TW387853B - Work transfer method and system - Google Patents

Abstract

In a work transfer method, the processing times of a plurality of processing units aligned in a line are set to be shorter as the processing units are apart from a stock shelf set on one end side of the processing units. The processing units process works under predetermined processing conditions different from each other. A plurality of works of the different processing conditions are stored in the stock shelf. A work using a processing unit arranged farthest from the stockshelf is selected from the works stored in the stock shelf, and transferred to the corresponding processing unit. Works using processing units arranged nearer to the stock shelf than a processing unit for a finally transferred work are sequentlially selected and transferred to the corresponding processing units. A work transfer system is also disclosed.

Description

V. Description of the Invention (1) [Background of the Invention] Field of the Invention The present invention relates to a work piece transportation method and work piece transportation system, and more particularly, to a work piece transportation method and work piece transportation system, and is used for incorporating a plurality of semiconductors. The wafer wafer box is shipped with 1 夂 processing unit. Description of Different Conventional Techniques General wafer processing techniques include various techniques such as implantation, photolithography, and etching. Now, as the element of these technologies, it is essentially automated by robots and the like. A conventional wet etching system will be described in detail with reference to 囷 3 and circle 4 in the early Ming Dynasty. Fig. 3 shows a work piece conveying system located in a general clean room as shown in Fig. 3 'a plurality of processing unit groups 3a (each- Processing units. 3a are arranged in a straight line in each process) are arranged in parallel in a clean room, and each processing unit group 3a is composed of a plurality of processing units 3, for example, for photolithography or wet The processing unit is a series of processing units 3. Each performs a predetermined process. Under this condition, two process conditions A, β and C are assumed. The 6 track unit U is installed on the ceiling of the clean room. A movable main transport box Γ 12 on the lane 7 is a storage rack 2 containing a crystal unit group 33 ^ containing semi-conductor wafers, which is placed on each process on the side of the rail 7 side. Example: "In a word, a semi-conducting Zhao Jing containing lithography was transported by a main conveyor 6 to a processing unit group.

5 'Description of the invention (2) It is used for fishing etching and temporarily stored in the storage rack 2. FIG. 4 shows a conventional configuration of the processing unit group 3 & In FIG. 4, the same reference numerals as those of circle 3 denote the same parts. The wafer box stored in the storage rack 2 by the main conveyor 6 is transported to a carrier U via a loader 10. The transporter takes out a wafer from the loaded boat box 'and transfers it to a boat as an anti-etcher. The wafer box from which wafers are taken out is moved by a conveyor 14 to a conveyor 12. The wafers on the wafer boat are loaded by a robot arm 4 into predetermined processing tanks 30, 32, and 34, rapid water supply and drainage (qdR) tanks 31, 33, and 35, and a rotary drying tank 36. After completing these processes, the wafer boat is immediately transported to the conveyor 12. 'The conveyor 12 takes out the wafer from the wafer boat being transported and stores it in the wafer box moved by the conveyor 14. The wafer box containing the wafer is mounted on a transport vehicle 5 via an unloader 13, and then transported to the storage rack 2 and stored in the storage rack 2. If necessary, the wafer box in the storage rack 2 can be transported by the main conveyor 6 and loaded into a processing unit group 33 for further processing. I should note that the conveyor 14 can move in both directions, and an empty wafer boat box and wafer boat are wheeled between the conveyors 11 and 12. The procedure for transporting a wafer box for conventional wet processing will be described below with reference to FIGS. 5A to 5G. In Figs. 5A to 5G, the same reference numerals as in Fig. 3 denote the same elements. For the convenience of explanation, the illustrations and descriptions of the loader 10, but the loader 13 and the like will be omitted. As shown in FIG. 5 ', the wafer box 1 transported to the storage rack 2 by the main conveyor 6 (FIG. 3) is continuously mounted on the storage rack 2 and managed in the loading order. Give

Page 6 V. Description of the invention (3) For example, 'in 囷 5A' first load the wafer box belonging to processing condition a, then load the wafer box belonging to processing condition B ^ 丨, and then load A1 under processing conditions. A's Crystal Boat Box A2. Similarly, the plurality of crystal boat boxes ci B2, C2, A3, C3 and C4 are successively stored in the hall cargo shelf 2. The boat box stored in the storage rack 2 will be transported to various processing units 3 (processing units A to 0 and subjected to various wet processing. In the conventional system, as shown in Figure 5B ' The wafer box is processed in the order of loading of the storage rack 2 regardless of the processing conditions. That is, the first crystal compact box A1 loaded on the storage rack 2 is first unloaded by the robot arm 4, Is loaded into processing unit A for processing under processing condition a, and for example, wet processing for 0 minutes. As shown in circle 5C, the treated wafer boat box A1 is in a rapid water supply and drainage rinse (QDR) tank It is washed, dried in a rotary drying tank, and then transported by a transport cart 5 and stored in a storage rack 2. In the same manner, the wafer boat box B1 is transported to the corresponding processing unit B and processed. The same The processing is performed in Figures 51) to 5 (; and the processed wafer box C4 is stored in the storage rack 2 (as shown in Figure 5G) to complete a series of processing processes. ^ This processing In the process, in order to simplify the control procedure, the units A to C are usually not Simultaneous operation. In other words, when using the processing order τοΑ, 'the processing unit a will not be skipped and the subsequent processing units B and C will be used. This is because if plural processing units A to c complete the processing at the same time, The wafers in the engraving solution must be removed at the same time. However, a processing unit

5. Description of the Invention (4) Groups usually include only one robot arm 4 to keep costs down. At the same time, the processing units A to are satisfied. Requirements. Therefore, it is impossible to say that the circular removal timing error occurs in the processing unit AiCt. If the wafer box is left idle with the processing units stored one by one, this will hinder the & processing, and the remaining is that the processing units B and C of circle 5B will increase. The processing units B and C, the processing unit tank of Fig. 5E, and the components A and B are interposed. Processing Sheet [Comprehensive Description of the Invention] An object of the present invention is to provide a work piece system which can achieve a high throughput by shortening the alignment method and transporting as much as possible. In order to achieve the above purpose, the time between the processing of the handles by the sisters is actually achieved. The present invention provides a method including the following steps: when the virtual handles are placed, and the method of transporting the pieces, the storage shelves are separated, and they are lined up in a single line. The end of the frame is set to be shorter, and the processing order :::: Binary processing time is used to process the work pieces; a predetermined number of work pieces are stored; by using a different processing condition: pieces' And transport this work piece; in the selection, the processing unit of -work: rack, even 1 ;;:;:; 2 yuan is closer to the storage, the corresponding processing unit. Make and ship these work pieces to the photo [Simplified description of the circle]

V. Description of the invention (5) FIG. 1 shows a block diagram of a work piece conveying system according to an embodiment of the present invention, and FIGS. 2A to 2G show diagrams of the conveying procedure of the work piece conveying system of FIG. 1; FIG. An oblique view of a general configuration of a work piece delivery system in a laboratory; Fig. 4 shows a block diagram of a processing unit group in a conventional work piece delivery system; and Figs. 5A to 5G show the delivery of the work piece delivery system of Fig. 4 Diagram of program 0 [Description of symbols] A, B, C ~ Processing tanks A1, A2, A3, B1, B2, C1, C2 'C3, C4 ~ Crystal boat boxes AΓ, A2', A3 ', B1', B2 ', C1', C2 ', C3', C4 '~ Treated crystal boat box 1 〇 1 ~ Work piece (crystal boat box) 1 02 ~ Storage rack 1 03 ~ Processing unit 1 04 ~ Robot arm 1 05 ~ Transporter 1 06 ~ Main Conveyor 1 1 0 ~ Loader 1 1 1, 1 12 ~ Conveyor 1 1 3 ~ Unloader

V. Description of the invention (6) 114 ~ 115 ~ 1 16 ~ 117 ~ 130 131 136 Conveyor power supply controller memory condition determination table processing tank-Quick water supply and drainage flushing (QDR) tank 132, 134 ~ 133 '135 ~ rotary drying tank [Description of Preferred Embodiments] The present invention will be described in detail below with reference to the drawings. Fig. 1 shows a configuration of a processing unit group used in a work piece transport system according to an embodiment of the present invention.圊 1 shows processing unit group 3a of 囷 3. In FIG. 1, 'a wafer box stored by a main conveyor 106 in a storage rack 102' is transported to a carrier U1 via a loader 110. The carrier 111 takes out a wafer from the loaded wafer boat box and transfers it to a wafer boat as an anti-etching container. The wafer box from which wafers are taken is moved by a conveyor 114 to a conveyor 112. Based on the control of the power supply controller 115 as the transport control device, with the robot arm 104 as a transport device, the wafers on the wafer boat will be loaded into predetermined processing tanks 130, 132, and 134 for rapid water supply and drainage flushing ( (QDR) tanks 131, 133, and 135, and a rotary drying tank 136. After completing these processes, the wafer boat is immediately transported to the conveyor 112. The conveyor 112 takes out the wafer from the wafer boat being transported and stores it in the wafer box moved by the conveyor 1 1 4. A wafer box containing wafers is mounted on a transport truck 105 via an unloader 113 and then transported to the storage

Page 10 V. Description of the invention (7) The cargo scaffold 102 is stored in the storage scaffold 102. If necessary, the wafer box in the storage rack 102 can be transported by the main conveyor 106 and loaded into a group of processing units for further processing. I should note that the conveyor 114 can move in both directions and convey an empty wafer boat box and wafer boat between the conveyors 111 and 112. When the processing tank is separated from the storage rack 102, the processing tanks 130, 132 and 134 The processing time will be set to shorter. The latest unloading processing conditions are continuously rewritten into a memory 1 1 6 by the power supply controller 1 1 5. The power supply controller 1 1 5 uses the processing conditions read from the memory 1 16 and refers to a condition determination table 117 to continuously control the crystals from the processing tank 134 spaced further from the storage rack 102. Boat box loading. This prevents the processing tanks 130, 132 and 134 from completing the processing at the same time. For example, the processing tanks 130, 132, and 134 (hereinafter referred to as processing tanks A, B, and C) are arranged so that processing tank c has a processing time of 5 minutes and processing tank B has a processing time of 10 minutes. Tank △ has a processing time of 15 minutes. Based on the memory 116 and the condition determination table 117, the power supply controller 115 will follow, and the order of the conditions C, B, and A will be transported to the wafer box on the storage shelf 〇 02 to process jfA to C. Therefore, the process is completed in the order of processing conditions C, B, and +, that is, the order of processing tanks C, B, and A is completed. = For processing tanks C, B, and Λ in this order with the conveyor 丨〗 2 by one plus * for the time to transport a wafer box to the conveyor 112, for: J fpiece C crystal The boat box is the shortest, second from the crystal boat box of processing condition B, and second from the crystal boat box of processing condition A. The wafer box of the processing condition c is not always stored in the storage rack 102

Page 11 V. Description of Invention (8) " '" ---- I. If a wafer box without processing condition C exists, the wafer box will be searched in the order of priority of conditions B to A, and one of the strains will be found, and the wafer box will be shipped first. If the same place 2: boat box exists, the first one is loaded to the storage shelf 丨 0 2 is transported first. An example of the processing condition table of the wafer box used to determine the processing conditions of an unloading processing system is to be used daily. Table 1 Conditions of the wafer boat last shipped (memory 116) First candidate Second candidate Third candidate condition A Completion of the pending item 1A 3 Completion condition A @Processing condition condition C-a condition B condition A waits for the completion of processing condition C

Whenever a wafer box belonging to one of the processing conditions A to c is unloaded from the storage rack 102 to one of the processing tanks a to c, the power supply controller 115 updates the memory 116. The power supply controller will refer to the processing condition decision table 117 shown in Table 1. If the last (recent) shipping condition stored in memory 116 is C, the power supply controller 1 1 5

Page 12 V. Description of the invention (9) '' ----- Order Λ7 of a sequence A wafer box with unloading conditions. If there is no processing = there is a bright boat box of A, the process will wait for the processing under condition c, and a wafer boat box of processing condition C will be unloaded. Strains ^ sample ^^ If the last (recent) shipment stored in the memory 116 :: Γ = electric controller 115 will determine the wafer boat under the next unload condition. If no wafer box exists for processing condition a, then The completion of the processing of the shed, and a crystal of the processing condition B is contained. If the last (recent) shipment, piece, ... stored in the memory vessel 116, the process will wait for the completion of processing under condition A, and a wafer box for processing condition A will be unloaded. The work piece transportation system composed of processing unit groups that are not visible in circle 1. The transportation procedure is to refer to the reference circle to 2 (; for details. Although the crystal boat box 疋 is stored in the storage in the same order as in Figure 5A. In the scaffold 102, but for the sake of convenience of description, the wafer box systems of individual conditions are arranged in a straight line. As shown in 圊 2A, 'plural wafer boxes AI, A2, A3, β1, B2

Cjl, C2, C3, and C4 are installed on the shelf of the storage rack 102. As shown in the “shown”, the power supply controller 1 1 5 will find the first load to the storage rack 1 in the order of the processing conditions C, B, and A in the wafer box c 1 to c 4 of the processing condition c. 2 wafer boat box C 1 ′ and load the wafer boat box C 丨 to the processing unit c. The power supply controller 1 15 will continuously unload the wafer boat box B 1 and “to the processing units B and A, respectively. When processing units A'B and c are arranged so that processing tank a has a processing time of 5 minutes, processing tank B has a processing time of 10 minutes, and processing tank (: when there is a processing time of 5 minutes, the wafer box The processing of B1, B1, and ^ is completed according to the loading order of processing units A, B, and C. This can avoid processing at the same timing

Page 13 V. Description of Invention (10) 10%. In each processing process, the robotic arm 104 (Figure ^ Take in a wafer boat wafer will be transported to the wafer boat box, and the processed boat boxes ΑΓ, β1, and 系 are stored in the storage rack 1 〇2. As shown in Figure 2C, the crystals are similar to Figure 2B, the wafer box C2, B2, and A2 ^, the corresponding processing units A, B, and C are mounted and processed, and then stored in a broken rack: 102. The procedures shown in Figures 2D and 2 are also executed in the same way: 囷 In 2E, since the wafer boat box of processing condition B does not exist, it will be loaded after the wafer boat box C3 is installed. In FIG. 2F, since the wafer box of the right and left, pieces A and B exist, only the wafer box C3 is subject to ^ j. Therefore, as shown in FIG. 2G, the final wafer box C4 is a six ice file. In the two racks 102, all the processing is completed. In this way, * = an example, and a plurality of processing can be performed at the same time to obtain a production capacity of ^. The system is high. Although this embodiment uses a wet type Etching to explain., Too, Ming is not limited to this, and can be applied to other wafers Order: time, description: month, when the processing unit is separated from the storage shelf I! The processing time or position of the processing order will be set to shorten the number of work pieces that are processed during the processing. The shelving of the cargo racks is far enough to take out multiple work pieces from the processing unit. _ Robot hand 5 can use multiple processing units at the same time 'so they can shrink their inter-day time' to work with higher yield than conventional systems Piece processing.

Claims (1)

In six steps, use the package method to send the shipment as the type of work. Fan Yili 11 Please contact the Yuandanli office (1 room (1 yuan for transportation and repair. To save the storage and delivery time). -* Day instrument end-of-order yuan order? S is at a fixed set of 3 ο 1X / | \ yuan order processing number of complex lines straight to tr when open sub-parts will not be saved, short-term work in loyalty It is set up in the shed, and the order storage is settled at the meeting. A pre-difference is determined at the meeting. This is the same as the order processing of the S bill of materials in the meeting. For the processing order with the furthest distance from the storage rack, select a work piece from the plurality of work pieces stored in the storage rack, and send the work piece to the corresponding processing unit; The processing unit of the work piece is close to the processing unit of the storage shelf, and the work pieces are continuously selected and transported to the corresponding processing unit. 2. If the method of transporting the work piece in the scope of patent application No. 1 includes, Steps: Before using one The processing unit placed closest to the storage racks transports one of the plurality of work pieces stored in the storage racks, and then uses a processing unit arranged at the farthest distance from the storage racks. Select a work piece from the remaining work pieces of the storage rack, and transport this work piece to the corresponding processing unit; and by using a processing unit arranged closer to the storage rack than the last transported work piece, Processing unit, continuously selects the work piece and transports these pieces to the corresponding processing unit. 3. If the method for transporting work pieces in item 1 of the patent application scope, it further includes Page 15 ---___________ VI. Apply for a patent ϋ ~ ~-The following steps: Set two units: a processing rack that is more than the last work piece to be transported: the work piece does not exist in the storage shed-by using one configuration in # 理 置 元 which is closer to Warehousing Shed. Work piece to the corresponding processing sheet 4. For example, the following steps of the application scope of the patent application scope, s 1 The following steps: κ work piece delivery method, including f into a condition decision table 'in which will be set in Hongyi County From: Ϊ and I-a desired work piece: of ί; f ί transport whenever a work piece is removed from the storage shed relationship, and the work piece sent, and continuous selection of the work == will update the last shipment The updated work piece and reference conditions must include the steps of using the work piece to be shipped. (117) and decide the next one. 5. If you apply for the first item in the scope of the patent application | Kissing ^ This step includes processing method of ^ ^ sending, where ΐ Ξ: 元 之 步 ㉟ 'is used to Shorten the etching time when wet: Equation 1 Etching sheet and storage shelf are divided into 6. According to the scope of the patent application No. 5 Percy knife selection of two work pieces, this step includes: two transportation methods, wherein, and a wafer boat box containing a plurality of semiconductor wafers: A plurality of processing units stored in the storage shelving unit, 132, 13G, and 13G, including a plurality of predetermined processing conditions, are processed under a predetermined processing condition. ^ A straight line is used to work on the place. When the processing unit and the Page 16 6. Scope of patent application _ When a storage scaffold is separated, the processing is short _; 70 processing time will be set to be longer than a storage scaffold (102), and set to store different processing Conditions \ Ultra-terminal transport unit (U04) for multiple processing units, used / stored / ^ worked as a piece (1101); the pieces were delivered to the processing unit; and the work was stored in the storage shelf The control device (1 1 5) uses w ^ to deal with the farthest fare of the cargo scaffold ★, and • Two uses one of a plurality of work pieces arranged in a distance from the healthy scaffold to select a job = set = stored in the storage and delivery To the corresponding processing unit. 'And transport the work piece 8. If the work piece of the scope of the patent application item 7 discusses the main secret * First, by using a configuration with the storage rack most concerns, two = =, the feed control device will first Select a work piece from the work stored in the storage order, and transport this work to a plurality of engineering units and the corresponding place by using a work piece configured near a last shipment = near the storage shelf The processing order *, continuous production to the corresponding processing unit "怍 documents and transport workers 9. If the work piece of the scope of patent application No. 7 is read? ^ Is it used for a plurality of work pieces stored in the storage rack? The system, wherein the processing unit closest to the storage shelf transports one job and one configured to the J-made device to use one configured to send a work piece with the storage Π 捸 3, and transports the work piece to the corresponding piece Choice-A Outer Branch · Early Wood, and, Borrow 6. The scope of applying for a patent ranges from the use of the work piece configured on the storage scaffold to the corresponding 10. As in the application, when there is no only processing unit that is closer to the storage scaffold, it is closer to the storage to the corresponding location 11 If the application contains: a conditional work piece and the next piece of memory work piece information, the shipping control and refer to the condition 12. If _, the processing unit. 13. If applied, the work piece is processed more than the processing unit of the last delivered work piece. The processing unit of the work piece is selected continuously.寻 This job hunting system requires the work piece delivery system of item 7 of the patent scope, which uses a work piece disposed in a processing unit closer to the storage rack than a last work piece to be delivered. The work control device will select one Use a work piece disposed in the processing unit of the scaffold, and transport this work piece management unit. "The work piece delivery system in item 7 of the patent scope, where the table (117) is stored in the last one The relationship between the selected work pieces; and (116) 'There is a message about the last shipment from the storage shelf' and the work will be modified every time a work piece is shipped. The device will use the work stored in the memory. Information, decision table 'to determine the next work item to be shipped. The workpiece transport system according to item 7 of the patent, which is a wet etching with mutually different etching times. The workpiece transport system according to item 7 of the patent, which is a wafer boat containing a plurality of semiconductor wafers. box.