EP0889510A4
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2006-01-11
METHOD AND ARRANGEMENT FOR THE THERMAL TREATMENT OF A CRYSTALLINE SURFACE, A CRYSTALLINE PLATE AND METHOD FOR THE PRODUCTION OF A SINGLE CRYSTALLINE SURFACE
MY116313A
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2003-12-31
Method and apparatus for heat-treating an soi substrate and method of preparing an soi substrate by using the same
TW351847B
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1999-02-01
Method and apparatus for making semiconductor device
TW367539B
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1999-08-21
Cooling method, cooling device and handling apparatus
EP0616360A3
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1994-10-19
Device and method for cooling semiconductor wafers.
EP0928638A3
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2000-05-24
Method for coating a substrate and apparatus for coating and setting the coating
HK1004944A1
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1998-12-18
Method and device for selectively removing undesired material by irradiation
MY123396A
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2006-05-31
Method and apparatus for applying a protecting film to a semiconductor wafer
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1999-04-21
Method of forming stress adjustable insulator film semiconductor device and its fabrication method
SG74007A1
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2000-07-18
Apparatus and method for dicing semiconductor wafers
JPS5514839A
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1980-02-01
Treating method for ion nitriding
TW329542B
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1998-04-11
Silicon wafer heat treatment method and fast heat treatment apparatus
EP1027918A4
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2003-04-02
PROCESS AND APPARATUS FOR TREATING EXHAUST GAS FROM THE MANUFACTURE OF SEMICONDUCTORS
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1991-11-13
Method and apparatus for handling semiconductor wafers
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2013-03-20
Method for vanishing defects in single crystal silicon and single crystal silicon
EP0828286A3
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2001-05-09
Method of manufacturing mirror-polished silicon wafers, and apparatus for processing silicon wafers
JPS51140870A
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1976-12-04
An exhaust gas treatment process
GB0016554D0
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2000-08-23
Gas supplying apparatus and gas substitution method
TW369685B
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1999-09-11
Semiconductor device and process thereof
JPS51115212A
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1976-10-09
Apparatus for heat treatment with non-oxidizing atmosphere
JPS5286268A
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1977-07-18
Method of preventing diffusion of solvent in organic solvent cleaner
JPS5721825A
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1982-02-04
Increasing method for gettering effect due to internal defect in semiconductor substrate
JPS55145090A
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1980-11-12
Ocean jointing method of floating housing
JPS52139373A
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1977-11-21
Treating method for compound semiconductor
JPS5223565A
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1977-02-22
Atmosphere gas purification apparatus