TW363221B - Transmitting phase-shifting photomask and method of manufacturing the same - Google Patents

Transmitting phase-shifting photomask and method of manufacturing the same

Info

Publication number
TW363221B
TW363221B TW084102576A TW84102576A TW363221B TW 363221 B TW363221 B TW 363221B TW 084102576 A TW084102576 A TW 084102576A TW 84102576 A TW84102576 A TW 84102576A TW 363221 B TW363221 B TW 363221B
Authority
TW
Taiwan
Prior art keywords
transmitted
substrate
manufacturing
same
trenches
Prior art date
Application number
TW084102576A
Other languages
English (en)
Inventor
Satoshi Tanaka
Soichi Inoue
Hiroko Nakamura
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of TW363221B publication Critical patent/TW363221B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/30—Alternating PSM, e.g. Levenson-Shibuya PSM; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW084102576A 1994-03-15 1995-03-17 Transmitting phase-shifting photomask and method of manufacturing the same TW363221B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4361894 1994-03-15
JP22219094A JP3072006B2 (ja) 1994-03-15 1994-09-16 フォトマスク

Publications (1)

Publication Number Publication Date
TW363221B true TW363221B (en) 1999-07-01

Family

ID=26383416

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084102576A TW363221B (en) 1994-03-15 1995-03-17 Transmitting phase-shifting photomask and method of manufacturing the same

Country Status (4)

Country Link
US (1) US5549995A (zh)
JP (1) JP3072006B2 (zh)
KR (1) KR0170465B1 (zh)
TW (1) TW363221B (zh)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3290861B2 (ja) * 1995-09-18 2002-06-10 株式会社東芝 露光用マスクとパターン形成方法
JP3388986B2 (ja) * 1996-03-08 2003-03-24 株式会社東芝 露光用マスク及びその製造方法
US5876878A (en) * 1996-07-15 1999-03-02 Micron Technology, Inc. Phase shifting mask and process for forming comprising a phase shift layer for shifting two wavelengths of light
US5935734A (en) * 1997-03-03 1999-08-10 Micron Technology, Inc. Method for fabrication of and apparatus for use as a semiconductor photomask
US5882823A (en) * 1997-05-21 1999-03-16 International Business Machines Corporation Fib repair method
US6027837A (en) * 1997-10-14 2000-02-22 International Business Machines Corporation Method for tuning an attenuating phase shift mask
JPH11204397A (ja) * 1998-01-08 1999-07-30 Mitsubishi Electric Corp パターン決定方法および露光装置に用いられるアパーチャ
TW388004B (en) * 1998-04-03 2000-04-21 United Microelectronics Corp Alternating phase shift mask
US6277527B1 (en) 1999-04-29 2001-08-21 International Business Machines Corporation Method of making a twin alternating phase shift mask
US6428936B1 (en) * 1999-12-16 2002-08-06 Intel Corporation Method and apparatus that compensates for phase shift mask manufacturing defects
US6902851B1 (en) * 2001-03-14 2005-06-07 Advanced Micro Devices, Inc. Method for using phase-shifting mask
JP4562419B2 (ja) * 2004-05-10 2010-10-13 シャープ株式会社 位相シフトマスク及びその製造方法
CN101080671B (zh) * 2004-12-15 2010-05-12 凸版印刷株式会社 相移掩模及其制造方法以及半导体元件的制造方法
KR100850858B1 (ko) * 2006-08-31 2008-08-06 동부일렉트로닉스 주식회사 반도체용 마스크, 그 제조 방법 및 이를 이용한 패턴 형성방법
JP2008153447A (ja) * 2006-12-18 2008-07-03 Nec Electronics Corp シミュレーション方法およびシミュレーションシステム、ならびにマスクパターンの修正方法
US9733574B2 (en) * 2013-10-17 2017-08-15 Cypress Semiconductor Corporation Multiple phase-shift photomask and semiconductor manufacturing method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0690507B2 (ja) * 1986-02-17 1994-11-14 株式会社日立製作所 ホトマスク，及びそれを用いた投影露光方法、並びにホトマスクの製造方法
US5348826A (en) * 1992-08-21 1994-09-20 Intel Corporation Reticle with structurally identical inverted phase-shifted features

Also Published As

Publication number Publication date
JP3072006B2 (ja) 2000-07-31
KR0170465B1 (ko) 1999-03-20
JPH07306524A (ja) 1995-11-21
US5549995A (en) 1996-08-27

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees