TW249291B - Method for drive-in diffusion of dopant into semiconductor silicon wafer - Google Patents

Method for drive-in diffusion of dopant into semiconductor silicon wafer

Info

Publication number
TW249291B
TW249291B TW083104447A TW83104447A TW249291B TW 249291 B TW249291 B TW 249291B TW 083104447 A TW083104447 A TW 083104447A TW 83104447 A TW83104447 A TW 83104447A TW 249291 B TW249291 B TW 249291B
Authority
TW
Taiwan
Prior art keywords
drive
dopant
diffusion
silicon wafer
semiconductor silicon
Prior art date
Application number
TW083104447A
Other languages
English (en)
Inventor
Takeshi Akatsuka
Tsutomu Sato
Original Assignee
Naoetsu Denshi Kogyo Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Naoetsu Denshi Kogyo Kk filed Critical Naoetsu Denshi Kogyo Kk
Application granted granted Critical
Publication of TW249291B publication Critical patent/TW249291B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
    • H01L21/2251—Diffusion into or out of group IV semiconductors
    • H01L21/2252—Diffusion into or out of group IV semiconductors using predeposition of impurities into the semiconductor surface, e.g. from a gaseous phase

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
TW083104447A 1993-05-21 1994-05-17 Method for drive-in diffusion of dopant into semiconductor silicon wafer TW249291B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14268593 1993-05-21

Publications (1)

Publication Number Publication Date
TW249291B true TW249291B (en) 1995-06-11

Family

ID=15321148

Family Applications (1)

Application Number Title Priority Date Filing Date
TW083104447A TW249291B (en) 1993-05-21 1994-05-17 Method for drive-in diffusion of dopant into semiconductor silicon wafer

Country Status (2)

Country Link
KR (1) KR0137723B1 (zh)
TW (1) TW249291B (zh)

Also Published As

Publication number Publication date
KR940027053A (ko) 1994-12-10
KR0137723B1 (ko) 1998-06-01

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