TW364166B - Structure of multilayer spin coating material and production method thereof - Google Patents

Structure of multilayer spin coating material and production method thereof

Info

Publication number
TW364166B
TW364166B TW087106281A TW87106281A TW364166B TW 364166 B TW364166 B TW 364166B TW 087106281 A TW087106281 A TW 087106281A TW 87106281 A TW87106281 A TW 87106281A TW 364166 B TW364166 B TW 364166B
Authority
TW
Taiwan
Prior art keywords
spin coating
coating material
removal rate
production method
multilayer spin
Prior art date
Application number
TW087106281A
Other languages
Chinese (zh)
Inventor
Shou-Zhi Ceng
Original Assignee
Winbond Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Winbond Electronics Corp filed Critical Winbond Electronics Corp
Priority to TW087106281A priority Critical patent/TW364166B/en
Application granted granted Critical
Publication of TW364166B publication Critical patent/TW364166B/en

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  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

The present invention relates to a structure of a multilayer spin coating material and the production thereof. It is used in the semiconductor planarization process such that process time is easier to control when chemical mechanical polishing is carried out. It is achieved by two spin coating materials with different removal rate, wherein the one with lower removal rate is first formed on the substrate, then the other with higher removal rate is formed, such that a preferred buffer is present when polishing close to the substrate, thereby obtaining the optimum polishing thickness.
TW087106281A 1998-04-23 1998-04-23 Structure of multilayer spin coating material and production method thereof TW364166B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW087106281A TW364166B (en) 1998-04-23 1998-04-23 Structure of multilayer spin coating material and production method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087106281A TW364166B (en) 1998-04-23 1998-04-23 Structure of multilayer spin coating material and production method thereof

Publications (1)

Publication Number Publication Date
TW364166B true TW364166B (en) 1999-07-11

Family

ID=57940944

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087106281A TW364166B (en) 1998-04-23 1998-04-23 Structure of multilayer spin coating material and production method thereof

Country Status (1)

Country Link
TW (1) TW364166B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202012100889U1 (en) 2011-11-15 2012-03-29 Unity Opto Technology Co., Ltd. LEDs bulb

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202012100889U1 (en) 2011-11-15 2012-03-29 Unity Opto Technology Co., Ltd. LEDs bulb

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees