KR20240157670A - Aod의 열적으로 안정적인 작동을 위한 방법 및 장치 - Google Patents

Aod의 열적으로 안정적인 작동을 위한 방법 및 장치 Download PDF

Info

Publication number
KR20240157670A
KR20240157670A KR1020247028602A KR20247028602A KR20240157670A KR 20240157670 A KR20240157670 A KR 20240157670A KR 1020247028602 A KR1020247028602 A KR 1020247028602A KR 20247028602 A KR20247028602 A KR 20247028602A KR 20240157670 A KR20240157670 A KR 20240157670A
Authority
KR
South Korea
Prior art keywords
aod
laser
laser energy
pulse
training
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247028602A
Other languages
English (en)
Korean (ko)
Inventor
메흐메트 알파이
제러드 리히터
타일러 하우
유안 리우
후미요 요시노
브라이언 요한센
스콧 로젠발름
마크 운라트
만얌 카자
제임스 브룩카이저
패트릭 케인
매튜 존스턴
스티브 멜리자
크리스 린즐리
앤드류 스티븐스
Original Assignee
일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 filed Critical 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Publication of KR20240157670A publication Critical patent/KR20240157670A/ko
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/113—Circuit or control arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1068—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using an acousto-optical device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/22—Function characteristic diffractive

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Laser Beam Processing (AREA)
KR1020247028602A 2022-02-27 2023-02-15 Aod의 열적으로 안정적인 작동을 위한 방법 및 장치 Pending KR20240157670A (ko)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US202263314438P 2022-02-27 2022-02-27
US202263314437P 2022-02-27 2022-02-27
US63/314,438 2022-02-27
US63/314,437 2022-02-27
US202263338876P 2022-05-05 2022-05-05
US63/338,876 2022-05-05
US202263417889P 2022-10-20 2022-10-20
US63/417,889 2022-10-20
PCT/US2023/062640 WO2023164390A1 (en) 2022-02-27 2023-02-15 Method and apparatus for thermally stable operation of aods

Publications (1)

Publication Number Publication Date
KR20240157670A true KR20240157670A (ko) 2024-11-01

Family

ID=87766682

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247028602A Pending KR20240157670A (ko) 2022-02-27 2023-02-15 Aod의 열적으로 안정적인 작동을 위한 방법 및 장치

Country Status (6)

Country Link
US (1) US20250164831A1 (https=)
EP (1) EP4483240A4 (https=)
JP (1) JP2025508870A (https=)
KR (1) KR20240157670A (https=)
TW (1) TW202337606A (https=)
WO (1) WO2023164390A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5726566B2 (ja) * 2011-02-18 2015-06-03 オリンパス株式会社 ２次元スキャナ、及び、光刺激装置
US9442286B2 (en) * 2011-12-22 2016-09-13 Intel Corporation Spaced configuration of acousto-optic deflectors for laser beam scanning of a semiconductor substrate
US10191268B2 (en) * 2014-10-15 2019-01-29 Inserm (Institute National De La Sante Et De La Recherche Medicale) Method for analyzing a sample with a non-linear microscopy technique and non-linear microscope associated
US11281069B2 (en) * 2017-07-03 2022-03-22 Electro Scientific Industries, Inc. Optically contacted acousto-optic device and method of making the same
US11705686B2 (en) * 2017-09-22 2023-07-18 Electro Scientific Industries, Inc. Acousto-optic system having phase-shifting reflector
TWI892641B (zh) * 2019-01-31 2025-08-01 美商伊雷克托科學工業股份有限公司 光學系統
US12204228B2 (en) * 2019-03-06 2025-01-21 Orbotech Ltd. High-speed dynamic beam shaping

Also Published As

Publication number Publication date
WO2023164390A1 (en) 2023-08-31
EP4483240A4 (en) 2026-03-18
TW202337606A (zh) 2023-10-01
US20250164831A1 (en) 2025-05-22
JP2025508870A (ja) 2025-04-10
EP4483240A1 (en) 2025-01-01

Similar Documents

Publication Publication Date Title
US11409184B2 (en) Acousto-optic deflector with multiple output beams
US7116688B2 (en) Laser system and method for generation of a pulse sequence with controllable parameters and computer program product
TWI640140B (zh) 利用一氧化碳雷射於印刷電路板中鑽製通孔之技術
JP3633904B2 (ja) Ｘ線発生方法およびｘ線発生装置
JPH06317772A (ja) レーザ表示装置
WO2007119163A2 (en) Apparatus for use in operator training with, and the testing and evaluation of, infrared sensors which are for missile detection
KR20240157670A (ko) Aod의 열적으로 안정적인 작동을 위한 방법 및 장치
US8254015B2 (en) System and method for the spatial tailoring of laser light using temporal phase modulation
US20240017350A1 (en) Laser processing apparatus, methods of operating the same, and methods of processing workpieces using the same
CN118829942A (zh) 用于声光偏转器aod的热稳定操作的方法和设备
US20230420905A1 (en) Apparatus and method for operating acousto- optical deflectors
WO2022164465A1 (en) Laser processing apparatus, methods of operating the same, and methods of processing workpieces using the same
WO2024211097A1 (en) System and method for thermally-stable operation of acousto-optic deflector with reduced acoustic transients
Zaĭchenko et al. Acousto-optical devices in optical communications systems: addressing-related limitations
JP7624843B2 (ja) レーザ加工装置及びレーザ加工方法
TW202432286A (zh) 用於補償雷射加工系統中熱致光束指向誤差的方法及設備
JP2025508870A5 (https=)
US7253933B1 (en) Apparatus and method for the temporal profiling of short laser pulses with thick Bragg gratings
CN121209112A (zh) 光学放大装置及激光器

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

R15-X000 Change to inventor requested

St.27 status event code: A-3-3-R10-R15-oth-X000

R16-X000 Change to inventor recorded

St.27 status event code: A-3-3-R10-R16-oth-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

D13 Search requested

Free format text: ST27 STATUS EVENT CODE: A-1-2-D10-D13-SRH-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000