TW359753B - Current measuring method, current sensor, and IC tester using the same current sensor - Google Patents

Current measuring method, current sensor, and IC tester using the same current sensor

Info

Publication number
TW359753B
TW359753B TW087103066A TW87103066A TW359753B TW 359753 B TW359753 B TW 359753B TW 087103066 A TW087103066 A TW 087103066A TW 87103066 A TW87103066 A TW 87103066A TW 359753 B TW359753 B TW 359753B
Authority
TW
Taiwan
Prior art keywords
current
measuring method
current sensor
tester
phase
Prior art date
Application number
TW087103066A
Other languages
Chinese (zh)
Inventor
Toshiyuki Okayasu
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Application granted granted Critical
Publication of TW359753B publication Critical patent/TW359753B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/24—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices
    • G01R15/241—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices using electro-optical modulators, e.g. electro-absorption

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

A current measuring method which has the steps of converting a current to be measured into a voltage signal, phase-modulating the light, which permeates through an optical modulator, by this voltage signal, obtaining interference light by allowing the phase-modulated light to interfere with non-phase-modulated light, and measuring the object current on the basis of the intensity of the interference light. An IC tester is also proposed which is adapted to measure a current flowing in a power source terminal of an IC to be tested, by using this current measuring method, and judge that the object IC is defective when the resultant current value is larger than a predetermined value.
TW087103066A 1998-02-05 1998-03-03 Current measuring method, current sensor, and IC tester using the same current sensor TW359753B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1998/000479 WO1999040446A1 (en) 1998-02-05 1998-02-05 Current measuring method, current sensor, and ic tester using the same current sensor

Publications (1)

Publication Number Publication Date
TW359753B true TW359753B (en) 1999-06-01

Family

ID=14207551

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087103066A TW359753B (en) 1998-02-05 1998-03-03 Current measuring method, current sensor, and IC tester using the same current sensor

Country Status (6)

Country Link
KR (1) KR20010006008A (en)
CN (1) CN1252130A (en)
DE (1) DE19882306T1 (en)
GB (1) GB2340233A (en)
TW (1) TW359753B (en)
WO (1) WO1999040446A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101958263B (en) * 2009-07-14 2013-01-02 致茂电子(苏州)有限公司 Semiconductor grain point measurement machine test method and semiconductor grain point measurement machine
US9733133B2 (en) * 2013-10-07 2017-08-15 Xiaotian Steve Yao Faraday current and temperature sensors
CN106463046A (en) * 2014-06-04 2017-02-22 瑞典爱立信有限公司 An optical electrical measurement system, a measurement probe and a method therefor
CN107091950B (en) 2016-02-16 2021-01-19 姚晓天 Reflective current and magnetic field sensor integrating temperature sensing based on optical sensing principle
CN107861045A (en) * 2017-10-13 2018-03-30 天津市英贝特航天科技有限公司 Short-circuit chip searching device and method based on direct current CT technology
CN109709384B (en) * 2018-12-13 2021-10-01 北京航天时代光电科技有限公司 Current sensor adopting integrated light path structure
KR102451032B1 (en) * 2020-09-29 2022-10-05 엘아이지넥스원 주식회사 APPARATUS AND METHOD FOR DETECTING A MALFUNTION OF FET(Field Effect Transistor)
CN115856396B (en) * 2022-12-09 2023-08-29 珠海多创科技有限公司 Sensing probe module, non-contact voltage measurement circuit, non-contact voltage measurement method and electronic equipment
KR102535830B1 (en) * 2023-04-11 2023-05-26 주식회사 수산이앤에스 A system for testing optical converter

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5224389B2 (en) * 1974-03-11 1977-06-30
JPS59155764A (en) * 1983-02-24 1984-09-04 Yokogawa Hokushin Electric Corp Photovoltometer
JPS59218915A (en) * 1983-05-27 1984-12-10 Yokogawa Hokushin Electric Corp Light guide type sensor
JPS6237940A (en) * 1985-08-12 1987-02-18 Nippon Denshi Zairyo Kk Probe card
JPS6246268A (en) * 1985-08-23 1987-02-28 Nippon Denshi Zairyo Kk Probe card
JPH07104365B2 (en) * 1987-09-19 1995-11-13 株式会社安川電機 Optical sensor device
JPH04172260A (en) * 1990-11-05 1992-06-19 Toyota Central Res & Dev Lab Inc Apparatus for measuring strength of electromagnetic field
JP2603380B2 (en) * 1991-09-13 1997-04-23 日本電信電話株式会社 Test apparatus and test method for integrated circuit
JPH0989961A (en) * 1995-09-26 1997-04-04 Tokin Corp Electric field detecting device

Also Published As

Publication number Publication date
DE19882306T1 (en) 2000-04-27
KR20010006008A (en) 2001-01-15
GB2340233A (en) 2000-02-16
CN1252130A (en) 2000-05-03
GB9923232D0 (en) 1999-12-08
WO1999040446A8 (en) 1999-12-16
WO1999040446A1 (en) 1999-08-12

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