TW288255B - - Google Patents

Info

Publication number
TW288255B
TW288255B TW083101434A TW83101434A TW288255B TW 288255 B TW288255 B TW 288255B TW 083101434 A TW083101434 A TW 083101434A TW 83101434 A TW83101434 A TW 83101434A TW 288255 B TW288255 B TW 288255B
Authority
TW
Taiwan
Application number
TW083101434A
Other languages
Chinese (zh)
Original Assignee
Adotekku Engineering Co Ltd
Canon Components Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adotekku Engineering Co Ltd, Canon Components Kk filed Critical Adotekku Engineering Co Ltd
Application granted granted Critical
Publication of TW288255B publication Critical patent/TW288255B/zh

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00Photographic printing apparatus
    • G03B27/02Exposure apparatus for contact printing
    • G03B27/14Details
    • G03B27/18Maintaining or producing contact pressure between original and light-sensitive material
    • G03B27/20Maintaining or producing contact pressure between original and light-sensitive material by using a vacuum or fluid pressure
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2002Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW083101434A 1993-08-26 1994-02-21 TW288255B (cs)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5235351A JPH07168366A (ja) 1993-08-26 1993-08-26 露光装置

Publications (1)

Publication Number Publication Date
TW288255B true TW288255B (cs) 1996-10-11

Family

ID=16984807

Family Applications (1)

Application Number Title Priority Date Filing Date
TW083101434A TW288255B (cs) 1993-08-26 1994-02-21

Country Status (4)

Country Link
JP (1) JPH07168366A (cs)
KR (1) KR950006540A (cs)
GB (1) GB2281980A (cs)
TW (1) TW288255B (cs)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100315950B1 (ko) * 1999-12-15 2001-12-24 김규환 라벨용 열전사지의 제조방법 및 그 제조방법에 의하여제조된 라벨용 열전사지
FR2822966B1 (fr) * 2001-03-28 2003-12-12 Automa Tech Sa Chassis d'exposition a la lumiere d'un circuit imprime
FR2822968B1 (fr) * 2001-03-28 2003-08-15 Automa Tech Sa Chassis d'exposition a la lumiere d'un circuit imprime
KR20030054444A (ko) * 2001-12-26 2003-07-02 한맥전자 (주) 감광성 레지스터로 적층된 인쇄 회로 기판용 노광장치의진공흡입판과 마스크캐리어장치
FR2842617B1 (fr) * 2002-07-17 2005-01-21 Automa Tech Sa Machine d'exposition de panneaux de circuit imprime
EP1494075B1 (en) 2003-06-30 2008-06-25 ASML Netherlands B.V. Lithographic projection apparatus and device manufacturing method
FR2917850B1 (fr) * 2007-10-12 2009-10-16 Automa Tech Sa Machine d'exposition pour panneaux de circuit imprime

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1222299A (en) * 1969-10-20 1971-02-10 Charles Game An improved apparatus for use in the reproduction of sheet originals
GB1511332A (en) * 1974-04-30 1978-05-17 Hoechst Ag Printing frame
US4054383A (en) * 1976-02-02 1977-10-18 International Business Machines Corporation Jig and process for contact printing
US4504142A (en) * 1983-09-26 1985-03-12 Richards Sr Chester L Photography printing frame
US4704028A (en) * 1986-01-24 1987-11-03 Richards Sr Chester L Vacuum printing frame

Also Published As

Publication number Publication date
GB2281980A (en) 1995-03-22
KR950006540A (ko) 1995-03-21
GB9413941D0 (en) 1994-08-31
JPH07168366A (ja) 1995-07-04

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