A7 B7 經濟部智慧財產局員工消费合作社印製 五、發明說明（1 ) 【技術領域】 本發明係關於無塵室裝置，尤其是關於半導體製造工 場等之必須要有高淸淨度之無塵室裝置。 【技術背景】 在半導體製造工場等之無塵室裝置的室內天花板上， 天花板骨架係被配置成格子狀，藉由該天花板骨架所形成 的格子空間裡’分別設置有風扇過濾單元。風扇過濾單元 ，是藉由風扇的驅動，將在室內天花板之上頭所在的空間 (以下，稱之爲天花板上方空間）裡的空氣藉由過濾器同 時除塵後而送入室內。所送入的淸淨空氣，係向下流動， 與室內的塵埃一起經由室內下方的柵板，而流入地板下的 空間（以下，稱之爲地板下空間），其中一部分經由循環 路而被導引回天花板上方空間，剩餘的空氣則被排至無塵 室裝置之外部。導入到天花板上方空間的空氣，係藉由上 述風扇過濾單元再次除塵後再送入室內。藉此，使室內的 空氣維持淸淨。 風扇過濾單元，並未必全部的格子空間皆有設置，有 時爲了節省設備成本或減少運轉經費而以一定之間隔置配 。在此情況下，分別在沒有設置風扇過濾單元的格子空間 (以下，稱之爲空格子空間）裡，爲了防止天花板上方空 間之淨化前的空氣流入室內，在先行技術上，乃設置有將 天花板上方空間與室內完全遮斷之閉塞板。 然而，當如先行之間隔地配置風扇過濾單元而在空格 (請先閱讀背面之注意事項再填寫本頁) -裝 • ϋ ϋ ί — 訂 i! 9 線 本紙張尺度適用t國國家標準（CNS)A4規格（210 X 297公釐） -4- 經濟部智慧財產局員工消费合作社印製 A7 ____Β7__ 五、發明說明（2 ) 子空間裡設置閉塞板時，比在所有的格子空間裡設置風扇 過濾單元，具有無法提高室內淸淨度之缺點。 【發明之揭示】 本發明係有鑑於如此之情事而發明，其目的係在提供 一種即使增大風扇過濾單元之配置間隔，也能夠提高室內 之淸淨度的無塵室裝置。 以往，一般而言，無塵室裝置之室內的淸淨度係依存 於被送入室內的淸淨空氣之風量而定，也就是被認爲是： 要使室內的淸淨度提高，就必須增加淸淨空氣之風量。因 此，增大風扇過濾單元的配置間隔’而被認爲不能提高室 內淸淨度之原因，便是考量到淸淨空氣之風量減少。 然而，在追尋把風扇過濾單元隔以間隔地置配，而使 得室內淸淨度降低的原因時，便明白地了解到：並非是淸 淨空氣風量的減少，而是在沒有設置風扇過濾單元的空格 子空間裡所設置之閉塞板的下方領域產生了渦卷氣流，才 由於在領域中，使塵埃滯留於室內。 本發明在著眼於該點上，係以抑止室內渦卷氣流產生 之方法，達成了隔以間隔地配置風扇過濾單元’而提高室 內之淸淨度。 爲了達成上述目的，本發明之無塵室裝置’係具有天 花板之室空間、及設置在上述天花板上，由天花板上方空 間將淸淨空氣送入上述室空間內的風扇過濾單元、及設置 在上述天花板的通氣體；並使上述室空間內的一部分空氣 (請先《讀背面之注意事項再填寫本頁)A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (1) [Technical Field] The present invention relates to clean room devices, especially to semiconductor manufacturing plants, which must have high cleanliness and cleanliness.室 装置。 Room device. [Technical Background] In an indoor ceiling of a clean room device such as a semiconductor manufacturing plant, a ceiling frame is arranged in a lattice shape, and a fan filter unit is provided in each of the lattice spaces formed by the ceiling frame. The fan filter unit is driven by the fan to send the air in the space above the ceiling of the room (hereinafter, referred to as the space above the ceiling) through the filter and dust into the room. The incoming clean air flows downward, and flows into the space under the floor (hereinafter referred to as the space under the floor) together with the indoor dust through the grid below the room, and some of it is guided through the circulation path. Back to the space above the ceiling, the remaining air is exhausted outside the clean room installation. The air introduced into the space above the ceiling is re-dusted by the fan filter unit before being sent into the room. This keeps the indoor air clean. The fan filter unit does not have to be installed in all the grid spaces. Sometimes it is arranged at certain intervals in order to save equipment costs or reduce operating expenses. In this case, in a grid space (hereinafter, referred to as a space subspace) without a fan filter unit, in order to prevent the air before purification of the space above the ceiling from flowing into the room, the prior art is provided with a ceiling A blocking board that completely interrupts the space above and the room. However, when the fan filter unit is arranged at intervals as in advance (please read the precautions on the back before filling out this page) -install • ϋ ϋ ί — order i! 9-line paper standards are applicable to national standards (CNS ) A4 size (210 X 297 mm) -4- Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ____ Β7__ V. Description of the invention (2) When the blocking board is installed in the subspace, fan filters are set in all the grid spaces The unit has the disadvantage that it is impossible to improve the indoor cleanliness. [Disclosure of the Invention] The present invention has been made in view of such circumstances, and an object thereof is to provide a clean room device capable of improving indoor cleanliness even if the arrangement interval of a fan filter unit is increased. In the past, generally speaking, the indoor cleanliness of a clean room device was determined by the amount of airflow of the clean air sent into the room, that is, it is considered that: To increase the indoor cleanliness, it is necessary to Increase the amount of air in the clean air. Therefore, it is considered that increasing the arrangement interval of the fan filter unit 'cannot improve the cleanliness of the room because the air volume of the clean air is reduced. However, when looking for the reason why the fan filter units are arranged at intervals to reduce the indoor cleanliness, it is clearly understood that it is not the reduction of the clean air volume, but that the fan filter units are not installed. Vortex airflow is generated in the area below the occlusion plate set in the empty subspace, and it is only in the area that the dust stays indoors. The present invention focuses on this point, and by using a method of suppressing the generation of indoor scroll airflow, the fan filter unit 'is disposed at intervals to improve the cleanliness of the room. In order to achieve the above object, the clean room device of the present invention is a room space having a ceiling, and a fan filter unit installed on the ceiling, and sending clean air into the room space from the space above the ceiling, and the fan filter unit installed on the ceiling. Ventilation of the ceiling; and part of the air in the above room space (please read the precautions on the back before filling this page)
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I 味* · 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -5- 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（3 ) ，藉由上述室空間內之氣壓與上述天花板上方空間之氣壓 間的壓差，經由上述通氣體而流至上述天花板上方空間爲 其特徵。 依據本發明，係於室空間之天花板，在沒有設置風扇 過濾單元的空格子空間裡設置通氣體，藉由室內氣壓與天 花板上方空間之氣壓的壓差，使室內的一部分空氣經由通 氣體而流至天花板上方空間。藉此，在空格子空間下方領 域中，可以防止渦卷氣流產生，而能提高室內的淸淨度。 也可以將塵埃捕集用的過濾器，作爲通氣體來使用。 藉此，以過濾器來捕集通過通氣體之空氣中的塵埃，而能 夠減輕風扇過濾單元內之過濾器的負荷，同時也防止天花 板上方空間的塵埃進入室內。 再者，也可以在具有過濾器之通氣體的上方設置風扇 。使風扇動作，藉由讓空氣從天花板上方的空間經由通氣 體的過濾器送入室內，由於通氣體之過濾器可以具有風扇 過濾單元中之過濾器的作用，尤其是對於空格子空間下方 領域必須要有高淸淨度之要求時特別有利。並且，讓風扇 逆動作運轉，可以藉由使室空間中的一部分空氣經由通氣 體的過濾器而吸入天花板上方空間，而可以簡單地調整從 室內流入天花板上方空間之空氣的風量。又，當室空間內 的氣壓比天花板上方空間的氣壓還高時，即使讓風扇停止 也可以使室空間內空氣中的一部分流進天花板上方空間。 也可以將多孔板作爲通氣體來使用。開口率之不同， 亦即代表通氣性之不同，藉由準備複數個多孔板，從其中 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 6 !!!裝·!11 訂 ----I i -線 (請先閲讀背面之注意事項再填寫本頁) A7 B7 經濟部智慧財產局員工消费合作社印製 五、發明說明（4) 適宜地選擇出適當者來設置、或是藉由使用可以調整開口 率的多孔板，得以簡單地調整由室空間內經由通氣體而流 入天花板上方空間之空氣的風量。 又，通氣體也可以使用過濾器及多孔板來構成。藉此 ，藉由過濾器來捕集通過通氣體之空氣中的塵埃’而能夠 減輕風扇過濾單元內之過濾器負荷之同時’又可以防止天 花板上方空間的塵埃進入室空間內。再者’藉由利用多孔 板來調整通氣體之通氣性’得以簡單地調整由室空間內經 由通氣體而流入天花板上方空間之空氣的風量。 對於通氣體較爲理想的是當室空間內的氣壓比天花板 上方空間的氣壓僅高出〇 · 2mmAQ〜1 . 5mmAq 時，使得從室空間內經由通氣體流入天花板上方空間之空 氣的全風量，爲在風扇過濾單元從天花板上方空間送入室 空間內之空氣全風量的5%〜1 5% ’而具有通氣性。藉 此，可以維持室空間內的淸淨度’同時可以有效果地抑制 室空間內之渦卷氣流的產生。 【實施本發明之最良形態】 依據以下添付圖面’詳細說明關於本發明之無塵室裝 置的爲理想實施形態。 第1圖，是使用本發明之第一實施形態的無塵室裝置 1 5之無塵室系統1 1之全體構成圖。如同一圖所示，無 塵室裝置1 5之室空間1 〇之天花板1 2上’配設有複數 的風扇過濾單元1 4。無塵室裝置1 5之天花板上方空間 (請先閱讀背面之注$項再填寫本頁) 裝 • I n n n .^1 n If I 嗥 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公II) 經濟部智慧財產局員工消費合作社印數 A7 ____B7 五、發明說明（5) 1 6的空氣，經由風扇過濾單元1 4而被淨化之同時並送 入室空間1 0內。送入室空間1 〇內的空氣，與室空間 1 0內之塵埃同時經過柵孔地板1 8而流入地板下空間 2 0 ’以乾燥冷卻線圈2 1冷卻乾燥後，通過回返空間 2 2而回到天花板上方空間1 6。無塵室裝置1 5之地板 下空間2 0之空氣的一部分，經由換氣通氣管2 4而被送 入空調機2 6，藉由空調機2 6與吸入外氣通氣管2 8之 新鮮空氣混合，調整至一定溫度、濕度後，經由供氣通氣 管3 0而輸送至天花板上方空間1 6。如此被送至天花板 上方空間1 6的空氣，再次地藉由風扇過濾單元1 4淨化 而被送進室空間1 〇內。而地板下空間2 0之空氣中的另 外一部分’則經由排氣通氣管3 2而被排放到無塵室系統 1 1外部。 第2圖是無塵室裝置15之室空間10天花板12的 立體圖。在室空間1 0之天花板1 2上，天花板骨架3 6 係設置爲格子狀。在由天花板骨架3 6所形成的格子空間 裡’隔以間隔地配置有複數個風扇過濾單元1 4。風扇過 濾單元1 4，係具有殼體、風扇、及過濾器，其係藉由驅 動風扇，從天花板上方空間1 6把空氣吸入於殻體內，並 將該空氣以安裝在殻體下面之捕集塵埃用的過濾器予以除 塵同時送入室空間1 0內之方式來構成。 在由天花板骨架3 6所形成格子空間中，沒有設置風 扇過濾單元14的空格子空間上，設置有通氣體40。通 氣體4 0 ’如第3圖所示’係由過濾器4 2及多孔板4 4 本紙張尺度適用中圉國家標準（CNS)A4規格（210 X 297公董） -8 - !!11，-裝！ — 訂·！ ！線 1 . /1 (請先《讀背面之注意事項再填寫本頁) A7; --- — — — — — Order-! I Flavor * · This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -5- Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 5. Description of the invention (3) It is characterized by the pressure difference between the air pressure in the room space and the air pressure in the space above the ceiling that flows to the space above the ceiling via the ventilation. According to the present invention, air is attached to the ceiling of a room space in a space subspace without a fan filter unit, and a part of the air in the room flows through the air through the pressure difference between the pressure in the room and the pressure in the space above the ceiling. To the space above the ceiling. Thereby, in the area below the blank subspace, the generation of vortex airflow can be prevented, and the cleanliness of the room can be improved. A filter for dust collection may be used as a ventilation gas. With this, the filter is used to capture the dust in the air passing through the air, which can reduce the load on the filter in the fan filter unit, and also prevent the dust in the space above the ceiling from entering the room. Furthermore, a fan may be provided above the ventilation gas having a filter. The fan is operated, and the air is sent from the space above the ceiling to the room through a gas-passing filter. The gas-passing filter can function as a filter in the fan filter unit, especially for the area below the empty subspace It is especially advantageous when high cleanliness is required. In addition, when the fan is operated in the reverse direction, a part of the air in the room space can be sucked into the space above the ceiling through the air filter, so that the amount of air flowing from the room into the space above the ceiling can be easily adjusted. When the air pressure in the room space is higher than that in the space above the ceiling, even if the fan is stopped, a part of the air in the room space can flow into the space above the ceiling. You may use a perforated plate as a ventilation gas. The difference in the aperture ratio means the difference in air permeability. By preparing a plurality of perforated plates, the Chinese paper standard (CNS) A4 (210 X 297 mm) is applied to this paper size. 6 !!! Order ---- I i-line (please read the precautions on the back before filling this page) A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (4) Appropriately select the appropriate one to set, Or, by using a perforated plate whose aperture ratio can be adjusted, the air volume of the air flowing into the space above the ceiling through the air from the room space can be simply adjusted. In addition, the ventilation may be configured using a filter and a perforated plate. By this, the filter is used to capture the dust in the air passing through the air, so as to reduce the load on the filter in the fan filter unit and to prevent the dust in the space above the ceiling from entering the room space. Furthermore, 'the air permeability of the air is adjusted by using a perforated plate', so that the air volume of the air flowing into the space above the ceiling through the air from the room space can be simply adjusted. For air ventilation, it is ideal that when the air pressure in the room space is only 0.2mmAQ ~ 1.5mmAq higher than the air pressure in the space above the ceiling, the total volume of air flowing from the room space into the space above the ceiling through the airflow, It is permeable to 5% ~ 1 5% of the total air volume of the fan filter unit from the space above the ceiling into the room space. Thereby, the cleanliness in the room space can be maintained, and the generation of the swirling airflow in the room space can be effectively suppressed. [Best Mode for Carrying Out the Invention] A preferred embodiment of the clean room device according to the present invention will be described in detail based on the following drawings. FIG. 1 is an overall configuration diagram of a clean room system 11 using the clean room device 15 according to the first embodiment of the present invention. As shown in the same figure, a plurality of fan filter units 14 are provided on the ceiling 12 of the room space 10 of the clean room unit 15. Space above the ceiling of clean room installation 15 (please read the note on the back before filling this page) Installation • I nnn. ^ 1 n If I 嗥 This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 companies II) Employee Cooperative Cooperative Print of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ____B7 V. Description of the Invention (5) The air of 16 is purified by the fan filter unit 14 and sent into the room space 10 at the same time. The air sent into the room space 〇 passes through the grid hole floor 18 and flows into the under-floor space 2 0 at the same time as the dust in the room space 10. After being cooled and dried by the cooling coil 2 1, it is returned through the return space 22. Go to the space above the ceiling 1 6. Part of the air in the underfloor space 20 of the clean room device 15 is sent to the air conditioner 26 through the ventilation duct 24, and the fresh air is sucked in by the air conditioner 26 and the external ventilation duct 28. After mixing and adjusting to a certain temperature and humidity, it is delivered to the space 16 above the ceiling through the air supply and ventilation pipe 30. The air sent to the space 16 above the ceiling in this way is again purified by the fan filter unit 14 and sent to the room space 10. The other part of the air in the underfloor space 20 'is discharged to the outside of the clean room system 11 through the exhaust vent pipe 32. Fig. 2 is a perspective view of the ceiling 12 of the room space 10 of the clean room device 15. On the ceiling 12 of the room space 10, a ceiling frame 3 6 is arranged in a grid shape. A plurality of fan filter units 14 are arranged at intervals in a grid space formed by the ceiling frame 36. The fan filter unit 14 includes a casing, a fan, and a filter. The fan filter unit 14 draws air into the casing from a space 16 above the ceiling by driving the fan, and captures the air to be captured under the casing. The filter for dust is configured to be dust-removed and fed into the room space 10 at the same time. In the grid space formed by the ceiling frame 36, a vented air space 40 is provided in a blank subspace in which the fan filter unit 14 is not provided. The gas pass 4 0 'as shown in Figure 3' is composed of the filter 4 2 and the perforated plate 4 4 The paper size is applicable to the China National Standard (CNS) A4 specification (210 X 297 male directors) -8-!! 11, -Install! — Ordered! !! Line 1. / 1 (please read the precautions on the reverse side before filling out this page) A7
鱗濟#智慧財彥局貝工消t合作社印製 五、發明說明（6 ) 所構成。過濾器4 2，例如，把由纖維狀材料（例如玻璃 纖維）所成之不織布折疊成蛇腹伸縮狀。當使含有塵埃之 空氣通過過濾器4 2時，塵埃便被過濾器4 2內部之纖維 所捕集，而使空氣淨化。 多孔板4 4，係於板之全面均等形成有孔，多孔板 4 4之開口率’係考量通氣體4 〇之通氣性而決定。例如 ’通氣體4 0 ’若使室空間1 〇內之氣壓比天花板上方空 間16之氣壓咼於0.2mmAq〜1·5mmAq時， 由室空間1 0內經由通氣體4 0而流入天花板上方空間 1 6之空氣的全風量，即爲風扇過濾單元1 4由天花板上 方空間16送入室空間1〇內之空氣的全風量的5%〜 1 5 %。具有通氣性是基於以下理由而有其優點。亦即， 通氣體4 0之通氣性過小，從室空間1 〇內經由通氣體 4 0流入天花板上方空間1 6的空氣風量太少時，便會在 通氣體4 0之下方產生渦卷氣流，而使塵埃滯留於室空間 1 0內。相反地，通氣體4 0之通氣性過大，從室空間 1 0內經由通氣體4 0流入天花板上方空間1 6的空氣風 釁過多時，由於藉由風扇過濾單元1 4而送入室空間1 0 內的淸淨空氣會直接流入天花板上方空間1 6，而使得室 空間1 0內之淨化效率惡化。通氣體4 0，只要具有必要 之通氣性即可。例如，可以是僅能藉由種類或厚度之選擇 來調整通氣性之過濾器，而設置作爲通氣體4 0。或者是 ，僅能夠以適切通氣性之方式，而調整開口率之多孔板， 來設置作爲通氣體4 0也可以。 — — — — — — — — — — — ' I ·1111111 11111111 4 - />«. (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -9 - 經濟部智慧財產局貝工消費合作社印製 A7 _ B7 五、發明說明（7 ) 多孔板4 4之開口率的調整，例如，將多孔板4 4以 可以滑動的2枚多孔板來構成，而能夠調整兩多孔板之孔 洞相互重疊之大小者。藉此，通氣體4 0之通氣性以配合 無塵室裝置1 5之規模或淸淨度，而可以將多孔板4 4之 開口率簡單調整適度之方式。再者，即使在無塵室裝置 1 5竣工後，也能夠簡單地變更多孔板4 4的開口率。 通氣體4 0，並不僅侷限於如上述多孔板4 4或過濾 器4 2。只要是能夠具有適切的通氣性者，例如，狹縫板 、或以停止運轉之風扇過濾單元1 4作爲通氣體4 0來使 用亦可。 以下說明如上述所構成之本發明第一實施形態的無塵 室裝置1 5的作用。 驅動風扇過濾單元1 4的風扇，將淸淨空氣送入室空 間1 0內。藉此，在風扇過濾單元1 4之下，從天花板 1 2朝向柵孔地板1 8形成下降氣流，室空間1 0內之大 部分空氣乃與塵埃一同經由柵孔地板1 8而流入地板下空 間2 0。流入地板下空間2 0的空氣，如前述般，除了排 放到無塵室系統1 1外部的一部分空氣之外，又回到天花 板上方空間1 6，再度藉由風扇過濾單元1 4而淨化並被 送入室空間1 0內。 由於從天花板上方空間1 6使空氣被送入室空間1 〇 內，所以室空間1 0內的氣壓會比天花板上方空間1 6之 氣壓還高。藉此，在室空間1 0內之通氣體4 0正下方之 領域內產生上昇氣流，使室空間1 0內之一部分空氣經由 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -10- — — — If — —— — — —V*,' I > — — — — — — — a — — — — — — — · / * . «1, 、 (請先閱讀背面之注$項再填寫本頁) A7 B7 經濟部智慧財產局員工消费合作社印製 五、發明說明（8 ) 通氣體4 0而流入天花板上方空間1 6。因此，不會如先 行之在空格子空間之下方領域產生渦卷氣流，故不會使塵 埃滯留在室空間1 0內。 如此地，在第一實施形態之無塵室裝置1 5中，因爲 在沒有設置風扇過濾單元1 4的空格子空間裡，設置了由 過濾器4 2與多孔板4 4所成的通氣體4 0，所以能藉由 室空間10內之氣壓與天花板上方空間16之氣壓的壓差 ，使室空間1 0內之一部分的空氣藉由通氣體4 0而流入 天花板上方空間1 6。藉由，由於塵埃不會滞留在室空間 1 0內而能除去，所以室空間1 0內可以有高的淸淨度。 室空間1 0內之一部分空氣經由通氣體4 0而流入天 花板上方空間1 6時，其空氣中之塵埃會受通氣體4 0之 過濾器4 2所捕集。藉此，因而使風扇過濾單元1 4內之 過濾器所捕集的塵埃量減少，所以能夠延長風扇過濾單元 1 4內之過濾器之壽命。 也可以將風扇設在通氣體4 0之上方，驅動該風扇使 天花板上方空間1 6之空氣送入室空間1 0內。藉此，對 於過濾器4 2便具有與風扇過濾單元1 4之過濾器相同之 作用，而可以對應在通氣體4 0下方領域要求高淸淨度之 需求情形。 在上述第一實施形態中，雖然天花板骨架1 2之格子 空間中，在沒有設置風扇過濾單元1 4的空格子空間裡設 置有通氣體4 0，但本發明並不侷限於此。例如，在天花 板1 2面對側壁或柱面的空間裡也可以設置通氣體4 0。 (請先閱讀背面之注$項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -11 - 經濟部智慧財產局員工消费合作社印製 A7 ____ B7 _ 五、發明說明（9 ) 在上述第一實施形態中，雖是藉由風扇過濾單元1 4 在室空間10內與天花板上方空間16之間所產生的氣壓 差，來使室空間1 0內之空氣流入天花板上方空間1 6， 但本發明並不侷限於此。例如，在通氣體4 0之上方設置 風扇’藉由驅動該風扇，將室空間1 〇內之空氣吸入於天 花板上方空間1 6亦可。藉此’即使不調整多孔板4 4之 開口率’而藉由調整風扇之驅動，可以簡單地調整從室空 間1 0內流入天花板上方空間1 6之風量。因此，使配置 在天花板1 2之複數個風扇過濾單元1 4中的一部分風扇 過濾單元1 4風扇做逆向作動，將室空間1 〇內的空氣吸 入天花板上方空間16也可以得到與上述實施形態相同的 效果。以下，以此情形下之無塵室裝置1 5作爲第二實施 形態來說明。 在本發明之第二實施形態之無塵室裝置1 5中，於第 2圖所示之天花板1 2，係於天花板骨架3 6之全部格子 空間裡設置風扇過濾單元1 4。該風扇過濾單元1 4，係 可以藉由使風扇正運轉，而從天花板上方空間1 6將淸淨 空氣送到室空間1 0內之吹送運轉，以及藉由使風扇逆運 轉，而把室空間1 0內之空氣吸入於天花板上方空間1 6 之吸入運轉之間做切換。第二實施形態之其他構成，係與 第一實施形態相同，因此省略其說明。 以下對於如上述所構成之本發明之第二實施形態的無 塵室裝置15之作用做說明。 使一定台數之風扇過濾單元1 4進行吹送運轉’其餘 本紙張尺度ΐϊ用中國國家標準（CNS)A4規格（210 X 297公釐） -12 - ---- -------裝 ill! (請先閱讀背面之注項#(填窝本頁) 訂---------嗥 經濟部智慧財產局貝工消费合作社印製 A7 __B7___ 五、發明說明（1〇) 的風扇過濾單元1 4則進行吸入運轉。吹送運轉與吸入運 轉之風扇過爐單元1 4的台數，係考量送入室空間1 〇內 空氣的風量以及吸入天花板上方空間16空氣之風量的比 例來決定。例如’於第一實施形態所說明過之，使室空間 1 0內的氣壓比天花板上方空間1 6之氣壓高〇 . 2 mmAQ〜1 . 5mmAq時，從室空間1〇內流入天花 板上方空間1 6之空氣的全風量’約爲從天花板上方空間 1 6流入室空間1 0內之空氣的全風量的5%〜1 5%爲 理想。 如此地’在第二實施形態的無塵室裝置1 5中，由於 使一定台數的風扇過濾單元1 4進行吹送運轉，其餘的風 扇過濾單元1 4進行吸入運轉，而能使室空間1 〇內之一 部分的空氣被吸入天花板上方空間1 6。藉此，塵埃不會 滯留於室空間1 0內，藉由風扇過濾單元1 4內之過濾器 而被捕集，而能夠提高室空間1 0內之空氣的淸淨度。 被風扇過濾單元1 4之過濾器所捕集的塵埃，即使使 空氣改變通過過濾器的方向也不會再飛散。因此，風扇過 濾單元14之吹送運轉與吸入運轉可以視狀況之變化而自 由地因應切換。藉由，也可以對應室空間1 〇之模式更換 〇 在上述第二實施形態中，雖是於天花板1 2由天花板 骨架3 6所構成的所有格子空間裡，都設置風扇過濾單元 1 4，但本發明並不偈限於此。例如，將風扇過濾單元 1 4以隔以間隔來置配時，也可以藉由使一部分風扇過濾 — — — — — — — — — —— I -----1--—-------4; (請先《讀背面之注意事項#|填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -13- 經濟部智慧財產局貝工消費合作社印製 A7 ________B7___ 五、發明說明（11 ) 單兀1 4進行吸入運轉，其他之風扇過爐單元1 4做吹送 運轉，而提高室空間1 0內之空氣的淸淨度。 依第4圖及第5圖來說明本發明之第三實施形態之無 塵室裝置1 5。其中若與第1圖及第2圖所說明之第一實 施形態有同樣構件者’則標示相同符號，其說明亦省略之 〇 如第4圖所示，在天花板1 2之周緣部，與側壁及柱 所成之室空間1 0側壁部6 4之間的接合部分6 6，配設 有彎曲構件6 8。該彎曲構件6 8，可以是作爲天花板 1 2或是側壁部6 4之一部分來安設，或是作爲連結天花 板1 2與側壁部6 4的獨立構件來安設亦可。天花板骨架 36 ，係由懸吊螺栓13所支持。 彎曲構件6 8，如第5圖所示，係由彎曲多孔板7 〇 、及彎曲滑動板7 2、及彎曲過濾器7 4所形成。彎曲多 孔板7 0是面向室空間1 0，彎曲過濾器7 4是面向回返 空間2 2，彎曲滑動板7 2則是位於彎曲多孔板7 〇與彎 曲過濾器7 4之間。彎曲多孔板7 0，是由均一形成有多 數孔7 Ο A的底板7 Ο B、及相對兩邊的一對側緣上所形 成的導引板7 6、以及另一相對兩邊的一對側緣所形成的 制動板7 8所形成。彎曲滑動板7 2上也形成有多數的孔 7 2 A。彎曲滑動板7 2受導引板7 6所導引之同時’藉 由在箭頭8 0所示之方向上滑動而調整孔7 Ο A與？L 7 2 A之重疊情形，與前所述之通氣體4 0同樣地’得以 調整彎曲構件6 8之開口率。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -14- ------— — — — —— 1111111 ^ --------I J. . >/1.· (請先閲讀背面之注意事項再瑱寫本頁) 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（12) 彎曲過濾器7 4，係與通氣體4 0之過濾器4 2有相 同構造，可捕集通過彎曲構件6 8之空氣中的塵埃，以防 止塵埃在室空間1 0內與回返空間2 2之間做移動。彎曲 過濾器7 4是藉由複數個彎曲支持板8 1所固持，而彎曲 支持板8 1是藉由鎖止螺絲8 1 A，使其先端部鎖合於形 成在彎曲多孔板7 0上的孔7 0 C上而固定。 以下說明關於如上述所構成之本發明之第三實施形態 中，無塵室裝置1 5之作用。 驅動風扇過濾單元1 4之風扇，將淸淨空氣送入室空 間1 0內。從天花板1 2之周緣部近傍之風扇過濾單元 1 4所送入的空氣，係沿側壁部6 4而流下。側壁部6 4 與天花板1 2之接合部分6 6配設有彎曲構件6 8，由於 使接合部分6 6呈圓形狀，而使下降氣流順著彎曲構件 6 8之彎曲形狀而平順地流動。藉此，若與接合部分6 6 爲具有角形之構造相比較，由於使渦卷氣流不容易在天花 板1 6之周緣領域產生，而可以防止塵埃滯留在天花板 1 6之周緣領域，也因而提高室空間1 〇內的淸淨度。再 者，因爲彎曲構件6 8帶有通氣性’所以彎曲構件6 8與 前述之通氣體4 0具有同樣的作用。亦即’使得室空間 1 0內之天花板1 2之周緣領域的一部分空氣，經由彎曲 構件6 8流入回返空間2 2，而流回天花板上方空間1 6 。藉此，更可以抑制在室空間1 〇內之天花板1 2之周緣 領域中，渦卷氣流的產生，而得以輔助通氣體4 0之作用 ，使室空間1 0內之淸淨度提高。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -15- n n ϋ I \ I I -i ϋ ^β,1 · n 1· n I 嗥 • Vrj-,Ί <請先閲讀背面之注意事項再填寫本頁> A7 B7 五、發明說明（13) 【實施例】 以下說明有關本發明之無塵室裝置的實施例。 (請先閱讀背面之注意事項再填寫本頁) 在第2圖所示的室空間1 0的天花板1 2上，配設具 有7 2個格子空間的天花板骨架3 6。在該等格子空間之 中，於1 8個格子空間上設置風扇過濾單元1 4，其他的 5 4個空的格子空間則設置僅由過濾器4 2所成的通氣體 40。是以寬幅〇 . 6m、長度1 . 2m、高度〇 . 3m ’送風量9 6 〇m3/h的風扇過濾單元，來作爲風扇過濾 單元 14 而使用。並以 ULPA ( Ultra Low Penetration Air)過濾器作爲風扇過濾單元1 4內之過濾器及過濾器 42來使用。室空間10之高度爲3.5m，地板下空間 2 0的高度4m，天花板上方空間1 6之高度爲3 . 2m 〇 其次說明如上述所構成之實施例的作用。 經濟部暫慧財產局員工消费合作社印製 第6圖是室空間1 〇內之氣壓及天花板上方空間1 6 之氣壓的差，與從室空間1 0內經由通氣體4 0流入天花 板上方空間1 6之空氣的風量之間的關係圖。圖中實線爲 使用如上所述之U L P A過濾器時的結果，虛線爲使用 P T F E過濾器（使用聚四氟乙烯濾材之超高性能空氣過 濾器）做爲風扇過濾單元1 4內之過濾器及過濾器4 2使 用下之比較實施例的結果。在此，風量是以通過一個格子 空間下，從室空間1 0內流入天花板上方空間1 6之空氣 量。 如第6圖所示，室空間1 〇內與天花板上方空間1 6 -16- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 B7 五、發明說明（14) 之氣壓差愈小，則由室空間1 0內經由通氣體4 〇流至天 花板上方空間1 6的空氣風量也就愈少，而氣壓差愈大， 該風量就愈多。在本實施例中，室空間1 〇內之氣壓比天 花板上方空間16的氣壓高於〇 . 2mmAq〜1 . 5 m m A ci時，可以使室空間1 〇內做有效率的淨化。也就 是，當氣壓差太小時’空氣幾乎不會由室空間1 〇內流至 天花板上方空間1 6 ’而是在室空間1 〇內產生渦卷氣流 ’使塵埃滯留於室空間1 0內。相反地，氣壓差太大時， 會使得送入室空間1 0內的淸淨空氣之大多數爲經由通氣 體4 0而流至天花板上方空間1 6，使得室空間1 〇內之 淸淨化不能效率良好地進行。 使室空間10內的氣壓比天花板上方空間16的氣壓 僅高0·2mmAq〜1.5mmAq時，由室空間10 內經由全部的過濾器4 2而流入天花板上方空間1 6之空 氣風量的合計，是所有風扇過濾單元1 4從天花板上方空 間1 6送入室空間1 0內之空氣風量合計的5〜1 5%。 又，由第6圖可以得知，藉由改變過濾器4 2之種類，也 可以簡單地調整從室空間1 〇內經由過濾器4 2而流至天 花板上方空間16之空氣風量。 以下說明，是在本實施例，使室空間1 〇內之氣壓僅 高於天花板上方空間16之氣壓〇.25mmAQ時之作 用。 第7圖，係顯示在無塵室裝置1 5中’室空間1 〇內 之空氣流動其測定結果的模式圖。於同圖中’箭頭方向係 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閲讀背面之注$項再填寫本頁) I ·1111 — ·1111 — 11_ 經濟部智慧財產局員工消費合作社印製 -17- A7 B7 五、發明說明（15) • /\ (請先閲讀背面之注意事項再填窝本頁： 顯示空氣的流動方向，箭頭之尺寸大小即表示空氣流速的 大小。如同圖所示，在風扇過濾單元1 4的下方，有強力 的下降氣流產生。該領域空氣中的塵埃，會經由柵孔地板 1 8而在室空間1 〇外部被除去。另一方面，在通氣體 4 0正下方產生有上昇氣流。使風扇過濾單元1 4在送入 室空間1 0內之一部分空氣會經由通氣體4 0而流至天花 板上方空間1 6 ’其空氣中的塵埃便被過濾器4 2所捕集 。如此，藉由在沒有設置風扇過濾單元1 4的空格子空間 裡設置通氣體4 0，使室空間1 〇內之空氣中的塵埃，不 會滯留於室空間1 0內而會被除去。 第8圖，是顯示在第7圖中的點A以人工產生塵埃， 並在室空間1 0內以B、C、D作爲計測位置來測定塵埃 濃度（每1立方英尺之塵埃的個數）之測定結果的圖示。 從點A，與計測位置B、C、D的水平距離分別爲〇 . 6 m、1 . 2 m、1 . 8 m，並使計測位置B、C、D之各 點分別在離柵孔地板1 8之高度爲2 . 7m、2 . 4m、 經濟部智慧財產局員工消費合作社印製 2 . 1 m、1 . 8 m、1 . 5 m時之做各點之測定。以本 實施例所測定之結果以圓圈表示’而在空的格子空間裡’ 取代過濾器4 2而設置以閉塞板之比較例所測得之結果以 劃叉表示。 如同第8圖所顯示，在空格子空間裡設置過濾器4 2 之本實施例中，室空間1 〇內之空氣中的塵埃濃度’幾乎 在所有的測量位置’是設置閉塞板之比較例的一半以下。 如此得知，藉由在沒有設置風扇過濾單元1 4的空格子空 -18- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局貝工消费合作社印製 A7 ____B7__ 五、發明說明（16 ) 間裡設置通氣體4 0，可以提高室空間1 〇內之淸淨度。 【在產業上利用的可能性】 如以上所說明，依據本發明之無塵室裝置，是於室內 之天花板，以隔開間隔配置風扇過濾單元，並在沒有設置 風扇過濾單元的空格子空間裡設置通氣體，來使室內的一 部分空氣經由通氣體而流至天花板上空間之方式進行。藉 此，由於即使隔以間隔地配置風扇過濾單元，也能夠防止 在室內之空格子空間的下方領域產生渦卷氣流之產生，所 以能夠防止塵埃滯留於室內，而得以提高室內的淸淨度。 【圖面之簡單說明】 第1圖是使用本發明之無塵室裝置的無塵室系統的全 體構造圖。 第2圖是第1圖之無塵室裝置之室內天花板之立體圖 〇 第3圖爲第1圖之通氣體的立體圖。 第4圖爲第三實施形態之無塵室裝置.的斷面圖。 第5圖是在第三實施形態之無塵室裝置中，彎曲構件 的分解圖。 第6圖是在本發明之實施例中對於無塵室裝置的室內 氣壓與天花板上方空間之氣壓的差，及經由通氣體流動空 氣的風量的關係圖。 第7圖爲本發明之實施例中，在無塵室裝置之室內的 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） "19- ----1-------1 ^--------訂----- (請先《讀背面之注意事項再填寫本頁)Scaleji #printed by the co-operative cooperative of the Wisdom Wealth Institute Bureau V. Composition of invention description (6). The filter 42, for example, folds a non-woven fabric made of a fibrous material (for example, glass fiber) into a bellows shape. When the air containing the dust is passed through the filter 42, the dust is captured by the fibers inside the filter 42 and the air is purified. The perforated plate 44 is uniformly formed with holes throughout the plate, and the aperture ratio of the perforated plate 44 is determined in consideration of the air permeability of the gas 4o. For example, if the air pressure in the room space 10 is greater than the air pressure in the space 16 above the ceiling by 0.2 mmAq to 1.5 mmAq, the air space in the room space 10 flows into the space above the ceiling 1 through the air flow 40. The total air volume of the air of 6 is 5% ~ 15% of the total air volume of the air filtered by the fan filter unit 14 into the room space 10 from the space 16 above the ceiling. The breathability is advantageous for the following reasons. That is, the ventilation of the ventilation 40 is too small. When the amount of air flow from the room space 10 through the ventilation 40 to the space 16 above the ceiling is too small, a vortex flow is generated below the ventilation 40. As a result, the dust stays in the chamber space 10. Conversely, if the ventilation 40 is too large, and the air flowing into the space 16 above the ceiling through the ventilation 40 from the room space 10 is excessive, it is sent to the room space 1 by the fan filter unit 14 The clean air in 0 will directly flow into the space 16 above the ceiling, and the purification efficiency in the room space 10 will deteriorate. As long as the gas is passed through 40, it is necessary to have the necessary air permeability. For example, a filter that can adjust the air permeability only by the choice of the type or thickness may be provided as the air passage 40. Alternatively, the perforated plate whose aperture ratio can be adjusted only in a manner suitable for air permeability can be provided as the gas pass 40. — — — — — — — — — — — 'I · 1111111 11111111 4-/ > «. (Please read the precautions on the back before filling out this page) This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 mm) -9-Printed by A7 _ B7, Shellfish Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (7) Adjustment of aperture ratio of perforated plate 4 4 It is composed of two perforated plates, and the size of the holes of the two perforated plates can be adjusted. Thereby, the air permeability of the gas passage 40 can be easily adjusted to an appropriate manner by adjusting the aperture ratio of the porous plate 44 in accordance with the scale or cleanliness of the clean room device 15. Furthermore, even after completion of the clean room device 15, the aperture ratio of the porous plate 44 can be easily changed. The gas passing 40 is not limited to the perforated plate 44 or the filter 42 as described above. As long as it has a proper air permeability, for example, a slit plate or a fan filter unit 14 that has stopped operating may be used as the air passage 40. The operation of the clean room device 15 according to the first embodiment of the present invention constructed as described above will be described below. The fan of the fan filter unit 14 is driven to send clean air into the room space 10. Thus, under the fan filter unit 14, a downward air flow is formed from the ceiling 12 to the grille floor 18, and most of the air in the room space 10 flows into the space under the floor through the grille floor 18 together with the dust. 2 0. The air flowing into the underfloor space 20, as described above, is returned to the space above the ceiling 16 in addition to a portion of the air discharged to the outside of the clean room system 11 and again purified and cleaned by the fan filter unit 14 Into the room space 10. Since air is sent into the room space 10 from the space 16 above the ceiling, the air pressure in the room space 10 is higher than that in the space 16 above the ceiling. As a result, an updraft is generated in the area directly below the ventilation gas 40 in the room space 10, so that a part of the air in the room space 10 conforms to the Chinese National Standard (CNS) A4 specification (210 X 297 meters) through this paper standard. Li) -10- — — — If — —— — — — V *, 'I > — — — — — — — — — — — — — — / *. «1,, (Please read the back first Please fill in this page with note $) A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (8) Gas 40 flows into the space 16 above the ceiling. Therefore, no vortex airflow will be generated in the area below the blank subspace as before, so the dust will not stay in the room space 10. As described above, in the clean room device 15 of the first embodiment, the air passage 4 formed by the filter 4 2 and the perforated plate 4 4 is provided in the empty subspace where the fan filter unit 14 is not provided. Therefore, a part of the air in the room space 10 can flow into the space above the ceiling 16 by passing the gas 40 through the pressure difference between the pressure in the room space 10 and the pressure in the space 16 above the ceiling. Because the dust can be removed without remaining in the room space 10, the room space 10 can have a high degree of cleanliness. When a part of the air in the room space 10 flows into the space 16 above the ceiling through the ventilation 40, the dust in the air will be captured by the filter 4 2 through the ventilation 40. Thereby, the amount of dust collected by the filter in the fan filter unit 14 is reduced, so that the life of the filter in the fan filter unit 14 can be extended. It is also possible to set a fan above the ventilation 40, and drive the fan to send the air in the space 16 above the ceiling into the room space 10. Thereby, the filter 42 has the same function as the filter of the fan filter unit 14, and it can respond to the demand situation where high purity is required in the area below the ventilation 40. In the first embodiment described above, although the ventilation space 40 is provided in the space subspace where the fan filter unit 14 is not provided in the grid space of the ceiling frame 12, the present invention is not limited to this. For example, a space 40 may be provided in a space where the ceiling 12 faces a side wall or a cylinder. (Please read the note on the back before filling in this page.) This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm). -11-Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs A7 __ B7 _ V. Description of the Invention (9) In the first embodiment described above, although the air pressure difference generated between the fan filter unit 14 in the room space 10 and the space 16 above the ceiling is used to make the room space within 10 Air flows into the space 16 above the ceiling, but the present invention is not limited to this. For example, a fan 'may be provided above the ventilation 40, and the fan may be driven to suck the air in the room space 10 into the space 16 above the ceiling. With this, even if the aperture ratio of the perforated plate 4 4 is not adjusted, and by adjusting the driving of the fan, it is possible to simply adjust the amount of air flowing from the room space 10 into the space 16 above the ceiling. Therefore, a part of the fan filter units 14 arranged in the plurality of fan filter units 14 on the ceiling 12 is operated in the reverse direction, and the air in the room space 10 is sucked into the space 16 above the ceiling. Effect. Hereinafter, the clean room device 15 in this case will be described as a second embodiment. In the clean room device 15 according to the second embodiment of the present invention, the fan filter unit 14 is provided in the ceiling space 12 shown in FIG. 2 in the entire lattice space of the ceiling frame 36. The fan filter unit 14 can blow the air from the space 16 above the ceiling to the room space 10 by running the fan forward, and the room space by reversely operating the fan. The air in 10 is sucked into the space 16 above the ceiling for the suction operation. The other structures of the second embodiment are the same as those of the first embodiment, and therefore descriptions thereof are omitted. The operation of the clean room device 15 according to the second embodiment of the present invention constructed as described above will be described below. Make a certain number of fan filter units 14 to blow. 'The rest of this paper size uses the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -12----- ------- installed ill! (Please read the note # on the back first (fill in this page)) --------- 嗥 Printed by the Shellfish Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs A7 __B7___ V. Description of Invention (1〇) The fan filter unit 14 performs the suction operation. The number of the fan furnace unit 14 for the blowing operation and the suction operation is based on the ratio of the amount of air sent into the room space 10 and the amount of air drawn into the space 16 above the ceiling. For example, as described in the first embodiment, when the air pressure in the room space 10 is higher than the air pressure in the space 16 above the ceiling by 0.2 mmAQ to 1.5 mmAq, it flows into the ceiling from the room space 10. The total air volume of the air in the space 16 'is preferably about 5% to 15% of the total air volume of the air flowing into the room space 10 from the space 16 above the ceiling. In this way, in the clean room of the second embodiment In the device 15, a certain number of fan filter units 14 are blown. The remaining fan filter units 14 perform the suction operation, so that part of the air in the room space 10 can be sucked into the space 16 above the ceiling. Thereby, the dust does not stay in the room space 10, and the fan filter unit It can be trapped by the filter inside 14 and can improve the cleanliness of the air in the room space 10. The dust captured by the filter of the fan filter unit 14 can change the direction of the air through the filter. It will not be scattered anymore. Therefore, the blowing operation and the suction operation of the fan filter unit 14 can be switched freely according to changes in the conditions. The mode can also be changed according to the room space 〇 In the second embodiment described above, Although the fan filter units 14 are provided in all the grid spaces formed by the ceiling frame 12 and the ceiling frame 36, the present invention is not limited thereto. For example, the fan filter units 14 are spaced apart from each other. When configuring, you can also filter by a part of the fan — — — — — — — — — —— I ----- 1 --—------- 4; Matters # | Fill in this page) Standards are applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) -13- Printed by the Shellfish Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs A7 ________B7___ V. Description of the invention (11) Unit 14 performs inhalation operation, others The fan furnace unit 14 performs a blowing operation to increase the cleanliness of the air in the room space 10. The clean room device 15 according to the third embodiment of the present invention will be described with reference to Figs. 4 and 5. If the same components as those in the first embodiment described in FIG. 1 and FIG. 2 are used, the same symbols are used, and their descriptions are omitted. As shown in FIG. 4, the peripheral edge portion of the ceiling 12 and the side walls and The joint portion 66 between the side wall portions 64 of the room space 10 formed by the columns is provided with a bending member 68. The curved member 68 may be installed as a part of the ceiling 12 or the side wall portion 64, or may be installed as an independent member connecting the ceiling 12 and the side wall portion 64. The ceiling frame 36 is supported by suspension bolts 13. As shown in FIG. 5, the curved member 68 is formed of a curved perforated plate 70, a curved sliding plate 72, and a curved filter 74. The curved perforated plate 70 is facing the chamber space 10, the curved filter 74 is facing the return space 22, and the curved sliding plate 72 is located between the curved perforated plate 70 and the curved filter 74. The curved perforated plate 70 is composed of a bottom plate 7 0 B uniformly formed with a plurality of holes 70 A, a guide plate 76 formed on a pair of opposite side edges, and a pair of side edges on the other opposite sides. The formed brake plates 78 are formed. A large number of holes 7 2 A are also formed in the curved sliding plate 72. The curved slide plate 7 2 is guided by the guide plate 76 while the slide hole 7 2 is adjusted in the direction shown by the arrow 80 to adjust the hole 7 〇 A and? The overlap of L 7 2 A can adjust the aperture ratio of the curved member 6 8 in the same manner as the previously described gas pass 40. This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) -14- ---------- — — —-1111111 ^ -------- I J.. ≫ /1.· (Please read the notes on the back before copying this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (12) Bending filter 7 4 The filter 42 has the same structure and can trap dust in the air passing through the curved member 68 to prevent the dust from moving between the room space 10 and the return space 22. The curved filter 74 is held by a plurality of curved support plates 8 1, and the curved support plate 8 1 is locked with a screw 8 1 A so that its tip end is fixed to the curved porous plate 70. Hole 70 C and fixed. The operation of the clean room device 15 in the third embodiment of the present invention constructed as described above will be described below. The fan of the fan filter unit 14 is driven to send clean air into the room space 10. The air sent from the fan filter unit 14 near the peripheral edge portion of the ceiling 12 flows down along the side wall portion 64. The joint portion 6 6 of the side wall portion 6 4 and the ceiling 12 is provided with a curved member 6 8. Since the joint portion 6 6 is formed in a circular shape, the descending air flows smoothly along the curved shape of the curved member 68. This makes it possible to prevent dust from staying in the peripheral area of the ceiling 16 because the vortex airflow is less likely to be generated in the peripheral area of the ceiling 16 as compared with the angular structure of the joint portion 6 6, thereby improving the room. Clarity in space 10. In addition, since the bending member 68 is provided with air permeability, the bending member 68 has the same function as the above-mentioned gas passing 40. That is, 'a part of the air in the peripheral area of the ceiling 12 in the room space 10 flows into the return space 22 through the curved member 68, and flows back to the space 16 above the ceiling. This can further suppress the generation of vortex airflow in the peripheral area of the ceiling 12 in the room space 10, thereby assisting the flow of the gas 40, and improving the cleanliness of the room space 10. This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -15- nn ϋ I \ II -i ϋ ^ β, 1 · n 1 · n I 嗥 • Vrj-, Ί < Please first Read the notes on the back and fill out this page> A7 B7 V. Description of the invention (13) [Example] The following describes the example of the clean room device of the present invention. (Please read the precautions on the back before filling out this page.) On the ceiling 12 of the room space 10 shown in Figure 2, a ceiling frame 36 with 72 grid spaces is provided. Among these grid spaces, fan filter units 14 are provided on 18 grid spaces, and the other 54 blank grid spaces are provided with a ventilation gas 40 formed only by the filters 42. A fan filter unit having a width of 0.6 m, a length of 1.2 m, and a height of 0.3 m 'and an air supply volume of 960 m3 / h was used as the fan filter unit 14. A ULPA (Ultra Low Penetration Air) filter is used as the filter and filter 42 in the fan filter unit 14. The height of the room space 10 is 3.5 m, the height of the space under the floor 20 is 4 m, and the height of the space 16 above the ceiling is 3.2 m. Next, the function of the embodiment constructed as described above will be described. Printed by the Consumer Cooperative of the Provisional Property Bureau of the Ministry of Economic Affairs. Figure 6 shows the difference between the air pressure in the room space 10 and the air pressure in the space 16 above the ceiling. The relationship between the air volume of the 6 air. The solid line in the figure is the result when using the ULPA filter as described above, and the dotted line is the use of a PTFE filter (Ultra high performance air filter using PTFE filter material) as the filter in the fan filter unit 14 and The filter 42 was used as a result of the comparative example below. Here, the air volume is the volume of air that flows into the space 16 above the ceiling from the inside of the room space 10 through a grid space. As shown in Figure 6, the space inside the room 10 and the space above the ceiling 1 6 -16- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) A7 B7 V. Description of the invention (14) The smaller the air pressure difference, the less the amount of air flow from the room space 10 to the space 16 above the ceiling via the ventilation 40, and the larger the air pressure difference, the more the air volume. In this embodiment, when the air pressure in the room space 10 is higher than the air pressure in the space 16 above the ceiling, 0.2 mmAq to 1.5 mm A ci, the room space 10 can be efficiently purified. That is, when the air pressure difference is too small, 'the air hardly flows from the inside of the room space 10 to the space above the ceiling 16', but generates a swirling air flow in the room space 10 ', so that the dust stays inside the room space 10'. Conversely, when the air pressure difference is too large, most of the clean air sent into the room space 10 will flow to the space above the ceiling 16 through the air 40, making it impossible to purify the room air. Efficiently. When the air pressure in the room space 10 is only 0.2 mmAq to 1.5 mmAq higher than the air pressure in the space 16 above the ceiling, the total amount of air volume flowing from the room space 10 into the space 16 above the ceiling through all the filters 4 2 is All fan filter units 14 send 5 to 15% of the total air volume from the space 16 above the ceiling into the room space 10. In addition, it can be seen from FIG. 6 that by changing the type of the filter 42, it is also possible to simply adjust the air volume flowing from the room space 10 to the space 16 above the ceiling through the filter 42. The following description is for the purpose of this embodiment when the air pressure in the room space 10 is higher than the air pressure in the space 16 above the ceiling by 0.25 mm AQ. Fig. 7 is a schematic diagram showing the measurement results of the air flow in the 'room space 10' of the clean room device 15. In the same figure, the direction of the arrow is the size of the paper applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) (please read the note on the back before filling this page) I · 1111 — · 1111 — 11_ Economy Printed by the Ministry of Intellectual Property Bureau's Consumer Cooperatives -17- A7 B7 V. Invention Description (15) • / \ (Please read the precautions on the back before filling in this page: Show the direction of air flow, the size of the arrow indicates The magnitude of the air velocity. As shown in the figure, a strong downward airflow is generated below the fan filter unit 14. The dust in the air in this area will be removed outside the room space 10 through the grid hole floor 18. On the other hand, an updraft is generated just below the ventilation 40. The fan filter unit 14 sends a part of the air in the room space 10 to the ceiling space 16 through the ventilation 40. The dust in the air is captured by the filter 42. In this way, by setting the ventilation 40 in the space subspace where the fan filter unit 14 is not provided, the dust in the air in the room space 10 will not be Stranded in the air It will be removed within 10. Figure 8 shows that point A in Figure 7 is used to artificially generate dust, and the concentration of dust is measured using B, C, and D as measurement positions in room space 10 (per 1 The number of cubic feet of dust) is a graphical representation of the measurement results. From point A, the horizontal distances from measurement positions B, C, and D are 0.6 m, 1.2 m, and 1.8 m, respectively. The points B, C, and D are 2.7m, 2.4m, and 1.8m, 1.8m, and 1.8m respectively printed at the height from the grid hole floor. The measurement was performed at 5 m at each point. The results measured in this example are indicated by a circle 'and in an empty grid space' instead of the filter 4 2 and the results measured by the comparative example with a blocking plate are drawn. As shown in FIG. 8, in the present embodiment in which the filter 4 2 is provided in the space subspace, the dust concentration in the air in the room space 10 is 'almost at all measurement positions'. Comparative example is less than half. In this way, by knowing that the space for the fan filter unit 14 is not provided, the space is -18- Degree Applicable to China National Standard (CNS) A4 (210 X 297 mm) A7 printed by Shelley Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs ____B7__ V. Description of the invention (16) Ventilation is provided in the room 40, which can increase room space 〇Clearness within industry. [Possibility of industrial use] As explained above, the clean room device according to the present invention is a ceiling of the room. Fan filter units are arranged at intervals, and no fan is installed. Ventilation is provided in the empty subspace of the filter unit, so that a part of the air in the room flows into the space on the ceiling through the ventilation. Therefore, even if the fan filter units are arranged at intervals, it is possible to prevent the generation of swirling airflow in the area below the empty subspace in the room, so that it is possible to prevent dust from staying in the room and improve the cleanliness of the room. [Brief description of the drawing] Fig. 1 is a diagram showing the overall structure of a clean room system using the clean room device of the present invention. Fig. 2 is a perspective view of the indoor ceiling of the clean room device of Fig. 1 ○ Fig. 3 is a perspective view of the ventilation of the first figure. Fig. 4 is a sectional view of a clean room device according to a third embodiment. Fig. 5 is an exploded view of the curved member in the clean room device of the third embodiment. Fig. 6 is a graph showing the relationship between the difference between the indoor air pressure of the clean room device and the air pressure in the space above the ceiling, and the air volume of the air flowing through the air in the embodiment of the present invention. FIG. 7 is an embodiment of the present invention. The paper size in the clean room device is in accordance with China National Standard (CNS) A4 (210 X 297 mm) " 19- ---- 1 --- ---- 1 ^ -------- Order ----- (please read the precautions on the back before filling this page)
f I A7 B7 五、發明說明（17) 氣流模式圖。 經濟部智慧財產局員工消費合作社印製 第8 圖 是 顯 示 本 發 的塵 埃濃 度 〇 主要 元件 對 照 表 10 室 空 間 ( 室 內 ) 11 無 塵 室 系 統 12 天 花 板 13 懸 吊 螺 栓 14 風 扇 過 濾 單 元 15 4K 塵 室 裝 置 16 天 花 板 上 方 空 間 18 柵 孔 地 板 20 地板 下 空 間 21 乾 燥 冷卻 線 圈 22 回 返 空 間 24 換 氣 通 氣 管 26 空 三田 日周 機 28 吸 入 外 氣 通 氣 管 30 供 氣 通 氣 管 32 排 氣 通 氣 管 36 天 化 板 骨 架 40 通 氣 體 42 過 濾 器 (請先閱讀背面之注意事項再填寫本頁> 裝！| 訂·111 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -20- A7 _B7 五、發明說明（18) 44 多孔板 64 側壁部 66 接合部分 68 彎曲部分 70 彎曲多孔板 70A、 70C 孔 70B 底板 72 彎曲滑動板 74 彎曲過濾器 76 導引板 78 制動板 81 彎曲支持板 8 1 A 鎖止螺絲 — — — — — — — — — —--'裝 ---訂--------1^ 4 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -21 -f I A7 B7 V. Description of the invention (17) Air flow pattern diagram. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 8 shows the dust concentration of this product. ○ Comparison table of main components 10 Room space (indoor) 11 Clean room system 12 Ceiling 13 Suspension bolt 14 Fan filter unit 15 4K dust room Device 16 Space above the ceiling 18 Grid hole floor 20 Space under the floor 21 Drying and cooling coils 22 Return space 24 Ventilation and ventilation tube 26 Air Sanda day and week machine 28 Inhalation external ventilation tube 30 Air supply ventilation tube 32 Exhaust ventilation tube 36 Natural Plate frame 40 through gas 42 filter (Please read the precautions on the back before filling in this page > Pack! | Order · 111 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -20- A7 _B7 V. Description of the invention (18) 44 Perforated plate 64 Side wall portion 66 Joint portion 68 Bent portion 70 Bent perforated plate 70A, 70C Hole 70B Base plate 72 Bend slide plate 74 Bend filter 76 Guide plate 78 Brake plate 81 Bend support plate 8 1 A Stop screw — — — — — — — — — — —'install --- order -------- 1 ^ 4 (Please read the notes on the back before filling this page) Staff of the Intellectual Property Bureau of the Ministry of Economic Affairs The paper size printed by the consumer cooperative is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) -21-