TW363205B - Changeable disposal apparatus for purifier of semiconductor gas-cleaning facilities - Google Patents
Changeable disposal apparatus for purifier of semiconductor gas-cleaning facilitiesInfo
- Publication number
- TW363205B TW363205B TW087103003A TW87103003A TW363205B TW 363205 B TW363205 B TW 363205B TW 087103003 A TW087103003 A TW 087103003A TW 87103003 A TW87103003 A TW 87103003A TW 363205 B TW363205 B TW 363205B
- Authority
- TW
- Taiwan
- Prior art keywords
- disposal
- purifier
- changeable
- semiconductor gas
- cleaning facilities
- Prior art date
Links
Abstract
A kind of changeable disposal box for purifier of semiconductor gas-cleaning facilities which comprises a disposal space containing the reaction mixture of chemical material and the exhaust from semiconductor processing. The outlet of exhaust is connected to the end of the disposal space so that the exhaust can be expelled after the treatment of disposal apparatus. The apparatus also includes the air inlet connected to the inlet of disposal space and a plugged portion within the space with a plurality of holes on the surface; and a filter portion with several holes attached on the tip of the plugged portion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW087103003A TW363205B (en) | 1998-03-02 | 1998-03-02 | Changeable disposal apparatus for purifier of semiconductor gas-cleaning facilities |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW087103003A TW363205B (en) | 1998-03-02 | 1998-03-02 | Changeable disposal apparatus for purifier of semiconductor gas-cleaning facilities |
Publications (1)
Publication Number | Publication Date |
---|---|
TW363205B true TW363205B (en) | 1999-07-01 |
Family
ID=57940865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW087103003A TW363205B (en) | 1998-03-02 | 1998-03-02 | Changeable disposal apparatus for purifier of semiconductor gas-cleaning facilities |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW363205B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7988755B2 (en) | 2006-05-04 | 2011-08-02 | Milaebo Co., Ltd. | Byproduct collecting apparatus of semiconductor apparatus |
-
1998
- 1998-03-02 TW TW087103003A patent/TW363205B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7988755B2 (en) | 2006-05-04 | 2011-08-02 | Milaebo Co., Ltd. | Byproduct collecting apparatus of semiconductor apparatus |
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