TW288156B - - Google Patents

Info

Publication number
TW288156B
TW288156B TW83107562A TW83107562A TW288156B TW 288156 B TW288156 B TW 288156B TW 83107562 A TW83107562 A TW 83107562A TW 83107562 A TW83107562 A TW 83107562A TW 288156 B TW288156 B TW 288156B
Authority
TW
Taiwan
Application number
TW83107562A
Other languages
Chinese (zh)
Original Assignee
Tokyo Electron Co Ltd
Tokyo Electron Tohuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP05168616A external-priority patent/JP3111395B2/ja
Priority claimed from JP16861593A external-priority patent/JP3177722B2/ja
Priority claimed from JP17848293A external-priority patent/JP3328853B2/ja
Priority claimed from JP5193996A external-priority patent/JPH0729840A/ja
Application filed by Tokyo Electron Co Ltd, Tokyo Electron Tohuku Kk filed Critical Tokyo Electron Co Ltd
Application granted granted Critical
Publication of TW288156B publication Critical patent/TW288156B/zh

Links

TW83107562A 1993-06-15 1994-08-17 TW288156B (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP05168616A JP3111395B2 (ja) 1993-06-15 1993-06-15 熱処理装置
JP16861593A JP3177722B2 (ja) 1993-06-15 1993-06-15 高速熱処理炉の温度制御装置
JP17848293A JP3328853B2 (ja) 1993-06-28 1993-06-28 熱処理装置及び熱処理方法
JP18677293 1993-06-30
JP5193996A JPH0729840A (ja) 1993-07-09 1993-07-09 熱処理装置

Publications (1)

Publication Number Publication Date
TW288156B true TW288156B (ja) 1996-10-11

Family

ID=51398098

Family Applications (2)

Application Number Title Priority Date Filing Date
TW84107432A TW294825B (ja) 1993-06-15 1994-08-17
TW83107562A TW288156B (ja) 1993-06-15 1994-08-17

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW84107432A TW294825B (ja) 1993-06-15 1994-08-17

Country Status (1)

Country Link
TW (2) TW294825B (ja)

Also Published As

Publication number Publication date
TW294825B (ja) 1997-01-01

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent