Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics CorpfiledCriticalUnited Microelectronics Corp
Priority to TW086114185ApriorityCriticalpatent/TW377503B/zh
Application grantedgrantedCritical
Publication of TW377503BpublicationCriticalpatent/TW377503B/zh
Internal Circuitry In Semiconductor Integrated Circuit Devices
(AREA)
TW086114185A1997-09-301997-09-30Structure of multilevel interconnects in semiconductor components and the method of manufacturing the same
TW377503B
(en)