TW366599B - Optoelectronic converter and its manufacturing method - Google Patents
Optoelectronic converter and its manufacturing methodInfo
- Publication number
- TW366599B TW366599B TW085100760A TW85100760A TW366599B TW 366599 B TW366599 B TW 366599B TW 085100760 A TW085100760 A TW 085100760A TW 85100760 A TW85100760 A TW 85100760A TW 366599 B TW366599 B TW 366599B
- Authority
- TW
- Taiwan
- Prior art keywords
- bottom plate
- manufacturing
- optoelectronic converter
- holder
- distance
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000005693 optoelectronics Effects 0.000 title 1
- 239000004065 semiconductor Substances 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02325—Optical elements or arrangements associated with the device the optical elements not being integrated nor being directly associated with the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Led Device Packages (AREA)
- Light Receiving Elements (AREA)
- Semiconductor Lasers (AREA)
- Optical Couplings Of Light Guides (AREA)
- Led Devices (AREA)
- Measurement Of Radiation (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
This converter has some semiconductor elements (6) that can receive or transmit a light beam. Said semiconductor element (6) is fixed on a bottom plate (1). A distance-holder (7) is located on the bottom plate and supports a lens system (8). The bottom plate, distance-holder and lens system are made from the materials that have approximately the same thermal expansion coefficient, for example, from silicon and glass. Many such arrangements can be manufactured as one unit and can be separated.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19508222A DE19508222C1 (en) | 1995-03-08 | 1995-03-08 | Opto-electronic converter |
Publications (1)
Publication Number | Publication Date |
---|---|
TW366599B true TW366599B (en) | 1999-08-11 |
Family
ID=7756033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085100760A TW366599B (en) | 1995-03-08 | 1996-01-23 | Optoelectronic converter and its manufacturing method |
Country Status (8)
Country | Link |
---|---|
US (1) | US5981945A (en) |
EP (1) | EP0731509B1 (en) |
JP (1) | JP3256126B2 (en) |
KR (1) | KR960036157A (en) |
CN (1) | CN1135660A (en) |
DE (2) | DE19508222C1 (en) |
ES (1) | ES2158166T3 (en) |
TW (1) | TW366599B (en) |
Families Citing this family (79)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080136955A1 (en) * | 1996-09-27 | 2008-06-12 | Tessera North America. | Integrated camera and associated methods |
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US6759687B1 (en) * | 2000-10-13 | 2004-07-06 | Agilent Technologies, Inc. | Aligning an optical device system with an optical lens system |
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US6635941B2 (en) * | 2001-03-21 | 2003-10-21 | Canon Kabushiki Kaisha | Structure of semiconductor device with improved reliability |
JP2002290842A (en) * | 2001-03-23 | 2002-10-04 | Sanyo Electric Co Ltd | Manufacturing method for solid-state image sensing device |
DE10118630A1 (en) * | 2001-04-12 | 2002-10-17 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Production of an optoelectronic semiconductor component comprises preparing sintered glass blanks, applying an adhesive to the surfaces of the blank to be connected, fixing both blanks in a tool, and forming a mechanical composite |
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US7343535B2 (en) | 2002-02-06 | 2008-03-11 | Avago Technologies General Ip Dte Ltd | Embedded testing capability for integrated serializer/deserializers |
US7074638B2 (en) | 2002-04-22 | 2006-07-11 | Fuji Photo Film Co., Ltd. | Solid-state imaging device and method of manufacturing said solid-state imaging device |
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WO2006055094A1 (en) | 2004-09-14 | 2006-05-26 | Cdm Optics, Inc. | Low height imaging system and associated methods |
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DE102009042479A1 (en) | 2009-09-24 | 2011-03-31 | Msg Lithoglas Ag | Method for producing an arrangement having a component on a carrier substrate and arrangement, and method for producing a semifinished product and semifinished product |
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WO2020125646A1 (en) | 2018-12-17 | 2020-06-25 | 青岛海信宽带多媒体技术有限公司 | Optical sub-module and optical module |
CN110212402B (en) * | 2019-05-07 | 2020-11-27 | 上海灿瑞科技股份有限公司 | Laser diode device |
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JPWO2021065909A1 (en) * | 2019-09-30 | 2021-04-08 | ||
WO2022020257A1 (en) * | 2020-07-20 | 2022-01-27 | Apple Inc. | Photonic integrated circuits with controlled collapse chip connections |
EP3971543B1 (en) * | 2020-09-17 | 2024-02-07 | Lynred | Infrared detector forming method and associated infrared detector |
US12111210B2 (en) | 2021-07-08 | 2024-10-08 | Apple Inc. | Light source modules for noise mitigation |
US12111207B2 (en) | 2022-09-23 | 2024-10-08 | Apple Inc. | Despeckling in optical measurement systems |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59596Y2 (en) * | 1975-03-14 | 1984-01-09 | 株式会社ニコン | rosyutsukeinojiyukoki |
JPS5946434B2 (en) * | 1978-01-10 | 1984-11-12 | キヤノン株式会社 | semiconductor laser equipment |
US4511755A (en) * | 1982-05-17 | 1985-04-16 | Kei Mori | Solar ray collection apparatus |
US5274456A (en) * | 1987-12-28 | 1993-12-28 | Hitachi, Ltd. | Semiconductor device and video camera unit using it and their manufacturing method |
DE3833096A1 (en) * | 1988-09-29 | 1990-04-05 | Siemens Ag | OPTICAL COUPLING |
JPH0732208B2 (en) * | 1989-10-31 | 1995-04-10 | 三菱電機株式会社 | Semiconductor device |
JP3191823B2 (en) * | 1992-02-03 | 2001-07-23 | 住友電気工業株式会社 | Semiconductor light receiving device |
JPH0463669U (en) * | 1990-10-12 | 1992-05-29 | ||
US5167724A (en) * | 1991-05-16 | 1992-12-01 | The United States Of America As Represented By The United States Department Of Energy | Planar photovoltaic solar concentrator module |
JPH0667115A (en) * | 1992-08-20 | 1994-03-11 | Kyocera Corp | Image device |
JP2975501B2 (en) * | 1993-05-17 | 1999-11-10 | 京セラ株式会社 | Imaging device |
US5617131A (en) * | 1993-10-28 | 1997-04-01 | Kyocera Corporation | Image device having a spacer with image arrays disposed in holes thereof |
-
1995
- 1995-03-08 DE DE19508222A patent/DE19508222C1/en not_active Expired - Fee Related
-
1996
- 1996-01-23 TW TW085100760A patent/TW366599B/en active
- 1996-03-04 EP EP96103353A patent/EP0731509B1/en not_active Expired - Lifetime
- 1996-03-04 JP JP7321896A patent/JP3256126B2/en not_active Expired - Fee Related
- 1996-03-04 ES ES96103353T patent/ES2158166T3/en not_active Expired - Lifetime
- 1996-03-04 DE DE59607023T patent/DE59607023D1/en not_active Expired - Fee Related
- 1996-03-07 KR KR1019960005882A patent/KR960036157A/en not_active Application Discontinuation
- 1996-03-08 CN CN96101887A patent/CN1135660A/en active Pending
- 1996-03-08 US US08/614,836 patent/US5981945A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE19508222C1 (en) | 1996-06-05 |
EP0731509B1 (en) | 2001-06-06 |
EP0731509A1 (en) | 1996-09-11 |
JPH08264843A (en) | 1996-10-11 |
CN1135660A (en) | 1996-11-13 |
ES2158166T3 (en) | 2001-09-01 |
DE59607023D1 (en) | 2001-07-12 |
US5981945A (en) | 1999-11-09 |
JP3256126B2 (en) | 2002-02-12 |
KR960036157A (en) | 1996-10-28 |
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