A7 B7 五、發明説明《) . 持游節圃 (請先閱讀背面之注意事項再填寫本頁) 本發明為有關於一種得Μ期求高輸出化，且可取出穩 定之雷射光束（laser beam)之C〇2氣體雷射振遨器及使用 該振盪器之氣體雷射加工裝置者。 >义沣夕持銜 第9圖（a)為，例如雷射加工技術（川澄博通著，日刊 工業新聞社）P.45之第3圖，5(b)所示之三軸直交S之C〇2 雷射振盪器之剖面圖。 經濟部智慧时產局員工消費合作社印製 第9圖（b)為第9圖（a)之沿著A-A線之剖面圖。圖中， la, lb為激磁雷射氣體之一對放電電極，2為使雷射氣體 循環之吹氣機（blower), 3為使放電激磁所加熱之雷射氣 體冷却之熱交換器，4為收容放電電極la, lb,吹氣機2, 及熱交換器3之放電激磁部。5為由放電電極la, lb施行放 電激磁之雷射媒體，例如C〇2雷射等氣體雷射之情況為氣 體媒體。6為例如為由ZnSe所構成之凹面形狀之部分反射 鏡。7為例如為由Cu製成之凹面形狀之全反射鏡。該部分 反射鏡6與全反射鏡7由相對向配置而構成穩定型之雷射共 振器。8a，8b為保持共振器鏡6，7之鏡單兀（miller unit )部。9為產生於雷射共振器内之雷射光束，1〇為由部分反 射鏡6向C〇2雷射振盪器外部取出之雷射光束。 其次說明動作。雷射光束9為分別保持於連接於放電 激磁部4之鏡單元部8a, 8b之部分反射鏡6與全反射鏡7之 間往復，在往復之期間内經由放電電極la, lb間放電激磁 之雷射媒體5而施行放大。如此雷射光束9放大後，其一部 本紙張尺度適用中國國家標準（CNS )八4規格（210·〆297公釐） 1 39516 A7 ___B7 _ 五、發明説明（2 ) 分通過部分反射鏡6。 (請先閲讀背面之注意事項再填寫本頁) 取出於C〇2雷射振盪器外部之雷射光束10為，使用於 鐵板等加工。雷射媒體5為由放電電極la, lb施行放電激 磁時具有熱，但是該熱使雷射氣體由吹氣器2循環，經由 通過熱交換器3而受到冷却。 另一方面，第10圖為表示改變由雷射之振盪理論所預 測之部分反射鏡6之透過率時所得到之雷射振盪特性者。 比較第10圖中透過率較大之情況其開始雷射振潭之放電電 力（框值電力）減小，因此由相同放電電力比較之情況下， 雷射輸出成為增加之结果。由於此，不改變C02雷射振盪 器之框體之尺寸而期求雷射之高輸出化為，可Μ由減小部 分反射鏡6之透過率而可Μ達成。A7 B7 V. Description of the invention "). Travel festival (please read the precautions on the back before filling out this page) The present invention relates to a method for obtaining high output in the M period, and can take out a stable laser beam CO2 gas laser vibrator and gas laser processing device using the oscillator. > Figure 9 (a) of Yoshizuki's title is, for example, laser processing technology (by Kawasumi Hirotsu, Nikkan Kogyo Shimbun) P.45, Figure 3, and the three-axis orthogonal intersection S shown in 5 (b) C〇2 Sectional view of laser oscillator. Printed by the Employees' Cooperatives of the Wisdom and Time Bureau of the Ministry of Economic Affairs Figure 9 (b) is a sectional view taken along line A-A in Figure 9 (a). In the figure, la and lb are one pair of discharge electrodes of the laser excitation gas, 2 is a blower for circulating the laser gas, 3 is a heat exchanger for cooling the laser gas heated by the discharge excitation, 4 To accommodate the discharge electrodes la, lb, the blower 2, and the discharge excitation section of the heat exchanger 3. 5 is a laser medium that is discharged by the discharge electrodes la, lb. For example, a gas medium such as a CO2 laser is a gas medium. 6 is, for example, a concave partial mirror made of ZnSe. 7 is, for example, a concave total reflection mirror made of Cu. The partial reflection mirror 6 and the total reflection mirror 7 are arranged to face each other to form a stable laser resonator. 8a, 8b are the miller unit parts holding the resonator mirrors 6,7. 9 is a laser beam generated in the laser resonator, and 10 is a laser beam taken out by the partial reflection mirror 6 to the outside of the CO2 laser oscillator. The operation will be described next. The laser beam 9 is held between the partial reflection mirror 6 and the total reflection mirror 7 connected to the mirror unit sections 8a and 8b of the discharge excitation section 4, respectively. During the reciprocation period, it is discharged through the discharge electrodes 1a and 1b. The laser medium 5 is amplified. In this way, after the laser beam 9 is enlarged, a part of this paper is in accordance with the Chinese National Standard (CNS) 8 4 specifications (210 · 〆297 mm) 1 39516 A7 ___B7 _ V. Description of the invention (2) Partially passing through the partial mirror 6 . (Please read the precautions on the back before filling in this page.) The laser beam 10 taken out of the C02 laser oscillator is used for processing such as iron plates. The laser medium 5 has heat during discharge excitation by the discharge electrodes 1a and 1b, but this heat circulates the laser gas from the blower 2 and is cooled by passing through the heat exchanger 3. On the other hand, Fig. 10 shows the laser oscillation characteristics obtained by changing the transmittance of the partial mirror 6 predicted by the laser oscillation theory. Comparing the case where the transmittance is large in Fig. 10, the discharge power (frame value power) at the beginning of the laser vibration pool is reduced. Therefore, when the same discharge power is compared, the laser output is increased. Because of this, the high output of the laser can be achieved without changing the size of the frame of the C02 laser oscillator, which can be achieved by reducing the transmittance of the partial mirror 6.
Κ往之C02雷射振盪器由於由Κ上所述搆成，雷射光 東9在故電激磁部4放大，但是在鏡單元部8a, 8b反而被吸 收。雷射氣體由於在放電激磁部4,鏡單元部8a, 8b， K 及共振器鏡6, 7中密閉，因此即使在鏡單元部8a, 8b中亦 經濟部智慧財產局員工消費合作社印製 存在雷射氣體。雷射氣體由放電電極la, lb施行放電激磁 時成為放大雷射光束9之雷射媒體5，但如無放電激磁則具 有吸收雷射光束9之作用。一般由於放電激磁部4之容罱比 較鏡單元部8之容量大，比較鏡單元部8所產生之吸收過程 ,由放電激磁部4所產生之放大過程會增大，由此引起雷 射振盪。 但是，相當於雷射光束9由鏡單元部8所吸收之部分， 使雷射振盪特性惡化亦為事實，該吸收之影響若使部分反 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 2 39516 Μ Β7 經濟部智慧財產局員工消費合作社印製 五、 發明説明 Γ I 射 鏡 6之透過率減小時， 更為顯著出現。 第1 1圖為表示改 1 | 變 部 分 反 射 鏡 6之透過率時可以獲得之雷射振盪特性者。 1 1 由 第 11 圖 之 结 果 » 減 小 透 過 率 時 雷 射 振 盪 特 性 開 始 彎 曲 • /<·—S 1 請 ! I 於 某 一 投 入 電 力 為 境 界 使 雷 射 輸 出 反 轉 ί 此 種 情 況 下 透 過 先 閎 1 ik 1 I 率 較 大 之 一 方 反 而 改 善 0 使 如 此 第 11 圖 所 見 之 雷 射 振 W 特 背 * | 之 1 性 之 彎 曲 予 消 失 9 而 為 使 其 成 為 如 第 10 圖 所 示 預 測 特 性 注 意 事 1 — 致 之 雷 射 振 盪 特 性 > 必 須 使 鏡 單 元 部 8所產生之雷射光 再 填 1 束 9之吸收消失。 寫 頁 1 發 明 Z 啟 示 *—^ 1 本 發 明 之 百 的 為 t 獲 得 經 由 鏡 單 元 部 中 消 除 雷 射 光 束 I 1 之 吸 收 * 即 使 在 部 分 反 射 鏡 之 透 過 率 減 小 時 雷 射 輸 出 亦 不 1 1 具 有 彎 曲 之 雷 射 振 盪 特 性 0 訂 1 本 發 明 之 C0 2氣體雷射振盪器為， 具備激磁雷射氣體 1 I Μ 產 生 雷 射 光 束 之 —_· 對 放 電 電 極 » 及 設 置 在 該 放 電 電 極 1 I 之 兩 側 使 雷 射 光 束 反 射 之 至 少 —— 對 鏡 之 鏡 單 元 部 $ 以 及 使 I 1 存 在 於 該 鏡 單 元 部 之 雷 射 光 束 之 光 路 之 雷 射 氣 體 AS 強 迫 性 向 1 光 路 外 移 動 之 機 構 等 者 〇 _ Γ 1 由 於 使 存 在 於 鏡 單 元 部 之 雷 射 光 束 之 光 路 之 雷 射 氣 體 1 Μ 強 迫 性 向 光 路 外 移 動 因 此 可 VX 消 除 雷 射 光 束 之 吸 收 1 1 由 於 此 即 使 部 分 反 射 鏡 之 透 過 率 減 小 時 亦 可 Μ 獲 得 無 彎 曲 1 | 之 高 輸 出 之 雷 射 振 盪 特 性 0 1 I 本 發 明 之 C0 2氣體雷射振盪器為， 宜將雷射氣體強迫 1 1 1 性 向 光 路 外 移 動 之 送 風 機 具 備 於 鏡 單 元 部 〇 由 於 送 風 機 具 1 1 1 備 於 既 設 之 鏡 單 元 部 因 此 不 必 經 由 裝 置 之 大 型 化 仍 可 Μ 達 1 1 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） 3 3 9 5 1 6 經濟部智慧財產局員工消費合作社印製 五、發明説明 ( 4 ) 成 高 輸 出 0 本 發 明 之 C0 2氣體雷射振盪器為， 宜具備連接於鏡單 元 部 之 氣 體 導 管 9 以 及 經 過 該 氣 體 導 管 使 雷 射 氣 體 移 動 之 送 風 機 0 由 於 經 由 送 風 機 與 氣 體 導 管 使 雷 射 氣 體 向 光 路 外 移 動 * 因 此 可 消 除 在 鏡 單 元 部 之 雷 射 光 束 之 吸 收 〇 再 者 t 不 必 使 裝 置 大 型 化 仍 可 Μ 獲 得 高 輸 出 之 雷 射 振 盪 器 〇 本 發 明 之 C0 2雷射振盪器為， 具有連通於鏡單元部與 放 電 激 磁 Ψ 之 氣 體 導 管 以 及 經 過 該 氣 體 導 管 移 動 雷 射 氣 體 之 送 風 機 * 而 且 » 送 風 備 設 置 於 放 電 激 磁 部 » 宜 亦 兼 用 為 使 經 由 放 電 激 磁 加 執 之 雷 射 氣 體 Hsi 循 環 之 送 風 m Ο 由 於 經 由 送 風 4m m 與 氣 體 導 管 使 雷 射 氣 體 ηΆ 向 光 路 外 移 動 9 可 K 消 除 鏡 單 元 部 之 雷 射 光 束 之 吸 收 〇 再 者 送 風 機 為 9 亦 兼 用 為 使 放 電 激 磁 所 加 埶 之 雷 射 氣 體 循 環 之 送 風 機 t 因 此 不 必 使 装 置 大 型 化 而 可 達 成 高 輸 出 0 本 發 明 之 C0 2氣體雷射振盪器為， 在故電激磁部與鏡 單 元 部 亦 可 以 存 在 多 數 之 雷 射 光 束 之 光 路 0 由 於 雷 射 光. 束 之 光 路 有 多 數 ，不必使裝置大型化， 仍可以獲得高輸出。 本 發 明 之 氣 體 雷 射 加 I 裝 置 為 $ 有 關 於 將 月(J 述 之 本 發 明 之 C0 2氣體雷射振盪器所產生之雷射光束傳送， 由此照 射 於 被 加 工 物 者 ， 由 於 使 用 本 發 明 之 C0 2氣體雷射振盪器 所 產 生 之 雷 射 光 束 • 可 由 無 彎 曲 之 高 輸 出 之 雷 射 光 束 加 工 Ο 再 者 9 可 使 加 工 裝 置 小 型 化 0 鼸 面 簡 單 說 明 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 第 A7 B7 五、發明説明（5 ) 第1圖（a), (b)為，表示本發明之C〇2雷射氣體振盪器 之一實施例之剖面圖。 第2圖為，表示第1圖之C〇2氣體雷射振盪器之雷射振 盪特性之圖。 第3圖為，表示本發明之C〇2氣體雷射振盪器之其他實 施例之剖面圖。 第4圖為，表示本發明之C〇2氣體雷射振盪器之其他實 施例之剖面圖。 第5圖為，表示本發明之C〇2氣體雷射振盪器之其他實 施例之剖面圖。 第6圖為，表示本發明之C0 2氣體雷射振盪器之其他實 施例之剖面圖。 第7圖為，表示本發明之C〇2氣體雷射振盪器之其他實 施例之剖面圖。 ,表示本發明雷射加工裝置一實施例之斜視 (請先閱讀背面之注意事項再填寫本頁) 圖 第9 h) ，表示Μ往之氣體雷射振盪器之一例之剖面 經濟部智慧財產局員工消費合作社印製 圖 第10圖為，表示氣體雷射之預測振通器之圖。 第11圖為，表示以往之氣體雷射振盪器之雷射振盪特 性之圖。 元件符號說明 la，lb 故電電極 2 吹氣機 本紙張尺度適用中國國家標準（CNS ) Μ規格（210X297公釐） 3 9 5 1 6 五、發明説明（6 ) A7 B7 經濟部智慧財產局員工消費合作社印製 3 埶 *>» 交 換 器 4 放 電 激 磁 部 5 雷 射 氣 體 媒體 6 部 分 反 射 鏡 7 全 反 射 鏡 8a, 8b 鏡 單 元 部 9,1 0 雷 射 光 束 11, 12,51 氣 體 送 風 機 假 21 流 動 方 向 41a ,41b , 41c ,41d 氣 體 導 管 61 , 62 折 回 鏡 8 1 C0 2氣體雷射振盪器 82 光 束 傳 送 糸統 83a ,83b 光 束 r善 槽 84a ,84b,84c, ,84d 彎 曲 鏡 85 加 工 頭 86 被 加 工 物 87 加 工 透 鏡 88 輔 助 氣 體 管 89 噴 嘴 90 加 工 工 作 台 91a ,91b 水 管 管施例 K下，參照圖面說明本發明之c〇2氣體雷射振盪器w 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 6 3 9 5 1 6 (請先閱讀背面之注意事項再填寫本頁) A7 B7 五、發明説明（7 ) 及氣體雷射加工裝置。 管施例1 (請先閲讀背面之注意事項再填寫本頁) 第1圖（a)為，本發明之二氧化碳氣體雷射振癱器之一 例之剖面圖。第1圖（b)為第1圖（a)沿著B-B線之剖面圔。 la, lb為激磁雷射氣體之一對放電電極，2為使雷射氣體 循環之吹氣機（blower), 3為使經由放電激磁加熱之雷射 氣體冷却之熱交換器，4為，收容放電電極la, lb,吹氣 機2,熱交換器3之放電激磁部。5為放電電極la, lb施行 放電激磁之雷射氣·體媒體。6為由ZnSe所構成之凹面形狀 之部分反射鏡，7為由Cu構成之凹面形狀之全反射鏡。部 分反射鏡6與全反射鏡7為相對向配置而構成穩定型之雷射 振盪器。8a, 8b為保持諧振器鏡6，7之鏡單元部。9為產 生於雷射諧振器内之雷射光束，10為由部分反射鏡6向C〇2 雷射振盪器外所取出之雷射光束。11, 12為安裝於鏡單元 部8a, 8b之內側之氣體送風機。 經濟部智慧財產局員工消費合作社印製 其次說明動作。氣體雷射振盪器為三軸直交型之C〇2 雷射振徽器。氣體送風機11與12不動作時，雷射光束9由 存在於鏡單元部8a, 8b中之雷射氣體所吸收，與以往之 C〇2雷射振镦器同樣若使部分反射鏡6之透過率減小時在雷 射振盪特性會產生彎曲。在此，使氣體送風機11與12動作 時，原已滯留於鏡單元部8a, 8b之雷射光束之光路而吸收 雷射光束9之雷射氣體，經由氣體送風機11與12在充分吸 收雷射光束9之前向雷射光束之光路外流出。由於此，原 由鏡單元部8a, 8b所產生之吸收為由於使雷射氣體循環或 本紙張尺度適用中國國家標準（CNS ) A4規格（210·〆297公釐） 7 39516 A 7 B7 五、發明説明（8 ) (請先閱讀背面之注意事項再填寫本頁) 擴散而移動因此幾乎已消失，雷射振禰特性不產生彎曲而 獲得高輸出。第2圖為使氣體送風機11與12動作時所測試 之雷射振盪特性。比較第2圖與第11圖時可Μ明瞭，雷射 振盪特性之彎曲幾乎已改善，由此可Μ獲得非常一致於第 10圖所示預測特性之高輸出之雷射振盪特性。氣體送風機 11, 12由於設置於既存之鏡單元部8a, 8b因此不必要變更 氣體雷射振隳器之框體之尺寸，因此不必要使裝置構成大 型化。 在本實腌例·，說明做為構成C〇2氣體雷射振盪器之雷 射諧振器使用穩定_諧振器之情況，但是不限定於此，即 使為不穩定塑諧振器亦可Μ獲得相同之效果。 窨_例2 經濟部智慧財產局員工消費合作社印製 第1圖中，說明氣體送風機11與12對於雷射光與水平 方向成為直角之方式設置之情況，但是第3圖為氣體送風 機11與12對於雷射光與垂直方向成為直角之方式設置之情 況。動作同於第1圖之情況，經由氣體送風機11與12之動 作使雷射氣體沿著流動方向21循環或擴散，因此鏡單元8a ，8b所產生之吸收幾乎消失，雷射振盪特性不再產生彎曲 ,由此可K獲得第2圖之相同高輸出之振黴特性。 審倫钏3 第1圖中說明氣體送風機11與12分別在鏡單元部8a, 8b各設置1台之情況，但是如果為增加風最在第4圖所示對 於鏡單元部8a, 8b分別設置2台時亦可Μ獲得相同之效果 。設如欲更為增加風最祗需在鏡單元部8a, 8b分別設置多 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 8 3 9 5 1 6 A7 _B7_ 五、發明説明（9 ) 數台即可。 管施例4 第5圖為表示本發明之C〇2氣體雷射振盪器之另一實施 例之剖面圖。 41a, 41b, 41c, 41d為，連接放電激磁部4與鏡單元 部8a, 8b之氣體導管。經由吹氣機2送風，經過氣體導管 41a至41d向箭頭方向使氣體循環而流通。並且該氣體之流 通21使存在於鏡單元8a，8b之雷射光束之光路之雷射氣體 循環或擴散而向光路外移動。 吹氣機2為，利用原由放電激磁部4加熱之雷射氣體循 環而予設置者，但可K不必使裝置大S化而獲得如第2圖 所示未無彎曲之高輸出之雷射振盪特性者。 實施_例_^_ 第6圖為，表示本發明之C〇2氣體雷射振镦器之其他實 施例之剖面圖。51為，經過氣體導管41a至41d,對於放電 激磁部4與鏡單元部8a, 8b間氣體Μ箭頭方向循環之送風 機。在此產牛.促使送風機51動作之箭頭方向之氣體之流通 21,由此使存在於鏡單元部8a, 8b之雷射光束之光路之雷 射氣體循環或擴散而向光路外移動。鏡簞元部8a, 8b之雷 射光束之吸收消失，结果可Μ獲得第2圖所示無彎曲之高 輸出之雷射振盪特性。 管腌例6 第7圖為表示本發明之C〇2氣體雷射振盪器之另一實施 例之剖面圖。 (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 2.97公釐） 9 39 5 1 6 A7 B7 五、發明説明（1G) 諧振器成為使用折回鏡61與62之Z型之折回構成，在 鏡單元部8a, 8b中存在多數之光路。 經由送風機11, 12動作，雷射氣體向鏡單元8a, 8b之 (請先聞讀背面之注意事項再填寫本頁) 雷射光束之光路外移動。由於此，在鏡單元部8a, 8b之雷 .射光束之吸收消失，结果可K獲得如第2圖所示無彎曲之 高輸出之雷射振盪特性。 通過鏡單元8a, 8b之雷射光之光路數愈增加時，雷射 振盪特性之彎曲會顯著出現，因此本發明所稱雷射光束之 吸收之效果在本實施例將愈大。 管_例7 第8圖為表示搭載實施例1所說明之C〇2氣體雷射振盪 器之C〇2雷射加工裝置之一例者。圖中，81為C〇2氣體雷射 振盪器，82為由光束槽（beam duct) 83a, 83b及彎曲鏡（ bend miller)84a, 84b, 84c, 84d等所構成，由此傳送由 經濟部智慧財產局員工消費合作社印製 C〇2氣體雷射振盪器81產生之雷射光束10所需之光束傳送 系統，85為雷射光束10向被加工物86上集光所需之加工透 鏡（lens)87,及輔助氣體管88所送氣之輔助氣體向被加工 物86噴吹所需之噴嘴（nozzle)89等構成之加工頭（head), 90為移動被加工物86所需之加工工作台（table)。91a, 91b 為水管。如此構成之C〇2雷射加工裝置為，高輸出而且穩 定之雷射光束可以由C〇2氣體雷射振徽器81供給，因此雷 射加工可MK高品質而且高速施行。 前述實施例1至7中說明本發明適用於使用C〇2雷射之 C〇2氣體雷射振盪器以及雷射加工裝置之情況，但是本發 本紙張尺度適用中國國家標準（cns ) A4規格（2iox297公釐） 1〇 3 9 5 1 6""" A7 B7五、發明説明（11 ) 明之C0 2氣體雷射振盪器並不限定於此，設如適用於放雷 激磁之氣體雷射·，例如適用於excimer laser或金屬蒸氣 經濟部智慧財產局員工消費合作社印製 說但 獲 之 ，得 置射 鏡動盪部M—之高 商 · 憑 中 ， 以 部構獲 設雷 於移振磁可 —體提 丨 .to振 7 況 可 元機M內之 接體射澂，W氣為 1M情例亦 單之可 部出. 連氣雷電時 雷射更 例之 ’器 鏡動此 元輸 用射之放機II雷果 施器 π 盪 於移由 單高 使雷出使a·氣動效 實盪$.振 在外， 鏡得 K 使輸為送 2 移之 述振定射 存路收 在獲 可管 高用之CO性性 前射 Η 雷 置光吸 ，而 ，導得兼環 之迫特 者雷 不體. 設向之 構化 構體 獲如循 束強盪 再體 氣 於性束 。機梨 機氣 而設體 光路振 。氣 U 之 由迫光#.之大 之該化 ，氣 射光射 果之器塱 ，強射特體置 體由型為射 雷之雷 效塑1¾流 時髖雷盪氣裝 氣經大機雷 之束之 之交振軸 明氣之振射使 射及置風之 。數光出 樣直M速 發射部射雷要 雷M裝送熱化多射輸 雷 同軸 高 本雷元雷動必 動 ，使 ，加型在雷高 得三 或 據之單之移不 移管不下而小存由得 獲於2M型。依路鏡出性以 性導 K 況磁為部置獲 M用CO交果述光除輸迫可 迫體可情激更元設使 可適之直效所之 消高強 ， 。強氣 ，種電成單由以 亦明明軸之前束 K 之為時性為之機此放構鏡經可 時發發 二樣如光可曲做機特做部風 。於置在 ，， 。 射本本於同 射此彎 風盪 元送性由裝 中構層 雷明 是用 得 雷因無 送振 單之 特中使 器機一 (請先閱讀背面之注意事項再填寫本頁) 訂 本紙乐尺度適用中國國家橾準（CNS ) A4規格（210X297公釐） 11 3 9 5 1 6 A7 B7 五、發明説明（12) 本發明之氣體雷射加工裝置為，由於使用前述之C〇2 氣體雷射振盪器，因此不必要使裝置大型化而可由高輸出 Η 加 行 施 束 光 射 雷 之 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） 2 3 9 5 1 6As the K02 laser oscillator is constituted as described above, the laser light east 9 is amplified in the electromagnetism excitation part 4, but is absorbed in the mirror unit parts 8a, 8b. The laser gas is hermetically sealed in the discharge excitation section 4, the mirror unit sections 8a, 8b, K and the resonator mirrors 6, 7, so even in the mirror unit sections 8a, 8b, it is printed by the consumer property cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Laser gas. The laser gas becomes the laser medium 5 that amplifies the laser beam 9 when it is subjected to discharge excitation by the discharge electrodes la, lb, but if there is no discharge excitation, it has the effect of absorbing the laser beam 9. Generally, since the capacity ratio of the discharge excitation portion 4 is larger than the capacity of the mirror unit portion 8, comparing with the absorption process generated by the mirror unit portion 8, the amplification process generated by the discharge excitation portion 4 will increase, thereby causing laser oscillation. However, it is equivalent to the part of the laser beam 9 absorbed by the mirror unit 8 that degrades the laser oscillation characteristics. The effect of this absorption is to apply the Chinese National Standard (CNS) A4 specification (210X) if the part is anti-paper. 297 mm) 2 39516 Μ B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention The transmittance of the Γ I mirror 6 decreases even more prominently. Fig. 11 is a graph showing the laser oscillation characteristics that can be obtained when the transmittance of the reflecting mirror 6 is changed. 1 1 Results from Figure 11 »Laser oscillation characteristics start to bend when transmittance is reduced. • < · S 1 Please! I Invert laser output at a certain level of input power. In this case, transmission First 闳 1 ik 1 I the larger the rate, but the improvement is 0, so that the laser vibration W special back * seen in Fig. 11 | | 1 The bending of the nature is disappeared 9 in order to make it a predictive characteristic as shown in Fig. 10 Caution 1 — Induced Laser Oscillation Characteristics> The laser light generated by the mirror unit 8 must be filled with a beam 9 and the absorption disappeared. Write page 1 Invention Z enlightenment *-^ 1 The hundred of the invention is to obtain the absorption of the laser beam I 1 through the mirror unit section. Even if the transmittance of the partial mirror is reduced, the laser output is not 1 1 Curved laser oscillation characteristics 0 Order 1 The C0 2 gas laser oscillator of the present invention is provided with the excitation laser gas 1 I Μ to generate a laser beam—the pair of discharge electrodes »and the discharge electrode 1 I At least the two sides make the laser beam reflect-at least to the mirror unit portion $ of the mirror and the laser gas AS that causes I 1 to exist in the optical path of the laser beam of the mirror unit portion to forcibly move outside the 1 optical path, etc. _ Γ 1 Because the laser gas 1 Μ of the optical path of the laser beam existing in the mirror unit is forced to move out of the optical path, VX can eliminate the laser beam. Receive 1 1 Because of this, even when the transmittance of some mirrors is reduced, M can be obtained without bending. 1 | High output laser oscillation characteristics 0 1 I The C0 2 gas laser oscillator of the present invention is suitable for laser gas. The blower forcing 1 1 1 to move out of the optical path is provided in the mirror unit section. 0 Since the blower is installed in the existing mirror unit section, it can reach 1 1 without having to increase the size of the device. CNS) A4 specification (210 × 297 mm) 3 3 9 5 1 6 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (4) High output 0 The C0 2 gas laser oscillator of the present invention is: The gas duct 9 connected to the mirror unit and the blower 0 for moving the laser gas through the gas duct. The laser gas is moved out of the optical path through the blower and the gas duct. * Elimination of laser beam absorption in the mirror unit section. Furthermore, t can obtain a high output laser oscillator without having to increase the size of the device. The C0 2 laser oscillator of the present invention has a communication between the mirror unit section and Gas duct for discharge excitation and air blower for moving laser gas through the gas duct * And »The air supply device is installed in the discharge excitation part» It should also be used as the supply air for circulating the laser gas Hsi through the discharge excitation m 〇 The air supply 4mm m and the gas duct move the laser gas ηΆ out of the optical path. 9 The K can eliminate the absorption of the laser beam in the mirror unit. The blower is 9 and it also serves as a blower to circulate the laser gas added by the discharge excitation. Therefore, it is not necessary to increase the size of the device to achieve a high output. The C0 2 gas laser oscillator of the present invention is Unit cell may also exist in the optical ray path 0 of the number of multi-beam emission of the outgoing light ray to light with a plurality of beam path number, not necessary that the size of the device, a high output can still be obtained. The gas laser plus I device of the present invention is related to the transmission of a laser beam generated by the C0 2 gas laser oscillator of the present invention described in J, thereby irradiating the workpiece, since the present invention is used Laser beam generated by the C0 2 gas laser oscillator • Can be processed by laser beams with high output without bending 0 Furthermore, 9 can reduce the size of the processing device 0 Brief description This paper standard applies to Chinese national standards (CNS ) A4 specification (210X297 mm) Section A7 B7 V. Description of the invention (5) Section 1 (a) and (b) are cross-sectional views showing one embodiment of the CO2 laser gas oscillator of the present invention. Fig. 2 is a diagram showing the laser oscillation characteristics of the CO2 gas laser oscillator of Fig. 1. Fig. 3 is a sectional view showing another embodiment of the CO2 gas laser oscillator of the present invention. Fig. 4 is a sectional view showing another embodiment of the CO2 gas laser oscillator of the present invention. Fig. 5 is a view showing another embodiment of the CO2 gas laser oscillator of the present invention. Sectional view of the embodiment. Fig. 6 is a cross-sectional view showing another embodiment of the C02 gas laser oscillator of the present invention. Fig. 7 is a view showing another implementation of the C02 gas laser oscillator of the present invention. A cross-sectional view of an example, showing an oblique view of an embodiment of the laser processing apparatus of the present invention (please read the precautions on the back before filling out this page) Figure 9h) shows a cross-section of an example of a gas laser oscillator to M Figure 10, printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, is a diagram showing the predicted oscillator of a gas laser. Fig. 11 is a graph showing the laser oscillation characteristics of a conventional gas laser oscillator. Description of component symbols: la, lb. Electric electrode 2 Air blower The paper size is applicable to Chinese National Standard (CNS) M specification (210X297 mm) 3 9 5 1 6 V. Description of invention (6) A7 B7 Employees of Intellectual Property Bureau, Ministry of Economic Affairs Printed by a consumer cooperative 3 埶 * > »Exchanger 4 Discharge excitation unit 5 Laser gas medium 6 Partial mirror 7 Total reflection mirror 8a, 8b Mirror unit 9,1 0 Laser beam 11, 12,51 Gas blower leave 21 Flow direction 41a, 41b, 41c, 41d Gas duct 61, 62 Folding mirror 8 1 C0 2 Gas laser oscillator 82 Beam transmission system 83a, 83b Beam r Good groove 84a, 84b, 84c, 84d Bending mirror 85 Processing Head 86 to-be-processed object 87 processing lens 88 auxiliary gas tube 89 nozzle 90 processing table 91a, 91b water tube tube Example K, the c02 gas laser oscillator of the present invention will be described with reference to the drawings w This paper size is applicable to China Standard (CNS) A4 size (210X297 mm) 6 3 9 5 1 6 (Please read the precautions on the back first Complete this page) A7 B7 V. invention is described in (7) and a gas laser machining apparatus. Example 1 (Please read the precautions on the back before filling out this page) Figure 1 (a) is a cross-sectional view of an example of the carbon dioxide gas laser paralysis device of the present invention. Figure 1 (b) is a cross section 圔 of Figure 1 (a) along the line B-B. la, lb are one of the pair of discharge electrodes of the excitation laser gas, 2 is a blower for circulating the laser gas, 3 is a heat exchanger for cooling the laser gas heated by the discharge excitation, and 4 is a housing Discharge electrodes la, lb, blower 2 and discharge excitation part of heat exchanger 3. 5 is the discharge electrode la, lb for the laser and body media of the discharge excitation. 6 is a concave-shaped partial mirror made of ZnSe, and 7 is a concave-shaped total mirror made of Cu. The partial reflection mirror 6 and the total reflection mirror 7 are opposed to each other and constitute a stable laser oscillator. 8a and 8b are mirror unit sections for holding the resonator mirrors 6,7. 9 is a laser beam generated in the laser resonator, and 10 is a laser beam taken out by the partial mirror 6 to the outside of the CO2 laser oscillator. 11, 12 are gas blowers installed inside the mirror unit sections 8a, 8b. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The gas laser oscillator is a three-axis orthogonal C02 laser oscillator. When the gas blowers 11 and 12 do not operate, the laser beam 9 is absorbed by the laser gas existing in the mirror unit sections 8a, 8b, and the same as the conventional C02 laser resonator, if the partial mirror 6 is transmitted When the rate decreases, the laser oscillation characteristics will be bent. Here, when the gas blowers 11 and 12 are operated, the laser gas originally trapped in the optical path of the laser beams of the mirror unit portions 8a and 8b and absorbed by the laser beam 9 is absorbed by the gas blowers 11 and 12 The light beam 9 has previously flowed out of the optical path of the laser beam. Because of this, the absorption originally generated by the mirror unit sections 8a, 8b is due to the laser gas circulation or the paper size applicable to the Chinese National Standard (CNS) A4 specification (210 · 〆297 mm) 7 39516 A 7 B7 V. Invention Note (8) (Please read the precautions on the back before filling out this page) The diffusion and movement have almost disappeared, and the laser vibration characteristics do not cause bending and obtain high output. Fig. 2 shows the laser oscillation characteristics tested when the gas blowers 11 and 12 are operated. Comparing Fig. 2 with Fig. 11 shows that the laser oscillation characteristic has almost improved the curvature, and thus the laser oscillation characteristic with high output that is very consistent with the prediction characteristic shown in Fig. 10 can be obtained. Since the gas blowers 11, 12 are installed in the existing mirror unit sections 8a and 8b, it is not necessary to change the size of the frame of the gas laser vibrator, so it is not necessary to increase the size of the device. In this example, the case where a stable resonator is used as the laser resonator constituting the C02 gas laser oscillator will be described, but it is not limited to this. Even if it is an unstable plastic resonator, the same can be obtained. The effect.例 _Example 2 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The first figure illustrates the situation where the gas blowers 11 and 12 are installed at right angles to the laser light. However, the third figure shows the gas blowers 11 and 12 for When the laser light and the vertical direction are set at right angles. The operation is the same as that in the first figure. The laser gas is circulated or diffused in the flow direction 21 by the actions of the gas blowers 11 and 12, so the absorption generated by the mirror units 8a and 8b almost disappears, and the laser oscillation characteristics no longer occur. By bending, K can obtain the same high-output vibration mold characteristics of Figure 2. Shen Lun 钏 3 The first figure illustrates the case where one gas blower 11 and 12 are installed in each of the mirror unit sections 8a and 8b. However, in order to increase the wind, the mirror unit sections 8a and 8b are separately installed as shown in FIG. 4. The same effect can also be obtained with 2 units. If you want to increase the wind more, you need to set multiple paper sizes in the mirror unit 8a, 8b respectively. The Chinese national standard (CNS) A4 specification (210X297 mm) is applicable. 8 3 9 5 1 6 A7 _B7_ V. Description of the invention ( 9) Just a few. Embodiment 4 Figure 5 is a sectional view showing another embodiment of the CO2 gas laser oscillator of the present invention. 41a, 41b, 41c, and 41d are gas ducts connecting the discharge excitation section 4 and the mirror unit sections 8a and 8b. The air is sent through the blower 2, and the gas is circulated and circulated through the gas ducts 41a to 41d in the direction of the arrow. And the gas flow passage 21 circulates or diffuses the laser gas existing in the optical path of the laser beam of the mirror units 8a, 8b to move outside the optical path. The blower 2 is set by using the laser gas circulation originally heated by the discharge excitation unit 4, but K can obtain laser oscillation without high bending as shown in FIG. 2 without increasing the size of the device. Features. Implementation_Example _ ^ _ Fig. 6 is a sectional view showing another embodiment of the CO2 gas laser vibrator according to the present invention. Reference numeral 51 is a fan that circulates the gas M in the direction of the arrow M between the discharge excitation section 4 and the mirror unit sections 8a and 8b through the gas ducts 41a to 41d. Here, the gas flow 21 in the direction of the arrow of the blower 51 is caused to circulate, thereby circulating or diffusing the laser gas in the optical path of the laser beam in the mirror unit sections 8a and 8b to move outside the optical path. The absorption of the laser beams of the mirror element units 8a and 8b disappears, and as a result, the laser oscillation characteristics of the high output without bending shown in Fig. 2 can be obtained. Tube picking example 6 Fig. 7 is a sectional view showing another embodiment of the CO2 gas laser oscillator of the present invention. (Please read the precautions on the back before filling out this page) Order the paper printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs to apply the Chinese National Standard (CNS) A4 (210X 2.97 mm) 9 39 5 1 6 A7 B7 5 DESCRIPTION OF THE INVENTION (1G) The resonator has a Z-folded configuration using folded-back mirrors 61 and 62, and there are a large number of optical paths in the mirror unit portions 8a and 8b. After the blowers 11, 12 are operated, the laser gas moves out of the mirror unit 8a, 8b (please read the precautions on the back before filling out this page). Due to this, the absorption of the laser beams in the mirror unit portions 8a and 8b disappears, and as a result, the laser oscillation characteristics of high output without bending as shown in Fig. 2 can be obtained. As the number of laser paths of the laser light passing through the mirror units 8a and 8b increases, the bending of the laser oscillation characteristic will appear remarkably. Therefore, the effect of the laser beam absorption in the present invention will be greater. Tube_Example 7 FIG. 8 shows an example of a C02 laser processing apparatus equipped with the C02 gas laser oscillator described in Example 1. FIG. In the figure, 81 is a CO2 gas laser oscillator, and 82 is a beam duct 83a, 83b and a bend miller 84a, 84b, 84c, 84d, etc., thereby transmitting by the Ministry of Economic Affairs The Intellectual Property Bureau employee consumer cooperative prints the beam transmission system required for the laser beam 10 generated by the CO2 gas laser oscillator 81, and 85 is the processing lens required for the laser beam 10 to collect light on the workpiece 86 ( lens) 87, and the auxiliary gas sent from the auxiliary gas tube 88 to the processing head 86, such as a nozzle 89 required for processing the processing head 86, 90 is the processing work required to move the processing object 86台 (table). 91a, 91b are water pipes. The C02 laser processing device configured in this way is that a high-output and stable laser beam can be supplied by the C02 gas laser vibrator 81, so the laser processing can be performed with high quality and high speed. The foregoing embodiments 1 to 7 illustrate the case where the present invention is applicable to a C02 gas laser oscillator and a laser processing device using a C02 laser, but the paper dimensions of this publication are applicable to the Chinese National Standard (cns) A4 specifications (2iox297 mm) 1〇3 9 5 1 6 " " " A7 B7 V. Description of the invention (11) The C0 2 gas laser oscillator of the invention is not limited to this. Radio, for example, suitable for excimer laser or printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Metal Vapor Economy Magnetism-body lift. To torch 7 In the case of the unit, the body can be shot, and the W gas is 1M. The case can also be exported. The laser is even more common when the gas is lightning. The shooting machine II of the shooting machine is used for the transmission. The lightning applicator π swings and moves by a single height to make the lightning a. The aerodynamic effect $. Vibration is outside, and the mirror gains K to send 2 moves. Before being able to use high-quality CO sex, 置 Lei put light absorption, and led to the incomparable traitor Lei Bufei The structured structure of the orientation is as strong as a beam and re-excited with the sexual beam. The machine pears the air and the body sets the light path to vibrate.气 U 之 由 逼 光 #. The greatness of this, the gas shoots light and fruit, the strong shooter body is shaped by the type of lightning effect of the thunder, and the hip thunder blows gas through the large machine mine. The beam of the cross-oscillation axis radiates the light and places it in the wind. Count the light out of the sample, the M-speed launcher, the mine, the mine, the heating, the multi-fire mine, the coaxial high-source mine, and the mine must move. Derived from 2M. According to the way, the sexual guidance and the K-magnetism are used as part of the acquisition. M uses CO to deliver the results. In addition to the loss of force, the pressure body can be emotionally modified, so that the direct effect of the power can be reduced. Strong air, the electric power generation is based on the timeliness of the beam K before the Mingming axis. This lens can be made from time to time. Yu at,,,. The shot book is sent in the same shot. The structure is installed in the middle layer. Lei Ming is a special envoy machine that is used by Deray without a vibration sending order (please read the precautions on the back before filling this page). Standards are applicable to China National Standards (CNS) A4 specifications (210X297 mm) 11 3 9 5 1 6 A7 B7 V. Description of the invention (12) The gas laser processing device of the present invention is due to the use of the aforementioned CO2 gas laser It is not necessary to increase the size of the device and it can be used for high output. It is also necessary to use beam lasers (please read the precautions on the back before filling out this page). Applicable to China National Standard (CNS) Α4 specification (210X 297 mm) 2 3 9 5 1 6