TW379473B - Pulse laser with pulse energy trimmer - Google Patents

Pulse laser with pulse energy trimmer Download PDF

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Publication number
TW379473B
TW379473B TW87110281A TW87110281A TW379473B TW 379473 B TW379473 B TW 379473B TW 87110281 A TW87110281 A TW 87110281A TW 87110281 A TW87110281 A TW 87110281A TW 379473 B TW379473 B TW 379473B
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pulse
pulse energy
laser
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patent application
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TW87110281A
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Richard L Sandstrom
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Cymer Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0327—Operation of the cell; Circuit arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00—Functional characteristics
    • H01S2301/08—Generation of pulses with special temporal shape or frequency spectrum

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Description

五、發明説明（1 ) 發明領城 . 本發明偽關於脈衝雷射，特別關於具精密脈衝能量控 制的脈衝雷射。 發明背暑 一些脈衝雷射應用需f以對於在從脈衝至脈衝的脈衝 能量中基本上零變化之需要的脈衝能量之精密控制，·經常 此目的很難達成，特別是在氣體放電雷射中；例如，用於 積體電路微影的最佳習知技藝準分子雷射提供數値百分點 的一脈衝至脈衝穩定；這些變化傜由於如在增益媒體中的 變化和在電氣放電程序中的變化等變化因素；對於用在微 影的一典型準分子雷射的雷射脈衝之期間為約10-20 ns且 脈衝頻率約在1 , 0 0 0Hz之範圍中。 嘗試達到脈衝至脈衝能量持續性的習知技藝已涉及如 電氣放電電壓之精密控制和在電壓間時間週期時對於電壓 之調整的雷射本身的技術；這些技術已成功地將在脈衝能 量上的變化減少至數艏百分點；所需要的是提供在脈衝至 脈衝能量變化上有較大減少的一個糸統。 龙發明概悪 經濟部中央標準局員工消費合作社印製 ---!---;----^ 『裝-- /......... , (請先閲讀背面之注意事項再填寫本頁) 本發明提供用於提供雷射脈衝能量之精密控制的一種 脈衝雷射条統；具有在奈秒或次奈秒範圍的響應時間之一 快速脈衝能量檢測器將代表脈衝能量的一電氣信號提供至 一觸發電路，其積分該信號且當該積分信號到達一預定位 準時觸發一光電切換器；該光電切換器之操作修整該脈衝 能量之一部分使得所得的脈衝能量被維持在一持續和期望 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）
五、發明説明（2 ) 的位準；在一較佳實施例中.，該光電切运器包括一波口斯 單胞和至少一個極化分光器；在此較佳實&例中，一光學 延遲線將額外時間提供予脈衝修整組件供操作。 圃式簡菫説明 第一圔偽本發明之一f佳實施例的一方塊圖； 第二A和二B圖顯示較佳觸發電路之電路圖； 第三至五圖傺本發明之其它較佳實施例的方塊圖。 較佳奮施例：> 譁細說日月 M濟部中央標準局員工消費合作社印製 ---!---：---^--『裝--- ,- (請先鬩讀背面之注意事項再填寫本頁} 本發明之較佳實施例可藉由圖式之參考而被説明。 本發明之一第一較佳實施例可藉由參考第一圖而被說 明；第一圖傺具有提供脈衝至脈衝能量持續性之一實質改 善的一即時脈衝能量修整器之一準分子雷射的一方塊圖； 該条統包括含有一對延長電極、一準分子雷射氣體（如Kr 、F1和Me之混合物）、一風扇以循環在電極間的氣體及一 熱量交換器的一準分子雷射腔室；如此一腔室在公佈予亞 金斯等人的美國專利第4,959,84號中被描逑，其在此被合 併參考；在雷射腔體之窗的隙縫産生具有水平上鈞2 ma和 垂直上約20mn之一横截面的一光束；一雷射共振腔體被包 含三稜鏡光束擴張器、一樞接波長控制鏡、及一中階梯光 柵的一線調窄模組1G和輸出耦合器5所提供，其傷具約0.3 之反射度的一部分反射鏡；’線調窄模組之三棱鏡光束擴張 器在水平方向擴張光束以加強光柵之有效性並在水平方向 極化該光束。 分光器6分離約2¾之光束20能量並將分離部分21導向 —5 — _ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 經濟部中央標準爲員工消費合作社印¾ A7 B7 五'發明説明（3) 至一非常高速光檢測器7。， -. 光束20之之主要部分進行至被四個45 ^全反射器11形 成的延遲線3G並通過波口斯單胞3並通過被設置以通過水 平極化光而斥回垂直極化光的極化分光器4。 光檢測器7應較佳具有如Ins的一非常快速爬升時間； 如此檢測器之一（第FD 5Q1G號零件）可從設在紐澤西州 紐頓市的Thar Labs公司獲得；此單元具有Ins之爬升時間 和lram*之活動面積，·此單元包含一快速PIN光二極體和一 内部偏壓電池。 光檢測器？之輸出被饋至積組信號並將該積組信號比 較於對應於所期望脈衝能量的一預定截止值的光電單胞觸 發器8;當逹到該截止值時，觸發器8産生在快速波口斯單 胞3中致動一高電壓的一觸發信號；波口斯單胞應較佳具 有小於Ins之一爬升時間，且有達到5 kHz之重覆率；如此 適合的波口斯單胞之一可從設在加州聖地牙哥巿的能量壓 縮公司獲得；此特殊波口斯單胞具有500 ps之一爬升時間 ，以電壓從3.5kV升至9kV且以小於5 0ps之抖動有高至5kHz 的重覆率；將高電壓施加於波口斯單胞5將雷射光束22之 極化度移變90度成垂直使得在切換後橫過波口斯單胞3的 光束22之該部分被極化分光器4斥回。 因此，輸出光束23之能量被修整以提供具有小於1%之 變化的脈衝至脈衝持續能量。 對於波口斯單胞觸發器8的兩痼較佳電路被顯示在第 ^二A和二B圖中；在第二A圖中，來自快速光二極體7的 _____- 6 ~_______ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） ----^--------、、/ 裝-------丨訂 — --- ί - * _ (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（4 ) 一電流信號在電流至電壓電，路40中被轉运為一電壓信號， 且出自電路40之電壓信號在積分階段42中無積分；來自積 分階段42的被積分倍號在比較器/觸發器階段44中被與一 門限信號比較；輸出觸發器信號46從産生用於觸發在第一 、三、四和五圖中所示的_口斯單胞3之高電壓之一觸發 器信號（如i_13V)的比較器/觸發器電踣之運算放大器之 軌道至軌道間搖擺；相同之放大器可被使用於所有三個電 路；一較佳放大器之例子為CLC449或CLC440 ;門限電壓如 在48所示地被調整；該諝整可為手動或可如該回授電路之 一部分地為自動；該門限應較佳地為對應於稍低於典型上 被雷射2在無修整特性所産生的最低脈衝能量的一脈衝能 量之能量；與波口斯單胞觸發器8結合的延遲被估計有約4 -5ns ;在第二B圔中所示的電路中，’光二極體之輸出被積 分於電容器電路5Q上；在脈波間該電容器被在52所示的電 阻器放電；在該二B電路中的比較器/觸發器階段44傺與 二A電路者相同。 為此条統所需以轉向在光束22中雷射脈衝之不要部分 之時間以此實施例傺在約6-7ns之範圍中；因此，反射器11 被設置以提供約S-7 ns之光束2 2的延遲；此對應於在光束 路徑長度上約2米的增加；在一較佳組態中，被鏡子11産 生的延遲路線之長度是可調整的；較佳地，電子電路之響 應時間被量測且光束.路徑長度可據此被調整；路徑長度也 可被調整以調諧該条統；替換地，一可諝式延遲電路可在 波口斯單胞觸發器8内被建立使得一額外校度元件被提供 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) >裝- 訂 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（5 ) 予該脈衝修整条統；這些調.諧機構兩者或任_一可為自動的 和合併入具量測輸出脈衝能量的一脈衝能i檢測器的回授 迴路以維持脈衝能量在一期望位準。 其它音掄例 本發明可使用許多其它特定組態來實施；幾個這些組 態在第三至五圖中被描述。 在第三圖之配置中，波口斯單胞傜在共振腔體内且該 配置不含有光學延遲路徑；當比較於脈衝修整組件之作動 時間脈衝是相當長時此配置可為較佳。 在第四圖之配置中，在雷射腔室上的一傾斜窗提供雷 射光束的初始極化。 在第五圖之配置中，一些脈衝藉由分離雷射輸出光束 成一半並將光束之一半送過一光學延遲線而被提供；在被 再連接於未延遲的一半前經延遲的一半如所需的被修整。 雖然該雷射已以參考於幾個特殊實施例地被描述，最 好可做各種調適和修正；例如，可對該波口斯單胞觸發器 單元提供控制，其可藉由如時間之一函數地改變觸發門限 而提供予時間變化脈衝能量；光電觸發器8可被組成以基 於來自光二極體？的峰值脈衝信號而非被積分的信號來觸 發波口斯單胞3;在此情形中，一適當類比電路將較佳地 被提供，其以傜為該峰值脈衝能量之一函數的一總量來修 整該脈衝之尾緣；所描述条統之組件可用不同的但功能相 同的組件來替代；因此，本發明只被所附申請專利範圍和 -8 - 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ---1---''----^ > 裝-- /-'- (請先閱讀背面之注意事項再填寫本1) 訂 A7 B7 五、發明説明（ 它們的法定相同者所限定 元件編號對昭丟 I 〇線調窄模組 5輸出耦合器 6分光器 20光束 21分離部分 7光檢測器（光二極體） 22主要部分 3 0延遲線 II 45°全反射器（鏡子） 3波口斯單胞 4極化分光器 S光電單胞觸發器 2 3輸出光束 40電流至電壓電路 42積分階段 44比較器/觸發器階段 46輸出觸發信號 48門限.電壓 2雷射腔室 50電容器電路 52電阻器 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 ---=-9-=. 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）

Claims (1)

  1. A8 B8 C8 D8 經濟部中央標準局員工消費合作社印製 申請專利範圍 1. 一種用以提供雷射脈衝能量之精密控制的脈衝雷射条 統，包含有： A .用以産生一脈衝雷射光束的一脈衝雷射； B. —快速脈衝能量檢測器，其具有在奈秒或次奈 秒範圍内的響應時間並被組構成以檢測脈衝能量並對 應於該脈衝能量産生一電氣信號； C. 一光電切換器，其具有在奈秒或次奈秒範圍内 的響應時間以阻檔在該脲衝雷射光束中部分之脈衝； D. —光電切換觸發器，被組構來根據來自該快速 脈衝能量檢測器的信號控制該光電切換器。 2. 依據申請專利範圍第1項之脈衝雷射条統，其中該脈 衝雷射僳一準分子雷射。 3 .依據申請專利範圍第1項之脈衝雷射条統，其中該快 速脈衝能量檢測器僳為一個光二極體。 4. 依據申請專利範圍第1項之脈衝雷射集統，其中該光 電切換器包含有一波口斯單胞和至少一痼極化分光器。 5. 依據申請專利範圍第4項之脈衝雷射条統，其中該光 電切換觸發器包含一觸發電路，被配置成在來自該脈 衝能量檢測器的電氣信號達到一預定值時提供高電壓 至該波口斯單胞。 (請先閱讀背面之注意事項再填寫本頁) -裝· 、訂 本紙張尺度逋用中國國家標準（CNS ) A4規格（210X297公;ϊ ί 〇 871 10tSf
    *2>-® +V9 Vth V
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    21 模組 丨 1 具極化的線調窄 雷射腔室 . 、 & \ Νί Ί \ \ Γ > 〇
    7JC^S
TW87110281A 1997-07-21 1998-06-25 Pulse laser with pulse energy trimmer TW379473B (en)

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EP (1) EP0998773B1 (zh)
JP (1) JP3404292B2 (zh)
AU (1) AU7837498A (zh)
DE (1) DE69836861T2 (zh)
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WO (1) WO1999004465A1 (zh)

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