JP2025508870A - 熱的に安定したａｏｄの動作のための方法及び装置 - Google Patents

熱的に安定したａｏｄの動作のための方法及び装置 Download PDF

Info

Publication number
JP2025508870A
JP2025508870A JP2024550572A JP2024550572A JP2025508870A JP 2025508870 A JP2025508870 A JP 2025508870A JP 2024550572 A JP2024550572 A JP 2024550572A JP 2024550572 A JP2024550572 A JP 2024550572A JP 2025508870 A JP2025508870 A JP 2025508870A
Authority
JP
Japan
Prior art keywords
aod
laser
laser energy
pulse
exercise
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024550572A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025508870A5 (https=
Inventor
アルペイ，メメット
リヒター，ジェレッド
ハウ，テイラー
リウ，ユアン
郁世 吉野
ヨハンセン，ブライアン
ローゼンバウム，スコット
ウンラート，マーク
カヤ，メーニャム
ブルックハイザー，ジェームス
カイン，パトリック
ジョンストン，マシュー
メリザ，スティーブ
リンズレイ，クリス
スティーブンス，アンドリュー
Original Assignee
エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド filed Critical エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
Publication of JP2025508870A publication Critical patent/JP2025508870A/ja
Publication of JP2025508870A5 publication Critical patent/JP2025508870A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/113—Circuit or control arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1068—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using an acousto-optical device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/22—Function characteristic diffractive

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Laser Beam Processing (AREA)
JP2024550572A 2022-02-27 2023-02-15 熱的に安定したａｏｄの動作のための方法及び装置 Pending JP2025508870A (ja)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US202263314438P 2022-02-27 2022-02-27
US202263314437P 2022-02-27 2022-02-27
US63/314,438 2022-02-27
US63/314,437 2022-02-27
US202263338876P 2022-05-05 2022-05-05
US63/338,876 2022-05-05
US202263417889P 2022-10-20 2022-10-20
US63/417,889 2022-10-20
PCT/US2023/062640 WO2023164390A1 (en) 2022-02-27 2023-02-15 Method and apparatus for thermally stable operation of aods

Publications (2)

Publication Number Publication Date
JP2025508870A true JP2025508870A (ja) 2025-04-10
JP2025508870A5 JP2025508870A5 (https=) 2025-12-19

Family

ID=87766682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024550572A Pending JP2025508870A (ja) 2022-02-27 2023-02-15 熱的に安定したａｏｄの動作のための方法及び装置

Country Status (6)

Country Link
US (1) US20250164831A1 (https=)
EP (1) EP4483240A4 (https=)
JP (1) JP2025508870A (https=)
KR (1) KR20240157670A (https=)
TW (1) TW202337606A (https=)
WO (1) WO2023164390A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5726566B2 (ja) * 2011-02-18 2015-06-03 オリンパス株式会社 ２次元スキャナ、及び、光刺激装置
US9442286B2 (en) * 2011-12-22 2016-09-13 Intel Corporation Spaced configuration of acousto-optic deflectors for laser beam scanning of a semiconductor substrate
US10191268B2 (en) * 2014-10-15 2019-01-29 Inserm (Institute National De La Sante Et De La Recherche Medicale) Method for analyzing a sample with a non-linear microscopy technique and non-linear microscope associated
US11281069B2 (en) * 2017-07-03 2022-03-22 Electro Scientific Industries, Inc. Optically contacted acousto-optic device and method of making the same
US11705686B2 (en) * 2017-09-22 2023-07-18 Electro Scientific Industries, Inc. Acousto-optic system having phase-shifting reflector
TWI892641B (zh) * 2019-01-31 2025-08-01 美商伊雷克托科學工業股份有限公司 光學系統
US12204228B2 (en) * 2019-03-06 2025-01-21 Orbotech Ltd. High-speed dynamic beam shaping

Also Published As

Publication number Publication date
KR20240157670A (ko) 2024-11-01
WO2023164390A1 (en) 2023-08-31
EP4483240A4 (en) 2026-03-18
TW202337606A (zh) 2023-10-01
US20250164831A1 (en) 2025-05-22
EP4483240A1 (en) 2025-01-01

Similar Documents

Publication Publication Date Title
JP7003166B2 (ja) 複数の出力ビームを備える音響光学デフレクタ
JP3633904B2 (ja) Ｘ線発生方法およびｘ線発生装置
JP7153641B2 (ja) 光学システムにおける物理的効果の補償
TW201134593A (en) Link processing with high speed beam deflection
JPH06317772A (ja) レーザ表示装置
TW201526435A (zh) 利用一氧化碳雷射於印刷電路板中鑽製通孔之技術
JP3876237B2 (ja) レーザ加工装置
JP2025508870A (ja) 熱的に安定したａｏｄの動作のための方法及び装置
CN118829942A (zh) 用于声光偏转器aod的热稳定操作的方法和设备
WO2022146580A1 (en) Laser processing apparatus, methods of operating the same, and methods of processing workpieces using the same
US8254015B2 (en) System and method for the spatial tailoring of laser light using temporal phase modulation
US20230420905A1 (en) Apparatus and method for operating acousto- optical deflectors
WO2022164465A1 (en) Laser processing apparatus, methods of operating the same, and methods of processing workpieces using the same
WO2024211097A1 (en) System and method for thermally-stable operation of acousto-optic deflector with reduced acoustic transients
JP2026505788A (ja) レーザ加工システムにおいて熱誘起ビームポインティング誤差を補償するための方法及び装置
KR101094319B1 (ko) 레이저 가공장치 및 가공방법
Zaĭchenko et al. Acousto-optical devices in optical communications systems: addressing-related limitations
JP2025508870A5 (https=)
JP7624843B2 (ja) レーザ加工装置及びレーザ加工方法
KR102158106B1 (ko) 레이저 가공 방법

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250129

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20251211

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20251211