3, etc. Moulds are traditionally used in the manufacture of parts such as lower floors and pressure plates. One of the methods is to use wire-cut electrical discharge machining as shown in circle 2a, or another method is to divide the mould and use an optical projection grinder to form and process it like 圔 2b. As shown, after completion, they are combined into a pressure plate and a lower plate as shown in Figure 2c, etc., and the guide holes 4 of the key micro parts in the pressure plate formed by traditional machining are punched with the fine parts of the lower plate. Hole 4 is very thin , Its precision control is not easy, the processing shape is complex, it is very difficult to process, the density cannot be increased to increase the engineering manufacturing station, and the residual stress of the mechanical processing will be large, which will reduce the dimensional accuracy of the crosspiece parts, so that the molded mold has a lower foot density As shown in Figure 2d, the thinnest part with a single-shaped punch is traditionally manufactured. The thinnest thickness at the top is only about 0.1mm, which is a tortuous shape 5, which is very difficult to process. After the head is processed, use the metal key 9 to fix it in the key broadcast 6, as shown in Figure 2e, where the thickness of the punch fixing plate 8 is the height from the bottom of the punch to the bottom of the key weight, when the metal key 9 passes through the key broadcast 6 Then use screws to fix in the screw holes 7 of the fixing plate 8. In order to improve the shortcomings of the traditional manufacturing technology, the present invention uses energy beam, such as an X-my or ultraviolet photolithography manufacturing method, hereinafter referred to as (LIGA), and its related manufacturing technology is shown in FIG. 3 A description is shown as follows: The first step of Lithography in the UGA process is to make a thick layer of photoresist 2a (resist), (please read the ## item on the back side first and then fill in this page) i Dingben paper size Applicable «National rate (CNS> A4 specification (2 mm) 297 mm) Printed by the Central Sample Bureau of the Ministry of Economic Affairs Zhengong Consumer Cooperative 309462 A7 _____B7_ V. Description of invention (force) For example: polymethylpropylene PMMA (po 〖ymethylmethacrylate) is exposed through a special photomask (Mask) 3a, using an energy beam such as X-ray or ultraviolet light 4a, and the irradiated photoresist 2a can be developed to obtain a desired one. Plastic template; the second step of electroforming is to use electroplating technology to electroplating metal 5a into the plastic template; the third step of micromolding is to remove the plastic template to obtain the required metal microstructure or Metal mold, the plastic , After a second electroplating, or injection molding of ceramics, can also be produced by decoupling, can be placed to produce metal molds or ceramic mold parts, which use the most energy, such as ultraviolet light or X-ray lithography technology The advantages are: (1) can be micro-processed (2) is made of a single photomask, and its position accuracy and dimensional accuracy are reproducible (3) mass production is good (4) complex shapes can be processed, so this application The manufacturing method can produce high-precision molds with most pin specifications, and this part crosspiece can effectively improve the traditional traditional part mold manufacturing method because its pin is only manufactured after the first completion and then combined to form the shortcomings. In the first step, the LIGA manufacturing method is used to form mold parts with numerous pin punches, pressure plates and lower templates at one time. Generally speaking, the number of high-density fine parts manufactured by this method is as shown in the template ratio of _4a The number of fine parts manufactured by traditional methods is shown in Figure 4b. The density can be several times higher (as can be seen from Figures 4a and 4b). After several iterations, several molds are formed, and finally Synthesize a set of high-precision stamping In this manufacturing process, due to the use of the stamping die completed by this manufacturing method, the procedures of more than 20 traditional manufacturing stations, as shown in circle 5, can be quickly simplified and improved to only a few engineering manufacturing stations. Completion, as shown in Figure 8, can save time and reduce costs during the manufacturing process. This major improvement in the manufacturing method of forming molds is indispensable. This paper scale is applicable to the Chinese National Oak Falcon (CNS) A4 specification (210X297 male sewing) -------- installed ------ ordered -------- 1 (please read the precautions on the back before filling in this page) A7 B7 5. Invention Instructions (4) (4) The illustrated binoculars should be explained: 1 is a schematic diagram of a traditional punching die combination circle. Fig. 2 is a schematic top view of the lower die plate of the traditional punch and the stamping die of the pressure plate. Figure 3 is a schematic diagram of the photo-etching manufacturing process circle. 4A and 4B in FIG. 4 are schematic top views of the bottom plate and the ancestor plate parts used by the present invention and the traditional manufacturing in the stamping crossbar, respectively.圜 5 is a top view of the complicated manufacturing process illustrating the first embodiment of the traditional manufacturing method. Fig. 6 is a series of manufacturing process three-dimensional schematic circles illustrating the first embodiment of the present invention, using LIGA technology to manufacture a lower die plate or punch of a pressure plate. Fig. 7 is a schematic top view illustrating the first embodiment of the present invention, manufacturing difference Q-1: doing a reticle round. Fig. 8 is a schematic diagram illustrating the first embodiment of the present invention, a series of stamping process steps for manufacturing a chess set using this technology. Fig. 9 is a schematic circle illustrating a detailed part drawing made by a new process mold according to the first embodiment of the present invention. Fig. 10 is a schematic diagram illustrating the cross section of the new process mold combined eaves in the first embodiment of the present invention. 0 ml 1 m > ϋ-f itmtw I n ^ l ϋ > — (please read the note Ϋ on the back and then fill in this IT ) Description of the printed drawing number of the Beigong Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs: 1 punch 2 pressure plate 3 lower template 4 guide hole 5 zigzag shape 6 upper end 7 screw hole 8 fixing plate 9 metal plate la substrate 2a light The size of the paper used for this paper is applicable to the Chinese National Sample Rate (CNS) A4 specification (210X297mm > Α7 Β7. Fifth, the invention description (γ) 3a light Qin 4aX-ray (ultraviolet light) 5a metal 10 punch pad 11 punch fixed Plate 12 Sub guide column 13 Punch 14 Pressing plate 15 Pressing plate 16 Lower template 17 Lower mold plate 18 Fixed spacing stopper 19 Main column 20 Lower mold base plate 21 X-ray (UV) 22 Mask 23 photoresist 24 substrate 25 template 26 electroplated metal 27 inner foot pitch 28 outer foot pitch 29 upper mold base plate 30 key slot 31 template (5) detailed description of the invention (please read the notes on the back and fill in this page) Packed. Printed by the Ministry of Economic Affairs, Central Bureau of Accreditation and Employee ’s Consumer Cooperatives. Please refer to No. 6 for the present invention. This is a schematic diagram of a series of processes for making a preparatory board by technology. The method used is to make key micro parts in the mold. Its manufacturing process includes the use of X-ray 21 (or ultraviolet light source), photomask 22, photoresist 23, substrate 24, With the electroplated metal 26 and other components (refer to circle 6A to 6D), first make the required mask pattern according to the shape of the pressure plate or the lower template, and its mask 22 is shown as plaque 6A, and then on the substrate 24 Apply a thick photoresist 23, irradiate it with X-ray 21 (or ultraviolet light) through the photomask 22, and then irradiate the photoresist 23 through the shadow to obtain a required plastic template 25, such as · As shown in 6B, then use electroplating technology to electroplating gold plating 26 in this plastic template 25, as shown in Figure 6C, and then remove the plastic template 25, you can get the mold of the pressure plate, and then made by the broadcaster The finished plastic template 25 can be placed on the original paper after the second plating. The standard is suitable for China's national rubbing rate (CNS> Α4 specification (2 丨 0X297mm). 309462 Printed by the Ministry of Economic Affairs Central Standards Bureau Beigong Consumer Cooperative A7 B7 _ Fifth, the description of the invention (6) The output is the same as most pins A micro-structured pressure plate or lower horizontal plate, as shown in circle 6D, according to the same method, different X-ray masks are designed, as shown in Figures 7A, 7B or 7C. Use the X-ray (or ultraviolet light) lithography LIGA manufacturing steps as in the case of pin fraud, and then use the case in Figure 7A or Figure 7B or Figure 7C as the photomask. The mask pattern is changed to the mask pattern of 7A, 7B or 7C. Repeating the manufacturing steps of LIGA will finally get the template or pressure plate under the pinned metal microstructure as before, and the template structure is like 7A. As shown in Fig. 7B or circle 7C, the template of the majority of the metal structure of the rest of the guide reel (as shown in Fig. 8) is also manufactured by LIGA. The punching method is also the same as above, only the shape of the mask Contrary to the pressure plate or the lower template, that is, the mask of the pressure plate or the lower template is convex (male mold) and the mask of the punch is concave (mother mold), in which the eaves 30 are fixed by a fixed plate, The punch 31 is a punch that contains most of the micro-moldings, as shown in FIG. 6E, which is used by a single engineering station In the same way, only the replacement of the shape of the reticle can be completed in the same way, only the shape of the photomask can be completed, and most of the fine molding required by the stamping die can be completed. The punch. Refer to FIG. 9 again, which is the invention using X-my 21 (or ultraviolet light source) * using the LIGA method to complete the stamping of the lead frame, the structure includes the inner foot pitch 27, the outer foot pitch 28 Etc., in which the inner foot pitch 27 is about 0.10 ~ 0.2 mm (mm), the outer foot pitch 28 is below 0.5 millimeter (mm), and the shape accuracy of the outer shape of the pin part is greater than or equal to 0.002 mm. The length of the pin shape of the punch part is greater than or equal to 2 mm, and the length of the pin shape of the lower template part is greater than or equal to 0.5 mm, and the shape accuracy is less than or equal to 0.001 mm. As shown in FIG. 10, for X-ray 21 (or ultraviolet) lithography I. —I- I ...... ^^ 1 I! I .. —- -II 1- _-- a, X (please read the notes on the back and then fill in this page) The paper size is applicable to the Chinese National Standard (CNS) Α4 specification (210X 297mm) A7 B7 5. Invention description (7) (LIGA) process method The punch 13, the pressure plate 15 and the lower template 16 are combined by a combined mold. The parts include the upper seat plate 29, the punch pad 10, the punch fixing plate 11, the auxiliary guide column Π, the punch The head 13, the pressing plate 14, the pressing plate 15, the lower die plate 16, the lower die plate 17, the fixed-pitch assembly 18, the main pillar 19, the lower die base plate 20 and other parts, including the pressing plate 15 and the lower part The template 16 is manufactured using the above-mentioned LIGA manufacturing method, and then is closely matched with the press-in pressure carrier plate 14 and the lower mold carrier plate 17, and the punch made by the above method is used, in which the thinnest thickness of the punch can reach 0.1 mm As a result of the new die combination drawing, the punch 13, the pressure plate 15 and the lower plate 16 all have the fine characteristics of high precision, so that the punching gap between the punch and the lower template can reach 0.2 mm or less. According to the above-mentioned embodiments, anyone who is familiar with this technical equipment can make some changes and modifications, so it is not appropriate to limit the scope of the patent application of the present invention by the embodiments described in the present invention. i ^ i- tf ^ i HI nn in In 1 ^ 1 ^ tn ^^^ 1 In nn In (please read the precautions on the back before filling out this page) The Ministry of Economic Affairs Central Bureau of Accreditation Unemployed Consumer Cooperatives printed this paper. Standard General Chinese National Accuracy (〇Milk to 4 specifications (21〇 < 297 藍 藿)