A6 B6 S〇3〇^i 五、發明説明（3) 〔産業方面之利用領域〕 本發明係與將雷射光束加以集光，對被加工物照射， 同時噴射加工氣體，以進行雷射加工之雷射加工頭有關者 Ο 〔以往之技術〕 圖5傜表示在例如日本特開昭63-273588號公報之以 往雷射加工頭之截面圖。圖中，1像雷射光束、2係將雷 射光束加以光學集光之加工透鏡、而3則係將加工透鏡2 加以固定，同時，以可向雷射光束1之軸方向往復移動狀 態内插於外筒4之移動固定器，在其側面尚形成有與後述 之蝸桿6相嚙合之齒形3a。5係馬達、6則係蝸桿；移動 固定器3即由馬達5中介蝸桿6及與蝸桿6嚙合之齒形3a 構成之蝸捍齒輪所驅動而移動，由該馬逹5,蝸捍齒輪構 成驅動移動固定器之驅動機構之驅動部。7係密封材料， 兼具後述之加工氣體9之密封及移動固定器3之導件之作 用者。8偽噴嘴，具備有將加工透鏡2所集光之雷射光束 1照射在被加工物10之噴嘴端8a,同時，亦具備有對噴嘴 端8a供應針對被加工物10噴射之加工氣體之加工氣體供應 口 8b。另外，2a、2b表示加工透鏡2可移動範圍内之位置 ,而相對應之雷射光束1其焦點位置則以1 1 a、1 1 b表示之 〇 其次就其動作說明之。雷射光束1偽由加工透鏡2進 行光學的集光後照射在被加工物10。至於，加工氣體9 , 以切割鋁片之情形而言，一般均使用乾燥空氣，係與噴嘴 本紙張又度適用中國國家標準（CNS)甲4規格（210 X 297公坌） -------------------------裝------，玎------線 (請先閱讀背面之注念事項再塡寫本頁) 經.濟部中央標準局員工消費合作社印製 2〇3〇这 A6 B6 經濟部中央標準局員工消費合作社印製 五、發明説明（4 ) 8之前端8a所集光之雷射光束1共同在同軸上噴射於被加 工物10。 其次，就每一加工順序之動作説明之。加工透鏡2位 於位置2 a上，而其焦點位置1 1 a則位於被加工物1 0其表面 之位置，在加工開始點首先開始穿孔（P i e r c i n g )動作。一 旦穿孔完成，則無圖示之數值控制裝置即發出控制訊號以 驅動馬逹5,再由馬達5中介蝸桿齒輪驅動移動固定器3, 移動向被加工物側。而加工透鏡2則移動至位置2b,其焦 點位置11 b則處在被加工物1 0其下面側。 而以穿孔為基點之雷射加工即在該焦點位置1 1 b進行 。此時，加工氣體壓力必須具有可將雷射能所溶融之金屬 吹散至被加工物10之下面之力，因此，噴嘴8之内部氣體 壓力即選定於極高壓力，諸如5kgG/cm2〜9kgG/cra2之值。 因此，圖中附有X符號之A部即遭受高壓之加工氣體 壓力。例如，以加工透鏡徑50mm,加工8kgG/cm2之加工氣 體壓力時而言，由於保持加工透鏡2之移動固定器3之外 徑約為70mm，故因上述加工氣體壓力而移動固定器3被壓 向雷射光束1其入射側（圖面上之上側）之推力即有約 300kgf。因此，構成驅動部之組件，亦即，驅動移動固定 器3移動之馬達5或蝸桿6等即必須為可發生超過此力以 上之推力.，且能抗拒此力之零組件。 因此，馬逹5勢必具有較大容量，而由馬達5或蝸桿 6等構成之驅動部亦隨之大型化，價格昂貴。 〔發明要解決之問題〕 ------------------------裝------ΤΓ------線 (請先閱讀背面之注意事項再塡寫本頁) 本紙張尺度適用中國國家標準（CNS〉甲4规格（210 X 297公釐） 4 2030S1 Λ 6 Η 6 經濟部中央標準局貝工消費合作社印製 側受加述所 驅 雷固之述體上有塞噴 加嘴部，分 嘴備之上等 供 持動動上氣；具活述 射噴端積部 噴,-'即射動桿 提 保移移之工部 ，狀上 雷與之面一 述部噴驅蝸 於 、之復光加溝端環向 之有器壓出 上端物令或 在 筒筒往集之之 一述其 明具定受分 故器 工生達 的 外外向被應狀之上將 發偽固體， ，定加産馬 目 ：述方將供環側.，力 項塞動氣中 成固被致由 其 有上束 ，被有射塞壓 1 活移動體 構動述以 ，。， 備於光端將具入活之 第狀之驅氣 述移上 ，動題者 具插射一亦側束狀體 即環鏡之工 上之向大移問作 。 偽内雷筒 ，内光環氣 亦之透大加 有鏡嘴較復之所者 ，，述外時其射之動 ，器工等之 具透噴比往等題頭 頭時上述同在雷部驅 .頭定加略嘴 頭工 自力向型問工 Η 同向上 -筒述溝之 工 固述約噴 工加 ，壓方大述加 加 ，器於物外上狀部 加動上積於 加述應推束較上射 射鏡定設 Η 述於環溝 .射移持面應 射上供該光比決雷 D 雷透固配加上成之狀 雷於保壓供 雷持所且射得解之段之工動 ，被.，形筒環 之成及受自 於保口 ，雷變為型手明加移及在嘴偽外述 明形鏡體係 卩由及應壓向構偽小之發用述以射噴器述上 。發 ，透氣則 鏡供推器機明較題項光上 、照之定上予者項中 工工體 ξ 往透體之定動發比問 1 集令構束射固於應壓 2 其加加氣 έ 以 Η 氣體固驅本構決第束 、機光噴動入供推第 ，由之動 ^ 加工氣動成 機解 光器動射以移插由側 頭之成驅 ^ 之加 工移構 動 t 射定驅雷加述可則嘴 工側構而 (請先閲請背面之注意事項再蜞寫木頁) 本紙張尺度逍用中國Η家標準(CNS)甲4規格(210x297公龙） 5 ,030^ 五、發明説明（ Λ 6 Η 6 經濟部中央標準局貝工消費合作社印製 ..........................^.....^·· · · λ.......................... (諳先閲讀背面之注意事項再填寫木頁) 射之具其 雷上外之在嘴述 射噴部體 。射缸亦體 雷塞亦體 持向述動射噴上 雷與端氣者雷體中氣 之活中氣 保可上移照之將 之傺器動應之氣管動 明狀管動； ，於復束射 ， 。明和定驅供明為配驅 發環配驅 筒筒設往光噴應者發總固 ，而發充之述 項為之述 外外配向射以供缸項之動時分項 ，嘴上 。 1 充嘴上 。：述；方雷加之體 4 積移同部 4 分噴較者 第*·噴較者有上 器束述體體氣第面之 ，一第部至至閥 如分至至閥備於定光上氣氣之如壓鏡小出如一 ，低之 卽部 ，低之具插固射令工動壓即受透大分即出後降壓 亦一後降壓俱内動雷 ，加驅推亦體工同 ，亦分技力差 ，出技力差 ，，移述端之由以 ，氣加相中 ，體分壓予 頭分分 E 予頭時之上一應藉加頭動述致體頭氣，體賦 工體 ，體賦 工同動向筒供 -向 Η 驅上大氣工工管氣便 加氣管氣便加 ，移器外所筒方加之持積 Η 加加配工以 射 工配工以射鏡復定述將外嘴射缸保面加射將之加 ， 雷加之加 ，雷透往固上亦述噴雷體及壓之雷可應之值 之有應之值之工向動於 ，上述之氣鏡受嘴之有供嘴之 明備供嘴之明加方移設時於上明 ，透體噴明備以噴低 發具以噴低發用之述配同設向發中 Η 氣於發具予予為 。項僳予予為項光束上； ，配器項其加工應項偽體應力 者 3 , 體應力 4 集光令構物 -定 5 ,由加供 6 , 氣供壓 應第頭氣供壓第束射可機工及固第頭.之之.自第頭動令髏 供工動令體 光雷 ，動加以動 工側成係 工驅有氣 以加驅有氣 射述筒驅被.，移 加嘴構則 加之具其 本紙張尺度逍用中Η Β家標準（CNS)甲4規格(210x297公;¢) 6 Λ 6 Η 6 五、發明説明（乃 〔作用〕 經濟部中央標準局ΗΧ工消费合作社印製 ，復射 工端應 。由所上致側 。充至較 ，移在物 ， 鏡往照加末供壓偽體持大嘴者 ，後至 鏡復射工應 透向束被側由推塞氣保積噴衡分技節。透往照加供 工 方光在射則側活動及面對平部分調者工向束被之 加束射射入塞嘴狀驅鏡壓體得一於力壓加方之在體 持光雷噴束活噴環之透受氣取出入壓差持束射射氣 保射.述體光狀述之應工體工致分插體予保光雷噴動 。 以雷前氣射環上器供加氣加大體 ，氣賦以射述饈驅者 用向將 工雷之向定而由工與力氣途 Η 以用雷前氣由壓 令器偽加述部其固分之加能壓 工中加 -令向將 Η 藉推 傜定嘴之上 溝將動部側之 乃推加管之值像器像加僳向 構固噴應之狀力移一嘴成力之將配嘴之構定嘴之則方 機動之供器環壓於出噴構壓部於之噴低機固噴應缸嘴 動移端所定之體成分與端推端俗應予更動動之供體噴 驅之一將固筒氣形體積器來器閥供應力驅移端所氣述 : 筒筒亦動外動：氣面定帶定：體供壓：之一將之上 中外外 ，移述驅中 工壓固體固中氣將體中筒筒亦筒向 明於述時述上之明加受動氣動明動 ，氣明外外 ，外器 發插上同上在部發之體移動移發驅中之發於述時述定 項内於 ，於成溝項嘴氣之驅及項其管體項插上 同上固 1 傜設物成形狀 2 噴動鏡述鏡 3 塞配氣 4 内於 ，在動 第亦配工 形於環第予驅透上透第活之動第亦設物設.移 於 ，；加而入述於應 ，工 ，工於狀間驅於 ，配 工配述 時動被.，插上 供壓加等加 環嘴述 時.，加而上 同移在物 ，予 自推述同之 為噴上 同動被.，將 (請先閲讀背面之注意事項再填寫木頁) 本紙張尺度边用中Β Η家樣準（CNS)甲4規格（210x297公龙) 7 Λ 6 Π 6_ 五、發明説明（8) 於第5項發明中：氣體缸偽由自供應於噴嘴之加.工氣 面定 壓固 受動 體移 氣之 動鏡 驅透 ,Η 壓加 Αε ,ΛΛ» 推述 所上 捿 時 Mflo ·-*-: 氣保 動及 驅鏡 之透 應工 供加 而由 分之 部側 1 嘴 出噴 分與 體積 帶定 體固 氣動 β 移 驅及 述鏡 上透,Η 等加 同之 致側 大嘴 積噴 面對 壓體 受氣 體 Η 氣加 工與 加能 之乃 成力 構壓 端推 器來 充 分 部1 出 分 體 氣 Η 。加 者 自 衡於 平偽 得閥 取 ： 致中 大明 力發 壓項 推 6 之第 部於 端 器 噴上 至較 後至 技節 分調 。 於力者 入壓壓 插體差 , 氣予 途工賦 中加以 管之 ， 配嘴值 之噴之 應予低 供應更 體供壓 氣將體 動 ，氣 驅中之 其管體 缸配氣 體之動 氣間驅 為嘴述 例 施例 實旃 C 奮 同 〇 件 例組 施該 實之 一 中 之例 明往 發以 項與 1 係 第乃 明者 說示 1 表 圖號 依符 , 同 〇 下例件 以往組 以之 與等 中 圖 同 或 像向 3 I 1 可 ，以 中 ， 圖時 〇 同 圖 ， 面 2 截鏡 之透 成工 構加 其用 頭光 工集 加之 射 1 雷 束 示光 表射 傺 雷 1持 圖.保 以 用 (請先間讀背面之注意事項#璜寫木頁) 裝· 線· 經濟部中央標準局貝工消费合作社印製 mm 移移 下於 上成 向形 可傜 係3a 中1 圖 ; 器 在Μ ί 定 動固 移 動 復.移 往之 1 4 向 1 方筒 軸 外 之述 1 後 束於 光插 射内 雷 態 而筒 夕 齒偽 之14 合 〇 嚙塞 相活 6 狀 桿琛 蝸之 與端 • 1 面13 側器 13定 器固 定動 筒 器.3外 之 定 J於 固13成 動塞形 移活於 有狀插 插環内 内其態 3 尺 , 1 狀 〇〇 器動 嘴定滑 噴固可 溝 狀 環 之 本紙張尺度逍用中國國家標準（CNS)甲4規格(210x297公龙) 狀 固 移 於 成 形 係 則 有 定 固 端 1 其 在 動 移 • tm 插 内13 有塞 成活a, 形狀14 亦環溝 ,ο 狀 時4a環 同：：之 以 傜 型 ο 由 並 8 .rl CQ ο 3 ο 2 6 6 Λ Π 部 ,·-'外 由 體 氣 驅 之 b 3 1X 塞 活 狀 環 〇 動 者驅 封以 } 密用 (9以為 明加充 説17係 明 5 發 、1 、16 五環 等 氣 空 廠Η 如 例A6 B6 S〇3〇 ^ i 5. Description of the invention (3) [Utilization field of the industry] The present invention is to collect laser beam, irradiate the workpiece, and spray processing gas to perform laser processing. Related to laser processing heads Ο [Conventional technology] FIG. 5 shows a cross-sectional view of a conventional laser processing head in, for example, Japanese Patent Laid-Open No. 63-273588. In the figure, 1 is a laser beam, 2 is a processing lens that collects the laser beam optically, and 3 is a processing lens 2 that is fixed, and at the same time, it can move back and forth in the direction of the axis of the laser beam 1. The moving fixture inserted into the outer cylinder 4 has a tooth shape 3a meshing with a worm 6 described later on its side. 5 series motors, 6 are worms; the moving fixture 3 is driven by the worm gear formed by the motor 5 intermediary worm 6 and the tooth shape 3a meshing with the worm 6, and driven by the horse 5 and the worm gear The driving part of the driving mechanism of the moving fixture. 7 is a sealing material, which has both the sealing of the processing gas 9 described later and the role of the guide of the moving fixture 3. 8 Pseudo-nozzle, equipped with the laser beam 1 collected by the processing lens 2 to irradiate the nozzle end 8a of the workpiece 10, and also has the processing of supplying the processing gas sprayed to the workpiece 10 to the nozzle end 8a Gas supply port 8b. In addition, 2a, 2b represent the position within the movable range of the processing lens 2, and the focal position of the corresponding laser beam 1 is represented by 1 1 a, 1 1 b. Next, the operation will be described. The laser beam 1 is optically condensed by the processing lens 2 and then irradiates the workpiece 10. As for the processing gas 9, in the case of cutting aluminum sheets, dry air is generally used, and the paper and the nozzle are also applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 gong) ----- -------------------- installed ------, 玎 ------ line (please read the notes on the back before writing this page ) Printed by the Ministry of Economy, Central Bureau of Standards, Employee and Consumer Cooperative 2030. A6 B6 Printed by the Ministry of Economy, Central Bureau of Standards, Employee and Consumer Cooperative V. Invention Description (4) 8 Laser beams collected at the front end 8a 1 Common The workpiece 10 is sprayed coaxially. Next, the operation of each processing sequence is explained. The processing lens 2 is located at the position 2 a, and its focal position 1 1 a is located at the surface of the object 10 to be processed, and the perforation (P i e r c i n g) action is first started at the processing start point. Once the perforation is completed, the numerical control device (not shown) sends a control signal to drive the horse 5 and the motor 5 drives the moving fixture 3 through the worm gear to move to the workpiece side. The processing lens 2 moves to the position 2b, and its focal point position 11 b is on the lower side of the object 10 to be processed. The laser processing based on the perforation is performed at the focal position 1 1 b. At this time, the processing gas pressure must have a force that can blow the metal melted by the laser energy under the workpiece 10, so the internal gas pressure of the nozzle 8 is selected at an extremely high pressure, such as 5kgG / cm2 ~ 9kgG / cra2 value. Therefore, the part A with the X symbol in the figure is subjected to high-pressure processing gas pressure. For example, when the processing gas pressure is 50 mm and the processing gas pressure is 8 kgG / cm2, the outer diameter of the moving holder 3 holding the processing lens 2 is about 70 mm, so the moving holder 3 is pressed due to the processing gas pressure. The thrust to the incident side (upper side in the drawing) of the laser beam 1 is about 300 kgf. Therefore, the components constituting the driving part, that is, the motor 5 or the worm 6 that drives the movement of the fixed holder 3 must be a component that can generate a thrust force exceeding this force and can resist this force. Therefore, the horse 5 is bound to have a larger capacity, and the drive part composed of the motor 5 or the worm 6 is also enlarged, and the price is expensive. [Problems to be solved by the invention] ------------------------ install ------ ΤΓ ------ line (please read first (Notes on the back and then write this page) This paper scale is applicable to the Chinese National Standard (CNS> A 4 specifications (210 X 297 mm) 4 2030S1 Λ 6 Η 6 The print side of the Beigong Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs is added The body of Leigu, which is driven by the state, has a plug spray and a mouth, and the mouth is divided into upper parts for holding and aspirating; In the Ministry of Engineering, there is a device on the surface of the thunder and the surface of the spray drive snail is on the side of the compound light and the grooved end of the compound light is pressed out of the upper end of the order or the one of the barrel is set to the set. Gong Shengda's outward and outward response should be pseudo-solid, and it will be added to the horse head: the side will be supplied to the ring side. The force item is blocked in the air and the solid is caused to have a beam and a shot. Press 1 to move the moving body to a state of motion ,, prepared at the light end to move the driving state of the moving state into the moving state, and the subject has a direction to insert a side beam-shaped body, that is, the ring mirror. Da Zhiwen asked. Pseudo inner detonator, the inner aura also shines through For those who have more complicated mirror nozzles, the shooting movement when they are described, and the penetration rate of tools and other tools are similar to those in the thunder department when they are waiting for the head. The head is fixed and the mouth worker is independent. The work is the same as the upper direction-the work of the tube is fixed, the spray is added, the pressure is large, and the device is applied to the upper part of the object. The product is added to the add, the beam should be pushed, and the beam is set higher than the upper shooting mirror. Ditch. The shot transfer surface should be fired at the section where the light is compared to the Thunder D Thunderbolt, and the shape of the thunder is kept at the holding pressure for the Thunder Hold and the shot is resolved. And from the protection of the mouth, Lei changed the shape of the hand and added the movement, and the description of the clear mirror system in the mouth pseudo and the pressure should be described by the sprayer. The hair, the breath is the mirror. The pusher machine clearly compares the item on the light, and according to the set item, the worker body ξ sends a fixed motion to the penetrating body 1 set the beam to be fixed at the pressure 2 and it is aerated with Η gas solid drive This configuration determines the first beam, the mechanical light is injected into the supply and the first is driven by the movement ^ processing pneumatic into the machine de-aerator moving to insert the driving driven by the side head ^ the processing shifting mechanism t shooting fixed mine Ke Zui Gong Structured (please read the precautions on the back and then write the wooden page) The paper size is easy to use Chinese Η family standard (CNS) A 4 specifications (210x297 male dragon) 5,030 ^ V. Invention description (Λ 6 Η 6 Printed by the Beigong Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs ...................................... ^ ··· λ. ......................... (Read the precautions on the back before filling in the wooden page) Spray body. The shooting cylinder is also the body, and the plug is also held to the moving body. The live gas guarantee that can spray the thunder and the gas of the body of the person who can breathe can be moved upwards. Beam shot,. Minghe Dingfu supply Ming is equipped with a distribution ring, the distribution cylinder is set to send light to the person who sends the light, and the charge description is the description of the external and external directions for the movement of the cylinder item, the mouth. 1 Fill your mouth. : Narration; Fang Leijia's body 4 volume shifts in the same part 4 points sprayer No. * · sprayer has upper device beams to describe the body's gas, the first part to the valve is divided to the valve is prepared on the fixed light Qi is as small as a pressure mirror, as small as a low mirror, and low as a fixed part, the low pressure with a fixed injection makes the dynamic pressure of the machine be affected by the big score, and the pressure will be lowered after the pressure is released. At the same time, it is also divided into poor skill, poor skill, and the reason for the transfer statement. In the gas phase, the body pressure is divided into the head and the point E is divided into the head. , Body work body, body work work in the same direction to the cylinder supply-to the Η drive on the atmospheric worker to add gas to the tracheal gas, and add the holding product to the cylinder outside the device. The mirror recapitulates that the outer nozzle shooting cylinder will be added to the surface and the shot will be added, the light will be added, and the thunder will be fixed. The above-mentioned gas mirror is subject to the opening of the mouth, and the opening of the opening of the opening is in the upper clear. The transparent body is sprayed with a low hair sprayer. Yufa Yuyu. Xiang Suyu is on the beam of the item; the orbiter ’s processing should be based on the pseudo-stress 3, the body stress 4 and the light collection structure-fixed 5, from the supply 6, the gas supply pressure should be the first gas supply pressure beam Machine mechanics and Gudi head. No. from the first head movement to supply light to mine, move to the side of the system to form a gas drive to drive the gas to drive the cylinder drive. In addition, with its original paper scale, the standard Η Β home standard (CNS) A 4 specifications (210x297 g; ¢) 6 Λ 6 Η 6 V. Description of the invention (it is [Function] Printed by HX Industrial and Consumer Cooperatives, Central Standards Bureau, Ministry of Economic Affairs System, the re-shooting end should be. From the upper side. Charge to the object, move the object, the mirror to the end of the pressurization and press the pseudo-manipulator with a large mouth, then to the mirror re-shooting should be penetrated to the side of the beam. The air-saving and gas-spraying balance technology festival. The light is transmitted to the side of the light and the worker is facing the flat part of the adjuster. The light beam is shot by the beam and injected into the plug-shaped driving mirror to press the body. The permeable gas of the live beam ring of the on-body holding lightning beam is taken out into the differential pressure holding beam to protect the beam. The body light should be inserted into the body to protect the light beam. mine The upper device of the front gas injection ring is for energizing and enlarging the body, and the gas is used to shoot the target of the driver to set the direction of the working mine and then the work and the strength of the way. In addition, the pressure can be increased in the process-the direction will be pushed by the groove above the mouth, and the side of the moving part is the value of the push tube. The image is like the force applied by the nozzle to the solid structure. Press the configuration of the nozzle to the nozzle, and press the power supply ring to the outlet of the spray structure. The low-solid spray should be changed according to the body composition and the end of the cylinder. One of the body spray drives will drive the solid cylinder gas volume volume to the valve to supply the drive end. The cylinder also moves externally: the gas surface is fixed and the belt is fixed: the body supply pressure: one will move above, outside, and outside. In the process of driving, working pressure, solid, solid, gas, the body, the cylinder, the cylinder, and the cylinder, the cylinder is added to the Ming, and the pneumatic is actuated. The air is outside, the external device is inserted, and the body is moved as above. Issued in the statement is within the fixed term, inserted into the groove of the mouth of the mouth and the pipe body of the item is inserted into the same as above 1 solid object shape 2 spray mirror description mirror 3 plug gas 4 inside, On the move Yuhuandi pre-dispersed and translucent first-acting moving objects are also set. Moved to; add to the description of Ying, work, work between the state drive, when the workman is equipped with the description, move to be. When pressing and adding the ring mouth, add it and move it in the same thing, and pretend that the same is sprayed with the same motion quilt., Will (please read the precautions on the back before filling in the wooden page). Use the standard of the Β Η home sample (CNS) A 4 specifications (210x297 male dragon) 7 Λ 6 Π 6_ V. Description of the invention (8) In the fifth invention: the gas cylinder is supplied from the nozzle by the pseudo. Surface fixed pressure is driven by the moving mirror of the moving body, the pressure is increased by Δε, ΛΛ »The above description is based on the time of Mflo ·-*-: The transmission of the gas-protected and driven mirror should be supplied by the division and divided by parts. Side 1 nozzle outflow volume and fixed volume solid-solid pneumatic β-shift drive and mirror transmission, Η and so on, so that the side big mouth product jet is pressed by the gas Η gas processing and energization is a forceful structure Press the pusher to fully release the split gas Η. In addition, the self-balanced value of the valve can be taken as follows: the pressure part of the Zhongming Daming Force pushes the 6th part to spray on the end device until later to the technical section. When the force is low, the pressure is inserted into the body poorly, and the gas should be piped in the way. The spray with the mouth value should be given to the low supply and the body should be supplied with pressure to move the body. The gas cylinder is equipped with the gas. Inter-drive for the mouth to describe the example of the implementation of the example C perseverance 〇 set of examples of the implementation of one of the examples in the past and the first and the first series of the person who said that the 1 table number according to the same, the same as the following example The previous group can be the same as the same image or the image direction 3 I 1, in which the image is the same as the image, the transmission structure of the surface 2 truncated lens plus its head light work set plus the 1 beam Table shot Ye Lei 1 holding a picture. Guarantee for use (please read the precautions on the back side # 络 写 木 页) Installation · Line · Printed by the Ministry of Economic Affairs Central Standards Bureau Beigong Consumer Cooperatives mm moved down to the upper direction Keyi is a picture of 3a in 3a; the device moves in a fixed and fixed state at Μ ί. Move to the 1 4 direction 1 to the axis of the square cylinder. 6 phase rods and the end of the worm • 1 side 13 side device 13 stator fixed moving cylinder. 3 outside fixed J Yugu 13 The movable plug moves in a state of 3 feet in the shape of the tangible insertion ring, and the shape of the paper is fixed with a movable nozzle, fixed and sprayed, and the grooved ring is used. The paper standard is free to use China National Standard (CNS) A 4 specifications (210x297 The male dragon) has a fixed fixed end in the shape-fixing system. 1 It is moving • tm is inserted. 13 is plugged into alive, the shape 14 is also a ring groove, and the shape is 4a. The ring is the same :: it is in the shape of 傜 type. 8 .rl CQ ο 3 ο 2 6 6 Λ Π part,-'' is b 3 1X which is driven by the body gas, and the plug-and-loop ring is used to drive the seal to} secret use (9 think Ming Jiachong said 17 series Ming 5 Gas, air plants such as Wufa, No.1 and No.16 H as examples
2 鏡 透Η 加 示 表 部 體 A 氣之 之號 應符 供 X 肋 • lit 中移 圖之 ο 2 者鏡 力透 壓工 其加 制該 控持 可保 , 及 面 壓 受 體 氣 Η13 加塞 之活 面狀 端環 側示 〇〇 表 嘴偽 噴則 之部 3 nD 器之 定號 固符 X 中 圖 而 體 氣 iM 驅 來 輸 部 外 受 之 之工 往加 以 ， 與時 於工 由加 則 射 法雷 方行 工進 加 ， 射 中 雷 1 於圖 關於 0 0 作略 。動省 面明予 壓說故 受 ， ， 之下同 力以相 壓 法 5 -1 方 5 之 在 2 定鏡 選透 即 工 力加 壓該 體持 氣保 之及 内 2 8 鏡 嘴透 噴工 . 加 内在 8 , 嘴此 噴因 入 Ο 進2® EP/C G 9 S 體9k 氣 ~ 壓 受 之 力13 壓塞 9 活 體狀 氣環 工將 加生 受産 上即 面部 端 A 側之 8 號 嘴符 噴 X 之中 3 Ϊ 1 圖 器 ， 定即 固亦 動 ， 移面 圖 向 (請先閲讀背面之注意事項再填寫木I) 裝· 時 同 之 ο 9 力體 推氣 之工 壓加 推加13 側外塞 上與活 上 狀 面 環 溝 狀 環 其 4 11 筒 外 由 Μ a 體 氣 部 外 之 5 髏 氣 sB,Ttt 35 驅 有 加 外 亦 室 小 之 成 構 線. 經濟部中央標準局貝工消f合作社印製 氣面 空壓 廠受 工之 如15 例體 塞 活 狀 環 此 因 X 中 圖 即 氣氣 驅驅 之該 來於 部 由 外即 受部 承 B b - 3 之 1L 號 符 等 抗 13阻 塞 、 活擦 狀摩 環之 將部 可動 生驅 産鏡 而透 加工 rr nu 夕 力 之於 15視 體無 果 如 〇 力 丨1£ 推 之 壓 下 向 有 即 上 部 肋 驅 則 與 )-ί右 力 ， 壓即 體亦 氣 〇 工上 加加 /IV 力 壓 積之力 ®Λ)βΗ 加 力 壓 體 (Α氣 部 外 積 面 之 部2 Mirror penetrating Η plus the symbol A of the watch body should be used for the X rib • lit in the shift map. 2 The mirror force penetrator can be controlled by the addition of the control, and the face pressure receptor gas Η13 is plugged. On the side of the live surface end ring is shown as the part of the pseudo nozzle of the nozzle. 3 The number of the nD device is fixed. The middle of the nD device, and the body iM drives the work received from the outside of the department, adding time to work. Then the shot of the minefield will be carried out, and the shot of mine 1 will be omitted from the picture about 0 0. The reason for this is to understand the prestress, and use the same pressure with the phase pressure method 5 -1 side 5 in 2 fixed mirror selection, that is, work force pressurize the body to hold the gas and the inner 2 8 lens nozzle through spray Work. Plus inner 8, the mouth is sprayed with Ο into 2® EP / CG 9 S body 9k gas ~ pressure force 13 pressure plug 9 living body gas ring worker will be born on the face side of the A side 8 The 3 Ϊ 1 imager in the nozzle spray X, which is fixed and moving, and the direction of the face (please read the precautions on the back and fill in the wood I). The time is the same. 9 The pressure of pushing the air Plus push plus 13 on the outer plug and on the upper surface of the ring-shaped groove ring 4 11 outside the cylinder by the 5 corpuscle sB outside the body part of the body, Ttt 35 is driven by the outside and the room is a small structural line. Economy The Ministry of Central Standards Bureau Beigongxiao F cooperative printed gas surface air compressor factory was working like 15 cases of body plug living ring. Because X is in the picture, that is, gas and gas drive. -The 3L 1L symbol and other anti-13 blocking, movable wiper ring will move the lens to drive the lens, and through the processing of rr nu Xi Li is 15 eyes The body has no fruit, such as a force 丨 1 £, the push is pushed to the upper rib drive, and the right force is pressed, the pressure is the body and the gas is added, the force is added / IV force, and the force of the pressure product is Λ) βΗ Pressure body
X } 較 X 積比 丨面相 之形 部情 之 ? 往 B 將 A ___. 之 部 ^^ ik 驅 在 加 力 丨·"·* 推 X 之X} Compared to the product of X 丨 The shape of the face? To B, the part of A ___. ^^ ik is driving in the force 丨
A /«V 本紙張尺度逍用中Η Η家標準（CNS)甲4規格（210x297公龙） 9 2030S1 Λ 6 Η 6 五、發明説明α 〇 )時，該推力即可由（Β部之面積）Χ(外部氣體壓力）之推力 些推 大生 得産 計所 設 9 能體 不氣 積工 面加 部使 B 力 之壓 號之 符15 X 體 ，氣 因動 原驅 上整 造調 構可 。於亦 低由則 減 ， 所 時 射 雷 其 2 鏡 透 Η 〇 加 零在 為頭 成 Η 差.加 之射 力 雷 推之 生 示 産所 所 1 5 J 1 圖 體 ， 氣述 動上 驅如 與 力 之 動 Κ 與 Ϊ 趴可* 環b"性 由13槭 有塞機 備活行 具該進 側成部 射設動 入 ，驅 束室其 光小13 經濟部中央標準局貝工消費合作社印製 (請先閲讀背面之注意事項再填寫木頁) 5 I 成 f定 固 13動 塞移 活 ， 之 即 狀亦 環 ， 與鏡 4a透 之 nu, 動 器 驅 構 h 上 国 加 室 小 述 前 對 部 外 自 Γ 溝 Η 加 b 2 13鏡 塞透 活工 狀加 環於 在生 , 産 此 ， 因來 , 帶 成所 構力 之壓 壓體 體氣 氣工 力 之 力 壓 之 用 所 敷 足 可 即 者 小 為 例 往 側以例 0〇 較旃 嘴遠窨 加噴成 消< 抵 可 生 産 即 上 側 物 Η 加 被 其 設 力 丨|… 推 生 發 之 部 動 0 述 上 將 而 圖體 。氣 例 Η 施加 實 ， 一 中 之圖 明 〇 發圖 2 面 第截 明之 說頭 2 工 圖加 依射 , 雷 下之 以例 施 實 2 9 2 嗔 第對 係偽 8 塞 活 嘴狀 時 同 應 供 筒 外 與 環設 由配 予 僳 應則 i、 oo » ο 技室 分 小 以之 D 力成 體 氣 ΤΠΒΠ 驅 為 充 亦 溝 狀 環 其 構 a 時 較 比 相 者 示 所 1X 〇 圖 閥與 之頭 中 土 管加 配 射 之 雷 8 之 嘴示 噴所 至中 後 2 技圖 分將 自 於 圖 與 3 J 1 均 塞造 活構 狀他 環其 由 ， 予外 體管 氣配 動之 驅室 應小 供之 除成 奪 梢 B 4 iA 溝 狀 環 其 4 1i 筒 LT 夕 Μ 狀 環 但 ο 同 相 者 鏡 透 Η 加 與 積 面 壓 受 體 氣 mn 驅側 之 8 3b嘴 1噴 塞 { 活側 面 物 Η 被 之 2 器 定 固 移 及 面 鏡 透 Η 加 之 受 鐙 0QB 氣 Η 加 之 本紙張尺度边用中國Η家標準（CNS)甲4規格（210x297公龙） ο 1Χ 五、發明説明d l) 壓面積之和則將其設成大致相同者。 態 狀 開 全 013持 作塞保 動活18 ΠΕΙΙ 9yt 1J 之狀閥 2 環之 圖由中 明予管 說應配 , 供 ， 次 ,者 其技室 分小 以之 體 氣 工 加 將 僳 例 施 實 該 筒 外 與 溝 狀 環 構 a 加成 P 入 出 其 在 生 發 之 部 ·='·Β1Τ> ΠΒΠ 驅 鏡 透 Η 加 成 構 在 加 5 〇 逹 度馬 程之 之部 視動 無驅 可之 在13 失器 損定 力固 壓動 之移 果 如 力 LS·* 推 之 等 6 桿 蝸 壓 體 氣 Η 加 /[\ , X 積 )}面 積部 •.面 A 為之之 則部號 抗 β 符 阻 X 擦)-中 摩積式 之面述 構之前 έΰ 機部 , 動 此 驅 { 因 視 無 8 嘴 噴 在 即 亦 之積 面 面 端之 13部 器 B 定之 固號 動符 移 X 之 ， 2 及 鏡以 透 ， 工和 加之 持積 保面 與壓 2 受 鏡之 透 9 Η 體 加氣 之工 側加 體 氣 Η 加 與 13以 塞藉 活可 狀即 環 ， , 時 即積 亦面 , 同 相 約 大 成 設 其 將 者 兩 積 面 壓 受 之 使 關 無 肋 變 之 力 壓 之 (請先閲讀背面之注意事項孙填寫本页) 裝. 器述 定上 固如 g,^^ 33 移 受 之 ο b 零13 為塞 成活 約狀 大環 力將 推偽 之頭 側 工 上加 之射 上 雷 面示 圖所 對 2 其圖 線. 經濟部中央標準局貝工消費合作社印製 ^ 9 成 側體設 面氣則 物工髏 工加氣 加之動 被物驅 之造且 2 構 ， 鏡之者 透持同 工支相 加所為 與其成 積及 _ 面面大 壓鏡成 嘴 噴 側 壓工 受加 之 自 透設技 Η 和分 加之中 之積體 —面氣 工抵 加被 之乃 加荷 外負 與之 即部 I 動 時驅 工其 加鏡 於透 , Η 此加 因對 > t 者關 成無 構 動 之變 應力 供壓 分之 部體 1 氣 以體 較氣 遠之 成來 設輸 力部 推外 生替 發代 之亦 部體 動氣 驅動 述驅 上 ， 將時 而同 » ο 零可 為即 成小 約為 大者 ，例 消往 等 管 配 體 氣 置 設 外 另 必 不 故 髏 氣 Η 加 用 使例 而摘 , 奮 本紙張尺度逍用中國國家標準（CNS)甲4規格（210x297公龙) 11 iiA / «V This paper scale is used in the middle of the Η Η family standard (CNS) A 4 specifications (210x297 male dragon) 9 2030S1 Λ 6 Η 6 5. Description of invention α 〇), the thrust can be determined by (B area) The pushing force of Χ (external gas pressure) pushes some of the big energy to be set up in the production plan. The addition of the energy-free gas accumulation face makes the pressure of the B force equal to the 15X body, and the gas can be restructured on the original drive. Yu is also low, it is reduced by the time, when the mine is fired, its 2 mirrors penetrate Η 0 plus zero, which is the difference of the head. In addition, the shot of the laser thunder pushes the display factory 1 5 J 1 With the power of Κ and Ϊ, it is possible to circulate the ring b " sex by 13 maple with a stopper equipped with a walking gear. The entrance side is set into a part, and the drive room is light. 13 The Ministry of Economic Affairs Central Standards Bureau Beigong Consumer Cooperative Printed (please read the precautions on the back and fill in the wooden page first) 5 I into f fixed 13 moving plug move, which is also like a ring, nu through the mirror 4a, actuator drive h Shang Guojia room small As mentioned before, the outer part of the part is added to the Γ groove Η b 2 13 lens plug through the active ring and is applied to the living, therefore, the pressure of the body with the pressure of the body is made with the force of the structure. The applied foot can be small as an example. To the side, for example, 0. To the far side of the mouth, add a spray to eliminate it. It can produce that the upper side object Η is added by its force 丨 | ... Push the hair to move the part 0 And the figure body. The gas example Η is applied, the picture in the first one is shown in the picture 2 and the first section is the clear head 2 the work picture plus the shot, the example under the thunder is applied in the case of 2 9 2 嗔 第 对 系統 8 The same as when the mouth is plugged The outside of the cylinder and the ring should be provided by Su Yingzhi i, oo »ο The technical room is divided into small ones. The force of the adult body gas is filled with a trench-shaped ring. The structure a is compared with the one shown in Figure 1X. The valve and the head of the earth pipe plus the thunder 8 of the mouth show the spray to the middle and back. 2 The technical points will be from the picture and 3 J 1 are both plugged to create a living configuration for other reasons. The driving chamber should be replaced by a small supply B 4 iA grooved ring and its 4 1i tube LT evening M shaped ring but ο the same phase mirror through Η plus accumulative surface pressure receptor gas mn on the drive side 8 3b mouth 1 spray plug {The living side object Η is fixed and moved by two devices and the mirror is transparent Η plus the stirrup 0QB gas Η plus the paper scale side uses the Chinese Η family standard (CNS) A 4 specifications (210x297 male dragon) ο 1Χ V. Description of invention dl) The sum of the pressure areas is set to be approximately the same. The state is open and full 013 is held as a stopper. 18 ΠΕΙΙ 9yt 1J The state of the valve 2 ring diagram is managed by Zhong Ming said that it should be equipped, supplied, and secondly, its technical room is small, and the physical work is better. Implement the addition of the groove to the groove-shaped ring structure a. P into and out of the part where it grows. = '· B1Τ> ΠΒΠ drive lens through the Η addition structure at the part of the addition of 5 °. In the case of 13 loss of the device, the fixed force is fixed, the pressure is moved, and the force is LS · * Pushed, etc. The 6-bar spine pressure body gas Η plus [[\, X product)} Area part. Surface A is the part number (Anti-β sign resistance X rub)-Before the surface of the friction type, the machine part is moved, and this drive is activated {because no 8 mouth is sprayed on the end of the immediate product surface, the fixed part of the fixed number B moves X In addition, 2 and the mirror are transparent, Gonghe plus the holding surface and pressure 2 The lens is transparent 9 Η Body aeration on the working side plus body gas Η plus 13 to plug the live shape that can be ring,, when the product In the same way, the same phase is about to be set up to press the two product surfaces to press the force that makes Guan Wuri change (please read first The note on the back of Sun fills this page). Install. The device is fixed as g, ^^ 33 transferred to it. B Zero 13 is for the survival of a large ring-shaped force to push the pseudo-head on the side of the surface and shoot it into the ramen. The picture shows the 2 lines. Printed by the Beigong Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. The result of the addition of the same work branch is the product of it and the _ face-face large pressure mirror into the nozzle spray side press is added by the self-transparent technology and the product of the addition-the face air work is added and the load is negative. With the part I, it is necessary to drive the mirror when it is moving. Η This is due to the fact that > t is closed into a non-dynamic variable stress for the pressure division of the body 1. The gas is set to be far away from the body. The force department pushes the exogenous body to replace the body's dynamic gas drive, and it will be the same from time to time. Ο Zero can be made into a small one and about a large one. The skeleton gas Η was added with examples, and the paper standard of Fenben uses the Chinese National Standard (CNS) A4 specifications (210x297 male dragon) 11 ii
2030SX Λ 6 _Β_6_ 五、發明説明（1^ 以下，再依圖2說明第3項發明之一實施例。於實施 例2中，像例示將環狀活塞13b之驅動氣體受壓面積與加 工透鏡2其被加工物面側（噴嘴8側）之加.工透鏡面及移動 固定器13其加工氣髏受壓面積之和設成大約相同之構造者 ,然欲令驅動氣體受壓面積與加工氣體受壓面積相等，此 在構造上不易辦到，於驅動氣體受壓面積比較加工氣髏受 壓面積為小時，於圖2中，藉由將閥1 8自全開適當調小， 則亦可大約與實施例2時同樣，與加工時外加之加工氣體 之壓力變動無關，抵消對於加工透鏡之驅動部所加之負荷 ,可將上述驅動部所産生之推力減抵。 經濟部中央標準局员工消費合作社印製 亦即，對噴嘴8供應有多量之加工氣體，由於將閥18 縮小，故閥18之出入口間即産生壓力差，抵要選擇適當種 類者充為閥18使用，則在閥18之出口側，既使入口側之氣 體壓産生變動，亦可獲得大約與該變動之氣體壓成正比。 且比較入側口之氣體壓為低之氣體壓。因此，將閥18適當 加以縮小，藉以獲得與驅動氣體受壓面積比較加工氣髏受 壓面積為小之差額即兩受壓面積比成反比之高驅動氣體壓 ,即可與加工時外加之加工氣體之壓力變動無關，將上述 驅動部所産生之推力減低。 啻旃例4 以下依圖3說明第4項發明之一實施例。圖3像實施 例4之雷射加工頭其截面圖。圖中，23係安裝有加工透鏡 2之移動固定器，而24則為外筒。25傜氣匾缸，亦卽是空 氣缸，同一容量者有2具固定於外筒24,各空氣缸25其活 本紙張尺度边用中B 8家標準（CNS)肀4規格(210x297公；《：) (請先閲讀背面之注意事項再蜞寫木頁) Ϊ2 ' A6 B6 *^〇3〇^- 五、發明説明X3 ) 塞部（不予圖示）僳與固定器23相連结者，其壓力則由外部 供應之驅»氣體15所控制。 圖3所示之雷射加工頭，除取代設置於圖1所示，由 移動固定器13其環狀活塞13b與外茼14其環狀溝14a構成之 小室，設置有空氣缸25,由其及與該空氣缸25其活塞部相 連結之移動固定器23所構成此點外，其他均與圖1所示者 相同。 以下，說明圖3之動作。其動作與圖1所示實施例1 之情形大約相同。亦即，於雷射加工時，加工氣體進入噴 嘴8内，而噴嘴8内之氣體壓力選定在5〜9 k g G / c m 2。因 此，在加工透鏡2及保持加工透鏡2之移動固定器23其噴 嘴8側端面之加工氣體9受壓面上即發生將移動固定器23 向圖面上之上側壓上之推力。另一方面，空氣缸25亦由外 部供應有驅動氣體15,因該驅動氣體15之壓力，遂發生將 連結於空氣缸25其活塞部之移動固定器23向下側壓下之推 力。 對空氣缸25自外部供應驅動氣體15,並將該氣體壓力 適切加以控制，以取得上述之將移動固定器23向圖面上側 推上之推力與利用空氣缸25將移動固定器23向下側壓下之 推力間之平衡，即可藉以令加工氣體9所産生之推力與驅 動氣體15所産生之推力兩者之差成為零。 如上述，圖3所示之雷射加工頭傺設置有空氣缸25, 利用其推力，與加工透鏡之驅動部，亦即，移動固定器23 其驅動部進行機械性連動者。空氣缸25可利用一般坊間出 本紙張尺度適用中國國家標準（C1S\S)甲4規格（210 X 297公釐） 13 ------------------------裝------.玎------線 (諳先閱讀背而之注意事項再塡寫本頁) 經濟部中央標準局員工消費合作社印製 ^030¾^ A 6 B6 經.濟部中央標準局員工消費合作社印製 五、發明説明（1 4 ) 售産品即可減低製造成本，且可獲得與實施11者同樣之效 果。與圖1所示之雷射加工頭相比較時，毋需在頭内設置 環狀活塞及環狀溝等，可增加設計之自由·度。 窖旆例5 以下，依圖4說明第5項發明之一實施例。圖4俗實 施例5之雷射加工頭其截面圖。圖中，加工氣體9傜供應 予噴嘴8,同時，亦加以分技供應予空氣缸25充為驅動氣 體者。 將圖4所示之雷射加工頭與圖3所示者相比較時，除 對空氣缸25供應驅動氣體之配管外，其他構造均與圖3相 同。但，2具空氣缸25其活塞部（不予圖示）之驅動氣體受 壓面積總和與加工透鏡2其被加工物面側（噴嘴8側）之加 工透鏡面及移動固定器23其加工氣體受壓面積總和兩者則 將其設成大約相同之構成者。 其次，說明圖4之動作。本實施例傜將加工氣體9加 以分技，供應予固定於外筒24之2具空氣缸25其活塞部， 而於此際，配管中之閥18全開，在閥之出入口産生之壓力 損失則在可無視之程度。加在構成加工透鏡驅動部之移動 固定器23之驅動部之馬達5、蝸桿6等之推力，如果，無 視驅動機構之摩擦阻抗等時，則由於將噴嘴8側之加工透 鏡2及保持加工透鏡2之移動固定器23端面之加工氣體9 之受壓面積總和與空氣缸25之活塞部（不予圖示）之受壓面 積總和設計成大約相等，故可與加工氣體9之壓力變動無 關，令移動固定器23之指向圖面上上側之推力大約略成為 本紙張尺度適用中國國家標準（CN\S)甲4規格（210 X 297公釐） -----------------------裝------訂------線 (請先問讀背面之注意事項再塡寫本頁) ^030Si A6 B6 五、發明説明（li 零 持 保 及 2 鏡 透Η 之 倒 8 嘴 噴 將 係 例 施 實 本 述 上 如 面設 壓和 受總 其積 9 面 體壓 氣受 工其 加 之 面 端 端 23部 器塞 定活 固其 動 2 移缸 之氣 2 空 鏡與 透和 Η 總 加積 示 圖 予 不 驅者般有 5 之者將設加 為 2 一具 例側兩 ，者較 充例用度 施 8 和樣兩比 分施使由 實嘴之同積積 部實可自 於噴積 形面面 一與 ，之 。與面情壓壓 技即樣計 例積壓之受受 分作同設 施面受 2 體體 以動者高 實壓體例氣氣 加其 3 提 一受氣施工動 體，例及 明髏工 實加驅 氣此施， 發氣加與與而 工因、實本 6 動之欲積到 加 ，與成 第驅23, 面不 將者亦造 明之器而壓辦 亦2525製 說25定然受上 且缸缸低 4 缸固 -體造 , 氣氣減 圖氣動者氣構 值空空對 依空移等動在 之予 ，， 再將及相驅此 等應外者 ，示面約之 ， 相供另售 1 下例鏡大25等 約體 ，出 。例以偽透成缸相 大氣同間果施 ，Η 計氣成 成動相坊效 t 中加設空計 (請先閱讀背面之注意事項再填寫本頁) 裝. 訂- 線- 經濟部中央標準局員工消費合作社印製 縮加 切之 適加 8 卜 1 夕 閥時 將工 ，加 下與 形 - 情 樣 之同 4 約 圖大 於形 , 情 時之 小 3 為例 積施 面實 壓與 受可 體 則 氣 ， 工小 負 之 部 驅 ΒΜΏ 其 鏡 透 工 C 加力 於推 對之 消生 抵産 , 所 關 部 無 0 δ 驅 變述 力上 壓低 其減 體而 氣 ， 工荷 6 中 明 說 者 造 構 之 合 組 1-輪 例齒 施桿 實蝸 於與 逹 馬 將 用 應 統 糸 動 驅 之 鏡 透Η 加 就 係 造 構 此 代 取 而 然 可 亦 者 構 機 等 構機， 體， 旋 螺 與 達 馬 或 絲 螺 〇 狀果 球效 與之 逹樣 馬 同 裝得 安獲 本紙張尺度逍用中國國家樣準(CNS)甲4規格(210X297公釐) 81. 5. 20,000(fl) 2〇3〇n A 6 B6 經濟部中央標準局貝工消費合作社印製 五、發明説明（^ 〔發明之效果〕 如上述，應用第1項發明時，由於在外筒具備有環狀 之溝部及驅動氣體供應口，在移動固定器其雷射光束入射 側亦具備有環狀活塞，插入於上述外筒其環狀溝，並藉由 自上述驅動氣體供應口供應之驅動氣體之壓力，將上述環 狀活塞向上述噴嘴側推壓者，故可減低藉由噴嘴内之加工 氣體推壓上述噴嘴側之加工透鏡及保持上述加工透鏡之移 動固定器端部之推壓力。因此，具有可提供驅動上述移動 固定器向雷射光束方向往復移動之組件之驅動機構比較小 型化者之效果。 應用第2項發明時，由於形成於移動固定器之環狀活 塞之驅動氣體受壓面積與噴嘴側由加工透鏡及保持上述加 工透鏡之移動固定器端部構成加工氣體受壓面積設計成大 約相等，且，亦將供應予噴嘴之加工氣體加以分技一部分 ,充為驅動氣體以供應，故可與加工氣體其氣體壓之變動 無關，令上述環狀活塞之推壓力與噴嘴側之加工透鏡及移 動固定器端部之推壓力約略呈平衡狀態。因此，具有可提 供驅動上述移動固定器向雷射光束方向往復移動之組件之 驅動機構比較小型化者之效果。 醮用第3項發明時，由於以配管將加工氣腥分技一部 分，充為驅動氣體供應予環狀活塞，並在該配管中，分技 後至噴嘴之部分，亦具備有令供應予上述噴嘴之加工氣體 壓降低至比較上述驅動氣體之氣體壓為低之值，以便賦予 差壓之閥，故於上述環狀活塞其驅動氣體受壓面積比較噴 本紙張尺度遑用中B B家樣準(CHS)甲4規格(210x297公货) ： 81. 5. 20,000(H) (請先閱讀背面之注意事項再填寫本頁) 裝- 訂< 五、發明説明1(7 ) A6 B6 經濟部中央標準局員工消費合作社印製 構變透此移 應由述提之 噴由加之可力持束低 部後 部其 工因復 供藉上可件 向側之嘴故壓保光格 一技 端力加 ，往 之消持有組 器嘴成噴 ，推約射價 技分 器壓之衡向 體抵保具之。定噴構予缸之大雷， 分， 定體側平方 氣可及 ，動果固與部應氣缸力向且 體中 固氣嘴持束 動故鏡此移效動和端供空體壓器 ， 氣管 動工.噴保光 。驅 ，透因復之移總器將予氣推定化 工配 移加與約射果由壓工 。往者壓積定亦應述之固型 加該 之與力大雷效藉推加力向·單推面固 ，供上部動小 將在 鏡可壓者往之有缸 ，壓方簡以壓動且體令端移較 管並 透亦推兩器者備氣，側推束亦用受移 ，氣 ，器述比 配 ♦ Η ，其力定化具空嘴之光造將體之等動關定上構 以缸 加時塞壓固型於之噴部射構於氣鏡相驅無固.動機 於氣 述小活推動小由向述端雷 ，由動透約為動動驅動 由空 上為狀之移較 ，方上之向且 ，驅工大充變移供驅 ，予 持積環部述比時嘴壓器器 ，時之加成 ，之 及提之 時應 保面述端上構明噴推定定化明缸述計分壓鏡可件 明供 及壓上其動機發向體固固型發氣上設部體透有組 發體 鏡受令器驅動項器氣動動小項空持積一氣 工具之 項氣 透體於定供驅 4 定工移移較 5 之保面技之加 ，動 。6 動 工氣易固提之第固加之述比第動及壓分體之此移果第驅 加工 ，動可件用動之鏡上構用移鏡受體氣側因復效用為 由加關移有組應移内透動機應向透體氣 Η 嘴 。往之應充 側之無及具之 將嘴 工驅動 方 Η 氣工 加噴衡向者 ， 嘴成動鏡 ，動 ，噴加供驅 嘴加工加與與平方廉 分 ------------------------裝------訂------線 (請先閲^背面之注意事項再堉寫本頁) 各紙張尺度適用中國國家標準（CNS)甲4規格（210 X 297公釐） 1 7 A6 B6 經濟部中央標準局員工消費合作社印製 五、發明説明ΐ(δ ) 至噴嘴之部分，亦具備有令供應予上述噴嘴之加工氣體壓 降低至比較上述驅動氣體之氣體壓為低之值，以便賦予差 壓之閥，故於上述空氣缸之驅動氣體受壓面積比較噴嘴侧 由加工透鏡及保持上述加工透鏡之移動固定器端部構成之 加工氣體受壓面積為小時，亦可與加工氣體壓其變動無闢 ,易於使上述空氣缸其推力與噴嘴側之加工透鏡及移動固 定器端部推壓力兩者大約保持平衡。因此，具有可獲得驅 動上述移動固定器往雷射光束方向往復移動之組件之驅動 機構比較小型化者之效果。 〔圔面之簡單說明〕 (圖1)偽應用第1項發明之一實施例之雷射加工頭其 截面圖。 (圖2)係應用第2項發明之一實施例之雷射加工頭其 截面圖。 (圖3)偽應用第3項發明之一實施例之雷射加工頭其 截面翳。 (圖4)偽應用第4項發明之一實施例之雷射加工頭其 截面圖。 (圖5)偽以往之雷射加I頭之截面圖。 〔符號之説明〕 1 雷射光束 2 加工透鏡 5 馬達 6 蝸捍 8 噴嘴 9 加工氣體 10 被加工物 (請先閲讀背面之注意事項再塡寫本頁) 丨裝. *ΤΓ. .線. 本紙張尺度適用中國國家標準（CNS)甲4規格（210 X 297公釐） 18 A6 B6 五、發明説明！(9 、 1 23 移 動 固 定器 13b 環 狀 活 塞 /314, 24 外 筒 14a 外 筒 環 狀溝 15 驅 動 氣 體 18 閥 25 空 氣 缸 經濟部中央標準局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)甲4規格（210 X 297公釐）2030SX Λ 6 _Β_6_ V. Description of the invention (1 ^ Below, a third embodiment of the third invention will be described with reference to FIG. 2. In the embodiment 2, the pressure-receiving area of the driving gas of the annular piston 13b and the processing lens 2 are illustrated as examples. If the sum of the surface area of the processed object (nozzle 8 side), the lens surface and the moving holder 13 is set to the same structure as the pressure area of the processing gas, the driving gas pressure area and the processing gas The pressure area is equal, which is not easy to do in terms of structure. When the pressure area of the driving gas is smaller than the pressure area of the processed gas skull, in Figure 2, by appropriately adjusting the valve 18 to fully open, it can also be approximated. As in the case of Example 2, regardless of the pressure fluctuation of the processing gas applied during processing, offsetting the load on the driving part of the processing lens can reduce the thrust generated by the driving part. The Ministry of Economic Affairs Central Standards Bureau Employee Consumer Cooperative Printing, that is, a large amount of processing gas is supplied to the nozzle 8, because the valve 18 is reduced, there is a pressure difference between the inlet and the outlet of the valve 18, and it is necessary to select the appropriate type to be used for the valve 18, then at the outlet of the valve 18 side Even if the gas pressure on the inlet side fluctuates, it can be obtained approximately in proportion to the fluctuating gas pressure. And the gas pressure entering the side port is lower than the gas pressure. Therefore, the valve 18 is appropriately reduced to obtain and drive The pressure area of the gas is smaller than the pressure area of the processed gas skull. That is, the high pressure of the two pressure areas is inversely proportional to the driving gas pressure, which can be independent of the pressure fluctuation of the processing gas applied during processing. The thrust is reduced. Example 4 The following describes one embodiment of the fourth invention with reference to FIG. 3. FIG. 3 is a cross-sectional view of the laser processing head of Example 4. In the figure, 23 is a moving holder with a processing lens 2 installed , And 24 is the outer cylinder. 25 menstrual plaque cylinder, also an air cylinder, two of the same capacity are fixed to the outer cylinder 24, each air cylinder 25 is used in the paper standard side of the B 8 standard (CNS ) Yu 4 specifications (210x297; ":" (Please read the precautions on the back before writing the wooden page) Ϊ2 'A6 B6 * ^ 〇3〇 ^-V. Description of the invention X3) Plug (not shown) The pressure connected to the holder 23 is driven by externally supplied gas »Gas 15 Controlled. In addition to the laser processing head shown in FIG. 3, in addition to the one shown in FIG. 1, a small chamber composed of a movable piston 13 with an annular piston 13b and an outer ring 14 with an annular groove 14a is provided with an air cylinder 25. This point is the same as the one shown in FIG. 1 except that the moving fixture 23 connected to the piston portion of the air cylinder 25 is constructed. The operation of Fig. 3 will be described below. The operation is approximately the same as in the case of Embodiment 1 shown in FIG. That is, during laser processing, the processing gas enters the nozzle 8, and the gas pressure in the nozzle 8 is selected to be 5 to 9 kg G / cm 2. Therefore, on the pressurized surface of the processing gas 9 on the end face of the nozzle 8 side of the processing lens 2 and the moving holder 23 holding the processing lens 2, a pushing force is generated to press the moving holder 23 upward in the drawing. On the other hand, the air cylinder 25 is also supplied with drive gas 15 from the outside. Due to the pressure of the drive gas 15, a thrust force is generated to press down the moving holder 23 connected to the piston portion of the air cylinder 25 downward. The drive gas 15 is supplied from the outside to the air cylinder 25, and the pressure of the gas is appropriately controlled to obtain the above-mentioned thrust to push the moving holder 23 upward in the drawing and the air cylinder 25 to move the moving holder 23 downward The balance between the pushed thrust force can make the difference between the thrust force generated by the processing gas 9 and the thrust force generated by the driving gas 15 zero. As described above, the laser processing head shown in FIG. 3 is provided with an air cylinder 25, and uses its thrust to mechanically interlock with the driving portion of the processing lens, that is, the driving portion of the moving holder 23. The air cylinder 25 can be used in general. The paper size is applicable to the Chinese national standard (C1S \ S) A4 specifications (210 X 297 mm) 13 ------------------- ----- Installed ------. 玎 ------ Line (I understand the precautions first and then write this page) Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs ^ 030¾ ^ A 6 B6 Economics. Central Bureau of Economic Standards and Staff Employee Consumer Cooperative Printed 5. Description of Invention (1 4) Selling the product can reduce the manufacturing cost, and can obtain the same effect as those who implemented 11. Compared with the laser processing head shown in Fig. 1, there is no need to provide an annular piston and an annular groove in the head, which can increase the design freedom. Cellar Example 5 Hereinafter, an embodiment of the fifth invention will be described with reference to FIG. 4. Fig. 4 is a cross-sectional view of a laser processing head according to the fifth embodiment. In the figure, the processing gas 9 傜 is supplied to the nozzle 8, and at the same time, it is also supplied to the air cylinder 25 as a driving gas by a separate technique. Comparing the laser processing head shown in FIG. 4 with the one shown in FIG. 3, the structure is the same as FIG. 3 except for the piping for supplying the driving gas to the air cylinder 25. However, the sum of the driving gas pressure area of the piston part (not shown) of the two air cylinders 25 and the processing lens surface of the processing lens 2 on the side of the object to be processed (nozzle 8 side) and the processing gas of the movable holder 23 The sum of the pressure areas is set to approximately the same composition. Next, the operation of FIG. 4 will be described. In this embodiment, the processing gas 9 is divided into two parts and supplied to the piston part of two air cylinders 25 fixed to the outer cylinder 24. At this time, the valve 18 in the piping is fully opened, and the pressure loss at the inlet and outlet of the valve is Can be ignored. If the thrust of the motor 5, the worm 6, etc. of the drive unit of the movement holder 23 constituting the processing lens drive unit is ignored, if the frictional resistance of the drive mechanism is ignored, the processing lens 2 on the nozzle 8 side and the processing lens are held The sum of the pressure area of the processing gas 9 on the end face of the moving holder 23 and the sum of the pressure area of the piston part (not shown) of the air cylinder 25 is designed to be approximately equal, so it can be independent of the pressure change of the processing gas 9, The thrust of the mobile holder 23 pointing to the upper side of the drawing surface is approximately the size of this paper, which is applicable to the Chinese National Standard (CN \ S) A 4 specifications (210 X 297 mm) ------------ ----------- installed ------ ordered ------ line (please read the precautions on the back before writing this page) ^ 030Si A6 B6 Fifth, invention description ( Li zero holding and 2 mirror penetrating Η 8 nozzle spray will apply the system as described above. The pressure is set on the surface and subjected to the total volume. 9 hexahedron pressure is applied. The surface end and the end 23 are plugged to fix it. Move 2 the gas of the cylinder 2 The total accumulated product of the empty mirror and the transparent and Η is shown to the non-driver. There are 5 who will add 2 as an example. Two, it is more appropriate to use 8 and sample two scores so that the same product part of the real mouth can be sprayed with the face and face. It is the same as the pressure of the sample. Receiving and receiving are divided into the same facility. Receiving 2 bodies to move the high-pressure system to increase gas pressure plus 3 to lift the gas to construct the moving body, for example, to apply the gas and drive the gas, the gas is added and the cause of work , The actual book 6 the desire to accumulate, and become the second drive 23, who also do not make a clear device and press 2525 to say that 25 must be up and the cylinder is lower 4 cylinder solid-body construction, gas reduction The figure shows that the air structure value is empty to the equivalent movement according to the air movement, and then the phase drive and other outsiders are shown, and the phase is available for sale. The following example is a mirror size 25 equivalent. For example, a pseudo-transparent cylinder-phase atmosphere is applied at the same time, and an air meter is added to the H-meter gas-formed dynamic phase effect (please read the precautions on the back before filling out this page) to install. Order-Line-Ministry of Economic Affairs The Bureau of Standards and Staff's Consumer Cooperatives printed and reduced the appropriate amount of additional 8 8 1 when the valve will be working, plus the same with the shape-the same pattern 4 about the figure is greater than the shape, the situation is small 3 As an example, the actual pressure of the applied surface and the ability to accept the gas, the negative part of the Gong Xiao drives the BMΏ its mirror through the work C. After the push to the right, the elimination of the production is cancelled, and the relevant part has no 0 δ. Its weight is reduced and the energy is reduced, the combination of the construction of the Minghe 6 in Minghe 6 1-wheel example tooth application rod real snail and the horse will be transmitted through the mirror of the application of the drive system, and the system is constructed instead. However, it is also possible to build machines and other machines, the body, the spinner and the Dama or silk snail sphere-shaped fruit ball effect and the sample horse can be installed with the paper to get the paper standard Chinese National Standard (CNS) A 4 specifications (210X297mm) 81. 5. 20,000 (fl) 2〇3〇n A 6 B6 Printed by the Beigong Consumer Cooperative of the Central Standards Bureau of the Ministry of Economy V. Description of invention (^ [Effect of invention] As mentioned above, the first item is applied At the time of the invention, since the outer cylinder was provided with an annular groove and a driving gas supply port, an annular piston was also provided on the laser beam incident side of the moving fixture, which was inserted into the annular groove of the outer cylinder. The pressure of the driving gas supplied by the driving gas supply port Since the piston is pushed toward the nozzle side, it is possible to reduce the pressing force by the processing gas in the nozzle against the processing lens on the nozzle side and the end of the movement holder holding the processing lens. Therefore, it has the effect of providing a drive mechanism for driving the above-mentioned moving fixture to reciprocate in the direction of the laser beam, which is relatively small. When the second invention is applied, the pressure receiving area of the driving gas formed on the annular piston of the moving holder is designed to be approximately equal to the pressure receiving area of the processing gas formed by the processing lens and the end of the moving holder holding the processing lens And, it also divides the processing gas supplied to the nozzle into a part of the technology and fills it with driving gas to supply it, so it can be independent of the change of the gas pressure of the processing gas, so that the pushing force of the above-mentioned ring piston and the processing lens and the nozzle side The pushing force at the end of the moving fixture is approximately in equilibrium. Therefore, it has the effect of providing a drive mechanism that drives the above-mentioned moving fixture to reciprocate in the direction of the laser beam, which is relatively small. When the third invention is used, a part of the process gas is divided into a pipe, and the driving gas is supplied to the ring piston as a driving gas, and in the pipe, the part after the division to the nozzle is also provided with the order to supply the above The processing gas pressure of the nozzle is reduced to a value lower than the gas pressure of the above-mentioned driving gas, so as to give the valve with a differential pressure, so the pressure-receiving area of the driving gas of the above-mentioned annular piston is more comparable to that of the paper standard. (CHS) A4 specifications (210x297 public goods): 81. 5. 20,000 (H) (please read the precautions on the back before filling in this page) Binding-Order &<; 5. Description of Invention 1 (7) A6 B6 Ministry of Economy The printed structure of the Central Bureau of Standards and Staff Consumer Cooperative is transparent. This shift should be mentioned by the sprayer mentioned above, which can hold the lower part of the beam. ， To eliminate the holding device nozzle into a spray, push the balance of the target price to the body. The fixed jet is designed for the big thunder of the cylinder. It is divided and the square side of the fixed body can reach the air. The dynamic and solid parts should respond to the force of the cylinder and the solid gas nozzle in the body should be moved by the beam. , Trachea started. Spray protection. Drive, through the complex shifter will be presumed for the chemical engineering and transfer and add the results of the press. The pressure accumulation of the former should also be described as the solid type plus the force and the lightning effect is fixed by the push force to the single push surface, for the upper part to move the younger to the cylinder that can be pressed by the mirror, the pressure side is simple to press In addition, the body moves the end of the tube and pushes the two devices to prepare the gas. The side push beam is also used to move the gas. The device is matched with Η. Its force is to stabilize the light with an empty mouth to close the equal movement of the body. The upper structure is based on the injection part of the cylinder and the time-plugging type. The structure is driven by the gas mirror. There is no solid. The motivation is to drive the small light to the end, and the dynamic drive is about the dynamic drive. The shift of the state, the direction of the direction, and the driving force is large enough to change the supply and drive, to the holding ring part, the pressure of the mouth pressure device, the addition of the time, and the mention time should be stated on the end of the statement. The pre-determined spraying cylinder can be used to calculate and score the pressure mirror. It can be supplied and pressed on its motive. The body is solid and solid. It is equipped with a body and a body. It has a set of body mirrors. The gas-permeable body of the one-gas tool is added to the fixed-supply 4 fixed-work migration compared to the 5 surface protection technology. 6 This is the first and the second part of the moving and pressure splitting process. The moving side of the moving mirror is equipped with a moving mirror. The gas side of the moving mirror is added for the purpose of re-use. A group should move the internal penetrating motives to the mouth of the penetrating body. It should be filled with nothing on the side and the nozzle will be driven to the side. Pneumatic and sprayed, the nozzle becomes a moving mirror, and the nozzle is added for the processing of the nozzle and the square point ------- ----------------- installed ------ ordered ------ line (please read ^ Notes on the back before writing this page) Each paper size Applicable to China National Standards (CNS) A4 specifications (210 X 297 mm) 1 7 A6 B6 Printed by the employee consumer cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. The description of the invention l (δ) to the nozzle, and it is also provided with order supply The processing gas pressure of the nozzle is reduced to a value lower than that of the driving gas in order to give a differential pressure to the valve. Therefore, the pressure of the driving gas in the air cylinder is compared with the processing lens on the nozzle side and the processing lens holding the processing lens. The pressure area of the processing gas formed by the end of the moving holder is small, and it can also be adjusted with the pressure of the processing gas. It is easy to make the thrust of the above air cylinder and the pressing force of the processing lens on the nozzle side and the end of the moving holder approximately maintain balance. Therefore, there is an effect that the drive mechanism for driving the above-mentioned moving fixture to reciprocate in the direction of the laser beam is relatively small. [Simple description of squint] (FIG. 1) A cross-sectional view of a laser processing head which pseudo-applies to an embodiment of the first invention. (Fig. 2) A cross-sectional view of a laser processing head to which an embodiment of the second invention is applied. (Fig. 3) A laser processing head according to an embodiment of the third invention is pseudo-applied. (Fig. 4) A cross-sectional view of a laser processing head which pseudo-applies to an embodiment of the fourth invention. (Figure 5) A cross-sectional view of a pseudo-conventional laser plus I head. [Explanation of symbols] 1 Laser beam 2 Processing lens 5 Motor 6 Snail guard 8 Nozzle 9 Processing gas 10 Processed object (please read the precautions on the back before writing this page) 丨 Installation. * ΤΓ. 线. 本The paper scale is in accordance with Chinese National Standard (CNS) A4 specifications (210 X 297 mm) 18 A6 B6 V. Description of invention! (9, 1 23 mobile retainer 13b annular piston / 314, 24 outer cylinder 14a outer cylinder annular groove 15 drive gas 18 valve 25 empty cylinder Central Ministry of Economic Affairs Employee Consumer Cooperative Printed paper size is in accordance with Chinese national standards ( CNS) A 4 specifications (210 X 297 mm)