5096Q5. A7 …—·—— — B7 五、發明説明（） 發明背景： (請先閱讀背面之注意事項再填寫本頁) 本發明係為一種製作微成型刀具與立體微結構之方法 ’特別是指一種利用微成型刀具刨削或是銳削方式於一平 面狀被加工物上成形出一微型立體结構的製作微成型刀具 與立體微結構之方法。 按，在光纖通訊、光電顯示領域中，常常必須要以機 械加工或者是以化學蝕刻方式製作一微機械裝置，該微型 機械裝置通常於表面具有立體的3D微結構，例如：液晶顯 示器之黄光撗組、前光模組（fresnel lens)、光柵（blazed grating)、光柵型DWDM上之V型溝渠（V-groove)、U型溝渠 (U-groove)等平面上之3D微結構。 經濟部智慧財產局員工消費合作社印製 通常用Μ加工該類型之3D微结構的方法，不外乎傳統 的機械加工，及化學蝕刻等二種方法。其中，使用機械加 工者，其主要係使用切削刀具在被加工物的表面上切削出 所需要的立體微结構的形狀，然而在使用機械加工時，該 種微结構的尺寸與形狀的精確度係完全取決於刀具及加工 機械的精密度，然而一般機械加工其精密度通常只能夠達 到百分之一公釐的精密度，而較為精密的機械充其量也只 能夠達到千分之一公釐的精密度，因此藉由機械加工所製 造出來的立體微结構其精密度並無法符合現今光纖通訊與 光電顯示產品所要求的精密度。而且，从傳統機械加工方 法其使用的_型刀具也必須要Μ機械研磨方式製造出來， 而如圖9所示，在成型刀具1的尖端1Α及凹角1Β的部份因為 受限於研磨刀具之工具的限制’通常都會留有部份的圓角 一2 - 本紙張尺度適用中國國家標準（CNS ) Α4規格（21〇><297公釐） 509605 A7 B7 五、發明説明（） ，因此使得該尖端1A與凹角IB的部位無法成為完全的尖銳 形狀，而會形成略具有弧形的形狀，因此使得成型刀具1 所加工出來的立體微結構在尖角或是凹槽的內轉角位置也 無法達到絕對的尖銳形狀，而會留有部份的弧形，因此而 影響到了立體微结搆的尺寸精確性，同時立體微結構的數 目極多形狀亦多樣化，如前導光板的V型溝槽可達數千至 數萬條，而背光模組導光板的微結構有半球形、金字塔形 ，使得成型刀具的製作愈困難。 另外，Μ化學触刻方法所製作的立體微结構，則係於 被加工物的表面Μ光阻微顯影的方式先行顯影出立體微結 構的一部份形狀，然後以化學藥劑蝕刻將該被加工再一次 地微影出另外一道溝槽的光阻圖案，然後再一次触刻出另 外一道溝槽的形狀，如此反覆地在被加工物的表面重複進 行微顯影及蝕刻的程序，才能夠在被加工物的表面製作出 立體的微結構。例如圖10至圖15所示，要使用触刻方法製 作出一^個類似fresnel lens之類的複雜微結構形狀時，必 須要先行在被加工物2的表面塗上光阻劑3，然後微影出一 道溝渠的光阻圖案4 (如圖11所示），然後如圖12所示地Μ 化學藥劑鈾刻出一個溝槽5，然後再如圖13所示地重複再 於被加工物2的表面塗上光阻劑3，再如圖14所示地於溝槽 5白tr旁邊蝕刻出另夕卜一道深度不同的溝槽5Α，如Ifcb經過多 次的触刻程序，在被加工物2的表面製作出多道不同深度 的溝槽，如此方可於藉由該若干溝槽組合出一個立體的微 结構，而形成一'個如圖15所示的fresnel lens的構造。 一3 — 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項v • m I lr本頁) 線 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局·員工消費合作社印製 509605 A7 B7 五、發明説明（） 然而因為化學蝕刻方法在製作某些形狀較為複雜的立 體微结構時，由於立體微結構通常其形狀相當複雜，因此 必須要經由多次的微顯影及蝕刻的程序方能夠成形，因此 使得Μ化學蝕刻方式製作出來的微結構的生產速度相當媛 慢，因此使其並不適合用於大量生產，且使其製造成本相 當昂貴，而具蝕刻之表面為階梯狀，無法製作連續之斜面 或曲面。 由於Μ上之原因，使得習用的用Μ製作立體微結構的5096Q5. A7… — · —— — B7 V. Description of the invention () Background of the invention: (Please read the notes on the back before filling out this page) The present invention is a method for making micro-shaped tools and three-dimensional microstructures, especially It refers to a method of making a micro-shaped tool and a three-dimensional micro-structure by using a micro-shaped tool to plan or sharpen a micro-dimensional structure on a planar workpiece. In the field of optical fiber communication and optoelectronic display, it is often necessary to make a micromechanical device by machining or chemical etching. The micromechanical device usually has a three-dimensional 3D microstructure on the surface, such as the yellow light-emitting group of a liquid crystal display. , 3D microstructures on planes such as front lens module (fresnel lens), grating (blazed grating), V-groove on grating DWDM, U-groove, etc. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The method of processing 3D microstructures of this type usually involves two methods, such as traditional mechanical processing and chemical etching. Among them, those who use mechanical processing mainly use a cutting tool to cut the shape of the required three-dimensional microstructure on the surface of the workpiece. However, when using mechanical processing, the accuracy of the size and shape of this microstructure is completely accurate. Depends on the precision of cutting tools and processing machinery. However, the precision of general machining can usually reach only one hundredth of a millimeter, and the more precise machinery can only reach the precision of one thousandth of a millimeter at best. Therefore, the precision of the three-dimensional microstructure manufactured by mechanical processing cannot meet the precision required by today's optical fiber communication and optoelectronic display products. In addition, the _-shaped tool used in the traditional machining method must also be manufactured by M mechanical grinding. As shown in FIG. 9, the part of the tip 1A and the concave corner 1B of the forming tool 1 is limited by the grinding tool. Restrictions on tools' usually have some rounded corners. 2-This paper size applies the Chinese National Standard (CNS) A4 specification (21〇 > < 297 mm) 509605 A7 B7 5. Explanation of the invention (), so Therefore, the position of the tip 1A and the concave corner IB cannot be completely sharp, but a slightly arcuate shape is formed. Therefore, the three-dimensional microstructure processed by the molding tool 1 is also positioned at the sharp corner or the inner corner of the groove. The absolute sharp shape cannot be achieved, but a part of the arc shape will be left, which affects the dimensional accuracy of the three-dimensional microstructure. At the same time, the number of three-dimensional microstructures is extremely large and the shape is diversified, such as the V-shaped groove of the front light guide plate. There are thousands to tens of thousands of grooves, and the microstructure of the light guide plate of the backlight module has a hemispherical shape and a pyramid shape, which makes the production of forming tools more difficult. In addition, the three-dimensional microstructure produced by the M chemical etching method is based on the surface of the processed object. The photoresist micro-development method first develops a part of the three-dimensional microstructure and then chemically etches the processed microstructure. The photoresist pattern of another groove is lithographed again, and then the shape of the other groove is etched again. In this way, the process of micro-development and etching is repeatedly performed on the surface of the object to be processed. A three-dimensional microstructure is produced on the surface of the processed object. For example, as shown in Fig. 10 to Fig. 15, if a complex microstructure shape such as a fresnel lens is to be produced by the touch-engraving method, the surface of the workpiece 2 must be coated with a photoresist 3, and then A photoresist pattern 4 (shown in FIG. 11) of a trench is shadowed, and then a groove 5 is carved out by M chemical uranium as shown in FIG. 12, and then repeated on the workpiece 2 as shown in FIG. The surface is coated with photoresist 3, and then another groove 5A of different depth is etched next to the white tr of the groove 5 as shown in FIG. 14. For example, ifcb has been repeatedly etched on the workpiece, A plurality of grooves with different depths are fabricated on the surface of 2 so that a three-dimensional microstructure can be combined by the plurality of grooves to form a 'fresnel lens structure as shown in FIG. 15. 1-3 — This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back v • m I lr this page) Ministry of Economic Affairs Intellectual Property Bureau Employee Consumer Cooperative Printed Ministry of Economic Affairs Printed by the Bureau of Property and Staff Consumer Cooperatives 509605 A7 B7 V. Description of the invention () However, when the chemical etching method is used to make some three-dimensional microstructures with complicated shapes, the three-dimensional microstructures usually have quite complicated shapes, so they must pass through multiple The micro-developing and etching procedures can be formed, so the production speed of the microstructures produced by the M chemical etching method is quite slow, so it is not suitable for mass production, and its manufacturing cost is quite expensive, and The etched surface is stepped, and continuous slopes or curved surfaces cannot be made. Because of the reasons on M, it is customary to make three-dimensional microstructures with M.
I 技術手段在使用上存有相當大的缺點，本發明人有鑑於此 ，乃苦思細索，積極研究，加Μ多年從事相關產品研發之 經驗，並經不斷試驗及改良，終於發展出本發明。 發明概述： 本發明之主要目的，係在於提供一種微成型刀具的製 作方法，以增加微成型刀具的形狀多樣化及提高微成型刀 具的尺寸精度，Μ克服傳統使用機械加工方法製作的微成 型刀具的限制。 本發明之另一'目的，係在於提供一^種可以藉由機械加 工方式快速大量生產立體微結構，以增加生產速度降低生 產成本之製作微成型刀具與立體微結構之方法。 本發明為達成上述及其他目的，其所採用之技術手段 、元件及其功效，玆採一較佳實施例配合相關圖式詳细說 明如下。 圖式說明： 圖1至圖5係為本發明使用之微成型刀具之製作流程及製 一4一 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） I 辦衣#--^--i (請先閱讀背面之注意事項再填寫本頁) 509605 A7 ~五 經濟部智慧財產局員工消費合作社印製 _ _ _ — _ B7 、發明説明（） 作方法的示意圖。 圖6係為本發明使用之微成型刀具的立體圖。 (請先閱讀背面之注意事項再填寫本頁) 圖7係為利用本發明之微成型刀具以線性（fly cutting) 進行切削之實施例的立體圖。 圖8係為利用本發明之微成型刀具以旋轉路徑進行切削之 實施例的立體圖。 圖9係為習用之用以製作立體微結構使用之刀具之刃口形 狀的示意圖。 圖10至圖15係為習用之以光學蝕刻方法製作立體微结構之 方法的製作流程示意圖。 圖號說明： 1 成型刀具 1A 尖端 1Β 凹角 2 被力口工物 3 光阻齊 11 4 光阻圖案 5、 5Α溝槽 10 平面基板 11 晶種層 20 光阻齊il 21 光刻模 30 微成型刀具 31 刃口 40被加工物 50刀座 詳细說明： 41 、42立體微结構 本發明之方法，主要係藉由光刻鑄模（LIGA technology) 的技術，Μ電鑄方式製作出一微成型刀具，然後將該微成 型刀具Μ垂直於被加工物的表面，然後Μ線性切割（fly 一5 — 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 509605 Φ 經濟部智慧財1.局員工消費合作社印製 A7 、發明說明（） cutting)，或是鉄逍[]白勺方式在被力口HI物白勺表面成形出——個 立體微結構。由於該微成型刀具係以光刻模方式製作形成 ，因此其形狀及尺寸係完全取決於光阻微影的精密度，因 此使得該微成型刀具具有相當高的尺寸與形狀的精確度， 且使其所加工出來的微結構的尺寸與形狀的精密度提高。 本發明的製造流程如圖1至圖5所示，其主要係先藉由 光核模方式製作一微成型刀具，如圖1所示，其係先在一 平面基板（Substratr) 10上塗上一*晶種層11 (seed 1 ayer) )然後再於晶種層的表面塗上光阻劑（Photoresist formation) 20，然後如圖2所示，以微影（1 ithography) 的方式在光阻劑j20上顯影，使得光阻劑20形成一光阻圖案 ，而構成一個可用Μ成形前述微成型刀具的光刻模21。如 圖3所示，該光刻模21的形狀係與微成型刀具的平面形狀 相同，而且其形狀係取決於使用之光罩（mask)的形狀，所 Μ使得本發明可以至做出形狀相當複雜的微成型刀具，且 使得刀具的尺寸與形狀的精密度完全取決於光罩的形狀與 尺寸的精密度。 如圖4所示，當光阻圖案形成後，可利用電鑄 (electroplating)方法在該光刻模21內成形一微成型刀具 30，電鑲材料可選擇鎳（Ni)、鎳鐵合金（NiFe)、鎳鈷合金 (NiCo)、鎳鎢合成（NiW)及鎳與炭化矽（SiC)之混合材料， 其選擇之要件係為其物理特性可Μ藉由電鑲方法成形，且 必須具有相當之硬度，Μ便於作為切削之材料。如圖5所 示，當電鑄完成後，將該微成型刀具30從電鑄模上取下， 一6 一 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -------------裝--------訂-------1-線 (請先閱讀背面之注意事項再填寫本頁) 509605I There are considerable shortcomings in the use of technical means. In view of this, the inventor has carefully studied and actively researched, plus years of experience in research and development of related products, and through continuous testing and improvement, finally developed the invention. Summary of the invention: The main purpose of the present invention is to provide a method for manufacturing micro-molding tools to increase the shape diversity of micro-molding tools and improve the dimensional accuracy of micro-molding tools. M overcomes the traditional micro-molding tools manufactured by mechanical processing methods limits. Another object of the present invention is to provide a method for making micro-molded tools and three-dimensional microstructures which can rapidly produce large-scale three-dimensional microstructures by mechanical processing to increase production speed and reduce production costs. In order to achieve the above and other objectives, the technical means, components, and effects adopted by the present invention are described in detail below with reference to a preferred embodiment and related drawings. Description of the drawings: Figures 1 to 5 are the manufacturing process and manufacturing of the micro-formed cutting tools used in the present invention. The paper size is applicable to the Chinese National Standard (CNS) Α4 specification (210X297 mm). I do clothing #-^ --i (Please read the precautions on the back before filling this page) 509605 A7 ~ Printed by the Consumers' Cooperatives of the Intellectual Property Bureau of the Five Ministry of Economic Affairs _ _ _ — _ B7 Schematic illustration of the method of invention (). FIG. 6 is a perspective view of a microforming tool used in the present invention. (Please read the precautions on the back before filling in this page.) Figure 7 is a perspective view of an embodiment in which the micro-molding tool of the present invention is used for linear cutting. Fig. 8 is a perspective view of an embodiment in which cutting is performed on a rotary path using the microforming tool of the present invention. Fig. 9 is a schematic view showing the shape of a cutting edge of a cutter that is conventionally used to make a three-dimensional microstructure. 10 to 15 are schematic diagrams showing a manufacturing process of a conventional method for fabricating a three-dimensional microstructure by an optical etching method. Description of drawing number: 1 molding tool 1A tip 1B concave corner 2 forced force 3 photoresist 11 11 photoresist pattern 5, 5A groove 10 plane substrate 11 seed layer 20 photoresist il 21 photolithography mold 30 micro-molding Tool 31 Cutting edge 40 To-be-processed object 50 Tool holder Detailed description: 41, 42 Three-dimensional microstructure The method of the present invention is mainly based on the technique of LIGA technology, and the electroforming method is used to produce a micro-shaped tool Then, the micro-molding tool M is perpendicular to the surface of the object to be processed, and then M is linearly cut (fly 5 — this paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 509605 Φ Wisdom of the Ministry of Economic Affairs 1 . Bureau employee consumer cooperatives printed A7, invention description () cutting), or Xiao Xiao [] method formed on the surface of the force of the mouth-a three-dimensional microstructure. Since the micro-molding tool is made by photolithography, its shape and size are completely determined by the precision of photoresist lithography, so that the micro-molding tool has a relatively high size and shape accuracy, and The precision of the size and shape of the processed microstructure is improved. The manufacturing process of the present invention is shown in FIG. 1 to FIG. 5. It is mainly to first manufacture a micro-molding tool by a photo-core mold method. As shown in FIG. 1, it is first coated with a flat substrate (Substratr) 10. * Seed layer 1 (seed 1 ayer)) and then apply a photoresist formation 20 on the surface of the seed layer, and then, as shown in FIG. 2, apply photoresist to the photoresist by means of lithography. The development on j20 causes the photoresist 20 to form a photoresist pattern, and constitutes a photolithography mold 21 that can be used to form the aforementioned microforming tool. As shown in FIG. 3, the shape of the lithographic mold 21 is the same as the planar shape of the micro-molding tool, and its shape depends on the shape of the mask used, so that the present invention can make the shape equivalent. Complex micro-shaped tools, and the precision of the size and shape of the tool completely depends on the precision of the shape and size of the photomask. As shown in FIG. 4, after the photoresist pattern is formed, an electroplating method can be used to form a micro-molding tool 30 in the photolithographic mold 21. The electrosetting material can be selected from nickel (Ni) and nickel-iron alloy (NiFe). , Nickel-cobalt alloy (NiCo), nickel-tungsten synthesis (NiW), and a mixture of nickel and silicon carbide (SiC), the selection of which is based on its physical characteristics can be formed by the electrical setting method, and must have comparable hardness , M is convenient for cutting materials. As shown in Fig. 5, after the electroforming is completed, the micro-molding tool 30 is removed from the electroforming mold, and the paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297 mm) --- ---------- Install -------- Order ------- 1-line (Please read the precautions on the back before filling this page) 509605
五、發明說明（） (請先閱讀背面之注意事項再填寫本頁) 如圖6所示，該微成型刀具30的形狀係與前述光阻圖案21 的形狀相同，而且該微成型刀具30的尺寸與形狀的精密度 係與光阻圖案完全相同。 如圖6所示，該微成型刀具30其具有一個與前述立體 微結構具有相對應之幾何形狀的刃口 31，因此在使用該微 成型刀具30對被加工物進行切削加工時，係可以藉由將該 刃口 31M與被加工物相互垂直的方向與該被加工物的表面 接觸，而藉由該刃口31於被加工物表面成形一立體微结構。 如圖7及圖8所示，當微成型刀具30製作完成後，係可 Μ將其架設於切削機械上*然後再Μ該微成型刀具30於一 被加工物40上切削出一立體微結構41。如圖7所示的實施 例，係將微成型刀具30旋轉一角度後，架設於一機械的刀 座50上，然後Μ線性切削（fly cutting)方式在被加工物 40上切削出立體微结構。而如圖8所示實施例，則係將微 成型刀具30架設於刀座50上，然後藉由將刀具Μ旋轉方式 切割出一同心圓狀的立體微結構42。 經濟部智慧財產局員工消費合作社印製 本發明藉由上述技術手段，其相較於習用的機械加工 方式所製作的立體微結構而言，由於其使用的微成型刀具 30係藉由微影光刻模及電鑄的技術手段所製造而成，因此 使得該微成型刀具30具有極佳的尺寸與形狀的精密度，而 且由於該微成型刀具並非使用機械加工方式製造而成，因 此其不會受限於機械加工方式必然會在刀具的尖角與内轉 角的位置留下圓弧形狀的缺點，所以使得以本發明所製作 出來的微成型刀具可以加工出具有尖銳尖角或是尖銳內轉 一7 — 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 509605 Α7 、 Β7 五、發明說明（） 角之形狀的立體微結構。 再者，本發明相較於習用的Μ化學蝕刻方法製造立體 微结構的技術而言，由於其係使用微成型刀具30進行立體 微结構的加工，而該微成型刀具30可以在同一道切削程序 中，加工出立體微结構的全部形狀，因此能夠避免習用的 化學鈾刻方法必須多次重複地曝光與蝕刻的程序方能夠至 做出立體微结構之形狀的缺點，且其還能夠Μ機械加工方 ► 式快速而方便地進行連續的重複性生產工作，因此使得本 發明之方法可以大幅地提升立體微结構的生產速度，並降 低其生產的成本。 綜上所述，本發明之技術手段可以同時具有化學蝕刻 製造立體微结構的尺寸與形狀精確的優點，又同時可以具 有機械加工方法的快速且成本低廉的優點，因此其確實具 有明顯之功效上之増進，而確實符合發明專利之要件。 一 8- n I n 1«· H ϋ n n n f I · n ϋ n n n n «I. 一I n 1 n ϋ an n ϋ I (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）V. Description of the invention () (Please read the precautions on the back before filling in this page) As shown in Figure 6, the shape of the micro-molding tool 30 is the same as the shape of the aforementioned photoresist pattern 21, and The precision of the size and shape is exactly the same as that of the photoresist pattern. As shown in FIG. 6, the micro-molding tool 30 has a cutting edge 31 having a geometric shape corresponding to the three-dimensional microstructure. Therefore, when using the micro-molding tool 30 to cut a workpiece, the micro-molding tool 30 can be borrowed. The three-dimensional microstructure is formed on the surface of the workpiece by the cutting edge 31 by contacting the cutting edge 31M with the surface of the workpiece in a direction perpendicular to each other. As shown in FIGS. 7 and 8, after the micro-molding tool 30 is manufactured, it can be mounted on a cutting machine *, and then the micro-molding tool 30 cuts a three-dimensional microstructure on a workpiece 40. 41. In the embodiment shown in FIG. 7, after the micro-molding tool 30 is rotated by an angle, it is mounted on a mechanical tool holder 50, and then a three-dimensional microstructure is cut on the workpiece 40 by a linear cutting (fly cutting) method. . In the embodiment shown in FIG. 8, the micro-molding tool 30 is set on the tool holder 50, and the concentric three-dimensional microstructure 42 is cut out by rotating the tool M. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed the present invention through the above-mentioned technical means. Compared with the three-dimensional microstructure made by the conventional mechanical processing method, the micro-molding tool 30 used is made by lithography. It is manufactured by the technical means of engraving and electroforming, so that the micro-molding tool 30 has excellent size and shape precision, and because the micro-molding tool is not manufactured by mechanical processing, it will not Limited by the machining method, it will inevitably leave a circular arc shape at the positions of the sharp corners and the inner corners of the tool, so that the micro-shaped cutting tool produced by the present invention can be processed to have sharp corners or sharp inner turnings. I-7 — This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 509605 Α7, Β7 5. Description of the invention () Three-dimensional microstructure of the shape of the corner. Furthermore, compared with the conventional technique of manufacturing three-dimensional microstructures by the M chemical etching method, the present invention uses a micro-molding tool 30 to process the three-dimensional microstructure, and the micro-molding tool 30 can be processed in the same cutting process. In the process, the entire shape of the three-dimensional microstructure is processed, so that the conventional chemical uranium engraving method must be avoided. The disadvantage of having to repeatedly repeat the exposure and etching procedures to make the shape of the three-dimensional microstructure can be avoided, and it can also be machined. The method of the invention is to carry out continuous and repetitive production work quickly and conveniently, so that the method of the present invention can greatly increase the production speed of the three-dimensional microstructure and reduce its production cost. In summary, the technical means of the present invention can simultaneously have the advantages of precise size and shape of the three-dimensional microstructures produced by chemical etching, and at the same time can have the advantages of fast and low cost of mechanical processing methods, so it does have obvious effects The advancement does meet the requirements of the invention patent. 8- n I n 1 «· H ϋ nnnf I · n ϋ nnnn« I. One I n 1 n ϋ an n ϋ I (Please read the precautions on the back before filling out this page) Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs The paper size printed by the cooperative applies the Chinese National Standard (CNS) A4 (210 X 297 mm)