TW359892B - Semiconductor device and method of manufacturing the same - Google Patents

Semiconductor device and method of manufacturing the same

Info

Publication number
TW359892B
TW359892B TW86116188A TW86116188A TW359892B TW 359892 B TW359892 B TW 359892B TW 86116188 A TW86116188 A TW 86116188A TW 86116188 A TW86116188 A TW 86116188A TW 359892 B TW359892 B TW 359892B
Authority
TW
Taiwan
Prior art keywords
manufacturing
same
semiconductor device
semiconductor
Prior art date
Application number
TW86116188A
Other languages
English (en)
Inventor
Susumu Akamatsu
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Ind Co Ltd filed Critical Matsushita Electric Ind Co Ltd
Application granted granted Critical
Publication of TW359892B publication Critical patent/TW359892B/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/01Manufacture or treatment
    • H10B12/02Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/05Making the transistor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/01Manufacture or treatment
    • H10B12/09Manufacture or treatment with simultaneous manufacture of the peripheral circuit region and memory cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/50Peripheral circuit region structures

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
TW86116188A 1996-10-31 1997-10-30 Semiconductor device and method of manufacturing the same TW359892B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29036296 1996-10-31

Publications (1)

Publication Number Publication Date
TW359892B true TW359892B (en) 1999-06-01

Family

ID=17755057

Family Applications (1)

Application Number Title Priority Date Filing Date
TW86116188A TW359892B (en) 1996-10-31 1997-10-30 Semiconductor device and method of manufacturing the same

Country Status (4)

Country Link
US (2) US6121650A (zh)
JP (1) JPH10233492A (zh)
KR (1) KR100421521B1 (zh)
TW (1) TW359892B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6207985B1 (en) * 1998-02-02 2001-03-27 Texas Instruments Incorporated DRAM memory cell and array having pass transistors with surrounding gate
US6995412B2 (en) * 2002-04-12 2006-02-07 International Business Machines Corporation Integrated circuit with capacitors having a fin structure
KR100464414B1 (ko) * 2002-05-02 2005-01-03 삼성전자주식회사 Dc 노드와 bc 노드에 연결된 소오스/드레인 접합영역의 접합 프로파일이 서로 다른 디램 소자의 메모리 셀트랜지스터 및 그 제조방법
US7327024B2 (en) * 2004-11-24 2008-02-05 General Electric Company Power module, and phase leg assembly
JP2007157892A (ja) * 2005-12-02 2007-06-21 Nec Electronics Corp 半導体集積回路およびその製造方法
US7414460B1 (en) 2006-03-31 2008-08-19 Integrated Device Technology, Inc. System and method for integrated circuit charge recycling

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4417325A (en) * 1981-07-13 1983-11-22 Eliyahou Harari Highly scaleable dynamic ram cell with self-signal amplification
JPH0712058B2 (ja) * 1985-06-27 1995-02-08 株式会社東芝 半導体装置およびその製造方法
JPH02122563A (ja) * 1988-10-31 1990-05-10 Nec Corp 半導体装置の製造方法
JPH02177359A (ja) * 1988-12-27 1990-07-10 Nec Corp 半導体記憶装置
JPH05259385A (ja) * 1992-03-10 1993-10-08 Hitachi Ltd 半導体集積回路装置の形成方法
JPH0653232A (ja) * 1992-08-03 1994-02-25 Mitsubishi Electric Corp 半導体装置およびその製造方法
TW288200B (en) * 1995-06-28 1996-10-11 Mitsubishi Electric Corp Semiconductor device and process thereof

Also Published As

Publication number Publication date
KR100421521B1 (ko) 2004-04-21
KR19980033367A (ko) 1998-07-25
US6121650A (en) 2000-09-19
US6303428B1 (en) 2001-10-16
JPH10233492A (ja) 1998-09-02

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent