TW202432684A - Method for manufacturing laminated and device for manufacturing the same - Google Patents

Method for manufacturing laminated and device for manufacturing the same Download PDF

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TW202432684A
TW202432684A TW112117193A TW112117193A TW202432684A TW 202432684 A TW202432684 A TW 202432684A TW 112117193 A TW112117193 A TW 112117193A TW 112117193 A TW112117193 A TW 112117193A TW 202432684 A TW202432684 A TW 202432684A
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polymer film
thermoplastic polymer
aforementioned
copper foil
heating
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TW112117193A
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Chinese (zh)
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福島和宏
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日商普羅瑪帝克股份有限公司
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Abstract

The subject of the invention is to provide a method for manufacturing a laminate and a device for manufacturing the same, in which copper foils are laminated on both sides of a thermoplastic polymer film, and the foaming in the inner of the thermoplastic polymer film and at the interface with the copper foil is prevented. The method for manufacturing a laminate is carried out continuously by using roll-to-roll processing, which comprises: Step (1) of thermos-compressing a polymer film and a first copper foil at a temperature at which the polymer film softens under a state that a first copper foil 11a overlaid on the surface of a thermoplastic polymer film 10; Step (2) of heating the thermoplastic polymer film at a temperature near its melting point; Step (3) of heating the thermoplastic polymer film and the second copper foil at a temperature at which the polymer film softens under a state that a second copper foil 11b is laminated on the back side of the thermoplastic polymer film; Step (4) of heating the thermoplastic polymer film at a temperature near its melting point.

Description

積層體的製造方法及其製造裝置Method and device for manufacturing laminated body

本發明係關於一種在熱塑性聚合物薄膜的兩個面上積層有銅箔的積層體的製造方法及其製造裝置。The present invention relates to a method for manufacturing a laminate having copper foils laminated on two surfaces of a thermoplastic polymer film and a manufacturing device thereof.

軟性配線基板大多數由積層體構成,該積層體由熱塑性聚合物薄膜及銅箔積層製成。電路圖案藉由對積層體的銅箔進行蝕刻而形成。Flexible wiring boards are mostly made of a laminate made of a thermoplastic polymer film and copper foil. The circuit pattern is formed by etching the copper foil of the laminate.

作為在熱塑性聚合物薄膜的兩個面上積層有銅箔的積層體的製造方法,例如在專利文獻1中公開了如下方法:藉由將銅箔重疊在熱塑性聚合物薄膜的兩個面上,並利用一對加熱加壓輥進行熱壓合,來形成積層體。該方法藉由捲對捲方式能夠在熱塑性聚合物薄膜的兩個面上同時對銅箔進行熱壓合,因此能夠生產率良好地製造在熱塑性聚合物薄膜的兩個面上積層有銅箔的積層體。 〔先前技術文獻〕 〔專利文獻〕 專利文獻1:日本特開2014-128913號公報 As a method for manufacturing a laminated body in which copper foil is laminated on both sides of a thermoplastic polymer film, for example, Patent Document 1 discloses the following method: a laminated body is formed by overlapping copper foil on both sides of a thermoplastic polymer film and heat-pressing the laminated body using a pair of heating and pressurizing rollers. This method can heat-press the copper foil on both sides of a thermoplastic polymer film at the same time by a roll-to-roll method, so that a laminated body in which copper foil is laminated on both sides of a thermoplastic polymer film can be manufactured with good productivity. [Prior technical document] [Patent document] Patent document 1: Japanese Patent Publication No. 2014-128913

〔發明概要〕 〔發明欲解決之技術課題〕 [Invention Summary] [Technical Problems to be Solved by the Invention]

在藉由對積層在熱塑性聚合物薄膜的兩個面上的銅箔進行蝕刻而形成有電路圖案的軟性配線基板中,隨著電路圖案的高密度化、傳輸信號的高頻化,欲謀求熱塑性聚合物薄膜的薄膜化。In a flexible wiring board in which a circuit pattern is formed by etching copper foil laminated on both surfaces of a thermoplastic polymer film, the thermoplastic polymer film is being required to be thinner as the density of the circuit pattern increases and the frequency of the transmission signal increases.

使用一對加熱加壓輥,將銅箔熱壓合在熱塑性聚合物薄膜的兩個面上時,為了提升熱塑性聚合物薄膜與銅箔的接合強度,要將熱塑性聚合物薄膜加熱到接近熔點的溫度。When the copper foil is heat-pressed onto the two surfaces of the thermoplastic polymer film using a pair of heating and pressure rollers, the thermoplastic polymer film is heated to a temperature close to the melting point in order to enhance the bonding strength between the thermoplastic polymer film and the copper foil.

當將熱塑性聚合物薄膜加熱至接近熔點的溫度時,氣體會從熱塑性聚合物薄膜中釋放出來。使用一對加熱加壓輥,以接近熱塑性聚合物薄膜的熔點的溫度將銅箔熱壓合在熱塑性聚合物薄膜的兩個面上時,積層在熱塑性聚合物薄膜的兩個面上的銅箔從一對加熱加壓輥承受壓力。此時,由於熱塑性聚合物薄膜的兩個面處於被銅箔夾住的狀態,因此從熱塑性聚合物薄膜釋放出來的氣體失去退路,當來自一對加熱加壓輥的壓力得到釋放以後,釋放出來的氣體就會在熱塑性聚合物薄膜的內部或與銅箔的界面處發泡。其結果為,會產生熱塑性聚合物薄膜的絕緣不良、熱塑性聚合物薄膜與銅箔的接合強度降低這樣的問題。When a thermoplastic polymer film is heated to a temperature close to the melting point, gas is released from the thermoplastic polymer film. When a pair of heating and pressurizing rollers are used to heat-press the copper foil on both sides of the thermoplastic polymer film at a temperature close to the melting point of the thermoplastic polymer film, the copper foils stacked on both sides of the thermoplastic polymer film are subjected to pressure from the pair of heating and pressurizing rollers. At this time, since the two sides of the thermoplastic polymer film are in a state of being sandwiched by the copper foil, the gas released from the thermoplastic polymer film has no escape route. When the pressure from the pair of heating and pressurizing rollers is released, the released gas will foam inside the thermoplastic polymer film or at the interface with the copper foil. As a result, there arises problems such as poor insulation of the thermoplastic polymer film and reduced bonding strength between the thermoplastic polymer film and the copper foil.

特別是,在熱塑性聚合物薄膜已被薄膜化的情況下(例如,厚度在100μm以下),即使只是產生幾十μm左右的微小發泡,熱塑性聚合物薄膜的絕緣不良的發生、接合強度的降低也會變得很明顯。In particular, when the thermoplastic polymer film is thinned (for example, with a thickness of less than 100 μm), even if only microscopic bubbles of several tens of μm are generated, poor insulation of the thermoplastic polymer film and a decrease in bonding strength will become significant.

為了防止以接近熔點的溫度進行熱壓合時產生的發泡,能夠想到以下方法:首先,將銅箔重疊在熱塑性聚合物薄膜的一個面上,以接近熔點的溫度進行熱壓合,然後,再將銅箔重疊在熱塑性聚合物薄膜的另一個面上,以接近熔點的溫度進行熱壓合,由此製造在熱塑性聚合物薄膜的兩個面上積層有銅箔的積層體。In order to prevent blistering caused by heat pressing at a temperature close to the melting point, the following method can be thought of: first, copper foil is overlapped on one side of a thermoplastic polymer film and heat pressed at a temperature close to the melting point, and then the copper foil is overlapped on the other side of the thermoplastic polymer film and heat pressed at a temperature close to the melting point, thereby manufacturing a laminate with copper foil laminated on both sides of the thermoplastic polymer film.

然而,在該方法下,在以接近熱塑性聚合物薄膜的熔點的溫度進行熱壓合的情況下,會產生熱塑性聚合物薄膜的尚未重疊銅箔的一側的表面與輥黏合而無法剝離這樣的問題。However, in this method, when heat pressing is performed at a temperature close to the melting point of the thermoplastic polymer film, there is a problem that the surface of the thermoplastic polymer film on the side not overlapping the copper foil adheres to the roll and cannot be peeled off.

為了解決該問題,能夠想到在熱塑性聚合物薄膜的尚未重疊銅箔的一側的表面設置脫模膜,然而在該情況下,熱塑性聚合物薄膜的兩個面被銅箔及脫模膜覆蓋。因此,與同時將銅箔熱壓合在熱塑性聚合物薄膜的兩個面上的情況一樣,從熱塑性聚合物薄膜釋放出來的氣體會在熱塑性聚合物薄膜的內部或與銅箔的界面處發泡。To solve this problem, a mold release film can be provided on the surface of the thermoplastic polymer film on the side not overlapped with the copper foil. However, in this case, both sides of the thermoplastic polymer film are covered with the copper foil and the mold release film. Therefore, as in the case where the copper foil is heat-pressed onto both sides of the thermoplastic polymer film at the same time, the gas released from the thermoplastic polymer film will foam inside the thermoplastic polymer film or at the interface with the copper foil.

本發明是鑒於上述問題而完成者,其目的在於,在使用一對加熱加壓輥來製造在熱塑性聚合物薄膜的兩個面上積層有銅箔的積層體的製造方法及製造裝置中,在維持熱塑性聚合物薄膜與銅箔的接合強度的同時,防止在熱塑性聚合物薄膜的內部或與銅箔的界面處的、由來自熱塑性聚合物薄膜的釋放氣體引起的發泡。 〔用於解決技術課題之技術手段〕- The present invention was completed in view of the above-mentioned problem, and its purpose is to prevent the foaming caused by the released gas from the thermoplastic polymer film inside the thermoplastic polymer film or at the interface with the copper foil while maintaining the bonding strength between the thermoplastic polymer film and the copper foil in a manufacturing method and manufacturing device for manufacturing a laminated body with copper foil laminated on both surfaces of the thermoplastic polymer film using a pair of heating and pressure rollers. 〔Technical means for solving the technical problem〕-

本發明所關係之積層體的製造方法為在熱塑性聚合物薄膜的兩個面上積層銅箔而製成的積層體的製造方法,包括製程(A)、製程(B)、製程(C)、以及製程(D);在前述製程(A)中,在已將第一銅箔重疊在熱塑性聚合物薄膜的表面上的狀態下,導入一對加熱加壓輥,以熱塑性聚合物薄膜軟化的溫度對熱塑性聚合物薄膜與第一銅箔進行熱壓合;在前述製程(B)中,於前述製程(A)之後使熱塑性聚合物薄膜的尚未積層第一銅箔的背面為開放狀態,以接近熱塑性聚合物薄膜的熔點的溫度對熱塑性聚合物薄膜進行加熱;在前述製程(C)中,於前述製程(B)之後在已將第二銅箔重疊在熱塑性聚合物薄膜的背面上的狀態下,導入一對加熱加壓輥,以熱塑性聚合物薄膜軟化的溫度對熱塑性聚合物薄膜與第二銅箔進行熱壓合;在前述製程(D)中,於前述製程(C)之後在熱塑性聚合物薄膜的兩個面上積層有第一銅箔及第二銅箔的狀態下,以接近前述熱塑性聚合物薄膜的熔點的溫度對熱塑性聚合物薄膜進行加熱;前述製程(A)、前述製程(B)、前述製程(C)以及前述製程(D)以捲對捲方式連續地進行。The manufacturing method of the laminated body related to the present invention is a manufacturing method of the laminated body made by laminating copper foil on two surfaces of a thermoplastic polymer film, comprising process (A), process (B), process (C), and process (D); in the aforementioned process (A), a pair of heating and pressurizing rollers are introduced into the state where the first copper foil has been overlapped on the surface of the thermoplastic polymer film, and the thermoplastic polymer film and the first copper foil are heat-pressed at a temperature at which the thermoplastic polymer film softens; in the aforementioned process (B), after the aforementioned process (A), the back side of the thermoplastic polymer film where the first copper foil has not been laminated is opened, and the thermoplastic polymer film is heated at a temperature close to the melting point of the thermoplastic polymer film. The thermoplastic polymer film is heated; in the aforementioned process (C), after the aforementioned process (B), a pair of heating and pressing rollers are introduced in a state where the second copper foil is overlapped on the back side of the thermoplastic polymer film, and the thermoplastic polymer film and the second copper foil are heat-pressed at a temperature at which the thermoplastic polymer film softens; in the aforementioned process (D), after the aforementioned process (C), the thermoplastic polymer film is heated at a temperature close to the melting point of the aforementioned thermoplastic polymer film in a state where the first copper foil and the second copper foil are stacked on both sides of the thermoplastic polymer film; the aforementioned process (A), the aforementioned process (B), the aforementioned process (C) and the aforementioned process (D) are continuously performed in a roll-to-roll manner.

本發明所關係之積層體的製造裝置為以捲對捲方式在熱塑性聚合物薄膜的兩個面上積層銅箔而製成的積層體的製造裝置,前述積層體的製造裝置包括第一捲出軸、第二捲出軸、第三捲出軸、一對第一加熱加壓輥、第一加熱裝置、一對第二加熱加壓輥、第二加熱裝置以及卷取軸;前述第一捲出軸供給前述熱塑性聚合物薄膜;前述第二捲出軸供給第一銅箔;前述第三捲出軸供給第二銅箔;前述一對第一加熱加壓輥在已將由第二捲出軸供給的第一銅箔重疊在由前述第一捲出軸供給的熱塑性聚合物薄膜的表面上的狀態下,以熱塑性聚合物薄膜軟化的溫度對熱塑性聚合物薄膜與第一銅箔進行熱壓合;前述第一加熱裝置,以接近熱塑性聚合物薄膜的熔點的溫度,對藉由一對第一加熱加壓輥而積層有第一銅箔的熱塑性聚合物薄膜進行加熱,此時讓熱塑性聚合物薄膜的尚未積層第一銅箔的背面為開放狀態;前述一對第二加熱加壓輥在已將由第三捲出軸供給的第二銅箔重疊在已由第一加熱裝置加熱的熱塑性聚合物薄膜的背面上的狀態下,以熱塑性聚合物薄膜軟化的溫度對熱塑性聚合物薄膜與第二銅箔進行熱壓合;前述第二加熱裝置,在熱塑性聚合物薄膜的兩個面上已積層有第一銅箔及第二銅箔的狀態下,以接近前述熱塑性聚合物薄膜的熔點的溫度對藉由一對第二加熱加壓輥而積層有第二銅箔的熱塑性聚合物薄膜進行加熱;前述捲取軸捲取在已由第二加熱裝置加熱的熱塑性聚合物薄膜的兩個面上積層有銅箔的積層體。 〔發明之效果〕 The manufacturing device of the laminated body related to the present invention is a manufacturing device of the laminated body which is manufactured by laminating copper foil on two surfaces of a thermoplastic polymer film in a roll-to-roll manner. The aforementioned manufacturing device of the laminated body comprises a first unwinding shaft, a second unwinding shaft, a third unwinding shaft, a pair of first heating and pressurizing rollers, a first heating device, a pair of second heating and pressurizing rollers, a second heating device and a winding shaft; the aforementioned first unwinding shaft supplies the aforementioned thermoplastic polymer film; the aforementioned third .... The second roll-out roll supplies the first copper foil; the third roll-out roll supplies the second copper foil; the first pair of first heating and pressurizing rollers heat-press the thermoplastic polymer film and the first copper foil at a temperature at which the thermoplastic polymer film softens, while the first copper foil supplied by the second roll-out roll is overlapped on the surface of the thermoplastic polymer film supplied by the first roll-out roll; the first heating device heats the thermoplastic polymer film at a temperature close to the melting point of the thermoplastic polymer film. The thermoplastic polymer film on which the first copper foil is laminated is heated by a pair of first heating and pressurizing rollers, and the back side of the thermoplastic polymer film on which the first copper foil is not laminated is open; the pair of second heating and pressurizing rollers overlap the second copper foil supplied by the third unwinding roller on the back side of the thermoplastic polymer film heated by the first heating device, and heat the thermoplastic polymer film and the first copper foil at a temperature at which the thermoplastic polymer film softens. The first copper foil and the second copper foil are heat-pressed; the second heating device heats the thermoplastic polymer film laminated with the second copper foil by a pair of second heating and pressing rollers at a temperature close to the melting point of the thermoplastic polymer film, in a state where the first copper foil and the second copper foil are laminated on the two surfaces of the thermoplastic polymer film; the winding shaft winds up the laminated body with the copper foil laminated on the two surfaces of the thermoplastic polymer film heated by the second heating device. [Effect of the invention]

根據本發明,在使用一對加熱加壓輥來製造在熱塑性聚合物薄膜的兩個面上積層有銅箔的積層體的製造方法及製造裝置中,能夠在維持熱塑性聚合物薄膜與銅箔的接合強度的同時,防止在熱塑性聚合物薄膜的內部或與銅箔的界面處的、由來自熱塑性聚合物薄膜的釋放氣體引起的發泡。According to the present invention, in a manufacturing method and a manufacturing apparatus for manufacturing a laminate having copper foils laminated on both surfaces of a thermoplastic polymer film using a pair of heating and pressure rollers, it is possible to prevent bubbling caused by released gas from the thermoplastic polymer film inside the thermoplastic polymer film or at the interface with the copper foil while maintaining the bonding strength between the thermoplastic polymer film and the copper foil.

以下,參照圖式對本發明的實施形態做詳細的說明。需要說明的是,本發明並不限定於以下實施形態。能夠在不脫離獲得本發明之效果的範圍內進行適當的變更。The following is a detailed description of the embodiments of the present invention with reference to the drawings. It should be noted that the present invention is not limited to the following embodiments. Appropriate changes can be made within the scope of achieving the effects of the present invention.

圖1為表示本發明的一實施形態中的積層體的製造方法的各製程的流程圖。圖2為示意性地表示本發明中一實施形態的積層體的製造裝置的圖。本實施形態中的積層體為在熱塑性聚合物薄膜的兩個面上積層有銅箔的構造,使用圖2所示的製造裝置以捲對捲方式(Roll to Roll)製造。FIG1 is a flow chart showing each process of a method for manufacturing a laminate in one embodiment of the present invention. FIG2 is a diagram schematically showing a manufacturing apparatus for a laminate in one embodiment of the present invention. The laminate in this embodiment has a structure in which copper foil is laminated on both sides of a thermoplastic polymer film, and is manufactured in a roll-to-roll manner using the manufacturing apparatus shown in FIG2.

作為熱塑性聚合物薄膜的材料,能使用:液晶聚合物、聚苯硫醚、環烯烴、聚苯乙烯、聚醯胺、聚醯胺醯亞胺、聚醚醯亞胺、聚醚酮、聚碸、聚醚碸、聚芳酯、聚四氟乙烯、聚偏二氟乙烯、全氟烷氧基烷烴、全氟乙烯丙烯共聚物、乙烯-四氟乙烯共聚物等。特別是,作為熱塑性聚合物薄膜,較佳為介電損耗和介電損耗正切小的液晶聚合物薄膜。熱塑性聚合物薄膜的厚度較佳為10~200μm,更佳為25~75μm。As the material of the thermoplastic polymer film, liquid crystal polymer, polyphenylene sulfide, cycloolefin, polystyrene, polyamide, polyamide imide, polyether imide, polyether ketone, polysulfone, polyethersulfone, polyarylate, polytetrafluoroethylene, polyvinylidene fluoride, perfluoroalkoxyalkane, perfluoroethylene propylene copolymer, ethylene-tetrafluoroethylene copolymer, etc. can be used. In particular, as the thermoplastic polymer film, a liquid crystal polymer film with small dielectric loss and dielectric loss tangent is preferred. The thickness of the thermoplastic polymer film is preferably 10 to 200 μm, more preferably 25 to 75 μm.

如圖1所示,對熱塑性聚合物薄膜的表面進行電漿處理(Plasma Treatment)(步驟S1)。具體而言,如圖2所示,使用電漿處理裝置30a對由第一捲出軸20供給的熱塑性聚合物薄膜10的表面進行電漿處理。電漿處理中使用的氣體例如能使用氬、氮等。As shown in FIG1 , the surface of the thermoplastic polymer film is subjected to plasma treatment (Plasma Treatment) (step S1). Specifically, as shown in FIG2 , the surface of the thermoplastic polymer film 10 supplied from the first unwinding shaft 20 is subjected to plasma treatment using a plasma treatment device 30a. The gas used in the plasma treatment can be, for example, argon, nitrogen, etc.

例如能夠藉由大氣壓電漿來進行電漿處理。藉由電漿處理將官能基賦予給熱塑性聚合物薄膜10的表面,由此在已將銅箔熱壓合在熱塑性聚合物薄膜10上時,能夠得到熱塑性聚合物薄膜10與銅箔的化學結合,能夠提升熱塑性聚合物薄膜10與銅箔的接合強度。需要說明的是,該電漿處理是為了提升熱塑性聚合物薄膜10與銅箔的接合強度而進行者,並非一定要進行該處理。出於相同的目的,也可以將矽烷偶合劑賦予給銅箔的表面。For example, plasma treatment can be performed by atmospheric pressure plasma. By plasma treatment, functional groups are imparted to the surface of the thermoplastic polymer film 10, so that when the copper foil is hot-pressed on the thermoplastic polymer film 10, chemical bonding between the thermoplastic polymer film 10 and the copper foil can be obtained, and the bonding strength between the thermoplastic polymer film 10 and the copper foil can be improved. It should be noted that the plasma treatment is performed to improve the bonding strength between the thermoplastic polymer film 10 and the copper foil, and it is not necessary to perform the treatment. For the same purpose, a silane coupling agent can also be imparted to the surface of the copper foil.

接著,如圖1所示,在已將第一銅箔11a重疊在熱塑性聚合物薄膜10的表面上的狀態下(第一銅箔/聚合物薄膜),以熱塑性聚合物薄膜10軟化的溫度對熱塑性聚合物薄膜10與第一銅箔11a進行熱壓合(步驟S2)。此時,一對加熱加壓輥22或24並非一定需要設定為相同的溫度,但在溫度不同的情況下,將較高的溫度設定為熱壓合溫度。Next, as shown in FIG1 , in a state where the first copper foil 11a is overlapped on the surface of the thermoplastic polymer film 10 (first copper foil/polymer film), the thermoplastic polymer film 10 and the first copper foil 11a are heat-pressed at a temperature at which the thermoplastic polymer film 10 softens (step S2). At this time, the pair of heating and pressing rollers 22 or 24 do not necessarily need to be set to the same temperature, but in the case of different temperatures, the higher temperature is set as the heat-pressing temperature.

具體而言,如圖2所示,在已將由第二捲出軸21供給的第一銅箔11a重疊在由第一捲出軸20供給的熱塑性聚合物薄膜10的表面上的狀態下,使用導輥50導入一對第一加熱加壓輥22,對熱塑性聚合物薄膜10與第一銅箔11a進行熱壓合。Specifically, as shown in FIG. 2 , in a state where the first copper foil 11 a supplied by the second unwinding reel 21 is overlapped on the surface of the thermoplastic polymer film 10 supplied by the first unwinding reel 20, a pair of first heating and pressing rollers 22 are introduced using a guide roller 50 to perform heat pressing on the thermoplastic polymer film 10 and the first copper foil 11 a.

在進行熱壓合時,已軟化的熱塑性聚合物薄膜10會進入第一銅箔11a表面的微細凹凸中且凝固,而表現出錨固效應,熱塑性聚合物薄膜與銅箔由此便被臨時接合在一起。During the heat pressing, the softened thermoplastic polymer film 10 will enter the fine concave-convex surfaces of the first copper foil 11a and solidify, thereby exhibiting an anchoring effect, and the thermoplastic polymer film and the copper foil are thus temporarily bonded together.

在已對熱塑性聚合物薄膜10的表面進行了電漿處理的情況下,除了由錨固效應產生的機械結合以外,還能夠得到熱塑性聚合物薄膜10與銅箔的化學結合,因此熱塑性聚合物薄膜10與銅箔的接合強度進一步提升。When the surface of the thermoplastic polymer film 10 has been plasma treated, in addition to the mechanical bonding caused by the anchoring effect, the thermoplastic polymer film 10 and the copper foil can also be chemically bonded, so the bonding strength between the thermoplastic polymer film 10 and the copper foil is further improved.

將熱塑性聚合物薄膜10與第一銅箔11a熱壓合的溫度較佳在熱塑性聚合物薄膜的軟化溫度以上且在比熱塑性聚合物薄膜的軟化溫度高20℃的溫度以下。若熱壓合溫度低於熱塑性聚合物薄膜的軟化溫度,空氣則會進入熱塑性聚合物薄膜10與第一銅箔11a的界面,而無法發揮充分的錨固效應,無法充分地得到熱塑性聚合物薄膜10與銅箔11a的臨時接合,因此不佳。若熱壓合溫度超過比熱塑性聚合物薄膜的軟化溫度高20℃的溫度,則熱塑性聚合物薄膜10的尚未重疊第一銅箔11a一側的表面會黏著於加熱加壓輥22而無法剝離,因此不佳。The temperature for heat pressing the thermoplastic polymer film 10 and the first copper foil 11a is preferably above the softening temperature of the thermoplastic polymer film and below a temperature 20°C higher than the softening temperature of the thermoplastic polymer film. If the heat pressing temperature is lower than the softening temperature of the thermoplastic polymer film, air will enter the interface between the thermoplastic polymer film 10 and the first copper foil 11a, and the anchoring effect cannot be fully exerted, and the temporary bonding of the thermoplastic polymer film 10 and the copper foil 11a cannot be fully obtained, which is not good. If the heat pressing temperature exceeds the softening temperature of the thermoplastic polymer film by 20°C, the surface of the thermoplastic polymer film 10 that has not overlapped the first copper foil 11a will adhere to the heat pressing roller 22 and cannot be peeled off, which is not good.

熱塑性聚合物薄膜的軟化溫度,能夠使用動態機械分析(DMA)法,根據JISK7244-4:1999,由損耗正切(tanδ=損耗模量/儲存模量)的峰值溫度來進行測量。具體而言,使用動態機械分析裝置(Rheology公司製造「DVE-V4FT Rheospectoler」),在拉伸模式下(頻率:11Hz),以3℃/分鐘的升溫速度,根據材料適當地從低溫加熱至高溫,測量儲存模量(E’)、損耗模量(E’’)以及損耗正切(tanδ),能夠由損耗正切的峰值溫度測量軟化溫度。The softening temperature of thermoplastic polymer films can be measured by the dynamic mechanical analysis (DMA) method according to JIS K7244-4: 1999, from the peak temperature of the loss tangent (tanδ = loss modulus / storage modulus). Specifically, a dynamic mechanical analysis device ("DVE-V4FT Rheospectoler" manufactured by Rheology) is used to measure the storage modulus (E'), loss modulus (E'') and loss tangent (tanδ) by heating the material from low temperature to high temperature in the tensile mode (frequency: 11 Hz) at a heating rate of 3°C/min. The softening temperature can be measured from the peak temperature of the loss tangent.

在本實施形態中,由於熱塑性聚合物薄膜10與第一銅箔11a的熱壓合在低於熱塑性聚合物薄膜10的熔點的軟化溫度附近進行,因此在進行熱壓合時,不會從熱塑性聚合物薄膜10釋放出氣體。因此,在熱壓合製程中,在熱塑性聚合物薄膜的內部或與銅箔的界面處,不會產生由來自熱塑性聚合物薄膜的釋放氣體引起的發泡。In the present embodiment, since the thermoplastic polymer film 10 and the first copper foil 11a are heat-compressed at a softening temperature lower than the melting point of the thermoplastic polymer film 10, no gas is released from the thermoplastic polymer film 10 during the heat-compressing process. Therefore, during the heat-compressing process, no bubbles are generated inside the thermoplastic polymer film or at the interface with the copper foil due to the released gas from the thermoplastic polymer film.

接著,如圖1所示,使熱塑性聚合物薄膜10的尚未積層第一銅箔11a的背面為開放狀態(第一銅箔/聚合物薄膜),以接近熱塑性聚合物薄膜10的熔點的溫度對熱塑性聚合物薄膜10進行加熱(步驟S3)。Next, as shown in FIG. 1 , the back side of the thermoplastic polymer film 10 on which the first copper foil 11a has not yet been laminated is opened (first copper foil/polymer film), and the thermoplastic polymer film 10 is heated at a temperature close to the melting point of the thermoplastic polymer film 10 (step S3 ).

具體而言,如圖2所示,使用導輥51、52,將藉由一對第一加熱加壓輥22而積層有第一銅箔11a的熱塑性聚合物薄膜10引導至第一加熱裝置40a附近,對熱塑性聚合物薄膜10進行加熱。Specifically, as shown in FIG. 2 , the thermoplastic polymer film 10 on which the first copper foil 11 a is laminated by a pair of first heating and pressurizing rollers 22 is guided to the vicinity of the first heating device 40 a by guide rollers 51 and 52 to heat the thermoplastic polymer film 10 .

在熔點附近已液化的熱塑性聚合物薄膜10在與第一銅箔11a的界面處表現出「濕潤」,液化的熱塑性聚合物薄膜10由此而會無間隙地進入第一銅箔11a表面的微細凹凸中並凝固,能夠得到更好的錨固效應。其結果為,無須用一對加熱加壓輥對熱塑性聚合物薄膜10與第一銅箔11a進行熱壓合,就能夠得到熱塑性聚合物薄膜10與第一銅箔11a的牢固結合。The thermoplastic polymer film 10, which has been liquefied near the melting point, shows "wetness" at the interface with the first copper foil 11a. The liquefied thermoplastic polymer film 10 thus enters the fine concave-convex surface of the first copper foil 11a without gaps and solidifies, which can obtain a better anchoring effect. As a result, the thermoplastic polymer film 10 and the first copper foil 11a can be firmly bonded without using a pair of heating and pressure rollers to heat-press the thermoplastic polymer film 10 and the first copper foil 11a.

需要說明的是,在使用液晶聚合物薄膜作為熱塑性聚合物薄膜10的情況下,由於液晶聚合物薄膜在熔點附近分子配向變得隨機,因此厚度方向的強度增加,而能夠進一步提升液晶聚合物薄膜與第一銅箔的接合強度。It should be noted that when a liquid crystal polymer film is used as the thermoplastic polymer film 10, since the molecular orientation of the liquid crystal polymer film becomes random near the melting point, the strength in the thickness direction increases, and the bonding strength between the liquid crystal polymer film and the first copper foil can be further improved.

於此,對熱塑性聚合物薄膜10進行加熱的溫度較佳在比熱塑性聚合物薄膜10的熔點低20℃的溫度以上且在比熱塑性聚合物薄膜10的熔點高50℃的溫度以下。加熱溫度若低於比熱塑性聚合物薄膜10的熔點低20℃的溫度,則得不到熱塑性聚合物薄膜10與第一銅箔11a的接合強度,因此不佳。加熱溫度若高於比熱塑性聚合物薄膜10的熔點高50℃的溫度,則熱塑性聚合物薄膜10的熱分解會過度進行,接合強度會降低,因此不佳。Here, the temperature at which the thermoplastic polymer film 10 is heated is preferably at least 20°C lower than the melting point of the thermoplastic polymer film 10 and at most 50°C higher than the melting point of the thermoplastic polymer film 10. If the heating temperature is lower than 20°C lower than the melting point of the thermoplastic polymer film 10, the bonding strength between the thermoplastic polymer film 10 and the first copper foil 11a cannot be obtained, which is not good. If the heating temperature is higher than 50°C higher than the melting point of the thermoplastic polymer film 10, the thermal decomposition of the thermoplastic polymer film 10 will proceed excessively, and the bonding strength will decrease, which is not good.

熱塑性聚合物薄膜10的熔點能夠用差示掃描量熱(DSC)法進行測量。具體而言,能夠用差示掃描量熱儀(Hitachi High-Technologies Corporation製、DSC7200),在通入氮氣(30mL/分鐘),升溫速度為10℃/分鐘的條件下,將約10mg的試樣以10℃/分鐘的升溫速度從室溫加熱至預想熔點以上的溫度,由已熔融時觀測到的吸熱峰的峰頂溫度求出熔點。The melting point of the thermoplastic polymer film 10 can be measured by differential scanning calorimetry (DSC). Specifically, about 10 mg of a sample is heated from room temperature to a temperature above the expected melting point at a heating rate of 10°C/min under the conditions of nitrogen (30 mL/min) and a heating rate of 10°C/min using a differential scanning calorimeter (DSC7200 manufactured by Hitachi High-Technologies Corporation). The melting point can be determined from the peak top temperature of the endothermic peak observed when the sample is melted.

在本實施形態中,在熔點附近對熱塑性聚合物薄膜10進行加熱時,熱塑性聚合物薄膜10的尚未積層第一銅箔11a的背面成為開放狀態。因此,在熔點附近的加熱製程中,能夠將從熱塑性聚合物薄膜內釋放出來的氣體從熱塑性聚合物薄膜10的背面向外部釋放。其結果為,能夠防止在熱塑性聚合物薄膜10的內部或與第一銅箔11a的界面處的發泡。In this embodiment, when the thermoplastic polymer film 10 is heated near the melting point, the back side of the thermoplastic polymer film 10 on which the first copper foil 11a is not yet laminated is in an open state. Therefore, during the heating process near the melting point, the gas released from the thermoplastic polymer film can be released to the outside from the back side of the thermoplastic polymer film 10. As a result, the formation of bubbles inside the thermoplastic polymer film 10 or at the interface with the first copper foil 11a can be prevented.

第一加熱裝置40a例如能夠使用電磁感應加熱裝置。電磁感應加熱裝置是一種將複數個感應加熱線圈佈置在熱塑性聚合物薄膜10附近,藉由使電流流過感應加熱線圈,利用電磁感應直接對第一銅箔11a進行加熱的裝置。這樣便能夠利用來自第一銅箔11a的熱傳導對已接合有第一銅箔11a的熱塑性聚合物薄膜10進行加熱。The first heating device 40a can be, for example, an electromagnetic induction heating device. The electromagnetic induction heating device is a device that arranges a plurality of induction heating coils near the thermoplastic polymer film 10 and directly heats the first copper foil 11a by electromagnetic induction by passing current through the induction heating coils. In this way, the thermoplastic polymer film 10 bonded with the first copper foil 11a can be heated by heat conduction from the first copper foil 11a.

需要說明的是,第一銅箔11a為非磁性體,但如果銅箔的厚度為約100μm以下,則會產生電阻損耗,因此藉由使電磁感應的頻率、第一銅箔11a與感應加熱線圈的位置關係適當化,便能夠利用在銅箔內部感應的渦電流所產生的焦耳熱對第一銅箔11a進行加熱。若銅箔的厚度在20μm以下,則容易使銅箔發熱,但如果為1μm以下,則發熱量會不足,難以充分地對熱塑性聚合物薄膜10進行加熱,因此不佳。It should be noted that the first copper foil 11a is a non-magnetic material, but if the thickness of the copper foil is less than about 100 μm, resistance loss will occur. Therefore, by properly adjusting the frequency of electromagnetic induction and the positional relationship between the first copper foil 11a and the induction heating coil, the first copper foil 11a can be heated by the Joule heat generated by the eddy current induced inside the copper foil. If the thickness of the copper foil is less than 20 μm, it is easy to heat the copper foil, but if it is less than 1 μm, the heat generation will be insufficient, and it is difficult to fully heat the thermoplastic polymer film 10, so it is not good.

如圖2所示,已被加熱的熱塑性聚合物薄膜10的溫度,藉由使用佈置在熱塑性聚合物薄膜10附近的高光譜照相機41a,檢測由熱塑性聚合物薄膜10或第一銅箔11a的加熱過程引起的表面的反射光譜的微小的不可逆變化,便能夠進行測量。由於電磁感應加熱的響應性優異,因此藉由將用高光譜照相機41a測量出的溫度回饋給電磁感應加熱裝置,便能夠迅速地控制對熱塑性聚合物薄膜10進行加熱的溫度。As shown in Fig. 2, the temperature of the heated thermoplastic polymer film 10 can be measured by detecting the minute irreversible change of the surface reflection spectrum caused by the heating process of the thermoplastic polymer film 10 or the first copper foil 11a using a hyperspectral camera 41a arranged near the thermoplastic polymer film 10. Since the electromagnetic induction heating has excellent responsiveness, the temperature at which the thermoplastic polymer film 10 is heated can be quickly controlled by feeding back the temperature measured by the hyperspectral camera 41a to the electromagnetic induction heating device.

第一加熱裝置40a除了電磁感應加熱裝置以外,也可以使用電阻加熱裝置、加熱燈裝置等。The first heating device 40a may be a resistance heating device, a heating lamp device, or the like, in addition to an electromagnetic induction heating device.

接著,如圖1所示,對熱塑性聚合物薄膜10的背面進行電漿處理(步驟S4)。具體而言,如圖2所示,使用導輥53將已由第一加熱裝置40a加熱的熱塑性聚合物薄膜10引導至電漿處理裝置30b附近,用電漿處理裝置30b對熱塑性聚合物薄膜10的背面進行電漿處理。Next, as shown in FIG1 , the back side of the thermoplastic polymer film 10 is subjected to plasma treatment (step S4). Specifically, as shown in FIG2 , the thermoplastic polymer film 10 heated by the first heating device 40 a is guided to the vicinity of the plasma treatment device 30 b by the guide roller 53, and the back side of the thermoplastic polymer film 10 is subjected to plasma treatment by the plasma treatment device 30 b.

該電漿處理與已在步驟S2中進行的熱塑性聚合物薄膜10表面的電漿處理目的相同,因此省略說明。This plasma treatment has the same purpose as the plasma treatment of the surface of the thermoplastic polymer film 10 already performed in step S2, so the description thereof is omitted.

接著,如圖1所示,在已第二銅箔11b重疊在熱塑性聚合物薄膜10的背面上的狀態下(第一銅箔/聚合物薄膜/第二銅箔),以熱塑性聚合物薄膜10軟化的溫度對熱塑性聚合物薄膜10與第二銅箔11b進行熱壓合(步驟S5)。Next, as shown in FIG. 1 , in a state where the second copper foil 11 b is overlapped on the back side of the thermoplastic polymer film 10 (first copper foil/polymer film/second copper foil), the thermoplastic polymer film 10 and the second copper foil 11 b are heat-pressed at a temperature at which the thermoplastic polymer film 10 softens (step S5).

具體而言,如圖2所示,在已將由第三捲出軸23供給的第二銅箔11b重疊在用電漿處理裝置30b進行了電漿處理的熱塑性聚合物薄膜10的背面上的狀態下,使用導輥54導入一對第二加熱加壓輥24,將熱塑性聚合物薄膜10與第二銅箔11b熱壓合。Specifically, as shown in FIG. 2 , in a state where the second copper foil 11 b supplied by the third unwinding shaft 23 is overlapped on the back side of the thermoplastic polymer film 10 that has been plasma-treated by the plasma processing device 30 b, a pair of second heating and pressurizing rollers 24 are introduced using guide rollers 54 to thermally pressurize the thermoplastic polymer film 10 and the second copper foil 11 b.

在進行熱壓合時,已軟化的熱塑性聚合物薄膜10會進入第二銅箔11b表面的微細凹凸中且凝固,而表現出錨固效應,熱塑性聚合物薄膜10與第二銅箔11b由此便被臨時接合在一起。During the heat pressing, the softened thermoplastic polymer film 10 will enter the fine concave-convex surfaces of the second copper foil 11b and solidify, thereby exhibiting an anchoring effect, and the thermoplastic polymer film 10 and the second copper foil 11b are thus temporarily bonded together.

於此,對熱塑性聚合物薄膜10與第二銅箔11b進行熱壓合的溫度較佳在熱塑性聚合物薄膜10的軟化溫度以上且在比熱塑性聚合物薄膜10的軟化溫度高20℃的溫度以下。若熱壓合溫度低於熱塑性聚合物薄膜的軟化溫度,空氣則會進入熱塑性聚合物薄膜10與第二銅箔11b的界面,而無法發揮充分的錨固效應,無法充分地得到熱塑性聚合物薄膜10與第二銅箔11b的臨時接合,因此不佳。Here, the temperature for heat pressing the thermoplastic polymer film 10 and the second copper foil 11b is preferably above the softening temperature of the thermoplastic polymer film 10 and below a temperature 20°C higher than the softening temperature of the thermoplastic polymer film 10. If the heat pressing temperature is lower than the softening temperature of the thermoplastic polymer film, air will enter the interface between the thermoplastic polymer film 10 and the second copper foil 11b, and the anchoring effect cannot be fully exerted, and the temporary bonding of the thermoplastic polymer film 10 and the second copper foil 11b cannot be fully obtained, which is not good.

步驟S2的熱壓合製程中的溫度與步驟S5的熱壓合製程中的溫度並非一定為相同的溫度。例如,當將熱塑性聚合物薄膜10加熱至接近熔點的溫度時,則會出現軟化溫度上升的情形。步驟S5的熱壓合製程在步驟S3的加熱至接近熔點的溫度的加熱製程之後進行。因此,步驟S5的熱壓合製程中的熱塑性聚合物薄膜10的軟化溫度是指在步驟S3的加熱製程後的熱塑性聚合物薄膜10的軟化溫度。在熱塑性聚合物薄膜10的軟化溫度在步驟S3的加熱製程中已上升的情況下,可以將步驟S5的熱壓合製程中的溫度設定為高於步驟S2的熱壓合製程中的溫度。The temperature in the heat pressing process of step S2 is not necessarily the same as the temperature in the heat pressing process of step S5. For example, when the thermoplastic polymer film 10 is heated to a temperature close to the melting point, the softening temperature rises. The heat pressing process of step S5 is performed after the heating process of step S3 to a temperature close to the melting point. Therefore, the softening temperature of the thermoplastic polymer film 10 in the heat pressing process of step S5 refers to the softening temperature of the thermoplastic polymer film 10 after the heating process of step S3. In the case where the softening temperature of the thermoplastic polymer film 10 has been increased in the heating process of step S3, the temperature in the heat pressing process of step S5 may be set higher than the temperature in the heat pressing process of step S2.

接著,如圖1所示,在熱塑性聚合物薄膜10的兩個面上已積層有第一銅箔11a及第二銅箔11b的狀態下(第一銅箔/聚合物薄膜/第二銅箔),以接近熱塑性聚合物薄膜10的熔點的溫度對熱塑性聚合物薄膜10進行加熱(步驟S6)。Next, as shown in FIG. 1 , in a state where the first copper foil 11 a and the second copper foil 11 b are already layered on both surfaces of the thermoplastic polymer film 10 (first copper foil/polymer film/second copper foil), the thermoplastic polymer film 10 is heated at a temperature close to the melting point of the thermoplastic polymer film 10 (step S6).

具體而言,如圖2所示,使用導輥55、56,將藉由一對第二加熱加壓輥24已在兩個面上分別積層有第一銅箔11a及第二銅箔11b的熱塑性聚合物薄膜10引導至第二加熱裝置40b附近,對熱塑性聚合物薄膜10進行加熱。Specifically, as shown in FIG. 2 , the thermoplastic polymer film 10 on which the first copper foil 11a and the second copper foil 11b are respectively laminated on both sides by a pair of second heating and pressurizing rollers 24 is guided to the vicinity of the second heating device 40b to heat the thermoplastic polymer film 10.

第二加熱裝置40b例如能夠使用電磁感應加熱裝置。如圖2所示,加熱後的熱塑性聚合物薄膜10的溫度,能夠使用佈置在熱塑性聚合物薄膜10附近的高光譜照相機41b來進行測量。第二加熱裝置40b除了電磁感應加熱裝置以外,也可以使用電阻加熱裝置、加熱燈裝置等。The second heating device 40b can be, for example, an electromagnetic induction heating device. As shown in FIG2 , the temperature of the heated thermoplastic polymer film 10 can be measured using a hyperspectral camera 41b disposed near the thermoplastic polymer film 10. In addition to the electromagnetic induction heating device, the second heating device 40b can also be a resistance heating device, a heating lamp device, etc.

在熔點附近已液化的熱塑性聚合物薄膜10在與第二銅箔11b的界面處表現出「濕潤」,液化的熱塑性聚合物薄膜10由此而會無間隙地進入第二銅箔11b表面的微細凹凸中並凝固,能夠得到更好的錨固效應。其結果為,熱塑性聚合物薄膜10與第二銅箔11b牢固地結合在一起。The thermoplastic polymer film 10, which has been liquefied near the melting point, shows "wetness" at the interface with the second copper foil 11b. The liquefied thermoplastic polymer film 10 thus enters the fine concave-convex surface of the second copper foil 11b without gaps and solidifies, which can obtain a better anchoring effect. As a result, the thermoplastic polymer film 10 and the second copper foil 11b are firmly bonded together.

於此,對熱塑性聚合物薄膜10進行加熱的溫度較佳在比熱塑性聚合物薄膜10的熔點低20℃的溫度以上且在比熱塑性聚合物薄膜10的熔點高50℃的溫度以下。加熱溫度若低於比熱塑性聚合物薄膜10的熔點低20℃的溫度,則得不到熱塑性聚合物薄膜10與第一銅箔11a的接合強度,因此不佳。加熱溫度若高於比熱塑性聚合物薄膜10的熔點高50℃的溫度,則熱塑性聚合物薄膜10的熱分解會過度進行,接合強度會降低,因此不佳。Here, the temperature at which the thermoplastic polymer film 10 is heated is preferably at least 20°C lower than the melting point of the thermoplastic polymer film 10 and at most 50°C higher than the melting point of the thermoplastic polymer film 10. If the heating temperature is lower than 20°C lower than the melting point of the thermoplastic polymer film 10, the bonding strength between the thermoplastic polymer film 10 and the first copper foil 11a cannot be obtained, which is not good. If the heating temperature is higher than 50°C higher than the melting point of the thermoplastic polymer film 10, the thermal decomposition of the thermoplastic polymer film 10 will proceed excessively, and the bonding strength will decrease, which is not good.

在本實施形態中,在以接近熔點的溫度對熱塑性聚合物薄膜10進行加熱時,即使在熱塑性聚合物薄膜10的兩個面上積層有第一銅箔11a及第二銅箔11b,也會因為在步驟S3中熱塑性聚合物薄膜10已經以接近熔點的溫度被加熱,氣體便不會重新從熱塑性聚合物薄膜10釋放出來。因此,在熱塑性聚合物薄膜10的內部或與第一銅箔11a及第二銅箔11b的界面處,不會產生由來自熱塑性聚合物薄膜10釋放氣體引起的發泡。In this embodiment, when the thermoplastic polymer film 10 is heated at a temperature close to the melting point, even if the first copper foil 11a and the second copper foil 11b are laminated on both surfaces of the thermoplastic polymer film 10, since the thermoplastic polymer film 10 has been heated at a temperature close to the melting point in step S3, gas will not be released again from the thermoplastic polymer film 10. Therefore, bubbles caused by the release of gas from the thermoplastic polymer film 10 will not be generated inside the thermoplastic polymer film 10 or at the interface with the first copper foil 11a and the second copper foil 11b.

步驟S3的加熱製程中的溫度及步驟S6的加熱製程中的溫度並非一定為相同的溫度。例如,當將熱塑性聚合物薄膜10加熱至接近熔點的溫度時,熔點可能會上升。步驟S6的加熱製程在步驟S3的加熱製程之後進行。因此,步驟S6的加熱製程中的熱塑性聚合物薄膜10的熔點是指步驟S3的加熱製程後的熱塑性聚合物薄膜10的熔點。熱塑性聚合物薄膜10的熔點在步驟S3的加熱製程中已上升的情況下,可以將步驟S6的加熱製程中的溫度設定為高於步驟S3的加熱製程中的溫度。The temperature in the heating process of step S3 and the temperature in the heating process of step S6 are not necessarily the same temperature. For example, when the thermoplastic polymer film 10 is heated to a temperature close to the melting point, the melting point may rise. The heating process of step S6 is performed after the heating process of step S3. Therefore, the melting point of the thermoplastic polymer film 10 in the heating process of step S6 refers to the melting point of the thermoplastic polymer film 10 after the heating process of step S3. In the case where the melting point of the thermoplastic polymer film 10 has risen in the heating process of step S3, the temperature in the heating process of step S6 can be set to be higher than the temperature in the heating process of step S3.

或者,也可以將步驟S6的加熱製程中的溫度設定為低於步驟S3的加熱製程中的溫度。萬一在步驟S3的加熱製程後氣體還殘存在熱塑性聚合物薄膜10內,藉由將步驟S6的加熱溫度設定為低於步驟S3的加熱溫度,便能夠抑制殘存氣體的釋放。Alternatively, the temperature in the heating process of step S6 may be set lower than the temperature in the heating process of step S3. If gas still remains in the thermoplastic polymer film 10 after the heating process of step S3, the release of the residual gas can be suppressed by setting the heating temperature of step S6 lower than the heating temperature of step S3.

最後,如圖2所示,藉由用捲取軸25將已由第二加熱裝置40b加熱的熱塑性聚合物薄膜10捲取,便會得到在熱塑性聚合物薄膜10的兩個面上積層有第一銅箔11a及第二銅箔11b的積層體。Finally, as shown in FIG. 2 , by winding up the thermoplastic polymer film 10 heated by the second heating device 40 b using the winding shaft 25 , a laminate having the first copper foil 11 a and the second copper foil 11 b laminated on both surfaces of the thermoplastic polymer film 10 is obtained.

如上所述,根據本實施形態,在維持熱塑性聚合物薄膜10與第一銅箔11a及第二銅箔11b的接合強度的同時,不在熱塑性聚合物薄膜10的內部、或與第一銅箔11a及第二銅箔11b的界面處產生由來自熱塑性聚合物薄膜10的釋放氣體引起的發泡。能夠這樣製造在熱塑性聚合物薄膜10的兩個面上積層有第一銅箔11a及第二銅箔11b的積層體。As described above, according to the present embodiment, while the bonding strength between the thermoplastic polymer film 10 and the first copper foil 11a and the second copper foil 11b is maintained, bubbles are not generated inside the thermoplastic polymer film 10 or at the interface between the first copper foil 11a and the second copper foil 11b due to the released gas from the thermoplastic polymer film 10. In this way, a laminate in which the first copper foil 11a and the second copper foil 11b are laminated on both surfaces of the thermoplastic polymer film 10 can be manufactured.

藉由以捲對捲方式連續地進行將第一銅箔11a熱壓合在熱塑性聚合物薄膜10的一個面上的製程、對在單面上已積層有第一銅箔11a的熱塑性聚合物薄膜10進行加熱的製程、將第二銅箔11b熱壓合在熱塑性聚合物薄膜10的另一個面上的製程、以及對在兩個面上已積層有第一銅箔11a及第二銅箔11b的熱塑性聚合物薄膜10進行加熱的製程,便能夠以良好的生產率製造在熱塑性聚合物薄膜10的兩個面上積層有第一銅箔11a及第二銅箔11b的積層體。By continuously performing the processes of heat-pressing the first copper foil 11a on one side of the thermoplastic polymer film 10 in a roll-to-roll manner, heating the thermoplastic polymer film 10 on which the first copper foil 11a is already laminated on one side, heat-pressing the second copper foil 11b on the other side of the thermoplastic polymer film 10, and heating the thermoplastic polymer film 10 on which the first copper foil 11a and the second copper foil 11b are already laminated on both sides, a laminate having the first copper foil 11a and the second copper foil 11b laminated on both sides of the thermoplastic polymer film 10 can be manufactured with good productivity.

如圖2所示,本實施形態中的積層體的製造裝置包括供給熱塑性聚合物薄膜10的第一捲出軸20、供給第一銅箔11a的第二捲出軸21、供給第二銅箔11b的第三捲出軸23、捲取積層體的捲取軸25、一對第一加熱加壓輥22、一對第二加熱加壓輥24、第一加熱裝置40a以及第二加熱裝置40b。As shown in FIG2 , the manufacturing apparatus of the laminate in the present embodiment includes a first unwinding shaft 20 for supplying a thermoplastic polymer film 10, a second unwinding shaft 21 for supplying a first copper foil 11 a, a third unwinding shaft 23 for supplying a second copper foil 11 b, a winding shaft 25 for winding the laminate, a pair of first heating and pressurizing rollers 22, a pair of second heating and pressurizing rollers 24, a first heating device 40 a, and a second heating device 40 b.

一對第二加熱加壓輥24在已將由第二捲出軸21供給的第一銅箔11a重疊在由第一捲出軸20供給的熱塑性聚合物薄膜10的表面上的狀態下,以熱塑性聚合物薄膜10軟化的溫度對熱塑性聚合物薄膜10與第一銅箔11a進行熱壓合。A pair of second heating and pressurizing rollers 24 heat-compresses the thermoplastic polymer film 10 and the first copper foil 11a at a temperature at which the thermoplastic polymer film 10 softens, while the first copper foil 11a supplied from the second unwinding reel 21 is overlapped on the surface of the thermoplastic polymer film 10 supplied from the first unwinding reel 20.

第一加熱裝置40a以接近熱塑性聚合物薄膜10的熔點的溫度對藉由一對第一加熱加壓輥22而積層有第一銅箔11a的熱塑性聚合物薄膜10進行加熱,此時,使熱塑性聚合物薄膜10的尚未積層第一銅箔11a的背面為開放狀態。The first heating device 40a heats the thermoplastic polymer film 10 laminated with the first copper foil 11a by a pair of first heating and pressure rollers 22 at a temperature close to the melting point of the thermoplastic polymer film 10. At this time, the back side of the thermoplastic polymer film 10 not laminated with the first copper foil 11a is open.

一對第二加熱加壓輥24在已將由第三捲出軸23供給的第二銅箔11b重疊在已由第一加熱裝置40a加熱的熱塑性聚合物薄膜10的背面上的狀態下,以熱塑性聚合物薄膜10軟化的溫度對熱塑性聚合物薄膜10與第二銅箔11b進行熱壓合。A pair of second heating and pressing rollers 24 heat-press the thermoplastic polymer film 10 and the second copper foil 11b at a temperature at which the thermoplastic polymer film 10 softens, while overlapping the second copper foil 11b supplied by the third unwinding shaft 23 on the back side of the thermoplastic polymer film 10 heated by the first heating device 40a.

第二加熱裝置40b在熱塑性聚合物薄膜10的兩個面上積層有第一銅箔11a及第二銅箔11b的狀態下,以接近熱塑性聚合物薄膜10的熔點的溫度對已藉由一對第二加熱加壓輥24積層有第二銅箔11b的熱塑性聚合物薄膜10進行加熱。The second heating device 40b heats the thermoplastic polymer film 10, which has been laminated with the second copper foil 11b by a pair of second heating and pressure rollers 24, at a temperature close to the melting point of the thermoplastic polymer film 10 when the first copper foil 11a and the second copper foil 11b are laminated on both surfaces of the thermoplastic polymer film 10.

捲取軸25將已由第二加熱裝置40b加熱的、在熱塑性聚合物薄膜10的兩個面上積層有第一銅箔11a及第二銅箔11b的積層體捲起來。 [實施例] The winding shaft 25 rolls up the laminated body in which the first copper foil 11a and the second copper foil 11b are laminated on both surfaces of the thermoplastic polymer film 10 which has been heated by the second heating device 40b. [Example]

以下列舉實施例對本發明進行更詳細的說明,但本發明不受這些實施例的任何限定。The present invention is described in more detail with reference to the following embodiments, but the present invention is not limited to these embodiments.

在實施例和比較例中,使用以下液晶聚合物薄膜及銅箔。In the embodiments and comparative examples, the following liquid crystal polymer films and copper foils were used.

液晶聚合物薄膜: CHIYODA INTEGRE公司製造,商品名稱「PELLICULE」(厚度:50μm,寬度:130mm,軟化溫度:170℃,熔點:280℃)Liquid crystal polymer film: Made by CHIYODA INTEGRE, trade name "PELLICULE" (thickness: 50μm, width: 130mm, softening temperature: 170℃, melting point: 280℃)

銅箔:JX金屬公司製造,電解銅箔,型號「JXEFL-V2」(厚度:12μm,寬度:270mm)Copper foil: manufactured by JX Metal Corporation, electrolytic copper foil, model "JXEFL-V2" (thickness: 12μm, width: 270mm)

用圖2所示的捲對捲方式的製造裝置製作出了積層體。加工速度為1m/min,液晶聚合物薄膜10的抽出張力為100N/m,第一銅箔、第二銅箔11a、11b的抽出張力為100N/m,積層體的捲取張力為150N/m。The laminate was produced using the roll-to-roll manufacturing apparatus shown in Fig. 2. The processing speed was 1 m/min, the tension for drawing out the liquid crystal polymer film 10 was 100 N/m, the tension for drawing out the first and second copper foils 11a and 11b was 100 N/m, and the winding tension for the laminate was 150 N/m.

電漿處理裝置30a、30b使用大氣壓電漿裝置,以功率:0.5W・min/cm2、頻率:50kHz~100kHz進行電漿照射。將電漿氣體設為氮95%、乾燥空氣5%、總流量100L/min/台。The plasma treatment devices 30a and 30b use atmospheric pressure plasma devices, and perform plasma irradiation at a power of 0.5 W·min/cm2 and a frequency of 50 kHz to 100 kHz. The plasma gas is set to 95% nitrogen, 5% dry air, and a total flow rate of 100 L/min/unit.

一對加熱加壓輥22、24使用輥的直徑:6吋、輥的寬度:500mm、薄膜加壓面積:2.6cm2的輥,加壓壓力為150MPa。A pair of heating and pressurizing rollers 22 and 24 use rollers with a diameter of 6 inches, a width of 500 mm, a film pressurizing area of 2.6 cm2, and a pressurizing pressure of 150 MPa.

使用本公司自行開發的電磁感應加熱裝置作為加熱裝置40a、40b。The electromagnetic induction heating device developed by our company is used as the heating devices 40a and 40b.

熱塑性聚合物薄膜10及第一銅箔11a或第二銅箔11b的溫度藉由以下方法進行了計算。The temperatures of the thermoplastic polymer film 10 and the first copper foil 11a or the second copper foil 11b were calculated by the following method.

首先,用高光譜照相機(Specim製造「FX10」)41a、41b觀察熱塑性聚合物薄膜10及第一銅箔11a或第二銅箔11b的表面,由已得到的反射光譜計算出了色度a*值或b*值。用校準曲線由上述已計算出的色度a*值或b*值、以及預先用相同的方法對已知溫度的加熱板求出的a*值或b*值,計算出了熱塑性聚合物薄膜10及第一銅箔11a或第二銅箔11b的溫度。需要說明的是,在使用紅外輻射溫度計的情況下,若熱塑性聚合物薄膜10、第一銅箔11a或第二銅箔11b因加熱變色,放射係數發生變化,則無法準確地測量溫度,但在使用高光譜照相機41a、41b的情況下,能夠根據顏色的變化由校準曲線準確地計算溫度。不只是觀察部位的溫度,還能觀察到達到該溫度的最高溫度的過程。 [評價方法] First, the surfaces of the thermoplastic polymer film 10 and the first copper foil 11a or the second copper foil 11b are observed by using a hyperspectral camera (Specim's "FX10") 41a, 41b, and the chromaticity a* value or b* value is calculated from the obtained reflection spectrum. The temperature of the thermoplastic polymer film 10 and the first copper foil 11a or the second copper foil 11b is calculated using a calibration curve from the above-calculated chromaticity a* value or b* value and the a* value or b* value previously obtained by the same method for a heating plate of known temperature. It should be noted that when using an infrared thermometer, if the thermoplastic polymer film 10, the first copper foil 11a or the second copper foil 11b changes color due to heating and the radiation coefficient changes, the temperature cannot be accurately measured. However, when using hyperspectral cameras 41a and 41b, the temperature can be accurately calculated from the calibration curve based on the color change. Not only the temperature of the observed part, but also the process of reaching the highest temperature of that temperature can be observed. [Evaluation method]

液晶聚合物薄膜10與第一銅箔11a、第二銅箔11b的接合強度,藉由以IPC-TM-650為基準的方法測量剝離強度來進行評價。The bonding strength between the liquid crystal polymer film 10 and the first copper foil 11 a and the second copper foil 11 b was evaluated by measuring the peeling strength using a method based on IPC-TM-650.

以目視觀察第一銅箔11a、第二銅箔11b的表面,根據針孔(pinhole)或凹陷的有無來評價在熱塑性聚合物薄膜10與第一銅箔11a、第二銅箔11b的界面處有無發泡。The surfaces of the first copper foil 11a and the second copper foil 11b were visually observed, and the presence or absence of bubbles at the interface between the thermoplastic polymer film 10 and the first copper foil 11a and the second copper foil 11b was evaluated based on the presence or absence of pinholes or depressions.

表1是表示分別改變步驟S2(熱壓合製程)中的熱壓合溫度、步驟S3(加熱製程)中的加熱溫度、步驟S5(熱壓合製程)中的熱壓合溫度以及步驟S6(加熱製程)中的加熱溫度製作出了積層體時的評價結果的表。Table 1 is a table showing evaluation results when a laminate is produced by respectively changing the heat pressing temperature in step S2 (heat pressing process), the heating temperature in step S3 (heating process), the heat pressing temperature in step S5 (heat pressing process), and the heating temperature in step S6 (heating process).

表1 Table 1

如表1的實施例1至實施例4所示,在步驟S2及步驟S5(熱壓合製程)中的熱壓合溫度在170℃~195℃的範圍內進行、步驟S3及步驟S6(加熱製程)中的加熱溫度在280℃下進行的情況下,剝離強度良好,並且沒有產生針孔或凹陷。需要說明的是,在實施例4中,使步驟S5的熱壓合溫度比步驟S2的熱壓合溫度高5℃的結果為,熱塑性聚合物薄膜10與銅箔11b的咬合得到改善,背面的剝離強度能夠改善至與表面大致相同。使步驟S6的加熱溫度比步驟S3的加熱溫度低5℃的結果為,能夠抑制在熱塑性聚合物薄膜10與第二銅箔11b的界面處的起因於由熱塑性聚合物薄膜10產生的水分或低分子量體的揮發的發泡。As shown in Examples 1 to 4 of Table 1, when the heat pressing temperature in step S2 and step S5 (heat pressing process) is in the range of 170°C to 195°C and the heating temperature in step S3 and step S6 (heating process) is at 280°C, the peel strength is good and no pinholes or depressions are generated. It should be noted that in Example 4, the heat pressing temperature in step S5 is 5°C higher than the heat pressing temperature in step S2, and as a result, the bite between the thermoplastic polymer film 10 and the copper foil 11b is improved, and the peel strength of the back side can be improved to be substantially the same as that of the surface. As a result of setting the heating temperature of step S6 5° C. lower than the heating temperature of step S3 , foaming caused by the volatilization of water or low molecular weight substances generated from the thermoplastic polymer film 10 at the interface between the thermoplastic polymer film 10 and the second copper foil 11 b can be suppressed.

由此確認得到以下內容:藉由在熱塑性聚合物薄膜10的軟化溫度(170℃)附近使第一銅箔11a熱壓合在熱塑性聚合物薄膜10的表面上而臨時接合後,使背面為開放狀態,再在熱塑性聚合物薄膜10的熔點(280℃)附近進行加熱,進而,在熱塑性聚合物薄膜10的軟化溫度(170℃)附近使第二銅箔11b熱壓合在熱塑性聚合物薄膜10的背面上而臨時接合後,再在熱塑性聚合物薄膜10的熔點(280℃)附近進行加熱,既能夠維持熱塑性聚合物薄膜10與第一及第二銅箔11a、11b的接合強度,又能夠防止起因於熱塑性聚合物薄膜10與第一銅箔11a、第二銅箔11b的界面處之進入空氣的發泡、及起因於由熱塑性聚合物薄膜10產生的水分或低分子量體的揮發的發泡。It was confirmed that the first copper foil 11a was temporarily bonded to the surface of the thermoplastic polymer film 10 by heat-pressing at a temperature near the softening temperature (170°C) of the thermoplastic polymer film 10, and then the back surface was opened, and then the thermoplastic polymer film 10 was heated at a temperature near the melting point (280°C). Then, the second copper foil 11b was heat-pressed at a temperature near the softening temperature (170°C) of the thermoplastic polymer film 10. 0 and then heated near the melting point (280°C) of the thermoplastic polymer film 10, which can maintain the bonding strength between the thermoplastic polymer film 10 and the first and second copper foils 11a, 11b, and prevent foaming caused by the entry of air at the interface between the thermoplastic polymer film 10 and the first copper foil 11a, 11b, and foaming caused by the volatilization of moisture or low molecular weight substances generated by the thermoplastic polymer film 10.

相對於此,如比較例1所示,在將熱塑性聚合物薄膜10與第一銅箔11a及第二銅箔11b的熱壓合溫度設為低於熱塑性聚合物薄膜10的軟化溫度(170℃)的溫度(160℃)的情況下,無法得到充分的剝離強度,也觀察到了發泡。可以認為其理由如下:由於熱塑性聚合物薄膜10沒有充分軟化,無法充分地進入第一銅箔11a及第二銅箔11b的凹凸中而無法發揮錨固效應,熱塑性聚合物薄膜10與第一銅箔11a及第二銅箔11b的臨時接合不充分,因此,之後即使在熱塑性聚合物薄膜10的熔點(280℃)附近進行加熱,也無法實現接合強度的提升,已進入第一銅箔11a及第二銅箔11b的凹凸之凹部的空氣已發泡。In contrast, as shown in Comparative Example 1, when the heat pressing temperature of the thermoplastic polymer film 10 and the first copper foil 11a and the second copper foil 11b was set to a temperature (160°C) lower than the softening temperature (170°C) of the thermoplastic polymer film 10, sufficient peel strength could not be obtained and foaming was observed. The reason is considered to be as follows: since the thermoplastic polymer film 10 is not sufficiently softened, it cannot fully enter the concave and convex surfaces of the first copper foil 11a and the second copper foil 11b and cannot exert an anchoring effect, and the temporary bonding between the thermoplastic polymer film 10 and the first copper foil 11a and the second copper foil 11b is insufficient. Therefore, even if the thermoplastic polymer film 10 is heated near the melting point (280°C) of the thermoplastic polymer film 10, the bonding strength cannot be improved, and the air that has entered the concave parts of the concave and convex surfaces of the first copper foil 11a and the second copper foil 11b has already foamed.

如比較例2所示,在使熱塑性聚合物薄膜10與第一銅箔11a及第二銅箔11b的熱壓合溫度比熱塑性聚合物薄膜10的軟化溫度(170℃)超出20℃的溫度(200℃)下進行的情況下,熱塑性聚合物薄膜10會與加熱加壓輥黏合而破裂。As shown in Comparative Example 2, when the thermoplastic polymer film 10 and the first copper foil 11a and the second copper foil 11b are hot-pressed at a temperature (200°C) that is 20°C higher than the softening temperature (170°C) of the thermoplastic polymer film 10, the thermoplastic polymer film 10 adheres to the heating and pressing rollers and breaks.

如比較例3所示,在進行完臨時接合後的加熱溫度比熱塑性聚合物薄膜10的熔點(280℃)低了超過20℃的溫度(240℃)下進行的情況下,由於錨固效應不充分,因此得不到充分的剝離強度。As shown in Comparative Example 3, when the heating temperature after temporary bonding is performed at a temperature (240°C) that is more than 20°C lower than the melting point (280°C) of the thermoplastic polymer film 10, the anchoring effect is insufficient, and therefore sufficient peeling strength cannot be obtained.

如比較例4所示,在進行完臨時接合後的加熱溫度比熱塑性聚合物薄膜10的熔點(280℃)高了超過50℃的溫度(350℃)下進行的情況下,熱塑性聚合物薄膜10的熱分解加劇,無法得到充分的剝離強度。As shown in Comparative Example 4, when the heating temperature after the temporary bonding is performed at a temperature (350°C) that is more than 50°C higher than the melting point (280°C) of the thermoplastic polymer film 10, the thermal decomposition of the thermoplastic polymer film 10 is accelerated, and sufficient peeling strength cannot be obtained.

需要說明的是,如比較例5所示,在熱塑性聚合物薄膜10的熔點(280℃)附近將第一銅箔11a及第二銅箔11b熱壓合在熱塑性聚合物薄膜10的兩個面上的情況下,在熱塑性聚合物薄膜10與第一銅箔11a及第二銅箔11b的界面處產生了針孔、發泡或凹陷。由於針孔、發泡或凹陷的產生而無法得到充分的剝離強度,絕緣耐壓也顯著降低。It should be noted that, as shown in Comparative Example 5, when the first copper foil 11a and the second copper foil 11b are heat-pressed on both surfaces of the thermoplastic polymer film 10 at a temperature near the melting point (280°C) of the thermoplastic polymer film 10, pinholes, bubbles, or depressions are generated at the interface between the thermoplastic polymer film 10 and the first copper foil 11a and the second copper foil 11b. Due to the generation of pinholes, bubbles, or depressions, sufficient peel strength cannot be obtained, and the insulation withstand voltage is significantly reduced.

10:熱塑性聚合物薄膜 11a:第一銅箔 11b:第二銅箔 20:第一捲出軸 21:第二捲出軸 22:一對第一加熱加壓輥 23:第三捲出軸 24:一對第二加熱加壓輥 25:捲取軸 30a、30b:電漿處理裝置 40a:第一加熱裝置 40b:第二加熱裝置 41a、41b:高光譜照相機 50、51、52、53、54、55、56、57:導輥 S1、S2、S3、S4、S5、S6:步驟 10: Thermoplastic polymer film 11a: First copper foil 11b: Second copper foil 20: First roll-out shaft 21: Second roll-out shaft 22: A pair of first heating and pressurizing rollers 23: Third roll-out shaft 24: A pair of second heating and pressurizing rollers 25: Winding shaft 30a, 30b: Plasma treatment device 40a: First heating device 40b: Second heating device 41a, 41b: High-spectrum camera 50, 51, 52, 53, 54, 55, 56, 57: Guide rollers S1, S2, S3, S4, S5, S6: Steps

圖1為表示本發明的一實施形態中的積層體的製造方法的各製程的流程圖。 圖2為示意性地表示本發明中一實施形態的積層體的製造裝置的圖。 FIG1 is a flow chart showing each process of a method for manufacturing a laminate in one embodiment of the present invention. FIG2 is a diagram schematically showing a manufacturing apparatus for a laminate in one embodiment of the present invention.

Claims (12)

一種積層體的製造方法,其特徵在於,該積層體藉由在熱塑性聚合物薄膜的兩個面上積層銅箔而製成,前述積層體的製造方法包括製程(A)、製程(B)、製程(C)以及製程(D), 在前述製程(A)中,在已將第一銅箔重疊在前述熱塑性聚合物薄膜的表面上的狀態下,導入一對加熱加壓輥,以前述熱塑性聚合物薄膜軟化的溫度對前述熱塑性聚合物薄膜與前述第一銅箔進行熱壓合; 在前述製程(B)中,於前述製程(A)之後使前述熱塑性聚合物薄膜的尚未積層前述第一銅箔的背面為開放狀態,以接近前述熱塑性聚合物薄膜的熔點的溫度對前述熱塑性聚合物薄膜進行加熱; 在前述製程(C)中,於前述製程(B)之後在已將第二銅箔重疊在前述熱塑性聚合物薄膜的背面上的狀態下,導入一對加熱加壓輥,以前述熱塑性聚合物薄膜軟化的溫度對前述熱塑性聚合物薄膜與前述第二銅箔進行熱壓合; 在前述製程(D)中,於前述製程(C)之後在前述熱塑性聚合物薄膜的兩個面上積層有前述第一銅箔及前述第二銅箔的狀態下,以接近前述熱塑性聚合物薄膜的熔點的溫度對前述熱塑性聚合物薄膜進行加熱; 前述製程(A)、前述製程(B)、前述製程(C)以及前述製程(D)以捲對捲方式連續地進行。 A method for manufacturing a laminate, characterized in that the laminate is manufactured by laminating copper foils on two surfaces of a thermoplastic polymer film, the method comprising process (A), process (B), process (C) and process (D), In process (A), a pair of heating and pressure rollers are introduced into the state where a first copper foil is overlapped on the surface of the thermoplastic polymer film, and the thermoplastic polymer film and the first copper foil are heat-pressed at a temperature at which the thermoplastic polymer film softens; In the aforementioned process (B), after the aforementioned process (A), the back side of the aforementioned thermoplastic polymer film on which the aforementioned first copper foil has not yet been laminated is left open, and the aforementioned thermoplastic polymer film is heated at a temperature close to the melting point of the aforementioned thermoplastic polymer film; In the aforementioned process (C), after the aforementioned process (B), a pair of heating and pressurizing rollers are introduced in a state where the second copper foil has been overlapped on the back side of the aforementioned thermoplastic polymer film, and the aforementioned thermoplastic polymer film and the aforementioned second copper foil are heat-pressed at a temperature at which the aforementioned thermoplastic polymer film softens; In the aforementioned process (D), the aforementioned thermoplastic polymer film is heated at a temperature close to the melting point of the aforementioned thermoplastic polymer film in a state where the aforementioned first copper foil and the aforementioned second copper foil are laminated on both surfaces of the aforementioned thermoplastic polymer film after the aforementioned process (C); The aforementioned process (A), the aforementioned process (B), the aforementioned process (C) and the aforementioned process (D) are continuously performed in a roll-to-roll manner. 如請求項1所記載之積層體的製造方法,其中在前述製程(A)及前述製程(C)中,熱壓合溫度為:在前述熱塑性聚合物薄膜的軟化溫度以上、且在比前述熱塑性聚合物薄膜的軟化溫度高20℃的溫度以下。A method for manufacturing a laminate as described in claim 1, wherein in the aforementioned process (A) and the aforementioned process (C), the heat pressing temperature is: above the softening temperature of the aforementioned thermoplastic polymer film and below a temperature that is 20°C higher than the softening temperature of the aforementioned thermoplastic polymer film. 如請求項1所記載之積層體的製造方法,其中在前述製程(B)及前述製程(D)中,加熱溫度為:在比前述熱塑性聚合物薄膜的熔點低20℃的温度以上、且在比前述熱塑性聚合物薄膜的熔點高50℃的溫度以下。A method for manufacturing a laminate as described in claim 1, wherein in the aforementioned process (B) and the aforementioned process (D), the heating temperature is: at least a temperature 20°C lower than the melting point of the aforementioned thermoplastic polymer film and at least a temperature 50°C higher than the melting point of the aforementioned thermoplastic polymer film. 如請求項1所記載之積層體的製造方法,其中將前述製程(C)中的熱壓合溫度設定為高於前述製程(A)中的熱壓合溫度。A method for manufacturing a laminate as recited in claim 1, wherein the heat pressing temperature in the aforementioned process (C) is set higher than the heat pressing temperature in the aforementioned process (A). 如請求項1所記載之積層體的製造方法,其中將前述製程(D)中的加熱溫度設定為低於前述製程(B)中的加熱溫度。A method for manufacturing a laminate as recited in claim 1, wherein the heating temperature in the aforementioned process (D) is set to be lower than the heating temperature in the aforementioned process (B). 如請求項1所記載之積層體的製造方法,其中在前述製程(B)及前述製程(D)中,藉由使用感應加熱線圈的電磁感應分別對前述第一銅箔及前述第二銅箔進行加熱,並且藉由來自前述第一銅箔及前述第二銅箔的熱傳導對熱塑性聚合物薄膜進行加熱。A method for manufacturing a laminate as described in claim 1, wherein in the aforementioned process (B) and the aforementioned process (D), the aforementioned first copper foil and the aforementioned second copper foil are heated respectively by electromagnetic induction using an induction heating coil, and the thermoplastic polymer film is heated by heat conduction from the aforementioned first copper foil and the aforementioned second copper foil. 如請求項1所記載之積層體的製造方法,其中在前述製程(B)及前述製程(D)中,藉由檢測前述熱塑性聚合物薄膜及/或前述第一及第二銅箔的表面的反射光譜來控制加熱溫度。A method for manufacturing a laminate as described in claim 1, wherein in the aforementioned process (B) and the aforementioned process (D), the heating temperature is controlled by detecting the reflection spectrum of the surface of the aforementioned thermoplastic polymer film and/or the aforementioned first and second copper foils. 如請求項1所記載之積層體的製造方法,其中還包括以下製程:在前述製程(A)之前,對前述熱塑性聚合物薄膜的表面進行電漿處理的製程; 在前述製程(B)之後且在前述製程(C)之前,對前述熱塑性聚合物薄膜的背面進行電漿處理的製程。 The method for manufacturing a laminate as described in claim 1 further includes the following processes: a process of plasma treating the surface of the thermoplastic polymer film before the aforementioned process (A); a process of plasma treating the back surface of the thermoplastic polymer film after the aforementioned process (B) and before the aforementioned process (C). 如請求項1至8中任一項所記載之積層體的製造方法,其中前述熱塑性聚合物薄膜由液晶聚合物薄膜構成。A method for manufacturing a laminate as recited in any one of claims 1 to 8, wherein the thermoplastic polymer film is composed of a liquid crystal polymer film. 一種積層體的製造裝置,其特徵在於,該積層體藉由以捲對捲方式在熱塑性聚合物薄膜的兩個面上積層銅箔而製成,前述積層體的製造裝置包括第一捲出軸、第二捲出軸、第三捲出軸、一對第一加熱加壓輥、第一加熱裝置、一對第二加熱加壓輥、第二加熱裝置、以及卷取軸; 前述第一捲出軸供給前述熱塑性聚合物薄膜; 前述第二捲出軸供給第一銅箔; 前述第三捲出軸供給第二銅箔; 前述一對第一加熱加壓輥在已將由前述第二捲出軸供給的前述第一銅箔重疊在由前述第一捲出軸供給的前述熱塑性聚合物薄膜的表面上的狀態下,以前述熱塑性聚合物薄膜軟化的溫度對前述熱塑性聚合物薄膜與前述第一銅箔進行熱壓合; 前述第一加熱裝置以接近前述熱塑性聚合物薄膜的熔點的溫度藉由前述一對第一加熱加壓輥而積層有前述第一銅箔的前述熱塑性聚合物薄膜進行加熱,此時,前述熱塑性聚合物薄膜的尚未積層前述第一銅箔的背面為開放狀態; 前述一對的第二加熱加壓輥、在已將由前述第三捲出軸供給的前述第二銅箔重疊在已由第一加熱裝置加熱的前述熱塑性聚合物薄膜的背面上的狀態下,以前述熱塑性聚合物薄膜軟化的溫度對前述熱塑性聚合物薄膜與前述第二銅箔進行熱壓合; 前述第二加熱裝置將藉由前述一對第二加熱加壓輥而積層有前述第二銅箔的前述熱塑性聚合物薄膜、在前述熱塑性聚合物薄膜的兩個面上積層有前述第一銅箔及第二銅箔的狀態下,以接近前述熱塑性聚合物薄膜的熔點的溫度進行加熱; 前述捲取軸捲取在已由前述第二加熱裝置加熱的前述熱塑性聚合物薄膜的兩個面上積層有銅箔的積層體。 A manufacturing device for a laminate, characterized in that the laminate is manufactured by laminating copper foil on two surfaces of a thermoplastic polymer film in a roll-to-roll manner, and the manufacturing device for the laminate comprises a first unwinding shaft, a second unwinding shaft, a third unwinding shaft, a pair of first heating and pressurizing rollers, a first heating device, a pair of second heating and pressurizing rollers, a second heating device, and a winding shaft; The first unwinding shaft supplies the thermoplastic polymer film; The second unwinding shaft supplies the first copper foil; The third unwinding shaft supplies the second copper foil; The aforementioned pair of first heating and pressurizing rollers heat-press the aforementioned thermoplastic polymer film and the aforementioned first copper foil at a temperature at which the aforementioned thermoplastic polymer film softens, while the aforementioned first copper foil supplied by the aforementioned second unwinding roller is overlapped on the surface of the aforementioned thermoplastic polymer film supplied by the aforementioned first unwinding roller; The aforementioned first heating device heats the aforementioned thermoplastic polymer film laminated with the aforementioned first copper foil by the aforementioned pair of first heating and pressurizing rollers at a temperature close to the melting point of the aforementioned thermoplastic polymer film, and at this time, the back side of the aforementioned thermoplastic polymer film on which the aforementioned first copper foil has not yet been laminated is in an open state; The aforementioned pair of second heating and pressurizing rollers heat-presses the aforementioned thermoplastic polymer film and the aforementioned second copper foil at a temperature at which the aforementioned thermoplastic polymer film softens, while the aforementioned second copper foil supplied by the aforementioned third unwinding roller is superimposed on the back of the aforementioned thermoplastic polymer film heated by the first heating device; The aforementioned second heating device heats the aforementioned thermoplastic polymer film on which the aforementioned second copper foil is laminated by the aforementioned pair of second heating and pressurizing rollers, while the aforementioned first copper foil and second copper foil are laminated on both surfaces of the aforementioned thermoplastic polymer film, at a temperature close to the melting point of the aforementioned thermoplastic polymer film; The winding shaft winds up a laminated body in which copper foil is layered on both sides of the thermoplastic polymer film heated by the second heating device. 如請求項10所記載之積層體的製造裝置,其中前述第一加熱裝置及前述第二加熱裝置分別由電磁感應加熱裝置構成,該電磁感應加熱裝置包括有藉由電磁感應對前述第一銅箔及前述第二銅箔進行加熱的感應加熱線圈。The manufacturing device of the laminate as recited in claim 10, wherein the first heating device and the second heating device are respectively composed of electromagnetic induction heating devices, and the electromagnetic induction heating devices include induction heating coils for heating the first copper foil and the second copper foil by electromagnetic induction. 如請求項10所記載之積層體的製造裝置,其中還包括第一電漿處理裝置及第二電漿處理裝置;所述第一電漿處理裝置在前述一對第一加熱加壓輥之前的階段對前述熱塑性聚合物薄膜的表面進行電漿處理; 前述第二電漿處理裝置在前述一對第二加熱加壓輥之前的階段對前述熱塑性聚合物薄膜的背面進行電漿處理。 The manufacturing device of the laminate as described in claim 10 further includes a first plasma treatment device and a second plasma treatment device; the first plasma treatment device performs plasma treatment on the surface of the thermoplastic polymer film before the first pair of heating and pressurizing rollers; the second plasma treatment device performs plasma treatment on the back of the thermoplastic polymer film before the second pair of heating and pressurizing rollers.
TW112117193A 2023-02-10 2023-05-09 Method for manufacturing laminated and device for manufacturing the same TW202432684A (en)

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