TW305926B

TW305926B -

Info

Publication number: TW305926B
Application number: TW85103475A
Authority: TW
Original assignee: Shinkawa Kk
Priority date: 1995-09-13
Filing date: 1996-03-22
Publication date: 1997-05-21
Also published as: JPH0979815A

Description

3〇5926 at B7 五、發明説明（ί ) <發明之詳係說明> <發明所靥之技術範疇> 本發明係有關一種引線框架或帶承載器等之工件之位置檢測装置者。 <習知之技術> 例如，在接合裝置上•必須將引線框架或帶承載器等工件之接合部定位於接合位置。而以往·工件之定位，公知有利用攝影機之圖形檢知方法、及在工件周邊所設之定位孔内*插入定位梢等之方法。 <發明欲解決之課題> 利用攝影櫬之圖形檢知方法，因使用攝影櫬，且須使用複雜之晝像處理裝置，其設備費較高。又*因使用圖形 I 裝訂 (請先閲讀背面之注意事項再填寫本頁) ，具須時間必形梢則圈位’ 之定時同與更相孔變有位徑如定孔，因之又，孔。法位慢入定較插，度梢又速位。知定低檢而較故。度 , 慮精式之故方判，之誤隙照有間對則有經濟部中央橾準局員工消費合作杜印製精高。及時速費高甚、〇亦格者入赝置插低装之M測梢可檢位種置定 I 位 , 供之又提件〇於工件在之元的il 之目檢等之置梢明位位發行定本實換，交度為段手 - 第之明發本 > , 段的手目之述題上課成決達解為 < 之件 Η 種位雷孔定與位規置定正配過之側通孔方之位另源定其光之在射件並雷工，使在源， : 光件於射元在雷光徵置受特配體其，導 , 側半置方之裝一對測之相檢置源置位光位之射本紙張尺度逍用中國國家搮準（CNS ) A4规格（210X297公釐） A7 B7 經濟部中央標隼局員工消费合作社印製五、發明説明 (二 ) 1 1 1 之光 > VX »,ϋ. 刖述半専體受光元件加 Η 接收 » 並將半導體受光 1 1 I 元件所產生之四個光電流 Μ 演算回路施 Μ 演算處理而算 V 1 I 出定位孔之偏移量〇請 1 1 閱 | 為達成上逑 0 的 9 本發明之第二手段為上述第一手讀背 | 面 I 段中之半専體受光元件 t 係為二次元位置檢知元件或分成之 Oi 1 I 意 1 | 四部份之光電二極體 0 事 1 項 1 為達成上述巨的本發明之第三手段為一種工件之再填位置檢測装置 > 其特徵在於在工件之定位孔之正規定位寫本頁裝 1 之位置之 — 方側配置四個投光器並在其另方側配置與 1 1 前述投光器相對之光纖感愿器使前述光源之通過定位孔 1 I 之光以前述四個光纖感應器加 Μ 接收而將光纖感懕器 1 訂所產生之電流以演算回路施以演算處理而算出定位孔之 1 偏移量 0 1 1 < 發明之實施形態 > 1 1 以第圖至第四圖說明本發明之實施形態 0 在工件 1 乂之定位孔 2 之正規定位之位置之 — 方側配置雷射光源 3 1 作為光源而在另方側配置與前述雷射光源 3 相對之半導 1 1 體受光元件 0 作為半導體受光元件如弟一圖及第二圖所 1 1 示可使用二次元位置檢知元件 4 1 而如第三圖所示負亦 1 I 可使用分成四部份之光電二極體 2 0 〇又如第四所示 » 1 1 I 在一方設置四個投光器 3 1 A 至 3 1 D 而在他方側配置 1 1 與前述投光器 3 1 A 至 3 1 D 相對之光纖感應器 3 〇 A 至 1 1 3 〇 D 0 又將前述光源之通 4 - 過刖述定位孔 2 之光 * Μ 前 1 1 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） ^05926 B7 五、發明説明（3 ) 述二次元位置檢知元件4或2 ◦或光纖感應器3 0A至3 0 D加Μ受光，Μ演算回路1 2或2 5將半導體受光元件 4或分割成四部份之光電二極體2 ◦或光纖感應器3 0 A 至3 0 D之光電流，加以演算處理，而算出定位孔2之偏移量。 <實施洌> Μ下，K第一圖至第二圖說明本發明之第一實施例。如第一圖所示，在將引線框架或帶承載器等工件1之定位孔2正規定位之位置之上方，配置有雷射光源3 ，在定位孔2之下方，配置有二次元位置檢知元件4之中心部5。二次元位置檢知元件4係在平板狀之矽層表面具有Ρ層、裡面具有Ν層及中間之I層所構成者。在此，工件1被圖未示之移送手段輸送至既定之定位位置，使定位孔2位於雷射光源3之正下方。之後，雷射光源3射出雷射光6 ，該光通過定位孔2 ，而成為定位孔 2大小之點光7 ，射入二次元位置檢知元件4。當二次元位置檢知元件4中有點光7入射時，入射位置上將產生與光能量成比例之電荷。此產生之電荷成為光電流通過表面之Ρ層，而自ΧΥ方向之電極8x1 '8x2 、8yl、 8y2 輸出電流 Ixl 、1x2 、I y 1 、I y 2 。此場合，電流I X 1 、I X 2 、I y 1 、I y 2被與點光7之自入射位置中心至電極8x1 '8x2 、8yl、8y2 之距離作反比例而分割取出。 -5- 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐）幕裝訂 (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（年）現在，如第二圖所示，將二次元位置檢知元件4所產生之光電流當作I 〇，將電極8x1及8x2之距離當作 Lx，將電極8yl 、8y2之距離當作Ly，當二次元位置檢知元件4之中心部5之偏移Xo、Yo之位置上，點光7之中心9入射時，電流I X 1 、1x2 、I y 1 、 I y 2則如數1所示。又，電流I X 1 、1x2 、I y 1、 I y 2 之比則如數2所示。又，定位孔2之自數2起之偏移量X ο 、Y 〇則如數3所示。【數1】3〇5926 at B7 5. Description of the invention (ί) < Detailed description of the invention > < Technical scope of the invention > The present invention relates to a position detection device for a lead frame or a workpiece with a carrier, etc. . < Known technology > For example, in the bonding apparatus, the bonding portion of the workpiece such as a lead frame or tape carrier must be positioned at the bonding position. In the past, the positioning of the workpiece has been known by a method of pattern detection using a camera, and a method of inserting a positioning pin into a positioning hole provided around the workpiece. < Problems to be solved by the invention > The use of the pattern detection method of the photographic image, because of the use of the photographic image and the use of a complicated day image processing device, requires high equipment costs. And * because of the use of graphic I binding (please read the precautions on the back before filling in this page), if the time is necessary, the tip will be circled. The timing of the hole is the same as that of the more phase hole. hole. The normal position is slower and more inserted, and the tip is fast. Knowing that the low inspection is more complicated. Judgment of the degree of precision, the misconception of the fine style, the misunderstandings are the same, but the right is the Central Ministry of Economic Affairs of the Ministry of Economic Affairs, consumer cooperation, cooperation, printing and manufacturing high. If the speed is very high and the cost is high, 〇 If you are in the same position, the M-measuring tip can be set to the I position, and it is provided for the delivery. 〇 The visual inspection of the il of the workpiece is clear. The actual version of the bit issuance is changed, and the degree of intersection is Duan Shou-The first version of the Ming >, the topic of Duan Shou Mu is resolved in the class and the solution is < The position of the side hole through the side is another source to set its light on the part and mine, so that the source: the light part in the light element is placed in the thunder light by the special ligand, the guide, the side half is installed A pair of phase-checked phase-checked source and set the light position of the paper. The paper size is easily used by the Chinese National Standard (CNS) A4 specification (210X297 mm) A7 B7 Printed by the Employee Consumer Cooperative of the Central Standard Falconry Bureau of the Ministry of Economic Affairs. (2) Light of 1 1 1> VX », ϋ. Describe the semi-receptive light-receiving element plus H-receiving» and calculate the four photocurrents generated by the semiconductor light-receiving 1 1 I element V 1 I deviation from positioning hole量〇请 1 1 read | In order to achieve the above 0 9 the second means of the present invention is the above-mentioned first-hand readback | The half-body light-receiving element t in plane I is a second-element position detection element or divided into Oi 1 I Italian 1 | Four-part photodiode 0 Event 1 Item 1 The third means of achieving the above-mentioned giant invention is a workpiece refilling position detection device > characterized by positioning holes in the workpiece Write the position of the page 1 in the regular positioning — four light projectors are arranged on the side and the optical fiber sensor opposite to the 1 1 light projector is arranged on the other side so that the light of the light source passing through the positioning hole 1 I Fiber optic sensor plus M receiving to generate electricity from fiber optic sensor 1 Calculate the 1 offset of the positioning hole by performing the calculation process in the calculation circuit 0 1 1 < Embodiment of the invention > 1 1 The embodiment of the present invention will be described with reference to FIGS. 4 to 0. The position of the regular positioning of 2-the laser light source 3 is arranged on one side as the light source and the semiconductor 1 opposite to the laser light source 3 is arranged on the other side 1 1 body light-receiving element 0 as a semiconductor light-receiving element Figure 1 1 1 shows that the second element position detection element 4 1 can be used and as shown in the third figure negative 1 I can use a photodiode divided into four parts 2 0 〇 and as shown in the fourth »1 1 I Install four light projectors 3 1 A to 3 1 D on one side and 1 1 on the other side with fiber optic sensors 3 〇A to 1 1 3 〇D opposite to the aforementioned light projectors 3 1 A to 3 1 D Describing the light source 4-Describing the light from the positioning hole 2 * Μ Front 1 1 1 1 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297mm) ^ 05926 B7 5. Description of the invention (3) Secondary element position detection element 4 or 2 ◦or fiber sensor 3 0A to 3 0 D plus M light receiving, M calculation circuit 1 2 or 2 5 will divide the semiconductor light receiving element 4 or the photodiode 2 into four parts ◦ Or the optical current of the optical fiber sensor 3 0 A to 30 D is calculated and processed, and the offset of the positioning hole 2 is calculated. < Implementation > Under M, the first to second drawings of K illustrate the first embodiment of the present invention. As shown in the first figure, a laser light source 3 is arranged above the position where the positioning holes 2 of the workpiece 1 such as a lead frame or a carrier are normally positioned, and a secondary element position detection is arranged below the positioning holes 2 The central part 5 of the element 4. The second-element position detecting element 4 is formed by having a P layer on the surface of a flat silicon layer, an N layer inside, and an I layer in the middle. Here, the workpiece 1 is transported to a predetermined positioning position by a transfer means not shown, so that the positioning hole 2 is located directly below the laser light source 3. After that, the laser light source 3 emits laser light 6 which passes through the positioning hole 2 to become spot light 7 of the size of the positioning hole 2 and enters the second element position detection element 4. When a little light 7 enters the second-element position detecting element 4, a charge proportional to the light energy will be generated at the incident position. The generated charge becomes the P layer on the surface through which the photocurrent passes, and the currents Ixl, 1x2, I y 1 and I y 2 are output from the electrodes 8x1'8x2, 8yl and 8y2 in the X direction. In this case, the currents I X 1, I X 2, I y 1 and I y 2 are divided and taken out in inverse proportion to the distance from the center of the incident light 7 to the electrodes 8x1 '8x2, 8yl and 8y2 of the spot light 7. -5- This paper scale is applicable to the Chinese National Standard (CNS) Α4 specification (210X 297mm) Screen binding (please read the notes on the back before filling this page) The Central Standards Bureau of the Ministry of Economic Affairs Prints the Central Standards of the Ministry of Economy A7 B7 printed by the Bureau ’s Consumer Cooperative. V. Description of the invention (year) Now, as shown in the second figure, the photocurrent generated by the second element position detection element 4 is regarded as I 〇, and the distance between the electrodes 8x1 and 8x2 is considered As Lx, the distance between the electrodes 8yl and 8y2 is regarded as Ly. When the position of the central element 5 of the secondary element detection device 4 is shifted by Xo and Yo, and the center 9 of the spot light 7 enters, the current IX 1 and 1x2 , I y 1 and I y 2 are shown as number 1. In addition, the ratios of the currents I X 1, 1x2, I y 1, and I y 2 are as shown in number 2. Moreover, the deviation amounts X ο and Y 〇 of the positioning hole 2 from the number 2 are shown as the number 3. 【Number 1】

Ixl =(1/2) · ( 1 + 2 X o / L X ) · I 〇 1x2= (1/2) · ( 1 - 2 X o / L X ) · I 〇 I y 1 = ( 1 / 2 ) · ( 1 + 2 Y o / L y ) - Ιο I y 2 = ( 1 / 2 ) · ( 1 - 2 Y o / L y ) · I o 【數2】Ixl = (1/2) · (1 + 2 X o / LX) · I 〇1x2 = (1/2) · (1-2 X o / LX) · I 〇I y 1 = (1/2) · (1 + 2 Y o / L y)-Ιο I y 2 = (1/2) · (1-2 Y o / L y) · I o 【Number 2】

Ixl- /1x2= ( L x + 2 X o ) / ( L x — 2 X o ) I y 1 / I y 2 = (Ly + 2Yo)/ (Ly — 2Yo) 【數3】 X o = ( 1 / 2 ) · (Ixl+Ix2)/(Ixl-Ix2 )-LxIxl- / 1x2 = (L x + 2 X o) / (L x — 2 X o) I y 1 / I y 2 = (Ly + 2Yo) / (Ly — 2Yo) 【Number 3】 X o = (1 / 2) · (Ixl + Ix2) / (Ixl-Ix2) -Lx

Yo = (. 1/2) . ( I y 1 + I y 2) / ( I y 1 — I y 2 )· L y 電流I x 1 、I x 2 、I y 1 、I y 2分別被放大器 10x1 、10x2、l〇yl 、l〇y2 所放大，並分本紙張尺度適用中國國家揉準（CNS ) A4規格（210 X 297公釐） ---------I 裝-- (請先閱讀背面之注意事項再填寫本頁) 、\=° 經濟部中央標準局員工消費合作社印製 3u59^g A7 B7 五、發明説明（夕）別被信號處理回路1 1 X 1 、1 1 X 2、1 1 y 1 、1 1 y2變換成電壓。之後，自信號處理回路1 lxl 、1 1 x2、llyl、lly2 輸出與電流 Ixl 、Ix2、 I y 1 、Iy2 成比例之電壓 Vxl 、Vx2、Vyl 、Yo = (. 1/2). (I y 1 + I y 2) / (I y 1 — I y 2) · L y currents I x 1, I x 2, I y 1 and I y 2 are respectively amplified by the amplifier 10x1, 10x2, l〇yl, l〇y2 are enlarged, and the paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) --------- I installed-( Please read the precautions on the back before filling out this page), \ = ° Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 3u59 ^ g A7 B7 5. Description of the invention (Xi) Do n’t be signal processing circuit 1 1 X 1, 1 1 X 2, 1 1 y 1 and 1 1 y2 are converted into voltage. After that, the voltages Vxl, Vx2, Vyl, Vxl, Vx2, Vyl, Vxl, Ix2, Iy1, Iy2 proportional to the current Ixl, Ix2, Iy1, Iy2 are output from the signal processing circuit 1 lxl, 1 1x2, llyl, lly2

Vy2，此電壓 Vxl 、Vx2 、Vyl 、Vy2 被輸入演算回路1 2。演算回路1 2演算電壓Vx 1與Vx2之差或比|及電壓Vy 1與Vy2之差或比。並將之KA/ D變換器1 3變換，而輸出定位孔2之位置偏移X 〇、Y 〇，並輸入控制回路1 4。控制回路1 4將位置偏移Xo 、Y〇當作接合時之補正量，而驅動接合裝置之XY工作檯|或使工件1移動，使定位孔2位於二次元位置檢知元件4之中心部5。第三圖所示為本發明之第二實施例。本實施例，係以具有四個元件20.Α、20Β、20C、20D之四分割光電二極體2 ◦代替前述實施例之二次元位置檢知元件4 。本實施例之場合，元件2〇Α、20Β、20C 、20 D之電極2 1 A、2 1 Β 、2 1 C、2 1 D之輸出電流I a 、I b 、I c 、I d與點光7之照射光量（元件20A 、20B、20C 、20D上所被點光6照射到之面積）成比例。亦即，電流I a與元件2〇A之面積2 2 A、電流I b與元件20B之面積22B、電流I c與元件20 C之面積22C、電流I d與元件20D之面積22D成比例。此電流I a 、I b 、I c 、I d被放大器2 3 A、 -7 - 本紙張尺度適用中國國家揉準（CNS ) A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 裝'Vy2, this voltage Vxl, Vx2, Vyl, Vy2 is input into the calculation circuit 1 2. The calculation circuit 12 calculates the difference or ratio of the voltages Vx 1 and Vx2 | and the difference or ratio of the voltages Vy 1 and Vy2. The KA / D converter 13 is converted, and the position of the output positioning hole 2 is shifted by X 〇, Y 〇, and the control circuit 14 is input. The control circuit 14 takes the positional deviations Xo and Y〇 as the correction amount during joining, and drives the XY table of the joining device | or moves the workpiece 1 so that the positioning hole 2 is located at the center of the second element position detection element 4 5. The third figure shows a second embodiment of the invention. In this embodiment, the four-division photodiode 2 having four elements 20.A, 20B, 20C, and 20D is used instead of the second-element position detection element 4 of the foregoing embodiment. In the case of this embodiment, the output currents I a, I b, I c, I d and points of the electrodes 2 1 A, 2 1 B, 2 1 C, 2 1 D of the electrodes 2〇Α, 20B, 20C, 20 D The amount of light irradiated by the light 7 (the area irradiated by the spot light 6 on the elements 20A, 20B, 20C, and 20D) is proportional. That is, the current I a is proportional to the area 2 2A of the element 20A, the current I b is proportional to the area 22B of the element 20B, the current I c is proportional to the area 22C of the element 20 C, and the current I d is proportional to the area 22D of the element 20D. This current I a, I b, I c, I d is amplified by the amplifier 2 3 A, -7-This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the notes on the back first (Fill in this page again)

、1T A7 B7 五、發明説明u ) 經濟部中央標準局員工消費合作社印製 2 3 B 、 2 3 C 2 3 D 所放大並被信號處理回路 2 4 A Λ 2 4 B 、 2 4 C 、 2 4 D 變換成電壓〇之後 > 白信號處理回路 2 4 A N 2 4 B 2 4 C 2 4 D 輸出與放大電流 I a I b I C N I d 成比例之電壓 V a V b 、 V C V d 〇此電壓 V a 、 V b 、 V C V d 被演算回路 2 5 所處理〇演算回路 2 5 中 » 為算出對應 X Y 方向之偏移量 X 〇、 Υ 〇之電壓 f 係以加算回路 2 6 X 1 2 6 X 2 2 6 y 1 、 2 6 y 2 作加算其後 f 以減算回路 2 7 X 2 7 y 作減算 0 加算回路 2 6 X 1 將電壓 V a 及 V b 相加而算出電壓 V X 1 t 加算回路 2 6 X 2 將電壓 V C 及 V d 相加而算出電壓 V X 2 » 加算回路 2 6 y 1 則將電壓 V b 及 V d 相加算出電壓 V y 1 * 加算回路 2 6 y 2 則將電壓 V a 及 V C 相加算出電壓 V y 2 〇將之以數式表示時則如數 4 所示 0 其次 9 減算回路 2 7 X 將電壓 V y 1 及 V y 2 作減算 t K 算出 X 方向之電壓差 V X 1 而減算回路 2 7 y 則將電壓 V y 1 及 V y 2 作減算而算出 Y 方向之電壓差 V y 0 此等 K 數式表示時則如數 5 所示〇 [ 數 4 ] V X 1 = V a + V b V X 2 = V C + V d V y 1 = V b + V d V y 2 = V a + V c --------卜裝-- (請先閱讀背面之注意事項再填寫本頁), 1T A7 B7 5. Description of invention u) Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 2 3 B, 2 3 C 2 3 D Amplified by the signal processing circuit 2 4 A Λ 2 4 B, 2 4 C, 2 4 After the D is converted into a voltage 〇> White signal processing circuit 2 4 AN 2 4 B 2 4 C 2 4 D outputs a voltage proportional to the amplified current I a I b ICNI d V a V b, VCV d 〇 This voltage V a, V b and VCV d are processed by the calculation circuit 2 5. In the calculation circuit 2 5 »To calculate the offsets X 〇, Υ 〇 corresponding to the XY direction voltage f is the addition circuit 2 6 X 1 2 6 X 2 2 6 y 1 and 2 6 y 2 are added and then f is subtracted from the circuit 2 7 X 2 7 y is subtracted from 0 0 addition circuit 2 6 X 1 The voltages V a and V b are added to calculate the voltage VX 1 t addition circuit 2 6 X 2 Add voltage VC and V d to calculate voltage VX 2 »Add circuit 2 6 y 1 Add voltage V b and V d to calculate voltage V y 1 * Add circuit 2 6 y 2 adds the voltages Va and VC to calculate the voltage V y 2 〇 When expressed as a number, it is shown as the number 4 0 Second 9 Subtraction circuit 2 7 X Subtracts the voltages V y 1 and V y 2 t K calculates the voltage difference VX 1 in the X direction and the subtraction circuit 2 7 y subtracts the voltages V y 1 and V y 2 to calculate the voltage difference V y 0 in the Y direction. When these K expressions are expressed, the number 5 is shown. [Number 4] VX 1 = V a + V b VX 2 = VC + V d V y 1 = V b + V d V y 2 = V a + V c -------- Bu equipment-( (Please read the notes on the back before filling this page)

、1T 本紙張尺度適用中國國家標準（CNS ) Α4規格（210 X 297公釐）經濟部中央標隼局員工消費合作社印製 A7 B7 五、發明説明（”）【數5】 V X V X 1 一 V X 2 V y = V y 1 — V y 2 此演算回路 2 5 所演算之電壓 V X 及 V y « 被 A / D 變換器 2 8 所變換 ) 而輸出定位孔 2 之位置偏移 9 並輸入控制回路 2 9 〇控制回路 2 9 將位置偏移 X 〇 ·、 Y 〇當作接合時之補正量 ♦ 而驅動接合装置之 X Y 工作 m 9 或使工件 1 移動使定位孔 2 位於二次元位置檢知元件 4 之中心部 0 第四圖所示者為本發明之第三實施例 0 本簧施例係使四個光纖感應器 3 0 A 、 3 0 B 3 〇 r 3 0 D 取代前述第二實施例之四分割光電二極體 2 0 之四個元件 2 0 A 2 0 B 2 〇 C 、 2 0 D f 而作為光源 * 則使用與前述光纖感應器 3 〇 Λ [Λ > 3 0 Β 、 3 0 C 3 0 D 相對之點光照射之四個投光器 3 1 A 3 1 B 3 1 C 3 1 D 0 因此 > 本實施例之場合，投光器 3 1 A 、 3 1 B 3 1 C 、 3 1 D 所昭射之通過疋位孔 2 之光 1 被光繼感應器 3 〇 A 3 0 B 、 3 0 C 3 0 D 所受光，而其受光量 * 光纖感應器 3 0 A 為斜線所示之面積 3 2 A > 光纖感 rtfTf 懕器 3 0 B 為斜線所示之面積 3 2 B 、而因光纖 itli% 應器 3 0 C 不受光故面積為〇 » 而光纖感 J5M Λα» 器 3 〇 D 則為斜線所示之面積 3 2 D 〇在此 9 本實施例之場合 > 亦與光纖感 aPg 愿器 3 〇 A 、 3 0 B 3 〇 C 、 3 〇 D 所受光之受光量成比例 * 而與 —---------裝-- (請先閱讀背面之注意事項再填寫本頁) -5 Μ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）經濟部中央標隼局員工消費合作社印製 A7 B7五、發明説明（》）前述第二實施例相同，輸出電流I a 、I b 、I c 、I d ，故可用前述第二實施例之回路加Μ處理而求出偏移量X ο ' Υ 〇 ° 又，第一圖至第三圖中，係將雷射光源3配置於上方，而將半専體受光元件之二次元位置檢知元件4或四分割光電二極體2 0配置於下方，但亦可作相反之配置。又，雖使用雷射光源3作為光源，但亦可使用一般光源。又，第四圖之場合，亦可將光纖感應器30Α、30Β、30 C、30D 與投光器 31Α、31Β、31C、31D 相反配置。又，本實施例中，雖配設四個投光器3 1 A、3 IB、31C、31D較佳，但其數目並無限定。如此，將光之入射位置或光量變換成電流，而處理此電流而檢知工件1之位置偏移，故不似習知之利用攝影機之圖形檢知方法，須要攝影機，且不須記憶圖形或實行圖形對照•故可低成本地高速檢知。又，因不須要習知之定位梢插入法所須之定位梢，故調整簡單且可高速及高精度檢知。 <發明之效果> 依本發明，因係：一種工件之位置檢測装置，其特徵在於：在工件之定位孔之正規定位之位置之一方側，配置雷射光源，並在其另方側配置與雷射光源相對之半導體受光元件，使雷射光源之通過定位孔之光，以前述半導體受光元件加以接收，並將半導體受光元件所產生之四個光電 -1 0 - (請先閲讀背面之注意事項再填寫本頁) 裝. 、-°、 1T The size of this paper is in accordance with Chinese National Standard (CNS) A4 specification (210 X 297 mm) A7 B7 printed by the Employee Consumer Cooperative of the Central Standard Falcon Bureau of the Ministry of Economic Affairs 5. Description of the invention (") [Number 5] VXVX 1 1 VX 2 V y = V y 1 — V y 2 The voltage VX and V y «calculated by this calculation circuit 2 5 are transformed by the A / D converter 2 8) and the position offset 9 of the positioning hole 2 is output and input to the control circuit 2 9 〇Control circuit 2 9 Use position deviation X 〇 ·, Y 〇 as the amount of correction during joining ◆ Drive the XY work m 9 of the joining device or move the workpiece 1 so that the positioning hole 2 is located in the second element position detection element 4 The central part 0. The fourth figure shows the third embodiment of the present invention. The present spring embodiment replaces the four second optical fiber sensors 3 0 A, 3 0 B 3 〇r 3 0 D with the aforementioned second embodiment. Four elements of the quadrant photodiode 2 0 2 0 A 2 0 B 2 〇C, 2 0 D f as the light source * uses the four light projectors 3 1 A 3 1 B irradiated with spot light opposite to the aforementioned fiber sensor 3 〇Λ [Λ> 3 0 Β, 3 0 C 3 0 D 3 1 C 3 1 D 0 Therefore> In the case of this embodiment, the light 1 projected by the light projectors 3 1 A, 3 1 B 3 1 C, 3 1 D through the hole 2 is received by the photoreceptor 3 〇 A 3 0 B, 3 0 C 3 0 D received light, and the amount of light received * Fiber sensor 3 0 A is the area shown by the slash 3 2 A > Fiber-optic sensor rtfTf sensor 3 0 B is the area shown by the slash 3 2 B, because the fiber itli% reactor 3 0 C is not subject to light, so the area is 〇 »and the fiber-optic sensor J5M Λα» the device 3 〇D is the area shown by the slash 3 2 D 〇 9 here in this embodiment > It is also proportional to the amount of light received by the fiber-optic aPg wishing device 3 〇A, 3 0 B 3 〇C, 3 〇D * and —--------- installed— (please read first (Notes on the back and then fill in this page) -5 Μ paper ruler Applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) A7 B7 printed by the Employee Consumer Cooperative of the Central Standard Falcon Bureau of the Ministry of Economic Affairs V. Invention description (》) The second embodiment described above is the same, and the output currents I a, I b, I c and I d, the offset X can be obtained by adding M to the loop of the second embodiment described above. In the first to third figures, the laser light source 3 is arranged above, The second-element position detection element 4 of the half-body light-receiving element or the quadrant photodiode 20 are arranged below, but the opposite arrangement may also be used. In addition, although the laser light source 3 is used as the light source, a general light source can also be used. In the case of the fourth figure, the optical fiber sensors 30A, 30B, 30C, 30D and the light projectors 31A, 31B, 31C, 31D may be reversely arranged. In this embodiment, although four light projectors 3 1 A, 3 IB, 31C, and 31D are preferably provided, the number is not limited. In this way, the incident position or the amount of light is converted into a current, and the current is processed to detect the position deviation of the workpiece 1, so it is not like the conventional pattern detection method using a camera, which requires a camera, and does not need to memorize graphics or implement Graphic comparison • It can be detected at high speed at low cost. In addition, since the positioning pin necessary for the conventional positioning pin insertion method is not required, adjustment is simple and high-speed and high-precision detection is possible. < Effect of the invention > According to the present invention, it is: a workpiece position detection device, characterized in that a laser light source is arranged on one side of the position where the positioning hole of the workpiece is normally positioned, and on the other side Configure the semiconductor light-receiving element opposite to the laser light source, so that the light of the laser light source passing through the positioning hole is received by the aforementioned semiconductor light-receiving element, and the four photoelectric elements produced by the semiconductor light-receiving element -10 0-(please read the note on the back first Please fill in this page again.)

L 本紙張尺度適用中國國家櫺準（CNS ) A4规格（210X297公釐）五、發明説明（/) 流Μ演算回路施Μ演算處理可低成本地高速且高精度地定位孔之正規定位之位置之在其另方側配置與前述投光光源之通過定位孔之光，Κ ，而將光缴感應器所產生之，而算出定位孔之偏移量， <圖示之簡單說明> 第一圖為本發明之工件之位塊圖。第二圖為二次元位置檢知元第三圖為本發明之工件之位塊圖。第四圖為本發明之工件之位 a )為上視圖，（b )為部 <符號之說明> ，而蓴出定位孔之偏移量，故檢測位置。又，亦可在工件之一方側|配置四個投光器，並器相對之光纖感應器，使前述前述四個光纖感應器加以接收電流以演算回路施以演算處理而可獲得相同之效果。置檢測裝置之第一實施例之方 ί牛之上視圖。置檢測装置之第二實施例之方置檢測装置之第三實施例，（份斷面正視圖。 (請先閲讀背面之注意事項再填寫本頁) 1 工件 2 疋位孔 3 雷射光源 4 二次元位置撿知兀 7 點光 11x1、 1 1 .X 2 Λ 1 1 y 1 1 2 演算回路件 1 1 y 2 信號處理回路本紙張尺度適用中國國家揉準（CNS ) A4規格（210X297公釐）經濟部中央標準局員工消费合作社印裝 A7 B7 五、發明説明（f。） 1 4 控制回路 2 0 四分割光電二極體 2 0 A、 2 〇 B 、 2 0 C \ 2 0 D 元件 2 4 A、 2 4 B 、 2 4 C 、 2 4 D 信號處理回路 2 5 演算回路 3 〇 A、 3 0 B 3 〇 C 3 0 D 光纖感 m Ac*、器 3 1 A 、 3 1 B 、 3 1 C 3 1 D 投光器 -12- I - I I I— I - 一 I 丁 _ _____L , U3. τα 矣 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家揉準（CNS ) Α4規格（210X297公釐）L This paper scale is applicable to China National Standard (CNS) A4 specification (210X297mm). V. Description of the invention (/) Stream M calculation circuit and M calculation processing can locate the regular position of the hole at high speed and high accuracy at low cost On the other side, the light passing through the positioning hole and the light from the aforementioned light source through the positioning hole, K, are generated by the light sensor, and the offset of the positioning hole is calculated. &Lt; Simple description of the icon > It is a block diagram of the workpiece of the present invention. The second picture is the second element position detection element. The third picture is the block diagram of the workpiece of the present invention. The fourth figure is the position of the workpiece of the present invention a) is the top view, (b) is the part < symbol explanation >, and the offset of the positioning hole is captured, so the position is detected. In addition, it is also possible to arrange four light emitters on one side of the workpiece, and optical fiber inductors that are opposite to each other, so that the aforementioned four optical fiber inductors receive current to apply arithmetic processing to the arithmetic loop to obtain the same effect. The top view of the first embodiment of the detection device. The second embodiment of the detection device is the third embodiment of the detection device, (a cross-sectional front view. (Please read the precautions on the back before filling this page) 1 Workpiece 2 Slot hole 3 Laser light source 4 Two-dimensional position picking-up knowledge point 7 point light 11x1, 1 1. .X 2 Λ 1 1 y 1 1 2 calculation circuit 1 1 y 2 signal processing circuit This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm ) A7 B7 printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs V. Description of the invention (f.) 1 4 Control circuit 2 0 Four-division photodiode 2 0 A, 2 〇B, 2 0 C \ 2 0 D Element 2 4 A, 2 4 B, 2 4 C, 2 4 D Signal processing circuit 2 5 Calculation circuit 3 〇A, 3 0 B 3 〇C 3 0 D Fiber sensing m Ac *, device 3 1 A, 3 1 B, 3 1 C 3 1 D Emitter -12- I-III-I-1 I Ding _ _____L, U3. Τα (Please read the precautions on the back before filling in this page) This paper size is applicable to China National Standard (CNS) Α4 Specifications (210X297 )

Claims

s〇 ^ 926 A8 B8 C8 D8 6. Patent application scope 1 · A workpiece position detection device, which is characterized in that a laser light source is arranged on one side of the normal positioning position of the positioning hole of the workpiece, and on the other side The semiconductor light receiving element opposite to the laser light source is arranged on the side, so that the light of the laser light 0 source passing through the positioning hole is received by the previous semiconductor light receiving element plus M, and the four photocurrents generated by the semiconductor light receiving element are subjected to calculation processing by the calculation loop , And calculate the offset of the positioning hole. 2 _ The position detection device of the workpiece according to item 1 of the patent application, in which the semiconductor light receiving element is a secondary element position detecting element or a photodiode divided into four parts. 3. A kind of position detection device for workpieces, characterized in that four projectors are arranged on one side of the regular positioning position of the positioning hole of the workpiece, and an optical fiber sensor opposite to the projectors is arranged on the other side. The light passing through the positioning hole of the light source is received by the four optical fiber sensors plus M, and the current generated by the optical fiber sensor is subjected to an arithmetic processing in an arithmetic circuit to calculate the offset of the positioning hole. — ^ 1 m ^^^ 1 κ ji15- ^. 1 'ml VJ, vd (please read the precautions on the back before filling in this page) The paper standards printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs are applicable to Chinese national standards ( CNS) A4 specification (210X297mm)