TW374107B - Method and device for delivering a pure gas charged with a predetermined quantity of at least one gaseous impurity to an apparatus - Google Patents
Method and device for delivering a pure gas charged with a predetermined quantity of at least one gaseous impurity to an apparatusInfo
- Publication number
- TW374107B TW374107B TW086114999A TW86114999A TW374107B TW 374107 B TW374107 B TW 374107B TW 086114999 A TW086114999 A TW 086114999A TW 86114999 A TW86114999 A TW 86114999A TW 374107 B TW374107 B TW 374107B
- Authority
- TW
- Taiwan
- Prior art keywords
- pure gas
- delivering
- gas charged
- predetermined quantity
- impurity
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0006—Calibrating gas analysers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0324—With control of flow by a condition or characteristic of a fluid
- Y10T137/0329—Mixing of plural fluids of diverse characteristics or conditions
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87265—Dividing into parallel flow paths with recombining
- Y10T137/87281—System having plural inlets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87265—Dividing into parallel flow paths with recombining
- Y10T137/87322—With multi way valve having serial valve in at least one branch
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87571—Multiple inlet with single outlet
- Y10T137/87676—With flow control
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87571—Multiple inlet with single outlet
- Y10T137/87676—With flow control
- Y10T137/87684—Valve in each inlet
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87708—With common valve operator
- Y10T137/87716—For valve having a flexible diaphragm valving member
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87788—With valve or movable deflector at junction
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Physics & Mathematics (AREA)
- Combustion & Propulsion (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9613436A FR2755512B1 (fr) | 1996-11-05 | 1996-11-05 | Procede et dispositif de fourniture a un appareil d'un gaz pur charge d'une quantite predeterminee d'au moins une impurete gazeuse |
Publications (1)
Publication Number | Publication Date |
---|---|
TW374107B true TW374107B (en) | 1999-11-11 |
Family
ID=9497313
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086114999A TW374107B (en) | 1996-11-05 | 1997-10-14 | Method and device for delivering a pure gas charged with a predetermined quantity of at least one gaseous impurity to an apparatus |
Country Status (6)
Country | Link |
---|---|
US (1) | US5937886A (zh) |
EP (1) | EP0840119B1 (zh) |
DE (1) | DE69722893T2 (zh) |
FR (1) | FR2755512B1 (zh) |
SG (1) | SG53112A1 (zh) |
TW (1) | TW374107B (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4400973B2 (ja) * | 1999-01-25 | 2010-01-20 | 大陽日酸株式会社 | ガス中の微量不純物の分析方法及び装置 |
US6834648B2 (en) | 2002-01-17 | 2004-12-28 | Avox Systems Inc. | Valve manifold assembly for oxygen mask dispensing container |
US6648034B1 (en) * | 2002-05-23 | 2003-11-18 | Air Products And Chemicals, Inc. | Purgeable manifold for low vapor pressure chemicals containers |
US6935617B2 (en) * | 2002-07-26 | 2005-08-30 | Applera Corporation | Valve assembly for microfluidic devices, and method for opening and closing the same |
JP4054798B2 (ja) * | 2004-11-29 | 2008-03-05 | キヤノン株式会社 | 流体搬送方法 |
WO2007104334A1 (en) * | 2006-03-15 | 2007-09-20 | Norgren Gmbh | Valve with a springy diaphragm |
CN102628846B (zh) * | 2012-04-19 | 2014-04-23 | 杭州克柔姆色谱科技有限公司 | 超高纯气体中微量杂质分析的气相色谱检测系统及方法 |
TWI772330B (zh) * | 2016-10-14 | 2022-08-01 | 荷蘭商蜆殼國際研究所 | 用於定量分析氣態製程流之方法及設備 |
JP7157461B2 (ja) * | 2017-10-31 | 2022-10-20 | 株式会社フジキン | バルブ装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0370150A1 (en) * | 1988-11-21 | 1990-05-30 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for producing standard gas mixture and apparatus for producing the same |
US5239856A (en) * | 1988-11-21 | 1993-08-31 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Apparatus for producing standard gas mixtures |
US4977929B1 (en) * | 1989-06-28 | 1995-04-04 | Fluoroware Inc | Weir valve sampling/injection port |
US5261452A (en) * | 1991-03-01 | 1993-11-16 | American Air Liquide | Critical orifice dilution system and method |
JP3138009B2 (ja) * | 1991-05-30 | 2001-02-26 | 忠弘 大見 | 不純物吸着量の評価方法及びその評価用装置 |
FR2677763B1 (fr) * | 1991-06-12 | 1994-08-26 | Air Liquide | Procede et dispositif de fourniture de gaz a un analyseur a haute sensibilite. |
US5214952A (en) * | 1991-08-16 | 1993-06-01 | Praxair Technology, Inc. | Calibration for ultra high purity gas analysis |
FR2714968B1 (fr) * | 1994-01-07 | 1996-03-29 | Air Liquide | Procédé et dispositif de fourniture de gaz à un analyseur de traces d'impuretés dans un gaz. |
US5518015A (en) * | 1994-09-30 | 1996-05-21 | Gas Research Institute | Automatic calibrating electrically controlled diaphragm valve actuators and methods for their calibration |
US5661225A (en) * | 1996-09-12 | 1997-08-26 | Air Products And Chemicals, Inc. | Dynamic dilution system |
-
1996
- 1996-11-05 FR FR9613436A patent/FR2755512B1/fr not_active Expired - Fee Related
- 1996-11-19 US US08/752,070 patent/US5937886A/en not_active Expired - Fee Related
-
1997
- 1997-10-13 DE DE69722893T patent/DE69722893T2/de not_active Expired - Fee Related
- 1997-10-13 EP EP97402404A patent/EP0840119B1/fr not_active Expired - Lifetime
- 1997-10-14 TW TW086114999A patent/TW374107B/zh active
- 1997-10-27 SG SG1997003875A patent/SG53112A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
FR2755512A1 (fr) | 1998-05-07 |
DE69722893T2 (de) | 2004-05-19 |
FR2755512B1 (fr) | 1998-12-18 |
SG53112A1 (en) | 1998-09-28 |
US5937886A (en) | 1999-08-17 |
EP0840119A1 (fr) | 1998-05-06 |
EP0840119B1 (fr) | 2003-06-18 |
DE69722893D1 (de) | 2003-07-24 |
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