TW328639B - The tapered polysilicon plug and its manufacturing method - Google Patents

The tapered polysilicon plug and its manufacturing method

Info

Publication number
TW328639B
TW328639B TW085114790A TW85114790A TW328639B TW 328639 B TW328639 B TW 328639B TW 085114790 A TW085114790 A TW 085114790A TW 85114790 A TW85114790 A TW 85114790A TW 328639 B TW328639 B TW 328639B
Authority
TW
Taiwan
Prior art keywords
polysilicon
dielectric
etch
side spacer
manufacturing
Prior art date
Application number
TW085114790A
Other languages
Chinese (zh)
Inventor
Gwo-Jang Wu
Original Assignee
Vanguard Int Semiconduct Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vanguard Int Semiconduct Corp filed Critical Vanguard Int Semiconduct Corp
Priority to TW085114790A priority Critical patent/TW328639B/en
Application granted granted Critical
Publication of TW328639B publication Critical patent/TW328639B/en

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

A method for forming tapered contact window includeds the following steps: (a) Provide semiconductor substrate, which has already formed dielectric and 1st polysilicon on its surface; And the 1st polysilicon is on top of dielectric; (b) Etch a contact window inside the 1st polysilicon till exposing the dielectric to form 1st polysilicon side spacer; (c) Use 1st polysilicon side spacer as mask to etch dielectric till a depth, and not exposing substrate; (d) Deposit 2nd polysilicon on contact window; (e) Etch 2nd polysilicon till exposing dielectric to form 2nd polysilicon side spacer; (f) Use 2nd polysilicon side spacer as mask to etch dielectric to expose substrate.
TW085114790A 1996-11-29 1996-11-29 The tapered polysilicon plug and its manufacturing method TW328639B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW085114790A TW328639B (en) 1996-11-29 1996-11-29 The tapered polysilicon plug and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW085114790A TW328639B (en) 1996-11-29 1996-11-29 The tapered polysilicon plug and its manufacturing method

Publications (1)

Publication Number Publication Date
TW328639B true TW328639B (en) 1998-03-21

Family

ID=58262453

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085114790A TW328639B (en) 1996-11-29 1996-11-29 The tapered polysilicon plug and its manufacturing method

Country Status (1)

Country Link
TW (1) TW328639B (en)

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees