WO2017170958A1 - Curable resin composition, dry film, cured product and printed wiring board - Google Patents
Curable resin composition, dry film, cured product and printed wiring board Download PDFInfo
- Publication number
- WO2017170958A1 WO2017170958A1 PCT/JP2017/013453 JP2017013453W WO2017170958A1 WO 2017170958 A1 WO2017170958 A1 WO 2017170958A1 JP 2017013453 W JP2017013453 W JP 2017013453W WO 2017170958 A1 WO2017170958 A1 WO 2017170958A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- resin composition
- curable resin
- group
- cured product
- resin
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims abstract description 68
- 239000003822 epoxy resin Substances 0.000 claims abstract description 125
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 125
- 229920005989 resin Polymers 0.000 claims abstract description 108
- 239000011347 resin Substances 0.000 claims abstract description 108
- 150000001875 compounds Chemical class 0.000 claims abstract description 42
- 239000004593 Epoxy Substances 0.000 claims abstract description 41
- 239000011256 inorganic filler Substances 0.000 claims abstract description 41
- 229910003475 inorganic filler Inorganic materials 0.000 claims abstract description 41
- 229920001187 thermosetting polymer Polymers 0.000 claims abstract description 29
- 239000002245 particle Substances 0.000 claims abstract description 22
- 238000010438 heat treatment Methods 0.000 claims abstract description 10
- 239000003999 initiator Substances 0.000 claims abstract description 10
- 238000005259 measurement Methods 0.000 claims abstract description 10
- 230000001588 bifunctional effect Effects 0.000 claims description 32
- 238000003860 storage Methods 0.000 claims description 22
- 230000008859 change Effects 0.000 claims description 15
- 229910000679 solder Inorganic materials 0.000 claims description 15
- 239000007787 solid Substances 0.000 claims description 12
- 238000001035 drying Methods 0.000 claims description 9
- 238000013329 compounding Methods 0.000 claims description 6
- 239000010408 film Substances 0.000 description 64
- 239000000047 product Substances 0.000 description 46
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- -1 cyclic carbonate compound Chemical class 0.000 description 37
- 239000010410 layer Substances 0.000 description 35
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- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 29
- 239000000203 mixture Substances 0.000 description 23
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 21
- 238000000034 method Methods 0.000 description 19
- 239000000377 silicon dioxide Substances 0.000 description 19
- 125000003700 epoxy group Chemical group 0.000 description 18
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 17
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 17
- 239000000463 material Substances 0.000 description 17
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- 239000000243 solution Substances 0.000 description 17
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 15
- 238000006243 chemical reaction Methods 0.000 description 15
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 15
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- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 8
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- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
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- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 6
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- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
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- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 4
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- 239000011889 copper foil Substances 0.000 description 4
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 4
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- KUAZQDVKQLNFPE-UHFFFAOYSA-N thiram Chemical compound CN(C)C(=S)SSC(=S)N(C)C KUAZQDVKQLNFPE-UHFFFAOYSA-N 0.000 description 1
- 229960002447 thiram Drugs 0.000 description 1
- 239000013008 thixotropic agent Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 229920006305 unsaturated polyester Polymers 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 235000015112 vegetable and seed oil Nutrition 0.000 description 1
- 239000008158 vegetable oil Substances 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 235000014692 zinc oxide Nutrition 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K9/00—Use of pretreated ingredients
- C08K9/04—Ingredients treated with organic substances
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
Definitions
- the present invention relates to a curable resin composition, a dry film, a cured product, and a printed wiring board.
- IC package instead of IC packages called QFP (Quad Flat Pack Package), SOP (Small Outline Package), etc., BGA (Ball Grid Array), CSP (Chip Scale Package), etc. IC package called is used.
- FC-BGA Flexible Chip Ball Grid Array
- FC-BGA Flexible Resist Opening
- a printed wiring board also referred to as a package substrate
- SRO solder Resist Opening
- Patent Document 1 discloses that the crack resistance is improved by an elastomer.
- an object of the present invention is to provide a curable resin composition capable of obtaining a cured product having excellent crack resistance when a high temperature load is applied, a dry film having a resin layer obtained from the composition, the composition or the dry composition. It is providing the hardened
- Stress mainly consists of (1) stress generated by thermal linear expansion (CTE) difference between solder resist and peripheral members (copper, base material, etc.), and (2) gas generated by thermal history during packaging (solder resist And (3) stress (strain) generated by the crosslinking reaction in the solder resist due to the thermal history after mounting.
- CTE thermal linear expansion
- strain stress generated by the crosslinking reaction in the solder resist due to the thermal history after mounting.
- a method of blending an elastomer or the like into a solder resist to relieve stress or a method of reducing the solder resist to a high glass transition temperature (Tg) and a low CTE is based on the stress generated in (1) above.
- the behavior of the viscous component by DMA is a very important physical property for predicting the characteristics of a solder resist whose Tg is lower than the melting temperature of the solder.
- the change behavior of Tan ⁇ obtained by DMA has an important meaning, and a material having a large maximum value of the Tan ⁇ peak (for example, a material having physical properties as shown in FIG. 1) depends on mounting electronic components. A material that is flexible and flexible for the purpose of relieving mechanical stress is considered to be suitable.
- a material having a small maximum value of Tan ⁇ peak for example, a material having physical properties as shown in FIG. 2). Found that it is rigid and less temperature dependent so as not to lose stress.
- the Tan ⁇ value of DMA is 0.15 or less, the viscosity component in the cured product is small. It is possible to suppress the reaction from proceeding in part or causing a change in physical properties due to sparse cross-linking structure due to molecular motion in the vicinity of Tg. That is, since there is little temperature dependence and there are few physical property changes before and after Tg, the stress which generate
- the average particle diameter of the inorganic filler is set to a specific range, a specific reactive group is introduced into the inorganic filler, and the epoxy equivalent of the epoxy resin is within a specific value range. From the viewpoint that the cross-linking becomes dense, it has been found that it is effective for the stress (2).
- the curable resin composition of the present invention comprises (A) an alkali-soluble resin, (B) a thermosetting component, (C) a compound having an ethylenically unsaturated group, (D) a photopolymerization initiator, and (E ) A resin composition containing a surface-treated inorganic filler, wherein the (E) surface-treated inorganic filler has an average particle size of 100 nm to 1 ⁇ m, and (A) the alkali-soluble resin, It has a reactive group capable of reacting with at least one of the (B) thermosetting component and the (C) compound having an ethylenically unsaturated group, and as the (B) thermosetting component, an epoxy equivalent of 300 g / eq.
- the curable resin composition of the present invention has an epoxy equivalent of 300 g / eq.
- the following epoxy resins preferably include (B-1) a bifunctional or higher functional epoxy resin having a softening point of 40 ° C. or lower and (B-2) a bifunctional or higher functional epoxy resin having a softening point of 40 ° C. or lower.
- the compounding amount of the compound (C) having an ethylenically unsaturated group is preferably less than 20 parts by mass with respect to 100 parts by mass of the (A) alkali-soluble resin.
- the blending amount of the (E) surface-treated inorganic filler is preferably 35% by mass or more in the solid content of the curable resin composition.
- the curable resin composition of the present invention has a storage elastic modulus of 150 ° C. when a dynamic viscoelasticity measurement is performed from 25 ° C. to 300 ° C. under the conditions of a frequency of 1 Hz and a heating rate of 5 ° C./min. It is preferably 1 GPa or more and the change rate of the storage elastic modulus from 25 ° C. to 150 ° C. is within 70%.
- CTE ⁇ 2 of the cured product is preferably 110 ppm or less.
- the Tg of the cured product is preferably 160 ° C. or higher.
- the curable resin composition of the present invention is preferably used for forming a solder resist.
- the dry film of the present invention is characterized by having a resin layer obtained by applying the curable resin composition to the film and drying it.
- the cured product of the present invention is obtained by curing the curable resin composition or the resin layer of the dry film.
- the printed wiring board of the present invention is characterized by having the cured product.
- the curable resin composition which can obtain the hardened
- the cured product of the resin layer and a printed wiring board having the cured product can be provided.
- FIG. 1 is an image diagram showing storage elastic modulus, loss elastic modulus, and Tan ⁇ of a cured product having a large maximum value of Tan ⁇ peak.
- FIG. 2 is an image diagram showing storage elastic modulus, loss elastic modulus, and Tan ⁇ of a cured product having a small maximum value of Tan ⁇ peak.
- the curable resin composition of the present invention is such that the maximum value of Tan ⁇ of the cured product is 0.15 or less in the temperature range of 25 to 300 ° C. With such physical properties, the temperature of the cured film is low. Stable crack resistance can be obtained even when exposed to high temperatures.
- the physical properties of the cured product such as Tan ⁇ are further provided with a high-pressure mercury lamp after irradiating the resin layer after drying the resin composition with ultraviolet rays at about 500 mJ / cm 2. It means physical properties of a cured product having a thickness of 40 ⁇ m obtained by irradiating with an exposure amount of 1 J / cm 2 in a UV conveyor furnace and then heating at 160 ° C.
- the measured physical properties such as Tan ⁇ are based on a chart obtained by measuring from 25 ° C. to 300 ° C. under the conditions of a frequency of 1 Hz and a heating rate of 5 ° C./min.
- the loss elastic modulus (viscous component) is decreased, the storage elastic modulus (elastic component) is increased, or both are performed. In other words, the elastic component may be increased as much as possible in the cured product rather than the viscous component.
- Means for setting the maximum value of Tan ⁇ to 0.15 or less is not particularly limited, but the average particle diameter is 100 nm to 1 ⁇ m, and (A) an alkali-soluble resin, (B) a thermosetting component, and (C) ethylene.
- E When the average particle diameter of an inorganic filler is 1 micrometer or less, the surface area per volume is large and it can have many said reactive groups. On the other hand, when the average particle size is 100 nm or more, the shrinkage of the cured product is suppressed and the crack resistance is improved.
- Epoxy equivalent is 300 g / eq. As a thermosetting component.
- the number of cross-linking points with (A) alkali-soluble resin increases, so that the cross-linking density increases and unreacted (A) alkali-soluble resin and the like can be reduced.
- the maximum value of Tan ⁇ is reduced, the cured product is less likely to undergo a sudden change in elastic modulus at a high temperature around 150 ° C., and crack resistance is further improved. Therefore, the above (E) inorganic filler and epoxy equivalent are 300 g / eq.
- the maximum value of Tan ⁇ of the cured product becomes 0.15 or less in the range of 25 to 300 ° C., and stable crack resistance can be obtained. It is preferable that the maximum value of Tan ⁇ is 0.13 or less because crack resistance is further improved.
- Tan ⁇ of the cured product can be reduced by reducing the blending amount of the compound (C) having an ethylenically unsaturated group.
- the storage elastic modulus at 150 ° C. of the cured product of the curable resin composition of the present invention may be any value as long as the maximum value of Tan ⁇ of the cured product is 0.15 or less, but is 1 GPa or more. Is preferred. More preferably, it is 2 GPa or more.
- the storage elastic modulus is 1 GPa or more, resistance of the cured product to the water vapor pressure inside the package is improved, and crack resistance and insulation reliability are improved. Conventionally, in order to obtain crack resistance at high temperatures, it has been preferred that the change in storage elastic modulus is large for stress absorption.
- the rate of change in the storage elastic modulus is reduced to maintain the toughness even at high temperatures, thereby suppressing the generation of stress and the generation of cracks. It is.
- the change rate of the storage elastic modulus is small, and the change rate of the storage elastic modulus at 25 ° C. to 150 ° C. is preferably within 70%. More preferably, it is within 65%.
- the CTE ⁇ 2 of the cured product of the curable resin composition of the present invention is preferably 110 ppm or less, more preferably 100 ppm or less. As CTE ⁇ 2 is smaller, changes in physical properties can be reduced even at high temperatures.
- the curable resin composition of the present invention preferably has a Tg (glass transition temperature) of 160 ° C. or higher. More preferably, it is 165 ° C. or higher. The higher the Tg, the less the change in physical properties at high temperatures.
- (meth) acrylate is a term which generically refers to acrylate, methacrylate and a mixture thereof, and the same applies to other similar expressions.
- the alkali-soluble resin is, for example, a resin containing one or more alkali-soluble groups among phenolic hydroxyl groups, thiol groups, and carboxyl groups, preferably a compound having two or more phenolic hydroxyl groups, a carboxyl group-containing resin. , A compound having a phenolic hydroxyl group and a carboxyl group, and a compound having two or more thiol groups.
- (A) As the alkali-soluble resin a carboxyl group-containing resin or a phenolic hydroxyl group-containing resin can be used, but from the viewpoint of reactivity with (B) a thermosetting component and (E) an inorganic filler, a carboxyl group-containing resin. Is preferred.
- the alkali-soluble resin having a smaller weight average molecular weight is preferred because the proportion of alkali-soluble groups in the alkali-soluble resin increases and the crosslink density of the cured product increases.
- the alkali-soluble resin preferably has a weight average molecular weight of 10,000 or less in terms of polystyrene when measured by weight average molecular weight (Mw) gel permeation chromatography (GPC).
- alkali-soluble resin has an ethylenically unsaturated group in a molecule
- numerator other than a carboxyl group from a viewpoint of developability, photocurability, and developability.
- carboxyl group-containing resin those derived from acrylic acid, methacrylic acid or derivatives thereof are preferable.
- Specific examples of the carboxyl group-containing resin include compounds listed below (which may be either oligomers or polymers).
- a difunctional or higher polyfunctional epoxy resin is reacted with (meth) acrylic acid, and the hydroxyl group present in the side chain is dibasic acid anhydride such as phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, etc.
- the bifunctional or higher polyfunctional epoxy resin is preferably solid.
- a polyfunctional epoxy resin obtained by epoxidizing the hydroxyl group of a bifunctional epoxy resin with epichlorohydrin is reacted with (meth) acrylic acid, and a dibasic acid anhydride is added to the resulting hydroxyl group.
- a polyfunctional epoxy resin obtained by epoxidizing the hydroxyl group of a bifunctional epoxy resin with epichlorohydrin is reacted with (meth) acrylic acid, and a dibasic acid anhydride is added to the resulting hydroxyl group.
- the bifunctional epoxy resin is preferably solid.
- An epoxy compound having two or more epoxy groups in one molecule is combined with a compound having at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule, and (meth) acrylic acid or the like.
- the resulting reaction product has many alcoholic hydroxyl groups such as maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, and adipic anhydride.
- a carboxyl group-containing photosensitive resin obtained by reacting a basic acid anhydride.
- An unsaturated group-containing monocarboxylic acid is reacted with a reaction product obtained by reacting a compound having two or more phenolic hydroxyl groups in one molecule with a cyclic carbonate compound such as ethylene carbonate or propylene carbonate.
- a carboxyl group-containing photosensitive resin obtained by reacting the resulting reaction product with a polybasic acid anhydride.
- Carboxy group-containing photosensitivity obtained by copolymerization of unsaturated carboxylic acid such as (meth) acrylic acid and unsaturated group-containing compound such as styrene, ⁇ -methylstyrene, lower alkyl (meth) acrylate, and isobutylene. resin.
- unsaturated carboxylic acid such as (meth) acrylic acid
- unsaturated group-containing compound such as styrene, ⁇ -methylstyrene, lower alkyl (meth) acrylate, and isobutylene. resin.
- a carboxyl group obtained by reacting a difunctional acid such as adipic acid, phthalic acid or hexahydrophthalic acid with a polyfunctional oxetane resin as described later and adding a dibasic acid anhydride to the resulting primary hydroxyl group Contains polyester resin.
- a carboxyl group-containing photosensitive resin obtained by adding a compound having a cyclic ether group and a (meth) acryloyl group in one molecule to the carboxyl group-containing resin such as (1) to (7) described above.
- the main chain derived from a phenol resin or an epoxy resin is separated from the ethylenically unsaturated group of the side chain.
- a chain extension structure so that a certain distance is generated between the main chain and the ethylenically unsaturated group.
- Such a structure is preferable for improving the reactivity between side chain ethylenically unsaturated groups.
- the carboxyl group-containing resin having a chain extension structure and an ethylenically unsaturated group for example, the carboxyl group-containing resins described in (3), (4), (5), and (8) are preferable.
- the acid value of the alkali-soluble resin is preferably 40 to 150 mgKOH / g.
- the acid value of the carboxyl group-containing resin is 40 mgKOH / g or more, alkali development is improved.
- cured material pattern can be drawn easily by making an acid value into 150 mgKOH / g or less. More preferably, it is 50 to 130 mgKOH / g.
- the blending amount of the alkali-soluble resin is, for example, 15 to 60% by mass, preferably 20 to 60% by mass, based on the total solid content of the composition excluding the solvent.
- the content By setting the content to 15% by mass or more, preferably 20% by mass or more, the coating film strength can be improved. Further, when the content is 60% by mass or less, viscosity becomes appropriate and workability is improved. More preferably, it is 30 to 50% by mass.
- the curable resin composition of the present invention has an epoxy equivalent of 300 g / eq.
- the following epoxy resin is included, and 200 g / eq. Is more preferable from the viewpoint of improving the crosslink density and further improving the crack resistance. It is as follows.
- Epoxy resin includes epoxidized vegetable oil; bisphenol A type epoxy resin; hydroquinone type epoxy resin; bisphenol type epoxy resin; thioether type epoxy resin; brominated epoxy resin; novolac type epoxy resin; biphenol novolac type epoxy resin; Resin; Hydrogenated bisphenol A type epoxy resin; Glycidylamine type epoxy resin; Hydantoin type epoxy resin; Alicyclic epoxy resin; Trihydroxyphenylmethane type epoxy resin; Alkylphenol type epoxy resin (for example, bixylenol type epoxy resin); Type epoxy resin; bisphenol S type epoxy resin; bisphenol A novolak type epoxy resin; tetraphenylolethane type epoxy resin; Diglycidyl phthalate resin; Tetraglycidyl xylenoyl ethane resin; Naphthalene group-containing epoxy resin; Epoxy resin having dicyclopentadiene skeleton; Triphenylmethane type epoxy resin; Epoxy resin having dicyclopentadiene skeleton; Tripheny
- An epoxy resin can be used individually by 1 type or in combination of 2 or more types.
- novolac type epoxy resins bisphenol type epoxy resins, bixylenol type epoxy resins, biphenol type epoxy resins, biphenol novolac type epoxy resins, naphthalene type epoxy resins, epoxy resins having a silsesquioxane skeleton, and triphenylmethane
- At least one of the type epoxy resins is preferred.
- Epoxy equivalent is 300 g / eq.
- the following commercially available epoxy resins include EXP7241 (triphenylmethane type epoxy resin), HP6000 (epoxy resin having a naphthalene group), Epicron N-740 (phenol novolac type epoxy resin) manufactured by DIC, Nippon Steel & Sumikin Chemical Co., Ltd.
- Examples include Epototo YDC-1312 (hydroquinone type epoxy resin) and YSLV-80XY (bisphenol F type epoxy resin).
- thermosetting component contains two or more polyfunctional epoxy resins from the viewpoint of lowering Tan ⁇ .
- polyfunctional means two or more functional groups.
- the composition of the present invention preferably contains (B-1) a bifunctional or higher functional epoxy resin having a softening point of 40 ° C. or lower as the (B) thermosetting component.
- B-2) It is preferable to include a mixture with a bifunctional or higher functional epoxy resin having a softening point exceeding 40 ° C. (B-1) By including a bifunctional or higher functional epoxy resin with a softening point of 40 ° C.
- (E) it is possible to achieve high filling of inorganic fillers, resulting in low CTE and low Tan ⁇ , and crack resistance in thermal cycle tests. Will improve.
- (B-2) by including a bifunctional or higher functional epoxy resin having a softening point exceeding 40 ° C., the glass transition temperature (Tg) of the entire curable resin composition can be increased. As a result, heat resistance such as PCT resistance and reliability such as crack resistance in a thermal cycle test can be further improved.
- the softening point means a value measured according to the method described in JIS K 7234.
- the bifunctional or higher functional epoxy resin having a softening point of 40 ° C. or lower may be a known resin, but is preferably liquid at room temperature, for example.
- B-1 Commercially available bifunctional or higher functional epoxy resins having a softening point of 40 ° C.
- the content of the (B-1) bifunctional or higher functional epoxy resin having a softening point of 40 ° C. or lower is such that (B-1) the softening point is 40 ° C. or lower with respect to 1 equivalent of the alkali-soluble group of the alkali-soluble resin.
- the epoxy group of the bifunctional or higher functional epoxy resin is preferably in the range of 0.2 to 1.8 equivalents.
- the softening point of the bifunctional or higher functional epoxy resin having a softening point of 40 ° C. or lower is preferably ⁇ 80 to 30 ° C., more preferably ⁇ 70 to 20 ° C.
- B-2 Commercially available bifunctional or higher functional epoxy resins having a softening point exceeding 40 ° C. include, for example, ICTEP-S (softening point: 110 ° C.), TEPIC-H, N870, DIC manufactured by Nissan Chemical Co., Ltd.
- HP-7200 softening point: 60 ° C
- HP-4700 softening point: 90 ° C
- HP-4710 softening point: 96 ° C
- EXA-7241 softening point: 70 ° C
- NC-3000L softening point: 52 ° C
- NC-7000L softening point: 86 ° C
- CER-3000L softening point: 93 ° C
- EPPN-502H softening point: 67 ° C.
- Epototo YSLV-80XY softening point: 80 ° C.
- EPICLON-N660 softening point: 61 to 69 ° C.
- YDC-1312 softening point: 140 ° C.
- the softening point of a bifunctional or higher functional epoxy resin having a softening point exceeding 40 ° C. is preferably 50 ° C. or higher, and more preferably 60 ° C. or higher.
- the upper limit of the softening point in the (B-2) bifunctional or higher functional epoxy resin having a softening point exceeding 40 ° C. is not particularly limited, but is about 400 ° C. or lower. It is preferable that it is 80 degrees C or less from a viewpoint of the workability at the time of forming into a dry film.
- the blending ratio of (B-1) a bifunctional or higher functional epoxy resin having a softening point of 40 ° C. or less and (B-2) an epoxy resin having a softening point of more than 40 ° C. is (B-1) the softening point is 40 ° C. or less.
- Equivalent ratio of epoxy group (b-1) of bifunctional or higher epoxy resin to (B-2) epoxy group (b-2) of bifunctional or higher epoxy resin having a softening point exceeding 60 ° C. (b-1) : (B-2) is preferably 3: 7 to 9: 1, more preferably 4: 6 to 8: 2. When the ratio of the epoxy group (b-1) is 3 to 9, it is possible to achieve both low Tan ⁇ and high Tg.
- Epoxy equivalent is 300 g / eq.
- the following epoxy resin it is particularly preferable to include a trifunctional or higher functional epoxy resin from the viewpoint of increasing the crosslinking density among the epoxy resins.
- the structure of the tri- or higher functional epoxy resin is not particularly limited as long as it is an epoxy resin having three or more epoxy groups. Among them, the epoxy equivalent is 200 g / eq. From the viewpoint of further increasing the crosslinking density.
- the following trifunctional or higher epoxy resins are more preferable.
- an epoxy resin having a silsesquioxane skeleton can be more suitably used as the thermosetting component.
- the epoxy resin having a silsesquioxane skeleton is a silsesquioxane, that is, a network polymer or polyhedral cluster having a structure of (RSiO 1.5 ) n obtained by hydrolyzing a trifunctional silane.
- Any compound having an epoxy group-containing group is not particularly limited. Each silicon of silsesquioxane is bonded with an average of 1.5 oxygen atoms and one hydrocarbon group.
- the epoxy resin having a silsesquioxane skeleton preferably has a silsesquioxane skeleton represented by the following general formula (1).
- R 1 to R 4 are each independently a group having a SiO bond or an organic group, and at least one of R 1 to R 4 is a group having an epoxy group
- a group refers to a group containing a carbon atom.
- the structure of the silsesquioxane is not particularly limited, and a silsesquioxane having a known and conventional structure such as a random structure, a ladder structure, a complete cage structure, or an incomplete cage structure can be used.
- the group having an SiO bond that R 1 to R 4 can take is not particularly limited, a group having an SiO bond and an aliphatic skeleton, a group having an SiO bond and an aromatic skeleton, a group having an SiO bond and a hetero atom, and the like And is preferably within the range of the equivalent of the above thermosetting functional group (epoxy group).
- the organic group containing a carbon atom that can be taken by R 1 to R 4 is not particularly limited, and examples thereof include an aliphatic group such as a methyl group, an aromatic group such as a phenyl group, and a group having a hetero atom.
- the organic group is preferably an organic group having 1 to 30 carbon atoms, and is preferably within an equivalent range of the thermosetting functional group (epoxy group).
- At least one of R 1 to R 4 is a group having an epoxy group, and the group having an epoxy group is not particularly limited as long as the group having SiO bond or the organic group has an epoxy group. .
- thermosetting component is, for example, 1 to 100 parts by weight, preferably 10 to 80 parts by weight, and more preferably 20 to 60 parts by weight with respect to 100 parts by weight of the (A) alkali-soluble resin.
- the curable resin composition of the present invention has an epoxy equivalent of 300 g / eq. Within the range not impairing the effects of the present invention.
- epoxy resins such as melamine resin, benzoguanamine resin, melamine derivative, benzoguanamine derivative, isocyanate compound, block isocyanate compound, cyclocarbonate compound, epoxy equivalent is 300 g / eq.
- Known compounds such as epoxy resins, oxetane compounds, episulfide resins, bismaleimides, carbodiimide resins, and the like can be used.
- the compound having a plurality of cyclic (thio) ether groups in the molecule is a compound having a plurality of 3, 4 or 5-membered cyclic (thio) ether groups in the molecule.
- a compound having a group that is, a polyfunctional epoxy compound, a compound having a plurality of oxetanyl groups in the molecule, that is, a polyfunctional oxetane compound, a compound having a plurality of thioether groups in the molecule, that is, a polyfunctional episulfide resin.
- the curable resin composition of the present invention contains (C) a compound having an ethylenically unsaturated group.
- a compound having an ethylenically unsaturated group a compound having one or more ethylenically unsaturated groups in the molecule is preferably used.
- a photopolymerizable oligomer, a photopolymerizable vinyl monomer, or the like, which is a conventionally known compound having an ethylenically unsaturated group can be used.
- the compound (C) having an ethylenically unsaturated group mentioned here does not include (A) an alkali-soluble resin having an ethylenically unsaturated group and (E) a surface-treated inorganic filler. .
- Examples of the photopolymerizable oligomer include unsaturated polyester oligomers and (meth) acrylate oligomers.
- Examples of (meth) acrylate oligomers include phenol novolac epoxy (meth) acrylate, cresol novolac epoxy (meth) acrylate, epoxy (meth) acrylates such as bisphenol type epoxy (meth) acrylate, urethane (meth) acrylate, epoxy urethane (meta ) Acrylate, polyester (meth) acrylate, polyether (meth) acrylate, polybutadiene-modified (meth) acrylate, and the like.
- photopolymerizable vinyl monomer known and commonly used monomers, for example, styrene derivatives such as styrene, chlorostyrene and ⁇ -methylstyrene; vinyl esters such as vinyl acetate, vinyl butyrate or vinyl benzoate; vinyl isobutyl ether, vinyl- vinyl ethers such as n-butyl ether, vinyl-t-butyl ether, vinyl-n-amyl ether, vinyl isoamyl ether, vinyl-n-octadecyl ether, vinyl cyclohexyl ether, ethylene glycol monobutyl vinyl ether, triethylene glycol monomethyl vinyl ether; acrylamide, Methacrylamide, N-hydroxymethylacrylamide, N-hydroxymethylmethacrylamide, N-methoxymethylacrylamide, N-ethoxymethylacrylamide (Meth) acrylamides such as rilamide and N-butoxymethylacrylamide; allyl compounds such as triallyl isocyan
- the compounding amount of the compound (C) having an ethylenically unsaturated group is preferably less than 20 parts by mass, more preferably 5 to 18 parts by mass with respect to 100 parts by mass of the (A) alkali-soluble resin. More preferably, it is 10 to 15 parts by mass.
- (C) By reducing the compounding quantity of the compound which has an ethylenically unsaturated group, the compound which has an unreacted ethylenically unsaturated group in hardened
- photopolymerization initiator Any photopolymerization initiator may be used as long as it is a known photopolymerization initiator as a photopolymerization initiator or a photoradical generator.
- photopolymerization initiator examples include bis- (2,6-dichlorobenzoyl) phenylphosphine oxide, bis- (2,6-dichlorobenzoyl) -2,5-dimethylphenylphosphine oxide, bis- (2, 6-dichlorobenzoyl) -4-propylphenylphosphine oxide, bis- (2,6-dichlorobenzoyl) -1-naphthylphosphine oxide, bis- (2,6-dimethoxybenzoyl) phenylphosphine oxide, bis- ( 2,6-dimethoxybenzoyl) -2,4,4-trimethylpentylphosphine oxide, bis- (2,6-dimethoxybenzoyl) -2,5-dimethylphenylphosphine oxide, bis- (2,4,6- Trimethylbenzoyl) -phenylphosphine oxide Bisacylphosphine oxides such as (IR
- a photoinitiator may be used individually by 1 type and may be used in combination of 2 or more type.
- monoacylphosphine oxides and oxime esters are preferable, and oxime esters having high sensitivity are most preferable.
- the oxime esters preferably have one or more oxime ester groups.
- ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl]- , 1- (O-acetyloxime) is more preferred.
- the blending amount of the photopolymerization initiator is preferably 0.5 to 20 parts by mass with respect to 100 parts by mass of the (A) alkali-soluble resin.
- the amount is 0.5 parts by mass or more, the surface curability is good, and when the amount is 20 parts by mass or less, halation hardly occurs and good resolution is obtained.
- the curable resin composition of the present invention has an average particle size of 100 nm to 1 ⁇ m and (A) an alkali-soluble resin, (B) a thermosetting component, and (C) at least one compound having an ethylenically unsaturated group, Contains (E) a surface-treated inorganic filler having a reactive group capable of reacting.
- the inorganic filler is not particularly limited, and known and commonly used fillers such as silica, crystalline silica, Neuburg silica, aluminum hydroxide, glass powder, talc, clay, magnesium carbonate, calcium carbonate, natural mica, synthetic mica Inorganic fillers such as aluminum hydroxide, barium sulfate, barium titanate, iron oxide, non-fibrous glass, hydrotalcite, mineral wool, aluminum silicate, calcium silicate and zinc white can be used.
- silica is preferable, and since the surface area is small and stress is dispersed throughout, it is difficult to become a starting point of cracks, and from the viewpoint of excellent resolution, spherical silica is more preferable.
- Examples of the reactive group of the (E) surface-treated inorganic filler include (meth) acryloyl group, vinyl group, cyclic (thio) ether group, acidic group, and basic group.
- Examples of the cyclic (thio) ether group include an epoxy group, an oxetanyl group, and an episulfide group.
- Examples of the acidic group include a carboxyl group, a phenolic hydroxyl group, an alcoholic hydroxyl group, a thiol group, a sulfone group, and a phosphate group.
- Examples of the basic group include an amino group, an amide group, and an ammonium group.
- the reactive group of the surface-treated inorganic filler is preferably any one of a (meth) acryloyl group, a vinyl group, and a cyclic (thio) ether group.
- the reactive group of the surface-treated inorganic filler is a cyclic (thio) ether group, it is excellent in (A) reactivity with an alkali-soluble resin, and is a (meth) acryloyl group or vinyl group (A) ) Excellent reactivity with the ethylenically unsaturated group of the alkali-soluble resin.
- the method for introducing the reactive group into the inorganic filler is not particularly limited, and may be introduced using a known and commonly used method.
- the surface treatment agent having the reactive group for example, the coupling having the reactive group.
- the surface of the inorganic filler may be treated with an agent or the like.
- a surface treatment with a coupling agent is preferable.
- a silane coupling agent a titanium coupling agent, a zirconium coupling agent, an aluminum coupling agent, or the like can be used. Among these, a silane coupling agent is preferable.
- silane coupling agent capable of introducing the reactive group into the inorganic filler examples include a silane coupling agent having a vinyl group, a silane coupling agent having a methacryl group, a silane coupling agent having an acrylic group, and an epoxy group.
- examples of the silane coupling agent include a silane coupling agent and a carboxyl group-containing silane coupling agent, and among them, a silane coupling agent having at least one of a (meth) acryl group and a vinyl group is preferable.
- the surface-treated inorganic filler should just be mix
- a pre-dispersion liquid in which an inorganic filler is pre-dispersed in a solvent or a resin component is more preferable that the pre-dispersed liquid is blended in the composition after blending or sufficiently surface-treating when the surface-untreated inorganic filler is pre-dispersed in the solvent.
- the average particle size of the surface-treated inorganic filler is preferably 100 to 800 nm, more preferably 100 to 700 nm, and even more preferably 200 to 700 nm.
- the average particle diameter of the surface-treated inorganic filler is not only the particle diameter of the primary particles but also the average particle diameter including the particle diameter of the secondary particles (aggregates) (D50 ).
- the average particle size can be determined by a laser diffraction particle size distribution measuring device. Examples of the measuring apparatus using the laser diffraction method include Nanotrac wave manufactured by Nikkiso Co., Ltd.
- thermosetting catalyst The curable resin composition of the present invention preferably contains a thermosetting catalyst.
- thermosetting catalysts include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole.
- Imidazole derivatives such as 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamide, benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N -Amine compounds such as dimethylbenzylamine and 4-methyl-N, N-dimethylbenzylamine; hydrazine compounds such as adipic acid dihydrazide and sebacic acid dihydrazide; and phosphorus compounds such as triphenylphosphine.
- the blending amount of the thermosetting catalyst is preferably 0.05 to 20 parts by mass, more preferably 0.1 to 15 parts by mass with respect to 100 parts by mass of the (B) thermosetting component.
- the curable resin composition of the present invention can contain a curing agent.
- the curing agent include phenol resins, polycarboxylic acids and acid anhydrides thereof, cyanate ester resins, active ester resins, maleimide compounds, and alicyclic olefin polymers.
- curing agent can be used individually by 1 type or in combination of 2 or more types.
- the curable resin composition of the present invention may contain a colorant.
- a colorant known colorants such as red, blue, green, yellow, black, and white can be used, and any of pigments, dyes, and pigments may be used. However, it is preferable not to contain a halogen from the viewpoint of reducing the environmental burden and affecting the human body.
- the addition amount of the colorant is not particularly limited, but is preferably 10 parts by mass or less, particularly preferably 0.1 to 7 parts by mass with respect to 100 parts by mass of the (A) alkali-soluble resin.
- the curable resin composition of the present invention can contain an organic solvent for the purpose of preparing the composition and adjusting the viscosity when applied to a substrate or a carrier film.
- organic solvents include ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; cellosolve, methyl cellosolve, butyl cellosolve, carbitol, methyl carbitol, butyl carbitol, propylene glycol monomethyl ether , Glycol ethers such as dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, diethylene glycol monomethyl ether acetate, tripropylene glycol monomethyl ether; ethyl acetate, butyl acetate, butyl lactate, cellosolve acetate, butyl cellosolve acetate, carbitol
- additives include thermal polymerization inhibitors, UV absorbers, silane coupling agents, plasticizers, flame retardants, antistatic agents, anti-aging agents, antibacterial / antifungal agents, antifoaming agents, leveling agents, thickening agents Agent, adhesion imparting agent, thixotropic agent, photoinitiator aid, sensitizer, thermoplastic resin, organic filler, mold release agent, surface treatment agent, dispersant, dispersion aid, surface modifier, stabilizer , Phosphor, AB type or ABA type block copolymer, and the like.
- the curable resin composition of the present invention may be used as a dry film or as a liquid. When used as a liquid, it may be one-component or two-component or more.
- the dry film of the present invention has a resin layer obtained by applying and drying the curable resin composition of the present invention on a carrier film.
- the curable resin composition of the present invention is diluted with the above organic solvent to adjust to an appropriate viscosity, and then a comma coater, a blade coater, a lip coater, a rod coater, and a squeeze coater. Apply a uniform thickness on the carrier film using a reverse coater, transfer roll coater, gravure coater, spray coater or the like. Thereafter, the applied composition is usually dried at a temperature of 40 to 130 ° C. for 1 to 30 minutes to form a resin layer.
- the coating film thickness is not particularly limited, but in general, the film thickness after drying is appropriately selected in the range of 3 to 150 ⁇ m, preferably 5 to 60 ⁇ m.
- a plastic film is used as the carrier film.
- a polyester film such as polyethylene terephthalate (PET), a polyimide film, a polyamideimide film, a polypropylene film, a polystyrene film, or the like can be used.
- the thickness of the carrier film is not particularly limited, but is generally appropriately selected within the range of 10 to 150 ⁇ m. More preferably, it is in the range of 15 to 130 ⁇ m.
- the peelable cover film for example, a polyethylene film, a polytetrafluoroethylene film, a polypropylene film, a surface-treated paper, or the like can be used.
- a cover film what is necessary is just a thing smaller than the adhesive force of a resin layer and a carrier film when peeling a cover film.
- the resin layer may be formed by applying and drying the curable resin composition of the present invention on the cover film, and a carrier film may be laminated on the surface. That is, as the film to which the curable resin composition of the present invention is applied when producing a dry film in the present invention, either a carrier film or a cover film may be used.
- the printed wiring board of the present invention has a curable resin composition of the present invention or a cured product obtained from a resin layer of a dry film.
- the curable resin composition of the present invention is adjusted to a viscosity suitable for a coating method using the organic solvent, and a dip coating method is performed on a substrate.
- the organic solvent contained in the composition is volatilized and dried (temporary drying) at a temperature of 60 to 100 ° C.
- a tack-free resin layer is formed.
- a resin layer is formed on a base material by peeling a carrier film.
- Examples of the base material include printed wiring boards and flexible printed wiring boards that have been previously formed with copper or the like, paper phenol, paper epoxy, glass cloth epoxy, glass polyimide, glass cloth / non-woven cloth epoxy, glass cloth / paper epoxy.
- PEN polyethylene naphthalate
- Volatile drying performed after the application of the curable resin composition of the present invention is performed in a dryer using a hot air circulation drying furnace, an IR furnace, a hot plate, a convection oven or the like (equipped with a heat source of an air heating method using steam).
- the method can be carried out using a method in which hot air is brought into countercurrent contact and a method in which the hot air is blown onto the support.
- a resin layer on the printed wiring board After forming a resin layer on the printed wiring board, it is selectively exposed with active energy rays through a photomask having a predetermined pattern, and the unexposed portion is diluted with a dilute alkaline aqueous solution (for example, 0.3 to 3 mass% sodium carbonate aqueous solution). ) To form a cured product pattern. Further, the cured product is irradiated with active energy rays and then heat-cured (for example, 100 to 220 ° C.), irradiated with active energy rays after heat-curing, or is subjected to final finish curing (main curing) only by heat-curing. A cured film having excellent properties such as properties and hardness is formed.
- a dilute alkaline aqueous solution for example, 0.3 to 3 mass% sodium carbonate aqueous solution.
- the exposure apparatus used for the active energy ray irradiation may be any apparatus that irradiates ultraviolet rays in the range of 350 to 450 nm, equipped with a high-pressure mercury lamp lamp, an ultra-high pressure mercury lamp lamp, a metal halide lamp, a mercury short arc lamp, etc.
- a direct drawing apparatus for example, a laser direct imaging apparatus that directly draws an image with a laser using CAD data from a computer
- the lamp light source or laser light source of the direct drawing machine may have a maximum wavelength in the range of 350 to 450 nm.
- the exposure amount for image formation varies depending on the film thickness and the like, but can be generally in the range of 10 to 1000 mJ / cm 2 , preferably 20 to 800 mJ / cm 2 .
- the developing method can be a dipping method, a shower method, a spray method, a brush method, etc., and as a developing solution, potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, Alkaline aqueous solutions such as ammonia and amines can be used.
- the curable resin composition of the present invention is preferably used for forming a cured film on a printed wiring board, more preferably used for forming a permanent film, and more preferably a solder resist, Used to form interlayer insulation layers and coverlays. Further, it is suitable for forming a printed wiring board having a fine pitch wiring pattern which requires a high degree of reliability, such as a package substrate, particularly a permanent film (particularly a solder resist) for FC-BGA.
- a cured product having excellent crack resistance when a high temperature load is applied can be obtained, which is suitable for applications exposed to high temperature conditions such as in-vehicle applications.
- reaction solution was cooled to room temperature, and 1.56 parts of 89% phosphoric acid was added to and mixed with the reaction solution to neutralize potassium hydroxide.
- the nonvolatile content was 62.1%, and the hydroxyl value was 182.2 mgKOH / g (307. 9 g / eq.) Of a novolak-type cresol resin propylene oxide reaction solution. This was an average of 1.08 mol of propylene oxide added per equivalent of phenolic hydroxyl group.
- reaction solution was cooled to room temperature, neutralized with 35.35 parts of a 15% aqueous sodium hydroxide solution, and then washed with water. Thereafter, toluene was distilled off while substituting 118.1 parts of diethylene glycol monoethyl ether acetate with an evaporator to obtain a novolak acrylate resin solution.
- 332.5 parts of the obtained novolak acrylate resin solution and 1.22 parts of triphenylphosphine were introduced into a reactor equipped with a stirrer, a thermometer and an air blowing tube, and air was supplied at a rate of 10 ml / min.
- Examples 1 to 17, Comparative Examples 1 to 5 The above resin solution (varnish) was blended together with various components shown in Tables 1 to 3 in proportions (parts by mass) shown in Tables 1 to 3, premixed with a stirrer, and then kneaded with a three-roll mill, A curable resin composition was prepared.
- the curable resin composition obtained as described above was diluted by adding 300 g of methyl ethyl ketone, and stirred for 15 minutes with a stirrer to obtain a coating solution.
- the coating solution is applied onto a 38 ⁇ m thick polyethylene terephthalate film (Embret PTH-25 manufactured by Unitika Co., Ltd.) having an arithmetic surface roughness Ra of 150 nm, usually dried at a temperature of 80 ° C. for 15 minutes, and a photosensitive material having a thickness of 20 ⁇ m.
- a functional resin layer was formed.
- a 18 ⁇ m-thick polypropylene film (OPP-FOA manufactured by Futamura Co., Ltd.) was bonded onto the photosensitive resin layer to produce a photosensitive dry film.
- the polyethylene film is peeled from the photosensitive dry film obtained as described above, and the photosensitive resin layer of the photosensitive dry film is bonded to the copper foil surface side.
- a vacuum laminator (MVLP-500 manufactured by Meiki Seisakusho Co., Ltd.)
- the substrate and the photosensitive resin layer were laminated by heating and laminating under conditions of pressure: 0.8 MPa, 70 ° C., 1 minute, and vacuum: 133.3 Pa. Adhered.
- the photosensitive dry film is exposed (exposure amount: 400 to 600 mJ / cm 2 ), and then the polyethylene terephthalate film is peeled off from the photosensitive dry film.
- the photosensitive resin layer was exposed. Thereafter, development was performed for 60 seconds under conditions of 30 ° C. and a spray pressure of 2 kg / cm 2 using a 1 wt% Na 2 CO 3 aqueous solution to form a resin layer having a predetermined resist pattern. Subsequently, the resin layer was irradiated with an exposure amount of 1 J / cm 2 in a UV conveyor furnace equipped with a high-pressure mercury lamp, and then heated at 160 ° C. for 60 minutes to completely cure the resin layer to prepare a cured coating film.
- a high-pressure mercury lamp short arc lamp
- ⁇ Crack resistance (TCT resistance)> The surface of a circuit board (50 mm ⁇ 50 mm ⁇ 0.4 mmt) with a 250 ⁇ m bump pitch to be connected to C4 is chemically polished, the polyethylene film is peeled off from the photosensitive dry film obtained as described above, and the surface is polished. Next, the photosensitive resin layer of the photosensitive dry film was bonded to the surface on the other side, and subsequently, using a vacuum laminator (MVLP-500, manufactured by Meiki Seisakusho), the degree of pressure was 0.8 MPa, 70 ° C., 1 minute, Vacuum lamination was performed under the condition of 133.3 Pa, and the substrate and the photosensitive resin layer were brought into close contact with each other.
- MVLP-500 vacuum laminator
- a polyethylene terephthalate film is formed from the photosensitive dry film. It peeled and the photosensitive resin layer was exposed. Thereafter, development was performed for 60 seconds under conditions of 30 ° C. and a spray pressure of 2 kg / cm 2 using a 1 wt% Na 2 CO 3 aqueous solution to form a resin layer having a predetermined resist pattern.
- the resin layer was irradiated with an exposure amount of 1 J / cm 2 in a UV conveyor furnace equipped with a high-pressure mercury lamp, and then heated at 160 ° C. for 60 minutes to completely cure the resin layer to form a cured film.
- a TST evaluation substrate provided with a cured coating thereon was produced.
- heat treatment was performed at 125 ° C. for 24 hours as preconditioning, and humidification treatment was performed at 60 ° C. and humidity 60% for 48 hours, and reflow 260 ° C. was performed three times.
- the obtained substrate was put into a thermal cycle machine in which a temperature cycle between ⁇ 65 ° C. and 175 ° C.
- NC-3000L (biphenylene type epoxy resin, epoxy equivalent: 273 g / eq., Bifunctional, softening point: 52 ° C.) * 23: EXA-7241 manufactured by DIC (triphenylmethane type epoxy resin, epoxy equivalent: 168 g / eq., Trifunctional, softening point: 70 ° C.) * 24: EPICLON-N660 manufactured by DIC (cresol novolac type epoxy resin, epoxy equivalent: 210 g / eq., Bifunctional, softening point: 61 to 69 ° C.)
Abstract
Description
応力は主に、(1)ソルダーレジストと周辺部材(銅、基材等)との熱線膨張(CTE)差により発生する応力、(2)パッケージングする際の熱履歴により発生するガス(ソルダーレジストおよび、基材から発生するガス、水分)による応力、(3)実装された後の熱履歴によるソルダーレジスト内での架橋反応により発生する応力(歪み)がある。従来、クラックを抑えるために、エラストマー等をソルダーレジストに配合して、応力緩和させる手法や、ソルダーレジストを高ガラス転移温度(Tg)、低CTE化する手法は、上記(1)の発生応力に対して効果があった。
しかしながら、近年、車載用途のICパッケージは高温環境下に曝されるため、(2)や(3)による応力が温度環境、熱履歴、使用部材による影響により大きくなり、しかも、その応力は無限であることから単純な応力緩和および高Tg、低CTEを狙ったものでは、発生応力を防ぎきれなくなる場合がある。
そこで、発明者らは、そもそも、熱により、熱膨張率、弾性率が変化するソルダーレジストに対して、硬化後の熱膨張率を低くするという手段以外に、硬化後、Tg以上で弾性率が低下する特性に関して、変位速度に比例する力(粘性)を考慮したDMAの粘弾性評価が必要であることに気付いた。このDMAによる粘性成分の挙動は、Tgがはんだの溶融温度よりも低いソルダーレジストの特性を予測するためには非常に重要な物性となる。
特に、DMAで得られるTanδの変化挙動は重要な意味を持っており、Tanδのピークの極大値が大きな材料(例えば図1に示すような物性を有する材料)は、電子部品を搭載することによる機械的なストレスを緩和する目的で柔軟でしなやかさが要求される部材に適していると考えられ、一方、Tanδのピークの極大値が小さな材料(例えば図2に示すような物性を有する材料)は、ストレスに負けないように剛直で温度依存性の少ないということを見出した。
そして、今後のICパッケージには後者手法も考慮する必要があり、すなわち、DMAのTanδの数値が0.15以下であれば硬化物中の粘性成分が少ないため、粘性成分が熱履歴により、架橋反応が一部で進行したり、Tg付近で分子運動により架橋構造が疎になり物性変化を生じることを抑制することができる。つまり、温度依存性が少なく、Tg前後での物性変化が少ないため、高温熱履歴による物性変化により発生する応力を低減することができる。従って、DMAのTanδの数値が0.15以下であれば上記(1)の応力だけでなく、(3)の応力抑制にも有効となる。
そして、硬化物のTanδを小さくするために、無機充填剤の平均粒径を特定の範囲とし、さらに無機充填剤に特定の反応性基を導入し、エポキシ樹脂のエポキシ当量を特定値以下の範囲とすることで架橋が密になる観点から(2)の応力に有効であることを見出した。 Various stresses are applied to the solder resist used in the IC package, and by accumulating these stresses, the stress that cannot be withstood is released as cracks.
Stress mainly consists of (1) stress generated by thermal linear expansion (CTE) difference between solder resist and peripheral members (copper, base material, etc.), and (2) gas generated by thermal history during packaging (solder resist And (3) stress (strain) generated by the crosslinking reaction in the solder resist due to the thermal history after mounting. Conventionally, in order to suppress cracks, a method of blending an elastomer or the like into a solder resist to relieve stress, or a method of reducing the solder resist to a high glass transition temperature (Tg) and a low CTE is based on the stress generated in (1) above. It was effective against this.
However, in recent years, IC packages for in-vehicle use are exposed to a high temperature environment, and the stress due to (2) and (3) becomes larger due to the influence of the temperature environment, thermal history, and materials used, and the stress is infinite. For this reason, there is a case where the generated stress cannot be prevented by simple stress relaxation, high Tg, and low CTE.
Therefore, the inventors originally had a modulus of elasticity at Tg or higher after curing, in addition to the means of lowering the thermal expansion coefficient after curing, with respect to the solder resist whose thermal expansion coefficient and elastic modulus change due to heat. Regarding the characteristics to be lowered, it was found that DMA viscoelasticity evaluation considering the force (viscosity) proportional to the displacement speed is necessary. The behavior of the viscous component by DMA is a very important physical property for predicting the characteristics of a solder resist whose Tg is lower than the melting temperature of the solder.
In particular, the change behavior of Tan δ obtained by DMA has an important meaning, and a material having a large maximum value of the Tan δ peak (for example, a material having physical properties as shown in FIG. 1) depends on mounting electronic components. A material that is flexible and flexible for the purpose of relieving mechanical stress is considered to be suitable. On the other hand, a material having a small maximum value of Tanδ peak (for example, a material having physical properties as shown in FIG. 2). Found that it is rigid and less temperature dependent so as not to lose stress.
In the future IC package, it is necessary to consider the latter method, that is, if the Tan δ value of DMA is 0.15 or less, the viscosity component in the cured product is small. It is possible to suppress the reaction from proceeding in part or causing a change in physical properties due to sparse cross-linking structure due to molecular motion in the vicinity of Tg. That is, since there is little temperature dependence and there are few physical property changes before and after Tg, the stress which generate | occur | produces by the physical property change by a high temperature heat history can be reduced. Therefore, if the value of Tan δ of DMA is 0.15 or less, it is effective not only for the stress of (1) above but also for the stress suppression of (3).
In order to reduce Tan δ of the cured product, the average particle diameter of the inorganic filler is set to a specific range, a specific reactive group is introduced into the inorganic filler, and the epoxy equivalent of the epoxy resin is within a specific value range. From the viewpoint that the cross-linking becomes dense, it has been found that it is effective for the stress (2).
尚、本明細書において、Tanδ等の硬化物の物性は、特に断りが無い限り、樹脂組成物の乾燥後の樹脂層に対し、約500mJ/cm2で紫外線を照射後、さらに高圧水銀灯を備えたUVコンベア炉にて1J/cm2の露光量で照射した後、160℃で60分加熱して樹脂層を完全硬化させて得られる厚さ40μmの硬化物の物性を意味する。また、紫外線とは波長が10~400nmの電磁波である。Tanδは、動的粘弾性測定で測定した損失弾性率を貯蔵弾性率で除した値、即ち、損失正接(=損失弾性率/貯蔵弾性率)であり、本明細書において動的粘弾性測定で測定されるTanδ等の物性は、周波数1Hz、昇温速度5℃/minの条件下で25℃~300℃まで測定して得られるチャート図に基づくものである。 The curable resin composition of the present invention is such that the maximum value of Tan δ of the cured product is 0.15 or less in the temperature range of 25 to 300 ° C. With such physical properties, the temperature of the cured film is low. Stable crack resistance can be obtained even when exposed to high temperatures.
In the present specification, unless otherwise specified, the physical properties of the cured product such as Tan δ are further provided with a high-pressure mercury lamp after irradiating the resin layer after drying the resin composition with ultraviolet rays at about 500 mJ / cm 2. It means physical properties of a cured product having a thickness of 40 μm obtained by irradiating with an exposure amount of 1 J / cm 2 in a UV conveyor furnace and then heating at 160 ° C. for 60 minutes to completely cure the resin layer. Ultraviolet rays are electromagnetic waves having a wavelength of 10 to 400 nm. Tan δ is a value obtained by dividing the loss elastic modulus measured by dynamic viscoelasticity measurement by the storage elastic modulus, that is, loss tangent (= loss elastic modulus / storage elastic modulus). The measured physical properties such as Tan δ are based on a chart obtained by measuring from 25 ° C. to 300 ° C. under the conditions of a frequency of 1 Hz and a heating rate of 5 ° C./min.
Tanδの最大値を0.15以下とするための手段は特に限定されないが、平均粒径が100nm~1μmであり、且つ、(A)アルカリ可溶性樹脂、(B)熱硬化成分および(C)エチレン性不飽和基を有する化合物の少なくともいずれか1種と反応可能な反応性基を有する表面処理された無機充填剤を使用し、かつ、(B)熱硬化成分としてエポキシ当量300g/eq.以下のエポキシ樹脂を使用することが効果的である。
(E)無機充填剤の平均粒径が1μm以下であると、体積当たりの表面積が大きく、前記反応性基を多く有することができる。一方、平均粒径が100nm以上であると、硬化物の収縮を抑えてクラック耐性が向上する。
また、(B)熱硬化成分としてエポキシ当量が300g/eq.以下のエポキシ樹脂を含むことにより、(A)アルカリ可溶性樹脂との架橋点が多くなるため、架橋密度が上がり、また、未反応の(A)アルカリ可溶性樹脂等を低減することができる。このことから、Tanδの最大値が小さくなり、硬化物が150℃付近の高温時に急激な弾性率変化しにくくなり、クラック耐性がより向上する。
したがって、上記のような(E)無機充填剤とエポキシ当量が300g/eq.以下のエポキシ樹脂を含む組成物を硬化することにより、25~300℃の範囲で硬化物のTanδの最大値が0.15以下となり、安定したクラック耐性を得ることができる。Tanδの最大値が0.13以下であると、クラック耐性がさらに向上するので好ましい。 In order to obtain a cured product having a small Tan δ (= loss elastic modulus / storage elastic modulus), the loss elastic modulus (viscous component) is decreased, the storage elastic modulus (elastic component) is increased, or both are performed. In other words, the elastic component may be increased as much as possible in the cured product rather than the viscous component.
Means for setting the maximum value of Tanδ to 0.15 or less is not particularly limited, but the average particle diameter is 100 nm to 1 μm, and (A) an alkali-soluble resin, (B) a thermosetting component, and (C) ethylene. A surface-treated inorganic filler having a reactive group capable of reacting with at least one compound having a polymerizable unsaturated group, and (B) an epoxy equivalent of 300 g / eq. It is effective to use the following epoxy resin.
(E) When the average particle diameter of an inorganic filler is 1 micrometer or less, the surface area per volume is large and it can have many said reactive groups. On the other hand, when the average particle size is 100 nm or more, the shrinkage of the cured product is suppressed and the crack resistance is improved.
Moreover, (B) Epoxy equivalent is 300 g / eq. As a thermosetting component. By including the following epoxy resin, the number of cross-linking points with (A) alkali-soluble resin increases, so that the cross-linking density increases and unreacted (A) alkali-soluble resin and the like can be reduced. For this reason, the maximum value of Tan δ is reduced, the cured product is less likely to undergo a sudden change in elastic modulus at a high temperature around 150 ° C., and crack resistance is further improved.
Therefore, the above (E) inorganic filler and epoxy equivalent are 300 g / eq. By curing a composition containing the following epoxy resin, the maximum value of Tan δ of the cured product becomes 0.15 or less in the range of 25 to 300 ° C., and stable crack resistance can be obtained. It is preferable that the maximum value of Tan δ is 0.13 or less because crack resistance is further improved.
また、従来は高温時のクラック耐性を得るためには応力吸収のために貯蔵弾性率の変化が大きいことが好ましいとされていた。
しかしながら、本発明の硬化性樹脂組成物おいては逆に貯蔵弾性率の変化率を小さくして高温時でも強靭性を維持させて、応力の発生を抑制しクラックの発生を抑えようとするものである。
本発明においては、貯蔵弾性率の変化率が小さい方が好ましく、25℃~150℃における貯蔵弾性率の変化率が70%以内であることが好ましい。より好ましくは65%以内である。 Further, the storage elastic modulus at 150 ° C. of the cured product of the curable resin composition of the present invention may be any value as long as the maximum value of Tan δ of the cured product is 0.15 or less, but is 1 GPa or more. Is preferred. More preferably, it is 2 GPa or more. When the storage elastic modulus is 1 GPa or more, resistance of the cured product to the water vapor pressure inside the package is improved, and crack resistance and insulation reliability are improved.
Conventionally, in order to obtain crack resistance at high temperatures, it has been preferred that the change in storage elastic modulus is large for stress absorption.
However, in the curable resin composition of the present invention, conversely, the rate of change in the storage elastic modulus is reduced to maintain the toughness even at high temperatures, thereby suppressing the generation of stress and the generation of cracks. It is.
In the present invention, it is preferable that the change rate of the storage elastic modulus is small, and the change rate of the storage elastic modulus at 25 ° C. to 150 ° C. is preferably within 70%. More preferably, it is within 65%.
(A)アルカリ可溶性樹脂は、例えばフェノール性水酸基、チオール基およびカルボキシル基のうち1種以上のアルカリ可溶性基を含有する樹脂であり、好ましくはフェノール性水酸基を2個以上有する化合物、カルボキシル基含有樹脂、フェノール性水酸基およびカルボキシル基を有する化合物、チオール基を2個以上有する化合物が挙げられる。(A)アルカリ可溶性樹脂としては、カルボキシル基含有樹脂やフェノール系水酸基含有樹脂を用いることができるが、(B)熱硬化成分および(E)無機充填剤との反応性の観点からカルボキシル基含有樹脂が好ましい。 [(A) Alkali-soluble resin]
(A) The alkali-soluble resin is, for example, a resin containing one or more alkali-soluble groups among phenolic hydroxyl groups, thiol groups, and carboxyl groups, preferably a compound having two or more phenolic hydroxyl groups, a carboxyl group-containing resin. , A compound having a phenolic hydroxyl group and a carboxyl group, and a compound having two or more thiol groups. (A) As the alkali-soluble resin, a carboxyl group-containing resin or a phenolic hydroxyl group-containing resin can be used, but from the viewpoint of reactivity with (B) a thermosetting component and (E) an inorganic filler, a carboxyl group-containing resin. Is preferred.
カルボキシル基含有樹脂の具体例としては、以下に列挙するような化合物(オリゴマーまたはポリマーのいずれでもよい)が挙げられる。 (A) It is preferable that alkali-soluble resin has an ethylenically unsaturated group in a molecule | numerator other than a carboxyl group from a viewpoint of developability, photocurability, and developability. In addition, you may use only carboxyl group-containing resin which does not have an ethylenically unsaturated group. As the ethylenically unsaturated group, those derived from acrylic acid, methacrylic acid or derivatives thereof are preferable.
Specific examples of the carboxyl group-containing resin include compounds listed below (which may be either oligomers or polymers).
本発明の硬化性樹脂組成物は、(B)熱硬化成分として、エポキシ当量が300g/eq.以下のエポキシ樹脂を含むものであり、架橋密度を向上させてさらにクラック耐性を向上させる観点からより好ましくは、200g/eq.以下である。 [(B) Thermosetting component]
The curable resin composition of the present invention has an epoxy equivalent of 300 g / eq. The following epoxy resin is included, and 200 g / eq. Is more preferable from the viewpoint of improving the crosslink density and further improving the crack resistance. It is as follows.
(式中、R1~R4は、それぞれ独立して、SiO結合を有する基または有機基であり、R1~R4のうち少なくとも一つがエポキシ基を有する基である。)ここで、有機基とは、炭素原子を含む基のことを言う。 The epoxy resin having a silsesquioxane skeleton preferably has a silsesquioxane skeleton represented by the following general formula (1).
(Wherein R 1 to R 4 are each independently a group having a SiO bond or an organic group, and at least one of R 1 to R 4 is a group having an epoxy group) A group refers to a group containing a carbon atom.
本発明の硬化性樹脂組成物は、(C)エチレン性不飽和基を有する化合物を含有する。(C)エチレン性不飽和基を有する化合物としては、分子中に1個以上のエチレン性不飽和基を有する化合物が好ましく用いられる。エチレン性不飽和基を有する化合物としては、公知慣用のエチレン性不飽和基を有する化合物である光重合性オリゴマー、光重合性ビニルモノマー等を用いることができる。なお、ここで言う(C)エチレン性不飽和基を有する化合物には、エチレン性不飽和基を有する(A)アルカリ可溶性樹脂および(E)表面処理された無機充填剤は含まれないものとする。 [(C) Compound having ethylenically unsaturated group]
The curable resin composition of the present invention contains (C) a compound having an ethylenically unsaturated group. (C) As a compound having an ethylenically unsaturated group, a compound having one or more ethylenically unsaturated groups in the molecule is preferably used. As the compound having an ethylenically unsaturated group, a photopolymerizable oligomer, a photopolymerizable vinyl monomer, or the like, which is a conventionally known compound having an ethylenically unsaturated group, can be used. The compound (C) having an ethylenically unsaturated group mentioned here does not include (A) an alkali-soluble resin having an ethylenically unsaturated group and (E) a surface-treated inorganic filler. .
(D)光重合開始剤としては、光重合開始剤や光ラジカル発生剤として公知の光重合開始剤であれば、いずれのものを用いることもできる。 [(D) Photopolymerization initiator]
(D) Any photopolymerization initiator may be used as long as it is a known photopolymerization initiator as a photopolymerization initiator or a photoradical generator.
本発明の硬化性樹脂組成物は、平均粒径100nm~1μmで且つ(A)アルカリ可溶性樹脂、(B)熱硬化成分および(C)エチレン性不飽和基を有する化合物の少なくともいずれか1種と反応可能な反応性基を有する(E)表面処理された無機充填剤を含有する。 [(E) Surface-treated inorganic filler]
The curable resin composition of the present invention has an average particle size of 100 nm to 1 μm and (A) an alkali-soluble resin, (B) a thermosetting component, and (C) at least one compound having an ethylenically unsaturated group, Contains (E) a surface-treated inorganic filler having a reactive group capable of reacting.
環状(チオ)エーテル基としては、例えば、エポキシ基、オキセタニル基、エピスルフィド基等が挙げられる。
酸性基としては、例えば、カルボキシル基、フェノール性水酸基、アルコール性水酸基、チオール基、スルホン基、リン酸基等が挙げられる。
塩基性基としては、例えば、アミノ基、アミド基、アンモニウム基等が挙げられる。
(E)表面処理された無機充填剤の反応性基は、(メタ)アクリロイル基、ビニル基および環状(チオ)エーテル基のいずれか1種であることが好ましい。(E)表面処理された無機充填剤の反応性基が環状(チオ)エーテル基であると(A)アルカリ可溶性樹脂との反応性に優れ、(メタ)アクリロイル基またはビニル基であると(A)アルカリ可溶性樹脂のエチレン性不飽和基等との反応性に優れる。 Examples of the reactive group of the (E) surface-treated inorganic filler include (meth) acryloyl group, vinyl group, cyclic (thio) ether group, acidic group, and basic group.
Examples of the cyclic (thio) ether group include an epoxy group, an oxetanyl group, and an episulfide group.
Examples of the acidic group include a carboxyl group, a phenolic hydroxyl group, an alcoholic hydroxyl group, a thiol group, a sulfone group, and a phosphate group.
Examples of the basic group include an amino group, an amide group, and an ammonium group.
(E) The reactive group of the surface-treated inorganic filler is preferably any one of a (meth) acryloyl group, a vinyl group, and a cyclic (thio) ether group. (E) When the reactive group of the surface-treated inorganic filler is a cyclic (thio) ether group, it is excellent in (A) reactivity with an alkali-soluble resin, and is a (meth) acryloyl group or vinyl group (A) ) Excellent reactivity with the ethylenically unsaturated group of the alkali-soluble resin.
本発明の硬化性樹脂組成物は、熱硬化触媒を含有することが好ましい。そのような熱硬化触媒としては、例えば、イミダゾール、2-メチルイミダゾール、2-エチルイミダゾール、2-エチル-4-メチルイミダゾール、2-フェニルイミダゾール、4-フェニルイミダゾール、1-シアノエチル-2-フェニルイミダゾール、1-(2-シアノエチル)-2-エチル-4-メチルイミダゾール等のイミダゾール誘導体;ジシアンジアミド、ベンジルジメチルアミン、4-(ジメチルアミノ)-N,N-ジメチルベンジルアミン、4-メトキシ-N,N-ジメチルベンジルアミン、4-メチル-N,N-ジメチルベンジルアミン等のアミン化合物、アジピン酸ジヒドラジド、セバシン酸ジヒドラジド等のヒドラジン化合物;トリフェニルホスフィン等のリン化合物等が挙げられる。また、グアナミン、アセトグアナミン、ベンゾグアナミン、メラミン、2,4-ジアミノ-6-メタクリロイルオキシエチル-S-トリアジン、2-ビニル-2,4-ジアミノ-S-トリアジン、2-ビニル-4,6-ジアミノ-S-トリアジン・イソシアヌル酸付加物、2,4-ジアミノ-6-メタクリロイルオキシエチル-S-トリアジン・イソシアヌル酸付加物等のS-トリアジン誘導体を用いることもでき、好ましくはこれら密着性付与剤としても機能する化合物を熱硬化触媒と併用する。 (Thermosetting catalyst)
The curable resin composition of the present invention preferably contains a thermosetting catalyst. Examples of such thermosetting catalysts include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole. Imidazole derivatives such as 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamide, benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N -Amine compounds such as dimethylbenzylamine and 4-methyl-N, N-dimethylbenzylamine; hydrazine compounds such as adipic acid dihydrazide and sebacic acid dihydrazide; and phosphorus compounds such as triphenylphosphine. Guanamine, acetoguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-2,4-diamino-S-triazine, 2-vinyl-4,6-diamino S-triazine derivatives such as -S-triazine / isocyanuric acid adducts and 2,4-diamino-6-methacryloyloxyethyl-S-triazine / isocyanuric acid adducts can also be used. A compound that also functions in combination with a thermosetting catalyst.
本発明の硬化性樹脂組成物は硬化剤を含有することができる。硬化剤としては、フェノール樹脂、ポリカルボン酸およびその酸無水物、シアネートエステル樹脂、活性エステル樹脂、マレイミド化合物、脂環式オレフィン重合体等が挙げられる。硬化剤は1種を単独または2種以上を組み合わせて用いることができる。 (Curing agent)
The curable resin composition of the present invention can contain a curing agent. Examples of the curing agent include phenol resins, polycarboxylic acids and acid anhydrides thereof, cyanate ester resins, active ester resins, maleimide compounds, and alicyclic olefin polymers. A hardening | curing agent can be used individually by 1 type or in combination of 2 or more types.
本発明の硬化性樹脂組成物には、着色剤が含まれていてもよい。着色剤としては、赤、青、緑、黄、黒、白等の公知の着色剤を使用することができ、顔料、染料、色素のいずれでもよい。但し、環境負荷低減並びに人体への影響の観点からハロゲンを含有しないことが好ましい。 (Coloring agent)
The curable resin composition of the present invention may contain a colorant. As the colorant, known colorants such as red, blue, green, yellow, black, and white can be used, and any of pigments, dyes, and pigments may be used. However, it is preferable not to contain a halogen from the viewpoint of reducing the environmental burden and affecting the human body.
本発明の硬化性樹脂組成物には、組成物の調製や、基板やキャリアフィルムに塗布する際の粘度調整等の目的で、有機溶剤を含有させることができる。有機溶剤としては、メチルエチルケトン、シクロヘキサノン等のケトン類;トルエン、キシレン、テトラメチルベンゼン等の芳香族炭化水素類;セロソルブ、メチルセロソルブ、ブチルセロソルブ、カルビトール、メチルカルビトール、ブチルカルビトール、プロピレングリコールモノメチルエーテル、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールジエチルエーテル、ジエチレングリコールモノメチルエーテルアセテート、トリプロピレングリコールモノメチルエーテル等のグリコールエーテル類;酢酸エチル、酢酸ブチル、乳酸ブチル、セロソルブアセテート、ブチルセロソルブアセテート、カルビトールアセテート、ブチルカルビトールアセテート、プロピレングリコールモノメチルエーテルアセテート、ジプロピレングリコールモノメチルエーテルアセテート、炭酸プロピレン等のエステル類;オクタン、デカン等の脂肪族炭化水素類;石油エーテル、石油ナフサ、ソルベントナフサ等の石油系溶剤など、公知慣用の有機溶剤が使用できる。これらの有機溶剤は、単独で、または二種類以上組み合わせて用いることができる。 (Organic solvent)
The curable resin composition of the present invention can contain an organic solvent for the purpose of preparing the composition and adjusting the viscosity when applied to a substrate or a carrier film. Examples of organic solvents include ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; cellosolve, methyl cellosolve, butyl cellosolve, carbitol, methyl carbitol, butyl carbitol, propylene glycol monomethyl ether , Glycol ethers such as dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, diethylene glycol monomethyl ether acetate, tripropylene glycol monomethyl ether; ethyl acetate, butyl acetate, butyl lactate, cellosolve acetate, butyl cellosolve acetate, carbitol acetate, butylcarby Tall acetate, propylene glycol monomethyl ether acetate, dip Propylene glycol monomethyl ether acetate, esters such as propylene carbonate; octane, aliphatic hydrocarbons decane; petroleum ether, petroleum naphtha, and petroleum solvents such as solvent naphtha, organic solvents conventionally known can be used. These organic solvents can be used alone or in combination of two or more.
さらに、本発明の硬化性樹脂組成物には、電子材料の分野において公知慣用の他の添加剤を配合してもよい。他の添加剤としては、熱重合禁止剤、紫外線吸収剤、シランカップリング剤、可塑剤、難燃剤、帯電防止剤、老化防止剤、抗菌・防黴剤、消泡剤、レベリング剤、増粘剤、密着性付与剤、チキソ性付与剤、光開始助剤、増感剤、熱可塑性樹脂、有機フィラー、離型剤、表面処理剤、分散剤、分散助剤、表面改質剤、安定剤、蛍光体、AB型またはABA型のブロック共重合体等が挙げられる。 (Other optional ingredients)
Furthermore, you may mix | blend the other well-known and usual additive in the field | area of an electronic material with the curable resin composition of this invention. Other additives include thermal polymerization inhibitors, UV absorbers, silane coupling agents, plasticizers, flame retardants, antistatic agents, anti-aging agents, antibacterial / antifungal agents, antifoaming agents, leveling agents, thickening agents Agent, adhesion imparting agent, thixotropic agent, photoinitiator aid, sensitizer, thermoplastic resin, organic filler, mold release agent, surface treatment agent, dispersant, dispersion aid, surface modifier, stabilizer , Phosphor, AB type or ABA type block copolymer, and the like.
温度計、窒素導入装置兼アルキレンオキシド導入装置および撹拌装置を備えたオートクレーブに、ノボラック型クレゾール樹脂(商品名「ショーノールCRG951」、昭和高分子社製、OH当量:119.4)119.4部、水酸化カリウム1.19部およびトルエン119.4部を導入し、撹拌しつつ系内を窒素置換し、加熱昇温した。次に、プロピレンオキシド63.8部を徐々に滴下し、125~132℃、0~4.8kg/cm2で16時間反応させた。その後、室温まで冷却し、この反応溶液に89%リン酸1.56部を添加混合して水酸化カリウムを中和し、不揮発分62.1%、水酸基価が182.2mgKOH/g(307.9g/eq.)であるノボラック型クレゾール樹脂のプロピレンオキシド反応溶液を得た。これは、フェノール性水酸基1当量当りプロピレンオキシドが平均1.08モル付加したものであった。
得られたノボラック型クレゾール樹脂のプロピレンオキシド反応溶液293.0部、アクリル酸43.2部、メタンスルホン酸11.53部、メチルハイドロキノン0.18部およびトルエン252.9部を、撹拌機、温度計および空気吹き込み管を備えた反応器に導入し、空気を10ml/分の速度で吹き込み、撹拌しながら、110℃で12時間反応させた。反応により生成した水は、トルエンとの共沸混合物として、12.6部の水が留出した。その後、室温まで冷却し、得られた反応溶液を15%水酸化ナトリウム水溶液35.35部で中和し、次いで水洗した。その後、エバポレーターにてトルエンをジエチレングリコールモノエチルエーテルアセテート118.1部で置換しつつ留去し、ノボラック型アクリレート樹脂溶液を得た。次に、得られたノボラック型アクリレート樹脂溶液332.5部およびトリフェニルホスフィン1.22部を、撹拌器、温度計および空気吹き込み管を備えた反応器に導入し、空気を10ml/分の速度で吹き込み、撹拌しながら、テトラヒドロフタル酸無水物60.8部を徐々に加え、95~101℃で6時間反応させ、冷却後、取り出した。このようにして、不揮発分65%、固形物の酸価87.7mgKOH/gのカルボキシル基含有感光性樹脂A-1の溶液を得た。 [Synthesis of Alkali-soluble Resin A-1]
119.4 parts of a novolac-type cresol resin (trade name “Shonol CRG951”, manufactured by Showa Polymer Co., Ltd., OH equivalent: 119.4) in an autoclave equipped with a thermometer, a nitrogen introduction device / alkylene oxide introduction device, and a stirring device. Then, 1.19 parts of potassium hydroxide and 119.4 parts of toluene were introduced, the inside of the system was replaced with nitrogen while stirring, and the temperature was increased by heating. Next, 63.8 parts of propylene oxide was gradually added dropwise and reacted at 125 to 132 ° C. and 0 to 4.8 kg / cm 2 for 16 hours. Thereafter, the reaction solution was cooled to room temperature, and 1.56 parts of 89% phosphoric acid was added to and mixed with the reaction solution to neutralize potassium hydroxide. The nonvolatile content was 62.1%, and the hydroxyl value was 182.2 mgKOH / g (307. 9 g / eq.) Of a novolak-type cresol resin propylene oxide reaction solution. This was an average of 1.08 mol of propylene oxide added per equivalent of phenolic hydroxyl group.
293.0 parts of a propylene oxide reaction solution of the obtained novolac-type cresol resin, 43.2 parts of acrylic acid, 11.53 parts of methanesulfonic acid, 0.18 part of methylhydroquinone and 252.9 parts of toluene were mixed with a stirrer and a temperature. It was introduced into a reactor equipped with a meter and an air blowing tube, and air was blown at a rate of 10 ml / min and reacted at 110 ° C. for 12 hours while stirring. 12.6 parts of water was distilled from the water produced by the reaction as an azeotrope with toluene. Thereafter, the reaction solution was cooled to room temperature, neutralized with 35.35 parts of a 15% aqueous sodium hydroxide solution, and then washed with water. Thereafter, toluene was distilled off while substituting 118.1 parts of diethylene glycol monoethyl ether acetate with an evaporator to obtain a novolak acrylate resin solution. Next, 332.5 parts of the obtained novolak acrylate resin solution and 1.22 parts of triphenylphosphine were introduced into a reactor equipped with a stirrer, a thermometer and an air blowing tube, and air was supplied at a rate of 10 ml / min. With stirring, 60.8 parts of tetrahydrophthalic anhydride was gradually added, reacted at 95 to 101 ° C. for 6 hours, cooled and taken out. In this way, a solution of a carboxyl group-containing photosensitive resin A-1 having a nonvolatile content of 65% and a solid acid value of 87.7 mgKOH / g was obtained.
ジエチレングリコールモノエチルエーテルアセテート700gにオルソクレゾールノボラック型エポキシ樹脂(DIC社製、EPICLON N-695、軟化点95℃、エポキシ当量214、平均反応性基数7.6)1070g(グリシジル基数(芳香環総数):5.0モル)、アクリル酸360g(5.0モル)、およびハイドロキノン1.5gを仕込み、100℃に加熱攪拌し、均一溶解した。
次いで、トリフェニルホスフィン4.3gを仕込み、110℃に加熱して2時間反応後、更にトリフェニルホスフィン1.6gを追加し、120℃に昇温してさらに12時間反応を行った。得られた反応液に芳香族系炭化水素(ソルベッソ150)562g、テトラヒドロ無水フタル酸684g(4.5モル)を仕込み、110℃で4時間反応を行った。さらに、得られた反応液にグリシジルメタクリレート142.0g(1.0モル)を仕込み、115℃で4時間反応を行い、カルボキシル基含有感光性樹脂溶液(A-2)を得た。
このようにして得られた感光性樹脂溶液(A-2)の固形分は65%、固形分の酸価は87mgKOH/gであった。 [Synthesis of alkali-soluble resin A-2]
700 g of diethylene glycol monoethyl ether acetate and 1070 g of orthocresol novolac type epoxy resin (manufactured by DIC, EPICLON N-695, softening point 95 ° C., epoxy equivalent 214, average reactive group number 7.6): number of glycidyl groups (total number of aromatic rings): 5.0 mol), 360 g (5.0 mol) of acrylic acid, and 1.5 g of hydroquinone were charged, heated and stirred at 100 ° C., and uniformly dissolved.
Next, 4.3 g of triphenylphosphine was charged, heated to 110 ° C. and reacted for 2 hours, and further 1.6 g of triphenylphosphine was added, and the temperature was raised to 120 ° C. and reacted for another 12 hours. To the obtained reaction solution, 562 g of aromatic hydrocarbon (Sorvesso 150) and 684 g (4.5 mol) of tetrahydrophthalic anhydride were charged and reacted at 110 ° C. for 4 hours. Furthermore, 142.0 g (1.0 mol) of glycidyl methacrylate was added to the obtained reaction liquid, and the reaction was performed at 115 ° C. for 4 hours to obtain a carboxyl group-containing photosensitive resin solution (A-2).
The photosensitive resin solution (A-2) thus obtained had a solid content of 65% and an acid value of the solid content of 87 mgKOH / g.
γ-グリシドキシプロピルトリメトキシシラン90.0部、フェニルトリメトキシシラン3.0部、メチルトリメトキシシラン2.0部、メチルイソブチルケトン93部を反応容器に仕込み、80℃に昇温した。昇温後、0.1重量%水酸化カリウム水溶液21.6部を30分間かけて連続的に滴下した。滴下終了後、生成するメタノールを除去しながら80℃にて5時間反応させた。反応終了後、洗浄液が中性になるまで水洗を繰り返した。次いで減圧下で溶媒を除去することによりシルセスキオキサン骨格を有するエポキシ樹脂69部を得た。得られたエポキシ樹脂のエポキシ当量は176g/eq.、重量平均分子量は2200であった。 [Synthesis of epoxy resin having silsesquioxane skeleton B-1]
90.0 parts of γ-glycidoxypropyltrimethoxysilane, 3.0 parts of phenyltrimethoxysilane, 2.0 parts of methyltrimethoxysilane, and 93 parts of methyl isobutyl ketone were charged into a reaction vessel, and the temperature was raised to 80 ° C. After the temperature increase, 21.6 parts of a 0.1 wt% aqueous potassium hydroxide solution was continuously added dropwise over 30 minutes. After completion of the dropping, the reaction was carried out at 80 ° C. for 5 hours while removing the produced methanol. After completion of the reaction, washing with water was repeated until the washing solution became neutral. Next, 69 parts of an epoxy resin having a silsesquioxane skeleton was obtained by removing the solvent under reduced pressure. The epoxy equivalent of the obtained epoxy resin is 176 g / eq. The weight average molecular weight was 2200.
球状シリカ(デンカ社製SFP-30M、平均粒径:600nm)70gと、溶剤としてPMA(プロピレングリコールモノメチルエーテルアセテート)28gと、メタクリル基を有するシランカップリング剤(信越化学工業社製KBM-503)2gとを均一分散させて、シリカ溶剤分散品E-1を得た。 [Preparation of surface-treated inorganic filler (silica) E-1]
70 g of spherical silica (SFP-30M manufactured by Denka Co., Ltd., average particle diameter: 600 nm), 28 g of PMA (propylene glycol monomethyl ether acetate) as a solvent, and a silane coupling agent having a methacryl group (KBM-503 manufactured by Shin-Etsu Chemical Co., Ltd.) 2 g was uniformly dispersed to obtain a silica solvent dispersion E-1.
球状シリカ(デンカ社製SFP-20M、平均粒径:300nm)70gと、溶剤としてPMA(プロピレングリコールモノメチルエーテルアセテート)28gと、エポキシ基を有するシランカップリング剤(信越化学工業社製KBM-403)4gとを均一分散させて、シリカ溶剤分散品E-2を得た。 [Preparation of surface-treated inorganic filler (silica) E-2]
70 g of spherical silica (SFP-20M manufactured by Denka Co., Ltd., average particle size: 300 nm), 28 g of PMA (propylene glycol monomethyl ether acetate) as a solvent, and a silane coupling agent having an epoxy group (KBM-403 manufactured by Shin-Etsu Chemical Co., Ltd.) 4 g was uniformly dispersed to obtain a silica solvent dispersion E-2.
上記の樹脂溶液(ワニス)を、表1~3に示す種々の成分とともに表1~3に示す割合(質量部)にて配合し、攪拌機にて予備混合した後、3本ロールミルで混練し、硬化性樹脂組成物を調製した。 [Examples 1 to 17, Comparative Examples 1 to 5]
The above resin solution (varnish) was blended together with various components shown in Tables 1 to 3 in proportions (parts by mass) shown in Tables 1 to 3, premixed with a stirrer, and then kneaded with a three-roll mill, A curable resin composition was prepared.
上記のようにして得られた硬化性樹脂組成物にメチルエチルケトン300gを加えて希釈し、攪拌機で15分間撹拌して塗工液を得た。塗工液を、算術表面粗さRa150nmである厚さ38μmのポリエチレンテレフタレートフィルム(ユニチカ社製エンブレットPTH-25)上に塗布し、通常、80℃の温度で15分間乾燥し、厚み20μmの感光性樹脂層を形成した。次いで、感光性樹脂層上に、厚み18μmのポリプロピレンフィルム(フタムラ社製OPP-FOA)を貼り合わせて、感光性ドライフィルムを作製した。 <Production of dry film>
The curable resin composition obtained as described above was diluted by adding 300 g of methyl ethyl ketone, and stirred for 15 minutes with a stirrer to obtain a coating solution. The coating solution is applied onto a 38 μm thick polyethylene terephthalate film (Embret PTH-25 manufactured by Unitika Co., Ltd.) having an arithmetic surface roughness Ra of 150 nm, usually dried at a temperature of 80 ° C. for 15 minutes, and a photosensitive material having a thickness of 20 μm. A functional resin layer was formed. Next, a 18 μm-thick polypropylene film (OPP-FOA manufactured by Futamura Co., Ltd.) was bonded onto the photosensitive resin layer to produce a photosensitive dry film.
ロープロファイルの銅箔上に、上記のようにして得られた感光性ドライフィルムからポリエチレンフィルムを剥離して、銅箔表面側に、感光性ドライフィルムの感光性樹脂層を貼り合わせ、続いて、真空ラミネーター(名機製作所製 MVLP-500)を用いて加圧度:0.8MPa、70℃、1分、真空度:133.3Paの条件で加熱ラミネートして、基板と感光性樹脂層とを密着させた。
次に、高圧水銀灯(ショートアークランプ)搭載の露光装置を用いて、感光性ドライフィルム上から露光(露光量:400~600mJ/cm2)した後、感光性ドライフィルムからポリエチレンテレフタレートフィルムを剥離し、感光性樹脂層を露出させた。その後、1重量%Na2CO3水溶液を用いて、30℃、スプレー圧2kg/cm2の条件で60秒間現像を行い、所定のレジストパターンを有する樹脂層を形成した。続いて、高圧水銀灯を備えたUVコンベア炉にて1J/cm2の露光量で樹脂層に照射した後、160℃で60分加熱して樹脂層を完全硬化させて硬化塗膜を作製した。 <Preparation of cured coating film>
On the low profile copper foil, the polyethylene film is peeled from the photosensitive dry film obtained as described above, and the photosensitive resin layer of the photosensitive dry film is bonded to the copper foil surface side. Using a vacuum laminator (MVLP-500 manufactured by Meiki Seisakusho Co., Ltd.), the substrate and the photosensitive resin layer were laminated by heating and laminating under conditions of pressure: 0.8 MPa, 70 ° C., 1 minute, and vacuum: 133.3 Pa. Adhered.
Next, using an exposure apparatus equipped with a high-pressure mercury lamp (short arc lamp), the photosensitive dry film is exposed (exposure amount: 400 to 600 mJ / cm 2 ), and then the polyethylene terephthalate film is peeled off from the photosensitive dry film. The photosensitive resin layer was exposed. Thereafter, development was performed for 60 seconds under conditions of 30 ° C. and a spray pressure of 2 kg / cm 2 using a 1 wt% Na 2 CO 3 aqueous solution to form a resin layer having a predetermined resist pattern. Subsequently, the resin layer was irradiated with an exposure amount of 1 J / cm 2 in a UV conveyor furnace equipped with a high-pressure mercury lamp, and then heated at 160 ° C. for 60 minutes to completely cure the resin layer to prepare a cured coating film.
上記のようにして得られた硬化塗膜を銅箔より剥離し、測定サイズ(5mm×10mmのサイズ)が得られるようにサンプルを切り出し、日立ハイテック社製DMS6100にて25℃から300℃まで昇温5℃/分、周波数1Hz、引張り正弦波モードで測定した。
Tanδは温度測定領域での最大値をとり、その時の温度をTgとし、貯蔵弾性率(E’)は、25℃(E’1)および150℃(E’2)のデータを取った。
貯蔵弾性率(E’)の変化率は、上記2点の貯蔵弾性率を用い、(E’1-E’2)/E’1より算出して得た。 <Evaluation of Tan δ, Tg, storage elastic modulus>
The cured coating film obtained as described above was peeled off from the copper foil, and a sample was cut out to obtain a measurement size (5 mm × 10 mm size), and the temperature was increased from 25 ° C. to 300 ° C. with DMS6100 manufactured by Hitachi High-Tech. Measurement was performed at a temperature of 5 ° C./minute, a frequency of 1 Hz, and a tensile sine wave mode.
Tan δ took the maximum value in the temperature measurement region, the temperature at that time was Tg, and the storage elastic modulus (E ′) was 25 ° C. (E′1) and 150 ° C. (E′2).
The change rate of the storage elastic modulus (E ′) was obtained by calculating from (E′1−E′2) / E′1 using the storage elastic modulus at the two points.
上記のようにして得られた硬化塗膜を銅箔より剥離し、測定サイズ(3mm×10mmのサイズ)が得られるようにサンプルを切り出し、日立ハイテック社製TMA6100にてCTEを測定した。測定条件は、試験荷重5g、サンプルを10℃/分の昇温速度で室温より昇温することを2回繰り返し、2回目におけるTg以上の線膨張係数(CTE(α2))を得た。 <Evaluation of CTE>
The cured coating film obtained as described above was peeled off from the copper foil, a sample was cut out to obtain a measurement size (3 mm × 10 mm size), and CTE was measured with TMA6100 manufactured by Hitachi High-Tech. The measurement conditions were a test load of 5 g, and heating the sample from room temperature at a rate of 10 ° C./min was repeated twice to obtain a linear expansion coefficient (CTE (α2)) of Tg or more in the second time.
C4接続する250μmバンプピッチの回路形成された基板(50mm×50mm×0.4mmt)表面を化学研磨し、上記のようにして得られた感光性ドライフィルムからポリエチレンフィルムを剥離して、表面研磨された側の面に、感光性ドライフィルムの感光性樹脂層を貼り合わせ、続いて、真空ラミネーター(名機製作所製 MVLP-500)を用いて加圧度:0.8MPa、70℃、1分、真空度:133.3Paの条件で加熱ラミネートして、基板と感光性樹脂層とを密着させた。次に、高圧水銀灯(ショートアークランプ)搭載の露光装置を用いて、直径70μmのネガパターンを有する露光マスクを介して、感光性ドライフィルム上から露光した後、感光性ドライフィルムからポリエチレンテレフタレートフィルムを剥離し、感光性樹脂層を露出させた。その後、1重量%Na2CO3水溶液を用いて、30℃、スプレー圧2kg/cm2の条件で60秒間現像を行い、所定のレジストパターンを有する樹脂層を形成した。続いて、高圧水銀灯を備えたUVコンベア炉にて1J/cm2の露光量で樹脂層に照射した後、160℃で60分加熱して樹脂層を完全硬化させて硬化被膜を形成し、基板上に硬化被膜が設けられたTST評価基板を作製した。
次に、C4工法により20mm角のチップを実装した後、プレコンディショニングとして125℃24時間で加熱処理し、60℃湿度60%48時間で加湿処理し、リフロー260℃を3回施した。得られた基板を-65℃と175℃の間の温度サイクルが行われる冷熱サイクル機に入れ、TCT(Thermal Cycle Test)を行った。そして、300サイクル時、600サイクル時および800サイクル時の外観を観察した。
◎◎:1000サイクル以上で異常なし。
◎:800サイクル以上で異常なし。
○:800サイクルでクラック発生。
△:600サイクルでクラック発生。
×:300サイクルでクラック発生。 <Crack resistance (TCT resistance)>
The surface of a circuit board (50 mm × 50 mm × 0.4 mmt) with a 250 μm bump pitch to be connected to C4 is chemically polished, the polyethylene film is peeled off from the photosensitive dry film obtained as described above, and the surface is polished. Next, the photosensitive resin layer of the photosensitive dry film was bonded to the surface on the other side, and subsequently, using a vacuum laminator (MVLP-500, manufactured by Meiki Seisakusho), the degree of pressure was 0.8 MPa, 70 ° C., 1 minute, Vacuum lamination was performed under the condition of 133.3 Pa, and the substrate and the photosensitive resin layer were brought into close contact with each other. Next, using an exposure apparatus equipped with a high-pressure mercury lamp (short arc lamp), after exposing from the photosensitive dry film through an exposure mask having a negative pattern having a diameter of 70 μm, a polyethylene terephthalate film is formed from the photosensitive dry film. It peeled and the photosensitive resin layer was exposed. Thereafter, development was performed for 60 seconds under conditions of 30 ° C. and a spray pressure of 2 kg / cm 2 using a 1 wt% Na 2 CO 3 aqueous solution to form a resin layer having a predetermined resist pattern. Subsequently, the resin layer was irradiated with an exposure amount of 1 J / cm 2 in a UV conveyor furnace equipped with a high-pressure mercury lamp, and then heated at 160 ° C. for 60 minutes to completely cure the resin layer to form a cured film. A TST evaluation substrate provided with a cured coating thereon was produced.
Next, after mounting a 20 mm square chip by the C4 method, heat treatment was performed at 125 ° C. for 24 hours as preconditioning, and humidification treatment was performed at 60 ° C. and humidity 60% for 48 hours, and reflow 260 ° C. was performed three times. The obtained substrate was put into a thermal cycle machine in which a temperature cycle between −65 ° C. and 175 ° C. was performed, and TCT (Thermal Cycle Test) was performed. The appearance at 300 cycles, 600 cycles and 800 cycles was observed.
A: No abnormality after 1000 cycles.
A: No abnormality after 800 cycles.
○: Cracks occurred at 800 cycles.
Δ: Cracks occurred at 600 cycles.
X: Cracks occurred in 300 cycles.
*1:上記で合成したカルボキシル基含有樹脂A-1(アルカリ可溶性基当量:701.3g/eq.)
*2:上記で合成したカルボキシル基含有樹脂A-2(アルカリ可溶性基当量:579g/eq.)
*3:日本化薬社製のPCR-1170H(フェノールノボラック型エポキシ樹脂を出発原料とするカルボキシル基含有樹脂)(アルカリ可溶性基当量:656g/eq.)
*4:上記で合成したシルセスキオキサン骨格を有するエポキシ樹脂B-1(エポキシ当量:176g/eq.、2官能、軟化点:-50℃)
*5:DIC社製エピクロンN-740(フェノールノボラック型エポキシ樹脂、エポキシ当量:180g/eq.、3官能、軟化点:30℃)
*6:DIC社製エピクロンHP-7200H(ジシクロペンタジエン骨格を有するエポキシ樹脂、エポキシ当量:280g/eq.、2官能、軟化点:75~90℃)
*7:DIC社製エピクロンHP-820(アルキルフェノール型エポキシ樹脂、エポキシ当量:225g/eq.、2官能、液状)
*8:新日鉄住金化学社製エポトートYDC-1312(ハイドロキノン型エポキシ樹脂、エポキシ当量:178g/eq.、2官能、軟化点:140℃)
*9:新日鉄住金化学社製エポトートYSLV-80XY(ビスフェノールF型エポキシ樹脂、エポキシ当量:195g/eq.、2官能、軟化点:80℃)
*10:DIC社製エピクロン152(テトラブロモビスフェノールA型エポキシ樹脂、エポキシ当量:360g/eq.、2官能、軟化点:56~66℃)
*11:三菱化学社製jER1001(ビスフェノールA型エポキシ樹脂、エポキシ当量:475g/eq.、2官能、軟化点:64℃)
*12:四国化成社製2PHZ(2-フェニル-4,5-ジヒドロキシメチルイミダゾール)
*13:ジシアンジアミド
*14:日本化薬社製DPHA(ジペンタエリスリトールヘキサアクリレート)
*15:BASFジャパン社製イルガキュアTPO(2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド)
*16:BASFジャパン社製イルガキュアOXE02(エタノン,1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]-1-(o-アセチルオキシム)
*17:上記で調整した表面処理されたシリカ溶剤分散品E-1(反応性基としてメタクリル基を有するシリカ)(シリカ含有量70質量%(固形分))(平均粒径600nm)(表中の数値は固形分量を示す)
*18:上記で調整した表面処理されたシリカ溶剤分散品E-2(反応性基としてエポキシ基を有するシリカ)(シリカ含有量68.6質量%(固形分))(平均粒径300nm)(表中の数値は固形分量を示す)
*19:アドマテックス社製アドマナノYA050C-SV2(反応性基としてビニル基を有するシリカ)(平均粒径50nm)
*20:アドマテックス社製アドマファインSO-C2(球状シリカ、平均粒径0.5μm)
*21:アドマテックス社製アドマファインSO-C5(球状シリカ、平均粒径1.5μm)
*22:日本化薬社製NC-3000L(ビフェニレン型エポキシ樹脂、エポキシ当量:273g/eq.、2官能、軟化点:52℃)
*23:DIC社製EXA-7241(トリフェニルメタン型エポキシ樹脂、エポキシ当量:168g/eq.、3官能、軟化点:70℃)、
*24:DIC社製EPICLON-N660(クレゾールノボラック型エポキシ樹脂、エポキシ当量:210g/eq.、2官能、軟化点:61~69℃)
* 1: Carboxyl group-containing resin A-1 synthesized above (alkali-soluble group equivalent: 701.3 g / eq.)
* 2: Carboxyl group-containing resin A-2 synthesized above (alkali-soluble group equivalent: 579 g / eq.)
* 3: PCR-1170H (carboxyl group-containing resin starting from phenol novolac type epoxy resin) manufactured by Nippon Kayaku Co., Ltd. (alkali-soluble group equivalent: 656 g / eq.)
* 4: Epoxy resin B-1 having a silsesquioxane skeleton synthesized above (epoxy equivalent: 176 g / eq., Bifunctional, softening point: −50 ° C.)
* 5: Epicron N-740 manufactured by DIC (phenol novolac type epoxy resin, epoxy equivalent: 180 g / eq., Trifunctional, softening point: 30 ° C.)
* 6: Epicron HP-7200H manufactured by DIC (epoxy resin having a dicyclopentadiene skeleton, epoxy equivalent: 280 g / eq., Bifunctional, softening point: 75 to 90 ° C.)
* 7: Epicron HP-820 manufactured by DIC (alkylphenol type epoxy resin, epoxy equivalent: 225 g / eq., Bifunctional, liquid)
* 8: Epototo YDC-1312 manufactured by Nippon Steel & Sumikin Chemical Co., Ltd. (hydroquinone type epoxy resin, epoxy equivalent: 178 g / eq., Bifunctional, softening point: 140 ° C.)
* 9: Epototo YSLV-80XY manufactured by Nippon Steel & Sumikin Chemical Co., Ltd. (bisphenol F type epoxy resin, epoxy equivalent: 195 g / eq., Bifunctional, softening point: 80 ° C.)
* 10: Epicron 152 (Tetrabromobisphenol A type epoxy resin, epoxy equivalent: 360 g / eq., Bifunctional, softening point: 56 to 66 ° C.) manufactured by DIC
* 11: jER1001 manufactured by Mitsubishi Chemical Corporation (bisphenol A type epoxy resin, epoxy equivalent: 475 g / eq., Bifunctional, softening point: 64 ° C.)
* 12: Shikoku Chemicals 2PHZ (2-phenyl-4,5-dihydroxymethylimidazole)
* 13: Dicyandiamide * 14: DPHA (dipentaerythritol hexaacrylate) manufactured by Nippon Kayaku Co., Ltd.
* 15: Irgacure TPO (2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide) manufactured by BASF Japan
* 16: Irgacure OXE02 manufactured by BASF Japan Ltd. (Ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl] -1- (o-acetyloxime)
* 17: Surface-treated silica solvent dispersion E-1 prepared above (silica having a methacryl group as a reactive group) (silica content 70% by mass (solid content)) (average particle size 600 nm) (in the table) The numerical value indicates the solid content)
* 18: Surface-treated silica solvent dispersion E-2 prepared above (silica having an epoxy group as a reactive group) (silica content 68.6% by mass (solid content)) (
* 19: Admanex YAMANO YA050C-SV2 (silica having a vinyl group as a reactive group) (average particle size 50 nm)
* 20: Admafine SO-C2 manufactured by Admatechs (spherical silica, average particle size 0.5 μm)
* 21: Admafine SO-C5 manufactured by Admatechs (spherical silica, average particle size 1.5 μm)
* 22: Nippon Kayaku Co., Ltd. NC-3000L (biphenylene type epoxy resin, epoxy equivalent: 273 g / eq., Bifunctional, softening point: 52 ° C.)
* 23: EXA-7241 manufactured by DIC (triphenylmethane type epoxy resin, epoxy equivalent: 168 g / eq., Trifunctional, softening point: 70 ° C.)
* 24: EPICLON-N660 manufactured by DIC (cresol novolac type epoxy resin, epoxy equivalent: 210 g / eq., Bifunctional, softening point: 61 to 69 ° C.)
From the results shown in the above table, it can be seen that the cured products of the curable resin compositions of Examples 1 to 17 of the present invention are excellent in crack resistance. In contrast, in the cured products of the curable resin compositions of Comparative Examples 1 to 5, the maximum value of Tan δ exceeded 0.15, and crack resistance could not be obtained.
Claims (11)
- (A)アルカリ可溶性樹脂、
(B)熱硬化成分、
(C)エチレン性不飽和基を有する化合物、
(D)光重合開始剤、および、
(E)表面処理された無機充填剤を含有する樹脂組成物であって、
前記(E)表面処理された無機充填剤は、平均粒径100nm~1μmであり、且つ、前記(A)アルカリ可溶性樹脂、前記(B)熱硬化成分および前記(C)エチレン性不飽和基を有する化合物の少なくともいずれか1種と反応可能な反応性基を有し、
前記(B)熱硬化成分として、エポキシ当量300g/eq.以下のエポキシ樹脂を含み、
前記樹脂組成物から得られる厚さ40μmの硬化物において、周波数1Hz、昇温速度5℃/minの条件下で25℃~300℃まで動的粘弾性測定した場合におけるTanδの最大値が0.15以下であることを特徴とする硬化性樹脂組成物。 (A) an alkali-soluble resin,
(B) thermosetting component,
(C) a compound having an ethylenically unsaturated group,
(D) a photopolymerization initiator, and
(E) a resin composition containing a surface-treated inorganic filler,
The (E) surface-treated inorganic filler has an average particle diameter of 100 nm to 1 μm, and contains the (A) alkali-soluble resin, the (B) thermosetting component, and the (C) ethylenically unsaturated group. Having a reactive group capable of reacting with at least one of the compounds having
As said (B) thermosetting component, epoxy equivalent 300g / eq. Including the following epoxy resin,
In a cured product having a thickness of 40 μm obtained from the resin composition, the maximum value of Tan δ in a dynamic viscoelasticity measurement from 25 ° C. to 300 ° C. under a condition of a frequency of 1 Hz and a temperature increase rate of 5 ° C./min is 0. A curable resin composition, which is 15 or less. - 前記エポキシ当量300g/eq.以下のエポキシ樹脂として、(B-1)軟化点40℃以下の2官能以上のエポキシ樹脂と(B-2)軟化点40℃を超える2官能以上のエポキシ樹脂を含むことを特徴とする請求項1記載の硬化性樹脂組成物。 The epoxy equivalent 300 g / eq. The following epoxy resin includes (B-1) a bifunctional or higher functional epoxy resin having a softening point of 40 ° C. or lower and (B-2) a bifunctional or higher functional epoxy resin having a softening point of 40 ° C. or lower. The curable resin composition according to 1.
- 前記(C)エチレン性不飽和基を有する化合物の配合量が、前記(A)アルカリ可溶性樹脂100質量部に対し20質量部未満であることを特徴とする請求項1記載の硬化性樹脂組成物。 2. The curable resin composition according to claim 1, wherein the compounding amount of the compound (C) having an ethylenically unsaturated group is less than 20 parts by mass with respect to 100 parts by mass of the (A) alkali-soluble resin. .
- 前記(E)表面処理された無機充填剤の配合量が、硬化性樹脂組成物の固形分中で35質量%以上であることを特徴とする請求項1記載の硬化性樹脂組成物。 The curable resin composition according to claim 1, wherein the amount of the (E) surface-treated inorganic filler is 35% by mass or more in the solid content of the curable resin composition.
- 前記硬化物の周波数1Hz、昇温速度5℃/minの条件下で25℃~300℃まで動的粘弾性測定した場合における、150℃の貯蔵弾性率が1GPa以上であり、且つ、25℃~150℃までの貯蔵弾性率の変化率が70%以内であることを特徴とする請求項1記載の硬化性樹脂組成物。 When the dynamic viscoelasticity measurement is performed from 25 ° C. to 300 ° C. under the conditions of a frequency of 1 Hz and a heating rate of 5 ° C./min, the storage elastic modulus at 150 ° C. is 1 GPa or more and 25 ° C. to The curable resin composition according to claim 1, wherein the rate of change in storage modulus up to 150 ° C is within 70%.
- 前記硬化物のCTEα2が110ppm以下であることを特徴とする請求項1記載の硬化性樹脂組成物。 The curable resin composition according to claim 1, wherein CTEα2 of the cured product is 110 ppm or less.
- 前記硬化物のTgが160℃以上であることを特徴とする請求項1記載の硬化性樹脂組成物。 The curable resin composition according to claim 1, wherein Tg of the cured product is 160 ° C or higher.
- ソルダーレジスト形成用であることを特徴とする請求項1記載の硬化性樹脂組成物。 The curable resin composition according to claim 1, which is used for forming a solder resist.
- 請求項1記載の硬化性樹脂組成物をフィルムに塗布、乾燥して得られる樹脂層を有することを特徴とするドライフィルム。 A dry film comprising a resin layer obtained by applying the curable resin composition according to claim 1 to a film and drying the film.
- 請求項1~8のいずれか一項に記載の硬化性樹脂組成物、または、請求項9記載のドライフィルムの樹脂層を硬化して得られることを特徴とする硬化物。 A curable resin composition according to any one of claims 1 to 8, or a cured product obtained by curing the resin layer of the dry film according to claim 9.
- 請求項10記載の硬化物を有することを特徴とするプリント配線板。
A printed wiring board comprising the cured product according to claim 10.
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