TW202422631A - 聚焦環及用於製備其之方法 - Google Patents

聚焦環及用於製備其之方法 Download PDF

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Publication number
TW202422631A
TW202422631A TW112127597A TW112127597A TW202422631A TW 202422631 A TW202422631 A TW 202422631A TW 112127597 A TW112127597 A TW 112127597A TW 112127597 A TW112127597 A TW 112127597A TW 202422631 A TW202422631 A TW 202422631A
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TW
Taiwan
Prior art keywords
ring
manufacturing
same
focus ring
buried
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TW112127597A
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English (en)
Inventor
柳濟根
安娥蘭
崔王基
李銀英
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南韓商哈納新材料有限公司
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Application filed by 南韓商哈納新材料有限公司 filed Critical 南韓商哈納新材料有限公司
Publication of TW202422631A publication Critical patent/TW202422631A/zh

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Abstract

一聚焦環及用於製備其之方法。該聚焦環包括：一第一環，其由一第一材料製成；一第二環，其被該第一環覆蓋，其中該第二環由不同於該第一材料的一第二材料製成；以及一緊固構件，其組配來將該第一環耦接至該第二環。該緊固構件包括：一貫穿部分，其組配成穿過該第二環；以及一埋藏部分，其埋藏於該第一環之一下部分中。該貫穿部分可具有一第一直徑，且該埋藏部分可具有大於或等於該第一直徑的一第二直徑。
TW112127597A 2022-07-29 2023-07-24 聚焦環及用於製備其之方法 TW202422631A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2022-0094874 2022-07-29

Publications (1)

Publication Number Publication Date
TW202422631A true TW202422631A (zh) 2024-06-01

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