TW350798B - Cleaning method and apparatus of high-density liquidized gas - Google Patents

Cleaning method and apparatus of high-density liquidized gas

Info

Publication number
TW350798B
TW350798B TW087100754A TW87100754A TW350798B TW 350798 B TW350798 B TW 350798B TW 087100754 A TW087100754 A TW 087100754A TW 87100754 A TW87100754 A TW 87100754A TW 350798 B TW350798 B TW 350798B
Authority
TW
Taiwan
Prior art keywords
density
liquidized
pollutant
solvent catalyst
gas
Prior art date
Application number
TW087100754A
Other languages
English (en)
Inventor
Kunio Arai
Hiroshi Inomata
Richard Lee Smith
Original Assignee
Shuzurifuresher Kaihatsukyodokumiai
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shuzurifuresher Kaihatsukyodokumiai filed Critical Shuzurifuresher Kaihatsukyodokumiai
Priority to TW087100754A priority Critical patent/TW350798B/zh
Application granted granted Critical
Publication of TW350798B publication Critical patent/TW350798B/zh

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
TW087100754A 1998-01-21 1998-01-21 Cleaning method and apparatus of high-density liquidized gas TW350798B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW087100754A TW350798B (en) 1998-01-21 1998-01-21 Cleaning method and apparatus of high-density liquidized gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087100754A TW350798B (en) 1998-01-21 1998-01-21 Cleaning method and apparatus of high-density liquidized gas

Publications (1)

Publication Number Publication Date
TW350798B true TW350798B (en) 1999-01-21

Family

ID=57939929

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087100754A TW350798B (en) 1998-01-21 1998-01-21 Cleaning method and apparatus of high-density liquidized gas

Country Status (1)

Country Link
TW (1) TW350798B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI421132B (zh) * 2006-03-13 2014-01-01 Kurita Water Ind Ltd 溶解氣體洗淨水之製法、製造裝置及洗淨裝置
TWI633924B (zh) * 2016-05-13 2018-09-01 青淨光能科技有限公司 一種氣體之處理方法與氣體處理裝置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI421132B (zh) * 2006-03-13 2014-01-01 Kurita Water Ind Ltd 溶解氣體洗淨水之製法、製造裝置及洗淨裝置
TWI633924B (zh) * 2016-05-13 2018-09-01 青淨光能科技有限公司 一種氣體之處理方法與氣體處理裝置

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