TW202338211A - 低溫泵的再生方法及低溫泵 - Google Patents
低溫泵的再生方法及低溫泵 Download PDFInfo
- Publication number
- TW202338211A TW202338211A TW112104224A TW112104224A TW202338211A TW 202338211 A TW202338211 A TW 202338211A TW 112104224 A TW112104224 A TW 112104224A TW 112104224 A TW112104224 A TW 112104224A TW 202338211 A TW202338211 A TW 202338211A
- Authority
- TW
- Taiwan
- Prior art keywords
- cryopump
- temperature
- regeneration
- container
- pressure
- Prior art date
Links
- 238000011069 regeneration method Methods 0.000 title claims abstract description 80
- 230000008929 regeneration Effects 0.000 claims abstract description 75
- 238000000034 method Methods 0.000 claims abstract description 51
- 238000010926 purge Methods 0.000 claims abstract description 35
- 238000010438 heat treatment Methods 0.000 claims abstract description 8
- 238000005086 pumping Methods 0.000 claims description 45
- 230000008569 process Effects 0.000 claims description 38
- 230000008859 change Effects 0.000 claims description 31
- 238000011010 flushing procedure Methods 0.000 claims description 7
- 230000001172 regenerating effect Effects 0.000 claims description 3
- 230000003213 activating effect Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 95
- 238000005259 measurement Methods 0.000 description 13
- 239000000203 mixture Substances 0.000 description 13
- 238000001816 cooling Methods 0.000 description 11
- 238000012360 testing method Methods 0.000 description 10
- 239000003507 refrigerant Substances 0.000 description 8
- 238000003860 storage Methods 0.000 description 8
- 239000002341 toxic gas Substances 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000012530 fluid Substances 0.000 description 5
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 231100001261 hazardous Toxicity 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000004590 computer program Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022-040910 | 2022-03-16 | ||
| JP2022040910 | 2022-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202338211A true TW202338211A (zh) | 2023-10-01 |
Family
ID=88022757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW112104224A TW202338211A (zh) | 2022-03-16 | 2023-02-07 | 低溫泵的再生方法及低溫泵 |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN118786282A (ja) |
| TW (1) | TW202338211A (ja) |
| WO (1) | WO2023176157A1 (ja) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5846966B2 (ja) * | 2012-03-01 | 2016-01-20 | 住友重機械工業株式会社 | クライオポンプ及びその再生方法 |
| JP6124626B2 (ja) * | 2013-03-12 | 2017-05-10 | 住友重機械工業株式会社 | クライオポンプ及びその再生方法 |
| JP2019203508A (ja) * | 2019-08-23 | 2019-11-28 | 住友重機械工業株式会社 | クライオポンプシステム、クライオポンプ制御装置、クライオポンプ再生方法、及びクライオポンプ |
-
2023
- 2023-01-25 CN CN202380024407.5A patent/CN118786282A/zh active Pending
- 2023-01-25 WO PCT/JP2023/002220 patent/WO2023176157A1/ja unknown
- 2023-02-07 TW TW112104224A patent/TW202338211A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN118786282A (zh) | 2024-10-15 |
| WO2023176157A1 (ja) | 2023-09-21 |
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