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Priority claimed from JP05168616Aexternal-prioritypatent/JP3111395B2/ja
Priority claimed from JP16861593Aexternal-prioritypatent/JP3177722B2/ja
Priority claimed from JP17848293Aexternal-prioritypatent/JP3328853B2/ja
Priority claimed from JP5193996Aexternal-prioritypatent/JPH0729840A/ja
Application filed by Tokyo Electron Co Ltd, Tokyo Electron Tohuku KkfiledCriticalTokyo Electron Co Ltd
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Publication of TW288156BpublicationCriticalpatent/TW288156B/zh