TW202414106A - Template generating apparatus, drawing system, template generating method and computer readable program - Google Patents

Abstract

The region selecting part of the template generating apparatus selects a template region of a predetermined size from CAD data of a pattern to be provided on a substrate. The template generating part generates a gray-scale template 71 by rasterizing the template region of the CAD data with the resolution for imaging of the drawing apparatus. The resolution for imaging is different from the resolution for drawing of the drawing apparatus. The template generating part sets the pixel value of the pixel corresponding to pattern element 93 to the first pixel value, the pixel value of the pixel corresponding to background region 96 to the second pixel value, and the pixel value of edge-containing pixel 95a, which is the pixel containing the edge of pattern element 93, to the third pixel value between the first and second pixel values, for the multiple imaging pixels 95 in the template 71. This can improve the alignment accuracy of the substrate in the drawing system.

Description

Template generating device, drawing system, template generating method and computer readable program

The present invention relates to a technique for generating a template for alignment of a substrate used in a drawing device. [Reference to related applications] This application claims priority to Japanese patent application JP2022-151168 filed on September 22, 2022, and all disclosures of Japanese patent application JP2022-151168 are incorporated herein by reference.

Conventionally, light is irradiated on a photosensitive material formed on a semiconductor substrate, a printed circuit board, an organic EL (electroluminescence) display device, or a glass substrate for a liquid crystal display device (hereinafter referred to as a "substrate") to draw a pattern. In a drawing device used for such drawing, an alignment process is performed, and the alignment process detects the position of an alignment mark set on the substrate and automatically adjusts the drawing position of the pattern.

In recent years, in order to increase the number of pieces that can be obtained from a substrate, the space for arranging alignment marks has been reduced in order to increase the number of slices that can be obtained from a substrate. Therefore, a design is being developed that uses a portion of the pattern on the substrate as an alignment mark, without having to set a dedicated alignment mark on the substrate.

For example, in the exposure device of Japanese Patent Application Laid-Open No. 2013-171988 (Document 1), in an image obtained by photographing a pattern on a substrate, a portion of the pattern is set and pre-registered as a reference mark pattern (i.e., a template), and the reference mark pattern is used for alignment processing. Furthermore, when a substrate to be exposed is brought into the exposure device, a portion of the pattern on the substrate is photographed by a camera, and pattern matching is performed between the obtained image and the reference mark pattern, and alignment processing of the substrate is performed.

On the other hand, Japanese Patent Application Publication No. 2000-236007 (Document 2) proposes a technology for automatically measuring the length of a pattern in a scanning electron microscope, reading pattern data of an arbitrary area from CAD (Computer Aided Design) data, extracting pattern outline edge data from the pattern data, and generating template edge data.

However, in the case where the resolution of the drawing data for the substrate in the drawing device is different from the resolution of the camera used to photograph the pattern on the substrate, there is a concern that quantization error will occur when a binary template is generated from the CAD data in accordance with the resolution of the camera. Specifically, in the area where the edge of the pattern in the CAD data deviates from the boundary of the camera's pixels, it is unclear which binary value (white or black) the pixel containing the edge is. Therefore, there is a possibility that the shape and center of gravity position of the pattern in the generated template are different from the shape and center of gravity position of the actual pattern, making it difficult to improve the alignment accuracy.

The present invention is directed to a template generating device for generating an alignment template for a substrate used in a drawing device, and aims to improve the alignment accuracy of the substrate in the drawing device.

Aspect 1 of the present invention is a template generating device for generating a template, wherein the template is used for aligning a substrate in a drawing device; the template generating device comprises: an area selecting unit for selecting a template area of a predetermined size including at least a part of a pattern element from computer-aided design data of a pattern, wherein the computer-aided design data of a pattern is computer-aided design data of a pattern set on a substrate; and a template generating unit for rasterizing the template area of the computer-aided design data of the pattern at a shooting resolution of a shooting unit of the drawing device that is different from the drawing resolution of the drawing device, thereby generating a gray scale template. The template generating unit sets the pixel value of the pixel corresponding to the pattern element to a first pixel value, sets the pixel value of the pixel corresponding to the background area to a second pixel value, and sets the pixel value of the edge-containing pixel to a third pixel value between the first pixel value and the second pixel value, with the edge-containing pixel being a pixel including the edge of the pattern element.

According to the present invention, the alignment accuracy of the substrate in the drawing device can be improved.

Aspect 2 of the present invention is the template generating device as described in aspect 1, wherein the third pixel value is set based on the position of the edge in the edge-containing pixel.

Aspect 3 of the present invention is a template generating device as described in aspect 1, wherein the third pixel value is set based on the occupancy rate of the pattern element in the edge-containing pixel.

Aspect 4 of the present invention is a template generating device as described in Aspect 1 (or any aspect of Aspect 1 to Aspect 3), further comprising: a template correction unit, which corrects the pixel values of the pixels contained in the edge of the template based on the captured image of the template area obtained by the capturing unit.

The present invention also focuses on a drawing system. Aspect 5 of the present invention is a drawing system comprising: a template generating device as described in any of aspects 1 to 4; and a drawing device that uses the template generated by the template generating device to align the substrate, irradiate light on the substrate, and draw. The above-mentioned drawing device comprises: a stage for holding the above-mentioned substrate on the upper surface of which the above-mentioned pattern is pre-set; a drawing head for irradiating the above-mentioned upper surface of the above-mentioned substrate with modulated light; a scanning mechanism for moving the above-mentioned stage relative to the above-mentioned drawing head in a scanning direction parallel to the above-mentioned upper surface of the above-mentioned substrate; a photographing unit for photographing a part of the above-mentioned pattern; a position detection unit for performing pattern matching using the above-mentioned template on the photographed image obtained by the above-mentioned photographing unit to detect the position of the above-mentioned substrate; a storage unit for storing other pattern computer-aided design data, and the above-mentioned other pattern computer-aided design data is computer-aided design data of other patterns drawn on the above-mentioned pattern; and a data generation unit for gridding the above-mentioned other pattern computer-aided design data and generating grid data (raster) and a drawing control unit, which controls the drawing head and the scanning mechanism based on the grid data and the position of the substrate detected by the position detection unit, thereby executing the drawing of the other patterns on the substrate moving relative to the drawing head in the scanning direction.

The present invention also focuses on a template generation method for generating a template for alignment of a substrate used in a drawing device. Aspect 6 of the present invention is a template generation method for generating a template, wherein the template is used for alignment of a substrate in a drawing device; the template generation method comprises: step a, selecting a template area of a predetermined size including at least a portion of a pattern element from pattern computer-aided design data, wherein the pattern computer-aided design data is computer-aided design data of a pattern set on a substrate; and step b, gridding the template area of the pattern computer-aided design data at a shooting resolution of a shooting unit of the drawing device that is different from the drawing resolution of the drawing device, thereby generating a grayscale template. In the aforementioned step b, for the multiple pixels contained in the aforementioned template, the pixel values of the pixels corresponding to the aforementioned pattern elements are set to a first pixel value, the pixel values of the pixels corresponding to the background area are set to a second pixel value, and the pixel values of the edge-containing pixels are set to a third pixel value between the aforementioned first pixel value and the aforementioned second pixel value, and the aforementioned edge-containing pixels are pixels that include the edge of the aforementioned pattern elements.

The present invention is also directed to a computer readable program for use in generating a template for alignment of a substrate used in a drawing apparatus. Aspect 7 of the present invention is a computer-readable program for use in generating an alignment template for a substrate used in a drawing device; the computer-readable program is executed by a computer to perform: step a, which is to select a template area of a predetermined size including at least a portion of a pattern element from pattern computer-aided design data, wherein the pattern computer-aided design data is computer-aided design data of a pattern set on a substrate; and step b, which is to grid the template area of the pattern computer-aided design data at a shooting resolution of the shooting unit of the drawing device that is different from the drawing resolution of the drawing device, thereby generating a grayscale template. In the aforementioned step b, for the multiple pixels contained in the aforementioned template, the pixel values of the pixels corresponding to the aforementioned pattern elements are set to a first pixel value, the pixel values of the pixels corresponding to the background area are set to a second pixel value, and the pixel values of the edge-containing pixels are set to a third pixel value between the aforementioned first pixel value and the aforementioned second pixel value, and the aforementioned edge-containing pixels are pixels that include the edge of the aforementioned pattern elements.

The above objects and other objects, features, aspects and advantages will become more apparent from the following detailed description of the present invention with reference to the accompanying drawings.

FIG. 1 is a three-dimensional diagram of a drawing system 5 showing one embodiment of the present invention. The drawing system 5 comprises a drawing device 1 and a computer 100. The drawing device 1 is a direct drawing device, which is used to irradiate a light beam that has been spatially modulated to a photosensitive material on a substrate 9, and scan the irradiated area of the light beam on the substrate 9, thereby drawing a pattern. In FIG. 1 , three directions orthogonal to each other are indicated by arrows as the X direction, the Y direction, and the Z direction. In the example shown in FIG. 1 , the X direction and the Y direction are horizontal directions perpendicular to each other, and the Z direction is a vertical direction. The same is true in other figures.

The substrate 9 is, for example, a plate-shaped component that is roughly rectangular when viewed from above. The substrate 9 is, for example, a multi-layer printed wiring substrate (hereinafter referred to as a "printed substrate"). In the present embodiment, a circuit pattern formed by copper (Cu) or the like is pre-formed on the upper surface 91 of the substrate 9, and a resist film formed by a photosensitive material is provided on the circuit pattern. Moreover, in the drawing device 1, a solder pattern is drawn (i.e., formed) on the resist film of the substrate 9. The solder pattern is drawn on the circuit pattern in coordination with the circuit pattern. In addition, an alignment mark dedicated to the position detection process (i.e., alignment process) described later may also be provided on the substrate 9.

In the following description, the pattern (i.e., the circuit pattern) pre-formed on the upper surface 91 of the substrate 9 is also referred to as the "first pattern". In addition, the predetermined pattern (i.e., the welding pattern) drawn on the upper surface 91 of the substrate 9 by the drawing device 1 is also referred to as the "second pattern" or "other pattern". In addition, the type and shape of the substrate 9 can also be changed in various ways. In addition, the pattern drawn on the substrate 9 by the drawing device 1 is not limited to the welding pattern, and can also be changed in various ways.

As shown in FIG1 , the drawing device 1 includes a stage 21, a stage moving mechanism 22, a photographing unit 3, and a drawing unit 4. The stage 21 is a slightly flat substrate holding unit for holding a substrate 9 in a horizontal state from the bottom below the photographing unit 3 and the drawing unit 4 (i.e., on the -Z side). The stage 21 is, for example, a vacuum chuck for adsorbing and holding the lower surface of the substrate 9. The stage 21 may also have a structure other than a vacuum chuck, for example, a mechanical chuck. The upper surface 91 of the substrate 9 placed on the stage 21 is slightly perpendicular to the Z direction and slightly parallel to the X direction and the Y direction.

The stage moving mechanism 22 is a moving mechanism for relatively moving the stage 21 in the horizontal direction (i.e., a direction slightly parallel to the upper surface 91 of the substrate 9) relative to the photographing section 3 and the drawing section 4. The stage moving mechanism 22 has a first moving mechanism 23 and a second moving mechanism 24. The second moving mechanism 24 moves the stage 21 linearly in the X direction along a guide rail. The first moving mechanism 23 moves the stage 21 and the second moving mechanism 24 linearly in the Y direction along the guide rail. The driving source of the first moving mechanism 23 and the second moving mechanism 24 is, for example, a linear servo motor or a structure in which a motor is installed on a ball screw. The structures of the first moving mechanism 23 and the second moving mechanism 24 can also be modified in various ways.

The drawing device 1 may be provided with a stage rotating mechanism for rotating the stage 21 around a rotation axis extending in the Z direction. In addition, the drawing device 1 may be provided with a stage lifting mechanism for moving the stage 21 in the Z direction. For example, a servo motor may be used as the stage rotating mechanism. For example, a linear servo motor may be used as the stage lifting mechanism. The structures of the stage rotating mechanism and the stage lifting mechanism may be modified in various ways.

The photographing section 3 has a plurality of (two in the example shown in FIG. 1 ) photographing heads 31 arranged in the X direction. Each photographing head 31 is supported by a door-shaped head support section 30 above the stage 21 and the stage moving mechanism 22, and the door-shaped head support section 30 is provided so as to straddle the stage 21 and the stage moving mechanism 22. Of the two photographing heads 31, one photographing head 31 is fixed to the head support section 30, and the other photographing head 31 is movable in the X direction on the head support section 30. In this way, the distance between the two photographing heads 31 in the X direction can be changed. In addition, the number of photographing heads 31 of the photographing section 3 may be one or may be three or more.

Each camera head 31 is a camera having a camera sensor and an optical system (not shown). Each camera head 31 is, for example, an area camera for obtaining a two-dimensional image. The camera sensor has a plurality of CCD (Charge Coupled Device) and other camera elements arranged in, for example, a matrix shape. In each camera head 31, the reflected light of the illumination light guided to the upper surface 91 of the substrate 9 from the light source (not shown) is guided to the camera sensor via the optical system. The camera sensor receives the reflected light from the upper surface 91 of the substrate 9, thereby obtaining an image of a roughly rectangular camera area. As the above-mentioned light source, various light sources such as LED (Light Emitting Diode) can be used. In addition, each camera 31 may also be a line camera or other types of cameras.

The drawing section 4 has a plurality of drawing heads 41 arranged in the X direction and the Y direction. In the example shown in FIG. 1 , six drawing heads 41 are arranged in a substantially straight line in the X direction. Each drawing head 41 is supported by a door-shaped head support 40 above the stage 21 and the stage moving mechanism 22, and the door-shaped head support 40 is provided so as to cross the stage 21 and the stage moving mechanism 22. The head support 40 is arranged on the +Y side of the head support 30 of the photographing section 3. In addition, the number of the drawing heads 41 of the drawing section 4 may be appropriately changed. For example, the number of the drawing heads 41 may be one or more than two.

Each drawing head 41 has a light source, an optical system, and a spatial light modulator, which are not shown in the figure. As the spatial light modulator, various elements such as DMD (Digital Micro Mirror Device) or GLV (Grating Light Valve) (registered trademark of Silicon Light Machines, Sunnyvale, California) can be used. As the light source, various light sources such as LD (Laser Diode) can be used. The plurality of drawing heads 41 have a substantially similar structure.

In the drawing device 1, while the modulated (i.e., spatially light modulated) light is irradiated onto the upper surface 91 of the substrate 9 from the plurality of drawing heads 41 of the drawing unit 4, the substrate 9 is moved in the Y direction by the stage moving mechanism 22. Thus, the irradiation area of the light from the plurality of drawing heads 41 is scanned in the Y direction on the substrate 9, and a pattern is drawn on the substrate 9. In the following description, the Y direction is also referred to as the "scanning direction", and the X direction is also referred to as the "width direction". The stage moving mechanism 22 is a scanning mechanism for moving the irradiation area of the light from each drawing head 41 on the substrate 9 in the scanning direction.

In the drawing device 1, the drawing of the substrate 9 can also be performed in a so-called single pass (one pass) method. Specifically, the stage 21 is moved relative to the plurality of drawing heads 41 in the Y direction by the stage moving mechanism 22, and the irradiation area of the light from the plurality of drawing heads 41 is scanned only once in the Y direction (i.e., the scanning direction) on the upper surface 91 of the substrate 9. Thereby, the drawing of the substrate 9 is completed. In addition, in the drawing device 1, the substrate 9 can also be drawn in a multi-pass method by repeatedly moving the stage 21 in the Y direction and step shifting in the X direction. In the case of performing multi-pass drawing in the drawing device 1, the Y direction is the main scanning direction and the X direction is the sub-scanning direction. In addition, the first moving mechanism 23 of the stage moving mechanism 22 is a main scanning mechanism for moving the stage 21 in a main scanning direction; the second moving mechanism 24 is a sub-scanning mechanism for moving the stage 21 in a sub-scanning direction.

FIG2 is a diagram showing the structure of a computer 100. The computer 100 is a general computer having a processor 101, a memory 102, an input/output unit 103, and a bus 104. The bus 104 is a signal circuit for connecting the processor 101, the memory 102, and the input/output unit 103. The memory 102 stores various information. The memory 102 reads and stores, for example, a program 109a and a program 109b, which are program products pre-stored in a storage medium 81. The storage medium 81 is, for example, a USB (Universal Serial Bus) memory or a CD-ROM (Compact Disc Read Only Memory).

The processor 101 executes various processing (e.g., numerical calculation, image processing) by using the memory 102, etc., in accordance with computer-readable programs 109a, 109b, etc. stored in the memory 102. The input/output unit 103 includes a keyboard 105 and a mouse 106 for receiving input from an operator, and a display 107 for displaying output from the processor 101, etc.

In the drawing system 5, the computer 100 executes the program 109a, thereby realizing the various functions of the control unit 10 shown in FIG3. The control unit 10 is a part of the drawing device 1. In addition, in the drawing system 5, the computer 100 executes the program 109b, thereby realizing the various functions of the template generation device 6 shown in FIG4. FIG3 is a block diagram showing the functions of the control unit 10, and FIG4 is a block diagram showing the functions of the template generation device 6. FIG3 also shows the configuration other than the control unit 10, and FIG4 also shows the configuration other than the template generation device 6.

The control unit 10 shown in FIG3 controls the console moving mechanism 22, the photographing unit 3, and the drawing unit 4. The control unit 10 includes a memory unit 111, a photographing control unit 112, a position detection unit 113, a data generation unit 114, and a drawing control unit 115. The memory unit 111 is mainly implemented by the memory 102, and pre-stores various information related to the drawing of the pattern in the drawing device 1. The information stored in the memory unit 111 includes, for example: pattern CAD data, which is CAD data of a predetermined second pattern drawn on the substrate 9 (hereinafter also referred to as "second CAD data"); and information transmitted from the template generation device 6 to the drawing device 1. For example, a template used for alignment described later is transmitted from the template generation device 6 to the drawing device 1.

The photographing control unit 112, the position detection unit 113, the data generation unit 114, and the drawing control unit 115 are mainly implemented by the processor 101. The photographing control unit 112 controls the photographing unit 3 and the stage moving mechanism 22, thereby causing the photographing unit 3 to photograph a portion of the upper surface 91 of the substrate 9 and obtain an image of a portion of the first pattern described above (hereinafter also referred to as a "photographed image"). The photographed image is, for example, a grayscale image. The photographed image is transmitted to the memory unit 111 and stored in the memory unit 111.

The position detection unit 113 performs pattern matching on the captured image of the first pattern described above using a template pre-stored in the memory unit 111, thereby detecting the position of the substrate 9 on the table 21 (i.e., the relative position of the substrate 9 relative to the drawing unit 4). The data generation unit 114 grids the second CAD data described above and generates drawing data belonging to the grid data (hereinafter also referred to as "second drawing data"). The second drawing data is, for example, run length data.

The drawing control unit 115 controls the drawing unit 4 and the stage moving mechanism 22 based on the second drawing data generated by the data generating unit 114 and the position of the substrate 9 detected by the position detecting unit 113, thereby adjusting the drawing position on the substrate 9 while allowing the drawing unit 4 to execute the drawing of the second pattern on the substrate 9.

In addition, the control unit 10 can be implemented by a programmable logic controller (PLC) or a circuit board, or by a combination of these components and one or more computers.

The template generating device 6 shown in FIG. 4 is a device for generating a template (i.e., a reference image) which is used for aligning the substrate 9 in the drawing device 1. The template generating device 6 includes a memory unit 61, an area selecting unit 62, a template generating unit 63, and a template correcting unit 64. The memory unit 61 is mainly implemented by the memory 102, and various information related to the generation of the template is pre-stored. The information stored in the memory unit 61 includes, for example, pattern CAD data belonging to the CAD data of the first pattern described above (hereinafter also referred to as "first CAD data"). The first CAD data includes a plurality of pattern elements used to constitute the first pattern.

The area selection unit 62 selects an area of a predetermined size including at least a part of one or more of the plurality of pattern elements described above from the first CAD data as a template area. The template generation unit 63 grids the template area of the first CAD data at the shooting resolution of the shooting unit 3 (i.e., the resolution of the shooting sensor of the camera 31), thereby generating a grayscale template. The shooting resolution of the shooting unit 3 is different from the drawing resolution of the drawing unit 4 in the drawing device 1. The template correction unit 64 corrects the template generated by the template generation unit 63 as needed. The template generated by the template generation unit 63 and/or the template corrected by the template correction unit 64 is transmitted to the control unit 10.

In addition, the template generating device 6 can be realized by a programmable logic controller (PLC) or a circuit board, etc., or by a combination of these components and one or more computers.

FIG. 5 is a diagram showing an example of a template area 92. The template area 92 is a smaller area that is a part of the first pattern displayed by the first CAD data. The template area 92 is smaller than the field of view of each camera 31 (refer to FIG. 1 ) of the photographing unit 3. In the example shown in FIG. 5 , a roughly rectangular pattern element 93 is included in the template area 92. In FIG. 5 , parallel oblique lines are given to the pattern element 93, and the edge of the pattern element 93 (that is, the boundary between the pattern element 93 and the background area 96) is displayed with a thick line. The same is true in FIG. 6 . The actual template area 92 includes at least a portion of one or more pattern elements, and the one or more pattern elements have shapes that are more complex than the pattern element 93 illustrated in FIG. 5 .

In FIG. 5 , pixels 94 corresponding to the above-described drawing resolution (hereinafter also referred to as “drawing pixels 94”) are shown by dotted lines. A plurality of drawing pixels 94 are arranged in a matrix in the X direction and the Y direction. Each drawing pixel 94 is, for example, a roughly square shape with a side of 1 μm. The drawing resolution is a predetermined resolution when the drawing unit 4 draws a pattern on the substrate 9.

FIG. 6 is a diagram showing that, instead of the drawing pixel 94 shown in FIG. 5 , pixels 95 corresponding to the above-described photographing resolution (hereinafter also referred to as "photographing pixels 95") are arranged in the template area 92. The plurality of photographing pixels 95 indicated by the dotted lines are arranged in a matrix in the X direction and the Y direction. Each photographing pixel 95 is, for example, a roughly square shape with a side of 4 μm. In the examples shown in FIG. 5 and FIG. 6 , the photographing pixel 95 is larger than the drawing pixel 94, and the photographing resolution is lower than the drawing resolution.

As shown in FIG5, the edge 931 on the -X side, the edge 932 on the +Y side, the edge 933 on the +X side, and the edge 934 on the -Y side of the pattern element 93 are located on the boundary of the drawing pixel 94. In addition, as shown in FIG6, the edge 931 on the -X side of the pattern element 93 and the edge 932 on the +Y side of the pattern element 93 are located on the boundary of the photographing pixel 95. On the other hand, the edge 933 on the +X side of the pattern element 93 is offset from the boundary of the photographing pixel 95 in the X direction and vertically extends through the plurality of photographing pixels 95 arranged in the Y direction. Furthermore, the edge 934 on the -Y side of the pattern element 93 is offset from the boundary of the photographing pixels 95 in the Y direction and extends across the plurality of photographing pixels 95 arranged in the X direction.

FIG. 7A and FIG. 7B are diagrams showing templates 70a and 70b of the comparative example, respectively. The templates 70a and 70b of the comparative example are binary templates, which are generated by the template generation device of the comparative example by gridding the template area 92 at the shooting resolution. In the templates 70a and 70b of the comparative example, the pixel value of the shooting pixel 95 in the template element 707 corresponding to the pattern element 93 of the template area 92 is set to "0 (black)", and the pixel value of the shooting pixel 95 in the template background area 708 corresponding to the background area 96 is set to "255 (white)".

As described above, in the template area 92 shown in FIG6 , the edges 931 and 932 of the pattern element 93 are located on the boundary of the photographing pixel 95. Therefore, the positions of the edges 701 and 702 on the -X side and +Y side of the template element 707 in the templates 70a and 70b of the comparative example are substantially the same as the positions of the edges 931 and 932 of the pattern element 93 in the template area 92. The pattern element 93 is shown by a two-point link in FIG7A and FIG7B .

On the other hand, in the template area 92 shown in FIG6 , the edges 933 and 934 of the pattern element 93 are offset from the boundary of the photographing pixel 95. Therefore, the positions of the edges 703 and 704 on the +X side and the -Y side of the template element 707 in the templates 70a and 70b of the comparative examples are different from the positions of the edges 933 and 934 of the pattern element 93 in the template area 92. That is, in the templates 70a and 70b of the comparative examples, a quantization error is generated due to the difference between the drawing resolution and the photographing resolution, and the edge of the template element 707 is offset.

Specifically, in the template 70a of the comparative example, the edge 703 of the template element 707 deviates from the edge 933 of the pattern element 93 indicated by the two-point chain line toward the +X side, and the edge 704 of the template element 707 deviates from the edge 934 of the pattern element 93 indicated by the two-point chain line toward the -Y side. Therefore, in the template 70a of the comparative example, the template element 707 is expanded to the +X side and the -Y side than the actual pattern element 93.

In the template 70b of the comparative example, the edge 703 of the template element 707 deviates from the edge 933 of the pattern element 93 indicated by the two-point chain line toward the -X side, and the edge 704 of the template element 707 deviates from the edge 934 of the pattern element 93 indicated by the two-point chain line toward the +Y side. Therefore, in the template 70a of the comparative example, the template element 707 is reduced to the -X side and the +Y side than the actual pattern element 93.

As described above, in the templates 70a and 70b of the comparative example, the shape and the center of gravity of the template element 707 are different from the shape and the center of gravity of the pattern element 93 in the template area 92. Therefore, when the templates 70a and 70b of the comparative example are used to align the substrate 9, there is a concern that the alignment accuracy of the substrate 9 (i.e., the position accuracy of the substrate 9) is reduced. In addition, in the template generation device of the comparative example, it is unclear which one of the template 70a and the template 70b is generated from the template area 92 shown in FIG. 6. Therefore, it is also difficult to correct the quantization error described above and improve the alignment accuracy.

In contrast, the template generating device 6 of the present embodiment generates a grayscale template 71 as shown in Fig. 8. In Fig. 8, the boundaries of a plurality of photographing pixels 95 arranged in a matrix in the X and Y directions are indicated by dotted lines, and the edges 931 to 934 of the pattern element 93 are indicated by two-point links.

In the template 71, the pixel values of the photographing pixels 95 (i.e., the photographing pixels 95 corresponding to the pattern element 93) included in the substantially rectangular region surrounded by the edges 931 to 934 of the pattern element 93 among the plurality of photographing pixels 95 are set to a predetermined first pixel value (e.g., 0 (black)). In addition, the pixel values of the photographing pixels 95 (i.e., the photographing pixels 95 corresponding to the background region 96 shown in FIG. 5) included in the region outside the substantially rectangular region surrounded by the edges 931 to 934 of the pattern element 93 among the plurality of photographing pixels 95 are set to a predetermined second pixel value (e.g., 255 (white)).

In the template 71, the pixel value of the edge-containing pixel 95a is set to the third pixel value. The edge-containing pixel 95a is a photographic pixel 95 including the edge of the pattern element 93. The third pixel value is a pixel value between the first pixel value and the second pixel value. The third pixel value is, for example, 128 (gray), which is a value in the middle between the first pixel value and the second pixel value. In addition, the edge-containing pixel 95a including the edge of the pattern element 93 is a photographic pixel 95 where the edge of the pattern element 93 passes through a portion other than the boundary. In the edge-containing pixel 95a, the edge of the pattern element 93 intersects with the boundary of the edge-containing pixel 95a and extends from an area outside the boundary of the edge-containing pixel 95a toward an inner area surrounded by the boundary of the edge-containing pixel 95a.

In the example shown in FIG8 , at the end of the +X side of the pattern element 93, the pixel values of four edge-containing pixels 95a each including a portion of the edge 933 are set to the third pixel value. In addition, at the end of the -Y side of the pattern element 93, the pixel values of five edge-containing pixels 95a each including a portion of the edge 934 are set to the third pixel value. In addition, at the corner of the +X side and -Y side of the pattern element 93, one edge-containing pixel 95a includes the end of the edge 933, the end of the edge 934, and the intersection between the edge 933 and the edge 934. The pixel value of the one edge-containing pixel 95a is also set to the third pixel value as described above.

In FIG8 , the photographing pixels 95 set to the first pixel value are given parallel oblique lines, and the photographing pixels 95 set to the second pixel value are not given parallel oblique lines. In addition, the photographing pixels 95 set to the third pixel value (i.e., the edge-containing pixels 95a) are given parallel oblique lines with a wider interval than the photographing pixels 95 set to the first pixel value. In the following description, the set of photographing pixels 95 given parallel oblique lines in FIG8 (i.e., the photographing pixels 95 set to the first pixel value and the photographing pixels 95 set to the third pixel value) is also collectively referred to as a "template element 713."

In this way, in the grayscale template 71, the pixel value of the photographic pixel 95 including the edge of the pattern element 93 (that is, the edge containing the pixel 95a) is set to the third pixel value, thereby enabling the center of gravity position of the template element 713 in the template 71 (that is, the center of gravity position taking into account the concentration of the plurality of photographic pixels 95 used to constitute the template element 713) to be closer to the center of gravity position of the pattern element 93 in the template area 92, compared with the templates 70a and 70b of the comparison example. In other words, in the template 71, the position of the edge of the template element 713 is intentionally blurred in the photographing pixel 95 (that is, the edge-containing pixel 95a) including the edge of the pattern element 95, thereby making the position of the edge of the template element 713 closer to the position of the edge of the pattern element 93 compared with the templates 70a and 70b of the comparative example. Therefore, by using the template 71 to align the substrate 9, the alignment accuracy of the substrate 9 can be improved.

In addition, the first pixel value and the second pixel value described above can be changed in various ways and do not need to be "0 (black)" and "255 (white)" respectively. The third pixel value does not necessarily need to be "128" and can be a pixel value determined between the first pixel value and the second pixel value.

Next, the flow of the drawing device 1 drawing a pattern on the substrate 9 is described with reference to Fig. 9A and Fig. 9B. When drawing on the substrate 9, first, the template 71 (see Fig. 8) used for alignment of the substrate 9 is generated in the template generating device 6 and stored in the memory unit 111 of the control unit 10 (step S11).

Specifically, in step S11, the first CAD data stored in the memory unit 61 of the template generating device 6 is read, and the template area 92 is selected from the first CAD data by the area selecting unit 62 (step S111). Then, the template generating unit 63 grids the template area 92 at the shooting resolution described above, thereby generating a grayscale template 71 (step S112). In the depiction system 5 illustrated in FIG. 1, a plurality of template areas 92 at different positions are selected in step S111, and a plurality of templates 71 corresponding to the plurality of template areas 92 are generated in step S112.

Next, the substrate 9 is carried into the drawing device 1 shown in FIG. 1 and held on the stage 21 (step S12). The stage 21 is located at a carrying-in and carrying-out position on the -Y side of the photographing section 3 and the drawing section 4. The first pattern described above is pre-set on the upper surface 91 of the substrate 9 held on the stage 21. In addition, the step S11 described above (i.e., the generation of the template 71) can be performed in parallel with the step S12 as long as it is performed before the step S14 described later, and can also be performed after the step S12.

When step S12 is completed, the substrate 9 is moved in the +Y direction together with the stage 21 by the stage moving mechanism 22, and is moved toward the bottom of the imaging unit 3. Then, the imaging control unit 112 (refer to FIG. 3 ) controls the imaging unit 3 and the stage moving mechanism 22, thereby imaging a plurality of imaging areas corresponding to the plurality of template areas 92 on the substrate 9, and acquiring a plurality of imaging images including a portion of the first pattern (step S13).

The plurality of shooting areas described above are respectively roughly rectangular areas, and the roughly rectangular areas are areas with the corresponding template area 92 as the roughly center when the substrate 9 is correctly held at the designed position on the stage 21. The shapes and sizes of the plurality of shooting areas described above are the same. The shooting area has a pair of sides parallel to the X direction and the Y direction, respectively, and is larger than the corresponding template area 92 in both the X direction and the Y direction. Therefore, even if the position of the substrate 9 on the stage 21 is slightly deviated from the designed position, the pattern elements 93 contained in the template area 92 are also included in the shot image. The shot image obtained in step S13 is stored in the memory unit 111. In addition, step S13 may be performed before step S11 or in parallel with step S11.

When step S13 is finished, the position detection unit 113 (see FIG. 3 ) of the control unit 10 performs pattern matching on each captured image using the template 71 corresponding to each captured image. The pattern matching is performed by a known pattern matching method (e.g., geometric shape pattern matching or normalized correlation search, etc.). Next, based on the position of the pattern element identical to the template 71 in each captured image and the relative position between the substrate 9 and the capturing unit 3 when each captured image is obtained, the position detection unit 113 detects the position of the substrate 9 on the table 21 (step S14).

The position of the substrate 9 detected by the position detection unit 113 in step S14 includes the coordinates of the substrate 9 in the X direction and the Y direction on the stage 21, the orientation of the substrate 9, and information for displaying deformation caused by distortion of the substrate 9. In addition, the information for displaying deformation of the substrate 9 is information such as the shape of the deformed substrate 9.

As described above, in the drawing system 5, the center of gravity position of the template element 713 in the template 71 shown in FIG8 can be brought close to the center of gravity position of the pattern element 93 in the template area 92 shown in FIG6. Therefore, in step S14, the template 71 is used to align the substrate 9, thereby detecting the position of the substrate 9 on the stage 21 with high precision.

Next, the data generating unit 114 (see FIG. 3 ) reads the second CAD data from the memory unit 111, meshes the second CAD data, and generates the second drawing data (step S15). In addition, step S15 may be performed in parallel with step S14 or before step S14. In the case where step S15 is performed before step S14, for example, step S15 may be performed in parallel with any one of steps S11 to S13, may be performed between any two of steps S11 to S14, or may be performed before step S11.

When the second drawing data is generated, the drawing control unit 115 (see FIG. 3 ) controls the drawing unit 4 and the stage moving mechanism 22 based on the second drawing data and the position of the substrate 9 detected in step S14. Thus, the modulated light described above is irradiated toward the substrate 9 that moves relatively in the Y direction relative to the drawing head 41 of the drawing unit 4, and the second pattern is drawn on the upper surface 91 of the substrate 9 (step S16). In step S16, based on the position of the substrate 9 detected in step S14, the modulation interval and modulation timing of the light beam irradiated from the drawing unit 4 to the substrate 9 and the scanning position of the light beam on the substrate 9 are mechanically and automatically corrected in the drawing unit 4 and the stage moving mechanism 22 by a known correction method. Thus, the second pattern can be drawn on the first pattern with good positional accuracy.

In the template generating device 6, the third pixel value set in the edge-containing pixel 95a in the above-described step S112 does not necessarily need to be fixed to a pixel value, and may be changed based on the position of the edge in the edge-containing pixel 95a, for example.

FIG. 10 shows in an enlarged manner that two edge-containing pixels 95a and photographing pixels 95 near the two edge-containing pixels 95a are arranged in the Y direction. In FIG. 10, the two photographing pixels 95 adjacent to the -X side of the two edge-containing pixels 95a are photographing pixels 95 corresponding to the pattern element 93 shown by the two-dot chain line, and the pixel values of the two photographing pixels 95 are set to the first pixel value. In addition, the other photographing pixels 95 excluding the two edge-containing pixels 95a and the two photographing pixels 95 corresponding to the pattern element 93 described above are photographing pixels 95 corresponding to the background area 96, and the pixel values of the other photographing pixels 95 are set to the second pixel value. In the example shown in FIG. 10 , the first pixel value and the second pixel value are “0 (black)” and “255 (white)”, respectively.

The edge-containing pixel 95a on the +Y side of the two edge-containing pixels 95a is included in the edge 933a extending in the Y direction of the pattern element 93. The edge 933a is located on the +X side of the edge-containing pixel 95a in the X direction (i.e., the direction intersecting the edge 933a in the arrangement direction of the shooting pixels 95). In other words, the area of the region of the edge-containing pixel 95a that overlaps with the pattern element 93 is larger than half of the area of the edge-containing pixel 95a. In other words, the ratio of the region of the edge-containing pixel 95a that overlaps with the pattern element 93 (i.e., the occupancy rate of the pattern element 93 in the edge-containing pixel 95a) is larger than 50%.

The pixel value of the edge-containing pixel 95a on the +Y side (i.e., the third pixel value) is set to, for example, "first pixel value + (second pixel value - first pixel value) × D1/D0". D1 is the distance in the X direction between the edge 933a and the boundary on the +X side of the edge-containing pixel 95a (i.e., the boundary between the shooting pixels 95 corresponding to the background area 96). D0 is the full width of the edge-containing pixel 95a in the X direction. In the example shown in FIG. 10 , the distance D1 is approximately 1/4 of the distance D0, and the third pixel value of the edge-containing pixel 95a on the +Y side is set to "64 (darker gray)".

The edge-containing pixel 95a on the -Y side of the two edge-containing pixels 95a includes an edge 933b extending in the Y direction. The edge 933b is located on the -X side of the edge-containing pixel 95a relative to the center in the X direction. In other words, the area of the region overlapping with the pattern element 93 in the edge-containing pixel 95a is smaller than half of the area of the edge-containing pixel 95a. In other words, the occupancy rate of the pattern element 93 in the edge-containing pixel 95a is smaller than 50%.

The pixel value (i.e., the third pixel value) of the edge-containing pixel 95a on the -Y side is set to, for example, "the first pixel value + (the second pixel value - the first pixel value) × D2/D0". D2 is the distance in the X direction between the edge 933b and the boundary on the +X side of the edge-containing pixel 95a (i.e., the boundary between the photographing pixels 95 corresponding to the background area 96). In the example shown in FIG. 10 , the distance D2 is approximately 3/4 of the distance D0, and the third pixel value set to the edge-containing pixel 95a on the -Y side is "192 (light gray)".

In this way, the third pixel value set in the edge-containing pixel 95a in the template 71 can be changed based on the position of the edge in the edge-containing pixel 95a, thereby making the center of gravity position of the template element 713 in the template 71 closer to the center of gravity position of the pattern element 93 in the template area 92. Therefore, by using the template 71 to align the substrate 9, the alignment accuracy of the substrate 9 can be further improved.

In addition, the third pixel value set in the edge-containing pixel 95a in the template 71 can also be changed based on the ratio of the area overlapping with the pattern element 93 in the edge-containing pixel 95a (that is, the occupancy rate of the pattern element 93 in the edge-containing pixel 95a). For example, the third pixel value set in the edge-containing pixel 95a can also be set to "first pixel value + (second pixel value - first pixel value) × (1-S1/S0)". S1 is the area of the area overlapping with the pattern element 93 in the edge-containing pixel 95a. S0 is the entire area of the edge-containing pixel 95a. In this case, S1/S0 is the occupancy rate of the pattern element 93 in the edge-containing pixel 95a.

In the example shown in FIG. 11 , in one edge-containing pixel 95a at the corner including the +X side and the -Y side of the pattern element 93, the occupancy rate of the pattern element 93 described above is 25%. Therefore, the third pixel value set to the edge-containing pixel 95a is "192". In addition, in three edge-containing pixels 95a located on the +Y side of the edge-containing pixel 95a and four edge-containing pixels 95a located on the -X side of the edge-containing pixel 95a, the occupancy rate of the pattern element 93 described above is 50%. Therefore, the third pixel value set to these seven edge-containing pixels 95a is "128".

In this way, the third pixel value set in the edge-containing pixel 95a in the template 71 can be changed based on the occupancy rate of the pattern element 93 in the edge-containing pixel 95a, thereby making the center of gravity position of the template element 713 in the template 71 closer to the center of gravity position of the pattern element 93 in the template area 92. Therefore, by using the template 71 to align the substrate 9, the alignment accuracy of the substrate 9 can be further improved.

As described above, the template generating device 6 generates a template, which is used for alignment of the substrate 9 in the drawing device 1. The template generating device 6 includes an area selecting unit 62 and a template generating unit 63. The area selecting unit 62 selects a template area 92 of a predetermined size including at least a part of the pattern element 93 from the pattern CAD data (i.e., the first CAD data), which is the CAD data of the pattern set on the substrate 9. The template generating unit 63 grids the template area 92 of the first CAD data at the shooting resolution of the shooting unit 3 of the drawing device 1, thereby generating a grayscale template 71. The shooting resolution is different from the drawing resolution of the drawing device 1.

The template generation unit 63 sets the pixel value of the pixel corresponding to the pattern element 93 to a first pixel value, sets the pixel value of the pixel corresponding to the background area 96 to a second pixel value, and sets the pixel value of the edge-containing pixel 95a belonging to the pixel including the edge of the pattern element 93 to a third pixel value between the first pixel value and the second pixel value. As described above, the reduction in the precision of pattern matching due to the quantization error when the template 71 is generated can be suppressed. As a result, the alignment precision of the substrate 9 in the drawing device 1 can be improved.

As described above, the third pixel value is preferably set based on the position of the edge in the edge-containing pixel 95a. This can further suppress the reduction in precision of pattern matching caused by quantization errors when generating the template 71. As a result, the alignment precision of the substrate 9 in the drawing device 1 can be further improved.

As described above, the third pixel value is preferably set based on the occupancy rate of the pattern element 93 in the edge-containing pixel 95a. This can further suppress the reduction in pattern matching precision caused by the quantization error when generating the template 71. As a result, the alignment precision of the substrate 9 in the drawing device 1 can be further improved.

The drawing system 5 includes the template generation device 6 and the drawing device 1 described above. The drawing device 1 uses the template 71 generated by the template generation device 6 to align the substrate 9, irradiate the substrate 9 with light, and draw. The drawing device 1 includes a stage 21, a drawing head 41, a scanning mechanism (a stage moving mechanism 22 in the example described above), a camera 3, a position detection unit 113, a storage unit 111, a data generation unit 114, and a drawing control unit 115.

The stage 21 holds the substrate 9 having a pattern (i.e., the first pattern) pre-set on the upper surface 91. The imager head 41 irradiates the upper surface 91 of the substrate 9 with modulated light. The scanning mechanism moves the stage 21 relative to the imager head 41 in a scanning direction (in the example described above, the Y direction) parallel to the upper surface 91 of the substrate 9. The imaging unit 3 captures a portion of the first pattern.

The position detection unit 113 detects the position of the substrate 9 by performing pattern matching using the template 71 on the captured image obtained by the imaging unit 3. The storage unit 111 stores other pattern CAD data (i.e., second CAD data), which is CAD data of other patterns (i.e., second patterns) drawn on the first pattern. The data generation unit 114 grids the second CAD data and generates grid data (i.e., second drawing data). In the drawing control unit 115, the drawing head 41 and the scanning mechanism described above are controlled based on the second drawing data and the position of the substrate 9 detected by the position detection unit 113, thereby executing the drawing of the second pattern toward the substrate 9 moving relative to the scanning head 41 in the scanning direction.

As described above, the alignment accuracy of the substrate 9 in the drawing device 1 can be improved in the drawing system 5. Therefore, when drawing the second pattern on the first pattern previously drawn on the substrate 9, the relative position accuracy of the second pattern with respect to the first pattern can be improved.

The template generation method described above has the following steps: selecting a template area 92 of a predetermined size including at least a portion of a pattern element 93 from pattern CAD data (i.e., first CAD data), the pattern CAD data (i.e., first CAD data) being CAD data of a pattern set on a substrate 9 (step S111); and gridding the template area 92 of the first CAD data at a photographing resolution of the photographing unit 3 of the drawing device 1, thereby generating a grayscale template 71 (step S112). The photographing resolution is different from the drawing resolution of the drawing device 1.

In step S112, for a plurality of pixels (photographing pixels 95 in the example described above) included in the template 71, the pixel values of the pixels corresponding to the pattern element 93 are set to the first pixel value, the pixel values of the pixels corresponding to the background area 96 are set to the second pixel value, and the pixel value of the edge-containing pixel 95a is set to the third pixel value between the first pixel value and the second pixel value. The edge-containing pixel 95a is a pixel including the edge of the pattern element 93. Thus, as described above, it is possible to suppress a decrease in the precision of pattern matching due to a quantization error when the template 71 is generated. As a result, it is possible to improve the alignment precision of the substrate 9 in the drawing device 1.

The computer-readable program 109b described above is used when generating the template 71 for alignment of the substrate 9 used in the drawing device 1. The program 109b is executed by the computer 100 to perform the following steps: selecting a template area 92 of a predetermined size including at least a portion of the pattern element 93 from the pattern CAD data (i.e., the first CAD data), which is the CAD data of the pattern set on the substrate 9 (step S111); and gridding the template area 92 of the first CAD data at the shooting resolution of the shooting unit 3 of the drawing device 1, thereby generating a grayscale template 71 (step S112). The shooting resolution is different from the drawing resolution of the drawing device 1.

In step S112, for a plurality of pixels (photographing pixels 95 in the example described above) included in the template 71, the pixel values of the pixels corresponding to the pattern element 93 are set to the first pixel value, the pixel values of the pixels corresponding to the background area 96 are set to the second pixel value, and the pixel value of the edge-containing pixel 95a is set to the third pixel value between the first pixel value and the second pixel value. The edge-containing pixel 95a is a pixel including the edge of the pattern element 93. Thus, as described above, it is possible to suppress a decrease in the precision of pattern matching due to a quantization error when the template 71 is generated. As a result, it is possible to improve the alignment precision of the substrate 9 in the drawing device 1.

In step S11, as shown in FIG. 12, in addition to the above-described steps S111 to S112, the template 71 is corrected (step S113). In step S113, the pixel value (i.e., the third pixel value) of the edge-containing pixel 95a of the template 71 generated in step S112 is corrected by the template correction unit 64 (see FIG. 4). In the template correction unit 64, the pixel value of the edge-containing pixel 95a is corrected based on the captured image of the template area 92 obtained in advance by the capturing unit 3.

In this way, even if the contrast between the pattern and the resist in the captured image (i.e., the contrast between the pattern element 93 and the background area 96) changes due to the color of the resist on the substrate 9 (for example, white, black, green or red, etc.) and the state of the illumination light when the captured image is obtained, the pixel value of the edge containing pixel 95a can be set to an appropriate value in response to the change in the contrast, etc.

Specifically, for example, in the case where the entirety or edge of the pattern in the captured image described above is reflected darker than the first reference value, the pixel value of the pixel 95a included in the edge of the template 71 is corrected from 128 to 64. In addition, in the case where the entirety or edge of the pattern in the captured image described above is reflected brighter than the second reference value and the second reference value is brighter than the first reference value, the pixel value of the pixel 95a included in the edge of the template 71 is corrected from 128 to 192.

Thus, the template generation device 6 preferably further includes a template correction unit 64 that corrects the pixel value of the edge-containing pixel 95a of the template 71 based on the captured image of the template area 92 obtained by the capturing unit 3. This can further suppress the reduction in the precision of pattern matching caused by the quantization error when generating the template 71. As a result, the alignment precision of the substrate 9 in the drawing device 1 can be further improved.

Various changes can be made to the template generating device 6, the drawing system 5, the template generating method and the program 109b described above.

For example, the sizes of the first pixel value, the second pixel value, and the third pixel value are not limited to the examples described above, and various changes may be made.

In the above-described step S11, the template 71 in step S113 does not necessarily need to be corrected. In addition, when the template 71 is not corrected, the template correcting unit 64 can be omitted from the template generating device 6.

The shooting resolution in the drawing device 1 only needs to be different from the drawing resolution, and may be higher than the drawing resolution, for example. That is, the shooting pixel 95 may be smaller than the drawing pixel 94. Even in this case, if the length of one side of the drawing pixel 94 is not an integer multiple of the length of one side of the shooting pixel 95, the quantization error described above may occur. Therefore, by generating a grayscale template using the template generating device 6 described above, the alignment accuracy of the substrate 9 in the drawing device 1 can be improved.

In the above example, although it is described that one main surface of the substrate 9 is drawn, the drawing device 1 can also draw the pattern on both main surfaces of the substrate 9. In this case, when drawing the other main surface of the substrate 9, the template generation device 6 creates a template used for pattern matching from the CAD data of the pattern pre-formed on the other main surface, as described above.

The template generating device 6 may be realized by a computer different from the computer used to realize the control unit 10. In addition, the template generating device 6 does not necessarily need to be provided in the rendering system 5, and may be used as a separate device independent of the rendering device 1.

The substrate 9 described above is not limited to a printed circuit board, but may be, for example, a semiconductor substrate, a glass substrate for a flat panel display device such as a liquid crystal display device or an organic EL display device, a glass substrate for a photomask, or a substrate for a solar cell panel.

The embodiments and configurations of the various modifications described above can be appropriately combined as long as they do not contradict each other.

Although the present invention has been described and illustrated in detail, the above description is for illustrative purposes only and is not intended to be limiting. Therefore, various changes and modifications can be made without departing from the scope of the present invention.

1: drawing device 3: shooting unit 4: drawing unit 5: drawing system 6: template generation device 9: substrate 10: control unit 21: stage 22: stage moving mechanism 23: first moving mechanism 24: second moving mechanism 30,40: head support unit 31: shooting head 41: drawing head 61: memory unit 62: area selection unit 63: template generation unit 64: template correction unit 70a,70b,71: template 81: memory medium 91: upper surface 92: template area 93: pattern element 94: drawing pixel (pixel) 95: shooting pixel (pixel) 95a: edge containing pixel 96: background area 100: Computer 101: Processor 102: Memory 103: Input/output unit 104: Bus 105: Keyboard 106: Mouse 107: Display 109a, 109b: Program 111: Memory unit 112: Shooting control unit 113: Position detection unit 114: Data generation unit 115: Drawing control unit 701, 702, 703, 704, 931 to 934, 933a, 933b: Edge 707, 713: Template element 708: Template background area D0, D1, D2: Distance S11 to S16, S111 to S113: Steps

[Figure 1] is a three-dimensional diagram of a drawing system showing one embodiment. [Figure 2] is a diagram showing the structure of a display computer. [Figure 3] is a block diagram showing the functions of a display control unit. [Figure 4] is a block diagram showing the functions of a display template generation device. [Figure 5] is a diagram showing a display template area. [Figure 6] is a diagram showing a display template area. [Figure 7A] is a diagram showing a template of a comparative example. [Figure 7B] is a diagram showing a template of a comparative example. [Figure 8] is a diagram showing a display template. [Figure 9A] is a diagram showing the flow of drawing a display pattern. [Figure 9B] is a diagram showing the flow of generating a display template. [Figure 10] is a diagram showing a portion of a template in an enlarged manner. [Figure 11] is a diagram showing a display template. [Figure 12] is a diagram showing the flow of generating a display template.

71: Template

93: Graphic elements

95: Pixels for shooting (pixels)

95a: The edge contains pixels

96: Background area

931 to 934: Edge

713: Template elements

Claims (7)

A template generating device is used to generate a template, wherein the template is used for aligning a substrate in a drawing device; The template generating device comprises: An area selecting unit, which selects a template area of a predetermined size including at least a part of a pattern element from pattern computer-aided design data, wherein the pattern computer-aided design data is computer-aided design data of a pattern set on a substrate; and A template generating unit, which grids the template area of the pattern computer-aided design data at a shooting resolution of a shooting unit of the drawing device that is different from the drawing resolution of the drawing device, thereby generating a grayscale template; The template generation unit sets the pixel value of the pixel corresponding to the pattern element to the first pixel value, sets the pixel value of the pixel corresponding to the background area to the second pixel value, and sets the pixel value of the edge-containing pixel to the third pixel value between the first pixel value and the second pixel value, with the edge-containing pixel being a pixel including the edge of the pattern element. A template generating device as recited in claim 1, wherein the third pixel value is set based on the position of the edge in the edge-containing pixel. A template generating device as described in claim 1, wherein the third pixel value is set based on the occupancy rate of the pattern element in the edge-containing pixel. The template generating device as recited in claim 1 further comprises: a template correcting unit that corrects the pixel values of the pixels included in the edge of the template based on the photographed image of the template area obtained by the photographing unit. A drawing system comprises: A template generating device as described in any one of claim 1 to claim 4; and A drawing device, which uses the template generated by the template generating device to align the substrate, irradiate the substrate with light and draw; The drawing device comprises: A stage, which holds the substrate on the upper surface of which the pattern is pre-set; A drawing head, which irradiates the upper surface of the substrate with modulated light; A scanning mechanism, which moves the stage relative to the drawing head in a scanning direction parallel to the upper surface of the substrate; A photographing unit, which photographs a part of the pattern; A position detection unit, which performs pattern matching using the template on the photographed image obtained by the photographing unit, thereby detecting the position of the substrate; The memory unit stores other computer-aided design data of other patterns, wherein the computer-aided design data of other patterns are computer-aided design data of other patterns drawn on the aforementioned pattern; The data generation unit grids the computer-aided design data of other patterns and generates grid data; and The drawing control unit controls the drawing head and the scanning mechanism based on the grid data and the position of the aforementioned substrate detected by the aforementioned position detection unit, thereby executing the drawing of the aforementioned other patterns toward the aforementioned substrate moving relative to the aforementioned drawing head in the aforementioned scanning direction. A template generation method is used to generate a template, wherein the template is used for alignment of a substrate in a drawing device; The template generation method comprises: Step a, selecting a template area of a predetermined size including at least a part of a pattern element from pattern computer-aided design data, wherein the pattern computer-aided design data is computer-aided design data of a pattern set on a substrate; and Step b, gridding the template area of the pattern computer-aided design data at a shooting resolution of a shooting unit of the drawing device that is different from the drawing resolution of the drawing device, thereby generating a grayscale template; In the aforementioned step b, for the plurality of pixels contained in the aforementioned template, the pixel values of the pixels corresponding to the aforementioned pattern elements are set to the first pixel values, the pixel values of the pixels corresponding to the background area are set to the second pixel values, and the pixel values of the edge-containing pixels are set to the third pixel values between the aforementioned first pixel values and the aforementioned second pixel values, and the aforementioned edge-containing pixels are pixels containing the edge of the aforementioned pattern elements. A computer-readable program is used when generating a template for aligning a substrate used in a drawing device; The computer-readable program is executed by a computer to perform: Step a is to select a template area of a predetermined size including at least a part of a pattern element from pattern computer-aided design data, the pattern computer-aided design data being computer-aided design data of a pattern set on a substrate; and Step b is to grid the template area of the pattern computer-aided design data at a shooting resolution of the shooting unit of the drawing device that is different from the drawing resolution of the drawing device, thereby generating a grayscale template; In the aforementioned step b, for the plurality of pixels contained in the aforementioned template, the pixel values of the pixels corresponding to the aforementioned pattern elements are set to the first pixel values, the pixel values of the pixels corresponding to the background area are set to the second pixel values, and the pixel values of the edge-containing pixels are set to the third pixel values between the aforementioned first pixel values and the aforementioned second pixel values, and the aforementioned edge-containing pixels are pixels containing the edge of the aforementioned pattern elements.

Images