TW202337606A - 用於聲光偏轉器(aod)之熱穩定操作的方法和設備 - Google Patents

用於聲光偏轉器(aod)之熱穩定操作的方法和設備 Download PDF

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Publication number
TW202337606A
TW202337606A TW112105353A TW112105353A TW202337606A TW 202337606 A TW202337606 A TW 202337606A TW 112105353 A TW112105353 A TW 112105353A TW 112105353 A TW112105353 A TW 112105353A TW 202337606 A TW202337606 A TW 202337606A
Authority
TW
Taiwan
Prior art keywords
aod
laser
pulse
laser energy
during
Prior art date
Application number
TW112105353A
Other languages
English (en)
Chinese (zh)
Inventor
穆罕默德 阿爾帕伊
傑瑞德 瑞智特爾
泰勒 浩為
劉源
吉野郁世
布萊恩 強漢森
史考特 羅森邦
馬克 昂瑞斯
馬亞姆 卡亞
詹姆斯 布魯克伊塞
派翠克 凱恩
馬修 強斯頓
史蒂夫 密里薩
克里斯 林斯利
德魯 史蒂文斯
Original Assignee
美商伊雷克托科學工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商伊雷克托科學工業股份有限公司 filed Critical 美商伊雷克托科學工業股份有限公司
Publication of TW202337606A publication Critical patent/TW202337606A/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/113—Circuit or control arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1068—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using an acousto-optical device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/22—Function characteristic diffractive

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Laser Beam Processing (AREA)
TW112105353A 2022-02-27 2023-02-15 用於聲光偏轉器(aod)之熱穩定操作的方法和設備 TW202337606A (zh)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US202263314438P 2022-02-27 2022-02-27
US202263314437P 2022-02-27 2022-02-27
US63/314,438 2022-02-27
US63/314,437 2022-02-27
US202263338876P 2022-05-05 2022-05-05
US63/338,876 2022-05-05
US202263417889P 2022-10-20 2022-10-20
US63/417,889 2022-10-20

Publications (1)

Publication Number Publication Date
TW202337606A true TW202337606A (zh) 2023-10-01

Family

ID=87766682

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112105353A TW202337606A (zh) 2022-02-27 2023-02-15 用於聲光偏轉器(aod)之熱穩定操作的方法和設備

Country Status (6)

Country Link
US (1) US20250164831A1 (https=)
EP (1) EP4483240A4 (https=)
JP (1) JP2025508870A (https=)
KR (1) KR20240157670A (https=)
TW (1) TW202337606A (https=)
WO (1) WO2023164390A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5726566B2 (ja) * 2011-02-18 2015-06-03 オリンパス株式会社 ２次元スキャナ、及び、光刺激装置
US9442286B2 (en) * 2011-12-22 2016-09-13 Intel Corporation Spaced configuration of acousto-optic deflectors for laser beam scanning of a semiconductor substrate
US10191268B2 (en) * 2014-10-15 2019-01-29 Inserm (Institute National De La Sante Et De La Recherche Medicale) Method for analyzing a sample with a non-linear microscopy technique and non-linear microscope associated
US11281069B2 (en) * 2017-07-03 2022-03-22 Electro Scientific Industries, Inc. Optically contacted acousto-optic device and method of making the same
US11705686B2 (en) * 2017-09-22 2023-07-18 Electro Scientific Industries, Inc. Acousto-optic system having phase-shifting reflector
TWI892641B (zh) * 2019-01-31 2025-08-01 美商伊雷克托科學工業股份有限公司 光學系統
US12204228B2 (en) * 2019-03-06 2025-01-21 Orbotech Ltd. High-speed dynamic beam shaping

Also Published As

Publication number Publication date
KR20240157670A (ko) 2024-11-01
WO2023164390A1 (en) 2023-08-31
EP4483240A4 (en) 2026-03-18
US20250164831A1 (en) 2025-05-22
JP2025508870A (ja) 2025-04-10
EP4483240A1 (en) 2025-01-01

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