TW202410170A - Breaking device and breaking method - Google Patents

Abstract

[Topic] It is possible to reduce the time required to check whether a workpiece has been split. [Solution] The breaking device comprises: a frame fixing unit, which fixes a frame of a workpiece unit formed by a workpiece having a splitting starting point formed along a splitting predetermined line, a sheet to which the workpiece is pasted, and a frame of the periphery to which the sheet is pasted; a detection unit, which detects the splitting predetermined line of the workpiece; a clamping unit, which clamps the workpiece in an area adjacent to the splitting predetermined line to be split from above and below; a pushing member, which clamps the splitting predetermined line to be split and pushes the workpiece in an area adjacent to the splitting predetermined line to be split on the opposite side of the clamping unit to split the workpiece; a load meter, which measures the load of the pushing member pushing the workpiece; and a control unit, which determines the splitting result of whether the splitting predetermined line to be split has been split based on the load value measured by the load meter.

Description

Fracturing device and fracturing method

The present invention relates to a breaking device and a breaking method.

Workpieces such as glass, sapphire, and SiC are divided along a predetermined dividing line to form a plurality of chips. In the case of dividing the workpiece, for example, after a modified layer is formed inside the workpiece by irradiating a laser beam along the predetermined dividing line, the workpiece is divided using various conventional fracture devices (for example, refer to Patent Document 1). [Known Technical Document] [Patent Document]

[Patent Document 1] Japanese Patent Application Publication No. 2019-71390

[Problem to be solved by the invention] The breaking device shown in Patent Document 1 performs splitting by pushing a workpiece with a splitting starting point formed inside along a predetermined splitting line with a pushing member. However, an unsplit area may be formed in the workpiece. In the past, after the pushing member is pushed on all the predetermined splitting lines, the operator confirms whether the splitting has been performed along all the predetermined splitting lines of the workpiece, which consumes working time and urgently hopes for improvement.

The object of the present invention is to provide a breaking device and a breaking method, which can reduce the operation time for confirming whether a workpiece has been divided.

[Technical means to solve the problem] In order to solve the above-mentioned problems and achieve the object, the breaking device of the present invention is characterized by having a frame fixing unit, which is a workpiece unit composed of a workpiece, a sheet to which the workpiece is pasted, and a frame to which the outer periphery of the sheet is pasted. For fixing, the workpiece is set with a plurality of planned division lines and a starting point for division is formed along each of the planned division lines; a detection unit that detects the planned division lines of the workpiece unit that the frame has been fixed by the frame fixing unit; clamping a unit that clamps the workpiece in an area adjacent to the planned dividing line to be divided from the upper and lower sides of the workpiece unit; and a pushing member that clamps the planned dividing line to be divided and pushes the workpiece on the opposite side of the clamping unit The workpiece is pressed in an area adjacent to the planned division line to be divided and the workpiece is broken along the planned division line to be divided, and the breaking device is provided with a load meter that measures the force of the pressing member pushing the workpiece. a load; and a controller that determines the segmentation result of whether the workpiece has been segmented along the scheduled segmentation line that should be segmented based on the load value measured by the load meter.

In the rupture device, the controller may determine the segmentation result based on a decreasing state of the load value within a predetermined time after the load value increases and then turns to decrease.

In the breaking device, the controller can judge the segmentation results of all the predetermined segmentation lines of the workpiece as unsegmented, segmented, or possibly partially unsegmented based on the load value measured by the load meter, and store them.

The breaking device may be provided with a display unit that displays an overall image of the wafer including each of the predetermined separation lines and displays the separation results for each of the predetermined separation lines.

In the fracture device, the detection unit may include a camera, and in a state where an overall view of the wafer unit having a frame fixed by the frame fixing unit is displayed on the display unit, the camera may be positioned to display The planned dividing line corresponding to the planned dividing line of the workpiece unit is photographed on the wafer overall view of the display unit, and the planned dividing line is photographed.

The breaking method of the present invention is characterized by comprising: a workpiece unit forming step, in which a workpiece unit is formed by a workpiece, a sheet to which the workpiece is attached, and a frame to which the sheet is attached, wherein the workpiece has a splitting starting point formed along a predetermined splitting line; a frame fixing step, in which the frame of the workpiece unit is fixed by a frame fixing unit; a detection step, in which the predetermined splitting line to be split is detected from the workpiece unit to which the frame has been fixed by the frame fixing unit; and a clamping step, in which after the detection step is performed, the workpiece unit is clamped from the top and bottom with a clamping unit to separate the sheet from the workpiece unit. A workpiece in an area adjacent to a predetermined dividing line; a dividing step, after the clamping step is performed, clamping the predetermined dividing line to be divided and pushing the workpiece in an area adjacent to the predetermined dividing line to be divided with a pushing member on the opposite side of the clamping unit to break the workpiece along the predetermined dividing line to be divided; a load detection step, during the implementation of the dividing step, detecting the load value of the pushing member pushing the workpiece; and a judging step, based on the load value detected by the load detection step, judging whether the workpiece has been divided along the predetermined dividing line to be divided.

[Invention effect] The present invention has the effect of reducing the work time required to confirm whether a workpiece has been divided.

The method for implementing the present invention (implementation method) is described in detail with reference to the drawings. The present invention is not limited to the contents described in the following implementation methods. Moreover, the constituent elements described below include those that are easily conceivable by a person having ordinary knowledge in the technical field to which the present invention belongs and are substantially the same. Furthermore, the constituent elements described below can be appropriately combined. Moreover, various omissions, substitutions, or changes in the constituent elements can be made without departing from the scope of the present invention.

[Embodiment 1] A breaking device according to Embodiment 1 of the present invention will be described based on the drawings. FIG. 1 is a perspective view schematically showing a structural example of a breaking device according to Embodiment 1. FIG. 2 is a perspective view schematically showing a workpiece unit including a workpiece to be divided by the breaking device according to the first embodiment.

(Workpiece unit) The breaking device 1 shown in FIG. 1 of the first embodiment is a device for dividing the workpiece 201 of the workpiece unit 200 shown in FIG. 2 into individual chips 210. The workpiece unit 200 shown in FIG. 2 includes a workpiece 201, a wafer 202, and a frame 203.

The workpiece 201 is, for example, a wafer such as a semiconductor wafer or an optical element wafer in a circular plate shape using glass, sapphire, SiC, etc. as a substrate 204. As shown in FIG. 2 , the workpiece 201 has a plurality of mutually intersecting predetermined dividing lines 206 set on the front surface 205, and components 207 are formed in the areas divided by the predetermined dividing lines 206. In addition, in the present invention, the substrate 204 of the workpiece 201 may also be made of materials other than glass, sapphire, and SiC, and may not have the components 207 formed thereon.

The element 207 is, for example, an integrated circuit such as IC (Integrated Circuit) or LSI (Large Scale Integration), an image sensor such as CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor), an optical element such as LED (Light-Emitting Diode), or a memory (semiconductor memory device).

Furthermore, the workpiece 201 has a dividing starting point 208 formed along the planned dividing line 206 . In the first embodiment, the dividing starting point 208 is a modified layer formed along the planned dividing line 206 inside the substrate 204. However, in the present invention, in addition to the modified layer, it may also be a process of recessing from the front surface 205. groove. In addition, the modified layer means a region where the density, refractive index, mechanical strength, and other physical properties are different from those of the surroundings. Examples include a melted processing region, a crack region, a dielectric breakdown region, a refractive index change region, and a mixture of these regions. area, etc. The mechanical strength of the modified layer is lower than other parts of the substrate 204 .

The sheet 202 is formed into a circular plate with a diameter larger than the workpiece 201, and the frame 203 is adhered to the periphery and the workpiece 201 is adhered to the center. In the first embodiment, the sheet 202 is adhered to the back surface 209 of the workpiece 201. The sheet 202 is an adhesive film having a base layer and a paste layer, and the paste layer is adhered to the workpiece 201 and the frame 203, the base layer is composed of a non-adhesive and flexible resin, and the paste layer is laminated on the base layer and is composed of an adhesive and flexible resin; or, a sheet having no paste layer and consisting only of a base layer, the base layer is composed of a thermoplastic resin and is hot-pressed to the workpiece 201 and the frame 203.

The frame 203 is formed into a ring shape with an inner diameter larger than the outer diameter of the workpiece 201, and is attached to the outer periphery of the sheet 202. The frame 203 is made of a non-flexible hard material, and in the first embodiment, is made of a magnetic metal.

The workpiece unit 200 is composed of a sheet 202 attached to the back surface 209 of the workpiece 201, a frame 203 attached to the outer periphery of the sheet 202, and the sheet 202 supporting the workpiece 201 in the opening of the frame 203.

(Breaking device) The breaking device 1 of the first embodiment is a device that uses the splitting starting point 208 as a starting point to split the workpiece 201 of the workpiece unit 200, and splits the workpiece 201 into individual chips 210. In addition, the chip 210 has a portion of the substrate 204 and an element 207 formed on the front surface of the substrate 204. As shown in FIG1, the breaking device 1 has a frame fixing unit 10, a detection unit 20, a clamping unit 40, a pressing member 60, a controller, i.e., a control unit 100, a display unit 110, and an input unit not shown.

The frame fixing unit 10 fixes the frame 203 of the workpiece unit 200. The frame fixing unit 10 includes a moving frame 11 movably provided on the device body 2 in an X-axis direction parallel to the horizontal direction by the X-axis moving unit 30 and a frame fixing member 12 disposed on the moving frame 11.

The frame fixing member 12 is formed into a ring shape with an inner and outer diameter equal to that of the frame 203, and the upper surface is formed into a holding surface 13 of the frame 203 for placing the workpiece unit 200 through the outer periphery of the sheet 202. The holding surface 13 is flat along the horizontal direction. In the first embodiment, the frame fixing member 12 has a suction hole opened on the holding surface 13 to be connected to a suction source not shown in the figure.

The frame fixing unit 10 is attracted by the suction source through the suction hole, and the frame 203 placed on the holding surface 13 is attracted and fixed to the holding surface 13 through the sheet 202 . In addition, in the present invention, when the frame 203 is composed of a magnetic body, the frame fixing unit 10 can pre-dispose magnets (permanent magnets or electromagnets) in the frame fixing member 12 to attract and fix them with magnetic force. When the frame 203 placed on the holding surface 13 is made of a non-magnetic material, the frame fixing unit 10 may have a clamp mechanism that clamps the frame 203 between the holding surface 13 and the frame 203 to fix the frame 203 . Furthermore, the frame fixing unit 10 is freely rotatable around an axis parallel to the Z-axis direction (also referred to as the vertical direction) by a rotational drive mechanism (not shown).

In addition, the X-axis moving unit 30 is arranged on the device body 2 and has: a known ball screw, which is configured to rotate freely around the axis; a known motor, which moves the moving frame 11 and the frame fixing member 12 in the X-axis direction by rotating the ball screw around the axis; and a known guide rail 31, which supports the moving frame 11 so that it can move freely in the X-axis direction.

The detection unit 20 detects the planned division line 206 of the workpiece 201 of the workpiece unit 200 whose frame 203 has been fixed by the frame fixing unit 10 . The detection unit 20 is installed on the moving platform 4, which is a door-shaped portal frame 3 erected from the device body 2 across the guide rail 31 of the X-axis moving unit 30, and is moved with the Y-axis moving unit 32. The horizontal direction is parallel to the Y-axis direction and is orthogonal to the X-axis direction. The detection unit 20 is provided on the moving stage 4 and is disposed to be movable in the Y-axis direction by the Y-axis moving unit 32 .

The detection unit 20 includes a camera 21, which has a CCD (Charge Coupled Device) camera element or a CMOS (Complementary MOS) camera element for photographing an object facing the objective lens in the Z-axis direction parallel to the vertical direction. The detection unit 20 obtains the image photographed by the camera element and outputs the obtained image to the control unit 100. In addition, the detection unit 20 photographs the workpiece 201 of the workpiece unit 200 whose frame 203 has been fixed by the frame fixing unit 10, and obtains an image for performing alignment, which is to align the predetermined dividing line 206 of the workpiece 201 with the pushing member 60, etc.

In addition, both surfaces of the portal frame 3 and the moving platform 4 are parallel to the Z-axis direction parallel to the vertical direction and overlapped in parallel with each other at a distance. The Y-axis moving unit 32 is provided on the portal frame 3 and has: a known ball screw, which is set to rotate freely around the axis; a known motor, which moves the moving platform 4 in the Y-axis direction by rotating the ball screw around the axis; and a known guide rail 33, which supports the moving platform 4 to move freely in the Y-axis direction.

Next, the clamping unit 40 will be described. Fig. 3 is a perspective view schematically showing the structure of the lower clamping unit of the clamping unit of the breaking device shown in Fig. 1. Fig. 4 is a side view schematically showing the structure of the upper clamping unit of the clamping unit of the breaking device shown in Fig. 1 in partial section.

The clamping unit 40 clamps the components 207 of the workpiece 201 in the area adjacent to the planned division line 206 to be divided from the top and bottom along the Z-axis direction of the workpiece unit 200 . As shown in FIG. 1 , the clamping unit 40 includes a lower clamping unit 41 and an upper clamping unit 50 .

The lower clamping unit 41 is disposed below the frame fixing unit 10 and pushes the component 207 from below. The component 207 is a corresponding division of the workpiece 201 of the workpiece unit 200 in which the frame 203 has been fixed by the frame fixing unit 10. The area adjacent to the predetermined line 206. As shown in FIG. 3 , the lower clamping unit 41 includes a bracket 42 that can be freely raised and lowered in the Z-axis direction by the Z-axis moving unit 34 , and a rotary body 43 that is supported to be able to rotate around the axis. on the bracket 42; and a plurality of rectangular clamping members 44, which protrude from the outer peripheral surface of the rotating body 4 and have different lengths from each other.

The rotary body 43 is disposed so that its axis is parallel to the Y-axis direction, and both ends are rotatably supported by the bracket 42 . The rotating body 43 rotates around the axis by a rotating mechanism not shown in the figure. Each of the plurality of rectangular holding members 44 is formed in a linear rectangular plate shape with a fixed thickness in the Y-axis direction, and the lengths in the Y-axis direction are different from each other and are formed in various lengths. The length of the longest rectangular clamping member 44 among the plurality of rectangular clamping members 44 is equal to the length of the longest planned division line 206 of the workpiece 201 , and the length of the shortest rectangular clamping member 44 is equal to the length of the workpiece 201 . The shortest planned dividing lines 206 have the same length.

The protruding direction of the plurality of rectangular holding members 44 is changed by the rotation of the rotary body 43 . Among the plurality of rectangular clamping members 44 , if the rectangular clamping member 44 arranged upward in the Z-axis direction from the rotating body 43 is lowered by the Z-axis moving unit 34 , the upper end thereof will be positioned farther than the frame 203 . The sheet 202 of the workpiece unit 200 fixed by the frame fixing unit 10 is lower. If it is raised by the Z-axis moving unit 34, the upper end will be located higher than the workpiece 201 of the workpiece unit 200 fixed by the frame fixing unit 10. . Among the plurality of rectangular clamping members 44 , when the rectangular clamping member 44 arranged upward in the Z-axis direction from the rotating body 43 is raised by the Z-axis moving unit 34 , its upper end moves upward from the back surface 209 side. The component 207 next to the planned division line 206 to be divided in the workpiece 201 is pushed upward.

That is, the lower clamping unit 41 can select the length of the upward rectangular clamping member 44 by changing the orientation around the axis of the rotating body 43, and use the selected rectangular clamping member to 44. Push the component 207 next to the planned dividing line 206 of the workpiece 201 to be divided upward from the back surface 209 side.

In addition, the Z-axis moving unit 34 includes: a conventional ball screw that is rotatable around an axis; a conventional motor that causes the bracket 42 to move up and down in the Z-axis direction by rotating the ball screw around the axis; and a conventional guide rail 35 that supports the bracket 42 so that it can move up and down in the Z-axis direction.

The upper clamping unit 50 is disposed above the frame fixing unit 10, and clamps the frame 203 between the lower clamping unit 41 and the workpiece 201 of the workpiece unit 200 fixed by the frame fixing unit 10, next to the predetermined dividing line 206 to be divided and the component 207 pushed from below by the lower clamping unit 41. The upper clamping unit 50 is set on the moving base 5, and the moving base 5 is moved in the Z-axis direction on the moving table 4 by the lifting unit 36.

The moving base 5 is formed in a flat plate shape with both surfaces parallel to the Z-axis direction, and overlaps the moving base 4 with a gap therebetween. The mobile base 5 is fixed with a horizontal member 6, and both surfaces of the horizontal member 6 are parallel to the horizontal direction.

The lifting unit 36 is disposed on the moving platform 4 and includes: a conventional ball screw which is configured to be rotatable around an axis; a conventional motor 37 which causes the moving platform 5 to be lifted and lowered in the Z-axis direction by rotating the ball screw around the axis; and a conventional guide rail 38 which supports the moving platform 5 so that it can be lifted and lowered in the Z-axis direction.

As shown in FIG. 4 , the upper clamping unit 50 includes a cylinder unit 51 , an upper clamping member 52 , and a sliding unit 53 . The cylinder unit 51 includes a cylinder 54 fixed to the horizontal member 6 and a rod 55 formed in a rod shape parallel to the Z-axis direction and capable of being telescopic from the cylinder 54 and having its lower end lowered when extended from the cylinder 54 .

The upper clamping member 52 is formed into a rectangular plate shape with a fixed thickness and a straight line in the Y-axis direction and both surfaces parallel to the Z-axis direction. The length in the Y-axis direction is the same as the length of the longest planned dividing line 206 of the workpiece 201 . The upper clamping member 52 fixes the lower end of the rod 55 of the cylinder unit 51 at its upper end and overlaps the moving base 5 with a gap therebetween. The upper clamping member 52 faces the rectangular clamping member 44 upward from the rotating body 43 in the Z-axis direction.

Furthermore, the sliding unit 53 supports the upper clamping member 52 so as to be slidable in the Z-axis direction relative to the moving base 5 . The sliding unit 53 includes a linear guide rail 56 fixed to the moving base 5 , which is one of the moving base 5 and the upper clamping member 52 , and parallel to the Z-axis direction; and a slider 57 fixed to the moving base 5 . The other of the moving base 5 and the upper clamping member 52 , that is, the upper clamping member 52 , is supported by the guide rail 56 so as to be slidable in the length direction of the guide rail 56 , that is, in the Z-axis direction.

The upper clamping member 52 is raised by the lifting unit 36 when the rod 55 is extended, so that the lower end is located above the workpiece 201 of the workpiece unit 200 fixed to the frame 203 by the frame fixing unit 10. If it is lowered by the lifting unit 36, the lower end clamps the element 207 next to the predetermined dividing line 206 of the workpiece 201 pushed by the rectangular clamping member 44 and to be divided between the rectangular clamping member 44, and the rectangular clamping member 44 is configured to face upward along the Z-axis direction from the rotating body 43.

The pressing member 60 holds the planned dividing line 206 to be divided and presses the workpiece in the area adjacent to the planned dividing line 206 to be divided on the opposite side of the clamping members 44 and 52 of the clamping unit 40 in the Y-axis direction. 201 of the component 207, and the workpiece 201 is broken along the planned dividing line 206 to be divided (also called dividing). As shown in FIG. 4 , the pressing member 60 is provided on the pressing moving base 62 which is provided on the horizontal member 6 so as to be movable in the X-axis direction by the second X-axis moving unit 61 .

The push-and-move base 62 is formed by having two surfaces parallel to the Z-axis direction and integrally having a thick-walled portion 63 on the upper end side and a thin-walled portion 64 on the lower end side, and is overlapped with a spaced interval on the upper clamping member 52. In the first embodiment, the push-and-move base 62 is formed such that the surfaces of the thick-walled portion 63 and the thin-walled portion 64 on the side away from the upper clamping member 52 are formed into the same plane shape, and a step difference between the thick-walled portion 63 and the thin-walled portion 64 is formed on the side of the upper clamping member 52, and, in the first embodiment, the push-and-move base 62 is provided with an opening 65 having a rectangular plane shape that passes through the thin-walled portion 64.

The second X-axis moving unit 61 is provided with: a conventional ball screw, which is provided on the horizontal member 6 and is freely rotatable around the axis; and a conventional motor 66, which rotates the ball screw around the axis. to move the pressing and moving base 62 in the X-axis direction; and a conventional guide rail 67 to support the pressing and moving base 62 to move freely in the X-axis direction.

Next, the pushing member 60 is explained. FIG5 is a side view schematically showing the pushing member of the fracture device shown in FIG1 in partial section. FIG6 is a front view schematically showing the load measuring portion viewed from the direction of arrow VI shown in FIG5 in partial section. FIG7 is a diagram showing an example of the measurement result of the load meter of the load measuring portion shown in FIG6. FIG8 is a diagram showing another example of the measurement result of the load meter of the load measuring portion shown in FIG6. FIG9 is a diagram showing still another example of the measurement result of the load meter of the load measuring portion shown in FIG6.

The pressing member 60 is formed into a rectangular plate shape that is linear in the Y-axis direction and has both surfaces parallel to the Z-axis direction. The length in the Y-axis direction is equal to the length of the longest planned division line 206 of the workpiece 201 . The pressing member 60 is formed with a tip portion 68 whose thickness gradually becomes thinner toward the lower end portion. In Embodiment 1, the surface of the tip portion 68 on the upper clamping member 52 side is formed flat along the Z-axis direction, and the surface on the side away from the upper clamping member 52 is clamped closer to the upper side as it goes downward. The direction of the member 52 is gradually inclined relative to both the horizontal direction and the Z-axis direction.

Furthermore, the pressing member 60 is supported on the pressing moving base 62 by a pair of sliding units 69 so as to be slidable in the Z-axis direction. The pair of sliding units 69 are arranged with a gap in the Y-axis direction. The sliding unit 69 is provided with: a linear guide rail 691 fixed to the pressing moving base 62 which is one of the pressing moving base 62 and the pressing member 60 and parallel to the Z-axis direction; and a slider 692 , it is fixed to the pressing member 60 , which is the other one of the pressing moving base 62 and the pressing member 60 , and is supported by the guide rail 691 so as to be slidable in the length direction of the guide rail 691 , that is, the Z-axis direction.

The pressing member 60 is raised by the lifting unit 36, so that the lower end is located above the workpiece 201 of the workpiece unit 200 where the frame 203 has been fixed by the frame fixing unit 10. The direction in which the planned dividing line 206 to be divided is pushed downward by the element 207 of the workpiece 201 positioned between the clamping members 44 and 52 . In Embodiment 1, the pressing member 60 presses downward the position where the distance in the X-axis direction of the workpiece 201 from the upper clamping member 52 is approximately 75% to 85% of the width of the wafer 210 . In addition, in the present invention, the pressing member 60 only needs to press downward the position where the distance between the workpiece 201 and the upper clamping member 52 in the X-axis direction is approximately 65% to 95% of the width of the wafer 210 . In addition, if the distance between the pressing position of the pressing member 60 and the upper clamping member 52 in the X-axis direction is too close, it will be difficult to break. If it is too far, the pressing member 60 will retreat to the side of the planned division line 206 that has been broken, and the break will not occur. , therefore, it is preferable that the pressing member 60 positions the distance between the workpiece 201 and the upper clamping member 52 in the X-axis direction to be approximately 65% to 95% of the width of the wafer 210 , and preferably becomes the width of the wafer 210 Push downward at about 75% to 85% of the position. When the pressing member 60 is lowered by the lifting unit 36, the element 207 of the workpiece 201 positioned between the clamping members 44 and 52 pushes the planned dividing line 206 to be divided downward in the Y-axis direction, thereby dividing it. The planned dividing line 206 should be divided.

Furthermore, the pressing member 60 is fixed to the pressing moving base 62 by means of a load measuring portion 70 shown in FIG5 . The load measuring portion 70 is disposed between a pair of sliding units 69. As shown in FIG5 and FIG6 , the load measuring portion 70 includes: a load meter 71 for measuring the value of the load (hereinafter referred to as the load value) of the pressing member 60 pressing the workpiece 201; a holding member 72; a supporting member 73; a spring 75; and a supporting portion 74 (only shown in FIG6 ).

The load meter 71 measures the load value of the pushing member 60 pushing the workpiece 201 in the Z-axis direction. Although it is a known load cell in the first embodiment, it is not limited to a load cell. The load meter 71 outputs the measurement result, i.e., the load value, to the control unit 100. The load meter 71 is disposed in the opening 65 of the pushing movable base 62.

The holding member 72 has one end fixed to the pressing member 60, and the other end extending from the pressing member 60 toward the pressing moving base 62 and disposed in the opening 65 of the pressing moving base 62. The holding member 72 supports the lower end of the load meter 71 at the other end.

The support member 73 is disposed in the opening 65 of the push-moving base 62, the upper end is fixed to the inner surface of the upper side of the opening 65, and the lower end supports the upper end of the load meter 71. The support portion 74 is disposed in the opening 65 of the push-moving base 62, the lower end is fixed to the inner surface of the lower side of the opening 65, and the upper end supports the lower end of the holding member 72.

The spring 75 is disposed between the inner surface of the lower side of the opening 65 and the other end of the retaining member 72, and imparts potential energy to the pushing member 60 relatively upward relative to the pushing moving base 62 through the other end of the retaining member 72. In the first embodiment, the spring 75 imparts potential energy to the retaining member 72 and the pushing member 60 upward with a force corresponding to the total mass of the pushing member 60, the retaining member 72 and the load gauge 71. By imparting potential energy with the aforementioned force by the spring 75, the total mass of the pushing member 60, the retaining member 72 and the load gauge 71 is offset, and the load gauge 71 can measure a load value that is less than the total mass of the pushing member 60, the retaining member 72 and the load gauge 71. Thus, the fracture device 1 is provided with a load meter 71 for measuring the load value of the pressing member 60 pressing the workpiece 201 .

In addition, as shown in FIG. 7 , FIG. 8 and FIG. 9 , the load value of the measurement result of the load meter 71 is zero until the pressing member 60 contacts the workpiece 201 when the upper clamping member 52 and the pressing member 60 are lowered by the lifting unit 36, and rises when the pressing member 60 contacts the workpiece 201. The load value of the measurement result of the load meter 71 is a maximum value of 300 when the pressing member 60 divides the predetermined dividing line 206 to be divided, and decreases from the maximum value of 300 after the division. The load value of the measurement result of the load meter 71 is a load value when the pressing member 60 descends at a constant speed to press the workpiece 201 during a fixed time, and becomes zero when the pressing member 60 withdraws after a fixed time. In addition, the horizontal axis of FIG. 7 , FIG. 8 and FIG. 9 represents the elapsed time, and the vertical axis represents the measurement result of the load meter 71 in terms of the load value.

Furthermore, if the predetermined segmentation line 206 to be segmented is completely segmented (hereinafter referred to as completely segmented), as shown in FIG7 , the load value of the load value measured by the load meter 71 after segmentation becomes less than the first predetermined value 301. In addition, in the first embodiment, the first predetermined value 301 is a first predetermined percentage (for example, 30%) of the maximum value 300, and in the present invention, it may also be a first predetermined load value (for example, 6N) lower than the maximum value 300.

Furthermore, if a portion of the entire predetermined segmentation line 206 to be segmented is segmented and the remainder remains unsegmented (hereinafter referred to as incomplete segmentation), as shown in FIG8 , the load value of the load value measured by the load meter 71 after segmentation becomes greater than the first predetermined value 301 and less than the second predetermined value 302. In addition, the second predetermined value 302 is a value higher than the first predetermined value 301, and in the first embodiment, it is a second predetermined percentage (e.g., 80%) of the maximum value 300, and in the present invention, it may also be a second predetermined load value (e.g., 16N) that is lower than the maximum value 300 and higher than the first predetermined load value.

Furthermore, if the predetermined division lines 206 to be divided are all in an undivided state (hereinafter referred to as undivided), then as shown in FIG. 9 , the load value of the load value measured by the load meter 71 after division becomes approximately the maximum value 300 and becomes greater than the second predetermined value 302.

The control unit 100 controls each of the above-mentioned components of the breaking device 1 respectively, so that the breaking device 1 performs a dividing operation of dividing each planned dividing line 206 of the workpiece 201 . The control unit 100 is a computer, and the computer has: a processing device, which has a microprocessor like a CPU (central processing unit, central processing unit); a memory device, which has a ROM (read only memory, read-only memory). ) or RAM (random access memory, random access memory)-like memory; and input and output interface devices. The arithmetic processing device of the control unit 100 performs arithmetic processing according to the computer program stored in the memory device, and outputs the control signals for controlling the fracture device 1 to the above-mentioned units of the fracture device 1 through the input and output interface device.

The display unit 110 is connected to the control unit 100 and has a display screen 111 for displaying various information. The input unit is used when the operator inputs information, etc. into the control unit 100 of the rupture device 1. The input unit is connected to the control unit 100 and outputs the input information to the control unit 100. The input unit has a touch panel that overlaps with the display screen 111 of the display unit 110.

Furthermore, the control unit 100 includes an operation control unit 101, a determination unit 102, and a storage unit 103. The operation control unit 101 controls each of the above-mentioned components of the breaking device 1 respectively, so that the breaking device 1 performs a dividing operation of dividing each planned dividing line 206 of the workpiece 201 .

The determination unit 102 determines the division result of whether the workpiece 201 has been divided along the planned division line 206 to be divided based on the load value measured by the load meter 71 , and stores the division result in the memory unit 103 . Specifically, after the load value, which is the measurement result of the load meter 71 , increases and changes from the maximum value 300 to the decrease, the determination unit 102 determines based on the elapse of a predetermined time 400 from the maximum value 300 (shown in FIGS. 7 , 8 and 9 ). The subsequent load value is used to determine the dividing result of the planned dividing line 206 that should be divided.

In addition, in the first embodiment, the predetermined time 400 is a shorter time than the time for the lifting unit 36 to lower the pressing member 60. In the first embodiment, for example, the lifting unit 36 lowers the upper clamping member 52 and the pressing member. 60 drops 30% of the time. Furthermore, in the present invention, the predetermined time 400 may be the same as the time for the lifting unit 36 to lower the pressing member 60 .

In the first embodiment, for example, if the load value after the predetermined time 400 elapses from the maximum value 300 is less than the first predetermined value 301, the determination unit 102 determines that the planned division line 206 that should be divided has been completely divided. Furthermore, in the first embodiment, for example, if the load value after a predetermined time 400 (shown in Figures 7, 8 and 9) has elapsed from the maximum value 300 is greater than the first predetermined value 301 and less than the second predetermined value 302, Then the determination unit 102 determines that the planned division line 206 that should be divided is in an incompletely divided state. Furthermore, in Embodiment 1, for example, if the load value after a predetermined time 400 (shown in FIGS. 7 , 8 and 9 ) has elapsed from the maximum value 300 is equal to or greater than the second predetermined value 302, the determination unit 102 determines that the division should be The planned division line 206 is in an undivided state.

In addition, the predetermined values 301 and 302 are preferably appropriately set in advance according to the type of the sheet 202 and the material of the workpiece 201. Moreover, even in the same workpiece 201, the predetermined values 301 and 302 can be set according to the position of the predetermined dividing line 206 (proportional to the length of the predetermined dividing line 206).

Thus, after the load value, which is the measurement result of the load meter 71, increases and turns to decrease from the maximum value 300, the determination unit 102 determines the segmentation result of each scheduled segmentation line 206 based on the state of the load value decrease in the predetermined time 400, and associates each scheduled segmentation line 206 with the segmentation result in a one-to-one manner and stores it in the storage unit 103. Furthermore, the determination unit 102 determines the segmentation result of all the scheduled segmentation lines 206 of the workpiece 201 as unsegmented (equivalent to not being segmented), completely segmented (equivalent to being segmented), or incompletely segmented (equivalent to the possibility that a part is not segmented) based on the load value measured by the load meter 71, and associates it with each scheduled segmentation line 206 and stores it in the storage unit 103.

In addition, the function of the memory unit 103 is realized by the aforementioned memory device. The functions of the motion control unit 101 and the determination unit 102 are realized by the aforementioned operation processing device performing operation processing according to the computer program stored in the memory device.

(Breaking method) Next, the breaking method of the first embodiment is described. FIG. 10 is a flow chart showing the process of the breaking method of the first embodiment. The breaking method of the first embodiment includes the breaking device 1 described above to separate each predetermined separation line 206 of the workpiece 201. As shown in FIG. 10, the breaking method of the first embodiment has a workpiece unit forming step 1001, a frame fixing step 1002, a detection step 1003, a clamping step 1004, a segmentation step 1005, a load detection step 1006 and a judgment step 1007.

(Workpiece unit formation step) The workpiece unit forming step 1001 is a step of forming the workpiece unit 200. The workpiece unit 200 is composed of the following: a workpiece 201 whose planned dividing line 206 forms a dividing starting point 208; a sheet 202 to which the workpiece 201 has been pasted; and a frame. 203, which has been adhered to the outer periphery of the sheet 202. In the first embodiment, in the workpiece unit forming step 1001, the sheet 202 is pasted on the back 209 of the workpiece 201, and the frame 203 is pasted on the outer periphery of the sheet 202 to form the workpiece unit 200 shown in FIG. 2 .

(Frame fixing step) FIG. 11 is a side view schematically showing a main part of the fracturing device after the frame fixing step of the fracturing method shown in FIG. 10 in a partial cross-section. The frame fixing step 1002 is a step of fixing the frame 203 of the workpiece unit 200 with the frame fixing unit 10.

In the first embodiment, in the frame fixing step 1002, in the breaking device 1, the operator or the like operates the input unit to input the splitting condition, and the control unit 100 accepts and registers the splitting condition. In addition, the splitting condition includes the outer diameter of the workpiece 201 of the workpiece unit 200, the number of the splitting predetermined lines 206, the distance between the centers of the width direction of the splitting predetermined lines 206, the descending amount and descending time of the pressing member 60 of the lifting unit 36 during splitting, the width of the wafer 210 after splitting, and the order of splitting the splitting predetermined lines 206.

In the first embodiment, in the frame fixing step 1002, if the control unit 100 receives a start instruction of the splitting action from the operator, the breaking device 1 starts the splitting action, that is, in the first embodiment, the frame fixing step 1002, the detection step 1003, the clamping step 1004, the splitting step 1005, the load detection step 1006 and the judgment step 1007 are started in sequence.

In the first embodiment, in the frame fixing step 1002, the motion control unit 101 of the control unit 100 of the breaking device 1 controls the Z-axis moving unit 34 to lower the lower clamping unit 41, controls the cylinder unit 51 of the upper clamping unit 50 to extend the rod 55, and controls the lifting unit 36 to raise the upper clamping unit 50 and the pushing member 60. Furthermore, in the first embodiment, in the frame fixing step 1002, the motion control unit 101 of the control unit 100 of the breaking device 1 controls the second X-axis moving unit 61 to adjust the position of the pushing member 60 in the X-axis direction in such a way that the distance between the lower end of the upper side clamping member 52 and the lower end of the pushing member 60 in the X-axis direction becomes 75% to 85% of the width of the wafer 210 included in the splitting condition. In addition, in the present invention, the position of the pushing member 60 in the X-axis direction can be adjusted in such a way that the distance between the lower end of the upper side clamping member 52 and the lower end of the pushing member 60 in the X-axis direction becomes 65% to 95% of the width of the wafer 210.

Furthermore, in the first embodiment, in the frame fixing step 1002, the motion control unit 101 of the control unit 100 of the breaking device 1 controls the X-axis moving unit 30 to withdraw the frame fixing unit 10 from between the clamping units 41 and 50. In the first embodiment, in the frame fixing step 1002, the breaking device 1 places the frame 203 of the workpiece unit 200 on the holding surface 13 of the frame fixing unit 10, and the front surface 205 of the workpiece 201 of the workpiece unit 200 is covered by a protective member such as a film that is not shown. In the first embodiment, in the frame fixing step 1002, the motion control unit 101 of the control unit 100 of the breaking device 1 operates the suction source, and as shown in FIG. 11, the frame 203 is attracted and fixed to the holding surface 13 of the frame fixing unit 10.

(Detection step) FIG. 12 is a side view schematically showing the detection step of the fracture method shown in FIG. 10 in partial section. The detection step 1003 is a step of detecting the predetermined dividing line 206 to be divided from the workpiece unit 200 fixed by the frame fixing unit 10 on the frame 203.

In the first embodiment, in the detection step 1003, the motion control unit 101 of the control unit 100 of the fracture device 1 controls the X-axis moving unit 30 and the Y-axis moving unit 32, and based on the order of segmentation according to the segmentation conditions, the detection unit 20 is positioned above the predetermined segmentation line 206 (hereinafter, marked with the symbol 206-1) to be segmented, as shown in FIG. 12, and the camera 21 of the detection unit 20 photographs the area around the predetermined segmentation line 206-1 including the predetermined segmentation line 206-1 of the workpiece 201. In the first embodiment, in the detection step 1003, the motion control unit 101 of the control unit 100 of the fracture device 1 detects the predetermined dividing line 206-1 based on the image captured by the camera 21 of the detection unit 20.

(Clamping step) Fig. 13 is a side view schematically illustrating the clamping step of the fracture method shown in Fig. 10 with a partial cross-section. The clamping step 1004 is a step of clamping the components 207 of the workpiece 201 in the area adjacent to the planned dividing line 206-1 to be divided by the clamping units 41 and 50 from above and below the workpiece unit 200 after the detection step 1003 is performed.

In the first embodiment, in the clamping step 1004, the operation control unit 101 of the control unit 100 of the fracture device 1 controls the rotation mechanism to arrange the rectangular clamping member 44 with a length corresponding to the planned dividing line 206 from the rotation The body 43 is directed upward, and the rotation drive mechanism is controlled to position the planned dividing line 206-1 of the workpiece 201 parallel to the Y-axis direction. In the first embodiment, in the clamping step 1004, the operation control unit 101 of the control unit 100 of the fracture device 1 controls the X-axis moving unit 30 to position the lower end of the upper clamping member 52 in line with the planned division line 206-1 The upper end of the rectangular clamping member 44 is positioned above the adjacent component 207 (corresponding to the area, hereinafter referred to as the symbol 207-1 shown in FIG. 13) on the inner side in the X-axis direction in FIG. The planned division line 206-1 is below the element 207-1 adjacent to the inner side in the X-axis direction in Fig. 1, and the lower end of the pressing member 60 is positioned in line with the planned division line 206-1 in the X-axis direction in Fig. 1 above the adjacent component 207 (corresponding to the area, hereafter, denoted by the symbol 207-2 shown in FIG. 13) adjacent to the front side.

In the first embodiment, in the clamping step 1004, the operation control unit 101 of the control unit 100 of the fracture device 1 controls the Z-axis moving unit 34 to raise the rotating body 43 and the rectangular clamping member 44, and move the rotating body 43 through the sheet 202. The element 207-1 adjacent to the planned dividing line 206-1 of the workpiece 201 is pushed upward, and as shown in FIG. 13, the element 207-1 adjacent to the planned dividing line 206-1 of the workpiece 201 is protected through a protective member (not shown). Component 207-1 is clamped between clamping members 44, 52. At this time, in the first embodiment, the lower end of the pressing member 60 is located above the front surface 205 of the workpiece 201 . After the clamping step 1004, the process proceeds to the dividing step 1005 and the load detection step 1006.

(Separation step and load detection step) FIG. 14 is a side view schematically showing the separation step and load detection step of the fracture method shown in FIG. 10 in partial section. The separation step 1005 is a step of breaking the workpiece 201 along the predetermined separation line 206 to be separated by clamping the predetermined separation line 206 to be separated and pushing the element 207-2 of the workpiece 201 adjacent to the predetermined separation line 206 to be separated with the pushing member 60 on the opposite side of the clamping units 41 and 50 after the clamping step 1004. The load detection step 1006 is a step for detecting the load value of the pushing member 60 pushing the workpiece 201 during the implementation of the segmentation step 1005.

In the first embodiment, in the dividing step 1005, based on the dividing conditions, the operation control unit 101 of the control unit 100 of the fracture device 1 controls the lifting unit 36 so that the moving base 5 and the pressing member 60 of the upper clamping unit 50 decline. In this way, the upper clamping member 52 clamps the component 207-1 of the workpiece 201 adjacent to the planned division line 206-1 between the upper clamping member 52 and the rectangular clamping member 44 through a protective member (not shown). The upper clamping member 52 does not lower, the rod 55 of the cylinder unit 51 shrinks, and the upper clamping member 52 rises relative to the moving base 5 by the sliding unit 53 .

Furthermore, if the moving base 5 and the pressing member 60 of the upper clamping unit 50 move down, the pressing member 60 will move down, and the lower end of the pressing member 60 will contact the front surface of the workpiece 201 through a protective member (not shown). The component 207-2 adjacent to the planned division line 206-1 on the opposite side of the clamping units 41 and 50 of 205, and the pressing member 60 further descends, and as shown in Figure 14, the lower end of the pressing member 60 is located at The lower end of the upper clamping member 52 is further downward and divides the planned division line 206 - 1 between the clamping members 44 and 52 and the pressing member 60 . In Embodiment 1, in the dividing step 1005, the operation control unit 101 of the control unit 100 of the fracture device 1 lowers the moving base 5 and the pressing member 60 in accordance with the dividing conditions, and then controls the lifting unit 36 to move the moving base. 5 and the pressing member 60 rise, and the Z-axis moving unit 34 is controlled to lower the rotating body 43 and the rectangular clamping member 44.

Furthermore, in the first embodiment, in the load detection step 1006 during the implementation of the splitting step 1005, if the lower end of the pressing member 60 abuts against the element 207-2 adjacent to the predetermined splitting line 206-1 on the opposite side of the clamping units 41, 50 of the front surface 205 of the workpiece 201 through the protective member, the measurement result of the load meter 71, that is, the load value, will increase from zero. In the first embodiment, in the load detection step 1006 during the implementation of the splitting step 1005, if the pressing member 60 splits the predetermined splitting line 206-1, the measurement result of the load meter 71, that is, the load value, will decrease from the maximum value of 300. In the first embodiment, in the load detection step 1006 during the implementation of the segmentation step 1005, the action control unit 101 of the control unit 100 of the rupture device 1 associates the measurement result of the load meter 71, i.e., the load value, with the elapsed time and the segmentation predetermined line 206-1 and temporarily stores it in the memory unit 103.

(Judgment step) Judgment step 1007 is a step for judging whether the workpiece 201 has been divided along the predetermined dividing line 206-1 to be divided based on the load value detected by the load detection step 1006.

In the first embodiment, in the judgment step 1007, the judgment unit 102 of the control unit 100 of the fracture device 1 calculates the maximum value 300 of the load value that changes with the elapsed time and is temporarily stored in the memory unit 103. When calculating the maximum value 300, the determination unit 102 of the control unit 100 differentiates the load value that changes with the elapsed time using time, and determines the value obtained by performing the differentiation, that is, the change amount of the load value to be the maximum. The load value for time is calculated to a maximum value of 300. Furthermore, in the present invention, the operation control unit 101 of the control unit 100 may calculate the load value at the time when the load value changes from rising to falling as the maximum value 300.

In the first embodiment, in the judgment step 1007, the judgment unit 102 of the control unit 100 of the fracture device 1 judges that the load value after a predetermined time 400 elapses from the maximum value 300 is which of the following: less than the first predetermined value 301; The value is above 301 and less than the second predetermined value 302; or above the second predetermined value 302. In the first embodiment, in the judgment step 1007, if the load value after the predetermined time 400 elapses from the maximum value 300 is less than the first predetermined value 301, the judgment part 102 of the control unit 100 of the fracture device 1 judges whether the planned division line 206 is The segmentation result is complete segmentation.

In the first embodiment, in the determination step 1007, if the load value after the predetermined time 400 from the maximum value 300 is greater than the first predetermined value 301 and less than the second predetermined value 302, the determination unit 102 of the control unit 100 of the rupture device 1 determines that the segmentation result of the predetermined segmentation line 206 is incomplete segmentation. In the first embodiment, in the determination step 1007, if the load value after the predetermined time 400 from the maximum value 300 is greater than the second predetermined value 302, the determination unit 102 of the control unit 100 of the rupture device 1 determines that the segmentation result of the predetermined segmentation line 206 is not segmented. In the first embodiment, in the determination step 1007, the breaking device 1 associates the segmentation result determined by the determination unit 102 of the control unit 100 with the predetermined segmentation line 206 and stores the result in the storage unit 103.

Thereafter, the operation control unit 101 of the control unit 100 determines whether the dividing operations of all planned dividing lines 206 have been completed based on the dividing conditions (step 1008 ). If the operation control unit 101 of the control unit 100 determines that the dividing operations of all the planned dividing lines 206 have not been completed (step 1008: No), it returns to the detection step 1003, and based on the dividing conditions, continues to perform the division of the planned dividing lines 206 that should be divided. The dividing operations are the detection step 1003, the clamping step 1004, the dividing step 1005 and the load detection step 1006. Furthermore, in Embodiment 1, the breaking device 1 sequentially performs the dividing operation starting from the planned dividing line 206 at the end of the planned dividing lines 206 of the workpiece 201 . If the operation control unit 101 of the control unit 100 determines that the dividing operations of all planned dividing lines 206 have been completed (step 1008: Yes), the breaking device 1 ends the dividing operations.

In addition, in the first embodiment, during the splitting operation, if the splitting operation of all the splitting predetermined lines 206 in one direction parallel to each other among the splitting predetermined lines 206 is completed, the frame fixing member 12 is rotated 90 degrees around the axis to perform the splitting operation of the splitting predetermined lines 206 in another direction parallel to each other among the splitting predetermined lines 206. At this time, when the splitting operation is performed on the splitting predetermined lines 206 in the other direction, the splitting predetermined lines 206 in one direction are split, so that the splitting predetermined lines 206 that are not completely split are easily generated. Therefore, in the first embodiment, the breaking device 1 preferably performs the splitting operation again on the splitting predetermined lines 206 that are judged to be unsplit or incompletely split.

Moreover, in the first embodiment, during the dividing operation, the display unit 110 of the breaking device 1 can display the dividing status display information 500 shown in FIG. 15 on the display screen 111. In addition, FIG. 15 is a diagram schematically showing an example of division status display information displayed on the display screen by the display unit of the breaking device shown in FIG. 1 .

In the first embodiment, the division status display information 500 is displayed on the display screen 111 by pressing any one of the plurality of operation areas 502 set in the menu area 501 at the lower part of the display screen 111 . In the first embodiment, the division status display information 500 is configured with a wafer overall image display area 510 and a division result display area 520.

The overall wafer image display area 510 displays the overall wafer image 511 generated by the operation control unit 101 of the control unit 100 . The overall wafer diagram 511 shows the segmentation results of the planned segmentation lines 206 of the workpiece 201 and the positions of the planned segmentation lines 206 of the workpiece 201 based on the operation control unit 101 of the control unit 100 based on the segmentation conditions. In addition, in FIG. 15 , the planned division line 206 for which the division operation has not been performed is shown as a dotted white line, for example, and the planned division line 206 for which the division result is a complete division is shown as a solid line, for example, as a dotted chain line. The yellow color indicates that the segmentation result is the planned segmentation line 206 that is incompletely segmented. For example, the red color shown by the two-dot chain line indicates that the segmentation result is the scheduled segmentation line 206 that is not segmented.

The segmentation result display area 520 is provided with: a measurement result display area 521, which shows the measurement result of the load meter 71; a first maximum value display area 522, which shows the maximum value 300 of the plurality of segmentation scheduled lines 206 that have been recently segmented in a bar graph; a load value display area 523, which shows the change of the load value of the plurality of segmentation scheduled lines 206 that have been recently segmented; and a second maximum value display area 524, which shows the maximum value 300 of one segmentation scheduled line 206 that has been recently segmented. In this way, the display unit 110 displays the wafer overall image 511 including each segmentation scheduled line 206 by displaying the segmentation status display information 500, and displays the segmentation result for each segmentation scheduled line 206.

Furthermore, if any position on the wafer overall view 511 of the display unit 110 is pressed during the temporary stop period or in a state where the dividing operation is not performed after the dividing operation is completed, the control unit 100 of the breaking device 1 of the first embodiment will The operation control unit 101 controls the X-axis movement unit 30 and the Y-axis movement unit 32 to position the detection unit 20 above the pressed position of the workpiece 201 . The operation control unit 101 of the control unit 100 of the fracture device 1 captures the pressed position of the workpiece 201 with the camera 21 of the detection unit 20, and obtains an image 600 shown in FIG. 16 as an example. The fracture device 1 of the first embodiment displays the image 600 obtained by photographing the pressed position of the workpiece 201 on the display screen 111 of the display unit 110 by pressing the operation area 502 of the menu area 501 or the like.

In addition, FIG. 16 is a diagram schematically showing a part of the front side of the workpiece captured by the camera on the display screen of the display unit of the breaking device shown in FIG. 1 . In addition, the image 600 shown in FIG. 16 includes the groove 211 formed by dividing the workpiece 201 along the planned dividing line 206. In this way, the breaking device 1 displays the overall wafer view 511 of the workpiece unit 200 with the frame 203 fixed by the frame fixing unit 10 on the display unit 110, and positions the camera 21 to the wafer displayed on the display unit 110. The planned dividing line 206 of the workpiece unit 200 corresponds to the planned dividing line 206 specified on the circular overall diagram 511, and the planned dividing line 206 is photographed.

The breaking device 1 and breaking method of the first embodiment described above include: a load meter 71, which measures the load of the pushing member 60 pushing the workpiece 201; and a judgment unit 102, which judges whether the workpiece 201 has been split along the predetermined splitting line 206-1 to be split based on the load value measured by the load meter 71, thereby achieving the following effect: the operation time of the operator who confirms whether the workpiece 201 has been split can be reduced.

Furthermore, in the breaking device 1 and the breaking method of the first embodiment, the judgment section 102 of the control unit 100 judges the segmentation result based on the decreasing state of the load value within a predetermined time 400 after the measurement result of the load meter 71, i.e., the load value, increases and then decreases, thereby being able to correctly judge the segmentation result of the workpiece 201.

Furthermore, in the breaking device 1 and the breaking method of the first embodiment, the judgment section 102 of the control unit 100 judges the segmentation results of all the predetermined segmentation lines 206 of the workpiece 201 as unsegmented, completely segmented or incompletely segmented based on the load value measured by the load meter 71, and memorizes them, so that the segmentation results of each predetermined segmentation line 206 can be grasped.

Furthermore, in the rupture device 1 and the rupture method of the first embodiment, the display unit 110 displays the overall wafer diagram 511 which displays the division results of each planned division line 206, so the operator can easily grasp each division. The segmentation result of the predetermined line 206.

Furthermore, in the rupture device 1 and the rupture method of the first embodiment, while the overall wafer diagram 511 is displayed on the display unit 110, the camera 21 captures the specified divisions on the overall wafer diagram 511 displayed on the display unit 110. The operator can grasp the dividing result of the planned dividing line 206 at any position.

In addition, the present invention is not limited to the above-described embodiment. That is, various modifications can be made and implemented without departing from the gist of the present invention. For example, in the present invention, the front surface 205 of the workpiece 201 can also be pasted on the sheet 202 . In this case, the breaking device 1 preferably disposes the detection unit 20 below the workpiece unit 200 where the frame 203 is fixed by the frame fixing unit 10 .

1:Breaking device 10: Frame fixing unit 20:Detection unit 21:Camera 40: Clamping unit 60:Push member 71:Load meter 100: Control unit (controller) 102:Judgement Department 103:Memory Department 110:Display unit 200: Workpiece unit 201:Artifact 202:Thin slices 203:Frame 206: Split scheduled line 206-1: The planned division line that should be divided 207:Component 207-1:Component (area) 207-2:Component (area) 208: Split starting point 400: Scheduled time 511: Overall picture of wafer 1001: Workpiece unit formation steps 1002: Frame fixing steps 1003:Detection steps 1004: Clamping step 1005: Segmentation step 1006: Load detection step 1007: Judgment steps

FIG. 1 is a perspective view schematically showing a structural example of a breaking device according to Embodiment 1. FIG. 2 is a perspective view schematically showing a workpiece unit including a workpiece to be divided by the breaking device according to the first embodiment. FIG. 3 is a perspective view schematically showing the structure of a lower clamping unit of the clamping unit of the breaking device shown in FIG. 1 . FIG. 4 is a side view schematically showing, in partial cross-section, the structure of an upper clamping unit of the clamping unit of the breaking device shown in FIG. 1 . FIG. 5 is a side view schematically showing a pressing member of the breaking device shown in FIG. 1 with a partial cross-section. FIG. 6 is a partial cross-section schematically showing a front view of the load measuring unit viewed from the direction of arrow VI shown in FIG. 5 . FIG. 7 is a diagram showing an example of measurement results of the load meter of the load measuring unit shown in FIG. 6 . FIG. 8 is a diagram showing another example of measurement results of the load meter of the load measuring unit shown in FIG. 6 . FIG. 9 is a diagram showing still another example of the measurement results of the load meter of the load measuring unit shown in FIG. 6 . FIG. 10 is a flowchart showing the flow of the breaking method according to the first embodiment. FIG. 11 is a side view schematically showing, in partial cross-section, the main part of the breaking device after the frame fixing step of the breaking method shown in FIG. 10 . FIG. 12 is a side view schematically showing, in partial cross-section, the detection steps of the fracture method shown in FIG. 10 . Fig. 13 is a side view schematically illustrating the clamping step of the fracture method shown in Fig. 10 with a partial cross-section. FIG. 14 is a side view schematically showing, in partial cross-section, the dividing step and the load detection step of the fracture method shown in FIG. 10 . FIG. 15 is a diagram schematically showing an example of division status display information displayed on the display screen by the display unit of the breaking device shown in FIG. 1 . FIG. 16 is a diagram schematically showing a part of the front side of the workpiece captured by the camera on the display screen of the display unit of the breaking device shown in FIG. 1 .

60: Pushing component

61: Second X-axis moving unit

63: Thick wall part

64: Thin wall part

65:Open your mouth

66: Motor

67: Guide rail

68: Tip

70:Load measurement department

71: Load meter

72:Keep components

73: Supporting components

75: Spring

VI:arrow

Claims (6)

A breaking device, which is provided with: a frame fixing unit, which fixes the frame of the workpiece unit composed of a workpiece, a sheet to which the workpiece has been pasted, and a frame to which the outer periphery of the sheet has been pasted, and the workpiece is set with a plurality of scheduled division lines And a starting point for dividing is formed along each planned dividing line; a detection unit that detects the planned dividing line of the workpiece unit in which the frame has been fixed by the frame fixing unit; and a clamping unit that clamps the workpiece unit from above and below the workpiece in an area adjacent to the planned dividing line that should be divided; and a pressing member that clamps the planned dividing line that should be divided and presses the workpiece on the opposite side of the clamping unit to the planned dividing line that should be divided The workpiece in the adjacent area is broken along the planned dividing line that should be divided, The breaking device has: A load meter that measures the load of the pushing member pushing the workpiece; and A controller determines the segmentation result of whether the workpiece has been segmented along the scheduled segmentation line that should be segmented based on the load value measured by the load meter. A rupture device as claimed in claim 1, wherein the controller determines the segmentation result based on a decreasing state of the load value within a predetermined time after the load value increases and then turns to decrease. As in claim 1, the controller determines the segmentation result as unsegmented, segmented, or possibly partially unsegmented for all the predetermined segmentation lines of the workpiece based on the load value measured by the load meter, and stores the result. A breaking device as in any one of claims 1 to 3, wherein a display unit is provided, The display unit displays an overall image of the wafer including each of the predetermined splitting lines, and displays the splitting result for each of the predetermined splitting lines. As in claim 4, the detection unit includes a camera, and when the overall wafer image of the workpiece unit fixed by the frame fixing unit is displayed on the display unit, the camera is positioned at the predetermined splitting line of the workpiece unit corresponding to the predetermined splitting line specified on the overall wafer image displayed on the display unit, and the predetermined splitting line is photographed. A fracture method that has: A workpiece unit forming step, which forms a workpiece unit composed of a workpiece, a sheet to which the workpiece has been pasted, and an outer peripheral frame to which the sheet has been pasted, and the workpiece is formed with a starting point for segmentation along a planned segmentation line; a frame fixing step, which uses a frame fixing unit to fix the frame of the workpiece unit; a detection step that detects the planned division line that should be divided from the workpiece unit that the frame has been fixed by the frame fixing unit; A clamping step, which after performing the detection step, uses clamping units from above and below the workpiece unit to clamp the workpiece in the area adjacent to the planned division line to be divided; The dividing step includes, after performing the clamping step, sandwiching the planned dividing line to be divided and pressing the area adjacent to the planned dividing line to be divided with a pressing member on the opposite side of the clamping unit The workpiece is broken along the planned dividing line that should be divided; a load detection step that detects the load value of the pressing member pressing the workpiece during the implementation of the dividing step; and A judging step, which judges the dividing result of whether the workpiece has been divided along the planned dividing line that should be divided based on the load value detected in the load detecting step.