TW328639B - The tapered polysilicon plug and its manufacturing method - Google Patents
The tapered polysilicon plug and its manufacturing methodInfo
- Publication number
- TW328639B TW328639B TW085114790A TW85114790A TW328639B TW 328639 B TW328639 B TW 328639B TW 085114790 A TW085114790 A TW 085114790A TW 85114790 A TW85114790 A TW 85114790A TW 328639 B TW328639 B TW 328639B
- Authority
- TW
- Taiwan
- Prior art keywords
- polysilicon
- dielectric
- etch
- side spacer
- manufacturing
- Prior art date
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
A method for forming tapered contact window includeds the following steps: (a) Provide semiconductor substrate, which has already formed dielectric and 1st polysilicon on its surface; And the 1st polysilicon is on top of dielectric; (b) Etch a contact window inside the 1st polysilicon till exposing the dielectric to form 1st polysilicon side spacer; (c) Use 1st polysilicon side spacer as mask to etch dielectric till a depth, and not exposing substrate; (d) Deposit 2nd polysilicon on contact window; (e) Etch 2nd polysilicon till exposing dielectric to form 2nd polysilicon side spacer; (f) Use 2nd polysilicon side spacer as mask to etch dielectric to expose substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW085114790A TW328639B (en) | 1996-11-29 | 1996-11-29 | The tapered polysilicon plug and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW085114790A TW328639B (en) | 1996-11-29 | 1996-11-29 | The tapered polysilicon plug and its manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
TW328639B true TW328639B (en) | 1998-03-21 |
Family
ID=58262453
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085114790A TW328639B (en) | 1996-11-29 | 1996-11-29 | The tapered polysilicon plug and its manufacturing method |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW328639B (en) |
-
1996
- 1996-11-29 TW TW085114790A patent/TW328639B/en not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |