TW202415724A - Curable resin composition, dry film, cured product and printed wiring board capable of forming a cured product that achieves both good resolution and good crack resistance under harsher conditions than conventional TCT - Google Patents

Curable resin composition, dry film, cured product and printed wiring board capable of forming a cured product that achieves both good resolution and good crack resistance under harsher conditions than conventional TCT Download PDF

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TW202415724A
TW202415724A TW112137839A TW112137839A TW202415724A TW 202415724 A TW202415724 A TW 202415724A TW 112137839 A TW112137839 A TW 112137839A TW 112137839 A TW112137839 A TW 112137839A TW 202415724 A TW202415724 A TW 202415724A
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resin composition
curable resin
treated
cured product
compound
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川田早良
志村優之
嶋田沙和子
高橋勉
濱島喬介
柴田大介
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日商太陽控股股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00Processes of treating or compounding macromolecular substances
    • C08J3/12Powdering or granulating
    • C08J3/126Polymer particles coated by polymer, e.g. core shell structures
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/10Metal compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • C08K3/36Silica
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K9/00Use of pretreated ingredients
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L101/00Compositions of unspecified macromolecular compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L21/00Compositions of unspecified rubbers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
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  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Epoxy Resins (AREA)
  • Macromonomer-Based Addition Polymer (AREA)

Abstract

This invention aims to provide a curable resin composition capable of forming a cured product that achieves both good resolution and good crack resistance under harsher conditions than conventional TCT. The curable resin composition of this invention contains a curable resin, a surface-treated barium compound, a surface-treated silica, and rubber particles. The sum of the contents of the surface-treated barium compound and the surface-treated silica is, with respect to total mass of the solid content of the curable resin composition, adjusted to 20 to 80% by mass based on solid content, and the mass ratio of the surface-treated barium compound and the surface-treated silica based on solid content is adjusted to 1:1 to 1:4.

Description

硬化性樹脂組成物、乾膜、硬化物及印刷配線板Curable resin composition, dry film, cured product and printed wiring board

本發明涉及硬化性樹脂組成物,特別是涉及適合用於形成阻焊層之硬化性樹脂組成物。並且,本發明涉及具有由該硬化性樹脂組成物所構成之樹脂層的乾膜、該硬化性樹脂組成物或該乾膜之樹脂層的硬化物、及具備該硬化物之印刷配線板。The present invention relates to a curable resin composition, and in particular to a curable resin composition suitable for forming a solder resist layer. The present invention also relates to a dry film having a resin layer composed of the curable resin composition, a cured product of the curable resin composition or the resin layer of the dry film, and a printed wiring board having the cured product.

近年來,隨著電子機器的小型化、高性能化,印刷配線板之圖案的微細化、安裝面積之縮小化及零件安裝之高密度化的必要性持續增加。因此,會要求用以形成印刷配線板中之阻焊膜的硬化性樹脂組成物具高解析性。另一方面,在製造及使用印刷配線板時,於各種階段中會施加高熱,因此亦會要求印刷配線板上的阻焊膜具有對於熱應力之耐性。In recent years, with the miniaturization and high performance of electronic devices, the need for miniaturization of printed wiring board patterns, reduction of mounting area, and high density of component mounting has continued to increase. Therefore, the curing resin composition used to form the solder mask in the printed wiring board is required to have high resolution. On the other hand, high heat is applied at various stages during the manufacture and use of the printed wiring board, so the solder mask on the printed wiring board is also required to have resistance to thermal stress.

以往,為了提高這種對於熱應力之耐性,已嘗試在硬化性樹脂組成物中添加高耐熱性之樹脂或無機材料,藉此控制硬化性樹脂組成物之熱膨脹係數(CTE)。尤其,不僅基於硬化性樹脂組成物之低CTE化,還基於耐裂痕性等物性面、成本及易處理程度,一般會於硬化性樹脂組成物中添加二氧化矽。In the past, in order to improve the resistance to thermal stress, attempts have been made to add a highly heat-resistant resin or inorganic material to the curable resin composition to control the coefficient of thermal expansion (CTE) of the curable resin composition. In particular, silica is generally added to the curable resin composition not only for the purpose of lowering the CTE of the curable resin composition, but also for the sake of physical properties such as crack resistance, cost, and ease of handling.

然而,若於硬化性樹脂組成物中添加二氧化矽,尤其是添加球狀二氧化矽這種光透射性低的無機填料,則在藉由光照射使硬化性樹脂組成物之塗膜硬化而形成開口圖案時,二氧化矽會阻礙光的透射,而使塗膜深部之硬化性樹脂組成物的硬化性降低。其結果,於顯影時會產生阻焊膜之開口圖案的底部過度熔解之現象(所謂的底切),而會有招致細線圖案形成不良等解析性降低的問題。However, if silica is added to the curable resin composition, especially spherical silica, an inorganic filler with low light transmittance, when the coating of the curable resin composition is cured by light irradiation to form an opening pattern, the silica will block the transmission of light, thereby reducing the curability of the curable resin composition in the deep part of the coating. As a result, the bottom of the opening pattern of the solder mask will be excessively melted during development (so-called undercut), which will cause problems such as poor formation of fine line patterns and reduced resolution.

為了提升像這樣於硬化性樹脂組成物中添加了二氧化矽時的解析性,已知一種除了添加二氧化矽以外還添加硫酸鋇之方法。例如,於專利文獻1中揭示按體積比計1:(0.5~5)含有球狀二氧化矽與硫酸鋇之硬化性樹脂組成物所形成的阻焊膜,對於溫度循環試驗(TCT:Temperture Cycling Test)顯示出優異耐性。In order to improve the resolution when silica is added to a curable resin composition, a method of adding barium sulfate in addition to silica is known. For example, Patent Document 1 discloses that a solder resist film formed by a curable resin composition containing spherical silica and barium sulfate in a volume ratio of 1: (0.5 to 5) exhibits excellent resistance to a temperature cycling test (TCT).

然而,近年來之半導體封裝件從其高速化、多機能化等觀點來看,使用FC-BGA(Flip Chip-Ball Grid Array:覆晶式球狀矩陣)基板的情況持續增加。而且,同樣從高速化、多機能化等觀點來看,對於半導體封裝件要求圖案之微細化及晶片之大型化。另一方面,隨著晶片面積增大,驅動時之發熱量會變大,因此要求半導體封裝件具有對於超越現今之嚴苛溫度變化的可靠性。由此,亦要求用於製造FC-BGA基板的阻焊膜具有更高的可靠性。以往一直是採用TCT來評估阻焊膜之可靠性,但近年來,阻焊膜變得具有高可靠性,而變得不易藉由TCT來充分確認其差異,以致難以評估阻焊膜之可靠性。於是,在FC-BGA基板用之阻焊膜的可靠性評估中,一般會進行條件較嚴苛的熱衝擊試驗(TST:Thermal Shock Test)來取代以往之TCT。TCT係在氣相槽中進行之冷熱循環試驗,相對於此,TST係在液相槽中進行之冷熱循環試驗。液體的熱傳導效率比氣體的熱傳導效率高,因此在TST中,基板變成是曝露在比TCT更急遽之溫度變化下,結果,與TCT相比,在TST中更容易於基板上所形成之阻焊膜中產生裂痕。However, in recent years, the use of FC-BGA (Flip Chip-Ball Grid Array) substrates has continued to increase in semiconductor packages from the perspective of high speed and multifunctionality. Also, from the perspective of high speed and multifunctionality, semiconductor packages require miniaturization of patterns and larger chips. On the other hand, as the chip area increases, the amount of heat generated during driving increases, so semiconductor packages are required to have reliability that exceeds today's severe temperature changes. Therefore, the solder mask used to manufacture FC-BGA substrates is also required to have higher reliability. In the past, TCT has been used to evaluate the reliability of solder masks, but in recent years, solder masks have become highly reliable, and it has become difficult to fully confirm the difference through TCT, making it difficult to evaluate the reliability of solder masks. Therefore, in the reliability evaluation of the solder mask used for FC-BGA substrates, a more stringent thermal shock test (TST) is generally used to replace the previous TCT. TCT is a hot and cold cycle test conducted in a gas phase tank, while TST is a hot and cold cycle test conducted in a liquid phase tank. The thermal conductivity of liquid is higher than that of gas, so in TST, the substrate is exposed to more rapid temperature changes than in TCT. As a result, it is easier to generate cracks in the solder mask formed on the substrate in TST than in TCT.

先前技術文獻 專利文獻 專利文獻1:日本專利特開2019-178305號公報 Prior art documents Patent documents Patent document 1: Japanese Patent Publication No. 2019-178305

發明欲解決之課題 在這種狀況下,所存在之技術課題為提供一種硬化性樹脂組成物,其能夠形成兼顧了良好解析性與在比以往TCT嚴苛之條件下良好耐裂痕性的硬化物。 Problem to be solved by the invention Under such circumstances, the existing technical problem is to provide a curable resin composition that can form a cured product that has both good resolvability and good crack resistance under conditions more severe than conventional TCT.

因此,本發明之目的在於提供一種硬化性樹脂組成物、具有由該硬化性樹脂組成物所構成之樹脂層的乾膜、該硬化性樹脂組成物或該乾膜之樹脂層的硬化物、及具備該硬化物之印刷配線板,所述硬化性樹脂組成物能夠形成兼顧了良好解析性與在比以往TCT嚴苛之條件下良好耐裂痕性的硬化物。Therefore, an object of the present invention is to provide a curable resin composition, a dry film having a resin layer composed of the curable resin composition, a cured product of the curable resin composition or the resin layer of the dry film, and a printed wiring board having the cured product, wherein the curable resin composition can form a cured product having both good resolving power and good crack resistance under conditions more severe than conventional TCT.

用以解決課題之手段 本案發明人等致力研究之結果,獲得了藉由下述而能解決上述課題之知識見解:一種硬化性樹脂組成物,包含(A)硬化性樹脂、(B)經表面處理之鋇化合物及(C)經表面處理之二氧化矽,且於該硬化性樹脂組成物中進一步摻混(D)橡膠粒子;並且相對於硬化性樹脂組成物之固體成分總質量,將(B)經表面處理之鋇化合物與(C)經表面處理之二氧化矽的合計含量以固體成分基準計調整為20~80質量%;且將(B)經表面處理之鋇化合物與(C)經表面處理之二氧化矽之固體成分基準的質量比調整為1:1~1:4。本發明係依所述知識見解而成者。亦即,本發明主旨如下。 Means for Solving the Problem As a result of the inventors' research, they have obtained the following knowledge that can solve the above-mentioned problem: a hardening resin composition comprising (A) a hardening resin, (B) a surface-treated barium compound and (C) a surface-treated silica, and further blending (D) rubber particles into the hardening resin composition; and the total content of (B) the surface-treated barium compound and (C) the surface-treated silica is adjusted to 20-80% by mass on a solid basis relative to the total mass of the solid components of the hardening resin composition; and the mass ratio of (B) the surface-treated barium compound to (C) the surface-treated silica on a solid basis is adjusted to 1:1-1:4. This invention is made based on the above-mentioned knowledge and understanding. That is, the gist of this invention is as follows.

[1]一種硬化性樹脂組成物,特徵在於包含:(A)硬化性樹脂、(B)經表面處理之鋇化合物、(C)經表面處理之二氧化矽及(D)橡膠粒子;並且 相對於前述硬化性樹脂組成物之固體成分總質量,前述(B)經表面處理之鋇化合物與前述(C)經表面處理之二氧化矽的合計含量以固體成分基準計為20~80質量%;且 前述(B)經表面處理之鋇化合物與前述(C)經表面處理之二氧化矽之固體成分基準的質量比為1:1~1:4。 [2]如[1]之硬化性樹脂組成物,其中前述(A)硬化性樹脂包含(A-1)光硬化性樹脂。 [3]如[1]或[2]之硬化性樹脂組成物,其中前述(A)硬化性樹脂包含(A-2)熱硬化性樹脂。 [4]如[1]至[3]中任一項之硬化性樹脂組成物,其中前述(D)橡膠粒子包含內核外殼橡膠粒子。 [5]如[1]至[4]中任一項之硬化性樹脂組成物,其進一步包含(E)光聚合引發劑。 [6]一種乾膜,具有第一膜與樹脂層,該樹脂層形成於該第一膜之至少一面且由如[1]至[5]中任一項之硬化性樹脂組成物所構成。 [7]一種硬化物,係使如[1]至[5]中任一項之硬化性樹脂組成物或如[6]之乾膜的樹脂層硬化而成者。 [8]一種印刷配線板,具備如[7]之硬化物。 [1] A curable resin composition comprising: (A) a curable resin, (B) a surface-treated barium compound, (C) a surface-treated silica, and (D) rubber particles; and relative to the total mass of the solid components of the curable resin composition, the total content of the surface-treated barium compound (B) and the surface-treated silica (C) is 20 to 80% by mass on a solid basis; and the mass ratio of the surface-treated barium compound (B) to the surface-treated silica (C) is 1:1 to 1:4 on a solid basis. [2] The curable resin composition of [1], wherein the curable resin (A) comprises (A-1) a photocurable resin. [3] The hardening resin composition of [1] or [2], wherein the hardening resin (A) comprises (A-2) a thermosetting resin. [4] The hardening resin composition of any one of [1] to [3], wherein the rubber particles (D) comprise core-shell rubber particles. [5] The hardening resin composition of any one of [1] to [4], further comprising (E) a photopolymerization initiator. [6] A dry film comprising a first film and a resin layer, wherein the resin layer is formed on at least one side of the first film and is composed of the hardening resin composition of any one of [1] to [5]. [7] A cured product obtained by curing a curable resin composition as described in any one of [1] to [5] or a resin layer of a dry film as described in [6]. [8] A printed wiring board having the cured product as described in [7].

發明效果 根據本發明,可提供一種硬化性樹脂組成物、具有由該硬化性樹脂組成物所構成之樹脂層的乾膜、該硬化性樹脂組成物或該乾膜之樹脂層的硬化物、及具備該硬化物之印刷配線板,所述硬化性樹脂組成物能夠形成兼顧了良好解析性與在比以往TCT嚴苛之條件下良好耐裂痕性的硬化物。根據本發明,特別可在硬化性樹脂組成物之硬化物中兼顧良好解析性與在比TCT嚴苛之TST下的良好耐裂痕性。 Effect of the invention According to the present invention, a curable resin composition, a dry film having a resin layer composed of the curable resin composition, a cured product of the curable resin composition or the resin layer of the dry film, and a printed wiring board having the cured product can be provided, wherein the curable resin composition can form a cured product that takes into account both good resolvability and good crack resistance under conditions more severe than conventional TCT. According to the present invention, in particular, in the cured product of the curable resin composition, good resolvability and good crack resistance under TST more severe than TCT can be taken into account.

用以實施發明之形態 [硬化性樹脂組成物] 本發明硬化性樹脂組成物之特徵在於:包含下述作為必要成分:(A)硬化性樹脂、(B)經表面處理之鋇化合物、(C)經表面處理之二氧化矽及(D)橡膠粒子;並且相對於硬化性樹脂組成物之固體成分總質量,(B)經表面處理之鋇化合物與(C)經表面處理之二氧化矽的合計含量以固體成分基準計被調整為20~80質量%;且(B)經表面處理之鋇化合物與(C)經表面處理之二氧化矽之固體成分基準的質量比(經表面處理之鋇化合物的質量:經表面處理之二氧化矽的質量)被調整為1:1~1:4。本發明之硬化性樹脂組成物由於包含(D)橡膠粒子,並且相對於硬化性樹脂組成物之固體成分總質量,(B)經表面處理之鋇化合物與(C)經表面處理之二氧化矽的合計含量以固體成分基準計被調整為20~80質量%,且(B)經表面處理之鋇化合物與(C)經表面處理之二氧化矽之固體成分基準的質量比被調整為1:1~1:4,因此特別能夠形成一種兼顧了良好解析性與在比TCT嚴苛之TST下的良好耐裂痕性之硬化物。以所述方式在硬化性樹脂組成物中摻混橡膠粒子,並且相對於硬化性樹脂組成物之固體成分總質量,將經表面處理之鋇化合物與經表面處理之二氧化矽的合計含量以固體成分基準計調整為20~80質量%,且將經表面處理之鋇化合物與經表面處理之二氧化矽之固體成分基準的質量比調整為1:1~1:4,在此情況下,能夠兼顧良好解析性與在比以往TCT嚴苛之條件下良好耐裂痕性,雖然其理由尚不明確,但可推論如下。可認為二氧化矽或鋇這種填料之熱膨脹係數(CTE)低,因此藉由將經表面處理之二氧化矽或鋇摻混於硬化性樹脂組成物中,硬化性樹脂組成物在冷熱循環中的尺寸變化會變小,而可抑制產生應力,結果能夠提升硬化性樹脂組成物之耐裂痕性。二氧化矽之CTE特別低,因此藉由其摻混於硬化性樹脂組成物中所帶來之提升耐裂痕性的效果很大,另一方面,藉由增加經表面處理之二氧化矽的摻混量,能夠提升硬化性樹脂組成物之耐裂痕性,但其摻混量若過大,則可能產生解析性降低的問題。相對於此,若將一部分經表面處理之二氧化矽取代為經表面處理之鋇化合物來摻混,便能夠提升在形成小徑圖案時之解析性。可認為這是因為硫酸鋇與樹脂成分之折射率差值小,故在曝光步驟中,光容易在硬化性樹脂組成物中直線前進,結果能夠提升解析性。然而,二氧化矽之CTE比硫酸鋇之CTE低,因此可認為為了提升耐裂痕性,宜摻混大量二氧化矽。另一方面,可認為若於硬化性樹脂組成物中摻混橡膠粒子,在冷熱循環中產生之應力便會緩和,而能夠維持良好耐裂痕性同時減少經表面處理之二氧化矽的摻混量,進而能夠獲得高解析性。亦即可認為,摻混橡膠粒子來緩和在冷熱循環中產生之應力,藉此減低提升耐裂痕性所需之經表面處理之二氧化矽的摻混量,並且令經表面處理之鋇化合物及經表面處理之二氧化矽的合計含量、以及其等之固體成分基準的質量比在上述之特定範圍內,藉此能夠同時獲得經表面處理之二氧化矽所帶來之提升耐裂痕性的效果與經表面處理之鋇所帶來之提升解析性的效果。於以下,詳細說明本發明硬化性樹脂組成物之各成分。此外,各成分可使用市售物,亦可使用適當合成所得者。 Form for implementing the invention [Hardening resin composition] The hardening resin composition of the present invention is characterized in that it contains the following as essential components: (A) hardening resin, (B) surface-treated barium compound, (C) surface-treated silicon dioxide and (D) rubber particles; and the total content of (B) surface-treated barium compound and (C) surface-treated silicon dioxide is adjusted to 20-80% by mass on a solid basis relative to the total mass of the solid components of the hardening resin composition; and the mass ratio of (B) surface-treated barium compound to (C) surface-treated silicon dioxide on a solid basis (mass of surface-treated barium compound: mass of surface-treated silicon dioxide) is adjusted to 1:1-1:4. The curable resin composition of the present invention contains (D) rubber particles, and the total content of (B) the surface-treated barium compound and (C) the surface-treated silicon dioxide is adjusted to 20-80% by mass based on the total mass of the solid components of the curable resin composition, and the mass ratio of (B) the surface-treated barium compound to (C) the surface-treated silicon dioxide based on the solid components is adjusted to 1:1-1:4. Therefore, a cured product having good resolvability and good crack resistance under TST which is more stringent than TCT can be formed. In the above-mentioned manner, rubber particles are mixed in the curable resin composition, and the total content of the surface-treated barium compound and the surface-treated silica is adjusted to 20-80 mass % on a solid basis with respect to the total mass of the solid components of the curable resin composition, and the mass ratio of the surface-treated barium compound to the surface-treated silica on a solid basis is adjusted to 1:1-1:4. In this case, it is possible to achieve both good resolvability and good crack resistance under conditions more severe than conventional TCT. Although the reason is not clear, it can be inferred as follows. It is believed that the coefficient of thermal expansion (CTE) of fillers such as silica or barium is low, so by mixing surface-treated silica or barium into the hardening resin composition, the dimensional change of the hardening resin composition during the hot and cold cycle will be reduced, and the stress generation can be suppressed, resulting in the improvement of the crack resistance of the hardening resin composition. The CTE of silica is particularly low, so the effect of improving the crack resistance brought about by mixing it into the hardening resin composition is very large. On the other hand, by increasing the mixing amount of surface-treated silica, the crack resistance of the hardening resin composition can be improved, but if the mixing amount is too large, the problem of reduced resolution may occur. In contrast, if a portion of the surface-treated silica is replaced with a surface-treated barium compound for mixing, the resolution when forming a small-diameter pattern can be improved. This is believed to be because the difference in refractive index between barium sulfate and the resin component is small, so in the exposure step, light can easily move straight through the curable resin composition, resulting in improved resolution. However, the CTE of silica is lower than that of barium sulfate, so it is believed that in order to improve crack resistance, it is appropriate to mix a large amount of silica. On the other hand, it is believed that if rubber particles are mixed into the curable resin composition, the stress generated during hot and cold cycles will be alleviated, and good crack resistance can be maintained while reducing the amount of surface-treated silica mixed, thereby achieving high resolution. In other words, it can be considered that the stress generated during the hot and cold cycle is alleviated by mixing rubber particles, thereby reducing the amount of surface-treated silica required to improve crack resistance, and making the total content of the surface-treated barium compound and the surface-treated silica, as well as the mass ratio of the solid component standard within the above-mentioned specific range, so that the effect of improving crack resistance brought by the surface-treated silica and the effect of improving resolvability brought by the surface-treated barium can be obtained at the same time. The following is a detailed description of each component of the curable resin composition of the present invention. In addition, each component can use commercially available products or those obtained by appropriate synthesis.

(硬化性樹脂) 本發明硬化性樹脂組成物包含(A)硬化性樹脂。作為硬化性樹脂,若為可藉由熱或光等進行作用而硬化的樹脂則無特別限定,皆可使用。具體而言,作為硬化性樹脂可使用光硬化性樹脂、熱硬化性樹脂等。硬化性樹脂可單獨使用1種,亦可組合2種以上來使用。例如,可分別單獨使用熱硬化性樹脂或光硬化性樹脂,亦可將其等組合來使用。硬化性樹脂組成物宜包含光硬化性樹脂及熱硬化性樹脂。 (Hardening resin) The curing resin composition of the present invention includes (A) a curing resin. As the curing resin, any resin that can be cured by heat or light, etc., is not particularly limited and can be used. Specifically, as the curing resin, a photocuring resin, a thermosetting resin, etc. can be used. The curing resin can be used alone or in combination of two or more. For example, a thermosetting resin or a photocuring resin can be used alone or in combination. The curing resin composition preferably includes a photocuring resin and a thermosetting resin.

在硬化性樹脂組成物中,可摻混(A-1)光硬化性樹脂作為硬化性樹脂。作為光硬化性樹脂,可使用公知慣用的光硬化性樹脂。其中,從光硬化性或耐顯影性方面來看,又宜使用可藉由活性能量線進行自由基性的加成聚合反應進而硬化的光硬化性樹脂,較宜使用分子中具有乙烯性不飽和基之光硬化性樹脂。此外,乙烯性不飽和基宜源自丙烯酸、甲基丙烯酸或其等之衍生物。光硬化性樹脂可單獨使用1種,亦可組合2種以上來使用。作為光硬化性樹脂宜使用後述之含羧基感光性樹脂。In the curable resin composition, a photocurable resin (A-1) may be mixed as a curable resin. As the photocurable resin, a known and commonly used photocurable resin may be used. Among them, from the perspective of photocurability or development resistance, it is preferable to use a photocurable resin that can be cured by a free radical addition polymerization reaction by active energy rays, and it is preferable to use a photocurable resin having an ethylenic unsaturated group in the molecule. In addition, the ethylenic unsaturated group is preferably derived from acrylic acid, methacrylic acid or a derivative thereof. The photocurable resin may be used alone or in combination of two or more. As the photocurable resin, it is preferable to use a carboxyl group-containing photosensitive resin described later.

作為分子中具有乙烯性不飽和基之光硬化性樹脂,可使用公知慣用之光聚合性寡聚物及光聚合性單體等。其中,光聚合性寡聚物可舉不飽和聚酯系寡聚物、(甲基)丙烯酸酯系寡聚物等。(甲基)丙烯酸酯系寡聚物可舉下述諸等:苯酚酚醛清漆環氧(甲基)丙烯酸酯、甲酚酚醛清漆環氧(甲基)丙烯酸酯、雙酚型環氧(甲基)丙烯酸酯等環氧(甲基)丙烯酸酯、胺甲酸酯(甲基)丙烯酸酯、環氧胺甲酸酯(甲基)丙烯酸酯、聚酯(甲基)丙烯酸酯、聚醚(甲基)丙烯酸酯、聚丁二烯改質(甲基)丙烯酸酯。As the photocurable resin having an ethylenic unsaturated group in the molecule, known and commonly used photopolymerizable oligomers and photopolymerizable monomers can be used. Among them, the photopolymerizable oligomers include unsaturated polyester oligomers and (meth)acrylate oligomers. The (meth)acrylate oligomers include the following: epoxy (meth)acrylates such as phenol novolac epoxy (meth)acrylate, cresol novolac epoxy (meth)acrylate, and bisphenol type epoxy (meth)acrylate, urethane (meth)acrylate, epoxy urethane (meth)acrylate, polyester (meth)acrylate, polyether (meth)acrylate, and polybutadiene modified (meth)acrylate.

另一方面,作為光聚合性單體宜使用具有乙烯性不飽和基之單體。這種光聚合性單體可舉例如慣用公知之聚酯(甲基)丙烯酸酯、聚醚(甲基)丙烯酸酯、胺甲酸酯(甲基)丙烯酸酯、碳酸酯(甲基)丙烯酸酯、環氧(甲基)丙烯酸酯等。具體上為丙烯酸2-乙基己酯、丙烯酸環己酯等丙烯酸烷基酯類;丙烯酸2-羥乙酯、丙烯酸2-羥丙酯等丙烯酸羥烷基酯類;乙二醇、丙二醇、二乙二醇、二丙二醇等環氧烷衍生物之單丙烯酸酯或二丙烯酸酯類;N,N-二甲基丙烯醯胺、N-羥甲基丙烯醯胺、N,N-二甲基胺丙基丙烯醯胺等丙烯醯胺類;N,N-二甲基胺乙基丙烯酸酯、N,N-二甲基胺丙基丙烯酸酯等胺基烷基丙烯酸酯類;己二醇、三羥甲丙烷、新戊四醇、二三羥甲丙烷、二新戊四醇、參羥乙基三聚異氰酸酯等多元醇或該等之環氧烷加成物或ε-己內酯加成物等多元丙烯酸酯類;丙烯酸苯氧酯、雙酚A二丙烯酸酯等酚類或該等之環氧烷加成物等多元丙烯酸酯類;甘油二環氧丙基醚、三羥甲丙烷三環氧丙基醚、三環氧丙基三聚異氰酸酯等環氧丙基醚之丙烯酸酯類;且不限於前述,可自下述中之至少任1種適當選擇來使用:聚醚多元醇、聚碳酸酯二醇、羥基末端聚丁二烯、聚酯多元醇等多元醇直接進行丙烯酸酯化或透過二異氰酸酯進行胺甲酸酯丙烯酸酯化所得之丙烯酸酯類及三聚氰胺丙烯酸酯、及對應前述丙烯酸酯之各甲基丙烯酸酯類。光聚合性單體可單獨使用1種,亦可組合2種以上來使用。又,光聚合性單體亦可作為反應性稀釋劑使用。此外,所謂的「光聚合性單體」,在光硬化性樹脂當中又特別係指為單體之化合物。作為光聚合性單體宜使用2官能~6官能之光聚合性單體。2官能~6官能之光聚合性單體可舉例如二新戊四醇六丙烯酸酯(DPHA)、新戊四醇五丙烯酸酯、三環癸烷二甲醇二丙烯酸酯、三環癸烷二甲醇二甲基丙烯酸酯、乙氧基化雙酚A二丙烯酸酯、乙氧基化雙酚A二甲基丙烯酸酯、三羥甲基三丙烷三丙烯酸酯等。On the other hand, as the photopolymerizable monomer, a monomer having an ethylenically unsaturated group is preferably used. Examples of such photopolymerizable monomers include conventionally known polyester (meth)acrylates, polyether (meth)acrylates, urethane (meth)acrylates, carbonate (meth)acrylates, epoxy (meth)acrylates, and the like. Specifically, alkyl acrylates such as 2-ethylhexyl acrylate and cyclohexyl acrylate; hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate; monoacrylates or diacrylates of alkylene oxide derivatives such as ethylene glycol, propylene glycol, diethylene glycol, and dipropylene glycol; acrylamides such as N,N-dimethylacrylamide, N-hydroxymethylacrylamide, and N,N-dimethylaminopropylacrylamide; aminoalkyl acrylates such as N,N-dimethylaminoethyl acrylate and N,N-dimethylaminopropyl acrylate; polyols such as hexanediol, trihydroxymethylpropane, pentaerythritol, ditrihydroxymethylpropane, dipentaerythritol, trihydroxyethyl isocyanate, or epoxy derivatives thereof. Polyacrylates such as alkyl adducts or ε-caprolactone adducts; polyacrylates such as phenols such as phenoxy acrylate and bisphenol A diacrylate or alkylene oxide adducts thereof; acrylates of epoxypropyl ethers such as glycerol diglycidyl ether, trihydroxymethyl propane triglycidyl ether, and triglycidyl triisocyanate; and not limited to the above, at least one of the following can be appropriately selected for use: acrylates and melamine acrylates obtained by directly acrylated polyols such as polyether polyols, polycarbonate diols, hydroxyl-terminated polybutadiene, and polyester polyols or urethane acrylated through diisocyanates, and methacrylates corresponding to the above acrylates. The photopolymerizable monomer can be used alone or in combination of two or more. In addition, the photopolymerizable monomer can also be used as a reactive diluent. In addition, the so-called "photopolymerizable monomer" refers to a compound that is a monomer in a photocurable resin. As the photopolymerizable monomer, a difunctional to hexafunctional photopolymerizable monomer is preferably used. Examples of difunctional to hexafunctional photopolymerizable monomers include dipentatriol hexaacrylate (DPHA), pentatriol pentaacrylate, tricyclodecane dimethanol diacrylate, tricyclodecane dimethanol dimethacrylate, ethoxylated bisphenol A diacrylate, ethoxylated bisphenol A dimethacrylate, trihydroxymethyl tripropane triacrylate, and the like.

硬化性樹脂組成物中之光硬化性樹脂含量只要可發揮本發明效果則無特別限定,例如相對於硬化性樹脂組成物之固體成分總質量,以固體成分基準計可設為10~50質量%等。The content of the photocurable resin in the curable resin composition is not particularly limited as long as the effect of the present invention can be exerted. For example, it can be set to 10-50 mass % based on the total mass of the solid components of the curable resin composition.

為了對硬化性樹脂組成物賦予鹼性顯影性,硬化性樹脂宜可摻混含羧基樹脂。作為含羧基樹脂,可使用分子中具有羧基之迄今公知的各種樹脂。 作為含羧基樹脂之具體例,可舉譬如以下之化合物(可為寡聚物及聚合物之任一者)。 In order to impart alkaline developing properties to the hardening resin composition, the hardening resin may be mixed with a carboxyl group-containing resin. As the carboxyl group-containing resin, various resins known to date having a carboxyl group in the molecule may be used. As specific examples of the carboxyl group-containing resin, the following compounds (which may be either oligomers or polymers) may be cited.

(1)一種含羧基樹脂,係藉由(甲基)丙烯酸等不飽和羧酸與苯乙烯、α-甲基苯乙烯、低級烷基(甲基)丙烯酸酯、異丁烯等含不飽和基化合物之共聚而得者。(1) A carboxyl group-containing resin obtained by copolymerizing an unsaturated carboxylic acid such as (meth) acrylic acid with an unsaturated group-containing compound such as styrene, α-methylstyrene, a lower alkyl (meth)acrylate, isobutylene, etc.

(2)一種含羧基胺甲酸酯樹脂,係藉由脂肪族二異氰酸酯、分枝脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等二異氰酸酯與二羥甲基丙酸、二羥甲基丁酸等含羧基之二醇化合物及聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成物二元醇、具有酚性羥基及醇性羥基之化合物等二元醇化合物之聚加成反應所得者。(2) A carboxyl group-containing urethane resin obtained by the polyaddition reaction of a diisocyanate such as an aliphatic diisocyanate, a branched aliphatic diisocyanate, an alicyclic diisocyanate, an aromatic diisocyanate, a diol compound containing a carboxyl group such as dihydroxymethylpropionic acid, dihydroxymethylbutyric acid, and a diol compound such as a polycarbonate polyol, a polyether polyol, a polyester polyol, a polyolefin polyol, an acrylic polyol, a bisphenol A-based epoxide adduct diol, and a compound having a phenolic hydroxyl group and an alcoholic hydroxyl group.

(3)一種含羧基感光性胺甲酸酯樹脂,係藉由二異氰酸酯與雙酚A型環氧樹脂、氫化雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、聯二甲苯酚型環氧樹脂、聯苯酚型環氧樹脂等2官能環氧樹脂與(甲基)丙烯酸等具有乙烯性不飽和基之單羧酸化合物之反應物的部分酸酐改質物、含羧基二醇化合物及二元醇化合物之聚加成反應所得者。(3) A carboxyl group-containing photosensitive urethane resin obtained by a polyaddition reaction of a diisocyanate with a partially anhydride-modified product of a reaction product of a bifunctional epoxy resin such as bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bixylenol type epoxy resin, biphenol type epoxy resin and a monocarboxylic acid compound having an ethylenically unsaturated group such as (meth) acrylic acid, a carboxyl group-containing diol compound and a diol compound.

(4)一種含羧基感光性胺甲酸酯樹脂,係於前述(2)或(3)之樹脂的合成中,加入(甲基)丙烯酸羥烷基酯等分子中具有1個羥基與1個以上(甲基)丙烯醯基之化合物進行末端(甲基)丙烯醯化所得者。(4) A carboxyl-containing photosensitive urethane resin obtained by adding a compound having one hydroxyl group and one or more (meth)acryloyl groups in the molecule such as (meth)acrylate to the synthesis of the resin of (2) or (3) above to carry out terminal (meth)acrylation.

(5)一種含羧基感光性胺甲酸酯樹脂,係於前述(2)或(3)之樹脂的合成中,加入異佛酮二異氰酸酯與新戊四醇三丙烯酸酯的等莫耳反應物等之分子中具有1個異氰酸酯基與1個以上(甲基)丙烯醯基之化合物進行末端(甲基)丙烯醯化所得者。(5) A carboxyl group-containing photosensitive urethane resin obtained by adding an equimolar reaction product of isophorone diisocyanate and pentaerythritol triacrylate to the synthesis of the resin of (2) or (3) above, and subjecting the resulting resin to terminal (meth)acrylization.

(6)一種含羧基感光性樹脂,係使(甲基)丙烯酸對2官能或2官能以上之多官能(固體)環氧樹脂進行反應,並使2元酸酐加成至存在於側鏈之羥基所得者。(6) A carboxyl-containing photosensitive resin obtained by reacting (meth) acrylic acid with a difunctional or more multifunctional (solid) epoxy resin and adding a dibasic acid anhydride to a hydroxyl group existing in a side chain.

(7)一種含羧基感光性樹脂,係使(甲基)丙烯酸對進一步以環氧氯丙烷將2官能(固體)環氧樹脂之羥基進行環氧化所得之多官能環氧樹脂進行反應,並使2元酸酐加成至所產生之羥基所得者。(7) A carboxyl-containing photosensitive resin obtained by reacting (meth)acrylic acid with a polyfunctional epoxy resin obtained by epoxidizing the hydroxyl group of a bifunctional (solid) epoxy resin with epichlorohydrin, and adding a dibasic acid anhydride to the generated hydroxyl group.

(8)一種含羧基聚酯樹脂,係使己二酸、酞酸、六氫酞酸等二羧酸對2官能氧雜環丁烷樹脂進行反應,並使酞酸酐、四氫酞酸酐、六氫酞酸酐等2元酸酐加成至所產生之1級羥基所得者。(8) A carboxyl group-containing polyester resin obtained by reacting a dicarboxylic acid such as adipic acid, phthalic acid, or hexahydrophthalic acid with a difunctional cyclohexane resin and adding a dibasic acid anhydride such as phthalic anhydride, tetrahydrophthalic anhydride, or hexahydrophthalic anhydride to the generated primary hydroxyl group.

(9)一種含羧基感光性樹脂,係使對羥基苯乙醇等1分子中具有至少1個醇性羥基與1個酚性羥基之化合物與(甲基)丙烯酸等含不飽和基之單羧酸對1分子中具有複數個環氧基之環氧化合物進行反應,並使馬來酸酐、四氫酞酸酐、偏苯三甲酸酐、焦蜜石酸酐、己二酸等多元酸酐對所得反應產物之醇性羥基進行反應而得者。(9) A carboxyl group-containing photosensitive resin obtained by reacting a compound having at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule such as p-hydroxyphenylethanol with an unsaturated group-containing monocarboxylic acid such as (meth)acrylic acid with an epoxy compound having a plurality of epoxy groups in one molecule, and reacting the alcoholic hydroxyl group of the reaction product with a polyacid anhydride such as maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyrophyllitic anhydride, adipic acid, etc.

(10)一種含羧基感光性樹脂,係使含不飽和基之單羧酸對使1分子中具有複數個酚性羥基之化合物與氧化乙烯、氧化丙烯等環氧烷進行反應而得之反應產物進行反應,並使多元酸酐對所得反應產物進行反應而得者。(10) A carboxyl group-containing photosensitive resin obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with a monocarboxylic acid containing an unsaturated group and an alkylene oxide such as ethylene oxide or propylene oxide, and reacting the obtained reaction product with a polyacid anhydride.

(11)一種含羧基感光性樹脂,係使含不飽和基之單羧酸對使1分子中具有複數個酚性羥基之化合物與碳酸伸乙酯、碳酸伸丙酯等環狀碳酸酯化合物進行反應而得的反應產物進行反應,並使多元酸酐對所得之反應產物進行反應而得者。(11) A carboxyl group-containing photosensitive resin obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with a monocarboxylic acid containing an unsaturated group and a cyclic carbonate compound such as ethyl carbonate or propylene carbonate with a reaction product, and reacting the reaction product with a polyacid anhydride.

(12)一種含羧基感光性樹脂,係對前述(1)~(11)之樹脂進一步加成1分子中具有1個環氧基與1個以上(甲基)丙烯醯基之化合物而成者。 此外,在本說明書中,所謂的(甲基)丙烯酸酯係統稱丙烯酸酯、甲基丙烯酸酯及其等之混合物的用語,其他類似的表現亦同。 (12) A carboxyl group-containing photosensitive resin, which is obtained by further adding a compound having one epoxy group and one or more (meth)acrylic groups in one molecule to the resins of (1) to (11). In addition, in this specification, the so-called (meth)acrylate is a general term for acrylate, methacrylate and mixtures thereof, and other similar expressions are the same.

含羧基樹脂之酸值適宜在30~150mgKOH/g之範圍內,較宜在50~120mgKOH/g之範圍內。含羧基樹脂之酸值若為30mgKOH/g以上,便能適當進行鹼性顯影,另一方面,含羧基樹脂之酸值若為150mgKOH/g以下,則曝光部不會因為顯影液而溶解,因此藉由顯影液可區別溶解曝光部與未曝光部而剝離,從而容易描繪正常的抗蝕圖案,故較佳。The acid value of the carboxyl resin is preferably in the range of 30~150mgKOH/g, preferably in the range of 50~120mgKOH/g. If the acid value of the carboxyl resin is above 30mgKOH/g, alkaline development can be properly performed. On the other hand, if the acid value of the carboxyl resin is below 150mgKOH/g, the exposed part will not be dissolved by the developer, so the developer can distinguish and dissolve the exposed part and the unexposed part and peel them off, so that it is easy to draw a normal anti-etching pattern, which is better.

含羧基樹脂之重量平均分子量會依樹脂骨架而不同,一般宜在2,000~150,000之範圍內,更宜在5,000~100,000之範圍內。重量平均分子量若為2,000以上,則曝光後之塗膜的耐濕性良好,在顯影時不會產生膜減少,且容易獲得優異的解析度。另一方面,重量平均分子量若為150,000以下,便容易獲得良好的顯影性,且容易獲得良好的儲存穩定性。重量平均分子量可利用凝膠滲透層析法(GPC)來測定。The weight average molecular weight of the carboxyl-containing resin varies depending on the resin skeleton, and is generally preferably in the range of 2,000 to 150,000, and more preferably in the range of 5,000 to 100,000. If the weight average molecular weight is above 2,000, the moisture resistance of the coating after exposure is good, the film will not be reduced during development, and excellent resolution can be easily obtained. On the other hand, if the weight average molecular weight is below 150,000, good development properties and good storage stability can be easily obtained. The weight average molecular weight can be measured by gel permeation chromatography (GPC).

該等含羧基樹脂皆可使用,不限於前述所列舉之物,且可單獨使用1種,亦可組合2種以上來使用。其中,上述之含羧基樹脂(10)、(11)這種使用具有酚性羥基之化合物作為起始原料進行合成所得之含羧基樹脂因為HAST耐性、PCT耐性優異,故適合使用。The carboxyl-containing resins can be used without limitation to those listed above, and can be used alone or in combination of two or more. Among them, the carboxyl-containing resins (10) and (11) synthesized using a compound having a phenolic hydroxyl group as a starting material are suitable for use because of their excellent HAST resistance and PCT resistance.

於硬化性樹脂組成物中,可摻混(A-2)熱硬化性樹脂作為硬化性樹脂。藉由於硬化性樹脂組成物中摻混熱硬化性樹脂,可期待提升硬化性樹脂組成物之耐熱性、耐藥品性及密著性。熱硬化性樹脂可單獨使用1種,亦可組合2種以上來使用。作為熱硬化性樹脂可使用任何公知之物。例如可使用三聚氰胺樹脂、苯胍胺樹脂、三聚氰胺衍生物、苯胍胺衍生物等胺基樹脂、異氰酸酯化合物、封端異氰酸酯化合物、環碳酸酯化合物、環氧化合物、氧雜環丁烷化合物、㗁唑啉化合物、環硫化物樹脂、雙馬來醯亞胺、碳二亞胺樹脂等公知之熱硬化性樹脂。該等各熱硬化性樹脂可為單官能,亦可為多官能。The (A-2) thermosetting resin may be blended into the curable resin composition as the curable resin. By blending the thermosetting resin into the curable resin composition, it is expected that the heat resistance, chemical resistance and adhesion of the curable resin composition will be improved. The thermosetting resin may be used alone or in combination of two or more. Any known thermosetting resin may be used. For example, known thermosetting resins such as melamine resin, benzoguanamine resin, melamine derivatives, benzoguanamine derivatives, amino resins, isocyanate compounds, blocked isocyanate compounds, cyclocarbonate compounds, epoxy compounds, oxycyclobutane compounds, oxazoline compounds, cyclosulfide resins, dimaleimide, and carbodiimide resins can be used. Each of these thermosetting resins may be monofunctional or polyfunctional.

環氧化合物可舉下述諸等:環氧化植物油;雙酚A型環氧樹脂;氫醌型環氧樹脂;雙酚型環氧樹脂;硫醚型環氧樹脂;溴化環氧樹脂;酚醛清漆型環氧樹脂;苯酚酚醛清漆型環氧樹脂;聯苯酚酚醛清漆型環氧樹脂;雙酚F型環氧樹脂;氫化雙酚A型環氧樹脂;環氧丙基胺型環氧樹脂;乙內醯脲型環氧樹脂;脂環式環氧樹脂;三羥苯基甲烷型環氧樹脂;聯二甲苯酚型或聯苯酚型環氧樹脂或其等之混合物;雙酚S型環氧樹脂;雙酚A酚醛清漆型環氧樹脂;四羥苯基乙烷型環氧樹脂;雜環式環氧樹脂;二環氧丙基酞酸酯樹脂;四環氧丙基二甲苯酚基乙烷樹脂;含萘基之環氧樹脂;具有二環戊二烯骨架之環氧樹脂;環氧丙基甲基丙烯酸酯共聚系環氧樹脂;環己基馬來醯亞胺與環氧丙基甲基丙烯酸酯之共聚環氧樹脂;環氧改質之聚丁二烯橡膠衍生物;CTBN改質環氧樹脂,但不限於該等。該等環氧樹脂可單獨使用1種,亦可組合2種以上來使用。Examples of epoxy compounds include: epoxidized vegetable oils; bisphenol A epoxy resins; hydroquinone epoxy resins; bisphenol epoxy resins; thioether epoxy resins; brominated epoxy resins; novolac epoxy resins; phenol novolac epoxy resins; biphenol novolac epoxy resins; Lacquer type epoxy resin; bisphenol F type epoxy resin; hydrogenated bisphenol A type epoxy resin; glycidylamine type epoxy resin; hydantoin type epoxy resin; alicyclic epoxy resin; trihydroxyphenylmethane type epoxy resin; dixylenol type or diphenol type epoxy resin or the like mixture; bisphenol S type epoxy resin; bisphenol A novolac type epoxy resin; tetrahydroxyphenylethane type epoxy resin; hybrid epoxy resin; diglycidyl phthalate resin; tetraglycidyl xylenol ethane resin; naphthyl-containing epoxy resin; epoxy resin having a dicyclopentadiene skeleton; epoxy resin copolymerized with epoxy propyl methacrylate; epoxy resin copolymerized with cyclohexylmaleimide and epoxy propyl methacrylate; epoxy-modified polybutadiene rubber derivative; CTBN-modified epoxy resin, but not limited to the above. These epoxy resins may be used alone or in combination of two or more.

作為氧雜環丁烷化合物,宜使用1分子中具有2個以上氧雜環丁烷基之多官能氧雜環丁烷化合物。多官能氧雜環丁烷化合物可舉例如雙[(3-甲基-3-氧雜環丁烷基甲氧基)甲基]醚、雙[(3-乙基-3-氧雜環丁烷基甲氧基)甲基]醚、1,4-雙[(3-甲基-3-氧雜環丁烷基甲氧基)甲基]苯、1,4-雙[(3-乙基-3-氧雜環丁烷基甲氧基)甲基]苯、(3-甲基-3-氧雜環丁烷基)甲基丙烯酸酯、(3-乙基-3-氧雜環丁烷基)甲基丙烯酸酯、(3-甲基-3-氧雜環丁烷基)甲基甲基丙烯酸酯、(3-乙基-3-氧雜環丁烷基)甲基甲基丙烯酸酯、其等之寡聚物或共聚物等多官能氧雜環丁烷類,此外還可舉氧雜環丁烷醇與酚醛清漆樹脂、聚(對羥苯乙烯)、卡多型雙酚類、杯芳烴類、間苯二酚杯芳烴(calixresorcinarene)類或矽倍半氧烷等具有羥基之樹脂的醚化物等。除此之外,亦可舉具有氧雜環丁烷環之不飽和單體與(甲基)丙烯酸烷基酯之共聚物等。As the cyclohexane compound, a polyfunctional cyclohexane compound having two or more cyclohexane groups in one molecule is preferably used. Examples of the polyfunctional cyclohexane compound include bis[(3-methyl-3-cyclohexanebutanylmethoxy)methyl]ether, bis[(3-ethyl-3-cyclohexanebutanylmethoxy)methyl]ether, 1,4-bis[(3-methyl-3-cyclohexanebutanylmethoxy)methyl]benzene, 1,4-bis[(3-ethyl-3-cyclohexanebutanylmethoxy)methyl]benzene, (3-methyl-3-cyclohexanebutanyl)methacrylate, (3-ethyl-3-cyclohexanebutanyl)methyl Examples of the present invention include polyfunctional cyclobutanes such as acrylate, (3-methyl-3-cyclooxobutane) methyl methacrylate, (3-ethyl-3-cyclooxobutane) methyl methacrylate, oligomers or copolymers thereof, and ethers of cyclooxobutane alcohol and resins having a hydroxyl group such as novolac resin, poly(p-hydroxystyrene), cardo-type bisphenols, calixarene, calixresorcinarene or silsesquioxane. In addition, copolymers of unsaturated monomers having cyclooxobutane rings and alkyl (meth)acrylates can also be mentioned.

㗁唑啉化合物可舉例如1分子中可具有2個以上㗁唑啉基之化合物。這類㗁唑啉化合物可舉例如含㗁唑啉基單體之聚合物、含㗁唑啉基單體與其他單體之共聚物等含㗁唑啉基之聚合物。含㗁唑啉基單體可舉例如2-乙烯基-2-㗁唑啉、2-乙烯基-4-甲基-2-㗁唑啉、2-乙烯基-5-甲基-2-㗁唑啉、2-異丙烯基-2-㗁唑啉、2-異丙烯基-4-甲基-2-㗁唑啉、2-異丙烯基-5-乙基-2-㗁唑啉、2-異丙烯基-2-㗁唑啉、2-異丙烯基-4,4-二甲基-2-㗁唑啉等。Examples of the oxazoline compound include compounds having two or more oxazoline groups in one molecule. Examples of such oxazoline compounds include polymers containing oxazoline group monomers, copolymers of oxazoline group-containing monomers and other monomers, and other oxazoline group-containing polymers. Examples of the oxazoline group-containing monomers include 2-vinyl-2-oxazoline, 2-vinyl-4-methyl-2-oxazoline, 2-vinyl-5-methyl-2-oxazoline, 2-isopropenyl-2-oxazoline, 2-isopropenyl-4-methyl-2-oxazoline, 2-isopropenyl-5-ethyl-2-oxazoline, 2-isopropenyl-2-oxazoline, and 2-isopropenyl-4,4-dimethyl-2-oxazoline.

環硫化物樹脂可舉例如構成任意環氧化合物中之環氧基的氧原子取代為硫原子而得之化合物。作為環氧化合物,可舉與上述相同之物。又,作為將構成環氧化合物中之環氧基的氧原子取代為硫原子的方法,可使用迄今公知之方法。Examples of the epoxide sulfide resin include compounds obtained by replacing the oxygen atom constituting the epoxy group in any epoxy compound with a sulfur atom. Examples of the epoxy compound include the same as those mentioned above. As a method for replacing the oxygen atom constituting the epoxy group in the epoxy compound with a sulfur atom, a conventionally known method can be used.

三聚氰胺衍生物、苯胍胺衍生物等胺基樹脂可舉羥甲基三聚氰胺化合物、羥甲基苯胍胺化合物、羥甲基乙炔脲化合物及羥甲脲化合物等。Amino resins such as melamine derivatives and benzoguanamine derivatives can be used to produce hydroxymethylmelamine compounds, hydroxymethylbenzoguanamine compounds, hydroxymethylacetylene urea compounds, and hydroxymethylurea compounds.

可摻混聚異氰酸酯化合物作為異氰酸酯化合物。聚異氰酸酯化合物可舉下述諸等:4,4'-二苯甲烷二異氰酸酯、2,4-甲苯二異氰酸酯、2,6-甲苯二異氰酸酯、萘-1,5-二異氰酸酯、鄰伸茬基二異氰酸酯、間伸茬基二異氰酸酯及2,4-甲伸苯基二聚物等芳香族聚異氰酸酯;四亞甲基二異氰酸酯、六亞甲基二異氰酸酯、亞甲基二異氰酸酯、三甲基六亞甲基二異氰酸酯、4,4-亞甲基雙(環己基異氰酸酯)及異佛酮二異氰酸酯等脂肪族聚異氰酸酯;雙環庚烷三異氰酸酯等脂環式聚異氰酸酯;以及先前列舉之異氰酸酯化合物的加成物、縮二脲體及三聚異氰酸酯體。A polyisocyanate compound may be mixed as the isocyanate compound. Examples of the polyisocyanate compound include aromatic polyisocyanates such as 4,4'-diphenylmethane diisocyanate, 2,4-toluene diisocyanate, 2,6-toluene diisocyanate, 1,5-naphthalene diisocyanate, o-isocyanate, m-isocyanate, and 2,4-toluene dimer; tetramethylene diisocyanate, hexaisocyanate, and the like. Aliphatic polyisocyanates such as methylene diisocyanate, methylene diisocyanate, trimethylhexamethylene diisocyanate, 4,4-methylenebis(cyclohexyl isocyanate) and isophorone diisocyanate; alicyclic polyisocyanates such as dicycloheptane triisocyanate; and adducts, biuret forms and isocyanurate forms of the isocyanate compounds listed above.

封端異氰酸酯化合物可使用異氰酸酯化合物與異氰酸酯封端劑之加成反應產物。可與異氰酸酯封端劑反應之異氰酸酯化合物可舉例如上述聚異氰酸酯化合物等。異氰酸酯封端劑可舉例如:酚系封端劑;內醯胺系封端劑;活性亞甲基系封端劑;醇系封端劑;肟系封端劑;硫醇系封端劑;酸醯胺系封端劑;醯亞胺系封端劑;胺系封端劑;咪唑系封端劑;亞胺系封端劑等。The blocked isocyanate compound may be an addition reaction product of an isocyanate compound and an isocyanate blocking agent. Examples of the isocyanate compound that can react with the isocyanate blocking agent include the above-mentioned polyisocyanate compound, etc. Examples of the isocyanate blocking agent include: phenol-based blocking agents; lactam-based blocking agents; active methylene-based blocking agents; alcohol-based blocking agents; oxime-based blocking agents; thiol-based blocking agents; amide-based blocking agents; imide-based blocking agents; amine-based blocking agents; imidazole-based blocking agents; imine-based blocking agents, etc.

硬化性樹脂組成物中之熱硬化性樹脂含量只要可發揮本發明效果則無特別限定,例如相對於硬化性樹脂組成物之固體成分總質量,以固體成分基準計可設為3~50質量%。The content of the thermosetting resin in the curable resin composition is not particularly limited as long as the effect of the present invention can be exerted. For example, it can be set to 3-50 mass % based on the solid content relative to the total mass of the solid components of the curable resin composition.

(填料) 本發明之硬化性樹脂組成物包含(B)經表面處理之鋇化合物及(C)經表面處理之二氧化矽作為填料。相對於硬化性樹脂組成物之固體成分總質量,硬化性樹脂組成物中之經表面處理之鋇化合物與經表面處理之二氧化矽的合計含量以固體成分基準計為20~80質量%,宜為20~50質量%,較宜為30~40質量%。又,硬化性樹脂組成物中之經表面處理之鋇化合物與經表面處理之二氧化矽之固體成分基準的質量比為1:1~1:4,宜為1:1~1:3,較宜為1:1.5~1:2。令經表面處理之鋇化合物與經表面處理之二氧化矽的合計含量、及其等之固體成分基準的質量比在所述範圍內,藉此可兼顧良好的解析性與耐裂痕性。 (Filler) The curable resin composition of the present invention contains (B) a surface-treated barium compound and (C) a surface-treated silicon dioxide as fillers. The total content of the surface-treated barium compound and the surface-treated silicon dioxide in the curable resin composition is 20-80% by mass, preferably 20-50% by mass, and more preferably 30-40% by mass, based on the total mass of the solid components of the curable resin composition. In addition, the mass ratio of the surface-treated barium compound to the surface-treated silicon dioxide in the curable resin composition based on the solid components is 1:1-1:4, preferably 1:1-1:3, and more preferably 1:1.5-1:2. By making the total content of the surface-treated barium compound and the surface-treated silicon dioxide, and their solid component-based mass ratio within the above range, both good resolvability and crack resistance can be achieved.

關於經表面處理之鋇化合物,所謂的鋇化合物之概念包括鋇單體及包含鋇之各種化合物。亦即,經表面處理之鋇化合物包括將鋇單體進行表面處理後之化合物、及將包含鋇之化合物進行表面處理後之化合物。經表面處理之鋇化合物可單獨使用1種,亦可組合2種以上來使用。Regarding the surface-treated barium compound, the concept of the so-called barium compound includes barium monomers and various compounds containing barium. That is, the surface-treated barium compound includes a compound obtained by surface-treating a barium monomer and a compound obtained by surface-treating a compound containing barium. The surface-treated barium compound may be used alone or in combination of two or more.

包含鋇之化合物若為可作為填料使用之化合物則無特別限制,可舉例如硫酸鋇、鈦酸鋇、氧化鋇、氫氧化鋇等。作為包含鋇之化合物宜使用硫酸鋇。硫酸鋇之市售品可舉例如堺化學工業股份公司製之B-30、B-33等。The compound containing barium is not particularly limited as long as it is a compound that can be used as a filler, and examples thereof include barium sulfate, barium titanate, barium oxide, and barium hydroxide. Barium sulfate is preferably used as the compound containing barium. Commercial products of barium sulfate include B-30 and B-33 manufactured by Sakai Chemical Industry Co., Ltd.

鋇化合物之表面處理只要是可於鋇化合物表面賦予反應性官能基之處理則無特別限定,可進行迄今公知之填料的表面處理。於鋇化合物表面賦予之反應性官能基可舉例如甲基丙烯醯基、羧基、羥基、磺酸基、胺基、環氧基、乙烯基、巰基、酸酐等。經表面處理之鋇化合物可具有1種反應性官能基,亦可具有2種以上的反應性官能基。又,當使用2種以上經表面處理之鋇化合物時,其等可具有互相相同的反應性官能基,亦可具有不同的反應性官能基。經表面處理之鋇化合物宜使用於其表面具有甲基丙烯醯基之鋇化合物。The surface treatment of the barium compound is not particularly limited as long as it is a treatment that can impart reactive functional groups to the surface of the barium compound, and the surface treatment of fillers known to date can be performed. Examples of the reactive functional groups imparted to the surface of the barium compound include methacryloyl groups, carboxyl groups, hydroxyl groups, sulfonic acid groups, amino groups, epoxy groups, vinyl groups, butyl groups, acid anhydrides, and the like. The surface-treated barium compound may have one reactive functional group, or may have two or more reactive functional groups. Furthermore, when two or more surface-treated barium compounds are used, they may have the same reactive functional groups, or may have different reactive functional groups. The surface-treated barium compound is preferably a barium compound having a methacryloyl group on its surface.

作為用以獲得經表面處理之鋇化合物的方法、亦即於鋇化合物表面賦予反應性官能基的方法,可使用迄今公知之方法。例如,可舉下述諸等方法:使各種具有反應性官能基之耦合劑(譬如矽烷化合物(所謂的矽烷系耦合劑))與鋇化合物鍵結(透過耦合劑使鋇化合物與反應性官能基鍵結)的方法。此外,於本說明書中,耦合劑與鋇化合物之「鍵結」的概念不僅包含伴隨耦合劑與鋇化合物之間的化學反應之鍵結(化學吸附),還包含不伴隨所述化學反應之鍵結(物理吸附)。As a method for obtaining a surface-treated barium compound, that is, a method for imparting a reactive functional group to the surface of a barium compound, a method known to date can be used. For example, the following methods can be cited: a method of bonding various coupling agents having reactive functional groups (such as silane compounds (so-called silane-based coupling agents)) to a barium compound (bonding the barium compound to the reactive functional group via the coupling agent). In addition, in this specification, the concept of "bonding" between a coupling agent and a barium compound includes not only bonding accompanied by a chemical reaction between the coupling agent and the barium compound (chemical adsorption), but also bonding not accompanied by the chemical reaction (physical adsorption).

耦合劑可舉例如矽烷系、鋁酸鹽系、鈦酸酯系、鋯鋁酸鹽系等。在該等之中,宜使用矽烷系耦合劑。矽烷系耦合劑可舉例如乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷、N-(2-胺甲基)-3-胺丙基甲基二甲氧基矽烷、N-(2-胺乙基)-3-胺丙基三甲氧基矽烷、3-胺丙基三乙氧基矽烷、3-苯胺基丙基三甲氧基矽烷、3-環氧丙氧基丙基三甲氧基矽烷、3-環氧丙氧基丙基甲基二甲氧基矽烷、2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽烷、3-巰丙基三甲氧基矽烷等。耦合劑可單獨使用1種,亦可組合2種以上來使用。Examples of coupling agents include silane-based, aluminate-based, titanium ester-based, zirconium-aluminate-based, etc. Among these, silane-based coupling agents are preferably used. Examples of the silane coupling agent include vinyl trimethoxysilane, vinyl triethoxysilane, N-(2-aminomethyl)-3-aminopropyl methyl dimethoxysilane, N-(2-aminoethyl)-3-aminopropyl trimethoxysilane, 3-aminopropyl triethoxysilane, 3-anilinopropyl trimethoxysilane, 3-glycidoxypropyl trimethoxysilane, 3-glycidoxypropyl methyl dimethoxysilane, 2-(3,4-epoxycyclohexyl)ethyl trimethoxysilane, 3-methacryloyloxypropyl trimethoxysilane, and 3-butyl trimethoxysilane. The coupling agent may be used alone or in combination of two or more.

當經表面處理之鋇化合物係藉由使具有反應性官能基之耦合劑與鋇化合物鍵結的方法所得者時,該方法可使用迄今公知之方法。具體而言,可舉下述諸等方法:於具有反應性官能基之耦合劑溶解於溶劑中所得之溶液中,使粉體之鋇化合物分散(視需求去除溶劑)而使兩者接觸的方法;將粉體之鋇化合物直接添加至具有反應性官能基之耦合劑中,並進行混合而使兩者接觸的方法。又,亦可視需求在使具有反應性官能基之耦合劑與粉體之鋇化合物接觸後,包含進行加熱之步驟。欲與粉體之鋇化合物接觸之具有反應性官能基之耦合劑的量(耦合劑之處理量),可因應使具有反應性官能基之耦合劑與鋇化合物鍵結的方法、反應性官能基種類、耦合劑種類等來適當設定。When the surface-treated barium compound is obtained by bonding a coupling agent having a reactive functional group to a barium compound, the method can use a method known to date. Specifically, the following methods can be cited: a method in which a powdered barium compound is dispersed in a solution obtained by dissolving a coupling agent having a reactive functional group in a solvent (the solvent is removed as required) and the two are brought into contact; a method in which a powdered barium compound is directly added to a coupling agent having a reactive functional group and mixed to bring the two into contact. In addition, a step of heating may be included after bringing the coupling agent having a reactive functional group into contact with the powdered barium compound as required. The amount of the coupling agent having a reactive functional group to be brought into contact with the barium compound in the powder (the amount of the coupling agent to be treated) can be appropriately set according to the method of bonding the coupling agent having a reactive functional group to the barium compound, the type of the reactive functional group, the type of the coupling agent, etc.

經表面處理之鋇化合物的粒徑無特別限制,可適當設定,但以平均粒徑而言宜為0.1~1µm,較佳為0.1~0.5µm。藉由令經表面處理之鋇化合物的平均粒徑在上述範圍內,可獲得良好解析性。此外,於本說明書中,填料之平均粒徑係在被摻混於硬化性樹脂組成物前之平均粒徑,且係以雷射繞射法測出之D50的值。雷射繞射法之平均粒徑(D50)測定裝置可使用MicrotracBEL股份公司製之Microtrac MT3300EXII。The particle size of the surface-treated barium compound is not particularly limited and can be appropriately set, but the average particle size is preferably 0.1~1µm, and more preferably 0.1~0.5µm. By setting the average particle size of the surface-treated barium compound to be within the above range, good resolvability can be obtained. In addition, in this specification, the average particle size of the filler is the average particle size before being mixed into the curable resin composition, and is the D50 value measured by the laser diffraction method. The average particle size (D50) measuring device of the laser diffraction method can use Microtrac MT3300EXII manufactured by MicrotracBEL Co., Ltd.

在硬化性樹脂組成物中經表面處理之鋇化合物含量只要滿足上述經表面處理之鋇化合物與經表面處理之二氧化矽之固體成分基準的合計含量、及其等之固體成分基準的質量比的範圍則無特別限制,但例如相對於硬化性樹脂組成物之固體成分總質量,所述經表面處理之鋇化合物含量以固體成分基準計為7~28質量%。此外,當組合2種以上經表面處理之鋇化合物來使用時,上述經表面處理之鋇化合物含量係指所有經表面處理之鋇化合物的合計含量。The content of the surface-treated barium compound in the curable resin composition is not particularly limited as long as it satisfies the range of the total content of the surface-treated barium compound and the surface-treated silica on a solid component basis, and the mass ratio of the solid component basis thereof. However, for example, the content of the surface-treated barium compound is 7 to 28% by mass on a solid component basis relative to the total mass of the solid component of the curable resin composition. In addition, when two or more surface-treated barium compounds are used in combination, the content of the surface-treated barium compound refers to the total content of all surface-treated barium compounds.

作為構成經表面處理之二氧化矽的二氧化矽,可使用不定形二氧化矽、非晶質二氧化矽、結晶質二氧化矽、熔融二氧化矽、球狀二氧化矽等中之任一種二氧化矽。二氧化矽可單獨使用1種,亦可組合2種以上來使用。作為二氧化矽,宜使用球狀二氧化矽。球狀二氧化矽之市售品可舉例如股份公司Admatechs製之SO-C2、SO-E2,Denka股份公司製之SFP-20M等。As the silicon dioxide constituting the surface-treated silicon dioxide, any one of amorphous silicon dioxide, non-crystalline silicon dioxide, crystalline silicon dioxide, fused silicon dioxide, spherical silicon dioxide, etc. can be used. Silicon dioxide can be used alone or in combination of two or more. As silicon dioxide, spherical silicon dioxide is preferably used. Commercially available products of spherical silicon dioxide include SO-C2 and SO-E2 manufactured by Admatechs Co., Ltd. and SFP-20M manufactured by Denka Co., Ltd.

二氧化矽之表面處理種類及其方法無特別限制,例如可設為與上述鋇化合物之表面處理相同。The type and method of surface treatment of silicon dioxide are not particularly limited, and can be, for example, the same as the surface treatment of the barium compound described above.

經表面處理之二氧化矽的粒徑無特別限制,可適當設定,但以平均粒徑而言可設為例如0.01~1µm等。藉由令經表面處理之二氧化矽的平均粒徑在上述範圍內,可獲得良好解析性。The particle size of the surface-treated silicon dioxide is not particularly limited and can be appropriately set, but the average particle size can be set to, for example, 0.01 to 1 µm. By setting the average particle size of the surface-treated silicon dioxide to be within the above range, good resolvability can be obtained.

在硬化性樹脂組成物中經表面處理之二氧化矽含量只要滿足上述經表面處理之鋇化合物與經表面處理之二氧化矽之固體成分基準的合計含量、及其等之固體成分基準的質量比的範圍則無特別限制,但例如相對於硬化性樹脂組成物之固體成分總質量,所述經表面處理之二氧化矽含量以固體成分基準計為13~52質量%。此外,當組合2種以上經表面處理之二氧化矽來使用時,上述經表面處理之二氧化矽含量係指所有經表面處理之二氧化矽的合計含量。The content of the surface-treated silica in the curable resin composition is not particularly limited as long as it satisfies the range of the total content of the surface-treated barium compound and the surface-treated silica based on the solid component, and the mass ratio of the solid component based on the solid component. For example, the content of the surface-treated silica is 13 to 52% by mass based on the solid component relative to the total mass of the solid component of the curable resin composition. In addition, when two or more surface-treated silicas are used in combination, the content of the surface-treated silica refers to the total content of all surface-treated silicas.

硬化性樹脂組成物除了包含上述經表面處理之鋇化合物及經表面處理之二氧化矽以外,亦可進一步包含其他填料。作為其他填料可使用公知之無機或有機填料,可舉例如水滑石、滑石、以及用以獲得白色外觀或阻燃性之氧化鈦等金屬氧化物、氫氧化鋁等金屬氫氧化物等。In addition to the surface-treated barium compound and the surface-treated silica, the curable resin composition may further contain other fillers. Other fillers may include known inorganic or organic fillers, such as hydrotalcite, talc, and metal oxides such as titanium oxide for obtaining a white appearance or flame retardancy, and metal hydroxides such as aluminum hydroxide.

(橡膠粒子) 本發明之硬化性樹脂組成物包含(D)橡膠粒子。構成橡膠粒子之材料若為柔軟性優異之材料則無特別限制,可舉例如丁二烯系彈性體、聚矽氧系彈性體、苯乙烯系彈性體、丙烯酸系彈性體、聚烯烴系彈性體、聚矽氧/丙烯酸系複合系彈性體等各種彈性體。作為構成橡膠粒子之材料,宜使用丁二烯系彈性體。橡膠粒子可單獨使用1種,亦可組合2種以上來使用。 (Rubber particles) The curable resin composition of the present invention includes (D) rubber particles. The material constituting the rubber particles is not particularly limited as long as it is a material with excellent flexibility, and various elastomers such as butadiene elastomers, silicone elastomers, styrene elastomers, acrylic elastomers, polyolefin elastomers, silicone/acrylic composite elastomers, etc. can be cited. As the material constituting the rubber particles, butadiene elastomers are preferably used. The rubber particles may be used alone or in combination of two or more.

橡膠粒子宜具有內核外殼結構,較宜具有下述內核外殼結構: 具有柔軟性優異之材料所構成之內核層、與對其他成分親和之親和性優異的材料所構成之外殼層的內核外殼結構(內核外殼橡膠粒子)。橡膠粒子具有內核外殼結構,藉此,內核層有益於衝擊耐性,且外殼層有益於在硬化性樹脂組成物中之分散性,結果可獲得硬化性樹脂組成物之高應力緩和效果。 The rubber particles preferably have a core-shell structure, and preferably have the following core-shell structure: A core-shell structure (core-shell rubber particles) having an inner core layer made of a material having excellent softness and an outer shell layer made of a material having excellent affinity for other components. The rubber particles have a core-shell structure, whereby the inner core layer is beneficial to impact resistance and the outer shell layer is beneficial to dispersibility in the curable resin composition, resulting in a high stress relief effect of the curable resin composition.

構成內核層之材料只要是柔軟性優異之材料則無特別限制,可舉如上述之各種彈性體等。The material constituting the inner core layer is not particularly limited as long as it is a material with excellent flexibility, and examples thereof include the various elastic bodies mentioned above.

構成外殼層之材料可使用對其他成分親和之親和性優異的材料,且可按其與硬化性樹脂組成物中所摻混之橡膠粒子以外之成分的關係來適當設定。譬如,若硬化性樹脂組成物包含環氧樹脂,則外殼層可用丙烯酸樹脂、環氧樹脂等對環氧樹脂親和之親和性優異的材料構成。The material constituting the outer shell layer can be a material having excellent affinity with other components, and can be appropriately set according to the relationship with the components other than the rubber particles mixed in the curable resin composition. For example, if the curable resin composition includes epoxy resin, the outer shell layer can be composed of a material having excellent affinity with epoxy resin, such as acrylic resin or epoxy resin.

橡膠粒子亦可於其表面具有可與硬化性樹脂進行硬化反應之硬化性反應基。硬化性反應基可為光硬化性反應基,亦可為熱硬化性反應基。橡膠粒子可單獨具有1種硬化性反應基,亦可組合具有2種以上硬化性反應基。The rubber particles may also have a curable reactive group on the surface thereof that can undergo a curing reaction with the curable resin. The curable reactive group may be a photocurable reactive group or a thermocurable reactive group. The rubber particles may have one type of curable reactive group alone or may have two or more types of curable reactive groups in combination.

光硬化性反應基可舉乙烯基、苯乙烯基、甲基丙烯醯基、丙烯醯基等。The photocurable reactive group may include a vinyl group, a styryl group, a methacryl group, an acryl group, and the like.

熱硬化性反應基可舉羥基、羧基、異氰酸酯基、亞胺基、環氧基、氧雜環丁烷基、巰基、甲氧基甲基、甲氧基乙基、乙氧基甲基、乙氧基乙基、㗁唑啉基等。Examples of the thermosetting reactive group include a hydroxyl group, a carboxyl group, an isocyanate group, an imino group, an epoxy group, an oxacyclobutane group, an oxadiazole group, a methoxymethyl group, a methoxyethyl group, an ethoxymethyl group, an ethoxyethyl group, and an oxazoline group.

將硬化性反應基導入橡膠粒子表面之方法無特別限制,可採用公知慣用之方法。例如,可在欲於內核層周圍形成外殼層時,將具有硬化性反應基之材料作為構成外殼層之材料聚合至內核層,藉此來導入;該硬化性反應基係與用以和內核層進行聚合反應之官能基不同者。The method of introducing the curing reactive group into the surface of the rubber particles is not particularly limited, and a known and conventional method can be adopted. For example, when forming an outer shell layer around the inner core layer, a material having a curing reactive group as a material constituting the outer shell layer can be polymerized into the inner core layer to introduce the curing reactive group; the curing reactive group is different from the functional group used for polymerization reaction with the inner core layer.

橡膠粒子之粒徑無特別限制,可適當設定,但以平均粒徑而言可設為例如0.001~0.5µm等。藉由令橡膠粒子之平均粒徑在上述範圍內,可獲得良好解析性。此外,於本說明書中,橡膠粒子之平均粒徑係在被摻混於硬化性樹脂組成物前之平均粒徑,且係以雷射繞射法測出之D50的值。雷射繞射法之平均粒徑(D50)測定裝置可使用MicrotracBEL股份公司製之雷射繞射散射式粒徑分布測定裝置Microtrac MT3300。The particle size of the rubber particles is not particularly limited and can be appropriately set, but the average particle size can be set to, for example, 0.001 to 0.5 µm. By setting the average particle size of the rubber particles within the above range, good resolvability can be obtained. In addition, in this specification, the average particle size of the rubber particles is the average particle size before being mixed with the curable resin composition, and is the D50 value measured by the laser diffraction method. The average particle size (D50) measuring device of the laser diffraction method can use the laser diffraction scattering particle size distribution measuring device Microtrac MT3300 manufactured by MicrotracBEL Co., Ltd.

硬化性樹脂組成物中之橡膠粒子含量無特別限制,可適宜設定,但例如相對於硬化性樹脂組成物之固體成分總質量,所述橡膠粒子含量以固體成分基準計為0.3~5質量%。藉由令橡膠粒子含量在上述範圍內,可獲得良好的耐裂痕性。The content of the rubber particles in the curable resin composition is not particularly limited and can be appropriately set, but for example, the rubber particle content is 0.3 to 5% by mass based on the solid content relative to the total mass of the solid components of the curable resin composition. By setting the rubber particle content within the above range, good crack resistance can be obtained.

(光聚合引發劑) 本發明之硬化性樹脂組成物若包含光硬化性樹脂,則硬化性樹脂組成物宜進一步包含(E)光聚合引發劑。光聚合引發劑可使用任何公知之物。並且,光聚合引發劑可單獨使用1種,亦可組合2種以上來使用。 (Photopolymerization initiator) If the curable resin composition of the present invention contains a photocurable resin, the curable resin composition preferably further contains (E) a photopolymerization initiator. Any known photopolymerization initiator can be used. Furthermore, the photopolymerization initiator can be used alone or in combination of two or more.

光聚合引發劑具體上可舉例如:雙-(2,6-二氯苯甲醯基)苯基膦氧化物、雙-(2,6-二氯苯甲醯基)-2,5-二甲基苯基膦氧化物、雙-(2,6-二氯苯甲醯基)-4-丙基苯基膦氧化物、雙-(2,6-二氯苯甲醯基)-1-萘基膦氧化物、雙-(2,6-二甲氧基苯甲醯基)苯基膦氧化物、雙-(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基戊基膦氧化物、雙-(2,6-二甲氧基苯甲醯基)-2,5-二甲基苯基膦氧化物、雙-(2,4,6-三甲基苯甲醯基)-苯基膦氧化物等雙醯基膦氧化物類;2,6-二甲氧基苯甲醯基二苯基膦氧化物、2,6-二氯苯甲醯基二苯基膦氧化物、2,4,6-三甲基苯甲醯基苯基次膦酸甲基酯、2-甲基苯甲醯基二苯基膦氧化物、三甲基乙醯基苯基異次磷酸異丙基酯、2,4,6-三甲基苯甲醯基二苯基膦氧化物等單醯基膦氧化物類;苯基(2,4,6-三甲基苯甲醯基)次膦酸乙酯、1-羥-環己基苯基酮、1-[4-(2-羥乙氧基)-苯基]-2-羥-2-甲基-1-丙-1-酮、2-羥-1-{4-[4-(2-羥-2-甲基-丙醯基)-苄基]苯基}-2-甲基-丙-1-酮、2-羥-2-甲基-1-苯基丙-1-酮等羥苯乙酮類;苯偶姻、苄基、苯偶姻甲基醚、苯偶姻乙基醚、苯偶姻正丙基醚、苯偶姻異丙基醚、苯偶姻正丁基醚等苯偶姻類;苯偶姻烷基醚類;二苯基酮、對甲基二苯基酮、米其勒酮、甲基二苯基酮、4,4'-二氯二苯基酮、4,4'-雙二乙基胺基二苯基酮等二苯基酮類;苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮、1-羥環己基苯基酮、2-甲基-1-[4-(甲硫基)苯基]-2-嗎福林基-1-丙酮、2-苄基-2-二甲胺基-1-(4-嗎福林基苯基)-丁-1-酮、2-(二甲基胺基)-2-[(4-甲基苯基)甲基)-1-[4-(4-嗎福林基)苯基]-1-丁酮、N,N-二甲基胺基苯乙酮等苯乙酮類;9-氧硫𠮿、2-乙基9-氧硫𠮿、2-異丙基9-氧硫𠮿、2,4-二甲基9-氧硫𠮿、2,4-二乙基9-氧硫𠮿、2-氯9-氧硫𠮿、2,4-二異丙基9-氧硫𠮿等9-氧硫𠮿類;蒽醌、氯蒽醌、2-甲蒽醌、2-乙蒽醌、2-三級丁蒽醌、1-氯蒽醌、2-戊蒽醌、2-胺蒽醌等蒽醌類;苯乙酮二甲基縮酮、苄基二甲基縮酮等縮酮類;乙基-4-二甲基胺基苯甲酸酯、2-(二甲基胺基)乙基苯甲酸酯、對二甲基苯甲酸乙酯等苯甲酸酯類;1,2-辛二酮,1-[4-(苯基硫基)苯基]-,2-(O-苯甲醯基肟)、乙醇,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯基肟)等肟酯類;雙(η5-2,4-環戊二烯-1-基)-雙(2,6-二氟-3-(1H-吡咯-1-基)苯基)鈦、雙(環戊二烯基)-雙[2,6-二氟-3-(2-(1-吡咯-1-基)乙基)苯基]鈦等二茂鈦類;2-二甲基胺基-2-(4-甲基-苄基)-1-(4-嗎福林基苯基)-丁烷-1-酮等烷基苯酮類;二硫化苯基2-硝基茀、丁偶姻、大茴香偶姻乙基醚、偶氮雙異丁腈、四甲基二硫化秋蘭姆等。光聚合引發劑之市售物可舉例如IGM Resins B.V.製之Omnirad TPO H(2,4,6-三甲基苯甲醯基二苯基膦氧化物)、IRGACURE OXE02(乙醇,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(o-乙醯基肟))、Omnirad 369E(2-苄基-2-(二甲基胺基)-4'-嗎福林基苯丁酮)、Omnirad 907(2-甲基-1-[4-(甲硫基)苯基]-2-嗎福林基丙-1-酮)、Omnirad 819(雙(2,4,6-三甲基苯甲醯基)-苯基膦氧化物)等。Specific examples of the photopolymerization initiator include bis-(2,6-dichlorobenzyl)phenylphosphine oxide, bis-(2,6-dichlorobenzyl)-2,5-dimethylphenylphosphine oxide, bis-(2,6-dichlorobenzyl)-4-propylphenylphosphine oxide, bis-(2,6-dichlorobenzyl)-1-naphthylphosphine oxide, bis-(2,6-dimethoxybenzyl)phenylphosphine oxide, bis-(2,6-dimethoxybenzyl)-2,4,4-trimethylpentylphosphine oxide, bis-(2,6-dimethoxybenzyl)-2,5-dimethylphenylphosphine oxide, Bis-(2,4,6-trimethylbenzyl)-phenylphosphine oxide and other bisacylphosphine oxides; 2,6-dimethoxybenzyldiphenylphosphine oxide, 2,6-dichlorobenzyldiphenylphosphine oxide, 2,4,6-trimethylbenzylphenylphosphinate methyl ester, 2-methylbenzyldiphenylphosphine oxide, trimethylacetylphenylisophosphinate isopropyl ester, 2,4,6-trimethylbenzyldiphenylphosphine oxide and other monoacylphosphine oxides; ethyl phenyl (2,4,6-trimethylbenzyl)phosphinate, 1-hydroxy-cyclohexylphenyl ketone, 1-[4-(2-hydroxyethyl)phenyl]phosphine oxide; [4-(2-hydroxy-2-methyl-propionyl)-benzyl]phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 2-hydroxy-1-{4-[4-(2-hydroxy-2-methyl-propionyl)-benzyl]phenyl}-2-methyl-propan-1-one, 2-hydroxy-2-methyl-1-phenylpropan-1-one and other hydroxyacetophenones; benzoin, benzyl, benzoin methyl ether, benzoin ethyl ether, benzoin n-propyl ether, benzoin isopropyl ether, benzoin n-butyl ether and other benzoin alkyl ethers; diphenyl ketone, p-methyl diphenyl ketone, michler's ketone, methyl diphenyl ketone, 4,4'-dichlorodiphenyl ketone, 4,4'-bis(diethylamino)phenyl ketone Diphenyl ketone and other diphenyl ketones; acetophenones such as acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, 1-hydroxycyclohexyl phenyl ketone, 2-methyl-1-[4-(methylthio)phenyl]-2-oxoformyl-1-propanone, 2-benzyl-2-dimethylamino-1-(4-oxoformylphenyl)-butan-1-one, 2-(dimethylamino)-2-[(4-methylphenyl)methyl)-1-[4-(4-oxoformyl)phenyl]-1-butanone, N,N-dimethylaminoacetophenone, etc.; 9-oxosulfuron , 2-ethyl 9-oxosulfuron , 2-isopropyl 9-oxysulfide , 2,4-dimethyl 9-oxosulfuron , 2,4-diethyl 9-oxysulfide , 2-chloro-9-oxysulfuron 、2,4-Diisopropyl 9-oxysulfide 9-Oxysulfuron anthraquinones such as anthraquinone, chloroanthraquinone, 2-methylanthraquinone, 2-ethylanthraquinone, 2-tert-butylanthraquinone, 1-chloroanthraquinone, 2-pentylanthraquinone, and 2-aminoanthraquinone; acetophenone dimethyl ketal, benzyl dimethyl ketal, and other ketones; ethyl-4-dimethylaminobenzoate, 2-(dimethylamino)ethylbenzoate, ethyl p-dimethylbenzoate, and other benzoate esters; 1,2-octanedione, 1-[4-(phenylthio)phenyl]-, 2-(O-benzoyl oxime), ethanol, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazole-3-yl]-, 1- Oxime esters such as (O-acetyl oxime); bis(η5-2,4-cyclopentadien-1-yl)-bis(2,6-difluoro-3-(1H-pyrrol-1-yl)phenyl)titanium, bis(cyclopentadienyl)-bis[2,6-difluoro-3-(2-(1-pyrrol-1-yl)ethyl)phenyl]titanium and other diocenes; alkyl phenones such as 2-dimethylamino-2-(4-methyl-benzyl)-1-(4-oxofolinylphenyl)-butane-1-one; 2-nitrofluorene disulfide phenyl 2-nitrofluorene, butyroin, anisolein ethyl ether, azobisisobutyronitrile, tetramethylthiuram disulfide, etc. Commercially available photopolymerization initiators include, for example, Omnirad TPO H (2,4,6-trimethylbenzyldiphenylphosphine oxide), IRGACURE OXE02 (ethanol, 1-[9-ethyl-6-(2-methylbenzyl)-9H-carbazol-3-yl]-, 1-(o-acetyl oxime)), Omnirad 369E (2-benzyl-2-(dimethylamino)-4'-morphofolinylbutyrophenone), Omnirad 907 (2-methyl-1-[4-(methylthio)phenyl]-2-morphofolinylpropan-1-one), and Omnirad 819 (bis(2,4,6-trimethylbenzyl)-phenylphosphine oxide) manufactured by IGM Resins BV.

亦可與上述光聚合引發劑一併使用光引發助劑或敏化劑。光引發助劑或敏化劑可舉苯偶姻化合物、蒽醌化合物、9-氧硫𠮿化合物、縮酮化合物、二苯基酮化合物、三級胺化合物及𠮿酮化合物等。特別宜使用2,4-二甲基9-氧硫𠮿、2,4-二乙基9-氧硫𠮿、2-氯9-氧硫𠮿、2-異丙基9-氧硫𠮿、4-異丙基9-氧硫𠮿等9-氧硫𠮿化合物。藉由包含9-氧硫𠮿化合物,可提升深部硬化性。該等化合物有時亦可作為光聚合引發劑使用,惟宜與光聚合引發劑一併使用。又,光引發助劑或敏化劑可單獨使用1種,亦可組合2種以上來使用。A photopolymerization aid or sensitizer may also be used together with the above-mentioned photopolymerization initiator. Examples of the photopolymerization aid or sensitizer include benzoin compounds, anthraquinone compounds, 9-oxysulfuronium, Compounds, acetal compounds, diphenyl ketone compounds, tertiary amine compounds and thiophene compounds. In particular, 2,4-dimethyl 9-oxysulfide is preferably used. , 2,4-diethyl 9-oxysulfide , 2-chloro-9-oxysulfuron , 2-isopropyl 9-oxysulfide , 4-isopropyl 9-oxysulfide 9-Oxysulfuron Compound. By containing 9-oxosulfuron Compounds can improve deep curability. These compounds can sometimes be used as photopolymerization initiators, but it is best to use them together with photopolymerization initiators. In addition, photoinitiator aids or sensitizers can be used alone or in combination of two or more.

此外,該等光聚合引發劑、光引發助劑及敏化劑會吸收特定波長,故在某些情況下有使感度變低、作為紫外線吸收劑而發揮功能之情形。然而,其等並非僅用於提升硬化性樹脂組成物之敏感度之目的。可視需求使其等吸收特定波長的光,提高表面之光反應性,使抗蝕層之線條形狀及開口改變成垂直、錐狀、倒錐狀,並且可提升線寬及開口徑之精度。In addition, these photopolymerization initiators, photoinitiator aids and sensitizers absorb specific wavelengths, so in some cases, they can reduce sensitivity and function as ultraviolet absorbers. However, they are not only used to increase the sensitivity of curable resin compositions. They can absorb light of specific wavelengths as needed to increase the light reactivity of the surface, change the line shape and opening of the anti-corrosion layer into vertical, conical, or inverted conical shapes, and improve the accuracy of line width and opening diameter.

(熱硬化觸媒) 本發明之硬化性樹脂組成物若包含熱硬化性樹脂,則硬化性樹脂組成物宜進一步包含熱硬化觸媒。熱硬化觸媒可舉例如咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰乙基-2-苯基咪唑、1-(2-氰乙基)-2-乙基-4-甲基咪唑、2-苯基-4,5-二羥基甲基咪唑等咪唑衍生物;二氰二胺、苄基二甲基胺、4-(二甲基胺基)-N,N-二甲基苄基胺、4-甲氧基-N,N-二甲基苄基胺、4-甲基-N,N-二甲基苄基胺等胺化合物、己二酸二醯肼、癸二酸二醯肼等肼化合物;三苯膦等磷化合物等。又,市售之物可舉例如:四國化成工業股份公司製之2MZ-A、2MZ-OK、2PHZ、2PHZ-PW、2P4BHZ、2P4MHZ(皆為咪唑系化合物之商品名),San-Apro Ltd.製之U-CAT 3513N(二甲基胺系化合物之商品名)、DBU、DBN、U-CAT SA 102(皆為二環式脒化合物及其鹽)等。惟不特別限於該等,若為環氧樹脂或氧雜環丁烷化合物之熱硬化觸媒、或是可促進環氧基及氧雜環丁烷基之至少任1種與羧基之反應者即可,可單獨使用或混合2種以上來使用。又,亦可使用胍胺、甲基胍胺、苯胍胺、三聚氰胺、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三𠯤、2-乙烯基-2,4-二胺基-S-三𠯤、2-乙烯基-4,6-二胺基-S-三𠯤・異三聚氰酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三𠯤・異三聚氰酸加成物等S-三𠯤衍生物,宜將該等亦能作為密著性賦予劑發揮功能之化合物與熱硬化觸媒併用。熱硬化觸媒可單獨使用1種,亦可組合2種以上來使用。熱硬化性觸媒宜使用三聚氰胺、二氰二胺(DICY),較宜組合三聚氰胺與二氰二胺來使用。 (Thermosetting catalyst) If the curable resin composition of the present invention contains a thermosetting resin, the curable resin composition preferably further contains a thermosetting catalyst. The thermosetting catalyst may include, for example, imidazole derivatives such as imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole, 2-phenyl-4,5-dihydroxymethylimidazole; amine compounds such as dicyandiamide, benzyldimethylamine, 4-(dimethylamino)-N,N-dimethylbenzylamine, 4-methoxy-N,N-dimethylbenzylamine, 4-methyl-N,N-dimethylbenzylamine; hydrazine compounds such as dihydrazide adipic acid and dihydrazide sebacic acid; phosphorus compounds such as triphenylphosphine, etc. In addition, commercially available ones include, for example, 2MZ-A, 2MZ-OK, 2PHZ, 2PHZ-PW, 2P4BHZ, 2P4MHZ (all trade names of imidazole compounds) manufactured by Shikoku Chemical Industries, Ltd., U-CAT 3513N (trade name of dimethylamine compounds), DBU, DBN, U-CAT SA 102 (all bicyclic amidine compounds and their salts) manufactured by San-Apro Ltd. However, the present invention is not particularly limited to these, and any heat-curing catalyst for epoxy resin or cyclohexane compound, or any catalyst that can promote the reaction between at least one of epoxy group and cyclohexane group and carboxyl group can be used, and it can be used alone or in combination of two or more. In addition, guanamine, methylguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloyloxyethyl-S-triacontium, 2-vinyl-2,4-diamino-S-triacontium, 2-vinyl-4,6-diamino-S-triacontium・isocyanuric acid adduct, 2,4-diamino-6-methacryloyloxyethyl-S-triacontium・isocyanuric acid adduct and other S-triacontium derivatives can also be used. It is preferable to use these compounds that can also function as adhesion imparting agents together with the thermosetting catalyst. The thermosetting catalyst can be used alone or in combination of two or more. Melamine and dicyandiamide (DICY) are preferably used as the thermosetting catalyst, and melamine and dicyandiamide are preferably used in combination.

(有機溶劑) 於本發明之硬化性樹脂組成物中,可為了其製備、或調整在塗佈於基板或膜時之黏度等目的而摻混有機溶劑。作為有機溶劑,可使用公知慣用之有機溶劑,例如甲乙酮、環己酮等酮類;甲苯、二甲苯、四甲基苯等芳香族烴類;賽璐蘇、甲賽璐蘇、丁賽璐蘇、卡必醇、甲卡必醇、丁卡必醇、丙二醇單甲基醚、二丙二醇單甲基醚、二丙二醇二乙基醚、二乙二醇單甲基醚乙酸酯、三丙二醇單甲基醚等甘醇醚類;乙酸乙酯、乙酸丁酯、乳酸丁酯、賽璐蘇乙酸酯、丁賽璐蘇乙酸酯、卡必醇乙酸酯、丁卡必醇乙酸酯、丙二醇單甲基醚乙酸酯、二丙二醇單甲基醚乙酸酯、碳酸丙烯酯等酯類;辛烷、癸烷等脂肪族烴類;石油醚、石油腦、溶劑石油腦等石油系溶劑等。有機溶劑可單獨使用1種,亦可組合2種以上來使用。 (Organic solvent) An organic solvent may be mixed into the curable resin composition of the present invention for the purpose of preparing the resin composition or adjusting the viscosity when the resin composition is applied to a substrate or a film. As the organic solvent, a well-known and commonly used organic solvent can be used, for example, ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; glycol ethers such as cellulose, methyl cellulose, butyl cellulose, carbitol, methyl carbitol, butyl carbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, diethylene glycol monomethyl ether acetate, and tripropylene glycol monomethyl ether; esters such as ethyl acetate, butyl acetate, butyl lactate, cellulose acetate, butyl cellulose acetate, carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, dipropylene glycol monomethyl ether acetate, and propylene carbonate; aliphatic hydrocarbons such as octane and decane; petroleum-based solvents such as petroleum ether, petroleum naphtha, and solvent naphtha, etc. Organic solvents may be used alone or in combination of two or more.

硬化性樹脂組成物中之有機溶劑的摻混量無特別限定,可因應構成硬化性樹脂組成物之成分及其量來適當變更。The amount of the organic solvent blended in the curable resin composition is not particularly limited and can be appropriately changed according to the components and amounts constituting the curable resin composition.

於本發明中,有機溶劑之揮發乾燥可使用熱風循環式乾燥爐、IR爐、加熱板、對流烘箱等(使用具備有利用蒸氣之空氣加熱方式的熱源之物並使乾燥機內之熱風對流接觸之方法、及藉由噴嘴對支持體吹送之方式)來進行。In the present invention, the volatile drying of the organic solvent can be performed using a hot air circulation drying furnace, an IR furnace, a heating plate, a convection oven, etc. (using a heat source having an air heating method using steam and making the hot air in the dryer contact by convection, and a method of blowing to the support through a nozzle).

(其他添加成分) 於本發明硬化性樹脂組成物中,可視需求進一步摻混下述諸等成分:著色劑、光引發助劑、氰酸酯化合物、彈性體、巰基化合物、胺甲酸酯化觸媒、觸變化劑、密著促進劑、嵌段共聚物、鏈轉移劑、聚合抑制劑、銅腐蝕抑制劑、抗氧化劑、防鏽劑、有機膨土、蒙脫石等增稠劑、聚矽氧系、氟系、高分子系等之消泡劑及調平劑中之至少任1種、咪唑系、噻唑系、三唑系等之矽烷耦合劑、膦酸鹽、磷酸酯衍生物、膦氮烯化合物等磷化合物等之阻燃劑。該等可使用在電子材料領域中公知之物。 (Other additives) The following ingredients may be further blended into the curable resin composition of the present invention as required: coloring agent, photoinitiator, cyanate compound, elastomer, sulfonyl compound, urethane catalyst, catalytic agent, adhesion promoter, block copolymer, chain transfer agent, polymerization inhibitor, copper corrosion inhibitor, antioxidant, rust inhibitor, thickener such as organic bentonite and montmorillonite, at least one of polysilicone, fluorine, polymer defoamer and leveling agent, imidazole, thiazole, triazole and other silane coupling agents, phosphonate, phosphate derivatives, phosphorus compounds such as phosphazene compounds and flame retardants. These may use what is known in the field of electronic materials.

本發明硬化性樹脂組成物可以液態形式使用,亦可進行後述之乾膜化後使用。又,在以液態形式使用時,可為單液性亦可為雙液性以上。The curable resin composition of the present invention can be used in a liquid form or after being dried as described below. When used in a liquid form, it can be a single liquid or a two-liquid or more liquid form.

[乾膜] 本發明硬化性樹脂組成物亦可做成乾膜之形態,該乾膜具備第一膜與樹脂層,該樹脂層形成於該第一膜上且由硬化性樹脂組成物所構成。本發明中之第一膜係指在以基板等基材與於乾膜上所形成之由硬化性樹脂組成物所構成的層(樹脂層)側相接之方式藉由加熱等進行層合而一體成形時,至少接著於樹脂層者。第一膜亦可在層合後之步驟中從樹脂層剝離。特別是於本發明中,宜在曝光後之步驟中將其從樹脂層剝離。在乾膜化時,可用上述有機溶劑來稀釋本發明硬化性樹脂組成物而調整至適當黏度,並藉由缺角輪塗佈機、刮刀塗佈機、唇塗佈機、桿塗機、擠壓塗佈機、反向塗佈機、轉移輥塗佈機、凹版塗佈機、噴塗機等於第一膜上塗佈成均一厚度,且通常在50~130℃之溫度下進行乾燥1~30分鐘而獲得膜。塗佈膜厚無特別限制,以乾燥後之膜厚計,一般可在1~150µm之範圍內適當選擇,且宜在5~60µm之範圍內適當選擇。 [Dry film] The curable resin composition of the present invention can also be made into a dry film form, and the dry film has a first film and a resin layer, and the resin layer is formed on the first film and is composed of the curable resin composition. The first film in the present invention refers to at least the film that is in contact with the resin layer when the substrate such as a substrate and the layer (resin layer) composed of the curable resin composition formed on the dry film are laminated and formed as a whole by heating or the like. The first film can also be peeled off from the resin layer in the step after lamination. In particular, in the present invention, it is preferable to peel it off from the resin layer in the step after exposure. During the drying process, the curable resin composition of the present invention can be diluted with the above-mentioned organic solvent to adjust to an appropriate viscosity, and then coated on the first film to a uniform thickness by a notch wheel coater, a scraper coater, a lip coater, a rod coater, an extrusion coater, a reverse coater, a transfer roll coater, a gravure coater, a spray coater, etc., and usually dried at a temperature of 50-130°C for 1-30 minutes to obtain a film. There is no particular restriction on the coating film thickness. It can generally be appropriately selected within the range of 1-150µm, and preferably within the range of 5-60µm, based on the film thickness after drying.

作為第一膜,若為公知之物便可使用而無特別限制,例如可適宜使用聚對苯二甲酸乙二酯或聚萘二甲酸乙二酯等之聚酯膜、聚醯亞胺膜、聚醯胺醯亞胺膜、聚丙烯膜、聚苯乙烯膜等由熱塑性樹脂所構成之膜。在該等當中,從耐熱性、機械強度及處置性等觀點來看,又以聚酯膜為宜。又,亦可將該等膜之積層體作為第一膜使用。As the first film, any known material can be used without particular limitation. For example, films made of thermoplastic resins such as polyester films such as polyethylene terephthalate and polyethylene naphthalate, polyimide films, polyamide imide films, polypropylene films, and polystyrene films can be suitably used. Among these, polyester films are preferred from the viewpoints of heat resistance, mechanical strength, and handling properties. In addition, a laminate of these films can also be used as the first film.

另外,從提升機械強度之觀點來看,上述之熱塑性樹脂膜宜為沿單軸方向或雙軸方向延伸後之膜。In addition, from the viewpoint of improving mechanical strength, the above-mentioned thermoplastic resin film is preferably a film stretched along a uniaxial direction or a biaxial direction.

第一膜之厚度無特別限制,但可設為例如5µm~150µm。The thickness of the first film is not particularly limited, but can be set to, for example, 5µm to 150µm.

於第一膜上形成了本發明硬化性樹脂組成物之樹脂層後,為了防止灰塵附著於樹脂層表面等,宜進一步於樹脂層表面積層可剝離之第二膜。第二膜係指在以基板等基材與於乾膜上所形成之由硬化性樹脂組成物所構成的層(樹脂層)側相接之方式進行層合而一體成形時,會在層合前被從樹脂層剝離者。作為可剝離之第二膜,可使用例如聚乙烯膜、聚四氟乙烯膜、聚丙烯膜、經表面處理之紙等。第二膜若為樹脂層與第二膜之接著力小於在剝離該第二膜時之樹脂層與第一膜之接著力者即可。After forming a resin layer of the curable resin composition of the present invention on the first film, a peelable second film is preferably further deposited on the surface of the resin layer in order to prevent dust from adhering to the surface of the resin layer. The second film refers to a film that is peeled off from the resin layer before lamination when a substrate such as a substrate is laminated and formed integrally with a layer (resin layer) composed of a curable resin composition formed on a dry film. As the peelable second film, for example, a polyethylene film, a polytetrafluoroethylene film, a polypropylene film, a surface-treated paper, etc. can be used. The second film can be used as long as the adhesion between the resin layer and the second film is smaller than the adhesion between the resin layer and the first film when the second film is peeled off.

第二膜之厚度無特別限定,但可設為例如5µm~150µm。The thickness of the second film is not particularly limited, but can be set to, for example, 5 μm to 150 μm.

此外,乾膜亦可為於上述第二膜上塗佈本發明硬化性樹脂組成物並使其乾燥,藉此形成樹脂層,然後於該樹脂層表面積層第一膜而成者。亦即,於本發明中,在製造乾膜時可使用第一膜及第二膜中之任一者作為供塗佈本發明硬化性樹脂組成物之膜。In addition, the dry film may be formed by coating the curable resin composition of the present invention on the second film and drying it to form a resin layer, and then laminating the first film on the surface of the resin layer. That is, in the present invention, when manufacturing the dry film, either the first film or the second film may be used as the film on which the curable resin composition of the present invention is coated.

(硬化物) 本發明硬化物係將上述之本發明硬化性樹脂組成物或乾膜之樹脂層硬化而得者,所述硬化物特別具有阻焊層所要求之高介電性與良好解析性。 (Hardened product) The cured product of the present invention is obtained by curing the above-mentioned curable resin composition of the present invention or the resin layer of the dry film. The cured product particularly has high dielectric properties and good resolution required for the solder resist layer.

(印刷配線板) 本發明印刷配線板具有由本發明硬化性樹脂組成物或乾膜之樹脂層所得之硬化物。作為本發明印刷配線板之製造方法,譬如係使用上述有機溶劑將本發明硬化性樹脂組成物調整至適合塗佈方法之黏度後,以浸塗法、流動施膜法、輥塗法、棒塗法、網版印刷法、簾塗法等方法塗佈於基材上,之後在60~100℃之溫度下使組成物中所含之有機溶劑揮發乾燥(暫時乾燥),藉此形成無黏性之樹脂層。又,為乾膜時,係以樹脂層與基材接觸之方式藉由層合等使其貼合於基材上,之後剝除第一膜,藉此於基材上形成樹脂層。 (Printed wiring board) The printed wiring board of the present invention has a cured product obtained from the curable resin composition of the present invention or a resin layer of a dry film. As a manufacturing method of the printed wiring board of the present invention, for example, the curable resin composition of the present invention is adjusted to a viscosity suitable for the coating method using the above-mentioned organic solvent, and then coated on the substrate by a dip coating method, a flow coating method, a roller coating method, a rod coating method, a screen printing method, a curtain coating method, etc., and then the organic solvent contained in the composition is volatilized and dried (temporarily dried) at a temperature of 60~100℃, thereby forming a non-sticky resin layer. In addition, when it is a dry film, the resin layer is attached to the substrate by lamination or the like in such a way that the resin layer contacts the substrate, and then the first film is peeled off to form a resin layer on the substrate.

印刷配線板之基材可舉事先藉由銅等形成有電路之印刷配線板或撓性印刷配線板以外,還可舉使用採用了酚醛紙、環氧紙、環氧玻璃布、聚醯亞胺玻璃、環氧玻璃布/不織布、環氧玻璃布/紙、環氧合成纖維、氟樹脂・聚乙烯・聚苯醚、聚氧化苯・氰酸酯等之高頻電路用覆銅積層板等之材質者且所有等級(FR-4等)的覆銅積層板,其他還有金屬基板、聚醯亞胺膜、聚對苯二甲酸乙二酯膜、聚萘二甲酸乙二酯(PEN)膜、玻璃基板、陶瓷基板、晶圓板等。The substrate of the printed wiring board can be a printed wiring board or a flexible printed wiring board with a circuit formed in advance by copper or the like, and can also be a copper-clad laminate of all grades (FR-4, etc.) using materials such as phenolic paper, epoxy paper, epoxy glass cloth, polyimide glass, epoxy glass cloth/non-woven fabric, epoxy glass cloth/paper, epoxy synthetic fiber, fluorine resin, polyethylene, polyphenylene ether, polyoxyphenylene, cyanate, etc., and copper-clad laminates for high-frequency circuits, etc., and other materials include metal substrates, polyimide films, polyethylene terephthalate films, polyethylene naphthalate (PEN) films, glass substrates, ceramic substrates, wafer boards, etc.

宜使用真空層合機等,在加壓及加熱下將乾膜貼合於基材上。在使用藉由使用所述真空層合機來形成電路後之基板時,即便電路基板表面有凹凸,乾膜仍會密著於電路基板,因此不會有氣泡混入,且基板表面之凹部的填孔性也會提升。加壓條件宜為0.1~2.0MPa左右,另外,加熱條件宜為40~120℃。It is preferable to use a vacuum laminator or the like to laminate the dry film onto the substrate under pressure and heating. When using a substrate after forming a circuit using the vacuum laminator, even if the circuit substrate surface has bumps and depressions, the dry film will still adhere to the circuit substrate, so that no air bubbles will be mixed in, and the filling property of the concave part of the substrate surface will also be improved. The pressure condition is preferably about 0.1~2.0MPa, and the heating condition is preferably 40~120℃.

在塗佈本發明硬化性樹脂組成物後進行之揮發乾燥,可使用熱風循環式乾燥爐、IR爐、加熱板、對流烘箱等(使用具備有利用蒸氣之空氣加熱方式的熱源之物並使乾燥機內之熱風對流接觸之方法、及藉由噴嘴對支持體吹送之方式)來進行。The volatile drying after coating the curable resin composition of the present invention can be performed using a hot air circulation drying furnace, an IR furnace, a heating plate, a convection oven, etc. (a method of using a heat source having an air heating method using steam and making the hot air in the dryer contact by convection, and a method of blowing the support through a nozzle).

於基材上形成樹脂層後,透過形成有預定圖案之光罩藉由活性能量線選擇性地進行曝光,再以稀鹼性水溶液(譬如0.3~3質量%碳酸鈉水溶液)將未曝光部顯影而形成硬化物之圖案。為乾膜時,係於曝光後從乾膜剝離第一膜並進行顯影,藉此於基材上形成經圖案化之硬化物。此外,若是在不損及特性之範圍內,則亦可於曝光前從乾膜剝離第一膜,然後再將露出之樹脂層進行曝光及顯影。進一步在對硬化物照射活性能量線後使其加熱硬化(例如100~220℃)或在加熱硬化後照射活性能量線、或是僅以加熱硬化進行最終精硬化(正式硬化),藉此形成密著性、硬度等各特性皆優異之硬化膜。於一實施形態中,可藉由上述曝光及顯影來形成基板上之導電體的露出部(圓形開口部)。開口部之直徑無特別限定,但可設為例如30~120µm。After forming a resin layer on a substrate, it is selectively exposed by active energy rays through a photomask formed with a predetermined pattern, and then the unexposed portion is developed with a dilute alkaline aqueous solution (e.g., 0.3~3 mass% sodium carbonate aqueous solution) to form a pattern of the cured product. In the case of a dry film, the first film is peeled off from the dry film after exposure and developed, thereby forming a patterned cured product on the substrate. In addition, if it is within the range that does not damage the properties, the first film can also be peeled off from the dry film before exposure, and then the exposed resin layer can be exposed and developed. Further, after irradiating the cured product with active energy rays, it is heat-cured (e.g., 100~220°C), or after heat-curing, it is irradiated with active energy rays, or only heat-cured for final fine curing (formal curing), thereby forming a cured film with excellent properties such as adhesion and hardness. In one embodiment, the above exposure and development can be used to form an exposed portion (circular opening) of the conductor on the substrate. The diameter of the opening is not particularly limited, but can be set to, for example, 30 to 120 μm.

活性能量線照射所用之曝光機若為裝載高壓水銀燈燈具、超高壓水銀燈燈具、金屬鹵素燈、水銀短弧燈等且在350~450nm之範圍內照射紫外線之裝置即可,並且亦可使用直接描繪裝置(譬如根據來自電腦之CAD資料直接以雷射描繪影像的雷射直接成像裝置)。直描機之燈具光源或雷射光源可為最大波長在350~450nm之範圍內者。用以形成影像之曝光量會依膜厚等而異,一般可設為在10~1000mJ/cm 2之範圍內,宜設為在20~800mJ/cm 2之範圍內。 The exposure machine used for active energy ray irradiation can be a device that irradiates ultraviolet rays in the range of 350~450nm, equipped with high-pressure mercury lamps, ultra-high-pressure mercury lamps, metal halogen lamps, mercury short arc lamps, etc., and can also use direct drawing devices (such as laser direct imaging devices that directly draw images with lasers based on CAD data from computers). The lamp light source or laser light source of the direct drawing machine can be one with a maximum wavelength in the range of 350~450nm. The exposure amount used to form an image will vary depending on the film thickness, etc., and can generally be set in the range of 10~1000mJ/ cm2 , preferably in the range of 20~800mJ/ cm2 .

顯影方法可利用浸漬法、噴淋法、噴塗法、刷塗法等,顯影液可採用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、胺類等鹼性水溶液。The developing method can utilize immersion method, spray method, spray coating method, brush coating method, etc., and the developer can adopt alkaline aqueous solution such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amine, etc.

於本發明硬化性樹脂組成物之硬化時,可視需求在上述藉由活性能量線照射所行之曝光及顯影後,照射紫外線來促進進一步的硬化(後UV),亦可進行加熱以促進熱硬化(後硬化)。藉由進行後UV、後硬化,可進一步提升硬化性樹脂組成物之硬化物的耐熱性、耐藥品性、抗吸濕性、密著性、電特性等各特性。後UV譬如可藉由使用UV輸送帶等,按1000mJ/cm 2之累積曝光量照射UV來進行。另外,後硬化例如可藉由使用上述之各種乾燥機在150℃下加熱60分鐘來進行。 When curing the curable resin composition of the present invention, after the exposure and development by the active energy ray irradiation, ultraviolet rays can be irradiated to promote further curing (post-UV), or heating can be performed to promote thermal curing (post-curing). By performing post-UV and post-curing, the heat resistance, chemical resistance, moisture absorption resistance, adhesion, electrical properties and other properties of the cured product of the curable resin composition can be further improved. Post-UV can be performed by irradiating UV at a cumulative exposure of 1000mJ/ cm2 using a UV conveyor belt, etc. In addition, post-curing can be performed by heating at 150°C for 60 minutes using the above-mentioned various dryers, for example.

本發明硬化性樹脂組成物或乾膜適合用於製造印刷配線板等電子零件。具體上,其等可用來形成電子零件中之硬化被膜(永久被膜),且適合用來形成阻焊膜、層間絕緣層、覆蓋層等永久絕緣被膜。更具體而言,本發明硬化性樹脂組成物或乾膜適合用於要求高度可靠性之印刷配線板、譬如半導體封裝用基板,特別適合用於FC-BGA基板。The curable resin composition or dry film of the present invention is suitable for use in manufacturing electronic components such as printed wiring boards. Specifically, it can be used to form a curing film (permanent film) in electronic components, and is suitable for forming permanent insulating films such as solder resist films, interlayer insulating layers, and cover layers. More specifically, the curable resin composition or dry film of the present invention is suitable for use in printed wiring boards that require high reliability, such as semiconductor packaging substrates, and is particularly suitable for use in FC-BGA substrates.

實施例 以下,列舉實施例來進一步詳細說明本發明,惟本發明不受該等實施例所限。此外,於實施例中,「份」及「%」之記載只要未特別說明則皆為質量基準。 Examples The following examples are given to further illustrate the present invention, but the present invention is not limited to the examples. In addition, in the examples, the "parts" and "%" are all based on quality unless otherwise specified.

[製備硬化性樹脂組成物] (光硬化性樹脂之合成例) 於製備硬化性樹脂組成物前,按下述所示之程序製備出本實施例所用之光硬化性樹脂。 首先,於具備冷卻管及攪拌機之燒瓶中,饋入雙酚A 456份、水228份及37%福馬林649份,並維持40℃以下之溫度,且添加25%氫氧化鈉水溶液228份,在結束添加後使其等在50℃下進行反應10小時。於反應結束後冷卻至40℃,一邊維持在40℃以下一邊添加37.5%磷酸水溶液來中和至pH4,然後靜置而分離出水層。於分離水層後,添加甲基異丁基酮300份並使其均勻溶解,接著用蒸餾水500份洗淨3次,並在50℃以下之溫度下進行減壓,去除水、溶劑等而獲得聚羥甲基化合物。將所得之聚羥甲基化合物溶解於甲醇550份中,而獲得聚羥甲基化合物之甲醇溶液1230份。將一部分所得之聚羥甲基化合物的甲醇溶液在真空乾燥機中於在室溫下乾燥後,結果固體成分為55.2%。接著,饋入所得之聚羥甲基化合物的甲醇溶液500份、2,6-二甲苯酚440份,並在50℃下均勻溶解。於均勻溶解後,在50℃以下之溫度下於減壓下去除了甲醇。之後添加草酸8份,在100℃下進行反應10小時。於反應結束後,在180℃下且在50mmHg之減壓下去除餾出份,而獲得酚醛清漆樹脂A 550份。 [Preparation of curable resin composition] (Synthesis example of photocurable resin) Before preparing the curable resin composition, the photocurable resin used in this embodiment is prepared according to the procedure shown below. First, 456 parts of bisphenol A, 228 parts of water and 649 parts of 37% formalin are added to a flask equipped with a cooling tube and a stirrer, and the temperature is maintained below 40°C, and 228 parts of a 25% sodium hydroxide aqueous solution are added. After the addition is completed, the mixture is reacted at 50°C for 10 hours. After the reaction is completed, the mixture is cooled to 40°C, and a 37.5% phosphoric acid aqueous solution is added while the temperature is maintained below 40°C to neutralize to pH 4, and then the mixture is left to stand to separate the water layer. After separating the aqueous layer, 300 parts of methyl isobutyl ketone were added and uniformly dissolved, and then washed with 500 parts of distilled water three times, and the pressure was reduced at a temperature below 50°C to remove water, solvents, etc. to obtain a polyhydroxymethyl compound. The obtained polyhydroxymethyl compound was dissolved in 550 parts of methanol to obtain 1230 parts of a methanol solution of a polyhydroxymethyl compound. A portion of the obtained methanol solution of a polyhydroxymethyl compound was dried in a vacuum dryer at room temperature, and the solid content was 55.2%. Then, 500 parts of the obtained methanol solution of a polyhydroxymethyl compound and 440 parts of 2,6-xylenol were added and uniformly dissolved at 50°C. After uniform dissolution, methanol was removed under reduced pressure at a temperature below 50°C. Then, 8 parts of oxalic acid were added and the reaction was carried out at 100°C for 10 hours. After the reaction was completed, the distilled part was removed at 180°C and under a reduced pressure of 50 mmHg to obtain 550 parts of phenolic varnish resin A.

接著,於具備溫度計、氮導入裝置兼環氧烷導入裝置及攪拌裝置之高壓釜中,饋入上述程序所得之酚醛清漆樹脂A 130份、50%氫氧化鈉水溶液2.6份、甲苯/甲基異丁基酮(質量比=2/1)100份,一邊攪拌一邊將系統內進行氮置換,接著進行加熱升溫,並在150℃下按8kg/cm 2慢慢導入氧化乙烯45份使其進行反應。花費約4小時持續進行反應直到表壓達0.0kg/cm 2,之後冷卻至室溫。於所得之反應溶液中添加36%鹽酸水溶液3.3份並混合,而將氫氧化鈉中和。以甲苯稀釋所得之中和反應產物並進行3次水洗,然後使用蒸餾器進行去溶劑而獲得羥值為175g/eq.之酚醛清漆樹脂A的氧化乙烯加成物。酚醛清漆樹脂A之氧化乙烯加成物係酚性羥基每1當量加成有平均1莫耳之氧化乙烯者。 Next, 130 parts of the phenolic varnish resin A obtained in the above procedure, 2.6 parts of a 50% sodium hydroxide aqueous solution, and 100 parts of toluene/methyl isobutyl ketone (mass ratio = 2/1) were fed into an autoclave equipped with a thermometer, a nitrogen introduction device and an oxirane introduction device, and a stirring device. The system was replaced with nitrogen while stirring, and then the temperature was raised, and 45 parts of ethylene oxide was slowly introduced at 150°C at 8kg/ cm2 to react. The reaction lasted for about 4 hours until the gauge pressure reached 0.0kg/ cm2 , and then cooled to room temperature. 3.3 parts of a 36% hydrochloric acid aqueous solution were added to the obtained reaction solution and mixed to neutralize the sodium hydroxide. The neutralization reaction product was diluted with toluene and washed with water three times, and then the solvent was removed using a distiller to obtain an ethylene oxide adduct of novolac resin A having a hydroxyl value of 175 g/eq. The ethylene oxide adduct of novolac resin A has an average of 1 mol of ethylene oxide added per 1 equivalent of phenolic hydroxyl group.

接著,於具備攪拌機、溫度計及空氣吹入管之反應器中,饋入所得之酚醛清漆樹脂A之氧化乙烯加成物175份、丙烯酸50份、對甲苯磺酸3.0份、氫醌單甲基醚0.1份及甲苯130份,一邊吹入空氣一邊攪拌,並且升溫至115℃使其等進行反應,然後一邊將反應所生成之水當作與甲苯之共沸混合物餾去,一邊進一步使其進行反應4小時,之後冷卻至室溫。使用5%NaCl水溶液將所得之反應溶液進行水洗,並在藉由減壓餾去去除甲苯後,添加二乙二醇單乙基醚乙酸酯,而獲得固體成分68%之丙烯酸酯樹脂溶液。Next, 175 parts of the obtained ethylene oxide adduct of the novolac resin A, 50 parts of acrylic acid, 3.0 parts of p-toluenesulfonic acid, 0.1 parts of hydroquinone monomethyl ether and 130 parts of toluene were fed into a reactor equipped with a stirrer, a thermometer and an air blowing tube, and stirred while blowing air, and the temperature was raised to 115°C to react, and then the water generated by the reaction was distilled off as an azeotropic mixture with toluene, and the reaction was further carried out for 4 hours, and then cooled to room temperature. The obtained reaction solution was washed with a 5% NaCl aqueous solution, and after toluene was removed by distillation under reduced pressure, diethylene glycol monoethyl ether acetate was added to obtain an acrylic resin solution with a solid content of 68%.

接著,於具備攪拌器及回流冷卻器之四口燒瓶中,饋入所得之丙烯酸酯樹脂溶液312份、氫醌單甲基醚0.1份及三苯膦0.3份,並將混合物加熱至110℃,然後添加四氫酞酸酐45份,使其進行反應4小時,於冷卻後,獲得固體成分70%且固體成分酸值65mgKOH/g之光硬化性樹脂(含羧基樹脂)之溶液。Next, 312 parts of the obtained acrylic resin solution, 0.1 parts of hydroquinone monomethyl ether and 0.3 parts of triphenylphosphine were added to a four-necked flask equipped with a stirrer and a reflux cooler, and the mixture was heated to 110°C, and then 45 parts of tetrahydrophthalic anhydride were added and reacted for 4 hours. After cooling, a solution of a photocurable resin (containing a carboxyl resin) having a solid content of 70% and a solid acid value of 65 mgKOH/g was obtained.

(經表面處理之鋇化合物的合成例) 於製備硬化性樹脂組成物前,按下述所示之程序製備出本實施例所用之經表面處理之鋇化合物。 首先,混合攪拌堺化學工業股份公司製之硫酸鋇B-30(平均粒徑0.3µm)700g及作為溶劑之二乙二醇單乙基醚乙酸酯(卡必醇乙酸酯)295g及濕潤分散劑5g,並使用珠磨機進行分散處理直到平均粒徑成為0.3µm。於分散處理後,用3µm之過濾器過濾所得之分散物,去除異物或粗大粒子,而獲得平均粒徑0.3µm之硫酸鋇漿料。所得之硫酸鋇漿料的固體成分為70質量%。 (Synthesis example of surface-treated barium compound) Before preparing the curable resin composition, the surface-treated barium compound used in this example was prepared according to the procedure shown below. First, 700 g of barium sulfate B-30 (average particle size 0.3 µm) manufactured by Sakai Chemical Industry Co., Ltd., 295 g of diethylene glycol monoethyl ether acetate (carbitol acetate) as a solvent, and 5 g of a wetting dispersant were mixed and stirred, and a bead mill was used to perform a dispersion treatment until the average particle size became 0.3 µm. After the dispersion treatment, the obtained dispersion was filtered with a 3 µm filter to remove foreign matter or coarse particles, and a barium sulfate slurry with an average particle size of 0.3 µm was obtained. The solid content of the obtained barium sulfate slurry was 70% by mass.

(經表面處理之二氧化矽的合成例) 於製備硬化性樹脂組成物前,按下述所示之程序製備出本實施例所用之經表面處理之二氧化矽。 混合攪拌股份公司Admatechs公司製之球狀二氧化矽SO-C2 700g及作為溶劑之丙二醇單甲基醚乙酸酯(PMA)300g,並使用珠磨機進行分散處理直到平均粒徑成為0.7µm。於分散處理後,用3µm之過濾器過濾所得之分散物,去除異物或粗大粒子,而獲得平均粒徑0.7µm之二氧化矽漿料。所得之二氧化矽漿料的固體成分為70質量%。接著,以使相對於所得之二氧化矽漿料成為4質量%之方式添加信越化學工業股份公司製之具有甲基丙烯醯基的矽烷耦合劑KBM-503,並以珠磨機進行分散處理10分鐘,而獲得經甲基丙烯醯基矽烷進行表面處理之球狀二氧化矽漿料。所得之球狀二氧化矽漿料的固體成分為70質量%。 (Synthesis example of surface-treated silica) Before preparing the curable resin composition, the surface-treated silica used in this example was prepared according to the procedure shown below. 700 g of spherical silica SO-C2 manufactured by Admatechs Co., Ltd. and 300 g of propylene glycol monomethyl ether acetate (PMA) as a solvent were mixed and stirred, and dispersed using a bead mill until the average particle size became 0.7 µm. After the dispersion treatment, the obtained dispersion was filtered with a 3 µm filter to remove foreign matter or coarse particles, and a silica slurry with an average particle size of 0.7 µm was obtained. The solid content of the obtained silica slurry was 70% by mass. Then, methacrylic silane coupling agent KBM-503 manufactured by Shin-Etsu Chemical Co., Ltd. was added to the obtained silica slurry in an amount of 4% by mass, and the mixture was dispersed in a bead mill for 10 minutes to obtain spherical silica slurry surface-treated with methacrylic silane. The solid content of the obtained spherical silica slurry was 70% by mass.

將下述表1所示之各成分按同表所示之量(固體成分量)進行混合,並以攪拌機進行預混合,之後使用三輥輥磨機捏合而製備出實施例1~7及比較例1~5之各硬化性樹脂組成物。此外,表1中各成分之詳細內容如下。 (A-1)光硬化性樹脂:上述光硬化性樹脂之合成例所得之含羧基樹脂 (A-2)熱硬化性樹脂:Mitsubishi Chemical Co.製之jER(註冊商標)834 (B)經表面處理之鋇化合物:藉由上述經表面處理之鋇化合物的合成例所得之經表面處理之硫酸鋇漿料 (C)經表面處理之二氧化矽:藉由上述經表面處理之二氧化矽的合成例所得之經表面處理之球狀二氧化矽漿料 (D)橡膠粒子:Mitsubishi Chemical Co.製之丁二烯系橡膠Metablen(註冊商標)C-223A (E)光聚合引發劑:2,4,6-三甲基苯甲醯基二苯基膦氧化物 光聚合性單體:丙烯酸酯單體(DPHA:二新戊四醇六丙烯酸酯) 熱硬化觸媒1:三聚氰胺 熱硬化觸媒2:二氰二胺 [表1] The components shown in Table 1 below were mixed in the amounts (solid content) shown in the same table, pre-mixed with a stirrer, and then kneaded with a three-roll mill to prepare the curable resin compositions of Examples 1 to 7 and Comparative Examples 1 to 5. In addition, the details of the components in Table 1 are as follows. (A-1) Photocurable resin: carboxyl resin obtained in the above-mentioned synthesis example of photocurable resin (A-2) Thermocurable resin: jER (registered trademark) 834 manufactured by Mitsubishi Chemical Co. (B) Surface-treated barium compound: Surface-treated barium sulfate slurry obtained in the above-mentioned synthesis example of surface-treated barium compound (C) Surface-treated silica: Surface-treated spherical silica slurry obtained in the above-mentioned synthesis example of surface-treated silica (D) Rubber particles: Butadiene rubber Metablen (registered trademark) C-223A manufactured by Mitsubishi Chemical Co. (E) Photopolymerization initiator: 2,4,6-trimethylbenzyldiphenylphosphine oxide Photopolymerizable monomer: Acrylate monomer (DPHA: dipentatriol hexaacrylate) Thermosetting catalyst 1: Melamine Thermosetting catalyst 2: Dicyandiamide [Table 1]

[製備積層結構體] 使用按上述程序所得之各硬化性樹脂組成物,按下述所示之程序製備出對應各硬化性樹脂組成物之積層結構體(乾膜)。 首先,使用棒塗機,並用甲乙酮來適當稀釋各硬化性樹脂組成物,之後利用灑佈器以使乾燥後之膜厚成為18µm之方式塗佈於TORAY股份公司製之PET膜FB-50(厚度16µm),並在80℃下使其乾燥10分鐘,而獲得對應各硬化性樹脂組成物之乾膜。 [Preparation of laminated structures] Using each hardening resin composition obtained by the above procedure, a laminated structure (dry film) corresponding to each hardening resin composition was prepared by the procedure shown below. First, each hardening resin composition was appropriately diluted with methyl ethyl ketone using a bar coater, and then applied to PET film FB-50 (thickness 16µm) manufactured by TORAY Co., Ltd. using a sprinkler so that the film thickness after drying became 18µm, and dried at 80°C for 10 minutes to obtain a dry film corresponding to each hardening resin composition.

[解析性之評估] 使用Nikko-Materials Co., Ltd.製之真空層合機CVP-300,在溫度80℃、真空壓力3hPa下,以0.4MPa之加壓力在80℃下將按上述程序製作出之各乾膜對於基板加熱層合1分鐘,該基板係使用MEC Co.,Ltd.製之MECetchBOND CZ-8101進行化學研磨而形成有銅電路者;然後再於溫度70℃下,以0.5MPa之加壓力進行平板壓製,而獲得具有未曝光之各硬化性樹脂組成物之層(乾膜)的基板。使用φ50µm之光罩,且使用裝載高壓水銀燈(短弧燈)之曝光裝置,按基準曝光量將所得之各基板進行曝光,之後從乾膜剝離PET膜。接著,在30℃且噴壓2kg/cm 2之條件下,使用1質量% Na 2CO 3水溶液進行顯影60秒而獲得各試樣基板,且所述各試樣基板具有形成有微細孔圖案之硬化物。使用UV輸送帶爐對所得之各試樣基板照射累積曝光量1000mJ/cm 2之紫外線,之後在150℃下加熱60分鐘而使各試樣基板上之硬化物正式硬化。 [Analytical evaluation] Using a vacuum laminator CVP-300 manufactured by Nikko-Materials Co., Ltd., the dry films prepared according to the above procedure were heat-laminated on a substrate having a copper circuit formed thereon by chemical polishing using MECetchBOND CZ-8101 manufactured by MEC Co., Ltd. at a temperature of 80°C and a vacuum pressure of 3 hPa at a pressure of 0.4 MPa for 1 minute. Then, flat-plate pressing was performed at a temperature of 70°C at a pressure of 0.5 MPa to obtain a substrate having a layer (dry film) of each unexposed curable resin composition. Using a φ50µm mask and an exposure device equipped with a high-pressure mercury lamp (short arc lamp), the obtained substrates were exposed at a standard exposure amount, and then the PET film was peeled off from the dry film. Then, at 30°C and a spray pressure of 2kg/ cm2 , a 1 mass% Na2CO3 aqueous solution was used for development for 60 seconds to obtain each sample substrate, and each sample substrate had a cured product with a microporous pattern formed. Using a UV conveyor furnace, each obtained sample substrate was irradiated with ultraviolet light with a cumulative exposure of 1000mJ/ cm2 , and then heated at 150°C for 60 minutes to formally cure the cured product on each sample substrate.

在對於按上述之程序製作出之各試樣基板進行Pt濺鍍處理後,使用掃描電子顯微鏡(SEM)測定各試樣基板上之微細孔其底部之直徑,並按下述之評估基準評估解析性。結果列示於表1。 ◎:底部之直徑為25µm以上且小於50µm。 ○:底部之直徑為20µm以上且小於25µm。 △:底部之直徑為15µm以上且小於20µm。 ×:底部之直徑小於15µm。 After the Pt sputtering treatment was performed on each sample substrate produced according to the above procedure, the diameter of the bottom of the micropores on each sample substrate was measured using a scanning electron microscope (SEM), and the analytical properties were evaluated according to the following evaluation criteria. The results are shown in Table 1. ◎: The bottom diameter is greater than 25µm and less than 50µm. ○: The bottom diameter is greater than 20µm and less than 25µm. △: The bottom diameter is greater than 15µm and less than 20µm. ×: The bottom diameter is less than 15µm.

[耐裂痕性之評估] 除了將φ50µm之微細孔圖案取代為Si晶片之安裝圖案以外,以與上述解析性之評估所用的評估基板相同的製作程序,獲得了具有Si晶片之安裝圖案之硬化物的基板。接著,進行Au鍍敷處理,形成焊料凸塊,並安裝Si晶片,而獲得了熱衝擊試驗(TST:Thermal Shock Test)所需之各試樣基板。將所得之各試樣基板放入可在液體層中進行-65℃與150℃之溫度循環的冷熱循環機中,進行TST。於TST之期間內,觀察在600循環時、800循環時及1000循環時各試樣基板上之硬化物表面,並按下述之評估基準評估耐裂痕性。結果列示於表1。 ◎:即便在1000循環下仍無異常。 ○:在750循環下無異常,但在1000循環下可觀察到裂痕。 △:在500循環下無異常,但在750循環下可觀察到裂痕。 ×:在500循環下可觀察到有裂痕產生。 [Evaluation of crack resistance] Except that the φ50µm micro-hole pattern was replaced with the Si chip mounting pattern, a substrate with a hardened product having a Si chip mounting pattern was obtained by the same manufacturing procedure as the evaluation substrate used for the above analytical evaluation. Then, Au plating treatment was performed to form solder bumps, and the Si chip was mounted to obtain each sample substrate required for the thermal shock test (TST). Each obtained sample substrate was placed in a hot and cold cycler that can cycle the temperature between -65℃ and 150℃ in the liquid layer, and TST was performed. During the TST period, the hardened surface on each sample substrate was observed at 600 cycles, 800 cycles, and 1000 cycles, and the crack resistance was evaluated according to the following evaluation criteria. The results are shown in Table 1. ◎: No abnormality even at 1000 cycles. ○: No abnormality at 750 cycles, but cracks were observed at 1000 cycles. △: No abnormality at 500 cycles, but cracks were observed at 750 cycles. ×: Cracks were observed at 500 cycles.

從表1所示之評估結果可知,實施例1~7之各硬化性樹脂組成物所形成的硬化物兼顧了良好顯影性與在TST下之良好耐裂痕性。另一方面,可知比較例1~5之各硬化性樹脂組成物所形成的硬化物並未兼顧良好顯影性與在TST下之良好耐裂痕性。From the evaluation results shown in Table 1, it can be seen that the cured products formed by the curable resin compositions of Examples 1 to 7 have both good developing properties and good crack resistance under TST. On the other hand, it can be seen that the cured products formed by the curable resin compositions of Comparative Examples 1 to 5 do not have both good developing properties and good crack resistance under TST.

(無)(without)

Claims (8)

一種硬化性樹脂組成物,特徵在於包含:(A)硬化性樹脂、(B)經表面處理之鋇化合物、(C)經表面處理之二氧化矽及(D)橡膠粒子;並且 相對於前述硬化性樹脂組成物之固體成分總質量,前述(B)經表面處理之鋇化合物與前述(C)經表面處理之二氧化矽的合計含量以固體成分基準計為20~80質量%;且 前述(B)經表面處理之鋇化合物與前述(C)經表面處理之二氧化矽之固體成分基準的質量比為1:1~1:4。 A curable resin composition, characterized by comprising: (A) a curable resin, (B) a surface-treated barium compound, (C) a surface-treated silicon dioxide, and (D) rubber particles; and relative to the total mass of the solid components of the curable resin composition, the total content of the surface-treated barium compound (B) and the surface-treated silicon dioxide (C) is 20-80% by mass on a solid component basis; and the mass ratio of the surface-treated barium compound (B) to the surface-treated silicon dioxide (C) is 1:1-1:4 on a solid component basis. 如請求項1之硬化性樹脂組成物,其中前述(A)硬化性樹脂包含(A-1)光硬化性樹脂。The curable resin composition of claim 1, wherein the (A) curable resin comprises (A-1) a photocurable resin. 如請求項1之硬化性樹脂組成物,其中前述(A)硬化性樹脂包含(A-2)熱硬化性樹脂。The curable resin composition of claim 1, wherein the (A) curable resin comprises (A-2) a thermosetting resin. 如請求項1之硬化性樹脂組成物,其中前述(D)橡膠粒子包含內核外殼橡膠粒子。The hardening resin composition of claim 1, wherein the aforementioned (D) rubber particles comprise inner core and outer shell rubber particles. 如請求項1之硬化性樹脂組成物,其進一步包含(E)光聚合引發劑。The curable resin composition of claim 1 further comprises (E) a photopolymerization initiator. 一種乾膜,具有第一膜與樹脂層,該樹脂層形成於該第一膜之至少一面且由如請求項1之硬化性樹脂組成物所構成。A dry film comprises a first film and a resin layer, wherein the resin layer is formed on at least one side of the first film and is composed of the hardening resin composition of claim 1. 一種硬化物,係使如請求項1之硬化性樹脂組成物或如請求項6之乾膜的樹脂層硬化而成者。A hardened material is obtained by hardening the hardening resin composition as claimed in claim 1 or the resin layer of the dry film as claimed in claim 6. 一種印刷配線板,具備如請求項7之硬化物。A printed wiring board comprises the hardened material as claimed in claim 7.
TW112137839A 2022-10-04 2023-10-03 Curable resin composition, dry film, cured product and printed wiring board capable of forming a cured product that achieves both good resolution and good crack resistance under harsher conditions than conventional TCT TW202415724A (en)

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