2128^9 Λ 6 13 6 五、發明説明（） (1)、發明範疇： 本發明係有闢於光學精密Ϊ*丨跟抆術(high _reS〇lUti〇n 〇ptieal ranging) 〇特別措應用光學原理結合光電相關抆術從事高精密 度的柜離測量，以更進一步達到高品質的測拭、校準及控制 等目的。 經濟部屮央橾準局貝工消費合作社印製 ⑵、發明背景： 光學精密測跟技術擁有高解折牟、即時釩號處理、不 接麵捸測及不受重磁干掻等特性，在精密工業、醫學及生物 等方面有相當廣沃的應用及良釾的發展潛力。其中已知的應 用如工業界中精密定位控制、精密長度责測、表面結構栓測 等0 現行的光學精密測跟技術，基本上是採用光波干涉法 。光學干涉儀原本是用來證明光波相干性的實驗架彀，其產 生之干涉訊號對干涉儀兩唷相對跟雜（光程差）非常$敏 ，利用此特性並稍撤加以改良，便可用來做精密的位移量測 Ο 根捸光波干涉儀的原理及架構，光學精密挪柜技術依 其所使用之光源可分爲以下三種方法： 1、 單頻光源.光波干涉法。 2、 t蘋連續先源光波干涉法。 3、 脈衝當射干涉法。 1、單頰光源光波千涉法。 (請先閲讀背面之注意事項再填寫本頁) 裝· 線. 本紙張尺度逍用肀B國家標準(CNS)甲4規格（210x297公釐) 9 • i 8 2 4Χ 2 66 經濟部中央標準局貝工消费合作社印製 五、發明説明（） 本法採用如鎘、氪、汞燈、氦氖雷射等爲干涉儀之單 鑌光泳。此干涉儀以其波長爲長度量測的基本單位。随干涉 儀兩臂產生一個波長的相對跟離變化，則干涉儀的干涉條紋 有一明暗的變化，計算干涉條紋明暗史化的數目即可判讀待 測目標之相對位移。此方法精確度受限於光波波長，若配合 複雜的相位鎖定装置及秩頻當射系统，最高解析率可遑數十 毫橄米(nm)左古。但因相干袒離長，即使參考光和測量光的 光程相差很多時，也會有干涉條紋，僅憑干涉條紋難以判定 絶對跟離。 2、 t頻連蜻光浠光波干涉法（或稱白光干涉儀）。 干涉儀光源採用具有寬频讀的光，或稱爲白光光源。 此光源的相干性低，因此相干長度也非常短。干涉儀之干涉 條紋出現時，代表其兩嘴跟離在相干長度内，可判定絶對跟 離。受限於現有白光光源頻寬的限制，此技術解析度约在橄 米(10·6米)左右。干涉儀必須使用高度空間相干的光源，因此 白光光源爲求増加空間相干性，往往需要用空間遽波器（如 針孔或單棋光纖）來遇濾白光，使得光源的效牟變得很低。 3、 脈衝雷射干涉法。 近來科學界開發成功飛秒級脈衝雷射技術後，利用飛 秒級光脈衝橄米級的脈衝長度，配合干涉技術，可得到撤米 級的解析度。由於此系統的複雜度相當高，梯作樣境要求嚴 苛並且償格昂责，使得它們難以在實驗室以外使用。 干涉式的測橄技術有下列之缺點：受限於干涉儀架設 ，整體系统體積大、光路調整嚴苛、須在光學臬上操作、反 應速度受參考啃機械择描的限制、無法做立即感測等。 (請先閲讀背面之注意事項再填艿本頁)2128 ^ 9 Λ 6 13 6 V. Description of the invention () (1), the scope of the invention: the invention is based on optical precision Ϊ * 丨 follow technology (high _reS〇lUti〇n 〇ptieal ranging) 〇 special measures applied optics The principle is combined with the photoelectric related technology to engage in high-precision cabinet separation measurement to further achieve the purpose of high-quality measurement, calibration and control. Printed by the Beigong Consumer Cooperative of the Central Bureau of Economic Affairs of the Ministry of Economic Affairs. 2. Background of the invention: The optical precision tracking technology has the characteristics of high resolution, instant vanadium number processing, no-interface measurement, and no interference by gravity and magnetism. The precision industry, medicine and biology have quite extensive applications and good development potential. Among them, known applications such as precision positioning control, precision length measurement, surface structure bolt measurement, etc. 0 The current optical precision measurement and tracking technology basically uses the light wave interference method. The optical interferometer was originally used to prove the coherence of light waves. The interference signal generated by it is very sensitive to the relative interference (optical path difference) between the two interferometers. Use this feature and modify it slightly to use it. To make precise displacement measurement Ο The principle and structure of the root light wave interferometer. The optical precision cabinet technology can be divided into the following three methods according to the light source used: 1. Single frequency light source. Light wave interference method. 2. t Ping continuous source light wave interference method. 3. Pulsed burst interference method. 1. Light wave of single-cheek light source. (Please read the precautions on the back before filling in this page) Packing and threading. The size of this paper is easy to use. National Standard (CNS) A 4 specifications (210x297 mm) 9 • i 8 2 4Χ 2 66 Central Bureau of Standards of the Ministry of Economic Affairs Printed by Beigong Consumer Cooperative V. Description of the invention () This method uses single-continuous light swimming such as cadmium, krypton, mercury lamp, helium-neon laser, etc. as interferometers. This interferometer uses its wavelength as the basic unit of length measurement. As the two arms of the interferometer produce a relative follow-up change in wavelength, the interference fringes of the interferometer have a change in light and dark. The relative displacement of the target to be measured can be interpreted by calculating the number of light and dark history of the interference fringes. The accuracy of this method is limited by the wavelength of the light wave. If combined with a complex phase-locking device and rank-frequency radio system, the highest resolution can be tens of nanometers (nm). However, due to the long coherence distance, even if the optical path lengths of the reference light and the measurement light differ greatly, there will be interference fringes, and it is difficult to determine the absolute follow-up alone by the interference fringes. 2. t-band continuous light interference method (or white light interferometer). The light source of the interferometer adopts light with wide frequency reading, or white light source. The coherence of this light source is low, so the coherence length is also very short. When the interference fringes of the interferometer appear, it means that the two mouths are within the coherence length, and the absolute following can be determined. Limited by the bandwidth of the existing white light source, the resolution of this technology is about 10 meters (10.6 meters). Interferometers must use highly spatially coherent light sources. Therefore, in order to increase the spatial coherence, white light sources often need to use a spatial wave filter (such as a pinhole or single chess fiber) to filter white light, so that the efficiency of the light source becomes very low . 3. Pulsed laser interference method. Recently, after the femtosecond pulse laser technology was successfully developed by the scientific community, the pulse length of the femtosecond optical pulse and the interference technology can be used to obtain the resolution of the meter. Due to the relatively high complexity of this system, the requirements of the ladder-type environment are severe and the responsibility is high, making them difficult to use outside the laboratory. Interferometric measurement technology has the following shortcomings: limited by the installation of the interferometer, the overall system is large, the optical path is strictly adjusted, it must be operated on the optical device, the reaction speed is limited by the reference nibble mechanical selection, and it cannot be sensed immediately Measured. (Please read the notes on the back before filling this page)
本紙尺度边用中Β Η家標準（CNS)甲4規格(210x297公*) Λ 6 Β6 五 經濟部中央標準局貝工消#合作社印製 2128^9 發明説明（） :. 在現今工業界積體化，高品質的要求卞，妒何缩小挪 跟系統的微猗，增加測跟的解析度，進一步提高系技印時測 跟的能力並減低系统複雜度，將可更進一步廣泛的應用到控 制、機械定位等各领域。在此需求下，我們研究可變频當射 在輸出光波餚Θ共振腔時變頻的特性，配合迷當的固讀光路 設計》發展出一種非干涉式的測微技術。此技術具有高解折 牟即時測跟能力及極佳的積體化潛力等特點，叮彌補光學干 涉技術在這方面的缺黠。在積體貧路的表面結構撿视、精密 機械定位控制、光學讀取系統，回饋控制等方面，皆有應用 發展之潛力。 (3)、發明概述 經於以上所述微測扶術面臨的瓶頸，我們研究了一個 折的方法，即利用可變頻當射頰芈對共扳肢的光耗捐有極爲 霰敏變化的特性，fc合光學田饋系统，發展結合成爲一種非 干涉式的光學微測技衡，簡述如下： 首先，我們採用可變頻當射做爲探測光源，可變頰雷 射會随其共振腔淨光托損改變而工作在不同頰率。共振腔淨 光耗损只要有一點小小的改變，工作頻牟就會即時產生極爲 篕敏的變化。換句話説，觀察可變頻當射工作頰牟的改變， 便能測知極小的共振腔光粍損變化〇 其次，上述可變频雷射光猓須配合一光學回鯖系統， 此系統能捋空問中的位移變化轉揍成饋回共振肢光量的變 化。而讀光量之大小可等效上视爲共振腔的光耗損多少： 當回餚光量高時，共扳腔等效的耗损減少；反之，若回餚光 ^紙5lt尺度边用中國Η家橾準(CNS)甲4規格(2ι〇χ297公 C請先閱讀背面之·;ΐ意事項再填·寫本!') 裝· ,41_ 線- 2128^9This paper is used in the middle Β Η family standard (CNS) A 4 specifications (210x297 g *) Λ 6 Β6 Printed by the Ministry of Economic Affairs Central Standards Bureau Bei Gong Xiao # Cooperative Society 2128 ^ 9 Description of invention () :. Integration, high-quality requirements Bian, jealous how to reduce the micro-floating of the tracking system, increase the resolution of the heel measurement, further improve the ability to measure the heel during the technical printing and reduce the complexity of the system, which will be more widely applicable to Control, mechanical positioning and other fields. Under this demand, we study the characteristics of frequency conversion when the frequency is radiated in the output light wave cavity Θ resonant cavity. In conjunction with the design of the fixed reading optical path of "Damong", a non-interferometric micrometer technology has been developed. This technology has the characteristics of high resolution and real-time tracking ability and excellent integration potential. It makes up for the lack of optical interference technology in this regard. It has the potential for application development in the inspection of surface structure of the poor road, precision mechanical positioning control, optical reading system, and feedback control. (3) Summary of the invention In view of the bottleneck faced by the above-mentioned micro-testing abdomen, we have studied a fold method, that is, the use of variable frequency when shooting buccal stalks has a very sensitive change to the light consumption of the common limb , Fc combined optical field feed system, developed into a non-interferometric optical micro-measurement technology balance, briefly described as follows: First, we use variable frequency as the detection light source, the variable buccal laser will follow the resonant cavity net The optical loss changes and works at different cheek rates. As long as there is a slight change in the net light loss of the resonant cavity, the working frequency will immediately produce extremely sensitive changes. In other words, by observing the changes in the working frequency of the variable frequency laser, you can detect the minimum change in the optical cavity loss of the resonant cavity. Secondly, the above variable frequency laser light must be combined with an optical return mackerel system. The change in displacement is converted into a change in the amount of light in the resonance limb. The amount of light reading can be equivalently regarded as the light loss of the resonant cavity: when the amount of light in the reverberation is high, the equivalent loss of the cavity is reduced; on the contrary, if the light is returned to the 5lt scale of paper, the Chinese H family is used Standard (CNS) A4 specifications (2ι〇297297C please read the back of the first; l fill in the matters and write !!) Installed, 41_ line-2128 ^ 9
經濟部中央楳準局员工消费合作社印M 五、發明説明（） 责少時，共扳腔等效的粍损便增加。因此，當待測物有撖細 的位移改變時，雷射操作頻年便產生極爲3[敏之史化，量測 頻率改變即吁精密且即時的測知待測物位移。 依捸以上的原理及構想，我們完成了一個宥除橄測系 统。此系統之測跟解析牟約在數十毫橄米(nm);而線性可測 範《則由數橄米(μπι)至數十橄米。系統在反應速度上則顒示 了即時侦測的能力。當射光源分别使用了染料當射及寬频多 棋態二極雅雷射(super-luminescent diode) 〇而光學6?餿方面則使 用了共焦回饋的光學技術。所謂共焦回饋是措在當射光束聚 焦焦點放置反射面，使光束反射後沿原光路餚回共振腔内〇 有故®餘共振肢之光量由反射面相對於焦點的银離來控制： 反射面恰妨在焦點上時，回饋光量最大；随著反射面離開焦 點，回錄光量漸漸變小。透通共焦回饋之機制將空間位移轉 換成回饋光量，回饋光量則靈敏地改變當射操作頻牟，完成 系统測跟之目的。至於光頻牟的測量則使用兩種方法：（一） 光學頻旙分析儀，（二）光學位置感測器。前者俏測光波麵错 ，頻譜中心則代表代測物之空間位置。後者可即時測得雷射 中心頻牟，絰一校準程序找出頻牟和待測物位置之對應閣係 ，在量測時依此校準結果由當射頻率讀出其代表之待測物位 置，以達到精密測跟之目的。 在下速的實際系統之詳鈿描述中，將可更清楚地顒示 本發明所應用的原理，使用的物件及其優點。 本紙張尺度逍用中Η B家標準（CNS)甲4規格（2丨0x297公釐） (請先閱讀背面之注意事項再填ftT本頁) 裝< 訂- 線- 2128Γ；9 經濟部中央標準局员工消费合作社印製 五、發明説明（） (4)、發明詳鈿説明 本發明提供了 一種新的光學精密測跟技術，不採用傳 就的光波干涉法，卻能達成數十毫橄米的解析牟，且大核增 加了反應速度及缩小系統體積。 以下，藉圖示詳細説明本發明之较佳實例。 阖示之簡單説明如下： 阑一：本發明實除範例的系统架構。 圖一··使用光學位置感測器（PSD: Position Sensitive Detector) 即時量測頻率法之示意ΚΙ ο 阑三：分別使用不同光源的系統之校準圏，包括所得 校準點及其對應之湊合曲線〇圈三⑻使用不加 限頻裝置的染料雷射，阖三(b)則使用寬頻多棋 態二極體雷射作爲光源。 明四：頚示可即時偵測精密位移的系統架構囷。其中 使用寬頻多棋態二極體雷射，而雷射频率使用 光學位置感測器即時量測。 阑五：以圖四之系统即時侦測位移的結杲。圖五⑻中 Ι-kHz的三角波（PZT :空心囬點）代表目標物線 性空間位移，PSD系统侦測之結果爲一同步的三 角波（PSD :實心囬點）。阖五⑼爲圖五⑻侦測 結果的一段，顯示侦測解析率（约2〇 nm)以及線 性可測範因（約3μτη)〇 阌一顒示本發明實降範例的系統架構。探測光源（阑一 1)採用可變頰雷射，如杂料當射、寬頰多棋態二極體雷射等 。光由當射共振腔的輸出偶合器射出後，絰一45度光學分光 器（阑一2)分爲兩逭，其中一逭導入光學共焦Θ饋系统作爲探 測用，一遑則導入頰牟偵測系統（明一 9)，以侦測當射工作顧 (請先閲讀背面之注意事項再塡，κ本頁) r 象 本紙张尺度遇用中國B家標準(CNS) f 4規格(210x297公|) Λ 6 13 6 經濟部中央橾準局貝工消費合作社印製 2128?>9 五、發明説明（） 牟°光學分光器的速射及反射比例則決定了此系統光學回饋 量的大小。光學共焦回餚系統包括了一個光束放大器（圖一3) 及一個光朿聚焦元件（圖一4)，後者採用顯橄鏡物鏡。光朿放 大器將雷射光束半徑擴大後再射入顒橄鏡物鏡聚焦。光束換 大的倍數是使揸大後的光朿半徑和顯橄鏡物鏡的焦跟長度比 例能值量接近顯微鏡物鏡的數值孔徑(numerical aperture)大小0 此舉一爲提高顯橄鏡物鏡捜集反射光量的能力，使回餚光路 不至於受反射面傾斜角太大的影黎；一爲減小聚焦光束焦點 的共然參敷(confocal parameter)以提高縱向空間的解析卒；另一 則爲缩小光朿聚焦後在焦點上光點的大小，以利應用在平面 掃描時有较高的橫向解折牟。待測物（固一 5)爲一架在壓電 效應移動器（piezo-electric translator固一7)上的銘鏡，而壓電效 應移動器則架在電腦控制的機械移動平台（阑一8)上。鋁鏡 提供反射面（阖一 6)以利光波沿原路反射回雷射共振腔内部 。機械移動平台則用來定位目標鋁鏡進入顯橄鏡物鏡焦點附 近，而惠蚩效應移動器則提供更_高解析卒的定位以及棋擬目 標物彳故細的移動。機械移動平台及壓電效應移動器皆由一電 腦（囷一 10)控制。 從目標反射鏡回饋的光在分光器分爲兩道，一道穿過 分光器館回雷射共振腔；一道則反射至囷一 11〇反射的這道 光路可用來監视光路調整狀況以及回餓光量。當目標物定位 於顒橄鏡物鏡之焦點時，此光路應爲平行而不發散，如目標 物不在顯微鏡物鏡之然點時則光路會發散，因此觀察此光路 光波發散之情形有助於調整待測物至顯橄鏡物鏡之焦點附近 °在此光路上放置一個功卒量測器，則可同時量得光從待測 物反射後回餚量的大小，以確定光路在正常回請狀態。 光學分光器的另一道光則進入了光頻率量測系統（固 一9)。在此系統中，我們量測當射工作鑌牟，接以知逭目標 本紙張尺度边用中a Η家樣準(CNS) Ψ4規格(210X297公1) (請先閲請背面之注意事項再填宵木頁)Printed by the employee consumer cooperative of the Central Bureau of Economic Affairs of the Ministry of Economic Affairs M. V. Description of the invention () When there is little responsibility, the equivalent damage caused by the total increase will increase. Therefore, when the displacement of the object to be measured has a fine displacement, the laser operation frequency will be extremely high. The change of the measurement frequency means precise and immediate measurement of the displacement of the object to be measured. Based on the above principles and concepts, we have completed a measurement system. The measurement and analysis of this system is about tens of millimeters (nm); while the linearly measurable range is from several meters to tens of meters. The system's speed of response shows the ability of real-time detection. When the incident light source respectively uses the dye and the wide-band multi-state laser diode (super-luminescent diode). The optical 6? Rancid aspect uses confocal feedback optical technology. The so-called confocal feedback is to set the reflective surface at the focal point of the incident beam, so that the beam is reflected and returned to the resonant cavity along the original optical path. The light quantity of the residual resonance limb is controlled by the silver separation of the reflective surface relative to the focal point: the reflective surface It may be that when the focus is on, the amount of feedback light is the largest; as the reflective surface leaves the focus, the amount of feedback light gradually decreases. The transparent confocal feedback mechanism converts the spatial displacement into the amount of feedback light. The amount of feedback light sensitively changes the frequency of the radio beam operation to complete the purpose of system tracking. As for the measurement of optical frequency, two methods are used: (1) optical frequency analyzer, (2) optical position sensor. The former is pretty wrong in measuring the light wave surface, and the center of the spectrum represents the spatial position of the substitute. The latter can instantly measure the frequency center of the laser center. A calibration procedure finds the corresponding cabinet of the frequency center and the position of the object to be measured. During the measurement, the calibration result is read from the current position of the object to be measured according to the calibration result. , In order to achieve the purpose of precision tracking. In the detailed description of the actual system at the lower speed, the principles applied by the present invention, the objects used and their advantages will be more clearly shown. The size of this paper is easy to use in the middle of the Η B home standard (CNS) A 4 specifications (2 丨 0x297mm) (please read the precautions on the back before filling in the ftT page) Install &Order;Line-2128Γ; 9 Central Ministry of Economic Affairs Printed by the Bureau of Standards and Staff Consumer Cooperative V. Description of the invention () (4). Detailed description of the invention The present invention provides a new optical precision measurement and tracking technology, which does not use the transmitted light wave interference method, but can achieve tens of millions of olives. The resolution of the meter, and the large core increases the reaction speed and reduces the system volume. Hereinafter, preferred examples of the present invention will be described in detail with reference to the drawings. The simple explanations shown below are as follows: Ln: The system architecture of the present invention is based on an example. Fig. 1 · Schematic diagram of the real-time measurement frequency method using the optical position sensor (PSD: Position Sensitive Detector) Κ ο Appendix 3: Calibration coils for systems using different light sources, including the obtained calibration points and their corresponding curve curves. Circle III ⑻ uses a dye laser without a frequency-limiting device, and Gate III (b) uses a wide-band multi-state diode laser as the light source. Mingsi: Yanshi can detect the precise displacement of the system architecture in real time. Among them, broadband multi-state laser diodes are used, and the laser frequency is measured in real time using an optical position sensor. Link 5: Use the system shown in Figure 4 to detect displacement in real time. In Figure 5⑻, the Ι-kHz triangle wave (PZT: hollow return point) represents the linear displacement of the target object, and the detection result of the PSD system is a synchronous triangular wave (PSD: solid return point).鑖 五 ⑼ is a section of the detection result in Fig. 5⑻, which shows the detection resolution (approximately 20 nm) and the linear measurable vanishing factor (approximately 3 μτη). The system architecture of the actual drop example of the present invention is shown. The detection light source (Lane 1) adopts variable buccal laser, such as mixed material laser, wide-cheek multi-camera diode laser, etc. After the light is emitted from the output coupler of the resonant cavity, the 45-degree optical splitter (Lane 1 2) is divided into two beams, one of which is introduced into the optical confocal Θ feed system for detection, and the other is introduced into the cheek. Detection system (Ming 1-9), to detect the spotlight work (please read the precautions on the back first, then κ this page) r The size of the image paper meets the Chinese B standard (CNS) f 4 specifications (210x297 Public |) Λ 6 13 6 Printed by the Beigong Consumer Cooperative of the Central Bureau of Economics of the Ministry of Economic Affairs 2128?> 9 5. Description of the invention () Mou ° 's optical beam splitter and the ratio of the rapid fire and reflection determine the size of the optical feedback of this system . The optical confocal return system includes a beam amplifier (figure 1 3) and a light focusing element (figure 4), which uses a display objective lens. The optical amplifier enlarges the radius of the laser beam and then shoots it into the objective lens of the olympic lens to focus. The magnification of the beam change is to make the ratio of the ratio of the focal radius to the focal length of the lens and the focal length of the objective lens close to the numerical aperture of the microscope objective lens. This is to improve the objective lens objective of the objective lens. The ability to reflect the amount of light, so that the light path of the back dish is not affected by the inclination angle of the reflection surface is too large; one is to reduce the confocal parameter of the focused beam focus (confocal parameter) to improve the resolution of the longitudinal space; the other is to shrink The size of the light spot on the focal point after the focus is focused, so as to have a higher lateral unfolding in the plane scanning. The object to be tested (Gu 5) is a mirror on a piezoelectric effect mover (piezo-electric translator 7), and the piezoelectric effect mover is placed on a computer-controlled mechanical moving platform (Lan 1 8) )on. The aluminum mirror provides a reflective surface (Ke 6) to allow light waves to be reflected back into the laser cavity along the original path. The mechanical moving platform is used to position the target aluminum mirror into the vicinity of the focus of the objective lens of the display lens, and the Huichi effect mover provides a more accurate positioning and a detailed movement of the target object. Both the mechanical moving platform and the piezoelectric effect mover are controlled by a computer (囷 一 10). The light fed back from the target reflector is divided into two channels in the beam splitter, one passes through the laser resonant cavity in the beam splitter pavilion; the other is reflected to the beam 11-10. This reflected optical path can be used to monitor the adjustment status of the optical path and return to hunger The amount of light. When the target is positioned at the focal point of the lens objective, the optical path should be parallel and not divergent. If the target is not at the point of the microscope objective, the optical path will diverge. Therefore, observing the divergence of the light path of this optical path helps to adjust the Measure the object to the focal point of the objective lens of the display lens. Place a power measuring instrument on this optical path to measure the amount of light reflected from the object to be measured at the same time to determine the normal return status of the optical path. Another beam of light from the optical splitter enters the optical frequency measurement system (Guiyi 9). In this system, we measure the shot shooting work, and then use it to know the target. The paper size is used in the middle of a home standard (CNS) Ψ4 specification (210X297 1) (please read the precautions on the back first Fill in the night wooden page)
^3- ^3- 經濟部中央櫺毕局κχ工消"合作社印製 Μ 五、發明説明（） 物的位移。在量測高解析度位移的要求下，頻率量測的精確 性及可靠度是非常重要的。我們分別使用了兩種方法，介紹 如下： 1、 光學頻譜分折儀 這是一種常用的光頻率測量系統，光學頻譜分析儀别 用光栅對不同頻皁光色散角度不同的性質，以空間位里分辨 光波頻率。在駔光栅遒當跟離處架置一排光二極體陴列，其 中每個二極骰的位置代表一個色散光頻率。而陣列的每一個 二極體會依受光量不同而產生不同之電流，其電流大小則代 表此頻牟之能量，依序測出各二極體之電流，則得知光頻譜 的分佈。由此分佈我們可以計算出其中心頻率的移動，以中 心頻皁的移動來代表整個頻年的移動。由於此法須依序讀取 二極體陣列訊號it計算中心頻率，訊號讀取及處埋的遇程須 一段時間，故本方法不逍於作即時訊號侦測〇 2、 光學位置感測器（position sensitive detector)法：（如围二 ) 待測光波經一色散元件（圖二1)後，各頻率光以不同的 色散角度射至空間中不同的位置，依空間位置的不同可分辨 出光波頻率。阑二2爲一聚焦器，將光束聚焦至一個一維的 光學位置感測器（囷二3)上。位置感測器有兩個輸出端電流： II、I2，當光點落至位移感測器中央時，則兩電流相等；當 光點從中心偏移時，兩端電流童會随著偏移量而改變。利用 II、12之值可計算光點位置跟位移感測器中心多遠，其計算 式如下： 本紙張尺度边用中國《家楳準(CNS)甲4規格(210x297公;Ϊ) {，請先間讀背而之法意事項再成寫本頁) 裝_ 線- Λ 6 13 6 212829 五、發明説明（） X:光束位置 X〇:位移感測器中心點 將位置感測器的兩輸出電流接至一個具加減和除法功 能的訊號處理電路（阓二4)計算，便可侦測知光點落在感測器 上之位置。因此利用光學位置感測器來量測經色散元件散射 後光點的空間位置便可俏測啻射光的頻率。由於光學位置感 測器反應速度甚快，配合高速之訊號處理電路則可從事即時 感測。 在系統工作之前，須得到雷射頻率對空間位移的校準 關係，以利工作時由所侦測雷射頻牟直接讀出相對應之空間 位置。校準程序如下：先捋待測物定位至聚焦器之焦點上。 此時有最大的光回饋量，因此頻率改變量也最大，玎由此列 斯待測物是否在焦點上。利用巳知刻度之平移台精密改變聚 焦點與待測物之相對駔離，量測在不同跟離時雷射頻率的相 對改變，如此吁得到一組校準黠，其中每一點皆包括了雷紂 頻牟和空間位移量的對應關係。遑當尋找一條曲線來湊合 (curve fitting)此組校準點，則可以此湊合曲線代表所須之校準 關係。系統的解析度則可由各校準點空間位置量測值對此湊 合曲緣之平均誤差來定義。依捸此湊合曲線可完成校準及解 析度的鑑定。 我們實除完成了兩個分別使用不同光源的系統之校準 ，所得校準點及其對應#合曲線㈣三。園三⑻爲使用不 加限頻裝置的Rh.6G染料當射作光源所得的結果，校準時之 系統架構如®-所示。其中使心％的分光器、—個祕 =值孔往爲㈣的顯微鏡物鏡μ;回餓共振腔之光量約 $振腔内能责之㈣。雷射麵率由一個1/4米長，繼_ 光栅的光㈣譜分析儀系_量。當射財與空間位移之對 —^1————— 本紙張尺度边用中國8家樣準(CNS)vp4規格（210x297·^-'~ --—.；, (請先閲讀背面之注意事項再填筠本頁) 裝- 經濟部中央標準局貝工消费合作社印製 2128Γ；9 Λ 6 13 6 經濟部中央楳準局Μ工消t合作社印製 五、發明説明（） 應闞係可由圖中看出：當目標物定位在顯橄鐃物鏡焦點時， 雷射光頰年減小，或説光波長有最大的紅位移；當目標物離 開聚焦點時，當射光頦牟則增加（光波長減小）。固三(a)之 校準結果如下：解析率爲20 nm，可测範園達11 μηι。® ⑼ 則使用了一個寬频多棋態二極《雷射，測量方法同上所述。 我們分別使用了兩種倍數的顯橄鍊物鍊10X及6〇χ ,得到不同 的兩條曲線：方黠代表10Χ，園點代表6〇χ的結果。兩者的解 析率皆逡數十撖橄米(nm)，可測範園則分別達16卜„1及2卜„1 〇 爲了證明本發明即時侦測的能力，我們實除架設了如 «四的系统。其中以寬頦多棋態二極體雷射（圊四D作光源 ，輸出光波絚透射年係數爲9〇%的分光器（¾四2)，導入60X ( 數值孔往為〇.85)的顯橄物鏡（圏四3)聚焦。待測物爲一架在 I電效應移動器（阑四6)上的鋁鏡（明四4),鋁鏡提供了铒饋 所需的反射面（阖四5)，而壓電效應移動器則架在電滕控制 (圖四I5)巧機械移動平台（阓四7)上。頻牟測定則使用光學位 置感測器系統，當射光先絰一 UOOg/mm的光栅（阖四9)，色散 的第一蜻散射光點組速鏡（阓四10)聚焦至光學位置感測器 (Position Sensitive Detector明四11)上感測位置，光栅和光學位置 感測器相跟30公分。圖四8爲一空間遽波器，將寬頻多棋態 二極《當射高阱的空間棋態逋爲高斯基態，以利聚焦速鏡將 光束聚焦至光學位置感測器上時，能得到最小的聚焦點，提 高光學位置卷測器的雯敏度。光學位置感測器的兩電流則輸 入訊號處理線路（阑四Π)，經計算後輸出電壓訊號（明四13) ，此訊號則代表光波頰年。 即時侦測結果如阑五所示。利用1KHzs角波騍動壓電 效應移動器作空間縱向掃描移動，則壓電效應移動器帶動其 上之目標物鋁镜遝動，棋擬測駔時目標物在光束焦點附近之 來Θ位移。此時目標物在光來焦附近之來西線性位移，以 本紙张尺度边用中Η 8家標準(CNS) f 4規格（210x297公龙) (請先閲讀背面之注意事項再填寫本頁) 裝- 'ΪΓ_ 線 2128^9 五 Λ 6 13 6 發明説明（） 阑五⑻所示三角波（空心固黠）代表。讀取光學位置感測器 輪出訊號之大小便可讀出目標物相對應的位移。阑五⑻中之 實心囬點所示之三角波爲讀取的位移訊號，顯示即時侦測目 標物來回位移的結果，速度可到遑壓電效應移動器之最大掃 插迷度（約爲lkHz)。0光學位置_器之反應迷度甚快， =統料錢度纽應纽於舰料線路。制快速電 蜾路，則可從事高速、即時的精密位移測跟。 的感二:(Γ==準^準點截取㈣五⑻中 (請先閲讀背面之注意事項再項寫本頁) ，線性=匕爲角::。校準點對，直線之解析率爲- 裝- 線 用 边 度 尺 張 紙 _ 一本 經濟部中央楳準局员工消费合作社印製^ 3- ^ 3- Printed by the Central Bureau of the Ministry of Economic Affairs κχ 工 消 " Cooperative Society Ⅴ. Invention description () Displacement of objects. Under the requirement of measuring high-resolution displacement, the accuracy and reliability of frequency measurement are very important. We have used two methods separately, introduced as follows: 1. Optical spectrum analyzer This is a commonly used optical frequency measurement system. Optical spectrum analyzers do not use gratings for the different nature of different frequencies of soap light dispersion angle. Resolve the light wave frequency. A row of photodiode arrays is mounted at the point where the grating is separated, and the position of each dipole represents a frequency of dispersive light. Each diode of the array will produce different currents according to the amount of light received. The current size represents the energy of this frequency. The current of each diode is measured in sequence, and then the distribution of the optical spectrum is known. From this distribution, we can calculate the movement of the center frequency, and the movement of the center frequency soap represents the movement of the entire frequency year. Since this method needs to sequentially read the diode array signal it to calculate the center frequency, the process of signal reading and burying will take a period of time, so this method is not uncomfortable for real-time signal detection. 02, optical position sensor (Position sensitive detector) method: (such as the second round) After the light wave to be measured passes through a dispersive element (figure 2 1), each frequency light hits a different position in space at a different dispersion angle, and can be distinguished according to the different spatial position Light wave frequency. A stop 2 is a focuser that focuses the beam onto a one-dimensional optical position sensor (囷 二 3). The position sensor has two output currents: II, I2, when the light spot falls to the center of the displacement sensor, the two currents are equal; when the light spot shifts from the center, the currents on both ends will follow the shift Quantity. The value of II and 12 can be used to calculate the distance between the position of the light spot and the center of the displacement sensor. The calculation formula is as follows: The size of this paper is based on China's "China Family Standard (CNS) A 4 specifications (210x297; Ϊ) {, please Read the back-to-back legal issues first and then write this page) Install _ Line-Λ 6 13 6 212829 V. Description of the invention () X: Beam position X〇: The center point of the displacement sensor outputs the two outputs of the position sensor The current is connected to a signal processing circuit (Mr. 2 and 4) with addition, subtraction and division functions to calculate, and the position where the known light spot falls on the sensor can be detected. Therefore, the optical position sensor can be used to measure the spatial position of the light spot scattered by the dispersive element to measure the frequency of the emitted light. Since the optical position sensor responds very fast, it can be used for real-time sensing with high-speed signal processing circuits. Before the system works, the calibration relationship between the laser frequency and the spatial displacement must be obtained, so as to directly read out the corresponding spatial position from the detected radio frequency during operation. The calibration procedure is as follows: first press the object to be measured to the focus of the focuser. At this time, there is the largest amount of light feedback, so the amount of frequency change is also the largest. It is determined whether the object to be measured is in focus. Using the translation stage of the known scale to precisely change the relative deviation of the focus point and the object to be measured, measuring the relative change of the laser frequency at different follow-ups, so that a set of calibration points can be obtained, each of which includes Lei Yao Correspondence between frequency mou and spatial displacement. When looking for a curve to fit the set of calibration points, the fit curve can represent the required calibration relationship. The resolution of the system can be defined by the average error of the measured position of each calibration point on this curve. According to this curve, the calibration and resolution identification can be completed. We actually completed the calibration of two systems using different light sources, and the resulting calibration points and their corresponding # 合 曲 ㈣ 三. Yuan III is the result of using Rh.6G dye without frequency limiting device as the light source. The system architecture during calibration is shown in ®-. Among them, the spectrometer that makes the heart%, a secret = the microscope objective μ of the value hole is (iv); the amount of light returned to the resonant cavity is about $$ within the vibrating cavity. The laser surface rate is a 1/4 meter long, following the grating optical spectrum analyzer system. When the pair of shooting wealth and spatial displacement— ^ 1 —————— This paper scale uses the specifications of China ’s eight sample standards (CNS) vp4 (210x297 · ^-'~-.;, (Please read the back Matters needing attention and then fill out this page) Outfit-Printed by the Beigong Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 2128Γ; 9 Λ 6 13 6 Printed by the Mongongt Cooperative of the Central Bureau of Economics of the Ministry of Economy V. Description of Invention () Ying Kan Department It can be seen from the figure: when the target is positioned at the focal point of the Xianzhuo objective lens, the laser buccal year decreases, or the wavelength of light has the largest red shift; when the target leaves the focal point, the luminous beam increases ( The light wavelength is reduced). The calibration results of Gusan (a) are as follows: the resolution is 20 nm, and the measurable range is 11 μηι. ® ⑼ uses a broadband multi-pole dipole "laser, the measurement method is the same as above We have used two multiples of the apparent chains 10X and 60 ×, respectively, and obtained two different curves: Fang Xian represents 10 ×, and the circle points represent the results of 60 ×. The resolutions of both are negative. Dozens of nanometers (nm), and the measurable fan gardens are up to 16 °, 1 and 2 °, respectively. In order to prove the instant detection of the present invention Ability to set up a system such as «4. Among them, a wide-spectral multi-Chess diode laser (Zi D is used as a light source, and a beam splitter with an output light wave transmission coefficient of 90% per year (¾ IV 2) , Introduce a 60X (numerical aperture to 0.85) focusing objective lens (圏 四 3) to focus. The object to be measured is an aluminum mirror (明 四 4) on the I electric effect mover (Lansi 4 6), The aluminum mirror provides the reflective surface required for erbium feeding (Ke 4 5), and the piezoelectric effect mover is mounted on the electric control (Figure 4 I5) smart mechanical moving platform (Ke 4 7). The frequency measurement is used Optical position sensor system, when the light is emitted first, a UOOg / mm grating (Ke 4 9), the first dispersive light spot group speed mirror (Ke 4 10) focuses on the optical position sensor (Position Sensitive Detector Mingsi 11) the upper sensing position, the grating and the optical position sensor are 30 cm. Figure 4-8 is a spatial wave detector, which is a multi-pole multi-band dipole "the spatial chess state of the radiating high well is Gaussian. In the ground state, when focusing the speed mirror to focus the light beam on the optical position sensor, the minimum focus point can be obtained, which improves the sensitivity of the optical position measuring device The two currents of the optical position sensor are input to the signal processing circuit (Lan Si), and the voltage signal (Ming Si 13) is output after calculation. This signal represents the light wave buccal year. The real-time detection result is shown in Lian Wu. Using the 1KHzs angular wave spur piezoelectric effect mover for longitudinal scanning movement in space, the piezoelectric effect mover drives the target aluminum mirror on it to move, and it is proposed to measure the Θ displacement of the target when it is near the beam focus. At this time, the linear displacement of the target object in the vicinity of the light to the focus is used, and the standard NH 8 standard (CNS) f 4 specifications (210x297 male dragons) are used at the edge of this paper (please read the precautions on the back before filling this page) Equipped-'ΪΓ_ line 2128 ^ 9 5 Λ 6 13 6 Description of the invention () Represented by the triangular wave (hollow fixed point) shown in the stop five ⑻. Reading the size of the optical position sensor wheel signal can read the corresponding displacement of the target. The triangle wave shown by the solid back point in the fifth circle is the read displacement signal, which shows the result of real-time detection of the back and forth displacement of the target object, and the speed can reach the maximum sweeping inclination of the piezoelectric effect mover (about lkHz) . 0 The optical position _ response of the device is very fast. The system can be used for high-speed, real-time precision displacement measurement. The second feeling: (Γ == quasi ^ quasi-point interception ㈣ 五 ⑻ (please read the precautions on the back and then write this page), linear = dagger is angle ::. Calibration point pair, the resolution of the straight line is-installed -Line paper with line ruler _ Printed by an employee consumer cooperative of the Ministry of Economic Affairs