TW254860B - - Google Patents
Info
- Publication number
- TW254860B TW254860B TW081109782A TW81109782A TW254860B TW 254860 B TW254860 B TW 254860B TW 081109782 A TW081109782 A TW 081109782A TW 81109782 A TW81109782 A TW 81109782A TW 254860 B TW254860 B TW 254860B
- Authority
- TW
- Taiwan
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treating Waste Gases (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Separation Of Gases By Adsorption (AREA)
- Gas Separation By Absorption (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32757691 | 1991-12-11 | ||
JP04169104A JP3073321B2 (en) | 1991-12-11 | 1992-06-26 | How to purify harmful gases |
Publications (1)
Publication Number | Publication Date |
---|---|
TW254860B true TW254860B (en) | 1995-08-21 |
Family
ID=18200604
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW081109782A TW254860B (en) | 1991-12-11 | 1992-12-07 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP3073321B2 (en) |
KR (1) | KR0126123B1 (en) |
TW (1) | TW254860B (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3781871B2 (en) * | 1997-07-22 | 2006-05-31 | ズードケミー触媒株式会社 | Chloride absorber |
FR2776536B1 (en) * | 1998-03-31 | 2000-04-28 | Rhodia Chimie Sa | PROCESS FOR THE ELIMINATION OF HALOGEN COMPOUNDS CONTAINED IN A GAS OR A LIQUID WITH A COMPOSITION BASED ON AT LEAST ONE METAL ELEMENT |
JP4276333B2 (en) * | 1998-09-22 | 2009-06-10 | 日本パイオニクス株式会社 | Exhaust gas purification method |
TW581708B (en) | 1998-09-22 | 2004-04-01 | Japan Pionics | Cleaning agent and cleaning method for halogen-containing exhaust gas |
KR100520450B1 (en) * | 1999-06-08 | 2005-10-12 | 주식회사 코캣 | Cleaning agent of waste gas containing halogen compounds from semiconductor etching process and cleaning method using the same |
KR20020025466A (en) * | 2000-09-29 | 2002-04-04 | 조승훈 | Dechlorination device |
JP4711550B2 (en) * | 2001-07-04 | 2011-06-29 | サンワケミカル株式会社 | How to remove halogen gas |
JP5008801B2 (en) * | 2001-04-23 | 2012-08-22 | サンワケミカル株式会社 | Halogen gas removal method |
JP4620897B2 (en) * | 2001-04-23 | 2011-01-26 | サンワケミカル株式会社 | Halogen gas removal method |
KR20010025405A (en) * | 2000-12-15 | 2001-04-06 | 조창균 | Chlorine gas neutralization device using air. |
WO2009125457A1 (en) * | 2008-04-11 | 2009-10-15 | カンケンテクノ株式会社 | Process for treatment of exhaust gas containing both silane gas and fluorine gas and exhasut gas treatment facility for the process |
JP5639757B2 (en) * | 2009-12-10 | 2014-12-10 | 中部電力株式会社 | Gas processing method |
JP2011062697A (en) * | 2010-11-26 | 2011-03-31 | Sanwa Chemical Kk | Method for removing halogen gas |
CN109012092A (en) * | 2018-08-09 | 2018-12-18 | 全椒南大光电材料有限公司 | A kind of high concentration chlorine trifluoride exhaust gas processing device and processing method |
KR102256134B1 (en) * | 2019-12-05 | 2021-05-25 | 상우기업(주) | Highly concentrated liquid eliminator for removing harmful gases |
-
1992
- 1992-06-26 JP JP04169104A patent/JP3073321B2/en not_active Expired - Fee Related
- 1992-12-07 TW TW081109782A patent/TW254860B/zh not_active IP Right Cessation
- 1992-12-11 KR KR1019920023903A patent/KR0126123B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP3073321B2 (en) | 2000-08-07 |
JPH05237324A (en) | 1993-09-17 |
KR930012082A (en) | 1993-07-20 |
KR0126123B1 (en) | 1997-12-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |