TW267261B - Manufacturing process for Mn-Al film - Google Patents

Manufacturing process for Mn-Al film

Info

Publication number
TW267261B
TW267261B TW84104217A TW84104217A TW267261B TW 267261 B TW267261 B TW 267261B TW 84104217 A TW84104217 A TW 84104217A TW 84104217 A TW84104217 A TW 84104217A TW 267261 B TW267261 B TW 267261B
Authority
TW
Taiwan
Prior art keywords
film
manufacturing process
magnetism
over
adopts
Prior art date
Application number
TW84104217A
Other languages
Chinese (zh)
Inventor
Bor-Cherng Guo
Jiunn-Huei Hwang
Shanq-Chin Shenn
Original Assignee
Nat Science Committee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Science Committee filed Critical Nat Science Committee
Priority to TW84104217A priority Critical patent/TW267261B/en
Application granted granted Critical
Publication of TW267261B publication Critical patent/TW267261B/en

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  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A manufacturing process of Mn-Al film adopts direct current or radio frequency power magnetic control sputtering method to coat film and adopts glass as substrate. The primary coated film is processed by proper thermal treatment to get Mn-Al phase film with high magnetism and saturation magnetization quantum over 300 emu/cm3 and magnetism preserving force over 6000 e.
TW84104217A 1995-04-28 1995-04-28 Manufacturing process for Mn-Al film TW267261B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW84104217A TW267261B (en) 1995-04-28 1995-04-28 Manufacturing process for Mn-Al film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW84104217A TW267261B (en) 1995-04-28 1995-04-28 Manufacturing process for Mn-Al film

Publications (1)

Publication Number Publication Date
TW267261B true TW267261B (en) 1996-01-01

Family

ID=51396811

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84104217A TW267261B (en) 1995-04-28 1995-04-28 Manufacturing process for Mn-Al film

Country Status (1)

Country Link
TW (1) TW267261B (en)

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