TW369682B - Chip retainer of polishing head for chemical mechanical polishing machine set - Google Patents
Chip retainer of polishing head for chemical mechanical polishing machine setInfo
- Publication number
- TW369682B TW369682B TW086118024A TW86118024A TW369682B TW 369682 B TW369682 B TW 369682B TW 086118024 A TW086118024 A TW 086118024A TW 86118024 A TW86118024 A TW 86118024A TW 369682 B TW369682 B TW 369682B
- Authority
- TW
- Taiwan
- Prior art keywords
- polishing
- chip retainer
- chemical mechanical
- machine set
- retainer ring
- Prior art date
Links
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A kind of chip retainer ring of polishing head for chemical mechanical polishing machine set, comprising: polishing table, polishing pad, polishing head, and chip retainer ring, wherein polishing pad is installed on polishing table, polishing head is located on polishing pad, and chip retainer ring is located on the polishing head, for the improvement of chip retainer ring, a plurality of pipe holes are designed to form the chip retainer ring, wherein the direction of pipe holes is in the centrifugal direction, with a structure of gradual expansion from outer toward inner.
Priority Applications (15)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086118024A TW369682B (en) | 1997-12-01 | 1997-12-01 | Chip retainer of polishing head for chemical mechanical polishing machine set |
US09/059,750 US6062963A (en) | 1997-12-01 | 1998-04-14 | Retainer ring design for polishing head of chemical-mechanical polishing machine |
DE19839086A DE19839086B4 (en) | 1997-09-01 | 1998-08-27 | Retaining ring for a chemical mechanical polishing apparatus and chemical mechanical polishing apparatus therewith |
FR9810824A FR2767735B1 (en) | 1997-09-01 | 1998-08-28 | CHEMICAL MECHANICAL POLISHING MACHINE AND METHOD AND RETAINING SLEEVE USED IN THIS MACHINE |
JP10246219A JP3067741B2 (en) | 1997-09-01 | 1998-08-31 | Chemical mechanical polishing machine and manufacturing method using the polishing machine |
GB9920573A GB2344303B (en) | 1997-09-01 | 1998-09-16 | Chemical-mechanical polishing machine and retainer ring thereof |
GB9920572A GB2344302B (en) | 1997-09-01 | 1998-09-16 | Chemical-mechanical polishing machine and retainer ring thereof |
GB9820209A GB2342605B (en) | 1997-09-01 | 1998-09-16 | Chemical-mechanical polishing machine and retainer ring thereof |
GB9920574A GB2345257B (en) | 1997-09-01 | 1998-09-16 | Chemical-mechanical polishing method and fabricating method |
US09/157,041 US6241582B1 (en) | 1997-09-01 | 1998-09-18 | Chemical mechanical polish machines and fabrication process using the same |
NL1010252A NL1010252C2 (en) | 1997-09-01 | 1998-10-05 | Retaining ring for use in a chemical mechanical polishing machine and manufacturing process using it. |
US09/425,130 US6183350B1 (en) | 1997-09-01 | 1999-10-22 | Chemical-mechanical polish machines and fabrication process using the same |
US09/425,454 US6234876B1 (en) | 1997-09-01 | 1999-10-22 | Chemical-mechanical polish machines and fabrication process using the same |
US09/426,937 US6293850B1 (en) | 1997-09-01 | 1999-10-22 | Chemical-mechanical polish machines and fabrication process using the same |
FR0011872A FR2797603B1 (en) | 1997-09-01 | 2000-09-18 | CHEMICAL-MECHANICAL POLISHING MACHINE AND METHOD AND RETAINING SLEEVE USED IN THIS MACHINE |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086118024A TW369682B (en) | 1997-12-01 | 1997-12-01 | Chip retainer of polishing head for chemical mechanical polishing machine set |
Publications (1)
Publication Number | Publication Date |
---|---|
TW369682B true TW369682B (en) | 1999-09-11 |
Family
ID=57941433
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086118024A TW369682B (en) | 1997-09-01 | 1997-12-01 | Chip retainer of polishing head for chemical mechanical polishing machine set |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW369682B (en) |
-
1997
- 1997-12-01 TW TW086118024A patent/TW369682B/en active
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