3 5 0ltwf.doc/00S 3 5 0ltwf.doc/00S 經濟部中央標準局員工消費合作社印製 A7 _______ B7 ___ 五、發明説明（f ) 本發明是有關於一種化學機械硏磨（Chemical-Mechanical Polishing ; CMP) 之硏磨墊 （polishing pad) ， 且 特別是有關於一種具有自我壽命顯示（lifetime self-indicated)能 力的硏磨墊。 :在半導體製程中，表面平坦化是處理高密度微影的一 項重要技術’因沒有高低落差的平坦表面才能避免曝光散 射’而達成精密的圖案轉移（pattern transfer)。平坦化技術 主要有旋塗式玻璃法（Spin-〇n Glass; SOG)與化學機械硏磨 法(CMP)等二種，但在半導體製程技術進入深次微米卜心-half-micron)之後，旋塗式玻璃法已無法滿足所需求的平坦 度’所以在半導體製程進入深次微米領域後，化學機械硏 磨技術是現在唯一能提供超大型積體電路（Very-Large Scale Integration ;VLSI)’ 甚至極大型積體電路（Ultra-Large Scale lntegrati〇n ; ULSI)製程，.“全面性平坦化（global planarization)”的一種技術。 但是，習知化學機械硏磨機台的缺點在於：硏磨墊是 主要的一種耗材。通常硏磨墊在經歷過硏磨數百次之後必 須更換。不過由於每次硏磨時的製程條件不同，再加上硏 磨墊本身製造品質上也有差異’所以很難判斷一硏磨墊的 使用之壽命終點。而且，目前習知關於硏磨墊的磨耗程度 與焉命終點並無一套客觀的評估方式。一般皆是以累積的 硏磨片數，或是利用硏磨的時間長短，來決定是否應更換 硏磨塾。但是，此種方式太過於粗糙，不能確實掌握硏磨 塾的磨耗程度與壽命終點，故對產品的品質控制將有不利 3 本紙張尺度適用 CNS ) A4W ( 210X297公整~~~~ ~ (請先閱讀背面之注意事項再填寫本頁)3 5 0ltwf.doc / 00S 3 5 0ltwf.doc / 00S Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 _______ B7 ___ V. Description of the Invention (f) The present invention relates to a chemical-mechanical polishing CMP) polishing pad, and in particular, a honing pad with a life self-indicated ability. : In the semiconductor manufacturing process, surface planarization is an important technique for processing high-density lithography. ‘Because there is no flat surface with high and low dropouts to avoid exposure scattering’, precise pattern transfer is achieved. There are two types of planarization technologies, such as spin-on glass (SOG) and chemical mechanical honing (CMP), but after the semiconductor process technology has entered the deep sub-micron-half-micron, The spin-on glass method has been unable to meet the required flatness. 'So after the semiconductor process enters the sub-micron field, chemical mechanical honing technology is now the only one that can provide very-large scale integration (VLSI)' Even Ultra-Large Scale Circuit (ULSI) process, a technology of "global planarization". However, the disadvantage of the conventional chemical mechanical honing machine is that the honing pad is the main consumable. Honing pads usually have to be replaced after hundreds of honing. However, because the process conditions at each honing are different, and the manufacturing quality of the honing pad itself is different, it is difficult to judge the end of the life of a honing pad. Moreover, there is currently no objective method for assessing the degree of wear of honing pads and the end of life. Generally, the number of honing pads or the length of honing time is used to determine whether the honing hob should be replaced. However, this method is too rough to accurately grasp the degree of wear and end-of-life of honing, so it will be detrimental to the quality control of the product. 3 Paper sizes are applicable to CNS) A4W (210X297 mm ~~~~ ~ (Please (Read the notes on the back before filling out this page)
350 ltvvf.doc/008 350 ltvvf.doc/008 經濟部中央標準局員工消費合作社印製 A7 ___ _ B7_ 五、發明説明（）） 的影響。尤其是對實驗性質的硏究機構，或是晶圓代工廠 而言，製程條件的變異是必然的，因此客觀的掌握硏磨墊 的磨耗程度與壽命終點，是目前欲突破的課題。， 有鑑於此，本發明提供一種可自我壽命顯示之化學機 械硏磨墊’使用改良式的硏磨墊結構，可以在硏磨時，顯 示出硏磨墊本身的磨耗程度，並具備顯示本身壽命終點的 能力’不但對於提昇製程品質有幫助，且可以發揮硏磨墊 的最大壽命，以節約成本。 爲完成本發明之目的，提供一種可自我壽命顯示之化 學機械硏磨墊，其結構包括：一硏磨台，以一方向旋轉； 一自我壽命顯示硏磨墊，設於硏磨台上；一晶片，置於自 我罱命顯不硏磨墊上，此晶片具有一背面與一正面，而晶 片的正面與自我壽命顯示硏磨墊硏磨表面相接觸；一管 件’置於自我壽命顯示硏磨墊上方，此管件用以輸送一硏 槳至自我壽命顯示硏磨墊上；以及一握柄，用以抓住晶片 的背面’將晶片的正面壓在自我壽命顯示硏磨墊上。本發 明特徵在於自我壽命顯示硏磨墊，其結構包括硏磨墊主體 以及多層顔色指示層。其中，硏磨墊主體具有一硏磨表面， 而多層顏色指示層則是由染色或壓合嵌入於此表面內。此 多層顏色指示層具有一固定厚度，例如約在20_500 μπι之 間’這些顏色層不僅顏色不同，且距表面之深度也不相同， 在研1磨時將因磨耗而使不同的顏色漸次顯露出來，由這些 顏色變化可用來指示硏磨墊主體的磨耗程度及壽命終點。 其材料可由硏磨墊材料本身染色而得或由性質相近之材料 4 (請先閲讀背面之注意事項再填寫本頁)350 ltvvf.doc / 008 350 ltvvf.doc / 008 Printed by the Consumers' Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs A7 ___ _ B7_ V. The impact of the invention ()). Especially for experimental research institutions or wafer foundries, variations in process conditions are inevitable. Therefore, objectively grasping the degree of wear and end-of-life of honing pads is a topic to be broken. In view of this, the present invention provides a chemical-mechanical honing pad with self-life display. The use of an improved honing pad structure can display the degree of wear of the honing pad itself during honing, and has the life of the display itself The ability of the end point not only helps to improve the quality of the process, but also can maximize the life of the honing pad to save costs. In order to achieve the purpose of the present invention, a chemical mechanical honing pad with self-life display is provided. The structure includes: a honing table rotating in one direction; a self-life display honing pad provided on the honing table; The wafer is placed on the self-life display honing pad. The wafer has a back surface and a front surface, and the front side of the wafer is in contact with the self-life display honing pad honing surface. A tube is placed on the self-life display honing pad. This tube is used to transport a paddle to the self-life display honing pad; and a handle for grasping the back of the wafer 'to press the front side of the wafer on the self-life display honing pad. The invention is characterized by a self-life display honing pad, the structure of which includes a honing pad body and a plurality of color indicating layers. The honing pad body has a honing surface, and a plurality of color indicating layers are embedded in the surface by dyeing or laminating. The multi-layer color indicating layer has a fixed thickness, for example, about 20-500 μm. These color layers have different colors and different depths from the surface. Different colors will be gradually exposed due to abrasion during grinding. These color changes can be used to indicate the degree of wear and end of life of the honing pad body. The material can be dyed from the honing pad material itself or a similar material 4 (Please read the precautions on the back before filling this page)
本紙張尺度適用中國國CNS ) Α4規格（2丨〇><297公釐） ' 35〇lt\vf.d〇c/〇〇ii A7 'w~--:- B7 ^_ 五、發明説明（》） :--- (請先閲讀背面之注意事項再填寫本頁) 製造，所以對製程不致產生改變。.其形狀不限於圓形，亦 可爲一個或多個圓環形。其大小只要以肉眼能明確辨視即 可’並不限於與硏磨墊的直徑或寬度相同。當其大小遠小 於硏磨塾直徑時，其數目可不限於—個，其位置可以位於 硏磨墊主體中的同—俯視位置，亦可以分別位於硏磨墊主 體中的不同俯視位置。上述多層顏色指示層亦可以指示劑 色條來取代’指示劑色條位於硏磨墊主體的表面上，其材 料可爲氧化/還原指示劑或是酸驗指示劑。 爲讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂’下文特舉一較佳實施例，並配合所附圖式，作詳 細說明如下。 圖式之簡單說明·· 第1A圖係繪示習知一種化學機械硏磨機台整體結構 之俯視圖； 第1B圖係繪示習知一種化學機械硏磨機台整體結構 之側視圖； 第2A圖係繪示本發明之第一較佳實施例，一種可自 我壽命顯示化學機械硏磨墊之斜視圖； 經濟部中央標準局員工消費合作社印裝 第2B圖係繪示根據第2A圖，一種可自我壽命顯示化 學機械硏磨墊局部放大結構示意圖； 第2C圖係繪示根據第2A圖，另一種可自我壽命顯示 化學機械硏磨墊之斜視圖； 第3A圖係繪示本發明之第二較佳實施例，一種可自 我壽命顯示化學機械硏磨墊之斜視圖； 5 度適用中國國家標準（CNS ) A4規格（210X297公釐） A7 3501twf.doc/008 B7 五、發明説明（（6 ) 第3B圖係繪示根據第3A圖，一種可自我壽命顯示化 學機械硏磨墊局部放大結構示意圖； 第4圖係繪示本發明之第三較佳實施例，一種可自我 壽命顯示化學機械硏磨墊之斜視圖； 第5圖係繪示本發明之第四較佳實施例，一種可自我 壽命顯示化學機械硏磨墊之斜視圖； 第6圖係繪示本發明之第五較佳實施例，一種可自我 壽命顯示化學機械硏磨墊之斜視圖； 第7A圖與第7B圖，其分別繪示另一種習知化學機械 硏磨機台的俯視與斜視圖； 第8A圖係繪示本發明之第六較佳實施例，一種用於 第7圖機台的可自我壽命顯示化學機械硏磨墊之斜視圖； 第8B圖係繪示根據第8A圖，一種可自我壽命顯示化 學機械硏磨墊局部放大結構示意圖； 第9A圖係繪示本發明之第七較佳實施例，一種用於 第7圖機台的可自我壽命顯示化學機械硏磨墊之斜視圖； 以及 第9B圖係繪示根據第9A圖，一種可自我壽命顯示化 學機械硏磨墊局部放大結構示意圖。 圖式之標記說明： 10.70 : 5幵磨台 11.71 :握柄 12.72 :晶片 13.73 :硏磨墊 6 (請先閱讀背面之注意事項再填寫本頁) 訂 本紙張用中國國家標準（CNS ) A4規格（210X297公釐) 350 I twf.doc/008 350 I twf.doc/008 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（f) 14.74 :管件 15.75 :硏漿 16.76 :液泵 18,78:晶片的背面 19,79 :晶片的正面 20,30,40,50,60,80:自我壽命顯示硏磨墊主體 21,31,41,51,61,61,81 :硏磨墊硏磨表面 22,32,82 :多層顏色指示層' 23,33,44,54,64 :硏磨墊側面 42,62a,62b :指示劑色層 5 1,52,53 :多層指示劑色層 實施例一 請同時參照第1A圖與第1B圖，其分別繪示一種習知 化學機械硏磨機台的俯視與側視圖。其中包括：一硏磨台 10(polishing table); —握柄 1 l(holder)，用以抓住被硏磨的 晶片12 ; —硏磨墊13(polishing pad)，舖在硏磨台10上； 一管件14(tube)，用以輸送硏漿15(SlUiry)到硏磨墊13上； 以及一液泵16，用以將硏漿15抽送到管件14中。當進行 化學機械硏磨時，硏磨台.10與握柄Π分別沿一定的方向 旋轉，如圖中之箭號17a與17b所示，且握柄11抓住晶片 12的背面18，將晶片12的正面19壓在硏磨墊13上。管 件Η係將液泵16所打進來的硏漿15，持續不斷地供應到 硏磨墊13上。所以，化學機械硏磨程序就是利用硏漿15 7 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） (讀先閲讀背面之注意事項再填寫本頁) -裝. 訂 3 50 1 twf.doc/008 3 50 1 twf.doc/008 經濟部中央樣準局員工消費合作社印製 A7 _ B7__ 五、發明説明（έ ) 中的化學助劑，在晶片12的正面19上產生化學反應，使 之形成一易硏磨層，再配合晶片12在硏磨墊13上藉由硏 發15中之硏磨粒(abrasive particles)輔助之機械硏磨，將易 硏磨層之凸出部份硏磨，反覆上述化學反應與機械硏磨， 即可形成平坦的表面。基本上，化學機械硏磨技術是利用 機械拋光的原理，配合適當的化學助劑（reagent)與硏磨 粒，將表面高低起伏不一的輪廓，一倂加以“磨平”的平坦 化技術。 請參照第2A圖，其係繪示本發明之第一較佳實施例， 一種化學機械硏磨機台中硏磨墊之斜視圖。再同時參照第 2B圖’其所繪示是根據第2A圖之局部放大結構24的斜視 圖。其中，自我壽命顯示硏磨墊20,其包括硏磨墊主體21 以及多層顏色指示層22。.硏磨墊主體21較佳的是爲圓盤 狀的結構’其具有表面23。至於多層顏色指示層22，則是 被壓合嵌入於硏磨墊主體21的表面23中，其材質與硏磨 墊20相同，多層顏色指示層22在表面23下的深度”L”通 常約爲一固定厚度，此固定厚度小於硏磨墊主體21的厚 度，其定義爲一般習知硏磨墊耗損的程度’通常此厚度約 在20-500μιη之間。多層顏色指示層22包括顏色層22a ' 22b、22c與22d ’如第2B圖所示，這些顏色層的顏色均不 相同，且深度也不相同。多層顏色指示層22的形狀不限於 圓盤形’亦可爲一個或多個圓環形，如第2C圖所示。而 此多層顏色層也可改爲單一顏色層，位於表面下2〇_5〇〇μιη 之間。 8 本-氏張尺度適用中國國家標準（CNS )八4規格（2ι〇χ297公釐）一一~ (請先閲讀背面之注意事項再填寫本頁) -裝. 訂 -泰- 3 50 1 twi'.d〇c/008 3 50 1 twi'.d〇c/008 經濟部中央標準局貝工消費合作社印製 A7 B7 五、發明说明（9) 實施例i 請參照第3A圖係繪示本發明之第二較佳實施例，一 種化學機械硏磨機台中硏磨墊之斜視圖。再同時參照第3B 圖，其所繪不是根據第3 A圖之局部放大結構3 4的斜視 圖。其中，自我壽命顯示硏磨墊30，其包括硏磨墊主體31 以及多個多層顏色指示層32。硏磨墊主體31較佳的是爲 圓盤狀的結構’其具有一表面3 3。 當此多層顏色指示層大小遠小於硏磨墊直徑時，其形 狀接近長條狀’如第3A圖所示，其數目可不限於一個。 至於多層色條32，則是被壓合嵌入於硏磨墊主體31的表 面.33內，其材質與硏磨墊30相同或相近，多層色條32的 厚度通常會大於一固定厚度，此固定厚度小於硏磨墊主體 31的厚度，其爲一般習知硏磨墊最終壽命的耗損程度，且 厚度約在20-500μπι之間。多層色條32包括顏色層32a、 32b、32c與32d，如第3B圖所示，這些顏色層的顏色不同， 且距表面的深度也不相同。其中，多層顏色指示層32分別 位於硏磨墊主體31中的不同俯視位置。此外，每個多層色 條32的顏色層，例如32a、32b、32c與32d均位於硏磨墊 主體31中的同一俯視位置，如第3A圖所示。其目的在於 可以顯示硏磨墊不同位置的磨耗程度，如此一來，可以更 精確測量與判斷硏磨墊的壽命終點。 實施例三 請參照第4圖，其所繪示爲本發明之第三較佳實施 例，一種化學機械硏磨機台中硏磨墊之斜視圖。其中，自 9 本紙張尺度適用中國國家檁準（CNS ) Μ规格（210X297公釐） ^ „ ❿ _----------裝-- (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印製 3501 twf-d〇c/008 A7 '一- B7 —— _ .. 五、發明説明（K ) — 我壽命顯示硏磨墊40 ,其包括硏磨墊主體40以及指示劑 色條42。硏磨墊主體40較佳的是爲圓盤狀的結構’其具 有〜袠面41。指示劑色條42 ,設於硏磨墊主體40的表面 41內，指示劑色條42在硏磨墊表面41下的深度通常約爲 L定深度L，其爲一般習知硏磨墊最終壽命的耗損程 度，此掘定深度L約在2〇-500μπι之間。而指示劑色條〇 的材料，例如可爲氧化/還原指示劑或是酸鹼指示劑。另一 方面，此處在硏磨墊主體41的峩面44上亦可設有不只一 個指示劑色條42，而是可以設有多個指示劑色條42(參考 第6圖）置於固定深度L。這些指示劑色條42分別位於硏 磨墊主體41中的不同俯視位置。 亶施侧四 請參照第5圖，其所繪示本發明之第四較佳實施例， 一種化學機械硏磨機台中硏磨墊之斜視圖。其中，自我壽 命顯示硏磨墊50，其包括硏磨墊主體55以及多層指示劑 色條，例如51或52。硏磨墊主體55較佳的是爲圓盤狀的 結構，其具有一表面54。多層指示劑色條51，設於硏磨墊 主體55的表面54內，多層指示劑色條51包括多個指示劑 色條’例如51 a，5 lb和51c，多層指示劑色條52包括多個 指示劑色條52a,52b和52c。這些指示劑色條5 la,5 lb或51c 等遇到硏漿時會反應而彼此呈現不同的顏色，且深度也互 不相同，例如指示劑色條5 la的深度爲L1，指示劑色條51b 的深度爲L2，且指示劑色條51(：的深度爲1^。此處最大 的深度小於硏磨墊主體55的厚度，例如約在20_500μιη之 (請先閲讀背面之注意事項再填寫本頁)This paper size applies to China's CNS) A4 specification (2 丨 〇 < 297 mm) '35〇lt \ vf.d〇c / 〇〇ii A7' w ~-:-B7 ^ _ V. Invention Instructions (》): --- (Please read the precautions on the back before filling this page) Manufacturing, so there will be no change to the manufacturing process. The shape is not limited to a circle, but may be one or more circular rings. The size is not limited to the same diameter or width as the honing pad as long as it can be clearly seen with the naked eye. When its size is much smaller than the honing honing diameter, its number may not be limited to one, and its position may be in the same top-view position in the main body of the honing pad, or it may be located in a different top-view position in the main body of the honing pad. The above multi-layer color indicating layer may also be replaced with an indicator color bar. The indicator color bar is located on the surface of the honing pad body, and the material may be an oxidation / reduction indicator or an acid test indicator. In order to make the above and other objects, features, and advantages of the present invention more comprehensible ', a preferred embodiment is exemplified below and described in detail with reference to the accompanying drawings. Brief description of the drawings. Figure 1A is a plan view showing the overall structure of a conventional chemical mechanical honing machine; Figure 1B is a side view showing the overall structure of a conventional chemical mechanical honing machine; Section 2A The figure shows a first preferred embodiment of the present invention, an oblique view of a self-life display chemical mechanical honing pad; printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, printed in Figure 2B, according to Figure 2A, a Schematic diagram showing a partially enlarged structure of a chemical mechanical honing pad with self-life display; FIG. 2C is a perspective view showing another chemical mechanical honing pad with self-life display according to FIG. 2A; FIG. 3A shows a first Two preferred embodiments, an oblique view of a chemical mechanical honing pad that can display self-life; 5 degrees applicable to China National Standard (CNS) A4 specifications (210X297 mm) A7 3501twf.doc / 008 B7 V. Description of the invention ((6 Figure 3B is a schematic diagram showing a partially enlarged structure of a chemical mechanical honing pad with self-life display according to Figure 3A; Figure 4 is a third preferred embodiment of the present invention, a self-life FIG. 5 is a perspective view of a chemical mechanical honing pad; FIG. 5 is a perspective view of a fourth preferred embodiment of the present invention, a perspective view of a chemical mechanical honing pad with self-life display; FIG. 6 is a first view of the present invention. Five preferred embodiments, an oblique view of a chemical mechanical honing pad with self-life display; FIG. 7A and FIG. 7B respectively show top and oblique views of another conventional chemical mechanical honing machine table; FIG. 8A The figure shows a sixth preferred embodiment of the present invention, a perspective view of a self-life-indicating chemical-mechanical honing pad used in the machine of FIG. 7; FIG. 8B shows a self-serviceable display according to FIG. 8A. Schematic diagram of a partially enlarged structure of a life display chemical mechanical honing pad; FIG. 9A is a perspective view showing a seventh preferred embodiment of the present invention, a self-life display chemical mechanical honing pad used in the machine of FIG. 7; And FIG. 9B is a schematic diagram showing a partially enlarged structure of a chemical mechanical honing pad with self-life display according to FIG. 9A. Marking description of the figure: 10.70: 5 honing table 11.71: grip 12.72: wafer 13.73: honing Mat 6 (Please read the back first Note: Please fill in this page again.) The printed paper is in Chinese National Standard (CNS) A4 size (210X297 mm) 350 I twf.doc / 008 350 I twf.doc / 008 Printed by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economy B7 V. Description of the invention (f) 14.74: pipe fittings 15.75: slurry 16.76: liquid pump 18, 78: back side of the wafer 19, 79: front side of the wafer 20, 30, 40, 50, 60, 80: self-life display honing Pad body 21, 31, 41, 51, 61, 61, 81: Honing pad honing surface 22, 32, 82: Multi-layer color indicating layer '23, 33, 44, 54, 64: Honing pad side 42, 62a , 62b: indicator color layer 5 1,52,53: multiple indicator color layer Example 1 Please refer to FIG. 1A and FIG. 1B at the same time, which show the top and side views of a conventional chemical mechanical honing machine table, respectively. view. These include: a honing table 10 (polishing table);-a handle 1 l (holder) to hold the honing wafer 12;-honing pad 13 (polishing pad), spread on the honing table 10 A tube 14 for transporting the slurry 15 (SlUiry) to the honing pad 13; and a liquid pump 16 for pumping the slurry 15 into the tube 14. When performing chemical mechanical honing, the honing table .10 and the handle Π are rotated in a certain direction, as shown by arrows 17a and 17b in the figure, and the handle 11 grasps the back surface 18 of the wafer 12 to place the wafer. The front side 19 of 12 is pressed against the honing pad 13. The pipe is a mortar 15 fed by the liquid pump 16 and is continuously supplied to the honing pad 13. Therefore, the chemical mechanical honing process is to use the pulp 15 7 This paper size applies the Chinese National Standard (CNS) Α4 specification (210 × 297 mm) (read the precautions on the back before filling in this page)-Pack. Order 3 50 1 twf.doc / 008 3 50 1 twf.doc / 008 Printed by A7 _ B7__ in the Consumer Cooperatives of the Central Bureau of Prospecting, Ministry of Economic Affairs 5. Chemical additives in the description of the invention (hand), a chemical reaction occurs on the front side 19 of the wafer 12 To form an easy honing layer, and cooperate with the wafer 12 on the honing pad 13 by mechanical honing assisted by the abrasive particles in the hair 15 to project the protruding portion of the easy honing layer Honing, repeated chemical reaction and mechanical honing, can form a flat surface. Basically, the chemical mechanical honing technology is a flattening technology that uses the principle of mechanical polishing, with appropriate chemical agents (reagents) and honing grains, to unevenly contour the surface. Please refer to FIG. 2A, which is a perspective view of a honing pad in a chemical mechanical honing machine table according to a first preferred embodiment of the present invention. Referring to FIG. 2B at the same time, the drawing is an oblique view of the partially enlarged structure 24 according to FIG. 2A. The self-life display honing pad 20 includes a honing pad body 21 and a plurality of color indicating layers 22. The honing pad main body 21 is preferably a disc-shaped structure 'which has a surface 23. As for the multilayer color indicating layer 22, it is pressed and embedded in the surface 23 of the honing pad body 21, and its material is the same as that of the honing pad 20. The depth "L" of the multilayer color indicating layer 22 under the surface 23 is usually about A fixed thickness, which is smaller than the thickness of the honing pad body 21, is defined as the degree of wear of the conventionally known honing pad 'usually this thickness is between about 20-500 μιη. The multilayer color indicating layer 22 includes color layers 22a '22b, 22c, and 22d', as shown in FIG. 2B. These color layers have different colors and different depths. The shape of the multi-layered color indicating layer 22 is not limited to a disc shape, and may be one or more circular rings, as shown in FIG. 2C. This multi-layer color layer can also be changed to a single color layer, located between 20-50 μm below the surface. 8 This-Zhang scale is applicable to China National Standard (CNS) 8 4 specifications (2ιχχ297 mm) one by one ~ (Please read the precautions on the back before filling this page)-Pack. Order-Thai-3 50 1 twi '.d〇c / 008 3 50 1 twi'.d〇c / 008 Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (9) Example i Please refer to the drawing in Figure 3A A second preferred embodiment of the invention is a perspective view of a honing pad in a chemical mechanical honing machine table. Referring to FIG. 3B at the same time, an oblique view of the partially enlarged structure 34 according to FIG. 3A is not drawn. The self-life display honing pad 30 includes a honing pad body 31 and a plurality of multilayer color indicating layers 32. The honing pad body 31 is preferably a disc-shaped structure 'which has a surface 3 3. When the size of the multilayer color indicating layer is much smaller than the diameter of the honing pad, its shape is close to a strip shape 'as shown in FIG. 3A, and the number may not be limited to one. As for the multi-layer color bar 32, it is pressed and embedded in the surface .33 of the honing pad body 31. The material is the same as or similar to the honing pad 30. The thickness of the multi-layer color bar 32 is usually greater than a fixed thickness. The thickness is smaller than the thickness of the honing pad body 31, which is the degree of wear of the final life of the conventional honing pad, and the thickness is between 20-500 μm. The multilayer color bar 32 includes color layers 32a, 32b, 32c, and 32d. As shown in FIG. 3B, these color layers have different colors and different depths from the surface. Among them, the multiple color indicating layers 32 are respectively located in different plan positions in the honing pad body 31. In addition, the color layers of each multilayer color bar 32, such as 32a, 32b, 32c, and 32d, are located in the same plan position in the honing pad body 31, as shown in FIG. 3A. The purpose is to show the degree of wear of different positions of the honing pad, so that the end of the life of the honing pad can be measured and judged more accurately. Embodiment 3 Please refer to FIG. 4, which is a perspective view of a honing pad in a chemical mechanical honing machine table according to a third preferred embodiment of the present invention. Among them, since 9 paper sizes are applicable to China National Standards (CNS) M specifications (210X297 mm) ^ „❿ _---------- install-(Please read the precautions on the back before filling in this Page) Order printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, printed 3501 twf-d〇c / 008 A7 '一-B7 —— _ .. V. Description of the Invention (K) — My life display honing pad 40, including 硏The polishing pad main body 40 and the indicator color bar 42. The honing pad main body 40 is preferably a disc-shaped structure, which has a 袠 face 41. The indicator color bar 42 is provided on the surface 41 of the honing pad main body 40. Inside, the depth of the indicator color bar 42 under the honing pad surface 41 is usually about L constant depth L, which is the degree of wear of the final life of the conventional honing pad. The depth L is about 20-500 μm. The material of the indicator color bar 0 may be, for example, an oxidation / reduction indicator or an acid-base indicator. On the other hand, more than one indicator may be provided on the face 44 of the honing pad body 41 here. Agent color bars 42, instead, a plurality of indicator color bars 42 (refer to FIG. 6) may be provided at a fixed depth L. These indicator color bars 42 points It is located at different top positions in the honing pad body 41. Refer to FIG. 5 for the application side, which illustrates a perspective view of a honing pad in a chemical mechanical honing machine table according to a fourth preferred embodiment of the present invention. The self-life display honing pad 50 includes a honing pad body 55 and a multi-layer indicator color bar, such as 51 or 52. The honing pad body 55 is preferably a disc-shaped structure having a surface 54 The multi-layer indicator color bar 51 is provided in the surface 54 of the honing pad body 55. The multi-layer indicator color bar 51 includes a plurality of indicator color bars, such as 51 a, 5 lb, and 51 c. The multi-layer indicator color bar 52 includes Multiple indicator color bars 52a, 52b, and 52c. These indicator color bars 5 la, 5 lb, or 51c will react to each other and present different colors and depths, such as indicator colors. The depth of the strip 5 la is L1, the depth of the indicator color bar 51b is L2, and the depth of the indicator color bar 51 (: is 1 ^. The maximum depth here is smaller than the thickness of the honing pad body 55, for example, about 20_500 μιη (Please read the notes on the back before filling this page)
本紙張尺度適用中國國家樣準（CNS ) Α4規格（210X297公釐） 3 50 I twf.d〇c/〇〇8 3 50 I twf.d〇c/〇〇8 經濟部中央標準局員工消費合作社印裝 A7 B7 五、發明説明（今） 間。其中，指示劑色條5la，5lb或51c的材料，可以爲氧 化/還原指示劑，或是爲酸鹼指示劑。且多層指示劑色條51 白'J ί曰τκ劑色條5 1 a,5 1 b和5 1 c可以位於硏磨塾主體55中的 相同俯視位置（如第5圖所示），或是亦可以分別位於硏磨 塾主體5 5中的不同俯視位置（未顯示）。此處指示劑色條的 數目不只一個，亦可形成—個或數個環形，如第5B圖所 不，例如多層指示劑色條51與52，其目的在於可以顯示 硏磨墊不同位置的磨耗程度，如此一來，可以更精確測量 與判斷硏磨墊的壽命終點。 實施例π 請參照第6圖，其所繪示是本發明之第五較佳實施 例’ 一種化學機械硏磨機台中硏磨墊之斜視圖。其中，自 我壽命顯示硏磨墊6〇，其包括硏磨墊主體61以及多個指 示劑色條，例如62a和62b。硏磨墊主體61較佳的是爲圓 盤狀的結構，其具有一表面64。指示劑色條62a和62b， 設於硏磨墊主體61的表面64內，指示劑色條62a和62b 遇到硏漿時會反應而彼此呈現不同的顏色，且深度也互不 相同，例如指示劑色條62a的深度爲D1，指示劑色條62b 的深度爲D2。指示劑色條62a和62b只要其中之一的深度 約在一固定深度即可，此固定深度小於硏磨墊主體61的厚 度，例如約在20-500μιη之間。而指示劑色條62a和62b 的材料，例如可爲氧化/還原指示劑或是酸鹼指示劑。這些 指示劑色條61a和62b分別位於硏磨墊主體61中的不同俯 視位置。此處指示劑色條的數目不只一個，其目的在於可 本紙張尺度適用中國國家標準（CNS ) A4規格（210Χ297公釐〉 (請先閱讀背面之注意事項再填寫本頁) -裝· 訂 3 5 Ο 11 w f. d oc / Ο Ο 8 A7 B7 經濟郎中央標隼員工消費合作杜印裂 五、發明説明（β ) 以顯示硏磨墊不同位置的磨耗程度，如此可以更精確測量 與判斷硏磨墊的壽命終點。 實施例六 請同時參照第7A圖與第7B圖，其分別繪示另一種習 知化學機械硏磨機台的俯視與側視圖。其中包括：一硏磨 軌道70(polishing platen); 一握柄71 ’用以抓住被硏磨的 晶片72 皮帶式硏磨墊73舖在軌道7〇上；一管件74 ’ 用以輸送硏漿75到硏磨墊73上；以及—液泵76，用以將 研漿75抽送到管件74中。當進行化學機械硏磨時’硏磨 軌道70與握柄71分別沿一定的方向旋轉’如圖中之箭號 77a與77b所示，且握柄71用以將晶片72壓在硏磨墊73 上。管件74係將液泵76所打進來的硏漿乃’持續不斷地 供應到硏磨墊73上。所以，化學機械硏磨程序就是利用硏 漿75中的化學助劑，在晶片72上產生化學反應，使之形 成一易硏磨層，再配合晶片72在硏磨墊73上藉由硏漿75 中之硏磨粒輔助之機械硏磨’將易硏磨層之凸出部份硏 磨，反覆上述化學反應與機械硏磨，即可形成平坦的表面。 基本上，化學機械硏磨技術是利用機械拋光的原理，配合 適當的化學助劑與硏磨粒，將表面高低起伏不一的輪廓， 一倂加以“磨平”的平坦化技術。 請參照第8A圖係繪示本發明之第六較佳實施例，一 種化學機械硏磨機台中硏磨墊之斜視圖。再同時參照第8B 圖其所繪示是根據第8A圖之局部放大結構84的斜視 圖。其中，自我壽命顯示硏磨墊8〇 ’其包括硏磨墊表面81 (請先閲讀背面之注意事項再填寫本頁) -裝- ® 、?! -線 本紙張尺度適用中國國家標準（CNS ) Μ規格（210X 297公釐） 35〇ltwfd〇c/〇08 經濟部中央標準局員工消費合作社印製 A7 _ B7 '' 五、發明说明（（丨） 以及穸層顏色指示層82。硏磨墊主體81較佳的是爲圓環 形的皮帶結構。至於多層顏色指示層82，則是由染色或壓 合嵌入於硏磨墊主體80的外表面81內，其材質與硏磨墊 8〇相同或相近’多層顏色指示層82在硏磨墊外表面81下 的深度”L”通常會大於一固定厚度，此固定厚度小於硏磨墊 * 主體8〇的厚度，其爲一般習知硏磨墊耗損的程度，且其厚 度約在20-5〇〇μιη之間。多層顏色指示層82包括顏色層 82a、S2b與82c，如第8Β圖所示，這些顔色層的顏色不同， 且距表面的深度也不相同。 請參照第9Α圖係繪示本發明之第七較佳實施例，一 種化學機械硏磨機台中硏磨墊之斜視圖。再同時參照第9Β 圖，其所繪示是根據第9Α圖之局部放大結構94的斜視 圖。其中，自我壽命顯示硏磨墊9〇，其包括硏磨墊表面91 以及多個多層顏色指示層92。硏磨墊主體90較佳的是爲 圓盤狀的結構。 當此多層顏色指示層長度遠小於硏磨墊長度時，其形 狀接近長條狀，如第9Α圖所示，其數目可不限於一個。 至於多層色條92，則是被壓合嵌入於硏磨墊主體91的表 面93上，其材質與硏磨墊.90相同或相近，多層色條92 在”L”的厚度通常會大於一固定厚度’此固定厚度小於硏磨 墊主體91的厚度，其爲一般習知硏磨墊最終壽命的耗損程 度，且厚度約在20-500μΐΉ之間。多層色條92包括顏色層 92a、92b、92c與92d，如第9Β圖所示，這些顏色層的顏 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) 蠹 裝_ 訂 3 50 1 twf.doc/008 3 50 1 twf.doc/008 經濟部中央標準局J工消費合作社印製 A7 __________B7_ ___ 五、發明説明（丨丨） 色不同，且距表面的深度也不相同。其中，多層色條92分 別位於硏磨墊主體91中的不同俯視位置。此外，每個多層 色條92的顏色層’例如92a ' 92b、92c與92d，如第9A 圖所示。其目昀在於可以顯示硏磨墊不同位置的磨耗程 度’如此一來’可以更精確測量與判斷硏磨墊的壽命終點。 .綜上所述’本發明所提出的可自我壽命顯示之化學機 械硏磨墊，具有以下的特點： (1) 本發明提出的改良式硏磨墊結構，可以在硏磨時， 顯示出硏磨墊本身的磨耗程度，並具備顯示本身壽命終點 的能力’不但對於提昇製程品質有幫助，且可以發揮硏磨 墊的最大壽命，以節約成本。. (2) 本發明提出的改良式硏磨墊結構，具有多種組合與 排列方式，且材料亦無限制，例如可爲多層顏色指示層(與 硏磨墊同材質）或是指示劑色條(包括氧化/還原指示劑或是 爲酸鹼指示劑），彈性非常大。 (3) 本發明不論是利用多層顏色指示層或是指示劑色 條’其數目都不限定在一個’且可以分別位於硏磨塾主體 中的不同俯視位置。 綜上所述，雖然本發明已以七個較佳實施例揭露如 上，然其並非用以限定本發明，任何熟習此技藝者，在不 脫離本發明之精神和範圍內，當可作各種之更動與潤飾， 因此本發明之保護範圍當視後附之申請專利範圍所界定者 爲準。 本紙張尺度適用中國國家標準（CNS ) A4規格（210Χ297公釐） (請先閱讀背面之注意事項再填寫本頁)This paper size applies to China National Standard (CNS) A4 (210X297 mm) 3 50 I twf.d〇c / 〇〇8 3 50 I twf.d〇c / 〇〇8 Employee Consumer Cooperatives, Central Bureau of Standards, Ministry of Economic Affairs Printing A7 B7 V. Description of the invention (today). Among them, the material of the indicator color bar 5la, 5lb, or 51c may be an oxidation / reduction indicator, or an acid-base indicator. And the multi-layer indicator color bar 51 white 'J ί τκ agent color bar 5 1 a, 5 1 b and 5 1 c can be located in the same top position in the honing body 55 (as shown in FIG. 5), or Alternatively, they can be located at different top positions (not shown) in the honing honing body 55. Here, the number of indicator color bars is not only one, but can also form one or more rings, as shown in Figure 5B. For example, the multi-layer indicator color bars 51 and 52 are used to display the wear of different positions of the honing pad. This way, you can more accurately measure and judge the end of the life of the honing pad. Embodiment π Please refer to FIG. 6, which shows a perspective view of a honing pad in a chemical mechanical honing machine table according to a fifth preferred embodiment of the present invention. Among them, the self-life display honing pad 60 includes a honing pad body 61 and a plurality of indicator color bars, such as 62a and 62b. The honing pad body 61 is preferably a disc-shaped structure having a surface 64. Indicator color bars 62a and 62b are provided in the surface 64 of the honing pad body 61. The indicator color bars 62a and 62b will react to each other and present different colors and depths when they encounter mortar. For example, indicators The depth of the agent color bar 62a is D1, and the depth of the indicator color bar 62b is D2. The indicator color bars 62a and 62b only need to have a depth of about a fixed depth, and the fixed depth is smaller than the thickness of the honing pad main body 61, for example, about 20-500 m. The material of the indicator color bars 62a and 62b may be, for example, an oxidation / reduction indicator or an acid-base indicator. These indicator color bars 61a and 62b are located at different top positions in the honing pad body 61, respectively. There are more than one indicator color bar here. The purpose is to apply the Chinese National Standard (CNS) A4 specification (210 × 297 mm) to this paper size (please read the precautions on the back before filling this page)-Book 3 5 〇 11 w f. D oc / Ο Ο 8 A7 B7 Economic Lang Central Standard 隼 Staff Consumption Cooperation Du Yinye V. Description of Invention (β) To show the degree of wear of different positions of the honing pad, so that it can be more accurately measured and judged The end of the life of the honing pad. Embodiment 6 Please refer to FIG. 7A and FIG. 7B at the same time, which respectively show the top and side views of another conventional chemical mechanical honing machine table. Including: a honing track 70 ( a polishing platen); a grip 71 'for holding the honed wafer 72, a belt-type honing pad 73 laid on the track 70; a tube 74' for conveying the slurry 75 to the honing pad 73; and —A liquid pump 76 is used to pump the slurry 75 to the pipe 74. When performing chemical mechanical honing, the honing rail 70 and the handle 71 are rotated in a certain direction, as shown by arrows 77a and 77b in the figure. The handle 71 is used to press the wafer 72 on the honing pad 73. The part 74 is to continuously supply the honing slurry from the liquid pump 76 to the honing pad 73. Therefore, the chemical mechanical honing process is to use the chemical assistant in the honing slurry 75 to generate chemistry on the wafer 72. Reaction to form an easy honing layer, and then cooperate with the wafer 72 on the honing pad 73 to honing the protruding portion of the easy honing layer by the mechanical honing assisted by the honing grains in the slurry 75, Repeating the above-mentioned chemical reaction and mechanical honing can form a flat surface. Basically, chemical mechanical honing technology uses the principle of mechanical polishing, with appropriate chemical additives and honing grains, to fluctuate the contour of the surface. A flattening technique that is "smoothed" is provided. Please refer to FIG. 8A for a perspective view of a sixth preferred embodiment of the present invention, a perspective view of a honing pad in a chemical mechanical honing machine table. Referring to FIG. 8B at the same time The figure shows a perspective view of a partially enlarged structure 84 according to FIG. 8A. The self-life display honing pad 80 ′ includes a honing pad surface 81 (please read the precautions on the back before filling this page) -装-® 、?! -Line paper size Printed with Chinese National Standard (CNS) M specifications (210X 297 mm) 35〇ltwfd〇c / 〇08 A7 _ B7 printed by the Consumers' Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs Indication layer 82. The honing pad main body 81 is preferably a circular belt structure. As for the multi-layer color indicating layer 82, it is embedded in the outer surface 81 of the honing pad main body 80 by dyeing or lamination. Same as or similar to the honing pad 80. The depth "L" of the multi-layer color indicating layer 82 under the outer surface 81 of the honing pad is usually greater than a fixed thickness, which is less than the thickness of the honing pad * body 80. It is generally known as the degree of wear of the honing pad, and the thickness is about 20-50 μm. The multilayer color indicating layer 82 includes color layers 82a, S2b, and 82c. As shown in FIG. 8B, these color layers have different colors and different depths from the surface. Referring to FIG. 9A, a perspective view of a honing pad in a chemical mechanical honing machine table is shown in a seventh preferred embodiment of the present invention. Referring again to FIG. 9B, which is an oblique view of the partially enlarged structure 94 according to FIG. 9A. The self-life display honing pad 90 includes a honing pad surface 91 and a plurality of multilayer color indicating layers 92. The honing pad body 90 is preferably a disc-shaped structure. When the length of this multilayer color indicating layer is much shorter than the length of the honing pad, its shape is close to a strip shape, as shown in FIG. 9A, and the number may not be limited to one. As for the multi-layer color bar 92, it is pressed and embedded on the surface 93 of the honing pad body 91. The material is the same as or similar to the honing pad .90. The thickness of the multi-layer color bar 92 at "L" is usually greater than one Thickness' This fixed thickness is less than the thickness of the honing pad body 91, which is the degree of wear of the final life of the conventional honing pad, and the thickness is about 20-500 μΐΉ. The multi-layer color bar 92 includes color layers 92a, 92b, 92c, and 92d. As shown in Figure 9B, the color paper size of these color layers is in accordance with China National Standard (CNS) A4 (210X297 mm) (please read the back Please fill in this page for the matters needing attention) Outfitting_ Order 3 50 1 twf.doc / 008 3 50 1 twf.doc / 008 Printed by the J Industry Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 __________B7_ ___ 5. Description of the invention (丨 丨) Color Different, and the depth from the surface is also different. Among them, the multi-layered color bars 92 are respectively located in different top positions in the honing pad body 91. In addition, the color layers 'such as 92a' 92b, 92c, and 92d of each multi-layered color bar 92 are shown in Fig. 9A. The purpose is to show the degree of wear of the honing pads at different positions ‘in this way’ and to more accurately measure and judge the end of the life of the honing pads. In summary, the chemical mechanical honing pad with self-life display provided by the present invention has the following characteristics: (1) The improved honing pad structure proposed by the present invention can display 可以 when honing The degree of wear of the polishing pad itself and the ability to display the end of its life 'not only help to improve the quality of the process, but also can maximize the life of the honing pad to save costs. (2) The improved honing pad structure proposed by the present invention has various combinations and arrangements, and the material is also not limited. For example, it can be a multilayer color indicating layer (the same material as the honing pad) or an indicator color bar ( Including oxidation / reduction indicator or acid-base indicator), very flexible. (3) In the present invention, the number of color indicator layers or indicator color bars is not limited to one, regardless of the use of multiple color indicator layers, and may be located at different top positions in the honing body. In summary, although the present invention has been disclosed as above with seven preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make various modifications without departing from the spirit and scope of the present invention. Changes and retouching, so the scope of protection of the present invention shall be determined by the scope of the attached patent application. This paper size applies to Chinese National Standard (CNS) A4 (210 × 297 mm) (Please read the precautions on the back before filling this page)