CN101114120A - A stamper and production method thereof and imprinting process of substrate using the stamper - Google Patents
A stamper and production method thereof and imprinting process of substrate using the stamper Download PDFInfo
- Publication number
- CN101114120A CN101114120A CNA2006101371803A CN200610137180A CN101114120A CN 101114120 A CN101114120 A CN 101114120A CN A2006101371803 A CNA2006101371803 A CN A2006101371803A CN 200610137180 A CN200610137180 A CN 200610137180A CN 101114120 A CN101114120 A CN 101114120A
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- CN
- China
- Prior art keywords
- moulded bodies
- pressing mold
- press moulded
- substrate
- stiffener
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2012—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
Abstract
The present invention discloses a die, a method for making the die and an impression technique using the substrate of the die. The die can restrain the deformation such as shrinking and expanding to increase the dimension accuracy of the die on which the fine pattern is carved and the accuracy of the arrangement between the substrate and the die. The die includes the following components: a die body which is provided with a preset pattern; a strengthened part which is arranged on the die to strengthen the die.
Description
Technical field
The present invention relates to a kind of stamping pressing die and the method that is used to make this stamping pressing die.More particularly, the present invention relates to the soft pressing mold of a kind of large scale, be used to the imprint process making the method for this pressing mold and utilize the substrate of this pressing mold, wherein, the soft pressing mold of this large scale can suppress distortion as pucker ﹠ bloat, has the size accuracy of pressing mold of fine pattern thereon at quarter and the pressing mold arrangement degree of accuracy to substrate with raising.
Background technology
Exploitation the present invention is used for the application of nanometer embossing.Nanometer embossing is to be used to one of method of making nano-device, and has become the focus of technology, the optical lithography that can use this technology to replace having the electron beam lithography of poor efficiency problem or have high manufacturing cost problem.
Nanometer embossing is a kind of by being used to have the polymeric articles of micro pattern such as mass-produced embossing (embossing) technology of compact disk is applied to lithographic technology.
Nanometer embossing generally includes: form the pressing mold with nano-scale structure by electron beam lithography or other technology; Then pressing mold is stamped on the macromolecule membrane, so that the nano-scale structure of pressing mold is transferred on the film; Use pressing mold that nano-scale structure is transferred in other substrate repeatedly, thereby overcome the low problem of electron beam lithography throughput rate.
According to the material of pressing mold, soft pressing mold that pressing mold can divide for the hard pressing mold that formed by metal, formed by dimethyl silicone polymer (PDMS) etc.The shortcoming of hard pressing mold is, when hard pressing mold has large-size (8 inches or bigger) since the character of metal material for example ductility and plasticity make the permanance that is difficult to guarantee pressing mold in compensation substrate flatness.
As a result, the needs of the soft pressing mold that can be used for 8 inches or bigger large-sized imprint process have been increased in recent years.Soft pressing mold of large scale and manufacture method thereof will be described below.
Use description to make the classic method of the soft pressing mold of large scale below.
With reference to (a) among Fig. 1, by traditional optical lithography or directly write technology (direct writingprocess), the desired pattern 13 of pressing mold is formed in the main substrate 10.
In (b) in Fig. 1, when being deposited on soft press moulded bodies 15 on main substrate 10 and the pattern 13, the lower surface of soft press moulded bodies 15 is formed with and pattern 13 corresponding shape.
Then, shown in (c) among Fig. 1, after forming pressing molds 17 by curing press moulded bodies 15, pressing mold 17 separates with main substrate 10 and pattern 13, shown in (d) among Fig. 1.Here, the lower surface of pressing mold 17 is formed with and pattern 13 corresponding shape.
In order to utilize the pressing mold that forms as mentioned above to carry out imprint process, in substrate 20, apply the polymeric layer 23 of predetermined thickness, pressing mold 17 is positioned on the polymeric layer 23, shown in (a) among Fig. 2.
Then, shown in (b) among Fig. 2, after pressing mold 17 being pressed on substrate 20 and the polymeric layer 23, by heated polymerizable thing layer 23 or by polymeric layer 23 irradiation ultraviolet radiations are come cure polymer layer 23, shown in (c) among Fig. 2.
Subsequently, when pressing mold 17 separates with substrate 20 and polymeric layer 23, substrate 20 be formed with pressing mold 17 on the corresponding pattern of pattern.In this way, the substrate that can duplication of production has identical patterns.
Yet under the situation of using this traditional soft pressing mold of large scale, problem is, because soft pressing mold made by very soft material, so be difficult to keep the original-shape of pressing mold; And because for example feasible accurate arrangement that is difficult to realize pressing mold and substrate of temperature and humidity of external condition causes the distortion of pressing mold.
In addition, utilizing the soft pressing mold of traditional large scale to come in the imprint process of production substrate, can use non-pressure step (non-compressing procedure) (in imprint process, omitting roll-in) owing to exist the possibility of pressing mold distortion to make, thereby unnecessary layer is formed in the substrate.
Summary of the invention
Consider top and other problem, the present invention has been proposed, an aspect of of the present present invention provides a kind of large scale pressing mold, it is reinforced to avoid because the distortion that external condition causes, contraction or expansion for example, thus the size accuracy of pressing mold and the arrangement degree of accuracy of substrate and pressing mold improved with fine pattern thereon at quarter.
Another aspect of the present invention provides a kind of large scale imprint process that passes through the substrate of indeformable basically pressing mold of utilization and pressing process, thereby prevents that unnecessary layer is formed in the substrate.
Additional aspect of the present invention and/or advantage will partly be mentioned in the following description, and a part will be clear from describe, and perhaps can learn by practice of the present invention.
According to an aspect of the present invention, realize aforementioned aspect of the present invention and/or advantage by a kind of like this pressing mold is provided, this pressing mold comprises: press moulded bodies has predetermined pattern; Reinforcing section provides described reinforcing section to described pressing mold, to strengthen described press moulded bodies.
Described press moulded bodies can be formed by the resin that allows ultraviolet ray to pass its transmission.
Described press moulded bodies can comprise: first press moulded bodies is formed with described predetermined pattern on the lower surface of described first press moulded bodies; Second press moulded bodies is layered on described first press moulded bodies, and wherein, described reinforcing section is between described first press moulded bodies and described second press moulded bodies.
Described reinforcing section can be included in the fine fibre of the constant interval that is separated from each other in the described press moulded bodies.
Described pressing mold also can comprise: stiffener is positioned on the described press moulded bodies, to strengthen described press moulded bodies; The chemical bond layer is in conjunction with described press moulded bodies and described stiffener.
Described stiffener can be formed by the composite bed that contains fine fibre.
Described fine fibre can be carbon fiber or glass fibre.
According to a further aspect in the invention, provide a kind of method that is used to make pressing mold, the step that comprises is: die material is layered in the substrate with predetermined pattern, transfers to press moulded bodies on it to form described predetermined pattern; Stiffener is arranged on the described press moulded bodies; Solidify described press moulded bodies and described stiffener; Described press moulded bodies and described substrate are separated.
Described method also can comprise: described die material is layered on the described stiffener, to make described stiffener firm after being arranged on described stiffener on the described press moulded bodies.
Described stiffener can comprise fine fibre.
The step that described stiffener is arranged on the described press moulded bodies can comprise: with the chemical bond coated materials on the upper surface of described press moulded bodies; Described stiffener is arranged on the described chemical bond material, so that described stiffener is fixed to described press moulded bodies.
Described stiffener can be formed by the compound substance that contains described fine fibre.
Can carry out the curing of described press moulded bodies and described stiffener by heat curing or ultraviolet curing.
Described fine fibre can be carbon fiber or glass fibre.
The described die material that is used for described press moulded bodies can be formed by the resin that allows ultraviolet ray to pass its transmission.
According to another aspect of the invention, provide a kind of imprint process that uses the substrate of pressing mold, the step that this imprint process comprises is: coated polymer in substrate; Described pressing mold with predetermined pattern begins to contact with the described polymkeric substance of described substrate; By the use roller described pressing mold is pressed in the described substrate, thereby makes the described predetermined pattern of described pressing mold be transferred in the described substrate that is coated with described polymkeric substance; Solidify and have the described polymkeric substance that is formed on described suprabasil predetermined pattern; Described pressing mold and the described substrate with formation described predetermined pattern are thereon separated.
Can carry out the curing of described polymkeric substance by heat curing or ultraviolet curing.
Description of drawings
The description below the embodiment that carries out in conjunction with the accompanying drawings, these and/or others of the present invention and advantage will become clear and be more readily understood, wherein:
Fig. 1 is the process flow diagram that the method that is used to make conventional die is shown;
Fig. 2 is the process flow diagram that the imprint process of the substrate that utilizes conventional die is shown;
Fig. 3 is the process flow diagram that illustrates according to the method for the manufacturing pressing mold of first embodiment of the invention;
Fig. 4 is the process flow diagram that illustrates according to the method for the manufacturing pressing mold of second embodiment of the invention;
Fig. 5 is the process flow diagram that the imprint process of the substrate that utilizes pressing mold of the present invention is shown.
Embodiment
Now will be in detail with reference to embodiments of the invention, the example of the embodiment of the invention has been shown in the accompanying drawing, wherein, in whole figure, identical label is represented components identical.Figure describes embodiment below by reference, to explain the present invention.
With reference to Fig. 3, pressing mold and the method that is used to make this pressing mold according to first embodiment of the invention will be described below.
Shown in (a) among Fig. 3, the preparation substrate 100, this substrate 100 have with will be formed on the pressing mold that describes below on the corresponding master pattern 110 of pattern.Here, by traditional lithoprinting or directly write technology, in substrate 100, form master pattern 110.Alternatively, by direct engraving on photoresist film, metal film and other wafer, in substrate 100, form master pattern 110.
Shown in (b) among Fig. 3, the laminated resin that is used for pressing mold forms first press moulded bodies 120 at substrate 100 and master pattern 110.
Then, shown in (c) among Fig. 3, reinforcing section 130 is arranged on first press moulded bodies 120.In the present embodiment, reinforcing section 130 is preferably formed by the fine fibre with high-tensile and low thermal coefficient of expansion.Alternatively, reinforcing section 130 is formed by the fibrage that comprises fine fibre.
Fine fibre can be glass fibre, Kevlar fabric (kevlar fiber), nylon or carbon fiber in light weight and that rigidity is high.
At this moment, the fine fibre that is used for reinforcing section 130 can be set to cruciform or be arranged on a plurality of directions and single direction.Preferably, fine fibre is spaced apart a predetermined distance on first press moulded bodies 120.
Then, shown in (d) among Fig. 3, resin additionally is layered on the reinforcing section 130, so that reinforcing section 130 is firm, and forms second press moulded bodies 140.Like this, first press moulded bodies 120 and second press moulded bodies 140 constitute press moulded bodies.
Here, be used to form the resin of first press moulded bodies 120 and second press moulded bodies 140 preferably by allowing ultraviolet transparent material to form by its transmission.
Can use the chemical bond material to come, thereby firmly make reinforcing section 130 firm with respect to the position of first press moulded bodies 120 and second press moulded bodies 140 in conjunction with reinforcing section 130 and first press moulded bodies 120, second press moulded bodies 140.
In (e) in Fig. 3, by solidifying first press moulded bodies 120 and second press moulded bodies 140 to second press moulded bodies, 140 irradiation ultraviolet radiations or by second press moulded bodies 140 is heated, thereby make reinforcing section 130 be arranged in first press moulded bodies 120 and second press moulded bodies 140 securely, and prevent that reinforcing section 130 from separating from first press moulded bodies 120 and second press moulded bodies 140.
In (f) in Fig. 3, the combination by first press moulded bodies 120, second press moulded bodies 140 and the reinforcing section 130 that will solidify separates with substrate 100 and master pattern 110, forms pressing mold 150.Here, pressing mold 150 is formed with the pattern corresponding with master pattern 110 on its lower surface.
Below, with reference to Fig. 4, with the pressing mold of describing according to second embodiment of the invention and the method that is used to make this pressing mold.
As (a) among Fig. 4 with (b), the resin-coating that is used for pressing mold forms press moulded bodies 200 in the substrate 100 with master pattern 110.
Then, as (c) among Fig. 4 with (d), chemical bond material 210 is layered on the press moulded bodies 200, then, the stiffener that is formed by the compound substance 220 that comprises fine fibre 230 is layered on the chemical bond material 210, thereby by chemical bond material 210 compound substance 220 is fixed to press moulded bodies 200.
Shown in (e) among Fig. 4, under press moulded bodies 200 and compound substance 220 are layered in situation in master pattern 110 and the substrate 100, when ultraviolet ray shines on second press moulded bodies 140, when perhaps heating second press moulded bodies 140, with when compound substance 220 combines, press moulded bodies 200 is cured at press moulded bodies 200.
In this case, by being come with master pattern 110 and substrate in 100 minutes, press moulded bodies 200 forms pressing mold 240, shown in (f) among Fig. 4.Here, pressing mold has the pattern corresponding with master pattern 110 on its lower surface.
Therefore, according to first embodiment and second embodiment, because pressing mold comprises fine fibre for example carbon fiber or glass fibre, thus aspect physical strength, significantly improve, and can prevent from its original-shape distortion.
The imprint process of the substrate that utilizes the pressing mold that forms by the method according to first embodiment will be described below.This imprint process can be applied on the pressing mold that forms by the method according to second embodiment equivalently.
Shown in (a) among Fig. 5, in substrate 300, apply after the polymer layer 310, pressing mold 150 is arranged on the polymeric layer 310.
Then, (b) in Fig. 5 and (c) in, pressing mold 150 beginning contact with substrate 300, and passes through 400 pairs of pressing molds of roller 150 and pressurize, thereby the predetermined pattern of pressing mold is transferred on the polymeric layer 310.
In (d) in Fig. 5, after removing roller 400,, then, pressing mold 150 and substrate 300 and polymeric layer 310 are separated by to pressing mold 150 irradiation ultraviolet radiations or by pressing mold 150 is heated, polymeric layer 310 is cured.As a result, surperficial thereon upward formation of substrate 300 has the fine pattern corresponding with the pattern of pressing mold 150.
As can clearly knowing from top description, pressing mold of the present invention comprises fine fibre for example glass fibre or the carbon fiber with superior strength, thereby prevents because the pressurization of the variation of external condition or roller and distortion significantly.
Therefore, pressing mold of the present invention can be applied to roll-in in the imprint process of 8 inches or bigger large-sized substrates, thereby improve adhesion and the arrangement of pressing mold with respect to substrate, when therefore guaranteeing that after imprint process pressing mold and substrate separate easily, the pattern of pressing mold can be transferred in the substrate more accurately.
In addition, because roll-in is applied in the imprint process, so because the advantage of roll-in can be removed unnecessary layer from the gap between pressing mold and the substrate, thereby guarantee that substrate has the specification of expectation.
Although illustrated and described some embodiments of the present invention, but skilled person will appreciate that, in the scope that does not break away from principle of the present invention and spirit, can change this embodiment, scope of the present invention is limited by claim and equivalent thereof.
Claims (20)
1. pressing mold comprises:
Press moulded bodies has predetermined pattern;
Reinforcing section is provided with described reinforcing section to described press moulded bodies, to strengthen described press moulded bodies.
2. pressing mold according to claim 1, wherein, described press moulded bodies is formed by the resin that allows ultraviolet ray to pass its transmission.
3. pressing mold according to claim 2, wherein, described press moulded bodies comprises: first press moulded bodies is formed with described predetermined pattern on the lower surface of described first press moulded bodies; Second press moulded bodies is layered on described first press moulded bodies, and wherein, described reinforcing section is between described first press moulded bodies and described second press moulded bodies.
4. pressing mold according to claim 3, wherein, described reinforcing section is included in the fine fibre of the constant interval that is separated from each other in the described press moulded bodies.
5. pressing mold according to claim 4, wherein, described fine fibre is carbon fiber or glass fibre.
6. pressing mold according to claim 2, wherein, described reinforcing section is formed by the fibrage that comprises fine fibre.
7. pressing mold according to claim 6, wherein, described fine fibre is carbon fiber or glass fibre.
8. pressing mold comprises:
Press moulded bodies has predetermined pattern;
Stiffener is positioned on the described press moulded bodies, to strengthen described press moulded bodies;
The chemical bond layer is in conjunction with described press moulded bodies and described stiffener.
9. pressing mold according to claim 8, wherein, described stiffener is formed by the composite bed that contains fine fibre.
10. pressing mold according to claim 9, wherein, described fine fibre is carbon fiber or glass fibre.
11. a method that is used to make pressing mold, the step that comprises is:
Die material is layered in the substrate with predetermined pattern, transfers to press moulded bodies on it to form described predetermined pattern;
Stiffener is arranged on the described press moulded bodies;
Solidify described press moulded bodies and described stiffener;
Described press moulded bodies and described substrate are separated.
12. method according to claim 11, the step that also comprises is:
Described die material is layered on the described stiffener, after being arranged on described stiffener on the described press moulded bodies, to make described stiffener firm.
13. method according to claim 12, wherein, described stiffener comprises fine fibre.
14. method according to claim 11, wherein, the step that described stiffener is arranged on the described press moulded bodies comprises:
With the chemical bond coated materials on the upper surface of described press moulded bodies;
Described stiffener is arranged on the described chemical bond material, so that described stiffener is fixed to described press moulded bodies.
15. method according to claim 13, wherein, described stiffener is formed by the compound substance that contains described fine fibre.
16. method according to claim 11 wherein, is carried out the curing of described press moulded bodies and described stiffener by heat curing or ultraviolet curing.
17. according to claim 13 or the described method of claim 15, wherein, described fine fibre is carbon fiber or glass fibre.
18. method according to claim 11, wherein, the described die material that is used for described press moulded bodies is formed by the resin that allows ultraviolet ray to pass its transmission.
19. an imprint process that uses the substrate of pressing mold, the step that comprises is:
Coated polymer in substrate;
Described pressing mold with predetermined pattern begins to contact with the described polymkeric substance of described substrate;
By the use roller described pressing mold is pressed in the described substrate, thereby makes the described predetermined pattern of described pressing mold be transferred in the described substrate that is coated with described polymkeric substance;
Solidify and have the described polymkeric substance that is formed on described suprabasil predetermined pattern;
Described pressing mold and the described substrate with formation described predetermined pattern are thereon separated.
20. imprint process according to claim 19 wherein, is carried out the curing of described polymkeric substance by heat curing or ultraviolet curing.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020060069416 | 2006-07-25 | ||
| KR1020060069416A KR100889814B1 (en) | 2006-07-25 | 2006-07-25 | A stamper and Production method thereof and Imprinting process of substrate using the stamper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101114120A true CN101114120A (en) | 2008-01-30 |
Family
ID=39022524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006101371803A Pending CN101114120A (en) | 2006-07-25 | 2006-10-23 | A stamper and production method thereof and imprinting process of substrate using the stamper |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100889814B1 (en) |
| CN (1) | CN101114120A (en) |
| TW (1) | TW200807158A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103579421A (en) * | 2013-11-07 | 2014-02-12 | 无锡英普林纳米科技有限公司 | Preparation method for large-area patterning sapphire substrate |
| CN107924121A (en) * | 2015-07-07 | 2018-04-17 | 亿明达股份有限公司 | Via selective meter's surface pattern of nano impression |
| CN111175869A (en) * | 2019-12-05 | 2020-05-19 | 深圳珑璟光电技术有限公司 | Preparation method of flexible film for holographic display |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101923282B (en) | 2009-06-09 | 2012-01-25 | 清华大学 | Nano-imprint resist and nano-imprint method adopting same |
| WO2011115383A2 (en) * | 2010-03-18 | 2011-09-22 | 서울대학교산학협력단 | Film type soft stamper, preparation method thereof, and mold for injection molding and injection molding method using same |
| CN105088805A (en) * | 2015-09-16 | 2015-11-25 | 苏州大学 | Method for preparing functional material through nanoimprint |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6755984B2 (en) | 2002-10-24 | 2004-06-29 | Hewlett-Packard Development Company, L.P. | Micro-casted silicon carbide nano-imprinting stamp |
| CN1774752B (en) * | 2003-04-18 | 2010-04-28 | 日本先锋公司 | Stamper and method for production thereof |
| US7140861B2 (en) | 2004-04-27 | 2006-11-28 | Molecular Imprints, Inc. | Compliant hard template for UV imprinting |
| KR100772639B1 (en) * | 2005-10-18 | 2007-11-02 | 한국기계연구원 | Stamp for micro/nanoimprint lithography using diamond-like carbon and method of fabricating the same |
-
2006
- 2006-07-25 KR KR1020060069416A patent/KR100889814B1/en active IP Right Grant
- 2006-10-19 TW TW095138540A patent/TW200807158A/en unknown
- 2006-10-23 CN CNA2006101371803A patent/CN101114120A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103579421A (en) * | 2013-11-07 | 2014-02-12 | 无锡英普林纳米科技有限公司 | Preparation method for large-area patterning sapphire substrate |
| CN107924121A (en) * | 2015-07-07 | 2018-04-17 | 亿明达股份有限公司 | Via selective meter's surface pattern of nano impression |
| US10808282B2 (en) | 2015-07-07 | 2020-10-20 | Illumina, Inc. | Selective surface patterning via nanoimprinting |
| CN107924121B (en) * | 2015-07-07 | 2021-06-08 | 亿明达股份有限公司 | Selective surface patterning via nanoimprinting |
| CN111175869A (en) * | 2019-12-05 | 2020-05-19 | 深圳珑璟光电技术有限公司 | Preparation method of flexible film for holographic display |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100889814B1 (en) | 2009-03-20 |
| KR20080009782A (en) | 2008-01-30 |
| TW200807158A (en) | 2008-02-01 |
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Open date: 20080130 |