JP2016107484A - Die on which fine grooves are formed, and method for manufacturing the same - Google Patents

Abstract

To provide a molding die that can be molded by a method other than lithography technology and etching technology, and a method for manufacturing the same, while a product having an antireflection structure can be molded. A molding die for molding an object with a molding surface, wherein a part or all of the molding surface is plated, and the uniform thickness formed by the plating process In the plating layer, a plurality of grooves having a pitch of 400 nm or less and a depth of 400 nm or more are formed by cutting, and the shape of the grooves or the protrusions existing between the grooves is a groove. In the longitudinal cross-sectional shape in the direction intersecting with the stretching direction, a molding die having a fine groove with a sharp end is obtained. [Selection] Figure 1

Description

  In particular, a mold having fine grooves and a method for manufacturing the mold, and a mold capable of forming an antireflection structure having a fine uneven shape precisely and uniformly (regularly) and having good moldability, and its manufacture. The present invention relates to a method and a molded product formed by the mold.

  In products using a light-transmitting substrate such as glass or plastic, there is a surface treatment method in which an antireflection film is coated on the light incident surface of the substrate in order to reduce light due to surface reflection or improve transmittance. Widely used. As an antireflection film for light having a wavelength region such as visible light, a multilayer film in which a thin dielectric film is superimposed is known, and these multilayer films are formed on a surface of a light-transmitting substrate by a post process. In general, a thin film such as a metal oxide is formed by vacuum deposition or the like.

  However, when an antireflection film is coated in a subsequent process, manufacturing costs such as an increase in manufacturing cost and a long construction period have occurred. Therefore, in order to obtain a product that exhibits the target function only by molding, attention has been focused on the manufacturing technology of the mold that can directly mold the mold and mold the antireflection structure, and various proposals have been made in the past. .

  For example, Patent Document 1 (Japanese Patent Application Laid-Open No. 8-238863) proposes a method for producing a mold having a fine structure capable of mass-producing various microstructures such as waveguides for optical integrated circuits and micromachines. ing. That is, after applying a resist on a polymer and forming a desired resist pattern by lithography, the lower layer polymer is etched using the resist pattern as a mask to produce a master pattern, and further, a metal mold is formed by plating. A method for producing a mold is proposed, which is characterized by using a silicon-containing resist as the resist.

  Patent Document 2 (Japanese Patent Laid-Open No. 2002-338271) proposes a mold manufacturing method for manufacturing high-precision optical elements and components. That is, a method of manufacturing a mold for molding an object, the step of preparing a pre-shaped mold having a shape corresponding to the outer shape of the object, and etching the surface portion of the pre-shaped mold And a processing step of obtaining a molding surface by selectively removing the mold.

  And in patent document 3 (Unexamined-Japanese-Patent No. 2004-287238), by providing an antireflection process simultaneously with the shaping | molding of a board | substrate, in order to provide the stable and low-reflective antireflection material at low cost, A concavo-convex surface composed of a fine conical continuous pattern is formed on the surface of the translucent substrate. The concavo-convex surface forms a 0th-order diffractive surface with respect to visible light, and the concavo-convex surface pattern is a mold. An antireflection member formed at a transfer rate of 70% or more of the above pattern has been proposed.

JP-A-8-238631 JP 2002-338271 A JP 2004-287238 A

  As described above, a molding die having a fine groove has been proposed, and it is also known that a molded product manufactured using the die exhibits an antireflection effect by the fine groove. It has been. However, any of the molding dies is manufactured using a lithography technique or an etching technique, and it is difficult to improve the surface processing accuracy of the unevenness in the formed mold. Moreover, in order to manufacture the said metal mold | die, the some process process had to be performed and the manufacturing process was complicated. On the other hand, the actual situation is that a technique for manufacturing a mold for forming a product having such an antireflection structure by a method other than the lithography technique and the etching technique has not been proposed.

  Therefore, the present invention can manufacture a product having an antireflection structure by injection molding, press molding, or the like, but can be manufactured by a method other than the lithography technique and the etching technique in order to increase the surface processing accuracy of the unevenness. It is a first object to provide a molding die and a manufacturing method thereof.

  In the past, various manufacturing techniques for molds using lithography techniques for drawing fine patterns have been proposed in order to manufacture products having fine irregularities by resin injection molding or the like.

  For example, in the technique disclosed in Patent Document 1, a polymer pattern or a single crystal silicon substrate is etched using a lithography technique to form a master pattern or matrix, and the master pattern is plated with metal to form a plating layer. The plating layer is used as a mold. However, it is necessary to manufacture a plating mold for plating, electroforming, and nickel plating layer. Not only is the manufacturing process complicated, but the fine shape may be deformed in the plating process or the plating layer peeling process. there were.

  Further, in Patent Document 2, etching is performed on the mold itself by using a lithography technique, but it is difficult to uniformly apply a resist and it is necessary to coat all of the cavity surface (molding surface) of the mold. Therefore, when it is desired to perform fine processing on only a part of the mold, the processing is difficult.

  Further, Patent Document 3 discloses a method of manufacturing a mold for forming a transparent substrate in which fine conical protrusions are continuous. In the manufacturing method disclosed in this document, a resist material is disclosed. A metal mask is formed by vapor deposition, a metal mask is formed by vapor deposition, and a metal layer having a fine pattern of an antireflection film is formed by etching, and then a metal layer is peeled off to form a mold. As in the case of Patent Document 1, not only the manufacturing process is complicated, but also the fine shape may be deformed in the plating process or the plating layer peeling process.

  Therefore, in the present invention, when manufacturing a molding die having a fine groove, there is no need for an electroforming process or a plating layer peeling process, and the fine groove has been devised so that fine processing on a local area can be formed without any problem. It is a second object to provide a molding die including the above and a manufacturing method thereof.

  In addition to the mold manufacturing technology using lithography technology as described above, we also know the manufacturing technology of molds with antireflection structures using metal nanoparticles formed only by a vacuum process as an etching mask. It has been. However, because the shape of the metal nanoparticles to be adhered is irregular, it is difficult to produce the antireflection structure uniformly (regularly), or the antireflection structure may be damaged due to poor releasability during molding. Could occur.

  Accordingly, the present invention provides a molding die having fine grooves and a manufacturing method thereof, which are devised so that the antireflection structure can be produced uniformly (regularly) and the moldability can be kept good. Is the third issue.

  Further, even if it is attempted to form a fine shape by cutting the surface of the mold by machining, the conventional cutting method has a heavy load on the processing tool, so that the tool wear is likely to be severely damaged. In addition, burrs and collapses are likely to occur in the shape of the processed antireflection structure (such as uneven shape), and the surface processing accuracy required for the antireflection structure cannot be ensured.

Therefore, in the present invention, even when the mold surface is cut to give a fine shape, the burden on the processing tool and the mold is reduced, and the target shape is less likely to be burred or tilted, and high machining accuracy is realized. A fourth object is to provide a molding die having fine grooves devised so as to be able to be produced, and a method for manufacturing the same.

  In order to solve at least one of the above-mentioned problems, the present invention provides a molding die in which a fine groove having an antireflection structure is formed by cutting, and a method for manufacturing the molding die, particularly plating. Provided are a mold for forming a fine groove and a manufacturing method thereof, in which a fine groove is formed by providing a layer and cutting the elliptical vibration of a cutting portion with ultrasonic waves to form a fine groove. Is.

  That is, a molding die having a fine groove according to the present invention is a molding die for molding an object by a molding surface, and a part or all of the molding surface is plated. In addition, a plurality of grooves having a pitch of 400 nm or less and a depth of 400 nm or more are formed by cutting on the plating layer having a uniform thickness formed by the plating, and the groove or the groove The shape of the projecting portion existing between each other is formed by sharpening the end in a longitudinal cross-sectional shape in a direction intersecting with the extending direction of the groove.

  The molding die according to the present invention can be used for manufacturing various products such as semiconductor products and optical products by molding or pressing. In particular, when the groove or protrusion formed in the molding die functions as an antireflection structure in the molded product, the molding die according to the present invention is for producing a product having an antireflection structure. It can be used as a molding die. At that time, it is desirable that the product formed by the mold is an optical product formed of at least a light transmissive material. Therefore, the molding die includes optical elements (including mirrors, lenses, prisms, filters, etc.) that constitute optical devices such as telescopes, optical microscopes, and cameras, and sheets and films that transmit or reflect light. An advantageous effect can be obtained in order to manufacture a product that can impart an antireflection function.

  The molding die according to the present invention has a plurality of grooves with a pitch of 400 nm or less, desirably 380 nm or less, particularly desirably 350 nm or less, and a depth of 400 nm or more, desirably 600 nm or more, by cutting. . The shape of such a groove part or the protrusion part which exists between the said groove parts is sharp in the longitudinal cross-sectional shape of the direction which cross | intersects the extending direction of a groove part. That is, the shape of the groove portion is formed in a “V” shape with a sharp lower end in the longitudinal cross-sectional shape in a direction intersecting the extending direction of the groove portion, or the shape of the protruding portion is in a direction intersecting the extending direction of the groove portion. The upper end of the longitudinal cross-sectional shape is formed in a sharp “Λ” shape. As a result, if a product is molded by injection molding using the mold, a molded product having an antireflection structure having a fine concavo-convex shape (a concavo-convex shape formed by grooves or protrusions) can be produced. . That is, there is no need to perform an operation such as coating an antireflection film after molding, and a product having an antireflection function can be manufactured only by molding. Therefore, the cost required for coating the antireflection film can be reduced, and the construction period can be greatly shortened. Further, this molding die can be used not only for injection molding but also for press molding such as nanoimprint. At this time, the object to be molded is not particularly limited, but it is desirable that the film material is formed in a thin state in consideration of molding accuracy and the like.

  In particular, the groove portion may be formed as a parallel groove aligned toward one of the two. In this case, it can be set as the molded product which exhibits the antireflection effect with respect to the light of a specific direction or wavelength. However, preferably, the groove portions are formed in directions that intersect each other. This is because the protrusions can be formed in a cone shape by intersecting the grooves, thereby preventing reflection in various directions. In particular, the groove portion is formed into a V-shaped groove having a groove angle of 120 ° to 40 °, and the projection portion is formed into a cone shape having a blaze angle of 30 ° to 70 °, thereby forming using the mold. The antireflection effect in the product can be further enhanced.

  When a product is molded by injection molding or the like using the mold, the material (material) that can be used for the molding is not particularly limited, and can be variously set according to the purpose, such as metal, resin, or glass. Is possible. However, when releasing the molded product, it is desirable to apply a material that is less likely to cause damage to minute grooves and protrusions such as an antireflection structure formed on the product, and to prevent dimensional changes. In addition, when a minute groove or protrusion transferred to a molded product is required to have an antireflection function or an improvement in transmittance, the material used for molding is a transparent or translucent material. It is desirable to be used. In addition, the fine grooves and protrusions transferred to the molded product can also function to eliminate the reflected light of the irradiated light and efficiently absorb the light. In this case, the material used for molding does not necessarily need to be transparent, and may be an opaque material.

  The material which comprises the shaping | molding metal mold | die concerning this invention is not restrict | limited in particular, A cemented carbide, ceramics, etc. can be used according to the intended purpose other than general tool steel. When manufacturing the mold for molding according to the present invention, the burden on the processing tool and work material (here, the mold) can be reduced as much as possible. be able to.

  In manufacturing the molding die according to the present invention, it is preferable that the groove is formed on the plating layer. Therefore, first, it is desirable to perform plating such as electroless Ni-P plating on the surface or region of the molding piece having a molding surface to be cut. This is because the corrosion resistance and wear resistance of the mold are greatly improved by plating, and high-precision processing is possible in subsequent cutting. The plating film thickness in the plating process can be appropriately set according to the depth of the groove to be formed and the purpose of use, but it is desirable to form the film with a film thickness of 100 μm or more, and it should be uniformly attached to the surface of the molding piece. desirable. Specifically, it is desirable to deposit uniformly within about ± 10% (particularly desirably within about ± 5%) of the required film thickness.

  Then, on the surface of the molded piece subjected to plating, a groove portion having a desired fine uneven shape, that is, a groove having a pitch of 400 nm or less, preferably 380 nm or less and a depth of 4000 nm or more, preferably 600 nm or more. A plurality of grooves made of are formed by cutting. By providing the molded product with the mold with a concavo-convex structure (so-called moth-eye structure) having a cycle or interval of several hundred nm, it is possible to achieve a shooting prevention function. Furthermore, if the structure has a high density and a high aspect ratio, a smoother refractive index distribution can be formed, and a higher antireflection effect can be exhibited.

  In the cutting process, by forming grooves or protrusions in directions crossing each other, a convex part protruding into a pyramid shape such as a pyramid or a conical shape, or a concave part recessed in a decay shape is formed. can do. For this purpose, it is desirable to use a cutting machine that can perform ultra-fine machining as much as possible. For example, a cutting process having a command resolution of about 1 nm on the linear axis and about 0.00001 deg on the rotation axis. It is desirable to use a machine. The cutting tool material used can be any material such as high speed steel, cemented carbide, cermet, ceramics, etc., but in consideration of precision and ultra fine cutting, an artificial single crystal diamond bite It is desirable to use

  Further, in the molding die according to the present invention, when the grooves or protrusions are formed to intersect, when the cutting process is performed, the processing tool is vibrated by ultrasonic elliptical vibration cutting to perform the cutting process. desirable. For example, in an ultrasonic elliptical vibration cutting device, a machining tool is attached (or bonded) to a vibration device (or vibrator) serving as a main shaft, thereby performing cutting while vibrating the machining tool itself in a circle or an ellipse. be able to. In other words, by causing the cutting edge of the machining tool to vibrate ultrasonically relative to the work material, the main component force acting on the work material in the plane direction and the back force force acting in the vertical direction are greatly increased. Can be reduced. Therefore, the effects of reducing the wear of the machining tool, improving the machining accuracy, suppressing chatter vibration, etc. are greatly improved. And by reducing the force applied to the work material, it is difficult for burrs and collapses to occur in the concave and convex shape of the machined part, so that the surface roughness of the concave and convex slope can be ensured to ensure Ra 10 nm or less and Rz 50 nm or less. Cutting. Therefore, even when a molded product is molded using a subsequent molding method such as injection molding, it is possible to ensure good moldability (such as mold releasability), so molding that exhibits a good antireflection function Goods can be provided. In this regard, if cutting is performed without ultrasonic vibration, the cutting depth becomes deeper, the force required for cutting increases, and wear of the cutting part such as a bit for cutting increases, Further, when cutting is performed in the direction in which the grooves intersect, the protrusions existing between the previously cut grooves are deformed, and it becomes difficult to form a convex portion having a desired shape.

  And according to said cutting method, a metal mold | die can be cut into various shapes, Thereby, the shaping | molding part (molding part in a metal mold | die) which forms the antireflection structure in a molded article is also formed in various shapes. can do. For example, the convex shape or concave shape formed in the molding part can be formed in various shapes such as a polygonal shape such as a triangular pyramid, a quadrangular pyramid, a hexagonal pyramid, a cone, a prism shape, and other sawtooth shapes. . Furthermore, by appropriately changing the shape of the cutting edge of the processing tool, various groove processing such as R-groove, trapezoidal groove, short groove (micro-groove) can be performed even if the groove portion is not V-groove, and the angle gradually changes (variable). It can also be used for grooves. In addition, since the surface state of the slope of the shape is significantly smoother than before, the possibility of hindering the target antireflection function can be reduced as much as possible, and high-precision molded products can be provided. Become.

  Here, an ultrasonic elliptical vibration cutting device that conducts ultrasonic elliptical vibration to a processing tool such as a cutting tool can be arbitrarily configured. For example, a vibration device (or vibrator) capable of causing the cutting edge of a processing tool to vibrate in a circular or elliptical manner relative to the work material, and a control unit capable of controlling the amplitude (and phase difference, etc.) of the elliptical vibration It can consist of. At that time, it is more desirable if it is provided with a position detecting means capable of detecting the relative position between the position of the cutting edge of the processing tool (or the position of the work material) and the vibration device at the time of cutting. If configured in this way, it is possible to finely adjust the cutting amount and feed amount in the cutting portion, so that precise and ultra-fine cutting can be performed on the surface of the work material. Since the vibrations also act synergistically, it is possible to cut hard-to-cut materials such as hardened steel and brittle materials, which have conventionally been difficult to perform fine cutting.

  In manufacturing the above-described molding die, the angle of the cutting edge tip of the cutting tool, the cutting feed speed, the vibration conditions (frequency, vibration speed, vibration diameter, speed ratio, etc.), etc. It can be set arbitrarily according to the required accuracy. These machining conditions are preferably set taking into account the machining difficulty of the target cutting shape and the subsequent molding difficulty. In order to exhibit the antireflection function, the formed pyramid or conical uneven shape The pitch is preferably 400 nm or less (more particularly 380 nm or less) and the depth (or height) of 400 nm or more (particularly 500 nm or more). Furthermore, it is desirable to ensure an aspect ratio of 1 or more, and it is preferable to finely adjust the processing conditions so as to prevent burrs and collapses from occurring in the uneven shape as much as possible, and to form the surface roughness of the uneven surface to Ra 100 nm or less. desirable.

Further, when manufacturing the mold, in consideration of the durability of the cutting tool, a plurality of small master chips with the above-described fine grooves and protrusions are formed, and the plurality of master chips are combined. You may do it.
That is, according to the present invention, there is provided a method for manufacturing a molding die having a fine groove, which is formed by combining a plurality of master chips, and the master chip has a side of 2 mm or more and 5 mm or less. A plurality of grooves having a pitch of 400 nm or less and a depth of 400 nm or more are formed by cutting on the plated surface formed on the substrate, and exist between the grooves or between the grooves. The protrusion can be a manufacturing method of a molding die provided with a fine groove formed so that the end is sharp in the longitudinal cross-sectional shape in the direction intersecting with the extending direction of the groove.

  Further, the molding die according to the present invention is formed by transferring a combination of a plurality of master chips as described above by electroforming to form a master die, and performing electroforming on the master die. A molding die can be obtained. Since such electroforming can transfer and replicate in submicron units of 1 μm or less, a molding die having substantially the same unevenness as the master chip can be manufactured.

  Since a plurality of the above-mentioned fine grooves are formed at a fine pitch, even when processed by ultrasonic elliptical vibration cutting, the cutting blade will be worn a little. On the other hand, even if it is going to replace | exchange the worn cutting blade in the middle of a process, since the groove part currently cut is thin and a pitch is also small, alignment becomes difficult. Therefore, if a fine groove portion is cut with respect to a master chip with a narrow surface and a plurality of master chips with the fine groove portion are combined, it is not necessary to replace the cutting blade while the groove portion is being cut. Thus, it is possible to manufacture a molding die in which grooves are uniformly formed.

In the molding die manufactured using the above manufacturing method, fine grooves can be cut with high accuracy and uniformity (regularly) by cutting using ultrasonic elliptical vibration cutting. In addition, the uneven shape appearing on the mold piece formed by such a manufacturing method has as little burr and collapse as possible, and even when molded using a molding method such as injection molding, good moldability (releasability) Etc.) can be secured. Furthermore, since cutting is performed using ultrasonic elliptical vibration cutting and the burden on the work material (mold in this example) is reduced as much as possible, the life of the mold can be extended. Therefore, if a molded product is formed by injection molding or the like using the above-described high-precision mold, it is possible to produce a molded product having a high-precision antireflection structure without any problem of molding releasability. it can.

  According to the molding die of the present invention, since the fine groove is formed in the metal plating layer, the problem of corrosion of the die can be reduced. In addition, since the material of the workpiece can be made constant, stable cutting can be realized. Thereby, even if it is a fine groove part, it can cut without special difficulty. In addition, since the molding die is formed by cutting, there is no need for an electroforming step or a plating layer peeling step in manufacturing the die, and local fine processing can be performed without any problem.

  Then, by performing molding processing such as injection molding or pressing using the molding die, a molded product in which the antireflection structure is formed uniformly (regularly) can be easily manufactured. Since the surface processing accuracy of the mold is also high, burrs, collapses, and the like are unlikely to occur, and good moldability can be maintained, and a molded product with high surface processing accuracy can be manufactured.

Furthermore, even when the mold surface is cut to give a fine shape, the burden on the machining tool and the mold is reduced, so that the life of the machining tool and the mold can be extended.

It is a principal part longitudinal cross-section front schematic diagram which shows the manufacturing process of the metal mold | die concerning this Embodiment which shows the (A) plating process, (B) The principal part perspective view which shows the cutting process in metal mold | die manufacture. It is the principal part longitudinal cross-sectional view which shows the manufacturing process of the molded article using the metal mold | die for shaping | molding, (A) The principal part which shows an injection molding process, (B) The perspective view which shows the product obtained by shaping | molding. It is a perspective view which shows the whole structure of a cutting process. It is the principal front schematic diagram which shows the cutting of a metal mold | die, (A) When a processing tool is ultrasonically elliptically vibrated, (B) The case where a processing tool is not ultrasonically elliptically vibrated is each shown. It is a perspective view which shows the cutting of a metal mold | die, (A) X direction arrow end view in the state which does not carry out an ultrasonic elliptical vibration, (B) X direction arrow end view in the case of making an ultrasonic elliptical vibration show, respectively ing.

  Hereinafter, the molded product and the manufacturing method thereof according to the present embodiment will be specifically described with reference to the drawings.

  1A and 1B show a manufacturing process of a molding die according to an embodiment. FIG. 1A is a schematic vertical sectional front view showing a plating process, and FIG. 1B is a perspective view of a main part showing a cutting process in mold manufacturing. is there. As shown in FIG. 1A, in manufacturing the mold 10 according to the present embodiment, electroless Ni-P plating is performed on the surface of a piece to be cut by the mold 10. Has been given. In the present embodiment, the thickness of the plating film 14 is about 100 μm, and it is not only excellent in heat resistance and corrosion resistance by being uniformly attached to the surface of the molding piece, but also in subsequent cutting processing. This enables machining with dimensional accuracy.

  Next, as shown in FIG. 1 (B), a plurality of fine grooves 16 are cut on the surface of the molding piece of the die 10 subjected to plating to form an antireflection structure on the molded product. The protrusion 12 is formed. For the cutting process, a processing tool 11 formed of an artificial single crystal diamond tool is used. In the present embodiment, the cutting tool having a sword-shaped cutting edge and a cutting edge angle of 120 ° to 40 ° can be used. In the cutting process using such a cutting tool, the grooves 16 having a pitch of 400 nm or less and a depth of 400 nm or more are formed in a grid pattern on the molding die (more specifically, the plating film 14). . As a result, a plurality of quadrangular pyramid-shaped protrusions 12 having a height of 400 nm or more are formed on the mold 10 at the same pitch as the grooves.

  By molding using the molding die formed as described above, a molded product 13 having an antireflection structure can be manufactured. FIG. 2 shows a manufacturing process of a molded product in which a resin is injection-molded by using the above-described molding die. (A) Main part longitudinal sectional view showing the injection molding process, (B) Product 13 obtained by molding FIG. As shown in FIG. 2A, by performing resin injection molding using the molding die 10 described above, the protrusion 16R and the groove corresponding to the groove 16 and the protrusion 12 formed on the molding surface. A molded article in which 12R is formed can be manufactured. In particular, in the molding die, the grooves 16 having a pitch of 400 nm or less and a depth of 400 nm or more are formed in a lattice shape. Therefore, the molded product has a height of 400 nm or more at the same pitch. The quadrangular pyramidal projections 16R are aligned. In a molded product in which such protrusions 16R are formed on the surface, reflection of light (visible light) is suppressed, and thus the molded product has an antireflection structure.

  By using the molding die according to the present embodiment, it is possible to easily produce a molded product having an antireflection structure with high surface processing accuracy simply by injection molding a resin. A complicated process such as sticking can be omitted, and a molded product capable of exhibiting a better antireflection function can be obtained.

  FIG. 3 is a perspective view showing the overall configuration of the cutting process when manufacturing the molding die, and as shown in this figure, in the cutting process according to the present embodiment, an ultrasonic elliptical vibration cutting device is used. By using 21 for cutting, highly accurate cutting is enabled. Specifically, the ultrasonic elliptical vibration cutting device 21 includes a vibration device 22 that can elliptically vibrate the cutting edge of the processing tool 11, a vibrator 23 that serves as a main axis of rotational motion in the elliptical vibration, and an amplitude of the elliptical vibration. (And a phase difference, etc.). That is, when the position signal (encoder signal) of the vibration device 22 and the vibrator 23 and the machining shape data 25 are input to the control unit 26, the operation control of the vibration device 22 is performed based on these information, and the machining is performed. The amplitude of the elliptical vibration of the cutting edge of the tool 11 is controlled. Furthermore, it would be more desirable to have position detecting means capable of detecting the relative position between the position of the cutting edge of the processing tool 11 (or the position of the work material) and the vibration device 22 at the time of cutting.

  The ultrasonic elliptical vibration device 21 configured as described above is provided in a state of being held by a cutting machine 20 serving as a power source for cutting, and the machining tool 11 is attached to the vibrator 23 to perform cutting. The mold 10 to be processed is placed on the base portion 24 to be stabilized (fixed), and the cutting amount and the feeding amount can be adjusted by the position signal (encoder signal) sent from the control unit 26. The cutting machine 20 uses a cutting machine 20 having a command resolution of a linear axis of 1 nm and a rotation axis of about 0.00001 deg, thereby enabling ultra-fine cutting.

  Here, based on FIGS. 4 and 5, the operation and effect of ultrasonically vibrating the cutting portion will be described. As shown in FIG. 4 (A), the action of ultrasonically vibrating the cutting part is performed on the work material (here, the mold 10) by ultrasonically vibrating the cutting edge of the processing tool 11. The main component force Pt applied in the working plane direction and the back component force Pf applied in the vertical direction can be greatly reduced. That is, since the machining force (the force applied to the mold 10) is reduced, the chips 30 become thinner, and the effects of reducing the wear of the machining tool 11, improving machining accuracy, suppressing chatter vibration, etc. are greatly improved. Yes. Thereby, the metal mold | die which processed the fine groove | channel precisely can be manufactured. On the other hand, as shown in FIG. 4B, when cutting is performed without conducting the ultrasonic elliptical vibration to the cutting edge of the processing tool 11, the main component force Pt and the back component force Pf increase, and the chip 30 Therefore, the wear of the processing tool 11 and the mold 10 is increased. As wear and frictional resistance of the processing tool 11 and the mold 10 increase, the possibility of errors in processing accuracy increases, and it becomes difficult to form the antireflection structure 12 with high accuracy.

  In addition, as shown in FIG. 5A, if the cutting portion is subjected to ultrasonic elliptical vibration, the cutting edge of the processing tool 11 is cut without ultrasonic elliptical vibration. Since a large frictional resistance is generated between the mold 10 and the processing tool 11, the antireflection structure 12 to be formed often falls and burrs 40 are generated. On the other hand, as shown in FIG. 4B, if cutting is performed while the cutting edge of the processing tool 11 is subjected to ultrasonic elliptical vibration, the frictional resistance between the mold 10 and the processing tool 11 is greatly reduced, and falling or burring occurs. 40 can be reduced as much as possible. That is, by using ultrasonic elliptical vibration cutting, it is possible to ensure as smooth as possible the surface roughness of the concavo-convex slope for forming the antireflection structure or the like.

  In the cutting process according to the present embodiment, in order to form the groove 16 for forming the antireflection structure in the mold 10, a sword-shaped cutting tool having a cutting edge angle of 60 deg is used as the processing tool 11, and a predetermined pitch is used. And the groove part of the depth is formed in the grid | lattice form. That is, the groove 16 to be machined into the mold has a pitch P of 300 nm, a height (depth) D of 600 nm, and a groove angle deg of 60 °. The surface roughness of the groove 16 and the protrusion 12 is as follows. Is formed while ensuring Ra 10 nm and Rz 50 nm or less.

  Using the mold 10 manufactured by the above method, a molded product is molded using the injection molding machine 15 as shown in FIG. In the mold used for manufacturing such a molded product, the unevenness forming the antireflection structure is formed as smoothly as possible by ultrasonic elliptical vibration cutting as described above. Therefore, it is possible to secure good moldability (such as mold releasability), and it is possible to mold without damaging the highly accurate antireflection structure (protrusion 16R and groove 12R).

  As mentioned above, although embodiment of this invention was described referring drawings, this invention is not limited to embodiment mentioned above, A various change can be added in the range which does not deviate from the meaning of this invention. It is. For example, the molding die can be used to mold a product (for example, a semiconductor product) other than a product having an antireflection structure.

DESCRIPTION OF SYMBOLS 10 Mold 11 Processing tool 12 Mold protrusion 12R Molded product groove 13 Molded product 14 Plating film 15 Injection molding machine 16 Mold groove 16R Projected product 20 Cutting machine 21 Ultrasonic elliptical vibration cutting device 22 Vibrating device 23 Vibrator 24 Base part 25 Machining shape data 26 Control part 30 Chip 40 Burr

Claims (5)

A molding die for molding an object with a molding surface,
Part or all of the molding surface is plated.
In the plating layer of uniform thickness formed by the plating process, a plurality of grooves having a pitch of 400 nm or less and a depth of 400 nm or more are formed by cutting, and the grooves or between the grooves are formed. A molding die provided with fine grooves, characterized in that the shape of the protrusions present between them is a longitudinal section in a direction crossing the extending direction of the groove portions, and the end portions are sharp.
The plurality of formed grooves are V-shaped grooves having a groove angle of 120 ° to 40 ° and are formed so as to intersect each other, the protrusions are conical, and have a blaze angle of 30. The mold for molding according to claim 1, wherein the mold is formed at a temperature of from −70 °.
A method for producing a molding die having the fine groove according to claim 1 or 2,
The method for producing a molding die having a fine groove, wherein the groove portion is formed by ultrasonic elliptical vibration cutting that cuts a cutting portion of a cutting tool while elliptically vibrating the ultrasonic tool.
A method for producing a molding die having the fine groove according to claim 1 or 2,
It is formed by combining multiple master chips,
The master chip has a side of 2 mm or more and 5 mm or less, and a plurality of grooves with a pitch of 400 nm or less and a depth of 400 nm or more are formed by cutting on the plated surface formed on the substrate. The protrusions existing between the groove parts or between the groove parts are shaped with a fine groove, characterized in that the end is sharp in the longitudinal cross-sectional shape in the direction intersecting the extending direction of the groove parts. Mold manufacturing method.
A molded article having an antireflection part,
The reflection part is formed using the mold described in claim 1 or 2, and the region formed by the fine groove has a reflection preventing effect on visible light.