TW363205B - Changeable disposal apparatus for purifier of semiconductor gas-cleaning facilities - Google Patents

Changeable disposal apparatus for purifier of semiconductor gas-cleaning facilities

Info

Publication number
TW363205B
TW363205B TW087103003A TW87103003A TW363205B TW 363205 B TW363205 B TW 363205B TW 087103003 A TW087103003 A TW 087103003A TW 87103003 A TW87103003 A TW 87103003A TW 363205 B TW363205 B TW 363205B
Authority
TW
Taiwan
Prior art keywords
disposal
purifier
changeable
semiconductor gas
cleaning facilities
Prior art date
Application number
TW087103003A
Other languages
Chinese (zh)
Inventor
Wen-Xin Yang
Original Assignee
Vanguard Int Semiconduct Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vanguard Int Semiconduct Corp filed Critical Vanguard Int Semiconduct Corp
Priority to TW087103003A priority Critical patent/TW363205B/en
Application granted granted Critical
Publication of TW363205B publication Critical patent/TW363205B/en

Links

Abstract

A kind of changeable disposal box for purifier of semiconductor gas-cleaning facilities which comprises a disposal space containing the reaction mixture of chemical material and the exhaust from semiconductor processing. The outlet of exhaust is connected to the end of the disposal space so that the exhaust can be expelled after the treatment of disposal apparatus. The apparatus also includes the air inlet connected to the inlet of disposal space and a plugged portion within the space with a plurality of holes on the surface; and a filter portion with several holes attached on the tip of the plugged portion.
TW087103003A 1998-03-02 1998-03-02 Changeable disposal apparatus for purifier of semiconductor gas-cleaning facilities TW363205B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW087103003A TW363205B (en) 1998-03-02 1998-03-02 Changeable disposal apparatus for purifier of semiconductor gas-cleaning facilities

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087103003A TW363205B (en) 1998-03-02 1998-03-02 Changeable disposal apparatus for purifier of semiconductor gas-cleaning facilities

Publications (1)

Publication Number Publication Date
TW363205B true TW363205B (en) 1999-07-01

Family

ID=57940865

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087103003A TW363205B (en) 1998-03-02 1998-03-02 Changeable disposal apparatus for purifier of semiconductor gas-cleaning facilities

Country Status (1)

Country Link
TW (1) TW363205B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7988755B2 (en) 2006-05-04 2011-08-02 Milaebo Co., Ltd. Byproduct collecting apparatus of semiconductor apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7988755B2 (en) 2006-05-04 2011-08-02 Milaebo Co., Ltd. Byproduct collecting apparatus of semiconductor apparatus

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