TW201942247A - Curable resin composition, dry film formed of the composition, cured product and printed wiring board having the cured product capable of avoiding problems such as solder resist peeling and undercut - Google Patents

Curable resin composition, dry film formed of the composition, cured product and printed wiring board having the cured product capable of avoiding problems such as solder resist peeling and undercut Download PDF

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TW201942247A
TW201942247A TW108105392A TW108105392A TW201942247A TW 201942247 A TW201942247 A TW 201942247A TW 108105392 A TW108105392 A TW 108105392A TW 108105392 A TW108105392 A TW 108105392A TW 201942247 A TW201942247 A TW 201942247A
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resin composition
cured product
curable resin
epoxy resin
film
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滝井庸二
北村太郎
依田健志
岡安克起
伊藤信人
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日商太陽油墨製造股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/01Use of inorganic substances as compounding ingredients characterized by their specific function
    • C08K3/013Fillers, pigments or reinforcing additives
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/30Sulfur-, selenium- or tellurium-containing compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • C08K3/36Silica
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K7/00Use of ingredients characterised by shape
    • C08K7/16Solid spheres
    • C08K7/18Solid spheres inorganic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L101/00Compositions of unspecified macromolecular compounds
    • C08L101/02Compositions of unspecified macromolecular compounds characterised by the presence of specified groups, e.g. terminal or pendant functional groups
    • C08L101/06Compositions of unspecified macromolecular compounds characterised by the presence of specified groups, e.g. terminal or pendant functional groups containing oxygen atoms
    • C08L101/08Carboxyl groups
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/0373Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement containing additives, e.g. fillers

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  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
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  • Medicinal Chemistry (AREA)
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  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Polymerisation Methods In General (AREA)

Abstract

Provided are a curable resin composition, which is excellent in analytical properties and is excellent in high-temperature and high-humidity resistance (PCT resistance) or thermal cycling resistance (TCT resistance) of a cured product even if it is filled with spherical silicon oxide; a dry film formed of the composition; a cured product and a printed wiring board having the cured product. The solution is to provide a curable resin composition comprising: (A) a carboxyl group-containing resin, (B) a photopolymerization initiator, (C) an epoxy resin, and (D) an inorganic filler, and is characterized in that: an epoxy resin (C) is a type of biphenyl skeleton epoxy resin or other type of epoxy resin which is solid or semi-solid at normal temperature; and an inorganic filler (D) containing spherical silicon oxide and barium sulfate which has a ratio of spherical silicon oxide to barium sulphate that is 1:(0.5 to 5) by volume.

Description

硬化性樹脂組成物、由該組成物所成的乾膜、硬化物及具有該硬化物的印刷配線板Curable resin composition, dry film formed from the composition, cured product, and printed wiring board having the cured product

本發明為關於硬化性樹脂組成物、由該組成物所成的乾膜、硬化物及具有該硬化物的印刷配線板。The present invention relates to a curable resin composition, a dry film formed from the composition, a cured product, and a printed wiring board having the cured product.

以往,作為藉由曝光、顯影來形成印刷配線板中的阻焊劑(solder resist)等的永久被膜的材料,使用著藉由鹼水溶液而能夠顯影的硬化性樹脂組成物。
另一方面,隨著電子機器的輕薄短小化的印刷配線板的高密度化,為了對應於此,發展了將半導體封裝的小型化或多針化的實用化並量產化,最近,逐漸採用使用封裝基板的BGA(閘球陣列)或CSP(晶片尺寸封裝)等的半導體封裝,來替代被稱為QFP(四面扁平封裝)或SOP(小外形封裝)的半導體封裝。
如此般的封裝基板中,由於以更高密度且相互接近地來形成配線圖型(pattern),故對於上述封裝基板中所使用的阻焊劑等的永久被膜,變得要求優異的解析性與作為電路保護被膜的可靠性(壓力鍋試驗(PCT)、冷熱循環試驗(TCT))。
作為抑制如此般的封裝基板用阻焊劑的裂隙或剝落的產生之方法,廣泛研究著例如藉由在硬化性樹脂組成物中填充無機填料,可使阻焊劑與成為阻焊劑的基底的配線基板之間的線熱膨脹係數儘可能地一致。該無機填料之中,特別是球狀二氧化矽,因為填充性優異、熱膨脹係數(CTE)低,故被廣泛使用於阻焊劑的特性提升(參考專利文獻1)。
[先前技術文獻]
[專利文獻]
Conventionally, as a material for forming a permanent film such as a solder resist in a printed wiring board by exposure and development, a curable resin composition that can be developed by an alkaline aqueous solution is used.
On the other hand, with the increase in the density of printed wiring boards for electronic devices that are thinner and shorter, in order to respond to this, the practicalization and mass production of miniaturization or multi-pinning of semiconductor packages have been developed. Recently, they have been gradually adopted. Instead of semiconductor packages called QFP (Quad Flat Package) or SOP (Small Outline Package), semiconductor packages such as BGA (Ball Ball Array) or CSP (Chip Scale Package) packages are used.
In such a package substrate, since wiring patterns are formed at a higher density and closer to each other, a permanent film such as a solder resist used in the package substrate is required to have excellent resolution and performance. Reliability of circuit protection film (pressure cooker test (PCT), cold and hot cycle test (TCT)).
As a method for suppressing the occurrence of cracks or peeling of such a solder resist for a package substrate, extensive research has been made, for example, by filling an inorganic filler into a curable resin composition to make the solder resist and the wiring substrate which is the base of the solder resist The linear thermal expansion coefficients are as uniform as possible. Among these inorganic fillers, spherical silica in particular has excellent filling properties and a low coefficient of thermal expansion (CTE), and is therefore widely used for improving the characteristics of solder resists (see Patent Document 1).
[Prior technical literature]
[Patent Literature]

[專利文獻1]日本特開2014-81611[Patent Document 1] Japanese Patent Laid-Open No. 2014-81611

[發明所欲解決之課題][Problems to be Solved by the Invention]

然而,在硬化性樹脂組成物中若填充如球狀二氧化矽之類的無機填料時,於藉由對塗膜的光照射之圖型曝光中,球狀二氧化矽會阻礙光的透過並使塗膜深部的硬化性樹脂組成物的硬化性降低,於之後的顯影中,因阻焊劑的開口圖型的塗膜底部為過量地溶解(意即,底切(undercut)),而會有導致細線圖型的形成不良等、解析性惡化之類的問題。
又,若產生底切時,由於與基底的接地面積減少,故於高溫高濕耐性試驗(PCT)或冷熱循環耐性試驗(TCT)中,亦會有容易產生阻焊劑的剝離之類的問題。
However, if an inorganic filler such as spherical silica is filled in the curable resin composition, the spherical silica will hinder the transmission of light during pattern exposure by light irradiation of the coating film. Reduces the hardenability of the hardenable resin composition in the deep part of the coating film. In the subsequent development, the bottom of the coating film of the pattern of the solder resist is excessively dissolved (that is, undercut). This may cause problems such as poor formation of thin line patterns, deterioration of resolution, and the like.
In addition, if an undercut occurs, the ground area with the substrate is reduced, and therefore problems such as peeling of the solder resist are likely to occur in the high temperature and high humidity resistance test (PCT) or cold and heat cycle resistance test (TCT).

對此,作為抑制底切的手段,例如有縮短顯影時間、或降低顯影液的溫度之方法。然而,為了提升與阻焊劑的密著性,一般而言為對於基底的銅電路進行表面處理,因上述表面處理層的影響,在藉由調整顯影條件來抑制底切的手段當中,會有產生在開口底部的銅電路上殘留球狀二氧化矽之現象(意即,顯影殘渣)的其他問題。As a means for suppressing this, for example, there is a method of shortening the development time or lowering the temperature of the developing solution. However, in order to improve the adhesion with the solder resist, in general, surface treatment is performed on the copper circuit of the substrate. Due to the influence of the surface treatment layer described above, there are some cases where the undercut is suppressed by adjusting the development conditions. Other problems with the phenomenon of spherical silica remaining on the copper circuit at the bottom of the opening (that is, development residue).

因此,本發明之目的係提供一種即使是填充球狀二氧化矽,解析性亦為優異、且硬化物的高溫高濕耐性(PCT耐性)或冷熱循環耐性(TCT耐性)亦為優異的硬化性樹脂組成物,以及由該組成物所成的乾膜、該等的硬化物及具有該硬化物的印刷配線板。

[解決課題之手段]
Therefore, the object of the present invention is to provide an excellent resolving property even when the spherical silica is filled, and the high temperature and high humidity resistance (PCT resistance) or cold and heat cycle resistance (TCT resistance) of the cured product is also excellent. A resin composition, a dry film formed from the composition, such a cured product, and a printed wiring board having the cured product.

[Means for solving problems]

本發明人係著眼於併用硫酸鋇,而硫酸鋇係相較於球狀二氧化矽為更具有深部硬化性效果者,為了實現上述目的進行了深入研究。其結果發現,若平衡性良好地併用並調配球狀二氧化矽與硫酸鋇時,可維持低CTE之同時並防止底切。
進而,除了上述構成以外,為了解決上述顯影殘渣的問題,作為即使是增加顯影時間亦不會產生底切的構成,著眼於環氧成分來進行深入研究。其結果發現,作為環氧樹脂,藉由併用並調配具有聯苯骨架的環氧樹脂及此以外的常溫下為固形或半固形的環氧樹脂時,可不受顯影條件之影響而更確實地防止底切。
The present inventors focused on using barium sulfate in combination, and the barium sulfate system has a deeper hardening effect than spherical silica, and has conducted intensive studies in order to achieve the above-mentioned object. As a result, it has been found that when spherical silicon dioxide and barium sulfate are used in combination in a well-balanced manner, low CTE can be maintained while undercutting can be prevented.
Furthermore, in addition to the above-mentioned configuration, in order to solve the problem of the above-mentioned development residue, as a configuration that does not generate an undercut even if the development time is increased, an intensive study is focused on the epoxy component. As a result, it has been found that when an epoxy resin having a biphenyl skeleton is used in combination with an epoxy resin that is solid or semi-solid at ordinary temperatures other than the epoxy resin, it can be more reliably prevented from being affected by the development conditions. Undercut.

本發明人係基於上述見解因而完成本發明。
即,本發明之硬化性樹脂組成物,含有:(A)含有羧基的樹脂、(B)光聚合起始劑、(C)環氧樹脂及(D)無機填料,其特徵為,作為前述(C)環氧樹脂,含有具有聯苯骨架的環氧樹脂及此以外的常溫下為固形或半固形的環氧樹脂,作為前述(D)無機填料,含有球狀二氧化矽及硫酸鋇,且球狀二氧化矽與硫酸鋇的體積比為1:(0.5~5)。
The present inventors have completed the present invention based on the above findings.
That is, the curable resin composition of the present invention contains (A) a carboxyl group-containing resin, (B) a photopolymerization initiator, (C) an epoxy resin, and (D) an inorganic filler, and is characterized in that the ( C) an epoxy resin containing an epoxy resin having a biphenyl skeleton and other solid or semi-solid epoxy resins at room temperature; as the (D) inorganic filler, containing spherical silica and barium sulfate; and The volume ratio of spherical silica and barium sulfate is 1: (0.5 ~ 5).

又,於本發明之硬化性樹脂組成物中,前述(B)光聚合起始劑以包含醯基膦氧化物(acylphosphine oxide)系聚合起始劑為較佳。In the curable resin composition of the present invention, the (B) photopolymerization initiator preferably contains an acylphosphine oxide-based polymerization initiator.

進而,本發明之乾膜,其特徵為將上述硬化性樹脂組成物塗佈在薄膜上並使其乾燥所得到。Furthermore, the dry film of the present invention is obtained by coating the film with a curable resin composition and drying it.

進而,本發明之硬化物,其特徵為藉由將上述鹼顯影型硬化性樹脂組成物、或上述鹼顯影型硬化性樹脂組成物塗佈在薄膜上,並使其乾燥來得到上述乾膜,再將該乾膜進行光硬化及熱硬化之至少任一者而得到硬化物。Furthermore, the cured product of the present invention is characterized in that the dry film is obtained by coating the film with the alkali-developing curable resin composition or the alkali-developing curable resin composition, and drying the film, This dry film is then subjected to at least one of photocuring and thermal curing to obtain a cured product.

又進而本發明之印刷配線板,其特徵為具有上述硬化物。

[發明的效果]
Furthermore, the printed wiring board of this invention is characterized by having the said hardened | cured material.

[Effect of the invention]

依據本發明可提供一種即使是填充球狀二氧化矽,解析性亦為優異、且硬化物的高溫高濕耐性(PCT耐性)或冷熱循環耐性(TCT耐性)亦為優異的硬化性樹脂組成物,以及由該組成物所成的乾膜、該等的硬化物及具有該硬化物的印刷配線板。According to the present invention, it is possible to provide a hardening resin composition that is excellent in resolvability even if it is filled with spherical silica, and the cured product has high temperature and high humidity resistance (PCT resistance) or cold and heat cycle resistance (TCT resistance). , And a dry film made of the composition, such cured products, and a printed wiring board having the cured products.

[實施發明之最佳形態][Best Mode for Implementing Invention]

本發明相關之硬化性樹脂組成物,其含有:(A)含有羧基的樹脂、(B)光聚合起始劑、(C)環氧樹脂及(D)無機填料,其特徵為,作為前述(C)環氧樹脂,含有具有聯苯骨架的環氧樹脂及此以外的常溫下為固形或半固形的環氧樹脂,作為前述(D)無機填料,含有球狀二氧化矽及硫酸鋇,且前述球狀二氧化矽與前述硫酸鋇的調配比例,以體積比為1:(0.5~5)。
以下,對於本發明之硬化性樹脂組成物的各成分來進行詳述。
The curable resin composition according to the present invention comprises (A) a resin containing a carboxyl group, (B) a photopolymerization initiator, (C) an epoxy resin, and (D) an inorganic filler, and is characterized in that the ( C) an epoxy resin containing an epoxy resin having a biphenyl skeleton and other solid or semi-solid epoxy resins at room temperature; as the (D) inorganic filler, containing spherical silica and barium sulfate; and The mixing ratio of the spherical silica and the barium sulfate is 1: (0.5 to 5) in volume ratio.
Hereinafter, each component of the curable resin composition of the present invention will be described in detail.

[(A)含有羧基的樹脂]
作為(A)含有羧基的樹脂係可使用分子中具有羧基的以往周知的各種含有羧基的樹脂。特別是,分子中具有乙烯性不飽和雙鍵的含有羧基的感光性樹脂,就光硬化性或耐顯影性之方面而言為較佳。乙烯性不飽和雙鍵係以丙烯酸或者甲基丙烯酸或源自此等的衍生物為較佳。若僅使用不具有乙烯性不飽和雙鍵的含有羧基的樹脂時,為了將組成物設為光硬化性,則必須要併用後述之分子中具有複數的乙烯性不飽和基的化合物(即,光反應性單體)。
作為含有羧基的樹脂之具體例,可舉出如以下般的化合物(寡聚物及聚合物中的任一者均可)。
[(A) Carboxyl-containing resin]
As the (A) carboxyl group-containing resin system, various conventionally known carboxyl group-containing resins having a carboxyl group in a molecule can be used. In particular, a carboxyl group-containing photosensitive resin having an ethylenically unsaturated double bond in the molecule is preferable in terms of photocurability or development resistance. The ethylenically unsaturated double bond is preferably acrylic acid or methacrylic acid or a derivative derived therefrom. When only a carboxyl group-containing resin having no ethylenically unsaturated double bond is used, in order to make the composition photocurable, it is necessary to use a compound having a plurality of ethylenically unsaturated groups in a molecule described later (that is, light Reactive monomer).
Specific examples of the carboxyl group-containing resin include the following compounds (any one of an oligomer and a polymer may be used).

(1)藉由(甲基)丙烯酸等的不飽和羧酸、與苯乙烯、α-甲基苯乙烯、低階(甲基)丙烯酸烷基酯、異丁烯等的含有不飽和基的化合物之共聚合而得到的含有羧基的樹脂。(1) Unsaturated carboxylic acids such as (meth) acrylic acid, and unsaturated group-containing compounds such as styrene, α-methylstyrene, low-order (meth) acrylic acid alkyl esters, and isobutylene A carboxyl group-containing resin obtained by polymerization.

(2)藉由脂肪族二異氰酸酯、分支鏈脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等的二異氰酸酯、與二羥甲基丙酸、二羥甲基丁酸等的含有羧基的二醇化合物及聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷烴加成物二醇、具有酚性羥基及醇性羥基的化合物等的二醇化合物之聚加成反應而得到的含有羧基的胺基甲酸酯樹脂。(2) A carboxyl group containing a diisocyanate such as an aliphatic diisocyanate, a branched aliphatic diisocyanate, an alicyclic diisocyanate, an aromatic diisocyanate, and dimethylolpropionic acid, dimethylolbutanoic acid, etc. Diol compounds and polycarbonate-based polyols, polyether-based polyols, polyester-based polyols, polyolefin-based polyols, acrylic-based polyols, bisphenol A-based alkylene oxide adduct diols, and phenols Carboxyl group-containing urethane resin obtained by polyaddition reaction of a diol compound such as a polar hydroxyl group and an alcoholic hydroxyl compound.

(3)藉由二異氰酸酯、與雙酚A型環氧樹脂、氫化雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、聯二甲酚型環氧樹脂、聯苯型環氧樹脂等的2官能環氧樹脂的(甲基)丙烯酸酯或者該部分酸酐改性物、含有羧基的二醇化合物及二醇化合物之聚加成反應而得到的含有羧基的感光性胺基甲酸酯樹脂。(3) With diisocyanate, bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, bisphenol F epoxy resin, bisphenol S epoxy resin, bixylenol epoxy resin (Meth) acrylates of bifunctional epoxy resins, such as biphenyl epoxy resins, or carboxyl group-containing compounds obtained by polyaddition reaction of the partially acid anhydride-modified product, diol compounds containing carboxyl groups, and diol compounds Photosensitive urethane resin.

(4)於前述(2)或(3)之樹脂的合成中,加入(甲基)丙烯酸羥基烷基酯等的分子內具有1個羥基與1個以上的(甲基)丙烯醯基的化合物,而得到的末端經(甲基)丙烯酸化的含有羧基的感光性胺基甲酸酯樹脂。(4) In the synthesis of the resin of (2) or (3) above, a compound having one hydroxyl group and one or more (meth) acrylfluorenyl groups in a molecule is added, such as hydroxyalkyl (meth) acrylate. And the obtained carboxyl group-containing photosensitive urethane resin having a (meth) acrylic terminal.

(5)於前述(2)或(3)之樹脂的合成中,加入異佛酮二異氰酸酯與季戊四醇三丙烯酸酯之等莫耳反應物等的分子內具有1個異氰酸酯基與1個以上的(甲基)丙烯醯基的化合物,而得到的末端經(甲基)丙烯酸化的含羧基的感光性胺基甲酸酯樹脂。(5) In the synthesis of the resin of (2) or (3) above, a mole reactant such as isophorone diisocyanate and pentaerythritol triacrylate is added, which has one isocyanate group and one or more ( A meth) acrylfluorene-based compound, and a carboxyl group-containing photosensitive urethane resin having a (meth) acrylic terminal at the end.

(6)將2官能或其以上的多官能(固形)環氧樹脂與(甲基)丙烯酸反應,使存在於支鏈的羥基加成二元酸酐,而得到的含有羧基的感光性樹脂。(6) A carboxyl group-containing photosensitive resin obtained by reacting a bifunctional or higher polyfunctional (solid) epoxy resin with (meth) acrylic acid, and adding a dibasic acid anhydride to a hydroxyl group present in a branched chain.

(7)將2官能(固形)環氧樹脂的羥基進而以環氧氯丙烷進行環氧化來得到多官能環氧樹脂,再將(甲基)丙烯酸與該多官能環氧樹脂反應,使所產生的羥基加成二元酸酐,而得到的含有羧基的感光性樹脂。(7) The hydroxyl group of the bifunctional (solid) epoxy resin is further epoxidized with epichlorohydrin to obtain a polyfunctional epoxy resin, and (meth) acrylic acid is reacted with the polyfunctional epoxy resin to produce The hydroxy group is added to a dibasic acid anhydride to obtain a carboxyl group-containing photosensitive resin.

(8)將己二酸、鄰苯二甲酸、六氫鄰苯二甲酸等的二羧酸與2官能氧雜環丁烷樹脂反應,使所產生的1級羥基加成鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐等的二元酸酐,而得到的含有羧基的聚酯樹脂。(8) reacting dicarboxylic acids such as adipic acid, phthalic acid, hexahydrophthalic acid and the like with a bifunctional oxetane resin to add the generated primary hydroxyl groups to phthalic anhydride, Tetrahydrophthalic anhydride, hexahydrophthalic anhydride, and other dibasic acid anhydrides, and carboxyl-containing polyester resins obtained.

(9)將1分子中具有複數的環氧基的環氧化合物、與p-羥基苯乙醇等的1分子中至少具有1個醇性羥基和1個酚性羥基的化合物、及(甲基)丙烯酸等的含有不飽和基的單羧酸反應,對於所得到的反應生成物的醇性羥基,使馬來酸酐、四氫鄰苯二甲酸酐、偏苯三酸酐、均苯四甲酸酐、己二酸等的多元酸反應,而得到的含有羧基的樹脂。(9) An epoxy compound having a plurality of epoxy groups in one molecule, a compound having at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule with p-hydroxyphenylethanol, and the like, and (methyl) For unsaturated monocarboxylic acids such as acrylic acid, maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, adipic acid, etc. are used for the alcoholic hydroxyl group of the obtained reaction product. The polyacid is reacted to obtain a carboxyl-containing resin.

(10)將1分子中具有複數的酚性羥基的化合物、與環氧乙烷、環氧丙烷等的環氧烷烴反應來得到反應生成物,將含有不飽和基的單羧酸與該反應生成物反應,再將多元酸與所得到的反應生成物反應,而得到的含有羧基的感光性樹脂。(10) A compound having a plurality of phenolic hydroxyl groups in one molecule is reacted with an alkylene oxide such as ethylene oxide or propylene oxide to obtain a reaction product, and a monocarboxylic acid containing an unsaturated group is reacted with this product The phenol group is reacted with a polybasic acid and the obtained reaction product to obtain a carboxyl group-containing photosensitive resin.

(11)將1分子中具有複數的酚性羥基的化合物、與碳酸伸乙酯、碳酸伸丙酯等的環狀碳酸酯化合物反應來得到反應生成物,將含有不飽和基的單羧酸與該反應生成物反應,再將多元酸與所得到的反應生成物反應,而得到的含有羧基的感光性樹脂。(11) A reaction product is obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with a cyclic carbonate compound such as ethylene carbonate, propylene carbonate, etc., and using an unsaturated monocarboxylic acid and This reaction product reacts, and the polyacid is reacted with the obtained reaction product to obtain a carboxyl group-containing photosensitive resin.

(12)對前述(1)~(11)的樹脂進而加成1分子內具有1個環氧基與1個以上的(甲基)丙烯醯基的化合物,而得到的含有羧基的感光性樹脂。
尚,本說明書中,所謂(甲基)丙烯酸酯係指總稱丙烯酸酯、甲基丙烯酸酯及此等的混合物之用語,關於其他類似的表現亦為相同。
(12) A photosensitive resin containing a carboxyl group obtained by further adding a compound having one epoxy group and one or more (meth) acrylfluorene groups in one molecule to the resins of (1) to (11) above. .
In the present specification, the term (meth) acrylate refers to a generic term for acrylate, methacrylate, and mixtures thereof, and the same applies to other similar expressions.

前述含有羧基的樹脂的酸價係以30~150mgKOH/g的範圍為適當,又較佳為50~120mgKOH/g的範圍。含有羧基的樹脂的酸價若為30mgKOH/g以上時,鹼顯影會變得容易,另一方面,若為150mgKOH/g以下時,可得到曝光部的對於顯影液的充分的耐性,而可確實地描繪正常的阻劑圖型,故為較佳。The acid value of the carboxyl group-containing resin is preferably in the range of 30 to 150 mgKOH / g, and more preferably in the range of 50 to 120 mgKOH / g. When the acid value of the carboxyl group-containing resin is 30 mgKOH / g or more, alkali development becomes easy. On the other hand, when the acid value of the carboxyl group is 150 mgKOH / g or less, sufficient resistance to the developing solution in the exposed portion can be obtained, and it can be sure. It is better to draw a normal resist pattern.

又,前述含有羧基的樹脂的重量平均分子量係依樹脂骨架而有所不同,通常為2,000~150,000,進而以在5,000~100,000的範圍者為較佳。重量平均分子量若為2,000以上時,曝光部的被膜的耐顯影性會提升,而解析性為優異。另一方面,重量平均分子量若為150,000以下時,未曝光部的溶解性為良好而解析性為優異,且同時對於儲藏穩定性亦為提升。重量平均分子量係可藉由凝膠滲透層析法來進行測定。The weight average molecular weight of the carboxyl group-containing resin varies depending on the resin skeleton, and is usually 2,000 to 150,000, and more preferably in the range of 5,000 to 100,000. When the weight average molecular weight is 2,000 or more, the development resistance of the film of the exposed portion is improved, and the resolution is excellent. On the other hand, when the weight average molecular weight is 150,000 or less, the solubility of the unexposed portion is good and the resolution is excellent, and at the same time, the storage stability is also improved. The weight average molecular weight can be measured by gel permeation chromatography.

該等含有羧基的樹脂係可不受限於前述列舉者來使用,可使用單獨1種、亦可混合複數種來使用。其中,將如前述含有羧基的樹脂(10)、(11)般的酚化合物使用作為起始原料,所合成的含有羧基的樹脂,由於B-HAST耐性、PCT耐性為優異而可適合使用。These carboxyl group-containing resins are not limited to those listed above, and may be used singly or in combination. Among them, phenol compounds such as the carboxyl group-containing resins (10) and (11) are used as starting materials, and the synthesized carboxyl group-containing resin is suitably used because it has excellent B-HAST resistance and PCT resistance.

[(B)光聚合起始劑]
作為(B)光聚合起始劑係可任意使用周知的種類。(B)光聚合起始劑係可使用單獨1種、亦可組合2種以上來使用。
[(B) Photopolymerization initiator]
As the (B) photopolymerization initiator system, a known species can be arbitrarily used. (B) A photopolymerization initiator system may be used individually by 1 type, and may use 2 or more types together.

作為(B)光聚合起始劑,具體而言可舉例如雙-(2,6-二氯苯甲醯基)苯基氧化膦、雙-(2,6-二氯苯甲醯基)-2,5-二甲基苯基氧化膦、雙-(2,6-二氯苯甲醯基)-4-丙基苯基氧化膦、雙-(2,6-二氯苯甲醯基)-1-萘基氧化膦、雙-(2,6-二甲氧基苯甲醯基)苯基氧化膦、雙-(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基戊基氧化膦、雙-(2,6-二甲氧基苯甲醯基)-2,5-二甲基苯基氧化膦、雙-(2,4,6-三甲基苯甲醯基)-苯基氧化膦等的雙醯基膦氧化物類;2,6-二甲氧基苯甲醯基二苯基氧化膦、2,6-二氯苯甲醯基二苯基氧化膦、2,4,6-三甲基苯甲醯基苯基膦酸甲基酯、2-甲基苯甲醯基二苯基氧化膦、三甲基乙醯基苯基膦酸異丙基酯、2,4,6-三甲基苯甲醯基二苯基氧化膦等的單醯基膦氧化物類;苯基(2,4,6-三甲基苯甲醯基)亞膦酸乙酯、1-羥基-環己基苯基酮、1-[4-(2-羥基乙氧基)-苯基]-2-羥基-2-甲基-1-丙烷-1-酮、2-羥基-1-{4-[4-(2-羥基-2-甲基-丙醯基)-苄基]苯基}-2-甲基-丙烷-1-酮、2-羥基-2-甲基-1-苯丙烷-1-酮等的羥基苯乙酮類;苯偶姻、苄基、苯偶姻甲基醚、苯偶姻乙基醚、苯偶姻n-丙基醚、苯偶姻異丙基醚、苯偶姻n-丁基醚等的苯偶姻類;苯偶姻烷基醚類;二苯甲酮、p-甲基二苯甲酮、米其勒酮、甲基二苯甲酮、4,4’-二氯二苯甲酮、4,4’-雙二乙基胺基二苯甲酮等的二苯甲酮類;苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮、1-羥基環己基苯基酮、2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉基-1丙酮、2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮-1、2-(二甲基胺基)-2-[(4-甲基苯基)甲基)-1-[4-(4-嗎咻基)苯基]-1-丁酮、N,N-二甲基胺基苯乙酮等的苯乙酮類;噻吨酮、2-乙基噻吨酮、2-異丙基噻吨酮、2,4-二甲基噻吨酮、2,4-二乙基噻吨酮、2-氯噻吨酮、2,4-二異丙基噻吨酮等的噻吨酮類;蒽醌、氯蒽醌、2-甲基蒽醌、2-乙基蒽醌、2-tert-丁基蒽醌、1-氯蒽醌、2-戊基蒽醌、2-胺基蒽醌等的蒽醌類;苯乙酮二甲基縮酮、苄基二甲基縮酮等的縮酮類;乙基-4-二甲基胺基苯甲酸酯、2-(二甲基胺基)乙基苯甲酸酯、p-二甲基苯甲酸乙酯等的苯甲酸酯類;1,2-辛二酮,1-[4-(苯硫基)-,2-(O-苯甲醯肟)]、乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯肟)等的肟酯類;雙(η5-2,4-環戊二烯-1-基)-雙(2,6-二氟-3-(1H-吡咯-1-基)苯基)鈦、雙(環戊二烯基)-雙[2,6-二氟-3-(2-(1-吡咯-1-基)乙基)苯基]鈦等的二茂鈦類;苯基二硫化物2-硝基茀、丁偶姻、茴香偶姻乙基醚、偶氮雙異丁腈、四甲基秋蘭姆二硫化物等。Specific examples of the (B) photopolymerization initiator include bis- (2,6-dichlorobenzylidene) phenylphosphine oxide, and bis- (2,6-dichlorobenzylidene)- 2,5-dimethylphenylphosphine oxide, bis- (2,6-dichlorobenzylidene) -4-propylphenylphosphine oxide, bis- (2,6-dichlorobenzylidene) -1-naphthylphosphine oxide, bis- (2,6-dimethoxybenzyl) phenylphosphine oxide, bis- (2,6-dimethoxybenzyl) -2,4, 4-trimethylpentylphosphine oxide, bis- (2,6-dimethoxybenzylidene) -2,5-dimethylphenylphosphine oxide, bis- (2,4,6-trimethyl Dibenzylphosphine oxide) -bisphosphonylphosphine oxides such as phenylphosphine oxide; 2,6-dimethoxybenzyldiphenylphosphine oxide, 2,6-dichlorobenzyldioxane Phenylphosphine oxide, 2,4,6-trimethylbenzylidenephenylphosphonic acid methyl ester, 2-methylbenzylidenediphenylphosphine oxide, trimethylacetamidophenylphosphonic acid Monoisopropylphosphine oxides such as isopropyl esters, 2,4,6-trimethylbenzylidenediphenylphosphine oxide; phenyl (2,4,6-trimethylbenzylidene) Ethyl phosphinate, 1-hydroxy-cyclohexylphenyl ketone, 1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy-2-methyl-1-propane-1-one 2-hydroxy-1 -Fluorene 4- [4- (2-hydroxy-2-methyl-propanyl) -benzyl] phenylfluorene-2-methyl-propane-1-one, 2-hydroxy-2-methyl-1 -Hydroxyacetophenones such as phenylpropane-1-one; benzoin, benzyl, benzoin methyl ether, benzoin ethyl ether, benzoin n-propyl ether, benzoin isopropyl Benzoin, benzoin n-butyl ether, etc .; benzoin alkyl ethers; benzophenone, p-methylbenzophenone, Michelin, methylbenzophenone Ketones, 4,4'-dichlorobenzophenone, 4,4'-bisdiethylaminobenzophenone and other benzophenones; acetophenone, 2,2-dimethoxy- 2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, 1-hydroxycyclohexylphenylketone, 2-methyl-1 -[4- (methylthio) phenyl] -2-morpholinyl-1 acetone, 2-benzyl-2-dimethylamino-1- (4-morpholinylphenyl) -butanone- 1, 2- (dimethylamino) -2-[(4-methylphenyl) methyl) -1- [4- (4-morphoyl) phenyl] -1-butanone, N, Acetophenones such as N-dimethylaminoacetophenone; thioxanthone, 2-ethylthioxanthone, 2-isopropylthioxanthone, 2,4-dimethylthioxanthone, 2 , 4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropyl Thioxanthone such as thioxanthone; anthraquinone, chloroanthraquinone, 2-methylanthraquinone, 2-ethylanthraquinone, 2-tert-butylanthraquinone, 1-chloroanthraquinone, 2-pentanthone Anthraquinones such as anthraquinone and 2-aminoanthraquinone; Acetals such as acetophenone dimethyl ketal and benzyl dimethyl ketal; ethyl-4-dimethylamino benzyl Esters, benzoates such as 2- (dimethylamino) ethylbenzoate, ethyl p-dimethylbenzoate; 1,2-octanedione, 1- [4- (benzene Thio)-, 2- (O-benzidine oxime)], ethyl ketone, 1- [9-ethyl-6- (2-methylbenzyl) -9H-carbazol-3-yl] -, 1- (O-acetamoxime) and other oxime esters; bis (η5-2,4-cyclopentadien-1-yl) -bis (2,6-difluoro-3- (1H-pyrrole) 1-yl) phenyl) titanium, bis (cyclopentadienyl) -bis [2,6-difluoro-3- (2- (1-pyrrole-1-yl) ethyl) phenyl] titanium, etc. Dinitrocene; phenyl disulfide 2-nitropyrene, butyrol, fennel ethyl ether, azobisisobutyronitrile, tetramethylthiuram disulfide and the like.

上述之中,以單醯基膦氧化物系光聚合起始劑或雙醯基膦氧化物系光聚合起始劑等的醯基膦氧化物系光聚合起始劑具有光漂白(photobleaching)性,故為較佳。於此,所謂光漂白亦稱為光退色或光脫色,係指處於激發狀態的螢光物質與基態相比變得化學活化且不穩定之狀態而引起的反應。具體而言係指,作為光聚合起始劑發揮功能的化合物,於特定的波長區域中吸收光而產生自由基,此時因自由基的產生造成化合物的構造變化,而在該波長區域中變得難以吸收光。據此,該波長區域中的光變得容易通過,故可光硬化至深部為止。特別是可適合使用2,4,6-三甲基苯甲醯基-二苯基氧化膦(IGM公司製Omnirad TPO)、雙(2,4,6-三甲基苯甲醯基)苯基氧化膦(BASF JAPAN(股)製IRGACURE819)苯基(2,4,6-三甲基苯甲醯基)亞膦酸乙酯(BASF JAPAN(股)製IRGACURE TPO-L)等。Among the above, a fluorenylphosphine oxide-based photopolymerization initiator such as a monofluorenylphosphine oxide-based photopolymerization initiator or a bisfluorenylphosphine oxide-based photopolymerization initiator has photobleaching properties , So it is better. Here, the so-called photobleaching is also called photofading or photobleaching, and refers to a reaction caused by a fluorescent substance in an excited state becoming chemically activated and unstable compared to a ground state. Specifically, it means that a compound that functions as a photopolymerization initiator absorbs light in a specific wavelength region to generate radicals. At this time, the structure of the compound changes due to the generation of free radicals, and changes in the wavelength region. It is difficult to absorb light. This allows light in this wavelength region to pass easily, so that it can be light-hardened to a deep portion. In particular, 2,4,6-trimethylbenzylidene-diphenylphosphine oxide (Omradrad TPO manufactured by IGM) and bis (2,4,6-trimethylbenzylidene) phenyl can be suitably used. Phosphine oxide (IRGACURE819 manufactured by BASF JAPAN), phenyl (2,4,6-trimethylbenzylidene) ethyl phosphinate (IRGACURE TPO-L manufactured by BASF JAPAN).

除肟酯系光聚合起始劑以外的光聚合起始劑的調配量,以不揮發成分換算,相對於(A)含有羧基的樹脂100質量份,較佳為0.1~30質量份。若為0.1質量份以上時,因樹脂組成物的光硬化性變得良好,故被膜難以剝離,而使耐藥品性等的被膜特性亦變得良好。另一方面,若為30質量份以下時,可得到減低逸出氣體(outgas)的效果,進而,由於在阻焊劑塗膜表面上的光吸收變得良好,故深部硬化性不易降低。又佳為0.5~15質量份。又,肟酯系光聚合起始劑的調配量,以不揮發成分換算,相對於(A)含有羧基的樹脂100質量份,較佳設為0.01~5質量份。若為0.01質量份以上時,由於樹脂組成物的光硬化性變得良好,故使耐熱性、耐藥品性等的被膜特性亦變得良好。另一方面,若為5質量份以下時,阻焊劑被膜的光吸收變得良好,故深部硬化性不易降低。又較佳為0.5~3質量份。The blending amount of the photopolymerization initiator other than the oxime ester-based photopolymerization initiator is, in terms of nonvolatile components, preferably 0.1 to 30 parts by mass relative to 100 parts by mass of the resin having a carboxyl group (A). If it is 0.1 mass part or more, since the photocurability of a resin composition becomes favorable, it will become difficult to peel a film, and the film characteristics, such as chemical resistance, will also become favorable. On the other hand, if it is 30 parts by mass or less, the effect of reducing outgas can be obtained, and further, since the light absorption on the surface of the solder resist coating film becomes good, it is difficult to reduce the deep hardenability. It is more preferably 0.5 to 15 parts by mass. The blending amount of the oxime ester-based photopolymerization initiator is, in terms of nonvolatile components, preferably 0.01 to 5 parts by mass relative to 100 parts by mass of the resin containing a carboxyl group (A). When it is 0.01 parts by mass or more, since the photocurability of the resin composition is good, the film properties such as heat resistance and chemical resistance are also improved. On the other hand, if it is 5 parts by mass or less, the light absorption of the solder resist film becomes good, so that the hardening properties in the deep part are not easily reduced. It is more preferably 0.5 to 3 parts by mass.

[(C)環氧樹脂]
(C)環氧樹脂含有:「具有聯苯骨架的環氧樹脂」及「此以外的常溫下為固形或半固形的環氧樹脂」。相較於液狀的環氧樹脂,具有聯苯骨架的環氧樹脂及此以外的常溫下為固形或半固形的環氧樹脂的對於顯影的溶解性為低,特別是具有聯苯骨架的環氧樹脂,其結晶性為高、且疏水性強,因此如同本發明般地藉由設成併用常溫下為固形或半固形的環氧樹脂的構成,從而可確實防止開口底部中的顯影液的浸透。其結果,可防止底切的產生、並可得到優異的解析性。進而,可得到硬化物為優異的高溫高濕耐性(PCT耐性)或優異的冷熱循環耐性(TCT耐性)。
[(C) epoxy resin]
(C) The epoxy resin contains "an epoxy resin having a biphenyl skeleton" and "an epoxy resin that is solid or semi-solid at ordinary temperature other than this". Compared with liquid epoxy resins, epoxy resins with a biphenyl skeleton and other solid or semi-solid epoxy resins at room temperature have lower solubility for development, especially for rings with a biphenyl skeleton. Oxygen resin has high crystallinity and strong hydrophobicity. Therefore, as in the present invention, it is configured and used in combination with a solid or semi-solid epoxy resin at normal temperature, so that the developer in the bottom of the opening can be reliably prevented. Soak. As a result, the occurrence of undercuts can be prevented, and excellent resolution can be obtained. Furthermore, the hardened | cured material can be excellent in the high-temperature high-humidity resistance (PCT resistance) or the outstanding cold-heat cycle resistance (TCT resistance).

作為該(C)成分中的具有聯苯骨架的環氧樹脂,可使用具有聯苯骨架的周知慣用的多官能環氧樹脂。可舉例如含有聯苯骨架的多官能固形環氧樹脂(日本化藥(股)製NC-3000H、NC-3000)、聯苯型環氧樹脂(Mitsubishi Chemical(股)製YX-4000、YL-6121HA)等。As the epoxy resin having a biphenyl skeleton in the component (C), a well-known and commonly used polyfunctional epoxy resin having a biphenyl skeleton can be used. For example, a polyfunctional solid epoxy resin (NC-3000H, NC-3000, manufactured by Nippon Kayaku Co., Ltd.), a biphenyl epoxy resin (YX-4000, manufactured by Mitsubishi Chemical Co., Ltd., YL- 6121HA) and so on.

另一方面,(C)成分中的「此以外的常溫下為固形或半固形的環氧樹脂」亦可使用周知慣用的種類。例如,作為常溫下為固形的環氧樹脂,可舉出雙酚A型環氧樹脂(Mitsubishi Chemical(股)製jER1001)、雙酚F型環氧樹脂(Mitsubishi Chemical(股)製jER4004P)、萘型環氧樹脂(DIC(股)製HP-4700)、含有萘骨架的多官能固形環氧樹脂(日本化藥(股)製NC-7000)、三酚環氧樹脂(日本化藥(股)製EPPN-502H)、含有二環戊二烯骨架的多官能固形環氧樹脂(DIC(股)製Epiclon HP-7200)、甲酚酚醛清漆型環氧樹脂(DIC(股)製Epiclon N-690)、苯酚酚醛清漆型環氧樹脂(DIC(股)製Epiclon N-770)、含有磷的環氧樹脂(新日鐵住金化學(股)製TX0712)、參(2,3-環氧基丙基)異氰脲酸酯(日產化學工業(股)製TEPIC);作為常溫下為半固形的環氧樹脂,可舉出雙酚A型環氧樹脂(Mitsubishi Chemical(股)製jER834)、萘型環氧樹脂(DIC(股)製HP-4032)等。On the other hand, "the epoxy resin which is solid or semi-solid at ordinary temperature other than this at normal temperature" in (C) component can also use a well-known and usual kind. Examples of epoxy resins that are solid at normal temperature include bisphenol A epoxy resin (jER1001 manufactured by Mitsubishi Chemical Co., Ltd.), bisphenol F epoxy resin (jER4004P manufactured by Mitsubishi Chemical Co., Ltd.), and naphthalene. Type epoxy resin (HP-4700 manufactured by DIC), naphthalene skeleton-containing polyfunctional solid epoxy resin (NC-7000 manufactured by Nippon Kayaku Co., Ltd.), and triphenol epoxy resin (Nippon Kayaku Co., Ltd.) EPPN-502H), a polyfunctional solid epoxy resin containing a dicyclopentadiene skeleton (Epiclon HP-7200, manufactured by DIC), cresol novolac epoxy resin (Epiclon N-690, manufactured by DIC) ), Phenol novolac epoxy resin (Epiclon N-770, manufactured by DIC), phosphorus-containing epoxy resin (TX0712, manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), and (2,3-epoxy propane) Base) isocyanurate (TEPIC manufactured by Nissan Chemical Industry Co., Ltd.); as the semi-solid epoxy resin at room temperature, bisphenol A type epoxy resin (jER834 manufactured by Mitsubishi Chemical Co., Ltd.), naphthalene Type epoxy resin (HP-4032 manufactured by DIC).

於此,本發明中所謂常溫下為固形或半固形,係指在15℃下呈固形或半固形之涵義。固形或半固形的判定,可根據關於危險物的試驗及性狀的省令(平成元年自治省令第1號)的附加頁-第2的「液狀之確認方法」來進行。Herein, in the present invention, the so-called solid or semi-solid at normal temperature refers to the meaning of solid or semi-solid at 15 ° C. The determination of solid or semi-solid shape can be made based on the second page of "Proof of liquid state" on the additional page of Provincial Decree (Provincial Decree No. 1 of the Heisei year) on the test of dangerous substances and properties.

(C)環氧樹脂的調配比量,相對於(A)含有羧基的樹脂中所含有的羧基每1mol,以進行反應的熱硬化成分的官能基數成為0.5~2.5mol為較佳,更佳為0.8~2.0mol。(C) The blending ratio of the epoxy resin is preferably 0.5 to 2.5 mol per 1 mol of the carboxyl group contained in the resin containing the carboxyl group, and the functional group of the thermosetting component to be reacted is preferably 0.5 to 2.5 mol, and more preferably 0.8 ~ 2.0mol.

[(D)無機填料]
構成本發明之硬化性樹脂組成物的(D)無機填料,其含有球狀二氧化矽及硫酸鋇,且球狀二氧化矽與硫酸鋇的調配比例,以體積比為1:(0.5~5)。藉由將球狀二氧化矽與硫酸鋇的調配比例分別設為上述範圍內,從而可維持球狀二氧化矽所具有的低線膨脹係數(CTE)化的功能,同時可利用硫酸鋇的功能來改善塗膜的深部硬化性而抑制底切。
其結果,可有效地防止因底切所造成的顯影性的惡化,進而可實現硬化物的高溫高濕耐性(PCT耐性)或冷熱循環耐性耐熱性(TCT耐性)的提升。該球狀二氧化矽與硫酸鋇的調配比例係以體積比為1:(1~4)為較佳,以1:(1.5~3.5)為特佳。
[(D) Inorganic filler]
The (D) inorganic filler constituting the curable resin composition of the present invention contains spherical silica and barium sulfate, and the mixing ratio of the spherical silica and barium sulfate is 1: (0.5 ~ 5) ). By setting the blending ratio of the spherical silica and barium sulfate to the above ranges, the function of lowering the coefficient of linear expansion (CTE) of the spherical silica can be maintained, and the function of barium sulfate can be utilized at the same time. To improve the deep hardening of the coating film and suppress undercutting.
As a result, deterioration in developability due to undercuts can be effectively prevented, and further, the high-temperature and high-humidity resistance (PCT resistance) and the cold-heat cycle resistance and heat resistance (TCT resistance) of the cured product can be improved. The blending ratio of the spherical silica and barium sulfate is preferably a volume ratio of 1: (1 to 4), and particularly preferably 1: (1.5 to 3.5).

(D)無機填料的調配量,以儘可能地與利用硬化性樹脂組成物所形成的配線基板的線熱膨脹係數為一致為期望,在硬化性樹脂組成物的不揮發成分中,以20質量%以上為較佳,以30質量%以上為又較佳。(D)無機填料的含有量,以球狀二氧化矽與硫酸鋇合計而言,藉由在硬化性樹脂組成物的不揮發成分中設為20質量%以上,可使硬化性樹脂組成物的線膨脹係數(CTE)變低,而可提升TCT耐性。(D) The blending amount of the inorganic filler is desirably consistent with the linear thermal expansion coefficient of the wiring board formed using the curable resin composition as much as possible. The non-volatile content of the curable resin composition is 20% by mass. The above is preferably, and more preferably 30% by mass or more. (D) The content of the inorganic filler is, based on the total of spherical silica and barium sulfate, 20% by mass or more of the non-volatile content of the curable resin composition, so that the content of the curable resin composition can be increased. The coefficient of linear expansion (CTE) becomes low, which improves TCT resistance.

[球狀二氧化矽]
作為球狀二氧化矽,只要是能夠使用作為電子材料用途的填料的球狀二氧化矽皆可使用,可使用單獨1種、亦可組合2種以上來使用。又,球狀二氧化矽的形狀只要是球狀即可,並不限定於真球形。作為適合的球狀二氧化矽,可舉例如依以下之方式所測定的真球度為0.8以上者,但並非被限定於此者中。
[Spherical silica]
As the spherical silica, any spherical silica can be used as long as it can be used as a filler for electronic materials, and it may be used alone or in combination of two or more. The shape of the spherical silicon dioxide may be spherical, and is not limited to a true spherical shape. As a suitable spherical silica, for example, a true sphericity measured in the following manner is 0.8 or more, but it is not limited to this.

真球度係依如以下之方式來進行測定。即,首先利用掃描型電子顯微鏡(SEM)來拍攝球狀二氧化矽的照片,由該照片上所觀察的粒子的面積及周圍長,計算出以(真球度)={4π×(面積)÷(周圍長)2 }所算出的值。具體而言係可採用使用圖像處理裝置對於100個粒子所測定的平均值。True sphericity is measured as follows. That is, first, a photograph of spherical silica is taken with a scanning electron microscope (SEM). From the area and surrounding length of the particles observed in the photograph, (True Sphericity) = {4π × (Area) ÷ (peripheral length) 2 } The calculated value. Specifically, an average value measured for 100 particles using an image processing device can be used.

本發明中,作為球狀二氧化矽,以使用平均粒徑為300nm~1000nm的球狀二氧化矽為較佳,又較佳為將平均粒徑設為500nm~900nm。In the present invention, as the spherical silicon dioxide, spherical silicon dioxide having an average particle diameter of 300 nm to 1000 nm is preferably used, and the average particle diameter is more preferably set to 500 nm to 900 nm.

於此,本說明書中所謂球狀二氧化矽的平均粒徑,並非只是初級粒子的粒徑,而是亦包含二次粒子(凝集體)的粒徑的平均粒徑(D50),且為藉由雷射繞射法所測定的D50的值。作為藉由雷射繞射法之測定裝置,可舉出日機裝公司製的Microtrac MT3300EXII。尚,關於最大粒徑(D100)及粒徑(D10)亦可藉由上述之裝置來相同地進行測定。Here, the average particle diameter of the spherical silica in this specification is not just the particle diameter of the primary particles, but also the average particle diameter (D50) that also includes the particle diameter of the secondary particles (agglomerates). The value of D50 measured by the laser diffraction method. As a measuring device by the laser diffraction method, Microtrac MT3300EXII manufactured by Nikkiso Co., Ltd. is mentioned. The maximum particle diameter (D100) and the particle diameter (D10) can also be measured in the same manner by the apparatus described above.

本發明中,作為球狀二氧化矽,可使用平均粒徑為不同的2種類的球狀二氧化矽。即,除平均粒徑為300nm~1000nm的球狀二氧化矽以外,仍可併用平均粒徑1~未滿300nm的球狀二氧化矽。藉由併用,而在平均粒徑較大的球狀二氧化矽彼此的間隙,填充平均粒徑較小的球狀二氧化矽。據此,可維持作為阻焊劑原本所要求的特性,同時可在硬化性樹脂組成物中更大量地填充球狀二氧化矽。In the present invention, as the spherical silica, two types of spherical silicas having different average particle diameters can be used. That is, in addition to spherical silica having an average particle diameter of 300 nm to 1000 nm, spherical silica having an average particle diameter of 1 to 300 nm may be used in combination. By using them together, the spherical silicon dioxide having a relatively large average particle diameter is filled with spherical silicon dioxide having a small average particle diameter. Accordingly, while maintaining the characteristics originally required as a solder resist, the hardening resin composition can be further filled with spherical silica.

就最密填充性之觀點而言,平均粒徑較大的球狀二氧化矽與平均粒徑較小的球狀二氧化矽之該平均粒徑的差係以5倍以上為較佳。該平均粒徑的差係越大越好,以8倍以上為又較佳,以10倍以上為更佳。From the viewpoint of the closest packing property, the difference between the average particle diameter of the spherical silicon dioxide having a larger average particle diameter and the spherical silicon dioxide having a smaller average particle diameter is preferably 5 times or more. The larger the difference between the average particle diameters, the better, 8 times or more is more preferable, and 10 times or more is more preferable.

又,球狀二氧化矽的最大粒徑(D100)係依硬化性樹脂組成物的用途而有所不同,例如,在半導體封裝基板上形成硬化膜之用途時以5μm以下為較佳。
進而,平均粒徑為較大的球狀二氧化矽的粒徑(D10)係以平均粒徑為較小的球狀二氧化矽的平均粒徑(D50)之5倍以上為較佳。該比率若為5倍以上時,平均粒徑為較小的球狀二氧化矽,對於平均粒徑較大的球狀二氧化矽彼此的間隙的填充性會提升,故可得到硬化物的強度等的機械特性與乾膜的層合性的平衡為優異的硬化性樹脂組成物。
The maximum particle diameter (D100) of the spherical silica varies depending on the use of the curable resin composition. For example, when the hardened film is formed on a semiconductor package substrate, it is preferably 5 μm or less.
Furthermore, it is preferable that the particle diameter (D10) of the spherical silica with a larger average particle diameter is 5 times or more the average particle diameter (D50) of the spherical silica with a smaller average particle diameter. If the ratio is 5 times or more, the spherical silica having a smaller average particle diameter will improve the fillability of the gaps between the spherical silica having a larger average particle diameter, so that the strength of the cured product can be obtained. The balance of mechanical properties such as mechanical properties and lamination of the dry film is an excellent curable resin composition.

尚,若併用平均粒徑為較大的球狀二氧化矽與平均粒徑為較小的球狀二氧化矽時,調配比係以體積比(平均粒徑較大的球狀二氧化矽):(平均粒徑為較小的球狀二氧化矽)=5:5~9:1為較佳,以6:4~8:2為更佳。若為上述範圍時,可進一步實現硬化物的強度等的機械特性及乾膜的層合性之兼具,故為較佳。If the spherical silica with a large average particle size and the spherical silica with a small average particle size are used together, the blending ratio is based on the volume ratio (spherical silica with a large average particle size) : (Spherical silica with a smaller average particle diameter) = 5: 5 to 9: 1 is preferable, and 6: 4 to 8: 2 is more preferable. If it is the said range, it is preferable that the mechanical characteristics, such as the intensity | strength of hardened | cured material, and lamination | stackability of a dry film can be achieved further, and it is preferable.

如此般的球狀二氧化矽之製造方法並無特別限定,可適用該所屬技術領域中具有通常知識者已知的方法。可例如藉由VMC(Vaporized Metal Combustion)法,將矽粉末燃燒從而來製造。所謂VMC法係指在含氧的氣氛中藉由燃燒器來形成化學火焰,將投入量為可形成粉塵雲程度的構成作為目標氧化物粒子的一部分的金屬粉末投入至該化學火焰中,引起爆炸燃燒從而得到氧化物粒子之方法。The method for producing such a spherical silica is not particularly limited, and a method known to those skilled in the art can be applied. For example, it can be manufactured by burning a silicon powder by a VMC (Vaporized Metal Combustion) method. The so-called VMC method means that a chemical flame is formed by a burner in an oxygen-containing atmosphere, and a metal powder constituting part of a target oxide particle is injected into the chemical flame in an amount sufficient to form a dust cloud to cause an explosion. Method of burning to obtain oxide particles.

尚,作為市售的球狀二氧化矽,關於平均粒徑為較大的球狀二氧化矽,可舉例如Admatechs製的SO-C2、SO-E2、SO-E3、Denca(股)製的SFP-20M、SFP-30M等,關於平均粒徑為較小的球狀二氧化矽,可舉例如Admatechs(股)製的Admanano、SO-E1、Denca(股)製的UFP-30、日本觸媒(股)製的seahostar series、堺化學工業(股)製的Sciqas series、KCM Corporation(股)製的SG-SO100等。As commercially available spherical silicon dioxide, for the spherical silicon dioxide having a large average particle diameter, for example, SO-C2, SO-E2, SO-E3, and Denca manufactured by Admatechs may be mentioned. SFP-20M, SFP-30M, etc., for spherical silica with a small average particle diameter, for example, Admanano manufactured by Admatechs, SO-E1, UFP-30 manufactured by Denca, and Japan Touch Seahostar series made by media (stock), Sciqas series made by Sakai Chemical Industry (stock), SG-SO100 made by KCM Corporation (stock), and the like.

為了即使是大量填充亦可維持高分散性,球狀二氧化矽係以施予表面處理為較佳。藉由施予表面處理從而可抑制凝集。尚,作為球狀二氧化矽若併用平均粒徑為較大的球狀二氧化矽與平均粒徑為較小的球狀二氧化矽時,可僅對任一者施予表面處理、亦可對兩者施予表面處理。In order to maintain high dispersibility even with a large amount of filling, it is preferable to apply a surface treatment to the spherical silica. Aggregation can be suppressed by applying a surface treatment. If spherical silica with a larger average particle size and spherical silica with a smaller average particle size are used in combination as spherical silica, only one of them may be surface-treated, or Surface treatment was applied to both.

球狀二氧化矽的表面處理方法並無特別限定,可使用周知慣用的方法即可,以具有硬化性反應基的表面處理劑(例如,具有有機基來作為硬化性反應基的偶合劑等)對無機填料的表面來進行處理為較佳。The surface treatment method of the spherical silica is not particularly limited, and a well-known and commonly used method may be used, and a surface treatment agent having a hardening reactive group (for example, a coupling agent having an organic group as a hardening reactive group) The surface of the inorganic filler is preferably treated.

作為偶合劑係可使用矽烷系、鈦酸酯系、鋁酸酯系及鋯鋁酸酯系等的偶合劑。其中,以矽烷系偶合劑為較佳。作為上述矽烷系偶合劑之例子,可舉出乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷、N-(2-胺基甲基)-3-胺基丙基甲基二甲氧基矽烷、N-(2-胺基乙基)-3-胺基丙基三甲氧基矽烷、3-胺基丙基三乙氧基矽烷、3-苯胺基丙基三甲氧基矽烷、3-環氧丙氧基丙基三甲氧基矽烷、3-環氧丙氧基丙基甲基二甲氧基矽烷、2-(3,4-環氧基環己基)乙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽烷、3-巰基丙基三甲氧基矽烷等,該等係可單獨、或者可合併來使用。該等的矽烷系偶合劑係以藉由預先吸附於球狀二氧化矽的表面或者藉由反應而固定化為較佳。於此,相對於球狀二氧化矽100質量份之偶合劑的處理量係以0.5~10質量份為較佳。尚,本發明中,對球狀二氧化矽所施予的源自偶合劑的反應性官能基,不包含具有光硬化性反應基、熱硬化性官能基的化合物。As the coupling agent system, coupling agents such as a silane system, a titanate system, an aluminate system, and a zirconium aluminate system can be used. Among them, a silane-based coupling agent is preferred. Examples of the silane-based coupling agent include vinyltrimethoxysilane, vinyltriethoxysilane, and N- (2-aminomethyl) -3-aminopropylmethyldimethoxy. Silane, N- (2-aminoethyl) -3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-anilinepropyltrimethoxysilane, 3-cyclo Oxypropoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3- Methacryloxypropyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane, and the like may be used alone or in combination. Such a silane-based coupling agent is preferably immobilized by adsorbing on the surface of the spherical silica in advance or by reaction. Here, the processing amount of the coupling agent with respect to 100 parts by mass of the spherical silica is preferably 0.5 to 10 parts by mass. In the present invention, the reactive functional group derived from the coupling agent applied to the spherical silica does not include a compound having a photocurable reactive group and a thermosetting functional group.

作為光硬化性反應基,可舉出乙烯基、苯乙烯基、甲基丙烯醯基、丙烯醯基等的乙烯性不飽和基。其中,以乙烯基及(甲基)丙烯醯基中的至少任1種為較佳。Examples of the photocurable reactive group include ethylenically unsaturated groups such as a vinyl group, a styryl group, a methacryl group, and acryl group. Among them, at least any one of a vinyl group and a (meth) acrylfluorenyl group is preferred.

作為熱硬化性反應基,可舉出羥基、羧基、異氰酸酯基、胺基、亞胺基、環氧基、氧雜環丁烷基、巰基、甲氧基甲基、甲氧基乙基、乙氧基甲基、乙氧基乙基、噁唑啉基等。其中,以胺基及環氧基中的至少任1種為較佳。Examples of the thermosetting reactive group include a hydroxyl group, a carboxyl group, an isocyanate group, an amine group, an imino group, an epoxy group, an oxetanyl group, a mercapto group, a methoxymethyl group, a methoxyethyl group, and an ethyl group. Oxymethyl, ethoxyethyl, oxazoline and the like. Among them, at least any one of an amine group and an epoxy group is preferred.

尚,經表面處理的球狀二氧化矽,只要是在經表面處理的狀態下含有在本發明之硬化性樹脂組成物中即可,亦可分別調配表面未處理的球狀二氧化矽與表面處理劑,使球狀二氧化矽在組成物中來進行表面處理,但以調配預先經表面處理的球狀二氧化矽為較佳。藉由調配預先經表面處理的球狀二氧化矽,可抑制由於分別調配時的可能殘留的表面處理中未消耗的表面處理劑所造成的裂隙耐性等的降低。預先經表面處理時,較佳為:在溶劑或硬化性成分中調配已將球狀二氧化矽預備分散的預備分散液;又較佳為:將經表面處理的球狀二氧化矽預備分散在溶劑中,並將該預備分散液調配於組成物中、或於將表面未處理的球狀二氧化矽預備分散在溶劑中時進行充分的表面處理後,再將該預備分散液調配於組成物中。The surface-treated spherical silica may be contained in the curable resin composition of the present invention in a surface-treated state, and the surface-untreated spherical silica and the surface may be separately prepared. As the treatment agent, spherical silica is surface-treated in the composition, but it is preferable to prepare spherical silica with surface treatment in advance. By preparing spherical silicon dioxide that has been surface-treated in advance, it is possible to suppress a decrease in crack resistance and the like due to a surface treatment agent that is not consumed in the surface treatment that may remain at the time of each preparation. When the surface treatment is performed in advance, it is preferable to prepare a preliminary dispersion liquid in which the spherical silica is prepared to be dispersed in a solvent or a hardening component; and it is more preferable that the spherical silica in which the surface treatment is prepared is dispersed in The pre-dispersion is prepared in the solvent in the composition, or after the surface untreated spherical silica is pre-dispersed in the solvent, sufficient surface treatment is performed, and then the pre-dispersion is prepared in the composition. in.

球狀二氧化矽係依本發明之硬化性樹脂組成物的使用樣態,可以粉體或固體狀態下和(A)成分等來進行調配、亦可與溶劑或分散劑混合並製成漿料後和(A)成分等來進行調配。Spherical silica based on the use state of the curable resin composition of the present invention can be formulated in the powder or solid state with the component (A), etc., or can be mixed with a solvent or dispersant to form a slurry. And (A) component.

[硫酸鋇]
作為硫酸鋇,可使用任意的周知種類,亦可藉由選自金屬元素的氫氧化物及氧化物中的至少任1種來披覆在硫酸鋇上而進行表面處理,所述的金屬元素為選自Al、Si及Zr之1種以上。作為表面處理劑之具體例,可舉出含水矽酸、含水非結晶二氧化矽、氫氧化鋁、氧化鋯及有機矽烷系化合物等。
作為如此般的硫酸鋇的市售品,可舉例如堺化學工業(股)製的沉澱性硫酸鋇♯100、沉澱性硫酸鋇♯300、沉澱性硫酸鋇SS-50、BARIACE B-30、BARIACE B-31、BARIACE B-32、BARIACE B-33、BARIACE B-34、BARIFINE BF-1、BARIFINE BF-10、BARIFINE BF-20、BARIFINE BF-40、竹原化學工業(股)製的W-1、W-6、W-10、C-300等。該等之中係可使用單獨1種、亦可組合2種以上來使用。
[Barium sulfate]
As the barium sulfate, any known species may be used, and at least one selected from the group consisting of hydroxides and oxides of metal elements may be coated on barium sulfate for surface treatment. The metal elements are One or more selected from Al, Si, and Zr. Specific examples of the surface treatment agent include hydrous silicic acid, hydrous amorphous silica, aluminum hydroxide, zirconia, and an organic silane-based compound.
As such commercially available products of barium sulfate, for example, precipitable barium sulfate 制 100, precipitable barium sulfate 制 300, precipitable barium sulfate SS-50, BARIACE B-30, BARIACE manufactured by Sakai Chemical Industry Co., Ltd. B-31, Bariace B-32, Bariace B-33, Bariace B-34, Barifine BF-1, Barifine BF-10, Barifine BF-20, Barifine BF-40, W-1 manufactured by Takehara Chemical Industry Co., Ltd. , W-6, W-10, C-300, etc. Among these, one type may be used alone, or two or more types may be used in combination.

硫酸鋇係以pH為4.0~9.0為較佳,以5.0~9.0為又較佳。The barium sulfate is preferably pH 4.0 to 9.0, and more preferably 5.0 to 9.0.

硫酸鋇的平均粒徑係以0.1~1μm為較佳,以0.1~0.5μm為又較佳。The average particle size of barium sulfate is preferably 0.1 to 1 μm, and more preferably 0.1 to 0.5 μm.

如以上說明般的硬化性樹脂組成物中,可調配光聚合性單體或熱硬化觸媒、著色劑、有機溶劑、其他的添加成分等。
[光聚合性單體]
本發明之硬化性樹脂組成物中係可調配光聚合性單體。光聚合性單體為具有乙烯性不飽和雙鍵的化合物。作為如此般的光聚合性單體,可舉例如(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸環己酯等的(甲基)丙烯酸烷基酯類;(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯等的(甲基)丙烯酸羥基烷基酯類;乙二醇、丙二醇、二乙二醇、二丙二醇等的環氧烷烴衍生物的單或二(甲基)丙烯酸酯類;己二醇、三羥甲基丙烷、季戊四醇、二(三羥甲基)丙烷、二季戊四醇、參羥基乙基異氰脲酸酯等的多元醇或該等的環氧乙烷或者環氧丙烷加成物的多價(甲基)丙烯酸酯類;(甲基)丙烯酸苯氧基乙酯、雙酚A的聚乙氧基二(甲基)丙烯酸酯等的酚類之環氧乙烷或者環氧丙烷加成物的(甲基)丙烯酸酯類;丙三醇二縮水甘油醚、三羥甲基丙烷三縮水甘油醚、三縮水甘油基異氰脲酸酯等的縮水甘油醚的(甲基)丙烯酸酯類;及三聚氰胺(甲基)丙烯酸酯。
In the curable resin composition as described above, a photopolymerizable monomer or a thermosetting catalyst, a colorant, an organic solvent, and other additional components may be blended.
[Photopolymerizable monomer]
In the curable resin composition of the present invention, a photopolymerizable monomer can be blended. The photopolymerizable monomer is a compound having an ethylenically unsaturated double bond. Examples of such photopolymerizable monomers include alkyl (meth) acrylates such as 2-ethylhexyl (meth) acrylate and cyclohexyl (meth) acrylate; (meth) acrylic acid (Hydroxyalkyl (meth) acrylates such as 2-hydroxyethyl ester, 2-hydroxypropyl (meth) acrylate, and the like; alkylene oxide derivatives such as ethylene glycol, propylene glycol, diethylene glycol, and dipropylene glycol) Mono- or di (meth) acrylates; hexanediol, trimethylolpropane, pentaerythritol, bis (trimethylol) propane, dipentaerythritol, polyhydroxy ethyl isocyanurate, or the like Polyvalent (meth) acrylates such as ethylene oxide or propylene oxide adducts; phenoxyethyl (meth) acrylate, polyethoxydi (meth) acrylate of bisphenol A (Meth) acrylates of phenols such as ethylene oxide or propylene oxide adducts; glycerol diglycidyl ether, trimethylolpropane triglycidyl ether, triglycidyl isocyanurate (Meth) acrylates of glycidyl ethers such as acid esters; and melamine (meth) acrylates.

光聚合性單體係可單獨1種、或可組合2種以上來使用。光聚合性單體的含有量,相對於(A)含有羧基的樹脂100質量份,較佳為0.5~20質量份的比例。調配量若為0.5質量份以上時,光硬化性為良好,故於活性能量線照射後的鹼顯影中可容易進行圖型形成。另一方面,若為20質量份以下時,不易產生光暈而可得到良好的解析性。A photopolymerizable single system may be used individually by 1 type, or may be used in combination of 2 or more type. The content of the photopolymerizable monomer is preferably 0.5 to 20 parts by mass based on 100 parts by mass of the resin having a carboxyl group (A). When the blending amount is 0.5 parts by mass or more, the photocurability is good, and thus pattern formation can be easily performed in alkali development after active energy ray irradiation. On the other hand, if it is 20 parts by mass or less, halo is less likely to occur and good resolvability can be obtained.

[熱硬化觸媒]
本發明之硬化性樹脂組成物中係可調配熱硬化觸媒。作為熱硬化觸媒,可舉例如咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰基乙基-2-苯基咪唑、1-(2-氰基乙基)-2-乙基-4-甲基咪唑等的咪唑衍生物;二氰二胺、苄基二甲基胺、4-(二甲基胺基)-N,N-二甲基苄基胺、4-甲氧基-N,N-二甲基苄基胺、4-甲基-N,N-二甲基苄基胺等的胺化合物、己二酸二醯肼、癸二酸二醯肼等的醯肼化合物;三苯基膦等的磷化合物等。又,亦可使用胍胺、乙醯胍胺、苯并胍胺、三聚氰胺、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪、2-乙烯基-2,4-二胺基-S-三嗪、2-乙烯基-4,6-二胺基-S-三嗪・異氰脲酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪・異氰脲酸加成物等的S-三嗪衍生物,較佳為將該等亦可作為密著性賦予劑發揮功能的化合物來與熱硬化觸媒合併使用。
[Heat hardening catalyst]
In the curable resin composition of the present invention, a thermosetting catalyst can be blended. Examples of the thermosetting catalyst include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, and 1-cyano Imidazole derivatives such as ethyl-2-phenylimidazole, 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamine, benzyldimethylamine, 4- (Dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N-dimethylbenzylamine, 4-methyl-N, N-dimethylbenzyl Amine compounds such as amines, hydrazine compounds such as dihydrazine adipate, dihydrazine adipate, and phosphorus compounds such as triphenylphosphine. In addition, guanamine, acetoguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloxyethyl-S-triazine, 2-vinyl-2 can also be used 2,4-diamino-S-triazine, 2-vinyl-4,6-diamino-S-triazine, isocyanuric acid adduct, 2,4-diamino-6-methyl S-triazine derivatives such as acryloxyethyl-S-triazine and isocyanuric acid adducts are preferably compounds which can also function as adhesion-imparting agents for curing with heat Catalysts are used in combination.

熱硬化觸媒係可單獨1種或組合2種以上來使用。熱硬化觸媒的調配量,相對於(A)含有羧基的樹脂的不揮發成分100質量份,以0.5~20質量份為較佳,以1~15質量份為又較佳。若為0.5質量份以上時,耐熱性為優異。若為20質量份以下時,則會關連到保存穩定性的提升。The thermosetting catalyst system can be used alone or in combination of two or more. The blending amount of the thermosetting catalyst is preferably 0.5 to 20 parts by mass, and more preferably 1 to 15 parts by mass, with respect to 100 parts by mass of the nonvolatile component of the resin containing the carboxyl group (A). If it is 0.5 mass part or more, heat resistance will be excellent. When it is 20 parts by mass or less, it is related to improvement of storage stability.

[著色劑]
本發明之硬化性樹脂組成物係亦可包含著色劑。作為著色劑,可使用紅、藍、綠、黃、白、黑等的慣用周知的著色劑,顏料、染料、色素之任意皆可。
[Colorant]
The curable resin composition of the present invention may contain a colorant. As the colorant, conventionally known coloring agents such as red, blue, green, yellow, white, and black can be used, and any of pigments, dyes, and pigments may be used.

具體而言,可舉出編號有色指數(C.I.;染料及色彩師學會(The Society of Dyers an Colourists)發行)號碼者。Specifically, the number of C.I. (issued by the Society of Dyers an Colourists) number is mentioned.

作為紅色著色劑有單偶氮系、雙偶氮系、偶氮色澱系、苯并咪唑酮系、苝系、二酮基吡咯吡咯系、縮合偶氮系、蒽醌系、喹吖酮系等。作為藍色著色劑有酞青素系、蒽醌系等,顏料系係可使用分類為顏料(Pigment)的化合物。該等以外,亦可使用金屬取代或者無取代的酞青素化合物。作為綠色著色劑同樣地有酞青素系、蒽醌系、苝系。該等以外,亦可使用金屬取代或者無取代的酞青素化合物。作為黃色著色劑有單偶氮系、雙偶氮系、縮合偶氮系、苯并咪唑酮系、異吲哚啉酮系、蒽醌系等。作為白色著色劑可舉出金紅石型或銳鈦礦型氧化鈦等。作為黑色著色劑有碳黑系、黑鉛系、氧化鐵系、鈦黑、蒽醌系、氧化鈷系、氧化銅系、錳系、氧化銻系、氧化鎳系、苝系、苯胺系、硫化鉬、硫化鉍等。其他,依調整色調之目的亦可加入紫、橙、棕色等的著色劑。Examples of red colorants include monoazo, diazo, azo lake, benzimidazolone, hydrazone, diketopyrrole, condensed azo, anthraquinone, and quinacridone. Wait. Examples of the blue colorant include phthalocyanin-based, anthraquinone-based, and the like, and pigment-based compounds can be used as pigments. In addition to these, metal-substituted or unsubstituted phthalocyanin compounds may be used. As the green colorant, there are phthalocyanin-based, anthraquinone-based, and fluorene-based. In addition to these, metal-substituted or unsubstituted phthalocyanin compounds may be used. Examples of the yellow colorant include monoazo-based, disazo-based, condensed azo-based, benzimidazolone-based, isoindolinone-based, and anthraquinone-based. Examples of the white colorant include rutile-type or anatase-type titanium oxide. Examples of black colorants include carbon black, black lead, iron oxide, titanium black, anthraquinone, cobalt oxide, copper oxide, manganese, antimony oxide, nickel oxide, samarium, aniline, and sulfur. Molybdenum, bismuth sulfide, etc. In addition, according to the purpose of adjusting color tone, purple, orange, brown and other coloring agents can also be added.

著色劑的含有量,就提升硬化物的隱蔽性之觀點而言,相對於硬化性樹脂組成物全量,以固形分換算,較佳為含有0.18~0.50質量%。若以固形分換算為0.18質量%以上時,電路隱蔽性為優異,若為0.50質量%以下時,解析性為更加優異。又較佳為0.20質量%~0.40質量%。The content of the coloring agent is preferably 0.18 to 0.50% by mass in terms of solid content conversion with respect to the entire amount of the curable resin composition in terms of improving the concealment of the cured product. When the solid content is 0.18% by mass or more, the circuit concealability is excellent, and when it is 0.50% by mass or less, the resolution is more excellent. It is more preferably 0.20% by mass to 0.40% by mass.

[有機溶劑]
在組成物的調製、或塗佈至基板或者薄膜之際,就調整黏度等的目的下,本發明之硬化性樹脂組成物中亦可含有有機溶劑。作為有機溶劑,可使用甲基乙基酮、環己酮等的酮類;甲苯、二甲苯、四甲基苯等的芳香族烴類;溶纖劑、甲基溶纖劑、丁基溶纖劑、卡必醇、甲基卡必醇、丁基卡必醇、丙二醇單甲基醚、二丙二醇單甲基醚、二丙二醇二乙基醚、二乙二醇單甲基醚乙酸酯、三丙二醇單甲基醚等的乙二醇醚類;乙酸乙酯、乙酸丁酯、乳酸丁酯、溶纖劑乙酸酯、丁基溶纖劑乙酸酯、卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲基醚乙酸酯、二丙二醇單甲基醚乙酸酯、碳酸丙烯酯等的酯類;辛烷、癸烷等的脂肪族烴類;石油醚、石油腦、溶劑石油腦等的石油系溶劑等的周知慣用的有機溶劑。該等的有機溶劑係可單獨1種或可組合2種以上來使用。
[Organic solvents]
When the composition is prepared or applied to a substrate or a film, the curable resin composition of the present invention may contain an organic solvent for the purpose of adjusting the viscosity and the like. As the organic solvent, ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; cellosolve, methyl cellosolve, butyl cellosolve, Carbitol, methylcarbitol, butylcarbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, diethylene glycol monomethyl ether acetate, tripropylene glycol Glycol ethers such as monomethyl ether; ethyl acetate, butyl acetate, butyl lactate, cellosolve acetate, butyl cellosolve acetate, carbitol acetate, butyl carbitol Esters of acetate, propylene glycol monomethyl ether acetate, dipropylene glycol monomethyl ether acetate, propylene carbonate, etc .; aliphatic hydrocarbons such as octane, decane; petroleum ether, petroleum naphtha, solvents Well-known and commonly used organic solvents such as petroleum-based solvents such as petrolatum. These organic solvents may be used alone or in combination of two or more.

[其他的任意成分]
因應所需,本發明之硬化性樹脂組成物中可進而調配光起始助劑、氰酸酯化合物、彈性體、巰基化合物、胺基甲酸酯化觸媒、觸變劑、密著促進劑、嵌段共聚物、鏈轉移劑、阻聚劑、銅害抑制劑、抗氧化劑、防鏽劑、微粉二氧化矽、有機膨潤土、微晶高嶺石等的增稠劑、聚矽氧系、氟系、高分子系等的消泡劑及/或調平劑、咪唑系、噻唑系、三唑系等的矽烷偶合劑、亞膦酸鹽、燐酸酯衍生物、磷腈化合物等的磷化合物等的阻燃劑等的成分。該等係可使用在電子材料的領域中為周知之物。
[Other optional ingredients]
According to the requirements, the curable resin composition of the present invention may further be formulated with a photoinitiator, a cyanate compound, an elastomer, a mercapto compound, a urethane catalyst, a thixotropic agent, and an adhesion promoter. , Block copolymers, chain transfer agents, polymerization inhibitors, copper inhibitors, antioxidants, rust inhibitors, micronized silica, organic bentonite, thickeners such as microcrystalline kaolinite, polysiloxanes, fluorine Based, polymer based defoamers and / or leveling agents, silane coupling agents such as imidazole, thiazole, and triazole, phosphorous compounds such as phosphites, osmates, and phosphazene compounds And other components such as flame retardants. These systems are well known in the field of electronic materials.

本發明之硬化性樹脂組成物係可進行乾膜化來使用,亦可以液狀來使用。又,若作為液狀時,可以是單液性,亦可以是2液性以上。The curable resin composition of the present invention may be used in a dry form, or may be used in a liquid form. Moreover, when it is liquid, it may be a single liquid or two or more liquids.

本發明之硬化性樹脂組成物係用來形成作為阻焊劑或覆蓋膜、層間絕緣層等的印刷配線板的永久被膜的圖型層為有用,特別是對於阻焊劑的形成為有用。又,本發明之硬化性樹脂組成物,即使是薄膜亦可形成膜強度為優異的硬化物,故亦可適合使用於要求薄膜化的印刷配線板、例如半導體封裝基板(半導體封裝中所使用的印刷配線板)中的圖型層的形成。進而,由本發明之硬化性樹脂組成物所得到的硬化物,即使就解析性且熱尺寸穩定性為優異之方面而言,亦因此適合使用於要求微細的圖型形成或高密度安裝的半導體封裝基板中的永久被膜的形成。The curable resin composition of the present invention is useful as a pattern layer for forming a permanent film of a printed wiring board such as a solder resist, a cover film, and an interlayer insulating layer, and is particularly useful for forming a solder resist. In addition, the curable resin composition of the present invention can form a cured product having excellent film strength even with a thin film, and is therefore suitable for use in printed wiring boards that require thinning, such as semiconductor package substrates (used in semiconductor packages). Formation of patterned layers in printed wiring boards). Furthermore, the cured product obtained from the curable resin composition of the present invention is suitable for use in semiconductor packages that require fine pattern formation or high-density mounting, even in terms of resolvability and excellent thermal dimensional stability. Formation of a permanent coating in a substrate.

(乾膜)
本發明之硬化性樹脂組成物亦可設為乾膜的形態,其具備有:支撐(載體)薄膜、與形成於該支撐薄膜上的由上述硬化性樹脂組成物所成的已乾燥的樹脂層。於進行乾膜化時,利用上述有機溶劑來稀釋本發明之硬化性樹脂組成物並調整成適當的黏度,以逗點塗佈、刮刀塗佈、唇嘴塗佈、棒塗佈、壓輥塗佈、反向滾筒塗佈、傳料輥塗佈、凹版塗佈、噴霧塗佈等,以均勻的厚度來塗佈至支撐薄膜上,一般以50~130℃的溫度來乾燥1~30分鐘,從而可得到膜。關於塗佈膜厚並無特別制限,但通常乾燥後的膜厚在1~150μm,較佳為在10~60μm的範圍來進行適當選擇。
(Dry film)
The curable resin composition of the present invention may be in the form of a dry film, and includes a support (carrier) film and a dried resin layer formed of the curable resin composition formed on the support film. . When dry filming is performed, the above-mentioned organic solvent is used to dilute the curable resin composition of the present invention and adjust it to an appropriate viscosity, and apply comma coating, doctor blade coating, lip and mouth coating, rod coating, and pressure roller coating. Cloth, reverse roll coating, transfer roll coating, gravure coating, spray coating, etc., are applied to the support film with a uniform thickness, and generally dried at a temperature of 50 to 130 ° C for 1 to 30 minutes. Thus, a film can be obtained. There is no particular limitation on the thickness of the coating film, but the film thickness after drying is usually 1 to 150 μm, preferably 10 to 60 μm, and is appropriately selected.

作為支撐薄膜係可使用塑膠薄膜,以使用聚對苯二甲酸乙二醇酯(PET)等的聚酯薄膜、聚醯亞胺薄膜、聚醯胺醯亞胺薄膜、聚丙烯薄膜、聚苯乙烯薄膜等的塑膠薄膜為較佳。關於支撐薄膜的厚度並無特別限制,但通常在10~150μm的範圍來進行適當選擇。As the supporting film, a plastic film can be used, and a polyester film such as polyethylene terephthalate (PET), a polyimide film, a polyimide film, a polypropylene film, and a polystyrene can be used. Plastic films such as films are preferred. There is no particular limitation on the thickness of the support film, but it is usually appropriately selected in the range of 10 to 150 μm.

在支撐薄膜上形成本發明之硬化性樹脂組成物的樹脂層後,進而為了防止樹脂層的表面附著異物等的目的下,以在樹脂層的表面層合能夠剝離的保護(覆蓋)薄膜為較佳。作為能夠剝離的保護薄膜,可使用例如聚乙烯薄膜、聚四氟乙烯薄膜、聚丙烯薄膜、經表面處理的紙等,將保護薄膜剝離時,相較於樹脂層與支撐薄膜的接著力,只要是樹脂層與保護薄膜的接著力為較小即可。After the resin layer of the curable resin composition of the present invention is formed on a support film, in order to prevent foreign matter from adhering to the surface of the resin layer, a protective (covering) film that can be peeled off is laminated on the surface of the resin layer. good. As a peelable protective film, for example, a polyethylene film, a polytetrafluoroethylene film, a polypropylene film, a surface-treated paper, or the like can be used. When peeling the protective film, compared with the adhesion between the resin layer and the support film, as long as The adhesive force between the resin layer and the protective film may be small.

尚,本發明中係可以是藉由在上述保護薄膜上塗佈本發明之硬化性樹脂組成物並使其乾燥來形成樹脂層,並在其表面層合支撐薄膜。即,本發明中於製造乾膜時,作為塗佈本發明之硬化性樹脂組成物的薄膜,亦可使用支撐薄膜及保護薄膜中的任一者。In the present invention, a resin layer may be formed by applying the curable resin composition of the present invention on the protective film and drying it, and a support film may be laminated on the surface. That is, in the production of the dry film in the present invention, as the film to which the curable resin composition of the present invention is applied, any of a support film and a protective film may be used.

(硬化物)
本發明之硬化物為將上述本發明之硬化性樹脂組成物、或上述本發明之乾膜的樹脂層進行硬化而得到者,故具有優異的解析性與熱尺寸穩定性。
(Hardened)
The cured product of the present invention is obtained by curing the curable resin composition of the present invention or the resin layer of the dry film of the present invention, and therefore has excellent resolvability and thermal dimensional stability.

(印刷配線板)
本發明之印刷配線板係具有由本發明之硬化性樹脂組成物或乾膜的樹脂層所得到的硬化物。作為本發明之印刷配線板的製造方法,例如,藉由使用上述有機溶劑,將本發明之硬化性樹脂組成物調整成適合於塗佈方法的黏度,並藉由浸漬塗佈法、流動塗佈法、輥塗法、棒塗佈法、網板印刷法、簾幕塗佈法等的方法塗佈至基材上後,以60~100℃的溫度使組成物中所包含的有機溶劑揮發乾燥(暫時乾燥),從而形成不黏的樹脂層。又,若為乾膜時,藉由貼合機等以樹脂層與基材接觸之方式貼合至基材上後,藉由將支撐薄膜剝下,從而在基材上形成樹脂層。
(Printed wiring board)
The printed wiring board of this invention is a hardened | cured material obtained from the resin layer of the curable resin composition or dry film of this invention. As a method for manufacturing a printed wiring board of the present invention, for example, the curable resin composition of the present invention is adjusted to a viscosity suitable for a coating method by using the above-mentioned organic solvent, and the dip coating method and flow coating are used. Method, roll coating method, rod coating method, screen printing method, curtain coating method, etc. After coating onto the substrate, the organic solvent contained in the composition is evaporated to dryness at a temperature of 60 to 100 ° C. (Temporarily dried), thereby forming a non-stick resin layer. In the case of a dry film, a resin layer is formed on the base material by laminating the support film to the base material with a bonding machine or the like so that the resin layer is in contact with the base material.

作為上述基材,除預先藉由銅等來形成電路的印刷配線板或可撓性印刷配線板以外,可使用採取紙-苯酚、紙-環氧、玻璃布環氧、玻璃聚醯亞胺、玻璃布/不織布環氧、玻璃布/紙-環氧、合成纖維環氧、氟樹脂・聚乙烯・聚苯醚,聚苯醚・氰酸酯等的高周波電路用覆銅層合板等的材質,且全部的等級(FR-4等)的覆銅層合板、其他、金屬基板、聚醯亞胺薄膜、聚對苯二甲酸乙二醇酯薄膜、聚萘二甲酸乙二醇酯(PEN)薄膜、玻璃基板、陶瓷基板、晶圓板等。As the substrate, in addition to a printed wiring board or a flexible printed wiring board in which a circuit is formed by copper in advance, paper-phenol, paper-epoxy, glass cloth epoxy, glass polyimide, Materials such as glass cloth / non-woven epoxy, glass cloth / paper-epoxy, synthetic fiber epoxy, fluororesin, polyethylene, polyphenylene ether, polyphenylene ether, cyanate, etc. All grades (FR-4, etc.) of copper-clad laminates, other, metal substrates, polyimide films, polyethylene terephthalate films, polyethylene naphthalate (PEN) films , Glass substrate, ceramic substrate, wafer plate, etc.

於塗佈本發明之硬化性樹脂組成物後所進行的揮發乾燥,可使用熱風循環式乾燥爐、IR爐、加熱板、對流加熱烤箱等(使用具備藉由蒸氣之空氣加熱方式的熱源者,使乾燥機內的熱風逆流接觸之方法及藉由噴嘴噴吹支撐體之方式)來進行。After volatilizing drying after coating the curable resin composition of the present invention, a hot-air circulation drying oven, an IR oven, a heating plate, a convection heating oven, etc. can be used (those who use a heat source with air heating by steam, The method of contacting the hot air in the dryer with countercurrent flow and the method of spraying the support by a nozzle) are performed.

在基材上形成樹脂層後,通過形成指定的圖型的光罩,藉由選擇性的活性能量線來進行曝光,並將未曝光部藉由稀鹼水溶液(例如,0.3~3質量%碳酸鈉水溶液)來進行顯影,從而形成硬化物的圖型。進而,藉由對硬化物照射活性能量線照射後予以加熱硬化(例如100~220℃)、或者加熱硬化後照射活性能量線、或僅以加熱硬化來予以最終完成硬化(主硬化),從而形成密著性、硬度等的諸特性為優異的硬化膜。After the resin layer is formed on the substrate, a photomask with a predetermined pattern is formed, and exposure is performed by selective active energy rays. Sodium hydroxide solution) to develop a pattern of a cured product. Furthermore, the hardened object is irradiated with active energy rays and then heat-cured (for example, 100 to 220 ° C.), or after heating and hardening, the active energy rays are irradiated, or only by heat-curing to finally complete hardening (main hardening), thereby forming Various properties such as adhesion and hardness are excellent cured films.

作為上述活性能量線照射中所用的曝光機,只要是搭載高壓水銀燈燈、超高壓水銀燈、金屬鹵素燈、水銀短弧燈等,照射在350~450nm的範圍之紫外線的裝置即可,進而亦可使用直接描繪裝置(例如藉由來自電腦的CAD數據以直接雷射來描繪圖像的雷射直接成像裝置)。作為直接描繪機的燈光源或雷射光源係以最大波長為350~450nm的範圍內者為佳。用來圖像形成的曝光量係依膜厚等而有所不同,但通常為10~1000mJ/cm2 ,較佳可設為20~800mJ/cm2 的範圍內。The exposure machine used in the above-mentioned active energy ray irradiation may be a device equipped with a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a metal halide lamp, a mercury short-arc lamp, and the like, and irradiates ultraviolet rays in the range of 350 to 450 nm, and may also Use a direct rendering device (such as a laser direct imaging device that draws an image with a direct laser by CAD data from a computer). The lamp light source or laser light source used as the direct drawing machine is preferably in a range of a maximum wavelength of 350 to 450 nm. The exposure amount used for image formation varies depending on the film thickness and the like, but it is usually 10 to 1000 mJ / cm 2 , and preferably it can be set in the range of 20 to 800 mJ / cm 2 .

作為上述顯影方法係可藉由浸漬法、冲洗法、噴霧法、刷式法等,作為顯影液係可使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、胺類等的鹼水溶液。As the developing method, a dipping method, a rinsing method, a spray method, a brush method, and the like can be used. As a developing solution system, potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, and ammonia can be used. , Amines and other alkaline aqueous solutions.

本發明之硬化性樹脂組成物,不僅可使用於藉由如上述般的顯影液來形成硬化膜的圖型之用途,亦可使用於不形成圖型之用途,例如,壓模用途(密封用途)。

[實施例]
The curable resin composition of the present invention can be used not only for applications in which a pattern of a cured film is formed by using a developer as described above, but also for applications where no pattern is formed, such as a stamper application (sealing application). ).

[Example]

以下,藉由實施例、比較例來更詳細地說明本發明,但本發明並非受該等實施例、比較例所限制。尚,下述表示有「份」及「%」,除非另有說明,否則全部為質量基準。Hereinafter, the present invention will be described in more detail through examples and comparative examples, but the present invention is not limited by these examples and comparative examples. However, the following indicates "parts" and "%", unless otherwise stated, all are quality standards.

(含有羧基的感光性樹脂清漆A之合成)
在具備有溫度計、氮導入裝置兼環氧烷烴導入裝置及攪拌裝置的高壓釜中,導入酚醛清漆型甲酚樹脂(商品名「Shonol CRG951」、昭和電工(股)製、OH當量:119.4) 119.4質量份、氫氧化鉀1.19質量份及甲苯119.4質量份,一邊攪拌一邊將系內以氮來進行取代,並進行加熱昇溫。接下來,緩慢地滴入環氧丙烷63.8質量份,並以125~132℃、0~4.8kg/cm2 下使其反應16小時。之後,冷卻至室溫,在該反應溶液中添加混合89%磷酸1.56質量份來中和氫氧化鉀,從而得到不揮發分62.1%、羥基價為182.2mgKOH/g(307.9g/eq.)的酚醛清漆型甲酚樹脂的環氧丙烷反應溶液。此係酚性羥基每1當量加成有平均1.08莫耳的環氧烷烴。
將所得到的酚醛清漆型甲酚樹脂的環氧烷烴反應溶液293.0質量份、丙烯酸43.2質量份、甲烷磺酸11.53質量份、甲基氫醌0.18質量份及甲苯252.9質量份,導入至具備有攪拌機、溫度計及空氣吹入管的反應器中,將空氣以10ml/分的速度來進行吹入,一邊攪拌一邊以110℃使其反應12小時。因反應所生成的水係以作為與甲苯的共沸混合物,而餾出12.6質量份的水。之後,冷卻至室溫,將所得的反應溶液以15%氫氧化鈉水溶液35.35質量份來進行中和,接下來進行水洗。之後,藉由蒸發器,將甲苯以二乙二醇單乙基醚乙酸酯118.1質量份來取代之同時並餾除,從而得到酚醛清漆型丙烯酸酯樹脂溶液。接下來,將所得到的酚醛清漆型丙烯酸酯樹脂溶液332.5質量份及三苯基膦1.22質量份,裝入至具備有攪拌器、溫度計及空氣吹入管的反應器中,將空氣以10ml/分的速度來進行吹入,一邊攪拌一邊緩慢添加四氫鄰苯二甲酸酐60.8質量份,以95~101℃使其反應6小時,冷卻後取出。以如此般之方式,得到不揮發成分為70.6質量%、固形物的酸價為87.7mgKOH/g的感光性的含有羧基的樹脂的溶液。
(Synthesis of photosensitive resin varnish A containing carboxyl group)
Into an autoclave equipped with a thermometer, a nitrogen introduction device, an alkylene oxide introduction device, and a stirring device, a novolac type cresol resin (trade name "Shonol CRG951", manufactured by Showa Denko Corporation, OH equivalent: 119.4) 119.4 Parts by mass, 1.19 parts by mass of potassium hydroxide, and 119.4 parts by mass of toluene, the inside of the system was replaced with nitrogen while stirring, and the temperature was raised by heating. Next, 63.8 parts by mass of propylene oxide was slowly added dropwise, and reacted at 125 to 132 ° C. and 0 to 4.8 kg / cm 2 for 16 hours. After that, the mixture was cooled to room temperature, and 1.56 parts by mass of 89% phosphoric acid was added to the reaction solution to neutralize potassium hydroxide, thereby obtaining 62.1% nonvolatile matter and a hydroxyl value of 182.2 mgKOH / g (307.9 g / eq.). A propylene oxide reaction solution of a novolac type cresol resin. This phenolic hydroxyl group has an average of 1.08 moles of alkylene oxide per 1 equivalent.
293.0 parts by mass of the obtained novolac cresol resin, 43.2 parts by mass of acrylic acid, 11.53 parts by mass of methanesulfonic acid, 0.18 parts by mass of methylhydroquinone, and 252.9 parts by mass of toluene were introduced into a equipped mixer In a reactor using a thermometer, an air blowing tube, air was blown in at a rate of 10 ml / min, and the reaction was performed at 110 ° C. for 12 hours while stirring. The water system produced by the reaction was used as an azeotropic mixture with toluene, and 12.6 parts by mass of water was distilled off. After that, it was cooled to room temperature, and the obtained reaction solution was neutralized with 35.35 parts by mass of a 15% sodium hydroxide aqueous solution, followed by washing with water. Thereafter, toluene was replaced with 118.1 parts by mass of diethylene glycol monoethyl ether acetate by an evaporator, and distilled off to obtain a novolac type acrylate resin solution. Next, 332.5 parts by mass of the obtained novolak type acrylate resin solution and 1.22 parts by mass of triphenylphosphine were charged into a reactor equipped with a stirrer, a thermometer, and an air blowing tube, and air was added at 10 ml / min. The mixture was blown at a high speed, 60.8 parts by mass of tetrahydrophthalic anhydride was slowly added while stirring, and the mixture was reacted at 95 to 101 ° C. for 6 hours, and then taken out after cooling. In such a manner, a solution of a photosensitive carboxyl group-containing resin having a nonvolatile content of 70.6% by mass and an acid value of a solid of 87.7 mgKOH / g was obtained.

<硬化性樹脂組成物之調製>
根據下述之表1、2中所表示之調配來調配各成分,並藉由攪拌機進行預備混合後,利用3輥磨機使其分散並混練,分別來調製硬化性樹脂組成物。表中的調配量係表示質量份。使用所得到的實施例及比較例的硬化性樹脂組成物,並進行如同下述般的評估。
<Preparation of curable resin composition>
Each component was prepared according to the formulation shown in Tables 1 and 2 below, and after pre-mixing by a stirrer, it was dispersed and kneaded with a 3-roll mill to prepare a curable resin composition, respectively. The blending amount in the table indicates parts by mass. The obtained examples and comparative examples were used, and evaluation was performed as follows.

<乾膜之製作>
將各實施例及比較例的硬化性樹脂組成物,分別以甲基乙基酮來進行適當稀釋後,使用塗抹器以乾燥後的膜厚成為15μm之方式來塗佈在PET薄膜(Toray公司製、FB-50、厚度16μm)上,並以80℃使其乾燥30分鐘,從而得到乾膜。
< Production of dry film >
The curable resin compositions of Examples and Comparative Examples were each appropriately diluted with methyl ethyl ketone, and then applied to a PET film (manufactured by Toray Co., Ltd.) so that the film thickness after drying was 15 μm using an applicator. , FB-50, thickness 16 μm), and dried at 80 ° C. for 30 minutes to obtain a dry film.

<評估基板之製作方法>
使用真空貼合機(Nikko-Materials製CVP-300),以加壓力:0.4MPa、80℃、1分鐘、真空度:3hPa之條件下,將以上述方法所製作的乾膜加熱層合至形成有經化學研磨(MEC (股)CZ-8101)的銅電路的印刷配線板上,並以70℃、0.5MPa進行平板壓製,從而得到具有未曝光的阻焊劑層(乾膜)的印刷基板。將該基板使用φ80μm的光罩並使用搭載高壓水銀燈(短弧燈)的曝光裝置,以基準曝光量進行曝光,並剝離PET薄膜。之後,使用30℃的1質量%Na2 CO3 水溶液,並以噴霧壓2kg/cm2 的條件下分別進行60、90、120秒鐘顯影,從而得到具有經圖型形成的被膜的基板。將該基板藉由UV輸送帶爐,以累積曝光量1000mJ/cm2 的條件下照射紫外線後,再以160℃加熱60分鐘來硬化被膜。
< Method of making evaluation board >
Using a vacuum laminator (CVP-300 manufactured by Nikko-Materials), the dry film produced by the above method was heated to form a pressure under the conditions of pressure: 0.4 MPa, 80 ° C, 1 minute, and vacuum: 3 hPa. A printed wiring board having a chemically polished (MEC (stock) CZ-8101) copper circuit was subjected to flat pressing at 70 ° C and 0.5 MPa to obtain a printed substrate having an unexposed solder resist layer (dry film). This substrate was exposed using a mask of φ80 μm and an exposure device equipped with a high-pressure mercury lamp (short arc lamp) at a standard exposure amount, and the PET film was peeled off. Thereafter, a 1% by mass Na 2 CO 3 aqueous solution was used at 30 ° C., and development was performed under conditions of a spray pressure of 2 kg / cm 2 for 60, 90, and 120 seconds, respectively, to obtain a substrate having a film formed by patterning. This substrate was irradiated with ultraviolet rays under a condition of a cumulative exposure of 1000 mJ / cm 2 in a UV conveyor furnace, and then heated at 160 ° C. for 60 minutes to harden the film.

<解析性之評估>
利用截面觀察來評估藉由上述方法所得到的評估基板的φ80μm的開口圖型底部的顯影液滲入(底切)的大小。
◎:未發現底切。
○:底切未滿5μm。
△:底切為5~10μm。
×1 :底切超過10μm。
×2 :在開口部具有殘渣。
< Analytical Evaluation >
The size of the developer infiltration (undercut) at the bottom of the opening pattern of φ80 μm of the evaluation substrate obtained by the above method was evaluated by cross-sectional observation.
:: No undercut was found.
○: Undercut is less than 5 μm.
△: The undercut is 5 to 10 μm.
× 1 : Undercut exceeds 10 μm.
× 2 : There is a residue in the opening.

<PCT耐性之評估>
使用PCT裝置(ESPEC公司製HAST SYSTEM TPC-412MD)並以121℃、飽和、0.2MPa的條件下,將藉由上述方法所得到的評估基板進行168小時PCT(Pressure Cooker Test)。又,評估PCT後的塗膜的狀態。判定基準係如以下般。
○:沒有膨脹、剝落、變色、溶出者。
△:發現些許膨脹、剝落、變色、溶出者。
×:發現大量膨脹、剝落、變色、溶出者。
< Evaluation of PCT resistance >
Using an PCT device (HAST SYSTEM TPC-412MD manufactured by ESPEC), the evaluation substrate obtained by the above method was subjected to a PCT (Pressure Cooker Test) for 168 hours under conditions of 121 ° C, saturation, and 0.2 MPa. Moreover, the state of the coating film after PCT was evaluated. The determination criteria are as follows.
○: No swelling, peeling, discoloration, or dissolution.
△: Swelling, peeling, discoloration, or dissolution were found.
×: Many swelling, peeling, discoloration, and dissolution were found.

<TCT耐性之評估>
採用與上述之評估基板為相同的方法,在封裝用基板上形成具有Si晶片的安裝圖型的硬化被膜。之後,對該基板進行Au鍍敷處理、形成焊錫凸塊,並安裝Si晶片,而得到TCT評估基板。
將以上述所得到的TCT評估基板放入至冷熱循環機中,該冷熱循環機為在-65℃與150℃之間進行溫度循環,來進行TCT。又,觀察於600循環時、800循環時及1000循環時的硬化被膜的表面。判定基準係如以下般。
◎:在1000循環時無異常。
○:在800循環時無異常,在1000循環時產生裂隙。
△:在600循環時無異常,在800循環時產生裂隙。
×:在600循環時產生裂隙。
< Evaluation of TCT resistance >
By the same method as the above-mentioned evaluation substrate, a hardened film having a mounting pattern of a Si wafer is formed on the packaging substrate. Thereafter, the substrate was subjected to an Au plating process, a solder bump was formed, and a Si wafer was mounted to obtain a TCT evaluation substrate.
The TCT evaluation substrate obtained as described above was placed in a hot and cold cycler, which performs TCT by performing temperature cycling between -65 ° C and 150 ° C. The surface of the cured film was observed at 600 cycles, 800 cycles, and 1000 cycles. The determination criteria are as follows.
:: No abnormality at 1000 cycles.
○: No abnormality at 800 cycles, and cracks occurred at 1000 cycles.
△: No abnormality at 600 cycles, and cracks occurred at 800 cycles.
×: Cracks occurred at 600 cycles.

將該等的評估結果合併表示於下述表中。These evaluation results are combined and shown in the following table.

*1:上述合成的清漆A(不揮發成分70.6%)
*2:Omnirad TPO(IGM公司製,2,4,6-三甲基苯甲醯基-二苯基氧化膦)
*3:jER834(Mitsubishi Chemical(股)製,雙酚A型環氧樹脂(常溫下為半固形 環氧當量250)
*4:NC-3000H(日本化藥(股)製,聯苯-苯酚型環氧樹脂(常溫下為固形 環氧當量290)
*5:jER828(Mitsubishi Chemical(股)製,雙酚A型環氧樹脂(常溫下為液狀 環氧當量190)
*6:SFP-30M(Denca(股)製,球狀二氧化矽、平均粒徑0.8μm、比重4.4g/cm3 )
*7:BRIACE B-31(堺化學工業(股)製,硫酸鋇、不定形、平均粒徑0.3μm、比重2.2g/cm3 )
*8:DPHA(日本化藥(股)製,二季戊四醇五丙烯酸酯)
*9:三聚氰胺(日產化學工業(股)製)
*10:DICY(Mitsubishi Chemical(股)製,二氰二胺)
* 1: Varnish A synthesized above (non-volatile content 70.6%)
* 2: Omnirad TPO (manufactured by IGM, 2,4,6-trimethylbenzylidene-diphenylphosphine oxide)
* 3: jER834 (Mitsubishi Chemical Co., Ltd., bisphenol A epoxy resin (semi-solid epoxy equivalent at normal temperature 250)
* 4: NC-3000H (manufactured by Nippon Kayaku Co., Ltd., biphenyl-phenol type epoxy resin (solid epoxy equivalent at normal temperature is 290)
* 5: jER828 (Mitsubishi Chemical Co., Ltd., bisphenol A epoxy resin (liquid epoxy equivalent 190 at normal temperature)
* 6: SFP-30M (Denca (strand), spherical silica, average particle diameter 0.8 μm, specific gravity 4.4 g / cm 3 )
* 7: BRIACE B-31 (manufactured by Sakai Chemical Industry Co., Ltd., barium sulfate, amorphous, average particle size 0.3 μm, specific gravity 2.2 g / cm 3 )
* 8: DPHA (manufactured by Nippon Kayaku Co., Ltd., dipentaerythritol pentaacrylate)
* 9: Melamine (made by Nissan Chemical Industries, Ltd.)
* 10: DICY (manufactured by Mitsubishi Chemical Co., Ltd., dicyandiamine)

由上述表中所表示之評估結果可明確得知,各實施例當中,於顯影時不易產生因底切而造成的解析性的惡化,並可得到高溫高濕耐性(PCT耐性)或冷熱循環耐性(TCT耐性)為優異的硬化物。From the evaluation results shown in the above table, it is clear that in each of the examples, degradation of the resolution due to undercuts during development is not easy, and high temperature and high humidity resistance (PCT resistance) or cold and heat cycle resistance can be obtained (TCT resistance) is an excellent cured product.

Claims (5)

一種硬化性樹脂組成物,含有: (A)含有羧基的樹脂、 (B)光聚合起始劑、 (C)環氧樹脂及 (D)無機填料,其特徵為, 作為前述(C)環氧樹脂,含有具有聯苯骨架的環氧樹脂及此以外的常溫下為固形或半固形的環氧樹脂, 作為前述(D)無機填料,含有球狀二氧化矽及硫酸鋇,且前述球狀二氧化矽與前述硫酸鋇的調配比例,以體積比為1:(0.5~5)。A hardening resin composition containing: (A) a carboxyl group-containing resin, (B) photopolymerization initiator, (C) Epoxy resin and (D) an inorganic filler characterized by, The epoxy resin (C) includes an epoxy resin having a biphenyl skeleton and an epoxy resin that is solid or semi-solid at ordinary temperatures other than that, The inorganic filler (D) contains spherical silica and barium sulfate, and the mixing ratio of the spherical silica and the barium sulfate is 1: (0.5 to 5) in volume ratio. 如請求項1之硬化性樹脂組成物,其中前述(B)光聚合起始劑,包含醯基膦氧化物系聚合起始劑。The curable resin composition according to claim 1, wherein the (B) photopolymerization initiator includes a fluorenylphosphine oxide-based polymerization initiator. 一種乾膜,其特徵為具有由請求項1之硬化性樹脂組成物所得到的樹脂層。A dry film comprising a resin layer obtained from the curable resin composition of claim 1. 一種硬化物,其特徵為使請求項1或2之硬化性樹脂組成物、或請求項3之乾膜之由硬化性樹脂組成物所成的樹脂層硬化來得到。A cured product obtained by curing a resin layer made of a curable resin composition of claim 1 or 2 or a dry film of claim 3 of a dry film. 一種印刷配線板,其特徵為具有請求項4之硬化物。A printed wiring board having a hardened body according to claim 4.
TW108105392A 2018-03-30 2019-02-19 Curable resin composition, dry film formed of the composition, cured product and printed wiring board having the cured product capable of avoiding problems such as solder resist peeling and undercut TW201942247A (en)

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