TW202432225A - 有機溶劑回收系統 - Google Patents

有機溶劑回收系統 Download PDF

Info

Publication number
TW202432225A
TW202432225A TW112136726A TW112136726A TW202432225A TW 202432225 A TW202432225 A TW 202432225A TW 112136726 A TW112136726 A TW 112136726A TW 112136726 A TW112136726 A TW 112136726A TW 202432225 A TW202432225 A TW 202432225A
Authority
TW
Taiwan
Prior art keywords
organic solvent
gas
treatment
solvent recovery
adsorbent
Prior art date
Application number
TW112136726A
Other languages
English (en)
Chinese (zh)
Inventor
館山佐夢
林敏明
貴堂圭佑
岡田武将
Original Assignee
日商東洋紡Ｍｃ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商東洋紡Ｍｃ股份有限公司 filed Critical 日商東洋紡Ｍｃ股份有限公司
Publication of TW202432225A publication Critical patent/TW202432225A/zh

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0446—Means for feeding or distributing gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0438—Cooling or heating systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • B01D53/44—Organic components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • B01D2259/4009—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating using hot gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
TW112136726A 2022-09-30 2023-09-26 有機溶劑回收系統 TW202432225A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022158203 2022-09-30
JP2022-158203 2022-09-30

Publications (1)

Publication Number Publication Date
TW202432225A true TW202432225A (zh) 2024-08-16

Family

ID=90477774

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112136726A TW202432225A (zh) 2022-09-30 2023-09-26 有機溶劑回收系統

Country Status (5)

Country Link
JP (1) JPWO2024070943A1 (https=)
KR (1) KR20250086649A (https=)
CN (1) CN119894589A (https=)
TW (1) TW202432225A (https=)
WO (1) WO2024070943A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3841479B2 (ja) * 1996-05-20 2006-11-01 東邦化工建設株式会社 有機溶剤回収システム及び有機溶剤回収方法
JP4848335B2 (ja) * 2007-09-19 2011-12-28 月島環境エンジニアリング株式会社 ガス処理方法
JP2013010057A (ja) * 2011-06-28 2013-01-17 Ihi Corp 吸脱着装置及び揮発性有機化合物処理システム
JP6236898B2 (ja) 2013-06-12 2017-11-29 東洋紡株式会社 有機溶剤含有ガス処理システム
JP6085977B2 (ja) 2013-01-31 2017-03-01 東洋紡株式会社 ガス処理装置およびガス処理方法
WO2018101255A1 (ja) * 2016-12-01 2018-06-07 東洋紡株式会社 有機溶剤回収システム及び有機溶剤回収方法
WO2022014013A1 (ja) * 2020-07-16 2022-01-20 東洋紡株式会社 有機溶剤回収システム

Also Published As

Publication number Publication date
WO2024070943A1 (ja) 2024-04-04
JPWO2024070943A1 (https=) 2024-04-04
KR20250086649A (ko) 2025-06-13
CN119894589A (zh) 2025-04-25

Similar Documents

Publication Publication Date Title
JP7729335B2 (ja) 有機溶剤回収システム
TWI821509B (zh) 有機溶劑回收系統
CN110035816A (zh) 有机溶剂回收系统及有机溶剂回收方法
CN112672798A (zh) 有机溶剂回收系统
JP6946730B2 (ja) 有機溶剤回収システム
TW202432225A (zh) 有機溶劑回收系統
TW202502421A (zh) 有機溶劑回收系統
TWI885009B (zh) 從半導體製造工具之惰性氣體回收
CN114867543B (zh) 有机溶剂回收系统
WO2017135468A1 (ja) 二酸化炭素回収システム及び二酸化炭素分離回収システム
JP2013132582A (ja) 有機溶剤含有ガス処理システム
JP2009023907A (ja) ガス分離方法および同装置
WO2025154672A1 (ja) 有機溶剤回収装置及び有機溶剤回収システム
US20250214023A1 (en) Organic solvent recovery system
JP7367900B1 (ja) ガス処理装置及びガス処理方法
JP7544308B1 (ja) 有機溶剤回収システム、および有機溶剤処理システム
JPWO2024070943A5 (https=)
JP7494838B2 (ja) 有機溶剤回収システム
TW202130404A (zh) 有機溶劑回收系統
CN111921332A (zh) 吸附装置及吸附方法
JP7854738B2 (ja) 超臨界ウェーハ洗浄／乾燥媒体回収方法及びシステム
TW202408649A (zh) 有機溶劑回收系統
JP2021104505A (ja) 有機溶剤回収システム
JP2006181479A (ja) ガス分離方法および同装置
JPH04183496A (ja) ドライクリーニング方法